CN1273223C - Microfluid film forming apparatus and method - Google Patents
Microfluid film forming apparatus and method Download PDFInfo
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- CN1273223C CN1273223C CN 200310101854 CN200310101854A CN1273223C CN 1273223 C CN1273223 C CN 1273223C CN 200310101854 CN200310101854 CN 200310101854 CN 200310101854 A CN200310101854 A CN 200310101854A CN 1273223 C CN1273223 C CN 1273223C
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Abstract
The present invention relates to a microfluid spray coating film forming apparatus and a method thereof. A film assembly is formed on a base plate; fluctuation is generated to the base plate for making microfluid drips attached to the base plate solidify and form a film on the surface of the base plate with sustained vibration; the surface tension of the microfluid drips attached to the base plate is destroyed through physical vibration to make the microfluid drips maintain most of solutes in the drying process of the microfluid drips; destroyed solutes are stacked on a mechanism of the edge for obtaining flat film uniformity; simultaneously, the vibration can also destroy the surface shapes of the microfluid drips to make the surface shapes tend to a real round.
Description
Technical field
The present invention relates to a kind of film forming device and method thereof, relate in particular to a kind of microfluid spray-coated film building mortion and method thereof that is applied to ink-jetting process.
Background technology
Inkjet technology is a kind of meticulous, coating process that repeatability is high, and the precision components spray printing that can be applicable to various different materials is shaped.But be to use ink-jet method to make high-resolution film assembly and need location, quite accurate position, little drop can be sprayed on the preposition, the little drop that is attached to base material simultaneously needs solvent (water, the organic solvent etc.) volatilization that it comprised just can be solidify to form film, yet the physical phenomenon in the volatilization process will influence the uniformity of film.
Little drop has solid-state (substrate) on base material, liquid (drop) and gaseous state (volatilization gas) three-phase, wherein, region energy solid-state and liquid contact wire compares energy low (rapid heat dissipation) liquid and gaseous state contact wire zone, the liquid steam with gaseous state contact wire zone of regional steaming pressure ratio solid-state in addition and liquid contact wire forces down, therefore form around the drop phenomenon than the easy curing of drop centered, make the low high situation all around in film generation center, be commonly referred to as coffee ring (coffee ring), this uneven structure has serious injury for functional assembly.Therefore, it is the inhomogeneities (inhomogeneous) of film that ink ejecting method is made the main problem of assembly, secondly be separated (the Phase Separation) for being caused easily in the process of ink-jet application drying.The problems referred to above all can influence the quality and the qualification rate of assembly, and particularly under the situation of making the high-resolution assembly, feasible resolution ratio with ink-jet method making film assembly can't improve.
Be flatness and the quality of improving film assembly, can in the process that film hardening is shaped, attempt changing and controlling the solvent evaporation situation of film by methods such as external force, substrate surface processing and change technological processes.WO01/70506A2 discloses as the world patent notification number, is the mode of utilizing air-flow to brush the drop of substrate surface, and to change the solvent steam concentration gradient of little drop, the phase increases the drop edge curing rate, and can not form the structure of coffee ring.The mode of air-flow has really overcome the puzzlement of coffee ring structure, but air-flow may blow to other position with little drop in the air fast, will cause the puzzlement of positioning control.And for example No. 4510173 patent of the U.S. discloses, the thermal plastic high polymer that is to use photocuring is as assembly material, in technological process, need provide heat energy to substrate, it is mobile to form smooth rete that the drop that is attached to substrate is had, solidify via UV-irradiation again, to obtain smooth organic film assembly.
In addition, described in No. 6383913 patent of the U.S., propose a kind of method that changes the wettability (Wettability) of load-bearing surface and make assembly, improve the characteristic on dielectric layer (Dielectric Layer) surface of carrying whereby.Above dielectric layer, be coated with one deck dielectric barrier layer (Dielectric Barrier Layer) earlier earlier, after passing through the UV photo-irradiation treatment again, make the dielectric barrier laminar surface change and become hydrophily (Hydrophilic) by repellency (Hydrophobic), adhesion (Adhesive) character is significantly improved, with the surface nature of improved thin film assembly.Other has a close practice, mention a kind of surface-treated method as No. 6162745 patent of the U.S., it is the film control method when being used for handling solvent and forming film, its way is at substrate surface irradiation UV light source, make substrate surface locate to form hydrophily at pixel (Pixel), non-pixel place then forms non-hydrophily, to obtain preferable membrane quality.
Yet the coffee ring structure that above-mentioned method still is difficult to produce at ink-jetting process is made good improvement, and then effectively promotes the film assembly quality.
About in the natural phenomena, the dried liquid that contains solid-state solute produces the situation of coffee ring with reference to article " the Capillary Flow as the Cause of RingStains From Dried Liquid Drops " elaboration that was published in Nature in 1997.Its provide several important solution party to, eliminate to produce the situation of coffee ring, at the drop moulding initial stage, the accumulation phenomenon of its drop edge can be left in the basket, The faster the better for the expression evaporation rate.Secondly, viscosity is high more, and liquid flow velocity is slow more, and then the thickness broad of the ring of Chan Shenging (Ring) is flat.And contact angle big more (Contact Angle), be that surface tension is big more, (Evaporation Rate) is big more for its evaporation rate, and then capillarity flows not obvious more, will cause thick more ring (Ring), the surface tension of therefore destroying drop helps to form more smooth film.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of microfluid spray-coated film building mortion and method, vibrate the surface tension of destroying the little drop that is attached to substrate by physical property, make little drop in dry process, surface tension is subjected to the influence of this physical property active force, in dry process, maintain most solute, make its contact wire that can't be attracted to the edge, destroy solute and be piled up in the mechanism at edge, and obtain more smooth uniformity of film by capillary force.
For achieving the above object, the invention provides a kind of microfluid spray-coated film manufacturing process, in order to form film assembly on a substrate, its characteristics are that its step comprises:
Make this substrate be subjected to a fluctuation and the generation sustained vibration of continuation;
Distribute a plurality of little drops in this substrate surface; And
Make this little drop this substrate surface film-forming, destroy this little drop by vibration and be attached to the surface tension of this substrate, and then destroy the mechanism that the contained solute of this little drop is piled up in this little drop edge in sustained vibration.
Above-mentioned microfluid spray-coated film manufacturing process, its characteristics are that the frequency range of this fluctuation is between 20 hertz to 1,000,000,000 hertz.Form specific vibration frequency on the microfluid surface, can make little drop surface produce different disturbances, this specific vibration frequency depends on the mesomerism frequency of bearing substrate and vibration source.The disturbance meeting that produces causes microfluid itself to produce standing wave structure because of being subjected to resonance, and then destroys the external form and the surface tension of little liquid surface.
Above-mentioned microfluid spray-coated film manufacturing process, its characteristics are that the dutycycle of the drive waveforms of this fluctuation (Duty Ratio) is 10% to 90%.
Above-mentioned microfluid spray-coated film manufacturing process, its characteristics are that the vibration mode of this fluctuation is parallel to the direction of this base plan for the amplitude of this fluctuation.
Above-mentioned microfluid spray-coated film manufacturing process, its characteristics are that the vibration mode of this fluctuation is the direction of the amplitude of this fluctuation perpendicular to this base plan.
The present invention also provides a kind of microfluid spray-coated film building mortion, and in order to form film assembly on a substrate, its characteristics are that it comprises:
One microfluid distribution module is in order to produce a plurality of little drops and to make it be distributed in this substrate surface;
One microfluid carrying platform, in order to carrying this substrate, and this microfluid carrying platform can produce relative displacement with this microfluid distribution module; And
One fluctuation generation module, contain more than one vibration component, this substrate is produced a fluctuation, in order to change the film-forming kenel of this little drop at this substrate surface, fluctuate by this and to destroy this little drop and be attached to the surface tension of this substrate, and then destroy the mechanism that the contained solute of this little drop is piled up in this little drop edge.
Above-mentioned microfluid spray-coated film building mortion, its characteristics be, this microfluid distribution module be selected from hot bubble type ink jet head, piezoelectric ink-jet head, dot matrix machine (Arrayer) and continuous ink jet device (ContinuousInk-Jet) one of them.
Above-mentioned microfluid spray-coated film building mortion, its characteristics be, this vibration component be microwave components, ultrasonic assembly, piezoelectric element and acoustic wave component one of them.
Above-mentioned microfluid spray-coated film building mortion, its characteristics are that this vibration component is lead zirconate titanate (PZT) piezoelectric element.
Above-mentioned microfluid spray-coated film building mortion, its characteristics are that this vibration component is attached to this substrate.
Above-mentioned microfluid spray-coated film building mortion, its characteristics are that this vibration component is a plurality of, distributes with symmetrical pattern with respect to this substrate.
Above-mentioned microfluid spray-coated film building mortion, its characteristics are that this vibration component operates in different amplitudes and frequency range.
Above-mentioned microfluid spray-coated film building mortion, its characteristics are, also comprise a temperature control modules, are used to control the surface temperature of this substrate.
Because vibration provided by the invention can destroy the external form of little liquid, another object of the present invention is to make the microfluid that drops on substrate surface, has better area proper circle.Utilize this physical property disturbance, surface tension will be subjected to the influence of wave disturbance, adjust because of in defective of substrate own or the microfluid distributed process, cause the not good problem of little drop proper circle.
Fluctuation amplitude and FREQUENCY CONTROL will effectively change the volatility and the surface tension of microfluid, and then the generation of capillarity is inhibited, and obtain better film flatness.Vibration component in order to the fluctuation generation module that produces fluctuation is comprised according to present known technology, can be microwave components, ultrasonic assembly, piezoelectric element or utilizes acoustic wave component, as the vibration sound source, and then the surface of disturbance microfluid.
Describe the present invention below in conjunction with the drawings and specific embodiments, but not as a limitation of the invention.
Description of drawings
Fig. 1 is the schematic diagram of microfluid spray-coated film building mortion of the present invention;
Fig. 2 is the schematic flow sheet that microfluid spray-coated film of the present invention is shaped;
Fig. 3 is the amplitude schematic diagram of flat piezoelectric element;
Fig. 4 A to Fig. 4 E is the amplitude emulation schematic diagram that the vibration component of different numbers is arranged at all places;
Fig. 5 A to 5D is the amplitude emulation schematic diagram of the vibration component of operating frequency;
Fig. 6 is the facilities and equipments schematic diagram of the present invention's first application examples;
Fig. 6 A is attached to the schematic diagram of substrate for the preceding deionized water drop of vibration;
Fig. 6 B is attached to the schematic diagram of substrate for vibration deionized water drop;
Fig. 7 is the facilities and equipments schematic diagram of the present invention's second application examples;
Fig. 7 A to Fig. 7 C is the film thickness distribution map of the present invention's second application examples; And
Fig. 8 is the configuration schematic diagram of the present invention's the 3rd application examples;
Fig. 8 A to Fig. 8 C is the film thickness distribution map of the present invention's the 3rd application examples.
The specific embodiment
The present invention is by putting on the fluctuation of substrate, destroy the surface configuration and the tension force of drop solidification process, and then makes the dry formed film surface of drop comparatively even.Yet the number of its fluctuation sources, configuration and parameter control etc. all can have influence on drop and solidify situation.In addition, the vibration mode of fluctuation also can be along with operating frequency changes to some extent, its main phenomenon is, when low-frequency vibration, be that vibration frequency is less than 1 MHz (MHz), main vibration mode is the direction that amplitude is parallel to base plan, and under the situation of frequency greater than 1MHz, main vibration mode is the direction of amplitude perpendicular to base plan.And under the situation of high frequency, the situation of deface tension force is comparatively obvious.
Please refer to Fig. 1, it is the schematic diagram of microfluid spray-coated film building mortion.The microfluid carrying platform 20, bracing frame 21 and the fluctuation generation module 30 that include ink gun module 10, motion, ink gun module 10 has more than one spray orifice 11, and be fixed in a nozzle regulating mechanism 12 substrate 40 is carried out drop 13 sprayings, substrate 40 surfaces have the barricade 41 of trellis, the splash when preventing to spray drop 13.Microfluid carrying platform 20 bearing substrates 40 of motion also can be adjusted its position for ink gun module 10 spraying ink droplets, and have 40 settings of bracing frame 21 substrates, make substrate 40 and microfluid carrying platform 20 keep a segment distance.And fluctuation generation module 30 is a piezoelectric element, is attached at substrate 40 belows, and fluctuation generation module 30 does not contact with the microfluid carrying platform 20 of motion, can avoid unnecessary energy attenuation.The fluctuation that 30 actions of fluctuation generation module produce appropriate frequency when spray orifice 11 is sprayed at substrate 40 with a plurality of drops 13, can cause the planarization of film.
Above-mentioned piezoelectric element is to use lead zirconate titanate (PZT) piezoelectric element, the PZT assembly can produce heat energy when hyperfrequency drives, this heat energy can cause the temperature of substrate to rise, for for the organic material of making film, in certain temperature range, can increase its flowability, form better thickness kenel.To make the phenolic resins (Phenolic of macromolecule organic electric exciting light-emitting diode (PLED), PF) serial solution is example, its temperature range need less than 80 degrees centigrade (℃), above 80 ℃, though its mobile increasing, but also cause separating out of solid state component (Solid Content), unfavorable on the contrary to film forming character.Table one is the PZT test data, when the PZT assembly operation in certain voltage range, can be simultaneously as the device of the little heating of substrate, the temperature contrast of its generation, make fluid form Marangoni (Marangoni) convection current between two borders of temperature contrast having, will help the improvement of coffee ring.
Table one:
| 1min | 2min | 3min | 5min | 8min | |
| 5V | 30 | 31 | 32 | 32 | 32 |
| 10V | 45 | 45 | 50 | 50 | 49 |
| 15V | 92 | 103 | N/A | N/A | N/A |
Use the microfluid spray-coated film manufacturing process of said apparatus, please refer to Fig. 2, it is a microfluid spray-coated film shaping schematic flow sheet of the present invention.Its step comprises: step 210 places substrate the motion carrying platform and is adjusted to the position of desiring to carry out ink-jet; Step 220, the fluctuation that substrate is produced appropriate frequency and amplitude with the fluctuation generation module; Step 230, with the ink gun module at substrate surface a plurality of little drops that distribute; Step 240, the solvent of a plurality of little drops that volatilize makes the substrate surface film-forming of little drop in sustained vibration.Form specific vibration frequency on the microfluid surface, can make little drop surface produce different disturbances, this specific vibration frequency depends on the mesomerism frequency of bearing substrate and vibration source.The disturbance meeting that produces causes microfluid itself to produce standing wave structure because of being subjected to resonance, and then destroys the external form and the surface tension of little liquid surface.Wherein, temperature control modules can be installed in addition, with the surface temperature of control substrate.
In addition, the amplitude of piezoelectric element vibration can cause decay with respect to fluctuation generation center, please refer to Fig. 3, and it is the amplitude schematic diagram of flat piezoelectric element.Each piezoelectric element can be considered independent vibration source, yet as shown in Figure 3, the single vibration source is not to provide the everywhere uniform amplitude, and its amplitude is that the mind-set edge reduces in being produced by fluctuation, producing the center near fluctuation has the high amplitude fluctuation, and producing the center away from fluctuation then only has the short arc fluctuation.Therefore, except characteristic frequency (Frequency), voltage amplitude (Voltage Amplitude), vibration mode (VerticalMode, Bend mode or Harmonic Mode), the size of vibration component and the size of little drop of vibration component, also need consider the number and the configuration of the vibration component that wave generating apparatus comprises in order to the important governing factor that fluctuation comprised of vibration substrate.
Vibration component can be with reference to figure 4A to Fig. 4 E and Fig. 5 A to Fig. 5 D in number, the positional alignment of substrate and amplitude model (Amplitude Pattern) that operating frequency caused.It is the vibration source that each vibration component is considered as point-like, concentric annular striped around vibration source is the binding of same phase place crest, therefore the frequent more of its vibration generation represented in intensive more the locating of striped, and desirable situation is that striped is uniformly distributed in substrate, and the expression substrate all can be vibrated everywhere.Please refer to Fig. 4 A to Fig. 4 E, it is the amplitude emulation schematic diagram of the vibration component of different numbers in all places arrangement.Fig. 4 A places vibration component as vibration source in four corners of substrate; Fig. 4 B places vibration component in four corners of substrate and substrate center, promptly increases by a vibration component in central authorities; Fig. 4 C places vibration component in four length of side centers of substrate; Fig. 4 D places vibration component in four length of side centers of substrate and substrate center, promptly increases by a vibration component in central authorities; Fig. 4 E places vibration component at four length of side centers of substrate, four corners and a basic version center, promptly has nine vibration sources, and the vibration component of Fig. 4 A to Fig. 4 E all has identical amplitude and frequency.
Please refer to Fig. 5 A to Fig. 5 D, it is the amplitude emulation schematic diagram of the vibration component of operating frequency.Fig. 5 A be the vibration component that is f of four corner placement frequency at substrate as vibration source, place the vibration component that frequency is f/2 in the center.Fig. 5 B is the vibration component of f in four length of side center placement frequency of substrate, places the vibration component that frequency is f/2 in the center; Fig. 5 C be the vibration component that is f of four corner placement frequency at substrate as vibration source, all place the vibration component that operating frequency is f/2 in center and four length of side centers; Fig. 5 D places 4 vibration components that operate in frequency f at four length of side centers of substrate, then places the vibration component that operating frequency is f/2 in center and four corners.Number, arrangement and the operating frequency of vibration source have been described by Fig. 4 A to Fig. 4 E and Fig. 5 A to Fig. 5 D, the film that influences whole base plate is formed effect, uniform more amplitude helps each drop is caused approximate effect, can obtain effect preferably so vibration source should be the symmetry arrangement.
The present invention can be applicable to make uniform film assembly for proof, respectively with deionized water and the phenolic resins (Phenolic that makes macromolecule organic electric exciting light-emitting diode (PLED), PF) solution is as the spray printing fluid of application examples, please refer to Fig. 6, it is for the facilities and equipments schematic diagram of the present invention's first application examples.For confirming that the present invention can make drop level off to the proper circle shape, earlier with deionized water as the spray printing fluid, the buzzing sheet that is to use model OBO-41208-16 as shown in Figure 6 is as vibration source, again to be of a size of 22 * 22 millimeters, thickness is that the made glass cover of 0.175 millimeter the Deckglaser of manufacturer (cover glasses) is as the spray printing substrate, and use HP51626 jet-printing head, the liquid-drop diameter size is about 100～200 microns, vibration source is to be fixed in substrate with 3, its amplitude setting is input 12.4V, frequency is 1.922KHz, and dutycycle (Duty Ratio) is 50%.Deionized water is distributed in substrate surface with the ink-jetting style spray, and for the clear view droplet profile changes, its drop size is made as 5000 microns.As shown in Figure 6A, it is attached to the photo of substrate for the preceding deionized water drop of vibration, its shape is not to present proper circle shape, with above-mentioned vibration condition, make the vibration source effect produce vibration to substrate, the result is shown in Fig. 6 B, and it is attached to the photo of substrate for vibration deionized water drop, can form standing wave node on the surface of drop and destroy its surface configuration, make its global shape approach proper circle shape.
With the phenolic resins of making macromolecule organic electric exciting light-emitting diode (PLED) (Phenolic, PF) film as shown in Figure 7, is the facilities and equipments schematic diagram of the present invention's second application examples as second application examples; The PZT sheet that is to use model OBO-41208-16 is as vibration source, again to be of a size of 22 * 22 millimeters, thickness is that the made glass cover of 0.175 millimeter the Deckglaser of manufacturer (cover glasses) is as the spray printing substrate, and use HP51626 jet-printing head, the liquid-drop diameter size is about 100～200 microns, and vibration source is to be fixed in substrate with 3, and its amplitude setting is input 12.4V, frequency is respectively 100KHz, 200KHz, 500KHz, and dutycycle (Duty Ratio) then keeps 50%.Again PF solution is distributed in substrate with ink-jetting style, its section height is measured to compare the film thickness distribution trend in back to be dried (2～3 seconds), and as Fig. 7 A to Fig. 7 C, it is the film thickness distribution map of second application examples.The frequency of Fig. 7 A is 100KHz, the frequency of Fig. 7 B is 200KHz, the frequency of Fig. 7 C is 500KHz, can see along with frequency increases, the phenomenon that assemble at the oriented gradually center of liquid, and carry out the film of the vibration gained of 500KHz frequency, the thickness at its center and edge is even, improve the kenel of coffee ring effectively, hence one can see that in the section of high frequency, and oscillation effect is apparent in view.
With the phenolic resins of making macromolecule organic electric exciting light-emitting diode (PLED) (Phenolic, PF) film is as the 3rd application examples; Please refer to the configuration schematic diagram of the present invention's the 3rd application examples of Fig. 8, be to use the PZT sheet 110 of 7 symmetrical distributions to be attached at carrying platform 120 belows as vibration source, it is to be of a size of 70 * 70 millimeters, thickness is that 0.7 millimeter glass (Glasses) is as the spray printing substrate, the liquid-drop diameter size is about 100～200 microns, its amplitude setting is input 80V, and frequency is respectively 100KHz, 300KHz, 400KHz, and dutycycle (Duty Ratio) then keeps 50%.Again PF solution is distributed in substrate with ink-jetting style, its section height is measured to compare the film thickness distribution trend in back to be dried (2～3 seconds), and as Fig. 8 A to Fig. 8 C, it is the film thickness distribution map of the 3rd application examples.The frequency of Fig. 8 A is 100KHz, and the frequency of Fig. 8 B is 300KHz, and the frequency of Fig. 8 C is 400KHz, can see that a plurality of PZT arrange arrangement, and its effect of improving the film flatness of promptly a plurality of vibration sources is better than second embodiment.
Certainly; the present invention also can have other various embodiments; under the situation that does not deviate from spirit of the present invention and essence thereof; those of ordinary skill in the art work as can make various corresponding changes and distortion according to the present invention, but these corresponding changes and distortion all should belong to the protection domain of the appended claim of the present invention.
Claims (13)
1, a kind of microfluid spray-coated film manufacturing process, is characterized in that its step comprises in order to form film assembly on a substrate:
Make this substrate be subjected to a fluctuation and the generation sustained vibration of continuation;
Distribute a plurality of little drops in this substrate surface; And
Make this little drop this substrate surface film-forming, destroy this little drop by vibration and be attached to the surface tension of this substrate, and then destroy the mechanism that the contained solute of this little drop is piled up in this little drop edge in sustained vibration.
2, microfluid spray-coated film manufacturing process according to claim 1 is characterized in that, the frequency range of this fluctuation is between 20 hertz to 1,000,000,000 hertz.
3, microfluid spray-coated film manufacturing process according to claim 1 is characterized in that, the dutycycle of the drive waveforms of this fluctuation is 10% to 90%.
4, microfluid spray-coated film manufacturing process according to claim 1 is characterized in that, the vibration mode of this fluctuation is parallel to the direction of this base plan for the amplitude of this fluctuation.
5, microfluid spray-coated film manufacturing process according to claim 1 is characterized in that, the vibration mode of this fluctuation is the direction of the amplitude of this fluctuation perpendicular to this base plan.
6, a kind of microfluid spray-coated film building mortion, is characterized in that it comprises in order to form film assembly on a substrate:
One microfluid distribution module is in order to produce a plurality of little drops and to make it be distributed in this substrate surface;
One microfluid carrying platform, in order to carrying this substrate, and this microfluid carrying platform can produce relative displacement with this microfluid distribution module; And
One fluctuation generation module, contain more than one vibration component, this substrate is produced a fluctuation, in order to change the film-forming kenel of this little drop at this substrate surface, fluctuate by this and to destroy this little drop and be attached to the surface tension of this substrate, and then destroy the mechanism that the contained solute of this little drop is piled up in this little drop edge.
7, microfluid spray-coated film building mortion according to claim 6 is characterized in that, this microfluid distribution module be selected from hot bubble type ink jet head, piezoelectric ink-jet head, dot matrix machine and continuous ink jet device one of them.
8, microfluid spray-coated film building mortion according to claim 6 is characterized in that, this vibration component be microwave components, ultrasonic assembly, piezoelectric element and acoustic wave component one of them.
9, microfluid spray-coated film building mortion according to claim 6 is characterized in that, this vibration component is the lead zirconate titanate piezoelectric assembly.
10, microfluid spray-coated film building mortion according to claim 6 is characterized in that this vibration component is attached to this substrate.
11, microfluid spray-coated film building mortion according to claim 6 is characterized in that, this vibration component is a plurality of, distributes with symmetrical pattern with respect to this substrate.
12, microfluid spray-coated film building mortion according to claim 6 is characterized in that this vibration component operates in different amplitudes and frequency range.
13, microfluid spray-coated film building mortion according to claim 6 is characterized in that, also comprises a temperature control modules, is used to control the surface temperature of this substrate.
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| CN 200310101854 CN1273223C (en) | 2003-10-21 | 2003-10-21 | Microfluid film forming apparatus and method |
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|---|---|---|---|
| CN 200310101854 CN1273223C (en) | 2003-10-21 | 2003-10-21 | Microfluid film forming apparatus and method |
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| CN1273223C true CN1273223C (en) | 2006-09-06 |
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| CN103402907B (en) * | 2011-01-17 | 2016-03-23 | 新加坡科技研究局 | Microfluidic droplet generator |
| CN103232060A (en) * | 2013-05-03 | 2013-08-07 | 南京大学 | Preparation method of CdS film |
| JP6846941B2 (en) * | 2017-02-01 | 2021-03-24 | 東京エレクトロン株式会社 | Coating device and coating method |
| JP7023984B2 (en) * | 2017-12-22 | 2022-02-22 | 富士フイルム株式会社 | Film formation method |
| CN110549741B (en) * | 2019-09-11 | 2021-06-22 | 云谷（固安）科技有限公司 | Leveling device, inkjet printing apparatus and leveling method |
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