CN1249534A - Method and system for testing IC in wafer stage - Google Patents
Method and system for testing IC in wafer stage Download PDFInfo
- Publication number
- CN1249534A CN1249534A CN99118883.7A CN99118883A CN1249534A CN 1249534 A CN1249534 A CN 1249534A CN 99118883 A CN99118883 A CN 99118883A CN 1249534 A CN1249534 A CN 1249534A
- Authority
- CN
- China
- Prior art keywords
- traces
- conductive
- integrated circuits
- wafer
- test
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012360 testing method Methods 0.000 title claims abstract description 136
- 238000000034 method Methods 0.000 title claims abstract description 54
- 239000004065 semiconductor Substances 0.000 claims abstract description 23
- 230000008569 process Effects 0.000 claims abstract description 20
- 238000004519 manufacturing process Methods 0.000 claims description 20
- 230000002093 peripheral effect Effects 0.000 claims description 8
- 238000001465 metallisation Methods 0.000 claims description 6
- 238000010998 test method Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 24
- 238000000151 deposition Methods 0.000 claims 6
- 238000005520 cutting process Methods 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 238000003466 welding Methods 0.000 abstract 1
- 239000002184 metal Substances 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000000523 sample Substances 0.000 description 8
- 238000013461 design Methods 0.000 description 6
- 239000012212 insulator Substances 0.000 description 5
- 229910018182 Al—Cu Inorganic materials 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 101100125297 Agrobacterium vitis (strain S4 / ATCC BAA-846) iaaH gene Proteins 0.000 description 2
- 101100482081 Agrobacterium vitis (strain S4 / ATCC BAA-846) iaaM gene Proteins 0.000 description 2
- 102100029647 Apoptosis-associated speck-like protein containing a CARD Human genes 0.000 description 2
- 101100170834 Arabidopsis thaliana ERDJ3A gene Proteins 0.000 description 2
- 101100110004 Homo sapiens PYCARD gene Proteins 0.000 description 2
- 101100095600 Mus musculus Serinc1 gene Proteins 0.000 description 2
- 101100095608 Mus musculus Serinc3 gene Proteins 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 101150116154 tms1 gene Proteins 0.000 description 2
- 101150046289 tms2 gene Proteins 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910017813 Cu—Cr Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000037361 pathway Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/27—Testing of devices without physical removal from the circuit of which they form part, e.g. compensating for effects surrounding elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
Description
本发明涉及一种为了在晶片阶段测试集成电路而提供无源电测试结构的方法和系统。具体说,本发明涉及一种用于互连集成电路的方法和系统,它能以高效及成本有效的方式在晶片上测试器件功能。更具体说,本发明涉及这样一种方法和系统,其中,利用将集成电路的邻接的行列分开的晶片非占用区作为中间整备区域(staging area),从该区起对多个集成电路进行连接与互连,此晶片非占用区以下称“切口”(kerf)区。再具体说,本发明涉及一种在晶片阶段对集成电路进行测试的方法和系统,其中,在晶片的切口区形成导电迹线的正交栅格,因而提供了一种不减小成品器件用的晶片表面积的可靠而有效的测试结构。The present invention relates to a method and system for providing passive electrical test structures for testing integrated circuits at the wafer level. More particularly, the present invention relates to a method and system for interconnecting integrated circuits which enable on-wafer testing of device functionality in an efficient and cost-effective manner. More particularly, the present invention relates to a method and system in which multiple integrated circuits are connected using the unoccupied area of the wafer separating adjacent rows and columns of integrated circuits as an intermediate staging area With the interconnection, this non-occupied area of the wafer is hereinafter referred to as the "kerf" area. Still more particularly, the present invention relates to a method and system for testing integrated circuits at the wafer level, wherein an orthogonal grid of conductive traces is formed in the notch area of the wafer, thereby providing a method and system for testing integrated circuits without reducing the size of the finished device. Reliable and efficient test structures for large wafer surface areas.
在半导体晶片(以下称“晶片”)上对每个集成电路(以下称“器件”)进行机械性的探针测量以进行电气测试既昂贵又费时。需要有极精确的X、Y和空间定位,而且,几何尺寸极小的器件输入/输出周边或区阵探针焊点使得实施可靠的电接触非常困难,这就要求有非常精细的精密探针。这一困难而费时的探测工艺成了器件制造测试成本的主要部分。不良的测试探针接触会在测试中使得无缺陷器件显示出有缺陷而被废弃,从而减低晶片成品率。再者,随着器件的输入/输出连接端子数的增加,即通常说器件输入/输出“计数”增加,由于器件的工作频率增加,以及功耗增加,机械性的探针测量的物理和机械限制就会限制器件输入/输出计数的可能达到的数目、测试频率和最大器件功率。Mechanical probing of each integrated circuit (hereinafter "device") on a semiconductor wafer (hereinafter "wafer") for electrical testing is expensive and time consuming. Extremely precise X, Y, and spatial positioning is required, and the extremely small geometry of device input/output peripheral or zone array probe pads makes reliable electrical contact very difficult, requiring very fine precision probes . This difficult and time-consuming probing process constitutes a major part of the device manufacturing test cost. Poor contact of test probes will cause non-defective devices to be rejected during testing, thereby reducing wafer yield. Furthermore, as the number of input/output connection terminals of the device increases, that is, it is generally said that the input/output "count" of the device increases, due to the increase in the operating frequency of the device and the increase in power consumption, the physical and mechanical characteristics of the mechanical probe measurement Limitations limit the possible number of device input/output counts, test frequency, and maximum device power.
为解决这些问题,越来越强调集成电路的设计,以提供下述的器件测试方法,该方法中,一方面减少必须进行机械性接触的输入/输出焊点数,另一方面又保持测试的综合性能。R.W.巴赛(Basset)等人提出这样一种测试结构,称作边界扫描测试设计(boundary-scan testdesign),论文名为“有效的LSSD ASIC测试的边界扫描设计原理”,全文原载IBM J.Res.Develop.Vol.34,No.2/3,March/May 1990,将全文引用在此,以供参考。边界扫描测试利用这样一种设计,即将多个移位寄存器(SRLs)级联连接。在测试模式下,可将数据在待测试的器件的输入/输出周边依次扫入SRLs或从SRLs扫出。测试工艺简化为,将已知数据序列从级联的SRLs输入到功能电路中,然后存储结果,而后将被存储的值移出SRLs。To address these problems, increasing emphasis has been placed on the design of integrated circuits to provide device testing methods that reduce the number of input/output pads that must be mechanically contacted while maintaining test integration. performance. R.W. Basset and others proposed such a test structure, called boundary-scan test design (boundary-scan testdesign), the paper titled "Effective LSSD ASIC test boundary-scan design principle", the full text was originally published in IBM J. Res.Develop.Vol.34, No.2/3, March/May 1990, which is hereby incorporated by reference in its entirety. Boundary-scan testing utilizes a design in which multiple shift registers (SRLs) are connected in cascade. In test mode, data can be sequentially scanned into and out of SRLs around the input/output of the device under test. The test process is simplified to input a known data sequence from the cascaded SRLs into the functional circuit, store the result, and then move the stored value out of the SRLs.
边界扫描测试有一个问题,即尽管这种测试能确定内部器件电路的功能,但这种测试不可能对整个外部输入/输出焊点结构进行全面测试。Walther,Dasgupta和Srikishnan的发明是针对这一问题的。其专利号为U.S.Pat.,No.5,787,098,名为“用增强边界扫描方式通过低接触测试法对完整的芯片I/O进行测试”,发表于1998年7月28日。该发明描述了一种评价焊球输入/输出焊点的完整性的方法,在此全文引用以作参考。A problem with boundary-scan testing is that while it can confirm the functionality of the internal device circuitry, it is not possible to fully test the entire external I/O pad structure. The invention of Walther, Dasgupta and Srikishnan addresses this problem. Its patent number is U.S. Pat., No. 5,787,098, titled "Testing Complete Chip I/O by Low Contact Test Method Using Enhanced Boundary Scan Method", published on July 28, 1998. This invention describes a method of evaluating the integrity of solder ball input/output joints and is hereby incorporated by reference in its entirety.
从以上所述可以理解,需要有一种方法和系统,其中利用在晶片上的集成电路中的电气互联网,以便减少或不需要用机械性的探针测量作晶片阶段的集成电路测试。由于通过对多个集成电路的输入/输出接点同时进行电接触,故这种方法和系统将是有利的,用这种方式就能以更高的效率及有效性在晶片阶段对多个集成电路进行测试。From the foregoing it can be appreciated that there is a need for a method and system in which electrical interconnections in integrated circuits on a wafer are utilized to reduce or eliminate the need for mechanical probe measurements for wafer level integrated circuit testing. Such a method and system would be advantageous by simultaneously making electrical contact to the input/output contacts of multiple integrated circuits in such a way that multiple integrated circuits can be controlled at the wafer level with greater efficiency and effectiveness. carry out testing.
本发明的目的是为晶片阶段集成电路的测试提供一种无源电气测试结构。The object of the present invention is to provide a passive electrical test structure for the testing of integrated circuits at the wafer level.
本发明的另一目的是为互联集成电路提供一种方法和系统,这样能以高效及成本有效的方式对整个晶片上的器件功能进行测试。It is another object of the present invention to provide a method and system for interconnecting integrated circuits, which enables functional testing of devices across an entire wafer in an efficient and cost-effective manner.
本发明的再一个目的是提供利用晶片的切口区作为中间整备区域的方法和系统,从切口区起对多个集成电路的输入/输出接点进行电气接触和互连。It is yet another object of the present invention to provide methods and systems for utilizing the kerf area of a wafer as an intermediate staging area from which to electrically contact and interconnect input/output contacts of a plurality of integrated circuits.
本发明还有一个目的是为晶片阶段的集成电路的测试提供一种方法和系统,其中在晶片切口区形成正交的导电迹线栅格,因而提供一种可靠而高效的测试结构,且不减小用于成品器件的晶片表面积。Yet another object of the present invention is to provide a method and system for testing integrated circuits at the wafer level, wherein an orthogonal grid of conductive traces is formed in the wafer kerf area, thereby providing a reliable and efficient test structure without Reduces wafer surface area for finished devices.
如上所述可达到本发明的上述及其他目的。本发明公开了一种利用无源电气网络进行晶片阶段的集成电路测试的方法和系统。根据本发明,在制造过程中在半导体晶片上形成多个集成电路。在在晶片上制造集成电路的过程及部分过程中,将导电迹线、导电带与测试焊点淀积在晶片中未占用的区域上。这种未占用的区域包括晶片周边的区域和将邻近的集成电路分开的切口区。导电迹线形成在邻接的集成电路之间的切口区范围内的导电网络。利用导电带是为了在关键部位上互连导电迹线,并将迹线与集成电路上的输入/输出接点相连接。测试焊点在未占用的晶片周边区形成,并与导电迹线网络进行导电性连接。以这种方式形成晶片电气测试结构,由此可在从晶片切下集成电路前对其进行测试。The above and other objects of the present invention are achieved as described above. The invention discloses a method and a system for testing an integrated circuit at the wafer stage by using a passive electrical network. According to the present invention, a plurality of integrated circuits are formed on a semiconductor wafer during a manufacturing process. During, and part of, the fabrication of integrated circuits on a wafer, conductive traces, conductive straps, and test pads are deposited on unoccupied areas of the wafer. This unoccupied area includes the area around the wafer perimeter and the kerf area that separates adjacent integrated circuits. The conductive traces form a conductive network within the kerf area between adjacent integrated circuits. Conductive straps are utilized to interconnect conductive traces at critical locations and to connect the traces to input/output contacts on the integrated circuit. Test pads are formed on unoccupied peripheral areas of the wafer and are electrically connected to the conductive trace network. In this manner, wafer electrical test structures are formed whereby integrated circuits can be tested before they are diced from the wafer.
在附属的权利要求中阐述了本发明所具有的新颖特征。然而,通过参考如下实施例的详述和下述的附图,就可很好地理解本发明本身及其使用的优选模式、进一步的目的和优点,下述附图为:The novel features characteristic of the invention are set forth in the appended claims. However, a better understanding of the invention itself and its preferred mode of use, further objects and advantages, may be better understood by reference to the following detailed description of the embodiments and the following accompanying drawings:
图1描述晶片的概念性布局和如何按照本发明的优选实施例将大尺寸的测试焊点进行定位以便馈送(feed)到全部集成电路或子系统(列或行)或被其馈送;Figure 1 depicts the conceptual layout of the wafer and how large size test pads are positioned to feed to or be fed by overall integrated circuits or subsystems (columns or rows) in accordance with a preferred embodiment of the present invention;
图2图示按照本发明的优选实施例在晶片内的集成电路m×n阵列中的集成电路2×2阵列;Figure 2 illustrates a 2x2 array of integrated circuits in an mxn array of integrated circuits within a wafer in accordance with a preferred embodiment of the present invention;
图3A描述按照本发明的优选实施例的典型晶片阶段的布局图;Figure 3A depicts a layout diagram of a typical wafer stage in accordance with a preferred embodiment of the present invention;
图3B图示了一些紧靠着集成电路的切口区的细节;Figure 3B illustrates some details of the cutout area next to the integrated circuit;
图4描述按照本晶片阶段测试结构的本发明的优选实施例的晶片的放大区;Figure 4 depicts an enlarged area of a wafer according to a preferred embodiment of the present invention of the wafer stage test configuration;
图5图示晶片切口区的放大部位,在此部位上,已按照本发明的优选实施例形成了导电迹线;Figure 5 illustrates an enlarged portion of the wafer kerf area where conductive traces have been formed in accordance with a preferred embodiment of the present invention;
图6为典型的集成电路输入/输出接点定位的图解表示;以及Figure 6 is a diagrammatic representation of a typical integrated circuit input/output contact location; and
图7图示按照本发明的优选实施例靠近晶片周边的集成电路的互联网络。FIG. 7 illustrates an interconnection network of integrated circuits near the periphery of a wafer in accordance with a preferred embodiment of the present invention.
优选实施例详述Detailed Description of Preferred Embodiments
在优选实施例中,连同边界扫描“减少引脚”测试技术及以上提到的U.S.Pat.No.5,787,098所述的增强法一起来应用本发明,本发明将这些技术应用于整个晶片的测试,以便在晶片阶段减少引脚测试,而且创造一种既不需要复杂的测试夹具又不需要分步重复工序的结构,其中,在晶片阶段测试内,探针从器件至器件移动。通过缩短测试时间并减低了测试夹具的复杂度,这一改进减低了晶片阶段测试的成本。固定而较大的几何尺寸接点也消除了与已知的晶片分步重复机和探针机相关的在探针与焊点之间的良好的接触的不确定性,这样就排除了因电气接触差而造成的虚假成品率损失。In a preferred embodiment, the present invention is applied in conjunction with boundary scan "pin reduction" testing techniques and enhancements described in the above-mentioned U.S. Pat. In order to reduce pin testing at the wafer level and create a structure that requires neither complex test fixtures nor step-and-repeat procedures in which probes are moved from device to device during wafer level testing. This improvement lowers the cost of wafer-level testing by reducing test time and test fixture complexity. The fixed and larger geometry of the joints also eliminates the uncertainty of good contact between the probes and the pads associated with known wafer steppers and probers, thus eliminating the possibility of contact due to electrical contact. False yield loss due to poor quality.
现在描述晶片阶段的集成电路测试结构及形成和利用晶片阶段集成电路的测试结构的方法。这种结构或类似结构可用于对晶片阶段的集成电路进行全面测试。图1和2分别描述晶片的概念性布局,以及如何将普通的测试焊点进行定位以便馈送到全部集成电路或子系统(列或行)或被其馈送。图3A图示典型的晶片阶段布局。请注意集成电路位置之间的分离,如图3A的线所示,实际上构成了切口区,一般宽度在0.3与0.9mm之间,大多切口区在集成电路从晶片切下时消失。还请注意,绕晶片周边的打阴影的、不完整的、不能用的集成电路位置124,为大几何尺寸的测试焊点留了位置。图4到图7示出了为实现本发明的方法之一,其中导电迹线网络在晶片的切口区和周边区形成,并具有所有为实施本公开的测试结构所需要的全部连接。Wafer-level integrated circuit test structures and methods of forming and utilizing test structures for wafer-level integrated circuits are now described. This or a similar structure can be used for comprehensive testing of integrated circuits at the wafer level. Figures 1 and 2 respectively depict the conceptual layout of a wafer and how common test pads are positioned to feed to or be fed by an entire integrated circuit or subsystem (column or row). Figure 3A illustrates a typical wafer stage layout. Note that the separation between the IC locations, as shown by the lines in Figure 3A, actually constitutes the kerf area, typically between 0.3 and 0.9 mm in width, most of which disappears when the IC is diced from the wafer. Note also that the shaded, incomplete, unusable integrated circuit locations 124 around the perimeter of the wafer leave room for large geometry test pads. Figures 4 to 7 illustrate one of the methods for implementing the present invention in which a network of conductive traces is formed in the kerf and perimeter regions of the wafer with all connections required to implement the test structures of the present disclosure.
首先叙述利用一种测试结构来全面地测试集成电路的方法和系统,接着描述其组成及是如何形成的。图1是一顶视示意图,描述半导体晶片10(以下称晶片10)的可用表面面积的配置。晶片10的大部分表面面积被成品器件区12所占据,该区填满了包括集成电路24和26在内的多个集成电路。象切口区14这样窄而未被占领的通道位于集成电路之间,即,切口区位于邻近的集成电路24和26之间。晶片10的剩下的表面区位于晶片10周边区上,的即位于成品器件区12之外。如图1所述,晶片10的周边区可用作设置电源焊点16、接地焊点20、测试输入/输出焊点18和22的方便的位置。A method and system for comprehensively testing integrated circuits using a test structure is first described, followed by a description of its composition and how it is formed. FIG. 1 is a schematic top view illustrating the configuration of the usable surface area of a semiconductor wafer 10 (hereinafter referred to as wafer 10). Most of the surface area of
参照图2,对于晶片上集成电路的m×n阵列中的集成电路32、34、36和38的2×2阵列,描述了测试控制结构30。图2也描述通常控制类型的例子,比如可用于测试器件的测试模式选择线40和42(TMS1和TMS2)。这些控制与晶片阶段的测试焊点(如图7测试焊点300)连接,这些测试焊点是固定的,无需在从器件至器件步进地移动。假定测试焊点300在晶片周边彼此隔开,而且在单个器件上不密集于夹具周围,这自然就减低了用于提供无噪音、可靠的高频信号的测试仪探针机构和电子装置的复杂性。电源线46和48及接地线60和62通过每行或每列的共用栅格对所有器件进行供电。在本发明的一个实施例中,测试模式选择线40和42(TMS1和TMS2)以及测试时钟线44(TCK)符合IEEE 1149.1的进行边界扫描测试的标准,并可用来测试下述器件。Referring to Figure 2, a
电平敏感扫描设计(LSSD)时钟与控制50是输入装置,是为了提供扫描、内建自测试(BIST)或补充或替换按IEEE 1149。1标准所需的测试的其他测试而提供内部扫描寄存器的LSSD控制。全部m行选择线中的两行选择线52和54(X1和X2)如果需要的话可选择单行器件。同样,全部n列选择线中的两行选择线56和58(Y1和Y2)如果需要的话可选择单列器件。当按照IEEE 1149。1标准测试集成电路时,如果TMS线可用于列选择的话,可以不需要Y-控制。测试数据输入64和66(m行这种输入的TDI1和TDI2)分别给晶片特定行的全部器件馈送扫描输入。同样,行方式测试数据输出68和70(m行这种输出中的TD01和TD02)被给定行的全部扫描输出所馈送。Level Sensitive Scan Design (LSSD) Clock and
测试控制网络按图2来实施,晶片阶段集成电路的测试可用几种方式来完成。为同时测试单列的全部器件,启动全部X-控制,而仅选择Y-控制中的一个,或利用TMS(测试模式线)启动每行中的待测试的一个器件。然后,测试数据输入64和66将测试数据馈送到每行中所选的器件。同样,测试数据输出68和70从每行中所选器件扫出测试结果。这一控制程序同时可测m个器件(每行一个),使测试通过量呈m倍增加。通过将所有TMS/Y-控制排序,全部列的器件可在总数为n的步骤中被测试。为了诊断的目的,同时激活单行选择线52或54,和单列选择线56或58以选择一单个器件,然后以比常规制造测试中更仔细的方式对其进行分析。The test control network is implemented according to Figure 2, and the testing of integrated circuits at the wafer level can be accomplished in several ways. To test all devices in a single column simultaneously, activate all X-controls and select only one of the Y-controls, or use TMS (Test Mode Line) to activate one device in each row to be tested.
晶片阶段测试完成之后,将集成电路从晶片上切下来,并将位于切口区的测试控制线销毁。仍然保持与每个集成电路连接的测试控制线的片段不再与测试焊点相连,产生一个可能干扰器件性能的源。为防止这些“松动端”干扰器件的功能性,测试网络独创性地设计成控制线与正常器件输入/输出接点相连,该接点最后与电源或接地连接,或者说受其控制,以便不引入噪音或不干扰该设计的正常逻辑功能。另一方面,可以设计馈送或被测试焊点馈送的电路,这样这些网络就不干扰正常器件工作。After the wafer stage test is completed, the integrated circuit is cut from the wafer, and the test control lines located in the kerf area are destroyed. Segments of the test control lines that still remain connected to each integrated circuit are no longer connected to the test pads, creating a source of possible interference with device performance. To prevent these "loose ends" from interfering with the functionality of the device, the test network is ingeniously designed such that the control lines are connected to normal device input/output contacts, which are ultimately connected to, or controlled by, power or ground so as not to introduce noise or do not interfere with the normal logic function of the design. On the other hand, the circuits that feed or are fed by the pads under test can be designed so that these nets do not interfere with normal device operation.
现在参考图3A至7来描述无源电气测试结构配置及一组形成无源电气测试结构配置的方法。在此描述的工艺步骤的选择以偏离常规晶片加工工序最小为准则。如下段所述,以上提到的测试结构利用了网络方法,其中多个集成电路的输入/输出接点是利用在晶片切口区中形成的导电迹线互联的。这一网络方法容许对多个在晶片阶段的集成电路同时进行测试,同时保留用于成品器件的最大晶片表面积。A passive electrical test structure configuration and a set of methods of forming a passive electrical test structure configuration will now be described with reference to FIGS. 3A to 7 . The process steps described herein were selected to minimize deviation from conventional wafer processing procedures. As described in the next paragraph, the above-mentioned test structure utilizes a network approach in which the input/output contacts of multiple integrated circuits are interconnected using conductive traces formed in the kerf area of the wafer. This network approach allows simultaneous testing of multiple integrated circuits at the wafer stage while preserving maximum wafer surface area for finished devices.
图3A表示晶片布局,其中方形块代表集成电路120(例如DRAMs),它们每个都与切口区122邻接。为便于参考,图3A中的晶片100上附加一x-y坐标。集成电路120的定向是其边平行于x和y方向。晶片槽口130指向y方向。FIG. 3A shows a wafer layout in which square blocks represent integrated circuits 120 (eg, DRAMs), each of which adjoins a cutout region 122 . For ease of reference, an x-y coordinate is attached to the
集成电路的电流产生利用多层布线将内部器件电路与器件表面上的终端(端头通路或焊接点)连接。内部器件互联具有一般由Al-Cu构成的布线层,这些布线层由绝缘体薄膜隔开。有些技术中,可用铜线代替Al-Cu线。绝缘体上的布线图形和通路采用分步重复机和十字标线由投影光刻(比如5X)确定。通常,每个器件逐个曝光,一次一个。The current generation of an integrated circuit utilizes multiple layers of wiring to connect the internal device circuitry to terminals (terminal vias or pads) on the surface of the device. The internal device interconnection has wiring layers typically composed of Al-Cu separated by an insulator film. In some technologies, copper wires can be used instead of Al-Cu wires. The wiring patterns and pathways on the insulator are determined by projection lithography (eg 5X) using a step-and-repeat machine and reticles. Typically, each device is exposed individually, one at a time.
器件制造以形成器件终端来结束,通常采用1X掩模光刻工序。1X光刻的优点是用一个步骤在整个晶片上曝光而减低了成本。将器件终端设计成适于采用引线键合或IBM的可控塌陷芯片焊球连接法(C4)与印刷电路(PC)板连接。大多数诸如微处理器或应用专门电路(ASICs)的半导体集成电路产品的晶片布局类似于图3A所示的布局,所不同的是方块的尺寸。Device fabrication ends with the formation of device terminations, typically using a 1X masked photolithography process. The advantage of 1X lithography is the reduced cost of exposing the entire wafer in one step. Device terminations are designed for connection to printed circuit (PC) boards using wire bonding or IBM's Controlled Collapse Chip Ball Attachment method (C4). The die layout of most semiconductor integrated circuit products such as microprocessors or application specific circuits (ASICs) is similar to the layout shown in FIG. 3A except for the block size.
图3B描述了切口区标线图形142的一些细节,图形在每一步与产品一起曝光。如前所述,切口区通常确定为将邻近的集成电路位置分开的窄的划片线,当器件最终从晶片上切下来时将该划片线破坏。切口区往往含有几个功能区,其中包括测试结构、光刻和划片标记等。图3B示出沿每一器件位置144两边缘排列的功能性切口区,其中包括光刻标记、如对准辅助、临界尺寸测量位置(CDs)等。沿器件位置144的另一边缘是一方形测试区150,它包括成品和参数测量的测试结构。Figure 3B depicts some details of the
图4和5描述集成电路162、164、166和168所处的晶片(未示出)部分的放大图。水平的导电迹线160和垂直的导电迹线180分别与在位于测试区150或切口区145和155的对准区外图示的x和y方向对准。导电迹线160和180在图4和5中相对于测试和对准区140和150被放大了。实际上,每一组导电迹线所占空间可能比测试和对准区140和150窄。因此,尽管导电迹线160就180被描述成位于测试和对准区140和150之外,但它们的容易地紧靠每一个集成电路162、164、166和168位置来定位。4 and 5 depict enlarged views of the portion of the wafer (not shown) where
用于传输输入/输出信号的导电迹线180可以设计成宽度为5μm间距为10μm,这样大约50μm的空间可设置5条迹线。因而,小于0.1mm(100μm)的空间可用来在每一器件的两侧设置5条迹线,而且很容易适合于一般宽度为0.3-0.9mm的切口区。导电迹线160被用于对被测器件提供电源和接地,可用比用作信号传输的导电迹线180宽的导体来设计。例如,由四条导电迹线组成的布线轨所占宽度小于0.1mm,每条迹线宽度为10μm,间距为5μm,在两边缘之间分开。如果需要,导电迹线160可以加宽以传输大电流。然而,假设它们的相对工作周期短,通常可以设计成传输比用于成品器件的类似尺寸的导电迹线大很多的电流。The conductive traces 180 for transmitting input/output signals can be designed with a width of 5 μm and a pitch of 10 μm, so that 5 traces can be arranged in a space of approximately 50 μm. Thus, a space of less than 0.1 mm (100 μm) can be used to place 5 traces on both sides of each device, and can easily fit into a kerf area with a typical width of 0.3-0.9 mm.
为以下解释作参考,假设集成电路有一个终端金属层,它将器件与印刷电路版或其他适当的基板连接,并假设在终端金属下面,将布线层称为“末级金属”。对于没有终端金属的器件来说,最后两个金属化层(或布线工序)将被用于形成测试结构之目的。For the purposes of the following explanations, it is assumed that the integrated circuit has a terminal metal layer which connects the device to a printed circuit board or other suitable substrate, and assuming that below the terminal metal, the wiring layer is referred to as the "final metal". For devices without terminal metal, the last two metallization layers (or wiring steps) will be used for test structure purposes.
再参照图4和5,导电迹线160和180在确定末级金属层的同时形成,并与该金属层使用同样的金属材料(例如Al-Cu或Cu)。导电迹线160和180包含在步进机的曝光区内,如在切口区145和155的放大图中所描述的那样。导电迹线160和180的图形有意设计成在有源器件区之外,而且完全在切口区之内,当器件从主晶片上切下来时,大部分迹线将被破坏。如果导电迹线160或180的任何部分仍保留,则将被曝光的Al或Cu迹线材料与切口区隔开,不影响集成电路金属化的可靠性。虚线190示出邻接的器件/切口区之间的中点值的假想边界。每条迹线在穿进邻接的器件/切口区几微米(5到50μm)前中止。Referring again to FIGS. 4 and 5, the
导电迹线160和180的图形在与用来确定成品器件布线图形的同一工序中形成,即湿法或干法腐蚀工序,或雾状花纹(damascene)化学/机械抛光工序。如果是为某些类型的产品,在此阶段的布线图形通过1X掩模形成,然后用1X掩模形成导电迹线160和180。The patterning of
在形成导电迹线160和180及集成电路布线图形的末级金属图形化工序后,整个导体图形用绝缘体封闭(图4和5中未示出),该绝缘体通常用等离子体淀积的二氧化硅,有些情况下用诸如聚酰亚胺的有机绝缘体。绝缘体提供抗划痕涂层,并为防止可能的水汽腐蚀提供绝缘保护。After the final metal patterning process that forms the
接着绝缘层淀积,在绝缘层中开出两组通路200和210。在图5所示的实施例中,在分段的导电迹线160和180的端部附近开出通路200,这样,短导电带220就可被用来沿器件的行与列形成连续但又分开的导电路径。用这种方式,导电性地连接了导电迹线160的全部邻接段和导电迹线180的全部邻接段。由此,导电迹线160和180就在所示的x和y方向形成了具有连续导电路径的正交导电网络。图4描述了本发明的另一个实施例,其中导电迹线180被淀积作为y方向的导电路径。因此,通路200和导电带220仅被用来连接在x方向流通的导电迹线160的邻接段。如图4和5所描述,通路210为在适当的输入/输出接触位置上用导电带240将导电迹线160和180与集成电路162、164、166和168进行导电性连接提供了接触点。Next an insulating layer is deposited, and two sets of
通路200和210均按同一规则设计,而且两者均被完全沉陷(land)及用干湿法腐蚀,以便提供特定坡度的壁特性。在本发明的一实施例中,导电带220和240用金属材料形成,它可在器件上保持露出状态而无需考虑腐蚀问题,最好采用与用来形成引线键合或焊接终端同样的材料,诸如Cr-Cu-Cr,Ti/Pd/Au或Cr-Ni-Au层。这些带由1X掩模确定,通常用与制造终端图形同样的掩模。假如终端工艺不能有利地用来同时确定带,那么可采用一附加的1X掩模工艺来确定这些带。尽管导电带240被描述成处于末级金属层之上,然而本领域的技术人员都应理解导电迹线160和180与输入/输出接点235之间的连接也可用淀积在末级金属层下的布线层来完成,用层之间的通路进行连接。Both
图6是典型的集成电路的示意图,描述导电带240如何连接输入/输出接点235。在本发明的一实施例中,在器件250上附加了一组虚设焊点245。从器件250的下区可看出,每个虚设焊点245都与每个输入/输出接点235相连。在本发明的变型中,导电带240与虚设焊点245相接,因此保持器件输入/输出接点235表面的清晰以备其他终端连接之需要。FIG. 6 is a schematic diagram of a typical integrated circuit, illustrating how
图7示出本发明一实施例的靠近半导体晶片100周边附近的测试结构细节。在该实施例中,如果晶片100有8×8阵列的64个器件,如果每个器件需要10条信号迹线和4个电源/接地迹线,那么在y方向上总共形成80条导电迹线180以提供测试信号,在x方向上共形成32条导电迹线160以供电源和接地。导电迹线180用导电带280在晶片100周边附近与测试焊点300相连。本领域技术人员应理解尽管在附图中未示出,测试器件可以与测试焊点300相连以便为晶片阶段集成电路测试提供输入测试信号。本领域技术人员也应理解从晶片切下的接受器件可连接到测试焊点300以便接收输出测试结果。FIG. 7 shows details of a test structure near the periphery of the
导电迹线180可以分开,这样,如果需要,迹线的一半终止于晶片的一端,另一端终止于对面一端。尽管图7中未描述,将类似于测试焊点300的测试焊点置于晶片100的左半和右半,并用类似于导电带280的导电带与导电迹线160连接。利用与带220和240相同的掩模,导电带280和测试焊点300的图形可同时被形成。The conductive traces 180 can be split such that, if desired, one half of the trace terminates at one end of the wafer and the other end terminates at the opposite end. Although not depicted in FIG. 7 , test pads similar to
在半导体晶片100的周边,测试焊点300对列(y方向)中的一组器件提供传送专门信号和/或电源的能力,或对行(x方向)中的一组器件提供传送专门信号和/或电源的能力。这样,位于被选择的行和列的交叉点的专门器件就可被测试,整个列和整个行就可被同时测试,如果需要,全部器件都可被同时测试。At the periphery of the
尽管已参照了优选实施例特别地叙述了本发明,但本领域的技术人员应理解本发明可作各种形式和细节的变化而不偏离本发明的精神和范围。因此,可望作这种改进而不偏离本发明在所附权利要求中所规定的精神和范围。Although the present invention has been particularly described with reference to preferred embodiments, those skilled in the art will understand that various changes in form and details may be made therein without departing from the spirit and scope of the invention. Accordingly, such modifications are contemplated without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (16)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16282698A | 1998-09-29 | 1998-09-29 | |
US09/162826 | 1998-09-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN1249534A true CN1249534A (en) | 2000-04-05 |
Family
ID=22587288
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN99118883.7A Pending CN1249534A (en) | 1998-09-29 | 1999-09-16 | Method and system for testing IC in wafer stage |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR100313185B1 (en) |
CN (1) | CN1249534A (en) |
SG (1) | SG92654A1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6762431B2 (en) | 1998-12-28 | 2004-07-13 | Fujitsu Limited | Wafer-level package with test terminals |
CN103197227A (en) * | 2013-03-25 | 2013-07-10 | 西安华芯半导体有限公司 | Wafer testing method used for design analysis purpose |
CN116338442A (en) * | 2023-05-30 | 2023-06-27 | 深圳市微特精密科技股份有限公司 | Boundary scanning test system and self-detection method of DUT |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100389905B1 (en) * | 2001-03-22 | 2003-07-04 | 삼성전자주식회사 | Capacitive device array and fabricating method thereof |
US6882546B2 (en) * | 2001-10-03 | 2005-04-19 | Formfactor, Inc. | Multiple die interconnect system |
KR101918608B1 (en) | 2012-02-28 | 2018-11-14 | 삼성전자 주식회사 | Semiconductor package |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4288911A (en) * | 1979-12-21 | 1981-09-15 | Harris Corporation | Method for qualifying biased integrated circuits on a wafer level |
US4479088A (en) * | 1981-01-16 | 1984-10-23 | Burroughs Corporation | Wafer including test lead connected to ground for testing networks thereon |
JP2585799B2 (en) * | 1989-06-30 | 1997-02-26 | 株式会社東芝 | Semiconductor memory device and burn-in method thereof |
US5654588A (en) * | 1993-07-23 | 1997-08-05 | Motorola Inc. | Apparatus for performing wafer-level testing of integrated circuits where the wafer uses a segmented conductive top-layer bus structure |
US5898186A (en) * | 1996-09-13 | 1999-04-27 | Micron Technology, Inc. | Reduced terminal testing system |
-
1999
- 1999-08-14 KR KR1019990033497A patent/KR100313185B1/en not_active IP Right Cessation
- 1999-09-16 CN CN99118883.7A patent/CN1249534A/en active Pending
- 1999-09-17 SG SG9904662A patent/SG92654A1/en unknown
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6762431B2 (en) | 1998-12-28 | 2004-07-13 | Fujitsu Limited | Wafer-level package with test terminals |
US7071487B2 (en) | 1998-12-28 | 2006-07-04 | Fujitsu Limited | Wafer-level package having test terminal |
CN100372109C (en) * | 1998-12-28 | 2008-02-27 | 富士通株式会社 | Wafer level package, manufacturing method thereof, and method of manufacturing semiconductor device therefrom |
US7399990B2 (en) | 1998-12-28 | 2008-07-15 | Fujitsu Limited | Wafer-level package having test terminal |
US7642551B2 (en) | 1998-12-28 | 2010-01-05 | Fujitsu Microelectronics Limited | Wafer-level package having test terminal |
CN103197227A (en) * | 2013-03-25 | 2013-07-10 | 西安华芯半导体有限公司 | Wafer testing method used for design analysis purpose |
CN116338442A (en) * | 2023-05-30 | 2023-06-27 | 深圳市微特精密科技股份有限公司 | Boundary scanning test system and self-detection method of DUT |
Also Published As
Publication number | Publication date |
---|---|
KR20000022722A (en) | 2000-04-25 |
SG92654A1 (en) | 2002-11-19 |
KR100313185B1 (en) | 2001-11-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0070861B1 (en) | Wafer and method of testing networks thereon | |
US5818249A (en) | Probe card having groups of probe needles in a probing test apparatus for testing semiconductor integrated circuits | |
US5654588A (en) | Apparatus for performing wafer-level testing of integrated circuits where the wafer uses a segmented conductive top-layer bus structure | |
US4467400A (en) | Wafer scale integrated circuit | |
US5594273A (en) | Apparatus for performing wafer-level testing of integrated circuits where test pads lie within integrated circuit die but overly no active circuitry for improved yield | |
US7329899B2 (en) | Wafer-level redistribution circuit | |
US7616015B2 (en) | Wafer type probe card, method for fabricating the same, and semiconductor test apparatus having the same | |
US5262719A (en) | Test structure for multi-layer, thin-film modules | |
JPH0230165A (en) | Manufacture of plurality of selectable power semiconductor chip | |
KR100356637B1 (en) | System lsi chip and method of manufacturing the same | |
US6307162B1 (en) | Integrated circuit wiring | |
US20070035318A1 (en) | Donut-type parallel probe card and method of testing semiconductor wafer using same | |
JP2874682B2 (en) | Semiconductor device | |
EP1284499B1 (en) | Semiconductor wafer for in-process testing an integrated circuit and corresponding manufacturing method | |
US6472900B1 (en) | Efficient device debug system | |
CN1249534A (en) | Method and system for testing IC in wafer stage | |
US6475871B1 (en) | Passive multiplexor test structure for integrated circuit manufacturing | |
JP4041663B2 (en) | Semiconductor device and its inspection device | |
Hess et al. | Drop in process control checkerboard test structure for efficient online process characterization and defect problem debugging | |
JP3124983B2 (en) | Electric circuit inspection equipment | |
JP3135135B2 (en) | Semiconductor device, its manufacturing method, its testing method and its testing device | |
Thacker et al. | Compliant probe substrates for testing high pin-count chip scale packages | |
JPH01318245A (en) | Probe card inspection jig | |
TWI721424B (en) | Space transformer, probe card, and manufacturing methods thereof | |
Davies et al. | Silicon substrate test structures for hybrid wafer scale technology |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
WD01 | Invention patent application deemed withdrawn after publication |