CN1265943C - Industrial robot - Google Patents
Industrial robot Download PDFInfo
- Publication number
- CN1265943C CN1265943C CNB2003101046625A CN200310104662A CN1265943C CN 1265943 C CN1265943 C CN 1265943C CN B2003101046625 A CNB2003101046625 A CN B2003101046625A CN 200310104662 A CN200310104662 A CN 200310104662A CN 1265943 C CN1265943 C CN 1265943C
- Authority
- CN
- China
- Prior art keywords
- hand
- laser
- industrial robot
- test portion
- corpuscular counter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002245 particle Substances 0.000 claims abstract description 42
- 238000012360 testing method Methods 0.000 claims description 41
- 239000012530 fluid Substances 0.000 claims description 38
- 238000000034 method Methods 0.000 claims description 9
- 230000008569 process Effects 0.000 claims description 3
- 239000000428 dust Substances 0.000 abstract description 3
- 238000000149 argon plasma sintering Methods 0.000 abstract description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 11
- 235000012431 wafers Nutrition 0.000 description 11
- 238000007689 inspection Methods 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 8
- 238000009434 installation Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 6
- 229920000049 Carbon (fiber) Polymers 0.000 description 5
- 230000009471 action Effects 0.000 description 5
- 239000004917 carbon fiber Substances 0.000 description 5
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000002131 composite material Substances 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 230000001360 synchronised effect Effects 0.000 description 3
- 230000005856 abnormality Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000005693 optoelectronics Effects 0.000 description 2
- 230000004043 responsiveness Effects 0.000 description 2
- 238000012552 review Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000011020 pilot scale process Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Health & Medical Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Analytical Chemistry (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
An industrial robot which works in a clean room can measure the amount of particles of dust and the like in the clean room with high precision and immediate. A light-scattering type particle counter measures the amount of particles in the clean room. The particle counter is provided on a hand portion of the industrial robot and a counter inlet is arranged on the tip of the hand portion. A laser beam used in the particle counter is formed a belt-shaped.
Description
Technical field
The present invention relates to industrial robot, especially relate in clean space assemble, process, the industrial robot of operation such as carrying.
In addition, the present invention relates to, especially relate to improvement the laser beam shape of test portion fluid irradiation applicable to industrial robot, the corpuscular counter that utilizes light scattering characteristic that the population in the gas is measured.
Background technology
This robotlike, have a kind of in absolute clean room such as semiconductor wafer or liquid crystal panel are placed on the robot that moves to other devices on hand from box.When handling these semiconductor wafers and liquid crystal panel, the number of particles in the clean room has very big influence to qualification rate, so several method inspection is arranged.
Such as, the assigned position of staff in clean room is provided with corpuscular counter and makes regular check on sometimes.In addition, corpuscular counter also being installed sometimes on the manufacturing installation of sputter or etching etc. makes regular check on.Or utilize testing fixture that the particle inspection is carried out on the surface of semiconductor wafer and liquid crystal panel.
In addition, as existing this type of corpuscular counter 100 as shown in figure 10, comprise the light source 102 of launching laser 101, with laser 101 optically focused to the collector lens 103 of test portion fluid 104, make flow passage device 105 that test portion fluid 104 flows, scattered light 106 that the particle in the test portion fluid 104 (grit) is produced gives the sensitive lens 107 of optically focused, the scattered light behind the optically focused 106 is carried out the light-sensitive element 108 of opto-electronic conversion.And the impulse magnitude of the electric output power that obtains from light-sensitive element 108 and the particle diameter of suspended particles have dependency relation, so can try to achieve particle diameter from the impulse magnitude of electric output power.In addition, particle by the time produce pulse, so can obtain population from the number of times of pulse.
Owing to making the energy density of laser 101 high more good more, so collector lens 103 is arranged to laser 101 optically focused are become very little point-like in order to detect scattered light 106 accurately.And test portion fluid 104 is by the inspection area 109 of point-like.The mobile of test portion fluid 104 is to utilize the suction pump in downstream to carry out.
On the other hand, predict dirty occasion when this device 100 is monitored the dirty degree in the clean room and be used as the occasion of the device of reporting to the police, wish to monitor a large amount of test portion fluids 104 at short notice, realize the prediction of the dirty degree that correctness is high, to give the alarm in early days.
(patent documentation 1) Japanese documentation spy opens flat 9-178645 number (2003-287784)
And, when a plurality of arms are rotatably connected mutually, the revolving force of rotary driving source is transmitted robot with actions such as stretching, be loaded in such as the workpiece that makes large-scale liquid-crystalline glasses etc. the carrying of moving between the flow path device of box and coating device etc. with robot on.
This type of carrying comprises with robot 501 as shown in figure 15: with the joint portion on the pedestal 509 502 be rotatable the 1st arm 505 in center, the 2nd arm 506 that rotatably is connected with the joint portion 503 of the front of the 1st arm 505, the hand 510 that rotatably is connected with the joint portion 504 of the leading section of the 2nd arm 506.In each joint portion 502～504, be built-in with belt pulley, and connect by synchronous belt respectively between the joint portion 502,503 and between the joint portion 503,504, be arranged to hand 510 all the time in the face of certain direction and on straight line, move.Hand 510 has 2～3 hand fork 510a usually.
But along with the maximization of liquid-crystalline glasses in recent years, the adversary has also had the requirement of rigidity.If hand 510 rigidity deficiencies, even or the much of that but preponderance of rigidity, then carrying descends with the resonant frequency of robot 501 and can't high speed motion.
In addition, it is said that be exactly the access time of workpiece 508 2/3 of the actuation time when using carrying with robot 501.Therefore, in order to shorten the beat of operation, need make the discrepancy high speed of workpiece 508.In addition, also enlarge with the maximization of workpiece 508 even consider the stroke of discrepancy, the high speed of the part of coming in and going out also is very important with being directly proportional.
In order to realize the discrepancy high speed of workpiece 508, need to suppress the weight of hand 510 and improve rigidity.Therefore, carried out 3 changes of hand fork, in carbon fiber, contain resin pickup to form trial such as hand fork.In addition, hand fork was to be that square rustless material forms by the cross section in the past, but was to be main flow with the hollow shape that can obtain high rigidity now.That is, hand fork is to be dimetric tubing from cardinal extremity to front end with the cross section of identical thickness as shown in figure 14.
(patent documentation 2) Japanese patent laid-open 10-335420 communique (2002-319387)
But, corpuscular counter being arranged in the method for checking the afore mentioned rules position, the installation site of corpuscular counter is restricted, so can't measure near the particle wafer and the liquid crystal panel mostly.Therefore, even in fact have a large amount of particles near wafer and the liquid crystal panel and in-problem occasion also is judged as no problem, equally also can there be opposite problem, so be difficult to correctly judge and definite reason.In addition, inspection is regularly carried out, and has inspection intervals.Therefore, need sometimes to take a long time to it is detected, have the danger that produces a large amount of substandard products parts from the generation problem.
In addition, in the method that corpuscular counter is installed on the manufacturing installation, because of the installation site of corpuscular counter is restricted, so can't measure near wafer and the liquid crystal panel particle mostly.
And, in the method for utilizing testing fixture that semiconductor wafer and liquid crystal panel are checked, unusual high price.And, testing fixture only is set at 1 place will be difficult to determine reason.
But, in above-mentioned corpuscular counter 100, because laser 101 is become point-like by optically focused, so test portion fluid 104 must pass through very narrow surveyed area 109.Therefore, need make the gas flow at high speed in order to monitor a large amount of test portion fluids at short notice.Therefore, jumbo suction pump be must use, thereby the maximization and expensiveization of device 100 caused.In addition, need to detect the high speed in loop, it is complicated therefore to detect the loop.
But above-mentioned hand fork is that the cross section of identical thickness is dimetric tubulose from cardinal extremity to front end, thus sometimes along with the maximization of workpiece, the elongated back of hand fork rigidity deficiency, or make rigidity enough but too heavy.No matter be which kind of situation all makes resonant frequency descend, cause being difficult to make the discrepancy part high speed of workpiece.
Summary of the invention
In view of this, the objective of the invention is to, provide a kind of can high accuracy and apace the particle weight in the clean room is carried out the industrial robot of instrumentation.
In addition, another object of the present invention is, a kind of mobile corpuscular counter that just can detect particle of test portion fluid high-speed that do not need is provided.
In order to achieve the above object, the invention of technical scheme 1, be in clean space, assemble, process, the industrial robot of operation such as carrying, the suction inlet of measuring the corpuscular counter of clean space cleannes is arranged on the hand of industrial robot.
Therefore and since can to remain on semiconductor wafer on the hand and liquid crystal panel near measure, so can carry out correct inspection.In addition, hand can move freely, so can measure a lot of positions in clean space.And, by continuous review, can easily verify state variation and reason thereof.Thus,, can note abnormalities fast, can suppress the generation of substandard products to greatest extent by carrying out continuous inspection in plurality of positions.
And the invention of technical scheme 2 is on the basis of technical scheme 1 described industrial robot, the suction inlet of corpuscular counter is arranged on the front end of hand.Therefore, the front end of hand is that the free degree is the highest in the hand, can measure the very many positions in clean space.
In order to achieve the above object, the invention of technical scheme 3, laser is shone measure the zone, according to this mensurations region memory the scattered light that particle produced and in the corpuscular counter that particle is counted, laser forms the laser beam of band shape.
Therefore, laser is banded, so become the laser of point-like to compare with traditional optically focused, can enlarge surveyed area.Therefore, more test portion fluid can be flow through in the unit interval, the miniaturization of suction pump and the summary in detection loop can be realized.
In addition, the invention of technical scheme 4, be on the basis of technical scheme 3 described corpuscular counters, have and make the test portion fluid that contains particle towards the mobile flow passage device of certain orientation, the size of the width of laser mobile test portion fluid greater than utilizing flow passage device, simultaneously, with the rectangular direction of the direction of advance of described laser on, laser crosses the whole width of test portion fluid.Therefore, because laser traverses the whole width of test portion fluid, so can correctly count.
As mentioned above, technical scheme 1 described industrial robot, because the suction inlet of corpuscular counter is arranged on the hand of industrial robot, therefore, can be to measuring near the semiconductor wafer that remains on hand and the liquid crystal panel.So can carry out the inspection of particle weight accurately.
In addition because hand can move freely, so can be near etc. such as box and manufacturing installation a lot of positions in the clean space measure.And, by continuous review, can easily verify state variation and reason thereof.Thus,, can note abnormalities fast, can easily determine its reason simultaneously by carrying out continuous inspection in plurality of positions.Therefore, can remove this reason rapidly, can suppress the generation of substandard products to greatest extent, improve the actual job rate.
And, technical scheme 2 described industrial robots, owing to the front end that the suction inlet of corpuscular counter is arranged on hand, therefore, the front end of hand is the highest part of the free degree in the hand, can measure the very many positions in clean space.
As mentioned above, technical scheme 3 described corpuscular counters because laser be band shape, so become the laser of point-like to compare with traditional optically focused, can enlarge surveyed area.Therefore, more test portion fluid can be flow through in the unit interval, the miniaturization of suction pump and the summary in detection loop can be realized.And, can avoid the maximization of suction pump and detect the complicated of loop, can carry out the prediction of correct high dirty degree and early stage warning.
In addition, technical scheme 4 described corpuscular counters, on the rectangular direction of the direction of advance of described laser, laser passes the whole width of test portion fluid, so can correctly count particle.
Description of drawings
Fig. 1 is the vertical view that the production line part of industrial robot of the present invention has been used in expression.
Fig. 2 is the front view that the production line part of industrial robot has been used in expression.
Fig. 3 is the stereogram of the major part of expression industrial robot.
Fig. 4 is the vertical view that the hand portion of robot is enlarged expression.
Fig. 5 is the side view of expression hand portion.
Fig. 6 is the stereogram of the principle summary of expression corpuscular counter of the present invention.
Fig. 7 is the synoptic diagram of expression corpuscular counter, (A) is vertical view, (B) is side view.
Fig. 8 is the vertical view of summary of other examples of expression corpuscular counter.
Fig. 9 is the vertical view of other examples of expression corpuscular counter.
Figure 10 is the synoptic diagram of the major part of the traditional corpuscular counter of expression.
Figure 11 is the side view of expression carrying of the present invention with the hand of robot.
Figure 12 is the vertical view of expression carrying with robot.
Figure 13 is the side view of expression carrying with robot.
Figure 14 is the vertical view of other embodiment of expression hand.
Figure 15 is the stereogram of the traditional carrying of expression with robot.
Figure 16 is the synoptic diagram of the corpuscular counter of other embodiment of expression, is the stereogram of the summary of its principle of expression (A), (B) is the side view of synoptic diagram.
The specific embodiment
Following reference most preferred embodiment shown in the drawings is elaborated to composition of the present invention.
Fig. 1～Fig. 5 represents the embodiment 1 of industrial robot 1 of the present invention.This industrial robot 1 is assembled in clean space 11, is processed, operation such as carrying.And be provided with the corpuscular counter that the cleannes in the clean space 11 are measured at the hand 10 of industrial robot 1.Therefore, be placed near the particle weight the workpiece such as semiconductor wafer on the hand 10 and liquid crystal panel 8 by the corpuscular counter energy measurement, thereby can carry out correct inspection.
This industrial robot 1 is such as being as the arm drive unit that workpiece 8 is carried to manufacturing installation 14 from box 13.It is in the clean room that these industrial robots 1, box 13 and manufacturing installation 14 all are arranged on clean space 11.
The suction inlet 12 of corpuscular counter is arranged on the front end of hand 10 shown in Fig. 4,5.Suction inlet 12 is circular hole.The front end of hand 10 is that the free degree is the highest in the hand 10, therefore can measure the very many positions in clean space 11.Here, are occasions of semiconductor wafer at workpiece 8, preferably use the hand 10 of pottery system.Therefore, form the suction tube that is communicated with the corpuscular counter body from suction inlet 12 by the pottery itself that constitutes hand 10.In addition, are occasions of liquid crystal panel at workpiece 8, preferably use the hand 10 of carbon mix.In this occasion, be communicated with the flexible pipe of the suction tube of corpuscular counter bodies from suction inlet 12 in the inside of hand 10 break-through conduct.In addition, the corpuscular counter body also can be arranged on the inside or the outside of waiting industrial robot 1 in the arm.
In addition, this industrial robot 1 is by with pedestal 9 liftables and can be rotatably set on the robot body 25 and supported.In this occasion, by the lifting or the rotation of pedestal 9 itself, height and direction in the time of carrying out rectilinear motion to hand 10 change.
Below the action of above-mentioned industrial robot 1 is described.
Driving is built in the motor in the robot body 25, makes the belt pulley rotation of joint portion 2, and the position of arm 10 is moved forward and backward, or pedestal 9 carried out lifting, make arm 10 carry out lifting, or entire machine human body 25 is moved horizontally, to regulate the position of arm 10.And, after arm 10 arrives assigned positions, make corpuscular counter work, suck air from the suction inlet 12 of the front end of arm 10.By the amount of this airborne particle being measured the particle weight that just can obtain in the clean space 11.
In addition, also carry out continuously, or to set results of regular determination actuation time but measure.Here, the occasion that industrial robot 1 is measured in the workpiece in carrying can be to attract enough amounts such as 1 cube air.In this occasion, 1 soakage is measured particle weight such as being made as 0.1 cubic metre with this.Then, it is repeated 10 times, the amount of each particle add up, or the particle weight that sucks for 1 time is amplified 10 times etc.,, also can calculate the particle weight of 1 cubic metre air by the gimmick of adding up even can not suck 1 cubic metre air for 1 time.In this occasion, can detect with respect to normal condition at least and whether change.
Thus, needn't sharply suck a large amount of air, can prevent, thereby the state of affairs that causes the particle of precipitation to be picked up or roll takes place because of suction produces air-flow.In addition, needn't suck a large amount of air, can shorten the activity duration.
In addition, the foregoing description only is 1 most preferred embodiment of the present invention, but is not limited thereto, as long as in aim scope of the present invention, can carry out various distortion.Such as, in the present embodiment, the suction inlet 12 of corpuscular counter is arranged on the front end of hand 10, but is not limited thereto, also other positions such as root of hand 10.In this occasion, therefore the free degree height of hand 10 can be measured the many positions in clean space 11.
In addition, in the present embodiment, industrial robot 1 has been used as the arm drive unit, but has been not limited thereto, also other devices.
Below, with reference to most preferred embodiment shown in the drawings corpuscular counter is carried out concrete, detailed explanation.
Fig. 6 and Fig. 7 represent an embodiment of corpuscular counter 51 of the present invention.This corpuscular counter 51 is measured zone 53 with laser 52 irradiations, according to particle (dust) 54 scattered lights that produced 55 that are present in this mensuration zone 53, and particle 54 is counted.And laser 52 forms banded laser beam.In addition, has the flow passage device 57 that the test portion fluid 56 that contains particle 54 is flowed towards certain direction.The width of laser 52 is greater than the size of the test portion fluid 56 that utilizes flow passage device 57 to flow, and simultaneously, on the direction vertical with the direction of advance of above-mentioned laser, laser passes the whole width of test portion fluid 56.
This corpuscular counter 51 comprises the light source 58 of launching laser 52, laser 52 optically focused to the collector lens 59 of test portion fluid 56, flow passage device 57, scattered light 55 that the particle in the test portion fluid 56 54 is produced is given the sensitive lens 60 of optically focused, the scattered light behind the optically focused 55 carried out the light-sensitive element 61 of opto-electronic conversion.
Flow passage device 57 has airtight 65 of the downstream that is configured in collector lens 59, to this airtight 65 supply pipe 66 of supplying with test portion fluid 56, make airtight 65 suction pump 67 that becomes negative pressure.In addition, laser 52 is mensuration zone 53 with the part that test portion fluid 56 intersects.
Below the effect of above-mentioned corpuscular counter 51 is described.
The laser 52 that sends from light source 58 sees through collector lens 59 and becomes band shape.These band shape laser 52 optically focused are to airtight 65.On the other hand, under the work of suction pump 67, airtight 65 pilot scale materials flow body 56 flows.And laser 52 is by test portion fluid 56.
In case test portion fluid 56 contains dust, then produce scattered light 55 from measuring zone 53.This scattered light 55 is injected photo detector 61 by sensitive lens 60.And there are dependency relation in the size of the pulse of the electric output power that obtains from photo detector 61 and the particle diameter of particle 54, so can try to achieve particle diameter from the impulse magnitude of electric output power.In addition, particle 54 by the time produce pulse, can obtain population from the number of times of pulse.
The foregoing description only is 1 most preferred embodiment of the present invention, but is not limited thereto, as long as in aim scope of the present invention, can carry out various distortion.Such as, in the present embodiment, leave laser 52 behind the collector lens 59 directly by test portion fluid 56, but be not limited thereto, also can in the back of collector lens 59 mirror lens 68 be set as shown in Figure 8, laser 52 reflection backs are by test portion fluid 56.Thus, the light path complications can be able to be realized the miniaturization of corpuscular counter 51.
In addition, in the present embodiment, the face that flows with respect to the wide cut of laser 52 of test portion fluid 56 becomes 45 degree, but is not limited thereto, and as shown in Figure 9, also can become 90 degree.In the corpuscular counter 51 shown in Figure 9, the laser 52 that sends from light source (not shown) sees through 2 cylindrical lenses 63, is compressed and becomes band in the direction vertical with figure.And, supply pipe 66 and suction pump are set, so that test portion fluid 56 flows in the direction vertical with drawing.
And, in the various embodiments described above, utilize cylindrical lens 63 that oval-shaped laser 52 is further become flat pattern, but be not limited thereto, also can make oval-shaped laser 52 direct irradiation test portion fluids 56.In this occasion, laser 52 is still the band shape of wide cut, so can shine test portion fluid 56 wide cuts ground.
In addition, in the various embodiments described above,, but be not limited thereto the test portion fluid 56 that flows between laser 52 direct irradiation supply pipes 66 and the suction pump 67, also test portion fluid 56 can be flowed in the pipeline that is made of the transparent body that can see through laser 52, laser 52 is shone from its outside.
And, in the present embodiment, the laser 52 that sends from light source (not shown) sees through 2 cylindrical lenses 63, be compressed with the vertical direction of figure and becoming band, but be not limited thereto, corpuscular counter 510 as shown in figure 16 is such, also can only be made of 1 cylindrical lens 63 (as collector lens 59), and laser 52 is by test portion fluid 56.Like this, the laser 52 by cylindrical lens 63 is not directional light completely, and zone 53 is narrow when measuring, so can regard directional light as, can try to achieve the amount of particle same as the previously described embodimentsly.
In addition, in the corpuscular counter 510 shown in Figure 16, be provided with mirror lens 70 at the opposition side of photo detector 61 and sensitive lens 60.Thus, reflect by mirror lens 70 to the scattered light 55 of photo detector 61 opposition side scatterings, but optically focused can be tried to achieve population more efficiently to photo detector 61.
Below, utilize most preferred embodiment shown in the drawings that the structure of carrying of the present invention with the hand of robot is elaborated.
Figure 11～Figure 13 is the embodiment of expression carrying of the present invention with the hand 82 of robot 81.This hand 82 is arranged on from the storing unit of depositing load 83 and load 83 is taken out or load 83 is deposited carrying in the storing unit into the arm front end of robot 81.And the hand fork 84 that constitutes hand 82 is made of hollow shape, and the thickness of hand fork 84 is towards the front end of hand fork 84 and attenuation simultaneously.Therefore, can improve the rigidity of the cardinal extremity part of moment maximum.In addition, front is lighter than base end side, so the close base end side of the center of gravity of hand fork 84, simultaneously, hand fork 84 integral body obtain lightweight.Thus, carrying improves with the resonant frequency of robot 81, thereby can improve responsiveness.
In the present embodiment, as Figure 12 and shown in Figure 13, hand 82 has 3 double-deck parallel hand forks 84 of above-below direction.Therefore, the action of 1 time hand 82 can be carried 2 loads 83.The continuing surface 84a that above each hand fork 84 is load 83 is a horizontal plane, and simultaneously, the following 84b of hand fork 84 is the inclined plane towards the front end inclination of hand fork 84.Therefore, load 83 flatly can be placed on the hand 82.In addition, hand fork 84 about the side parallel to each other.
And the pipe thickness of hand fork 84 is certain.But, be not limited thereto, but the also front attenuation of the thickness of tube wall.Load 83 is such as being large-scale liquid-crystalline glasses.
In addition, the carrying with this hand 82 has 2 groups of following members with robot 81, that is: be rotatable the 1st arm 87 in center with the joint portion on the pedestal 85 86; The 2nd arm 89 that is connected with the joint portion 88 of the front of the 1st arm 87 rotatably; The hand 82 that is connected with the joint portion 90 of the leading section of the 2nd arm 89 rotatably.Be built-in with belt pulley at each joint portion 86,88,90, connect by synchronous belt respectively between the joint portion 86,88 and between the joint portion 88,90 simultaneously, be arranged to hand 82 all the time in the face of the state of certain direction and on straight line, move.
And carrying has elevating mechanism with robot 81.That is, arm 87,89 and hand 82 can liftings between the maximum height (shown in the double dot dash line among Figure 13) of the minimum altitude (shown in the solid line among Figure 13) of elevating mechanism and elevating mechanism.In addition, carrying can be moved along track 91 with robot 81.
The below above-mentioned carrying of the explanation action of the hand 82 of robot 81.
Utilize arm 87,89 to move hand 82, from the storing unit of depositing a large amount of loads 83, take out load 83.Because carrying improves with the resonant frequency of robot 81, so can make the responsiveness of hand 82 enough fast.Can shorten beat thus.
Make arm 87,89 actions after the placement, load 83 is moved to the position of regulations such as treating apparatus or other storing units.Here, the continuing surface 84a of hand fork 84 is a horizontal plane, load 83 can be maintained level.Even and the cardinal extremity of hand fork 84 is thicker, front end is thinner, so because of the weight of load 83 makes front towards the below bending, can prevent that also the load of placing on the following 84b of hand fork 84 of upside and the following hand fork 84 83 from interfering.
In addition, the foregoing description only is 1 most preferred embodiment of the present invention, but is not limited thereto, as long as in aim scope of the present invention, can carry out various distortion.Such as, in the present embodiment, be horizontal plane above the hand fork 84, simultaneously hand fork 84 below be the inclined plane, but be not limited thereto, also above for forward the face that has a down dip, following 84b be the horizontal plane or the inclined plane of going up forward.Or such as shown in figure 14, side 84c, the 84d about hand fork 84 is the inclined plane that front attenuates.In this occasion, also the side both sides about or only a side be the inclined plane.This moment hand fork 84 both also inclined plane of convergence of horizontal plane, top and bottom.
In addition, the material of hand fork 84 is composites of carbon fiber and resin in the present embodiment, but is not limited thereto, also other metals etc.
Claims (4)
- One kind in clean space, assemble, process, the industrial robot of operation such as carrying, it is characterized in that, the suction inlet of corpuscular counter of measuring the cleannes of described clean space is arranged on the hand of described industrial robot.
- 2. industrial robot as claimed in claim 1 is characterized in that, the suction inlet of described corpuscular counter is arranged on the front end of described hand.
- 3. industrial robot as claimed in claim 1, it is characterized in that, laser is shone measuring the zone, according to this mensuration region memory the scattered light that particle produced and in the corpuscular counter that particle is counted, described laser forms banded laser beam.
- 4. industrial robot as claimed in claim 3, it is characterized in that, have and make the test portion fluid that contains described particle towards the mobile flow passage device of certain direction, and the size of the width of described laser mobile test portion fluid greater than utilizing described flow passage device, and with the rectangular direction of the direction of advance of described laser on, laser passes the whole width of test portion fluid.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002316738A JP3970749B2 (en) | 2002-10-30 | 2002-10-30 | Industrial robot |
| JP2002316738 | 2002-10-30 | ||
| JP2002319387A JP2004148476A (en) | 2002-11-01 | 2002-11-01 | Hand of robot for carrier |
| JP2002319387 | 2002-11-01 | ||
| JP2003287784 | 2003-08-06 | ||
| JP2003287784 | 2003-08-06 |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200610004488 Division CN1862246A (en) | 2002-10-30 | 2003-10-30 | Particle counter |
| CN 200610004487 Division CN1861334A (en) | 2002-10-30 | 2003-10-30 | An industrial robot |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1498732A CN1498732A (en) | 2004-05-26 |
| CN1265943C true CN1265943C (en) | 2006-07-26 |
Family
ID=34279462
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2003101046625A Expired - Lifetime CN1265943C (en) | 2002-10-30 | 2003-10-30 | Industrial robot |
Country Status (3)
| Country | Link |
|---|---|
| KR (3) | KR20040038783A (en) |
| CN (1) | CN1265943C (en) |
| TW (3) | TWI274639B (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4731267B2 (en) * | 2005-09-29 | 2011-07-20 | 日本電産サンキョー株式会社 | Robot hand and workpiece transfer robot using the same |
| CN101342994B (en) * | 2008-08-20 | 2011-01-12 | 哈尔滨博实自动化股份有限公司 | Holder fork parallel move type palletizing mechanical arm |
| CN101823263B (en) * | 2009-03-07 | 2013-02-13 | 鸿富锦精密工业（深圳）有限公司 | Arm component of robot, manufacturing method thereof and robot with same |
| KR101139854B1 (en) * | 2010-04-13 | 2012-05-02 | 광주과학기술원 | Particle counter |
| KR101139858B1 (en) * | 2010-04-13 | 2012-05-02 | 광주과학기술원 | Particle counter |
| JP6271266B2 (en) * | 2014-01-29 | 2018-01-31 | 日本電産サンキョー株式会社 | Industrial robot |
| JP6456065B2 (en) * | 2014-05-16 | 2019-01-23 | 日本電産サンキョー株式会社 | Industrial robot hand and industrial robot |
| CN106001817A (en) * | 2016-06-29 | 2016-10-12 | 北京金迈斯智能设备科技有限公司 | Special robot for electrical discharge machine |
| CN109015722A (en) * | 2018-10-15 | 2018-12-18 | 重庆电讯职业学院 | A kind of industrial robot composite fixture |
| CN113340776A (en) * | 2020-03-02 | 2021-09-03 | 长鑫存储技术有限公司 | Material conveying system, automatic crown block walking area particle monitoring system and monitoring method |
| CN112102515A (en) * | 2020-09-14 | 2020-12-18 | 深圳优地科技有限公司 | Robot inspection method, device, equipment and storage medium |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0612943U (en) * | 1992-07-18 | 1994-02-18 | 株式会社堀場製作所 | Particle measuring device |
| US5479252A (en) * | 1993-06-17 | 1995-12-26 | Ultrapointe Corporation | Laser imaging system for inspection and analysis of sub-micron particles |
| JPH07209185A (en) * | 1994-01-13 | 1995-08-11 | Yokogawa Electric Corp | Surface scattering type turbidity meter |
| JPH09178645A (en) * | 1995-12-26 | 1997-07-11 | Rion Co Ltd | Light-scattering type particle counter |
| US5963315A (en) * | 1997-08-18 | 1999-10-05 | Motorola, Inc. | Method and apparatus for processing a semiconductor wafer on a robotic track having access to in situ wafer backside particle detection |
| JPH11165281A (en) * | 1997-12-04 | 1999-06-22 | Mitsubishi Heavy Ind Ltd | Moving structure of robot |
| JP2000085963A (en) * | 1998-09-16 | 2000-03-28 | Shin Meiwa Ind Co Ltd | Clean working device |
| JP3973006B2 (en) * | 2000-03-23 | 2007-09-05 | 日本電産サンキョー株式会社 | Double arm robot |
| KR100414157B1 (en) * | 2001-09-28 | 2004-01-13 | 삼성전자주식회사 | Apparatus for sampling a fluid sample and fluid analyzer having the same |
| KR20030091426A (en) * | 2002-05-28 | 2003-12-03 | 삼성전자주식회사 | manufacturing equipment having the particle detector |
-
2003
- 2003-10-29 KR KR1020030075853A patent/KR20040038783A/en active Search and Examination
- 2003-10-30 CN CNB2003101046625A patent/CN1265943C/en not_active Expired - Lifetime
- 2003-10-30 TW TW094109741A patent/TWI274639B/en not_active IP Right Cessation
- 2003-10-30 TW TW092130201A patent/TWI250924B/en not_active IP Right Cessation
- 2003-10-30 TW TW095108122A patent/TWI289201B/en not_active IP Right Cessation
-
2006
- 2006-03-28 KR KR1020060027769A patent/KR100807433B1/en not_active IP Right Cessation
- 2006-03-28 KR KR1020060027783A patent/KR20060079763A/en not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| TW200533483A (en) | 2005-10-16 |
| TWI274639B (en) | 2007-03-01 |
| KR20060079763A (en) | 2006-07-06 |
| TW200624794A (en) | 2006-07-16 |
| KR100807433B1 (en) | 2008-02-25 |
| TWI289201B (en) | 2007-11-01 |
| KR20060039415A (en) | 2006-05-08 |
| TWI250924B (en) | 2006-03-11 |
| CN1498732A (en) | 2004-05-26 |
| KR20040038783A (en) | 2004-05-08 |
| TW200408513A (en) | 2004-06-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100807433B1 (en) | Particle counter | |
| CN106662519B (en) | Apparatus, system and method for detecting particles | |
| CN101067597A (en) | Measuring unit and transportation system with the same | |
| CN1862246A (en) | Particle counter | |
| CN1261745C (en) | Nanoscale molecular matrix arrayer | |
| US6431014B1 (en) | High accuracy aerosol impactor and monitor | |
| CN100345273C (en) | Collimator | |
| EP1862793A1 (en) | High throughput particle counter | |
| JP6919756B2 (en) | Foreign matter inspection equipment, substrate processing equipment and substrate processing system | |
| CN101158645B (en) | Rotary type multichannel fluorescence excitation method based on input-output optical fiber | |
| CN102565092A (en) | Glass substrate defect inspection device and glass substrate defect inspection method | |
| CN111069078A (en) | Multifunctional visual detection platform | |
| KR20160148071A (en) | Particle characteristic diagnosis system having a particle sampling induction pipe module | |
| CN107314958A (en) | A kind of band makes the laser dust apparatus for measuring concentration and method of device for mark by oneself | |
| CN110160472A (en) | A kind of plate uses standard detection device and its detection method | |
| CN201107271Y (en) | Rotary type multichannel fluorescence excitation apparatus based on input-output optical fiber | |
| JP2014052245A (en) | Substance generation source specifying system and substance generation source specifying method | |
| WO2021175182A1 (en) | Material transportation system, and overhead hoist transfer traveling region particle monitoring system and monitoring method | |
| JP2009289776A (en) | Ultrasonic bonding apparatus | |
| KR20140125167A (en) | monitoring device for clean room | |
| CN212278812U (en) | Air-suction type counting seed discharging device | |
| CN107697604A (en) | Lid arrangement after a kind of automatic assembling sheet glass | |
| CN210253150U (en) | Detection system for precision parts | |
| TWM612833U (en) | Speed adjustable powder optical detection system | |
| JP2016212063A (en) | Dust detection device and dust detection system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170323 Address after: No. two Xingping Road, Pinghu Economic Development Zone, Zhejiang, China, No. 888 Patentee after: NIDEC SANKYO (ZHEJIANG) Corp. Patentee after: NIDEC SANKYO Corp. Address before: Japan, Suwa, Nagano Patentee before: NIDEC SANKYO Corp. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20060726 |