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CN1207839C - Universal hollow-structure great-moment ring piezoelectric ultrasonic motor - Google Patents

Universal hollow-structure great-moment ring piezoelectric ultrasonic motor Download PDF

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CN1207839C
CN1207839C CN 02125283 CN02125283A CN1207839C CN 1207839 C CN1207839 C CN 1207839C CN 02125283 CN02125283 CN 02125283 CN 02125283 A CN02125283 A CN 02125283A CN 1207839 C CN1207839 C CN 1207839C
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central shaft
stator
ring
rotor
wavelength
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CN1389973A (en
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褚祥诚
袁松梅
严仁博
李龙土
桂治轮
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Tsinghua University
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Abstract

通用的中空结构大力矩环形压电超声波电机属于压电超声波电机技术领域,其特征在于:定子含有表面带有连续梳状驱动齿的金属环和环形压电陶瓷片;转子含有与定子驱动齿配合的金属环片、碟形弹簧和橡胶垫片;基座含有对中心轴空间定位的标准球轴承和对定子作空间定位的底座;轴的部分含有中空的中心轴,该轴靠近转子一端的轴键,中心轴下部有螺纹处的环形垫圈和预紧螺母;上述陶瓷片反面沿厚度方向极化,每1/2波长反向一次,两组极化区间在空间上差1/4波长或3/4波长,反面接地;正面上两组极化区间分别接相位差为90度的两路交流信号,形成两组驻波,两组驻波合成行波。中心轴上有螺钉孔,用于固定穿过电机中空部分的被执行件。它具有通用性而且最大输出力矩大于5Kgfcm,转速小于120r/min。

Figure 02125283

The general-purpose hollow structure high-torque annular piezoelectric ultrasonic motor belongs to the technical field of piezoelectric ultrasonic motors, and is characterized in that: the stator contains a metal ring with continuous comb-shaped driving teeth on the surface and an annular piezoelectric ceramic sheet; the rotor contains The metal rings, disc springs and rubber gaskets; the base contains standard ball bearings for spatial positioning of the central shaft and the base for spatial positioning of the stator; the shaft part contains a hollow central shaft, which is close to the shaft at one end of the rotor Key, ring washer and pre-tightening nut at the threaded part of the lower part of the central shaft; the reverse side of the above-mentioned ceramic sheet is polarized along the thickness direction, reversed every 1/2 wavelength, and the two sets of polarization intervals have a spatial difference of 1/4 wavelength or 3 /4 wavelength, the reverse side is grounded; the two sets of polarization intervals on the front side are respectively connected to two AC signals with a phase difference of 90 degrees, forming two sets of standing waves, and the two sets of standing waves are combined into traveling waves. There are screw holes on the central shaft, which are used to fix the executed part passing through the hollow part of the motor. It is versatile and the maximum output torque is greater than 5Kgfcm, and the speed is less than 120r/min.

Figure 02125283

Description

通用的中空结构大力矩环形压电超声波电机Universal Hollow Structure High Torque Ring Piezoelectric Ultrasonic Motor

技术领域technical field

通用的中空结构大力矩环形压电超声波电机属于压电超声波电机技术领域。The utility model relates to a general-purpose hollow-structure large-torque annular piezoelectric ultrasonic motor, which belongs to the technical field of piezoelectric ultrasonic motors.

背景技术Background technique

压电超声波电机由于自身响应速度快、断电自锁、无电磁扰动、低速运转等特点,作为精密仪器的驱动元件有着十分广泛的应用。国外的环形压电电机主要有两种:一种是因为采用环形结构的压电陶瓷片,而称为环形压电电机,但它不具备结构中空的特点。图1是日本Sashida,Matsushita和Canon公司开发的环形压电超声波电机的结构,它主要包括转子11、摩擦材料12、定子13和压电陶瓷环片14。定子的固定方式均采用在压电陶瓷片的下面垫上一层软的橡胶片。因而很难对定、转子间提供足够的预紧力,当外径为60mm时,电机的最大输出力矩一般在1Kgfcm左右。图2是Shinsei公司开发的环形压电超声波电机的结构,它主要包括转子20、定子21、轴22、预紧调整机构23、基座24和外壳25。其中,预紧调整机构23包括弹性碟片230、橡胶垫片231、调整垫片232和轴用预紧螺母233。转子20包括金属板201和摩擦材料202。定子21由铣有齿2110的金属圆板211、环形陶瓷片212组成。基座除了基座本身以外,还有轴套241和轴承242。其定子21多采用在定子圆板211的内周用螺钉或其它刚性简支的方式固定,比较适合加比较大的轴向预紧力,为获得大的输出力矩提供了可能,当外径约60mm时,电机的最大输出力矩一般在6Kgfcm左右,但这种环形压电电机的结构是非中空的。国外另外一种是专门为照相机配套使用的环形压电电机,其结构具有中空的特点,供光从中间通过,但电机本身的设计不是基于通用产品的,它的基座、调整件等都是与相机镜头配合使用的,不具有通用性,其最大输出力矩也不大。因而它不具备通用性和大力矩的特点。Piezoelectric ultrasonic motors are widely used as driving components of precision instruments due to their fast response speed, self-locking when power is off, no electromagnetic disturbance, and low-speed operation. There are two main types of ring piezoelectric motors in foreign countries: one is called ring piezoelectric motor because of the piezoelectric ceramic sheet with ring structure, but it does not have the characteristics of hollow structure. Fig. 1 is the structure of the annular piezoelectric ultrasonic motor developed by Japan Sashida, Matsushita and Canon, which mainly includes a rotor 11, a friction material 12, a stator 13 and a piezoelectric ceramic ring piece 14. The fixing methods of the stators all adopt a layer of soft rubber sheet under the piezoelectric ceramic sheet. Therefore, it is difficult to provide sufficient pre-tightening force between the stator and the rotor. When the outer diameter is 60mm, the maximum output torque of the motor is generally around 1Kgfcm. FIG. 2 shows the structure of the annular piezoelectric ultrasonic motor developed by Shinsei, which mainly includes a rotor 20 , a stator 21 , a shaft 22 , a preload adjustment mechanism 23 , a base 24 and a casing 25 . Wherein, the preload adjustment mechanism 23 includes an elastic disc 230 , a rubber washer 231 , an adjustment washer 232 and a shaft preload nut 233 . The rotor 20 includes a metal plate 201 and a friction material 202 . The stator 21 is composed of a metal disc 211 milled with teeth 2110 and an annular ceramic sheet 212 . In addition to the base itself, the base also has a shaft sleeve 241 and a bearing 242 . The stator 21 is mostly fixed on the inner circumference of the stator disc 211 with screws or other rigid simply supported methods, which is more suitable for adding a relatively large axial preload and provides the possibility to obtain a large output torque. When the outer diameter is about When the diameter is 60mm, the maximum output torque of the motor is generally around 6Kgfcm, but the structure of this ring piezoelectric motor is not hollow. The other abroad is the annular piezoelectric motor specially used for cameras. Its structure has the characteristics of hollow, and the light passes through the middle. However, the design of the motor itself is not based on general-purpose products. Its base and adjustment parts are all Used in conjunction with the camera lens, it is not universal, and its maximum output torque is not large. Thereby it does not possess the characteristics of versatility and high torque.

发明内容Contents of the invention

本发明的目的在于提供一种通用的中空结构大力矩压电超声波电机以供精密机械中作驱动元件使用。The object of the present invention is to provide a general hollow structure large torque piezoelectric ultrasonic motor for use as a driving element in precision machinery.

本发明的特征在于,它含有:定子,包括表面带有连续梳状驱动齿的金属环和连接于该金属环底部的环形压电陶瓷片;转子,包括底面与上述定子驱动齿配合的金属环片,碟形弹簧和位于该金属环片上端面且受压于该碟形弹簧的橡胶垫片;基座,包括对输出轴空间定位的标准球轴承和用内孔对上述定子进行空间定位的基座;输出轴,包括中空的中心轴,该中心轴靠近转子一端的轴键,靠近中心轴下端有螺纹处的环形垫圈和预紧螺母;上述环形压电陶瓷片反面沿厚度方向极化,每半个波长反向一次,该压电陶瓷的极化区间分成二组,二组之间空间相差1/4波长或3/4波长,该压电陶瓷的反面为统一接地电极,其正面上,在压电陶瓷片的两组极化区间分别接相位差为90度的两路交流信号。在所述中心轴的上端靠近转子处有固定穿过电机中空部分的被执行件的螺孔。在所述中心轴的上端靠近碟形弹簧处有压紧碟形弹簧用的法兰盘。The present invention is characterized in that it contains: a stator, including a metal ring with continuous comb-shaped driving teeth on the surface and an annular piezoelectric ceramic sheet connected to the bottom of the metal ring; a rotor, including a metal ring whose bottom surface cooperates with the above-mentioned stator driving teeth Disc springs and rubber gaskets located on the upper end of the metal ring and pressed against the disc springs; base, including standard ball bearings for spatial positioning of the output shaft and bases for spatial positioning of the above-mentioned stator with inner holes Seat; output shaft, including a hollow central shaft, the central shaft is close to the shaft key at one end of the rotor, the ring washer and the pre-tightening nut at the threaded part near the lower end of the central shaft; the reverse side of the above-mentioned annular piezoelectric ceramic sheet is polarized along the thickness direction, each Half the wavelength is reversed once, the polarization interval of the piezoelectric ceramic is divided into two groups, the space difference between the two groups is 1/4 wavelength or 3/4 wavelength, the reverse side of the piezoelectric ceramic is a unified ground electrode, and Two AC signals with a phase difference of 90 degrees are respectively connected to the two groups of polarization intervals of the piezoelectric ceramic sheet. On the upper end of the central shaft close to the rotor, there is a screw hole for fixing the executed part passing through the hollow part of the motor. There is a flange for compressing the disc spring at the upper end of the central shaft near the disc spring.

使用证明它达到了预期目的。Use proves that it serves its intended purpose.

附图说明Description of drawings

图1已有环形压电超声波电机的结构示意图一。Fig. 1 is a structural schematic diagram of an existing annular piezoelectric ultrasonic motor.

图2已有环形压电超声波电机的结构示意图二。Fig. 2 is the structural schematic diagram II of the existing annular piezoelectric ultrasonic motor.

图3本发明实施例的中空环形压电超声波电机的结构示意图。Fig. 3 is a schematic structural diagram of a hollow annular piezoelectric ultrasonic motor according to an embodiment of the present invention.

图4本发明实施例的中空环形压电超声波电机定子的结构示意图。Fig. 4 is a schematic structural view of the stator of the hollow annular piezoelectric ultrasonic motor according to the embodiment of the present invention.

图5本发明实施例的环形压电陶瓷片的极化分布示意图;a,正面;b,反面。Fig. 5 is a schematic diagram of the polarization distribution of the annular piezoelectric ceramic sheet according to the embodiment of the present invention; a, front side; b, back side.

图6本发明实施例的中空环形压电超声波电机定子的实际振动测试结果。Fig. 6 is the actual vibration test result of the stator of the hollow annular piezoelectric ultrasonic motor according to the embodiment of the present invention.

图7本发明实施例的中空环形压电超声波电机的照片。Fig. 7 is a photo of the hollow ring piezoelectric ultrasonic motor of the embodiment of the present invention.

具体实施方式Detailed ways

请见图3~图5。Please see Figure 3 to Figure 5.

图3是本实施例的总体结构。它由转子部分30、定子部分31、基座部分32、轴部分33组成。其中,定子部分31是由带有梳状驱动齿310的金属环313和环形压电陶瓷片314构成,环形压电陶瓷片314通过环氧树脂胶粘接在金属环313的底部;基座部分32有一个带有固定螺孔3210的基座321,它的内壁有一标准球轴承320用于对中心轴33定位;转子30由碟形弹簧300、橡胶片301和金属环片302组成,橡胶片301和金属环片302用环氧树脂胶粘接,在碟形弹簧300的作用下,金属环片302紧密地与定子驱动齿310配合,使转子部分30和定子部分31紧密接触;轴33包括:靠近转子30一侧的轴键331、靠近中空的中心轴330下端的螺纹3301处的环形垫圈332和预紧螺母333,中心轴330的靠近转子30一侧还分布有4个螺钉孔3300和一个法兰盘3302,螺钉孔3300的作用是固定穿过电机中空部分的被执行件。法兰盘3302的作用是压紧碟形弹簧300。电机的输出力矩通过转子30中的金属环片302、橡胶环片301、碟形弹簧300传给中心轴330,再通过螺钉孔3300中的螺钉传给被执行件。Fig. 3 is the general structure of this embodiment. It consists of a rotor part 30 , a stator part 31 , a base part 32 and a shaft part 33 . Wherein, the stator part 31 is composed of a metal ring 313 with comb-shaped driving teeth 310 and an annular piezoelectric ceramic sheet 314, and the annular piezoelectric ceramic sheet 314 is bonded to the bottom of the metal ring 313 by epoxy resin glue; the base part 32 has a base 321 with a fixed screw hole 3210, and its inner wall has a standard ball bearing 320 for positioning the central shaft 33; the rotor 30 is made up of a disc spring 300, a rubber sheet 301 and a metal ring sheet 302, and the rubber sheet 301 and the metal ring piece 302 are bonded with epoxy resin, and under the action of the disc spring 300, the metal ring piece 302 closely cooperates with the stator driving teeth 310, so that the rotor part 30 and the stator part 31 are in close contact; the shaft 33 includes : a shaft key 331 near the rotor 30, an annular washer 332 and a preload nut 333 near the thread 3301 at the lower end of the hollow central shaft 330, and four screw holes 3300 and A flange 3302, the function of the screw hole 3300 is to fix the executed part passing through the hollow part of the motor. The function of the flange 3302 is to compress the disc spring 300 . The output torque of the motor is transmitted to the central shaft 330 through the metal ring 302 in the rotor 30 , the rubber ring 301 , and the disk spring 300 , and then to the executed part through the screws in the screw holes 3300 .

图4是其定子结构。定子31主要由环形压电陶瓷片314和中间减薄的金属环313组成,两者用环氧树脂胶连接。在定子31的内圈有一个凸台312,它坐在基座321的内孔中,起到对压电电机的定子31定位的作用。定子31的外缘有梳状齿结构310,其作用是放大定子31的振幅。在金属环片313的减薄处有光孔311,其中,有一个光孔需要用螺钉固定驱动电源的地线,有一个光孔通过圆柱定位销与基座321之间实现圆周固定。Figure 4 is its stator structure. The stator 31 is mainly composed of an annular piezoelectric ceramic sheet 314 and a thinned metal ring 313 in the middle, and the two are connected with epoxy resin glue. There is a boss 312 on the inner ring of the stator 31, which sits in the inner hole of the base 321 and plays a role in positioning the stator 31 of the piezoelectric motor. The outer edge of the stator 31 has a comb-shaped tooth structure 310 , whose function is to amplify the vibration amplitude of the stator 31 . There are light holes 311 at the thinned part of the metal ring 313 , one of which needs to be screwed to fix the ground wire of the driving power supply, and the other light hole needs to be fixed circumferentially between the cylindrical positioning pin and the base 321 .

压电陶瓷环片314正面和反面的分区如图5所示。正面有两个时间相位差90度的电信号SIN和COS的输入端,还有反映振动状态的电信号反馈端。压电陶瓷片314反面的正负符号代表了相应陶瓷区的极化方向,压电陶瓷环片314沿厚度方向极化,每半个波长反向一次。压电陶瓷片314的极化区间分成两组,两组之间空间相差1/4波长或3/4波长。该压电陶瓷314的反面为统一接地电极,其正面上,在压电陶瓷片的两组极化区间分别接相位差为90度的两路交流信号。压电陶瓷片314的反面与金属环313相粘接。The partitions of the front and back of the piezoelectric ceramic ring piece 314 are shown in FIG. 5 . On the front, there are two input terminals of electrical signals SIN and COS with a time phase difference of 90 degrees, and an electrical signal feedback terminal reflecting the vibration state. The positive and negative signs on the reverse side of the piezoelectric ceramic sheet 314 represent the polarization direction of the corresponding ceramic region, and the piezoelectric ceramic ring sheet 314 is polarized along the thickness direction, and reverses every half wavelength. The polarization range of the piezoelectric ceramic sheet 314 is divided into two groups, and the spatial difference between the two groups is 1/4 wavelength or 3/4 wavelength. The reverse side of the piezoelectric ceramic 314 is a unified ground electrode, and on the front side, two AC signals with a phase difference of 90 degrees are respectively connected to two groups of polarization intervals of the piezoelectric ceramic sheet. The reverse side of the piezoelectric ceramic sheet 314 is bonded to the metal ring 313 .

本实施例的定子的振动测试结果示意图见图6。该图像是激光多普勒的测试结果,一深一潜两者颜色分别代表沿定子厚度方向的正反振动。这一图像是其中一路SIN或COS在压电电机的定子31上形成的一列驻波,当同样的另一列空间位置相差1/4波长的驻波也在定子上形成,就会形成可以实现驱动的行波。相应的中空环形压电超声波电机的照片如图7所示。A schematic diagram of the vibration test results of the stator of this embodiment is shown in FIG. 6 . This image is the test result of laser Doppler, and the two colors of one deep and one submerged respectively represent positive and negative vibrations along the thickness direction of the stator. This image is a series of standing waves formed by one of the SIN or COS on the stator 31 of the piezoelectric motor. When the same standing wave of another column with a spatial position difference of 1/4 wavelength is also formed on the stator, it will form a drive that can be realized. traveling wave. A photo of the corresponding hollow ring piezoelectric ultrasonic motor is shown in Fig. 7.

本实施例的中空结构环形压电超声波电机其主要性能参数如下:外形为圆饼状,定子直径62mm,电机主体厚度20mm,电机内部中空直径20mm,轴长55mm,直径25mm,工作频率在33kHz(8个波长)和40kHz(9个波长)两种情况下均可以正反双向旋转,电机运动方式步进和连续转动均可,转速小于120r/min,最大力矩大于5kgfcm。Its main performance parameters of the hollow structure annular piezoelectric ultrasonic motor of the present embodiment are as follows: the shape is round cake shape, the diameter of the stator is 62 mm, the thickness of the motor body is 20 mm, the internal hollow diameter of the motor is 20 mm, the shaft length is 55 mm, the diameter is 25 mm, and the operating frequency is 33 kHz ( 8 wavelengths) and 40kHz (9 wavelengths) can rotate both forward and reverse directions, the motor movement mode can be stepping and continuous rotation, the speed is less than 120r/min, and the maximum torque is greater than 5kgfcm.

Claims (3)

1, general hollow structure great-moment ring piezoelectric ultrasonic motor, comprise rotor, stator, base part and output shaft, it is characterized in that it contains: stator comprises that the surface has the becket of continuous pectination driving gear and is connected in the ring piezoelectric potsherd of this becket bottom; Rotor comprises the metal ring plate that the bottom surface cooperates with the said stator driving gear, disk spring and be positioned at this metal ring plate upper surface and pressurized in the rubber sheet gasket of this disk spring; Base part comprises to the sterically defined standard ball bearing of output shaft with endoporus said stator is carried out sterically defined pedestal; Output shaft comprises the central shaft of hollow, and this central shaft has the ring washer and the pre-load nut at screw thread place near the axle key of rotor one end near the central shaft lower end; Above-mentioned ring piezoelectric potsherd polarizes along thickness direction, every half wavelength oppositely once, be divided into two groups between the polarized area of this piezoelectric ceramic, the space differs 1/4 wavelength or 3/4 wavelength between two groups, the reverse side of this piezoelectric ceramic is unified grounding electrode, on its front, connecing phase difference between two groups of polarized areas of piezoelectric ceramic piece respectively is the two-way AC signal of 90 degree.
2, general hollow structure great-moment ring piezoelectric ultrasonic motor according to claim 1 is characterized in that: there is the screw hole that is performed part that fixedly passes the motor hollow space upper end at described central shaft near the rotor place.
3, general hollow structure great-moment ring piezoelectric ultrasonic motor according to claim 1 is characterized in that: have near the disk spring place in the upper end of described central shaft to compress the ring flange that disk spring is used.
CN 02125283 2002-07-31 2002-07-31 Universal hollow-structure great-moment ring piezoelectric ultrasonic motor Expired - Fee Related CN1207839C (en)

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CN103051243B (en) * 2013-01-11 2015-01-28 南京航空航天大学 Hollow ultrasonic motor with built-in vibrating ring
CN103986366B (en) * 2014-06-04 2016-04-20 南京航空航天大学 The hollow ultrasonic motor that stator floats
CN111049424B (en) * 2019-12-24 2023-10-24 上海交通大学 Piezoelectric speed-regulating motor and driving control method thereof

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