CN1297068C - Micro electromechanical system based unidirectional stepping reverse self-locking electromagnetic driver - Google Patents
Micro electromechanical system based unidirectional stepping reverse self-locking electromagnetic driver Download PDFInfo
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- CN1297068C CN1297068C CNB200410015989XA CN200410015989A CN1297068C CN 1297068 C CN1297068 C CN 1297068C CN B200410015989X A CNB200410015989X A CN B200410015989XA CN 200410015989 A CN200410015989 A CN 200410015989A CN 1297068 C CN1297068 C CN 1297068C
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Abstract
The present invention relates to a unidirectional stepping reverse self-locking electromagnetic driver based on a micro electromechanical system, which belongs to the technical field of a micro electromechanical system and a safety device. The present invention comprises stators, a hard-magnet soft-magnet mixing rotor, a mechanical energy accumulator, a rotation shaft and a casing, wherein the hard-magnet soft-magnet mixing rotor is arranged on the rotation shaft arranged on a bearing of the stators; a pad is arranged on the rotation shaft connected with the stators through the bearing; the mechanical energy accumulator is connected with the rotation shaft; the two stators and the mechanical energy accumulator are arranged on the casing of an electromagnetic actuator; the pole number of the hard-magnet soft-magnet mixing rotor is same with the pole number of the two rotors. The present invention can conveniently realize unidirectional stepping reverse self locking and is especially suitable for the adoption of the processing technology of the micro electromechanical system; the present invention has the advantages of simple structure, large output torque, small size and bulk production, and consequently the cost is reduced.
Description
Technical field
The present invention relates to a kind of electromagnetic driver, specifically is a kind of electromagnetic driver of the reverse self-locking of unidirectional stepping based on MEMS (micro electro mechanical system).Belong to the micro-electro-mechanical systems safety locking motion field that unifies.
Background technology
At present common electromagnetic type step actuator all is two-way, and requires motion irreversible in the security insurance of special occasions such as finance, critical medical devices, and then requires the electromagnetic type step actuator can only one-way movement, reverse self-locking.
Find by literature search, the Chinese patent publication number is: the patent of CN 1135677A, a kind of millimeter-grade electromagnetic type electrical micro-machine that belongs to the MEMS (micro electro mechanical system) field has been described in this patent, this motor is single stator single rotor structure, and this electromagnetic motor can not be realized the function of the reverse self-locking of unidirectional stepping.Though have the small advantage of size, what be difficult to satisfy important system requires motion stepping and irreversible requirement.Because the safety locking motion of important system requires the certain load of driven by motor, the moment output of this motor is too small.
Summary of the invention
The present invention is directed to the limitation of prior art in the important safety applications, a kind of electromagnetic driver of the reverse self-locking of unidirectional stepping based on MEMS (micro electro mechanical system) is provided, achieve the reverse self-locking of unidirectional stepping, and it is simple in structure, output torque is big, owing to adopt the MEMS (micro electro mechanical system) process technology, size is little, can produce in batches, thereby reduce cost.
The present invention is achieved by the following technical solutions, the present invention includes: stator, the hard magnet soft magnet mixed rotor, mechanical energy storage device, rotating shaft and shell, its connected mode is: the hard magnet soft magnet mixed rotor is installed in the rotating shaft, rotating shaft is installed on the bearing of stator, pad is installed in rotating shaft, rotating shaft links to each other by bearing with stator, the mechanical energy storage device links to each other with rotating shaft, two stators and mechanical energy storage device are arranged on the shell of electromagnetic driver, and hard magnet soft magnet mixed rotor number of poles is identical with two stator poles.
Coil windings energising in the stator, the hard magnet soft magnet mixed rotor turns over an angle, by the mechanical energy storage device part electromagnetic energy is become mechanical energy simultaneously, before electromagnetic action nearly finishes then, the mechanical energy that the mechanical energy storage device stores discharges, promote the hard magnet soft magnet mixed rotor and continue to turn over an angle, thereby finish a complete step motion, at this moment mechanical energy storage device self-locking device backward hold and anchor drive rotating shaft position.By the mutual conversion of electromagnetic energy and mechanical energy, can realize a series of unidirectional step motions.
Stator of the present invention, hard magnet soft magnet mixed rotor number of poles are identical, and hard magnet soft magnet mixed rotor magnetic pole is corresponding one by one with the magnetic pole that the stator exciting curent produces, the location backward hold effect of mechanical energy storage device in addition, and the stepping angle is easy to control.The tooth profile parameter of the energy storage dish of the big I of stepping angle simultaneously, by changing the number of poles of deciding the hard magnet soft magnet mixed rotor and mechanical energy storage device is conveniently realized.
The hard magnet soft magnet mixed rotor is provided with three-decker, and the middle level disk adopts the high magnetic permeability soft magnetic material, has non-wholecircle hole in the middle of the disk, and the disk two sides is provided with the magnet steel of high energy product hard magnetic material.The sheet number of magnet steel equals 360 ° and rounds divided by step angle.Magnet steel is evenly arranged around circle disk center.This version can effectively reduce the influence of leakage field, increases rotating torque.
Stator winding adopts the trapezoidal multi-turn multiple layer of copper of plane class structure, this stator coil is imported electric current by independent trace layer, adopt the terminal point of bottom coil to link to each other between adjacent layer and the layer with the starting point of upper coil, the magnetic flux that same electric current produces is more, is particularly suitable for the manufacturing of MEMS Micrometer-Nanometer Processing Technology.Comprise the magnetic core that is made of the high magnetic permeability soft magnetic material in every layer of stator winding, these magnetic cores are designed to a plurality of block structures, can effectively prevent the generation of eddy current, play magnetic collecting effect simultaneously.
The mechanical energy storage device comprises: energy-stored spring, energy storage rod guide, a head are circular-arc energy storage bar and periphery and are covered with the asymmetric energy storage dish that can locate the lance tooth of reverse self-locking, the energy storage dish links to each other with the energy storage bar by triangle flute profile structure, the end of energy storage bar is provided with energy-stored spring, energy-stored spring links to each other with the energy storage rod guide, and the energy storage rod guide links to each other with housing.
The periphery of energy storage dish periodically is provided with non-circular hole, and it has constituted the part of asymmetric lance tooth, is provided with the lance tooth summit along the disc radius direction outwardly, and the cycle angle of energy storage dish periphery periodic structure is set to the θ angle, and half of cycle angle is set to θ
1The angle, little of two angles that lance tooth summit and non-circular hole center line are set is angle θ
2The angle.One end of energy storage bar is provided with the circular arc head.In the assembling process, energy storage bar center line is vertical with the breach limit of energy storage dish non-circular hole, and the cycle angle of energy storage dish flute profile equals the step angle of electromagnetic driver for the θ angle.The triangle tooth top bias angle theta of energy storage dish
2The angle is less than half of the cycle angle of energy storage dish flute profile, i.e. θ
1The angle can guarantee that like this before the electromagnetism motive force was ineffective, the circular arc head of energy storage bar was crossed the flute profile summit, and the mechanical energy that energy-stored spring stores discharges, and then promotes the energy storage dish and be rotated further, and finishes a complete step motion step.The energy storage dish is provided with backward hold limit and arc groove, and after stepping step finished, the circular arc head of energy storage bar abutted against in the arc groove under the spring force effect, one side the abutting against on the backward hold limit of energy storage bar.During assembling, the center line of the center line of energy storage dish arc groove and stator one utmost point winding is on same vertical plane.This is the initial zero-bit of whole system.
Lance tooth is the shape of a particular design, when electromagnetic force is had an effect, lance tooth energy storage limit contacts with the circular-arc head of energy storage bar, promote energy storage bar compressed energy-storage spring, finish electromagnetic energy to mechanical conversion of energy, when the energy storage bar surpassed the tooth top of lance tooth, mechanical energy began to discharge, energy storage bar circular arc head promotes lance tooth and releases the energy limit, drives rotating shaft and finishes a complete step motion.After step motion was finished, the energy storage bar descended and also to be pressed in the arc-shaped slot of energy storage dish, and with the energy storage dish from lock seaming near, realize location and self-locking.The asymmetric design of lance tooth can guarantee that mechanical energy plays a role before electromagnetic action finishes, and the direction the when direction that rotating shaft is rotated when guaranteeing mechanical energy release spurs with electromagnetism is identical.
Rotating shaft is provided with the first non-wholecircle shaft part, second non-wholecircle shaft part, step cutting pattern and the wholecircle shaft part.The first non-wholecircle shaft part links to each other with the second non-wholecircle shaft part, and the second non-wholecircle shaft part links to each other with step cutting pattern, and step cutting pattern links to each other with the wholecircle shaft part.But the initial zero-bit of this structure convenient electromagnetic driver is aimed at, and is convenient for assembly.
The present invention is based on the electromagnetic driver of the reverse self-locking of unidirectional stepping of MEMS (micro electro mechanical system), can realize the reverse self-locking of unidirectional stepping easily, and simple in structure, output torque is big, is fit to very much adopt the MEMS (micro electro mechanical system) process technology, and size is little, can produce in batches, thereby reduce cost.
Description of drawings
Fig. 1 structural representation of the present invention
Fig. 2 mechanical energy storage device of the present invention schematic diagram
Fig. 3 hard magnet soft magnet mixed rotor of the present invention structural representation
Fig. 4 stator structure schematic diagram of the present invention
Fig. 5 the present invention has the multidiameter structural representation of non-wholecircle structure
A coil windings lead riser of Fig. 6 the present invention schematic diagram
Fig. 7 ground floor coil windings of the present invention cabling and lead riser schematic diagram
Fig. 8 second layer coil windings of the present invention cabling and lead riser schematic diagram
Fig. 9 the present invention the 3rd layer line circle winding cabling and lead riser schematic diagram
Figure 10 the present invention the 4th layer line circle winding cabling and lead riser schematic diagram
Embodiment
As shown in Figure 1, the present invention includes: first stator 1, second stator 3, hard magnet soft magnet mixed rotor 2, mechanical energy storage device 5, rotating shaft 6 and shell 4, its connected mode is: hard magnet soft magnet mixed rotor 2 is installed in the rotating shaft 6, the rotating shaft 6 and first stator 1, second stator 3 links to each other by bearing, in rotating shaft 6, be provided with pad, rotating shaft 6 links to each other by bearing with second stator 3, mechanical energy storage device 5 links to each other with rotating shaft 6, first stator 1, second stator 3 and mechanical energy storage device 5 are arranged on the shell 4 of electromagnetic driver, hard magnet soft magnet mixed rotor 2 numbers of poles and first stator 1, second stator, 3 numbers of poles are identical.
As shown in Figure 2, be the structural representation of mechanical energy storage device 5, it is the energy storage dish 17 that circular-arc energy storage bar 14 and periphery be covered with asymmetric lance tooth that can the reverse self-locking in location by energy-stored spring 12, energy storage rod guide 13, head and is assembled.The periphery of energy storage dish 17 periodically is provided with non-circular hole 19, it has constituted the part of asymmetric lance tooth, lance tooth summit 16 is set along the disc radius direction outwardly, the cycle angle of energy storage dish periphery periodic structure is set to θ angle 10, and half of cycle angle is set to θ
1Angle 9, little of two angles that lance tooth summit 16 and non-circular hole 19 center lines are set is angle θ
2Angle 8.One end of energy storage bar 14 is provided with circular arc head 15.In the assembling process, energy storage bar 14 center lines are vertical with the breach limit of energy storage dish 17 non-circular holes 19, and the cycle angle of energy storage dish 17 flute profiles is the step angle that θ angle 10 equals electromagnetic driver.The triangle tooth top bias angle theta of energy storage dish 17
2Angle 8 is less than half of the cycle angle of energy storage dish 17 flute profiles, i.e. θ
1Angle 9, the circular arc head 15 of energy storage bar 14 is crossed flute profile summit 16, and the mechanical energy that energy-stored spring 12 stores discharges, and then promotes energy storage dish 17 and be rotated further, and finishes a complete step motion step.Energy storage dish 17 is provided with backward hold limit 7 and arc groove 18, after a stepping goes on foot and finishes, the circular arc head 15 of energy storage bar 14 abuts against in the arc groove 18 under the spring force effect, one side of energy storage bar 14 abuts against on the backward hold limit 7, energy-stored spring 12 links to each other with energy storage rod guide 13, and energy storage rod guide 13 links to each other with housing 4.
As shown in Figure 3, hard magnet soft magnet mixed rotor 2 is provided with three-decker, and middle level disk 21 adopts the high magnetic permeability soft magnetic material, has non-wholecircle hole 23 in the middle of the disk, and disk 21 two sides are provided with the magnet steel 22 of high energy product hard magnetic material.The sheet number of magnet steel 22 equals 360 ° and rounds divided by step angle.Magnet steel 22 is evenly arranged around disk 21 centers of circle.
As shown in Figure 4, winding 24 that a plurality of multilayer multi-turn planar coils form and the lead-out wire layer of arranging lead-out wires of coil 25 are set on first stator 1, second stator 3, in coil windings 24, arrange the magnetic core 26 that constitutes by high-permeability material that is divided into fritter.The number of coil windings 24 equals 360 ° and rounds divided by step angle.Magnetic core 26 is divided into bulk.
As shown in Figure 5, rotating shaft 6 is provided with first non-wholecircle shaft part 29, second non-wholecircle shaft part 30, step cutting pattern 31 and the wholecircle shaft part 32.The first non-wholecircle shaft part 29 links to each other with the second non-wholecircle shaft part 30, and the second non-wholecircle shaft part 30 links to each other with step cutting pattern 31, and step cutting pattern 31 links to each other with wholecircle shaft part 32.
Provided the special cabling mode of coil windings 24 as Fig. 6, Fig. 7, Fig. 8, Fig. 9, Figure 10.Coil windings 24 is to be linked to each other by four planar coils to form.Coil windings 24 is provided with four tap positions, is respectively the first tap position 33, the second tap position 34, the 3rd tap position 35, the 4th tap position 36.From plane winding 24 vertical direction, first tap 37, the 5th tap 41, the 7th tap 43 are in the first tap position 33, second tap 38, the 3rd tap 39 are in 34, the four taps 40 of the second tap position, the 6th tap 42 is in 35, the eight taps 44 of the 3rd tap position and is in the 4th tap position 36.Coil 24 is arranged in four layers by special cabling mode.In ground floor, coil is pressed class trapezoidal shape cabling up to ground floor coil second tap 38 from inner ring to the outer ring by first tap 37 of ground floor coil, ground floor coil tap the 2 38 is connected to the 3rd tap 39 of second layer coil by binding post, with the 3rd tap 39 of second layer coil is starting point, with the 4th tap 40 of second layer coil is terminal point, according to the direction of routing identical with the ground floor coil from the outer ring to the inner ring cabling, then, the 4th tap 40 of second layer coil is connected to the 6th tap 42 of the 3rd layer line circle by binding post, with the 6th tap 42 of the 3rd layer line circle is starting point, with the 5th tap 41 of the 3rd layer line circle is terminal point, according to the direction of routing identical with the ground floor coil from inner ring to the outer ring cabling, at last, the 5th tap 41 of the 3rd layer line circle is connected to the 7th tap 43 of the 4th layer line circle by binding post, with the 7th tap 43 of the 4th layer line circle is starting point, is terminal point with the 8th tap 44 of the 4th layer line circle, according to the direction of routing identical with the ground floor coil from the outer ring to the inner ring cabling.First tap 37 of ground floor coil and the 8th tap 44 of the 4th layer line circle are respectively the starting point and the terminal point of whole winding winding 24, and they arrive trace layer by the vertical leads post and link to each other with lead-out wires of coil 25, can apply electric current easily.The same electric current of this multilayer multi-turn structure can produce bigger driving moment, and is convenient to very much the MEMS (micro electro mechanical system) microfabrication and realizes.
In whole assembling process, the center line 11 of energy storage dish arc groove and the center line 27 of stator winding coil 24 are on same vertical plane.This is the initial zero-bit of whole system.
Claims (5)
1, a kind of electromagnetic driver of the reverse self-locking of unidirectional stepping based on MEMS (micro electro mechanical system), comprise: first stator (1), second stator (3), hard magnet soft magnet mixed rotor (2), rotating shaft (6) and shell (4), it is characterized in that also comprising: second stator (3), mechanical energy storage device (5), its connected mode is: hard magnet soft magnet mixed rotor (2) is installed in the rotating shaft (6), rotating shaft (6) and first stator (1), second stator (3) links to each other by bearing, in rotating shaft (6), be provided with pad, rotating shaft (6) links to each other by bearing with second stator (3), mechanical energy storage device (5) links to each other with rotating shaft (6), first stator (1), second stator (3) and mechanical energy storage device (5) are arranged on the shell (4) of electromagnetic driver, hard magnet soft magnet mixed rotor (2) number of poles and first stator (1), second stator (3) number of poles is identical, mechanical energy storage device (5) is by energy-stored spring (12), energy storage rod guide (13), head is the energy storage dish (17) that circular-arc energy storage bar (14) and periphery be covered with asymmetric lance tooth that can the reverse self-locking in location and is assembled, energy storage rod guide (17) links to each other with shell (4), energy storage rod guide (17) links to each other with energy storage bar (12) by cavity simultaneously, the periphery of energy storage dish (17) periodically is provided with non-circular hole (19), it has constituted the part of asymmetric lance tooth, be provided with lance tooth summit (16) outwardly along the disc radius direction, one end of energy storage bar (14) is provided with circular arc head (15), the circular arc head (15) of energy storage bar (14) is crossed flute profile summit (16), the mechanical energy that energy-stored spring (12) stores discharges, and then promotion energy storage dish (17) is rotated further, finish a complete step motion step, energy storage dish (17) is provided with backward hold limit (7) and arc groove (18), after a stepping goes on foot and finishes, the circular arc head (15) of energy storage bar (14) abuts against under the spring force effect in the arc groove (18), energy storage bar (14) one side abut against on the backward hold limit (7); The cycle angle of the peripheral periodic structure of energy storage dish (17) is θ angle (10), and half of cycle angle is θ
1Angle (9), little one of two angles of lance tooth summit (16) and non-circular hole (19) center line is θ
2Angle (8), in the assembling process, energy storage bar (14) center line is vertical with the breach limit of energy storage dish (17) non-circular hole (19), and the cycle angle of energy storage dish (17) flute profile is the step angle that θ angle (10) equals electromagnetic driver, the triangle tooth top bias angle theta of energy storage dish (17)
2Angle (8) is less than half of the cycle angle of energy storage dish (17) flute profile, i.e. θ
1Angle (9), hard magnet soft magnet mixed rotor (2) is provided with three-decker, middle level disk (21) adopts the high magnetic permeability soft magnetic material, have non-wholecircle hole (23) in the middle of the disk, disk (21) two sides is provided with the magnet steel (22) of high energy product hard magnetic material, the sheet number of magnet steel (22) equals 360 ° and rounds divided by step angle, and magnet steel (22) is evenly arranged around disk (21) center of circle.
2, the electromagnetic driver of the reverse self-locking of unidirectional stepping based on MEMS (micro electro mechanical system) according to claim 1, it is characterized in that, the stator coil winding (24) of a plurality of multilayer multi-turn planar coils compositions and the lead-out wire layer of layout lead-out wires of coil (25) are set on first stator (1), second stator (3), in stator coil winding (24), arrange the magnetic core (26) that constitutes by high-permeability material be divided into fritter, the number of stator coil winding (24) equals 360 ° and rounds divided by step angle, and magnetic core (26) is divided into bulk.
3, the electromagnetic driver of the reverse self-locking of unidirectional stepping based on MEMS (micro electro mechanical system) according to claim 2, it is characterized in that, stator coil winding (24) is to be linked to each other by four planar coils to form, stator coil winding (24) is provided with four tap positions, be respectively the first tap position (33), the second tap position (34), the 3rd tap position (35), the 4th tap position (36), from stator coil winding (24) vertical direction, first tap (37), the 5th tap (41), the 7th tap (43) is in the first tap position (33), second tap (38), the 3rd tap (39) is in the second tap position (34), the 4th tap (40), the 6th tap (42) is in the 3rd tap position (35), the 8th tap (44) is in the 4th tap position (36), stator coil winding (24) is arranged in four layers, in ground floor, coil windings is pressed class trapezoidal shape cabling up to ground floor coil second tap (38) from inner ring to the outer ring by ground floor coil first tap (37), ground floor coil second tap (38) is connected to second layer coil the 3rd tap (39) by binding post, with second layer coil the 3rd tap (39) is starting point, with second layer coil the 4th tap (40) is terminal point, according to the direction of routing identical with the ground floor coil from the outer ring to the inner ring cabling, then, second layer coil the 4th tap (40) is connected to the 3rd layer line circle the 6th tap (42) by binding post, with the 3rd layer line circle the 6th tap (42) is starting point, with the 3rd layer line circle the 5th tap (41) is terminal point, according to the direction of routing identical with the ground floor coil from inner ring to the outer ring cabling, at last, the 3rd layer line circle the 5th tap (41) is connected to the 4th layer line circle the 7th tap (43) by binding post, with the 4th layer line circle the 7th tap (43) is starting point, with the 4th layer line circle the 8th tap (44) is terminal point, according to the direction of routing identical with the ground floor coil from the outer ring to the inner ring cabling, first tap (37) of ground floor coil and the 8th tap (44) of the 4th layer line circle are respectively the starting point and the terminal point of whole stator coil winding (24), and they arrive trace layer by the vertical leads post and link to each other with lead-out wires of coil (25).
4, according to the electromagnetic driver of claim 1 and the 2 described reverse self-lockings of unidirectional stepping based on MEMS (micro electro mechanical system), it is characterized in that, in whole assembling process, the center line (11) of energy storage dish arc groove and the center line (27) of stator coil winding (24) are on same vertical plane, and this is the initial zero-bit of whole system.
5, the electromagnetic driver of the reverse self-locking of unidirectional stepping based on MEMS (micro electro mechanical system) according to claim 1, it is characterized in that, rotating shaft (6) is provided with the first non-wholecircle shaft part (29), the second non-wholecircle shaft part (30), step cutting pattern (31) and wholecircle shaft part (32), the first non-wholecircle shaft part (29) links to each other with the second non-wholecircle shaft part (30), the second non-wholecircle shaft part (30) links to each other with step cutting pattern (31), and step cutting pattern (31) links to each other with wholecircle shaft part (32).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200410015989XA CN1297068C (en) | 2004-01-19 | 2004-01-19 | Micro electromechanical system based unidirectional stepping reverse self-locking electromagnetic driver |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200410015989XA CN1297068C (en) | 2004-01-19 | 2004-01-19 | Micro electromechanical system based unidirectional stepping reverse self-locking electromagnetic driver |
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| CN1558549A CN1558549A (en) | 2004-12-29 |
| CN1297068C true CN1297068C (en) | 2007-01-24 |
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| CNB200410015989XA Expired - Fee Related CN1297068C (en) | 2004-01-19 | 2004-01-19 | Micro electromechanical system based unidirectional stepping reverse self-locking electromagnetic driver |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106921228B (en) * | 2017-04-19 | 2023-05-23 | 山东大学 | Stator, manufacturing method of stator and permanent magnet brushless motor |
| CN116475350A (en) * | 2023-05-31 | 2023-07-25 | 湖北省腾丰机械科技有限公司 | Mold clamping mechanism for open-close mold cold header |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2112223U (en) * | 1991-10-18 | 1992-08-05 | 蔡火根 | Self-locking motor |
| CN2157358Y (en) * | 1993-04-07 | 1994-02-23 | 欧阳维超 | Paw oscillating type ratchet mechanism |
| CN2174413Y (en) * | 1993-07-22 | 1994-08-17 | 保军波 | Mechanical energy-storing apparatus for rickshaw |
| CN1135677A (en) * | 1995-05-08 | 1996-11-13 | 上海交通大学 | Millimeter-grade electromagnetic micro electric motor |
-
2004
- 2004-01-19 CN CNB200410015989XA patent/CN1297068C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2112223U (en) * | 1991-10-18 | 1992-08-05 | 蔡火根 | Self-locking motor |
| CN2157358Y (en) * | 1993-04-07 | 1994-02-23 | 欧阳维超 | Paw oscillating type ratchet mechanism |
| CN2174413Y (en) * | 1993-07-22 | 1994-08-17 | 保军波 | Mechanical energy-storing apparatus for rickshaw |
| CN1135677A (en) * | 1995-05-08 | 1996-11-13 | 上海交通大学 | Millimeter-grade electromagnetic micro electric motor |
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| CN1558549A (en) | 2004-12-29 |
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