CN113983308A - Optical vibration reduction platform with adjustable multiple degrees of freedom - Google Patents
Optical vibration reduction platform with adjustable multiple degrees of freedom Download PDFInfo
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- CN113983308A CN113983308A CN202111608985.2A CN202111608985A CN113983308A CN 113983308 A CN113983308 A CN 113983308A CN 202111608985 A CN202111608985 A CN 202111608985A CN 113983308 A CN113983308 A CN 113983308A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 56
- 230000009467 reduction Effects 0.000 title claims abstract description 34
- 230000035939 shock Effects 0.000 claims abstract description 10
- 239000006096 absorbing agent Substances 0.000 claims abstract description 8
- 238000009434 installation Methods 0.000 abstract description 10
- 230000008878 coupling Effects 0.000 abstract description 8
- 238000010168 coupling process Methods 0.000 abstract description 8
- 238000005859 coupling reaction Methods 0.000 abstract description 8
- 230000005284 excitation Effects 0.000 abstract description 8
- 238000001228 spectrum Methods 0.000 abstract description 8
- 238000000034 method Methods 0.000 abstract description 7
- 230000005540 biological transmission Effects 0.000 abstract description 3
- 230000008859 change Effects 0.000 abstract description 3
- 230000007547 defect Effects 0.000 abstract description 2
- 230000007613 environmental effect Effects 0.000 abstract description 2
- 230000009466 transformation Effects 0.000 abstract description 2
- 238000013016 damping Methods 0.000 description 16
- 238000006073 displacement reaction Methods 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000695 excitation spectrum Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/043—Allowing translations
- F16M11/045—Allowing translations adapted to left-right translation movement
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/043—Allowing translations
- F16M11/046—Allowing translations adapted to upward-downward translation movement
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/16—Details concerning attachment of head-supporting legs, with or without actuation of locking members thereof
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/18—Heads with mechanism for moving the apparatus relatively to the stand
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2230/00—Purpose; Design features
- F16F2230/0005—Attachment, e.g. to facilitate mounting onto confer adjustability
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Vibration Prevention Devices (AREA)
Abstract
The invention provides an optical vibration reduction platform with adjustable multiple degrees of freedom, which comprises: installing a base; the intermediate body is connected with the mounting base through a shock absorber; the wedge type adjusting body is connected to the middle body in a sliding mode; the workbench is arranged on the intermediate body, and the lower end surface of the workbench is matched with and contacted with the shape of the upper end surface of the wedge type adjusting body; a lift adjustment assembly; a level adjustment assembly. The multi-degree-of-freedom adjustable optical vibration reduction platform can be used independently or in combination, and is suitable for complex optical path coupling alignment, installation and positioning occasions with high precision requirements and uncertain or frequent transformation of vibration excitation frequency spectrum characteristics of use environments; the method is particularly suitable for the optical path coupling alignment and the installation and adjustment positioning of a complex optical system which has the defects of large number of optical elements, complex coupling optical path, long transmission distance, need of combining a plurality of optical platforms, and frequent change of installation and use places and large environmental vibration excitation frequency spectrum difference.
Description
Technical Field
The invention relates to the technical field of optical platforms, in particular to an optical vibration reduction platform with adjustable multiple degrees of freedom.
Background
The existing optical platform commonly used for arranging and installing optical elements and optical paths is usually installed on an air floatation supporting vibration damping system, the air floatation supporting vibration damping system is usually designed for fixing vibration damping and isolating frequency according to the vibration excitation frequency spectrum characteristics of a use environment, and each supporting point of the air floatation supporting vibration damping system has a certain real-time leveling function through air pressure adjustment and is mostly suitable for independent use of a single platform; when the number of optical elements is large, the coupling light path is complex, the transmission distance is long, and a plurality of platforms are needed to be jointly used, the adjusting process is complex, and the relative stability between the platforms is poor. In addition, the optical platform in the prior art is not suitable for the use mode of a complex optical system which needs to frequently change an installation and use place with uncertain vibration excitation frequency spectrum, and the long-time relative stability of the combined use of a plurality of platforms is poor.
Disclosure of Invention
The present invention is directed to solving at least one of the problems of the prior art.
Therefore, the invention provides an optical vibration reduction platform with adjustable multiple degrees of freedom.
The invention provides an optical vibration reduction platform with adjustable multiple degrees of freedom, which comprises: installing a base; the intermediate body is connected with the mounting base through a shock absorber; the wedge type adjusting body is connected to the middle body in a sliding mode; the workbench is arranged on the intermediate body, and the lower end surface of the workbench is matched with and contacted with the shape of the upper end surface of the wedge type adjusting body; the lifting adjusting assembly is rotatably connected to the intermediate body and is rotatably connected to the wedge type adjusting body to drive the wedge type adjusting body to displace; and the horizontal adjusting assembly is rotatably connected to the intermediate body, and one end of the horizontal adjusting assembly is connected with the workbench to drive the workbench to displace.
The invention provides an optical vibration reduction platform with adjustable multiple degrees of freedom. And setting a vibration damping and isolating system according to the total load and the requirement of the initial vibration damping performance, and selecting a proper vibration damper. Thus, the damper is assembled to provide a vibration damping and isolation system having a particular initial resonant frequency. The lower end surface of the workbench is matched and contacted with the upper end surface of the wedge type adjusting body in shape. Specifically, the workbench is provided with a special angle inclined plane which is the same as the wedge-type adjusting body, and the wedge-type sliding block adjusting mechanism is formed after the wedge-type adjusting body and the workbench are assembled, so that the adjusting precision is high, and the contact rigidity is high.
The optical vibration reduction platform with the adjustable multiple degrees of freedom according to the technical scheme of the invention can also have the following additional technical characteristics:
in the technical scheme, the workbench and the intermediate body are provided with first waist-shaped holes in the horizontal direction, and the locking screws of the workbench body are screwed in the first waist-shaped holes.
In the technical scheme, the first kidney-shaped hole is arranged along the horizontal direction of the length of the workbench, so that the workbench, the wedge-type adjusting body and the intermediate body are tightly connected into a whole, the rigidity is high, and the stability is good; on the other hand, the displacement of the worktable in the horizontal direction is matched.
In the above technical solution, the lift adjustment assembly includes: and the lifting adjusting bolt is rotationally connected with the intermediate body and is rotationally connected to the wedge type adjusting body.
In the technical scheme, the wedge type adjusting body is driven to move by adjusting the lifting adjusting bolt, so that the workbench is driven to lift along the vertical direction by small displacement.
In the above technical solution, the level adjustment assembly includes: the middle body is provided with a second waist-shaped hole in the vertical direction, and the horizontal adjusting bolt is screwed to the second waist-shaped hole and is connected with the workbench.
In the technical scheme, the workbench is driven to translate along the left and right directions by adjusting the horizontal adjusting bolt. Therefore, the workbench can translate left and right and can also lift by matching with the lifting adjusting component. The whole structure is simple, the linkage is strong, and the operation is convenient.
In the above technical solution, the method further comprises: and the strip-shaped locking pad is arranged between the mounting base and the intermediate body.
In the technical scheme, the strip-shaped locking pad can inhibit the action of the shock absorber after being assembled, so that the whole optical shock absorption platform becomes a rigid body and meets the specific use performance requirement.
In the above technical solution, the method further comprises: and the levelness adjuster is arranged on the lower end surface of the mounting base.
In the technical scheme, the levelness adjuster is connected with the mounting base through the levelness mounting bolt, and the workbench body has the levelness leveling function after being assembled.
In the above technical solution, the method further comprises: and the levelness adjusting bolt is rotatably connected to the mounting base and is connected with the levelness adjuster.
In the above technical solution, the method further comprises: and the rigidity adjusting screw group is arranged on the mounting base and the intermediate body.
In the technical scheme, multiple groups of rigidity adjusting screw groups with different diameters can be arranged, so that the resonance frequency of the vibration damping and isolating system can be selected according to the vibration excitation frequency spectrum characteristics, and the scheme has the function of switching between rigid bodies. In addition, the function of 'shaking' of the workbench caused by man-made interference can be avoided.
Compared with the prior art, the invention has the following beneficial effects:
1. the inclined plane angle of a wedge type slide block adjusting mechanism consisting of the workbench body and the wedge type adjusting body can be designed within a certain range according to requirements of lifting adjusting stroke size, positioning accuracy, trapezoidal lifting adjusting bolt torque and the like, and the requirements of mounting and laying optical loads with different complexity degrees and different qualities are met, so that the lifting function is achieved;
2. the horizontal integral adjusting mechanism consisting of the workbench and the horizontal adjusting component has an adjusting function;
3. the initial vibration damping and isolating performance of a vibration damping system consisting of the vibration dampers can be designed according to the vibration excitation frequency spectrum characteristics of the use environment, and the corresponding vibration dampers are selected, so that the vibration damping and isolating system has the initial vibration damping and isolating performance;
4. the effective stroke size and the arrangement quantity of the levelness regulators can be designed according to the installation base and the total load thereof, so that the levelness regulators have a levelling function;
5. the multi-degree-of-freedom adjustable optical vibration reduction platform can be used independently or in combination, and is suitable for complex optical path coupling alignment, installation and positioning occasions with high precision requirements and uncertain or frequent transformation of vibration excitation frequency spectrum characteristics of use environments; the method is particularly suitable for the optical path coupling alignment and the installation and adjustment positioning of a complex optical system which has the defects of large number of optical elements, complex coupling optical path, long transmission distance, need of combining a plurality of optical platforms, and frequent change of installation and use places and large environmental vibration excitation frequency spectrum difference.
Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a front view of an adjustable multiple degree of freedom optical vibration reduction stage of the present invention;
FIG. 2 is a side view of the adjustable multiple degrees of freedom optical vibration reduction stage of FIG. 1.
Wherein, the correspondence between the reference numbers and the component names in fig. 1 to 2 is:
1. a table body locking screw; 2. a strip-shaped locking pad; 3. a levelness adjuster; 4. installing a bolt in a levelness manner; 5. installing a base; 6. an intermediate; 7. a wedge type adjusting body; 8. a work table; 9. a coupling screw; 10. a shock absorber; 11. mounting screws; 12. a lifting adjusting bolt; 13. a horizontal adjusting bolt; 14. a levelness adjusting bolt; 15. rigidity adjusting screw group.
Detailed Description
In order that the above objects, features and advantages of the present invention can be more clearly understood, a more particular description of the invention will be rendered by reference to the appended drawings. It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflict.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced otherwise than as specifically described herein, and thus the scope of the present invention is not limited by the specific embodiments disclosed below.
An adjustable multiple degree of freedom optical vibration reduction stage provided according to some embodiments of the present invention is described below with reference to fig. 1-2.
Some embodiments of the present application provide an optical vibration reduction platform that is adjustable with multiple degrees of freedom.
As shown in fig. 1 to fig. 2, a first embodiment of the present invention provides an optical vibration reduction platform with adjustable multiple degrees of freedom, including: a mounting base 5; the intermediate body 6 is connected with the mounting base 5 through a shock absorber 10; a wedge-type adjusting body 7 connected to the intermediate body 6 in a sliding manner; the workbench 8 is arranged on the intermediate body 6, and the lower end surface of the workbench is matched with and contacted with the shape of the upper end surface of the wedge-type adjusting body 7; the lifting adjusting component is rotatably connected to the intermediate body 6 and is screwed to the wedge-type adjusting body 7 to drive the wedge-type adjusting body to move; and the horizontal adjusting assembly is rotatably connected to the intermediate body 6, and one end of the horizontal adjusting assembly is connected with the workbench 8 to drive the workbench to displace.
The invention provides an optical vibration reduction platform with adjustable multiple degrees of freedom.A lower end of a vibration reducer 10 is arranged on an installation base 5 through an installation screw 11, and an upper end of the vibration reducer is connected with an intermediate body 6 through a connecting screw 9. A vibration damping and isolation system is provided based on the total load and initial vibration damping performance requirements and the appropriate shock absorber 10 is selected. Thus, shock absorber 10 is assembled to provide a shock absorbing and vibration isolating system having a particular initial resonant frequency. The lower end surface of the working table 8 is matched and contacted with the shape of the upper end surface of the wedge type adjusting body 7. Specifically, the workbench 8 is provided with a special angle inclined plane which is the same as that of the wedge-type adjusting body 7, and the wedge-type sliding block adjusting mechanism is formed after being assembled with the wedge-type adjusting body 7, so that the adjusting precision is high, and the contact rigidity is high.
The second embodiment of the invention provides an optical vibration reduction platform with adjustable multiple degrees of freedom, and on the basis of the first embodiment, a first horizontal waist-shaped hole is formed in the working table 8 and the intermediate body 6, and a table body locking screw 1 is screwed in the first waist-shaped hole.
In the embodiment, the first kidney-shaped hole is arranged along the horizontal direction of the length of the workbench 8, so that on one hand, the workbench 8, the wedge-type adjusting body 7 and the intermediate body 6 are tightly connected into a whole, the rigidity is high, and the stability is good; on the other hand, the displacement of the worktable 8 in the horizontal direction is matched.
The third embodiment of the present invention provides an optical vibration reduction platform with adjustable multiple degrees of freedom, and on the basis of any of the above embodiments, the lifting adjustment assembly includes: and the lifting adjusting bolt 12 is rotatably connected to the intermediate body 6 and is screwed to the wedge type adjusting body 7.
In this embodiment, the wedge-type adjusting body 7 is driven to move by adjusting the lifting adjusting bolt 12, so as to drive the worktable 8 to lift by small displacement along the vertical direction.
A fourth embodiment of the present invention provides an optical vibration reduction platform with adjustable multiple degrees of freedom, and based on any of the above embodiments, the horizontal adjustment assembly includes: the middle body 6 is provided with a second waist-shaped hole in the vertical direction, and the horizontal adjusting bolt 13 is screwed to the second waist-shaped hole and connected with the workbench 8.
In this embodiment, the horizontal adjusting bolt 13 is adjusted to drive the workbench 8 to translate along the left-right direction by small displacement. Therefore, the workbench 8 can translate left and right and can also lift by matching with the lifting adjusting component. The whole structure is simple, the linkage is strong, and the operation is convenient.
The fifth embodiment of the present invention provides an optical vibration reduction platform with adjustable multiple degrees of freedom, and on the basis of any of the above embodiments, the optical vibration reduction platform further includes: and the strip-shaped locking pad 2 is arranged between the mounting base 5 and the middle body 6.
In this embodiment, the strip-shaped locking pad 2 can inhibit the action of the vibration damper 10 after being assembled, so that the whole optical vibration damping platform becomes a 'rigid body' to meet the specific use performance requirements.
The sixth embodiment of the present invention provides an optical vibration reduction platform with adjustable multiple degrees of freedom, and on the basis of any of the above embodiments, the optical vibration reduction platform further includes: and the levelness adjuster 3 is arranged on the lower end surface of the mounting base 5.
In this embodiment, the leveller 3 is connected to the mounting base 5 by means of levelness mounting bolts 4, which when assembled provides a levelness leveling function to the body of the table 8.
A seventh embodiment of the present invention provides an optical vibration reduction platform with adjustable multiple degrees of freedom, and on the basis of any of the above embodiments, the optical vibration reduction platform further includes: and a levelness adjusting bolt 14 rotatably connected to the mounting base 5 and connected to the levelness adjuster 3.
The first embodiment of the present invention provides an optical vibration reduction platform with adjustable multiple degrees of freedom, further comprising: and a rigidity adjusting screw group 15 provided to the mounting base 5 and the intermediate body 6.
In this embodiment, the stiffness adjusting screw set 15 may be provided in multiple sets and have different diameters, so that the resonant frequency of the vibration damping and isolating system can be selected according to the vibration excitation spectrum characteristics, and the present solution has a function of switching between "rigid bodies". In addition, the function of shaking the workbench 8 caused by man-made interference can be avoided.
In the description herein, the description of the terms "one embodiment," "some embodiments," "specific embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. The utility model provides an optical vibration reduction platform of multi freedom adjustable which characterized in that includes:
installing a base;
the intermediate body is connected with the mounting base through a shock absorber;
the wedge type adjusting body is connected to the middle body in a sliding mode;
the workbench is arranged on the intermediate body, and the lower end surface of the workbench is matched with and contacted with the shape of the upper end surface of the wedge type adjusting body;
the lifting adjusting assembly is rotatably connected to the intermediate body and is rotatably connected to the wedge type adjusting body to drive the wedge type adjusting body to displace;
and the horizontal adjusting assembly is rotatably connected to the intermediate body, and one end of the horizontal adjusting assembly is connected with the workbench to drive the workbench to displace.
2. The multi-degree-of-freedom adjustable optical vibration reduction platform according to claim 1, wherein the workbench and the intermediate body are provided with first horizontal kidney-shaped holes, and the first kidney-shaped holes are screwed with platform body locking screws.
3. The adjustable multiple degree of freedom optical vibration reduction platform of claim 2, wherein the elevation adjustment assembly comprises:
and the lifting adjusting bolt is rotationally connected with the intermediate body and is rotationally connected to the wedge type adjusting body.
4. The multi-degree-of-freedom adjustable optical vibration reduction platform of claim 3, wherein the leveling assembly comprises:
the middle body is provided with a second waist-shaped hole in the vertical direction, and the horizontal adjusting bolt is screwed to the second waist-shaped hole and is connected with the workbench.
5. The adjustable multiple degree of freedom optical vibration reduction platform according to any one of claims 1 to 4, further comprising:
and the strip-shaped locking pad is arranged between the mounting base and the intermediate body.
6. The adjustable multiple degree of freedom optical vibration reduction platform according to any one of claims 1 to 4, further comprising:
and the levelness adjuster is arranged on the lower end surface of the mounting base.
7. The adjustable multiple degree of freedom optical vibration reduction platform of claim 6, further comprising:
and the levelness adjusting bolt is rotatably connected to the mounting base and is connected with the levelness adjuster.
8. The adjustable multiple degree of freedom optical vibration reduction platform according to any one of claims 1 to 4, further comprising:
and the rigidity adjusting screw group is arranged on the mounting base and the intermediate body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111608985.2A CN113983308B (en) | 2021-12-27 | 2021-12-27 | Optical vibration reduction platform with adjustable multiple degrees of freedom |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111608985.2A CN113983308B (en) | 2021-12-27 | 2021-12-27 | Optical vibration reduction platform with adjustable multiple degrees of freedom |
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| CN113983308A true CN113983308A (en) | 2022-01-28 |
| CN113983308B CN113983308B (en) | 2022-04-01 |
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