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CN113910709A - Vacuum glass and manufacturing method thereof - Google Patents

Vacuum glass and manufacturing method thereof Download PDF

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Publication number
CN113910709A
CN113910709A CN202010646521.XA CN202010646521A CN113910709A CN 113910709 A CN113910709 A CN 113910709A CN 202010646521 A CN202010646521 A CN 202010646521A CN 113910709 A CN113910709 A CN 113910709A
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CN
China
Prior art keywords
glass
glass sheet
vacuum
surface support
sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202010646521.XA
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Chinese (zh)
Inventor
王磊
范欣玉
王元麒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hainan University
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Hainan University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hainan University filed Critical Hainan University
Priority to CN202010646521.XA priority Critical patent/CN113910709A/en
Publication of CN113910709A publication Critical patent/CN113910709A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B3/00Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
    • B32B3/02Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by features of form at particular places, e.g. in edge regions
    • B32B3/08Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by features of form at particular places, e.g. in edge regions characterised by added members at particular parts
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B33/00Layered products characterised by particular properties or particular surface features, e.g. particular surface coatings; Layered products designed for particular purposes not covered by another single class
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00Ancillary operations in connection with laminating processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00Ancillary operations in connection with laminating processes
    • B32B38/18Handling of layers or the laminate
    • B32B38/1858Handling of layers or the laminate using vacuum
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02Physical, chemical or physicochemical properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02Physical, chemical or physicochemical properties
    • B32B7/022Mechanical properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02Physical, chemical or physicochemical properties
    • B32B7/027Thermal properties
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00Surface treatment of glass, not in the form of fibres or filaments, by etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/10Properties of the layers or laminate having particular acoustical properties
    • B32B2307/102Insulating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/30Properties of the layers or laminate having particular thermal properties
    • B32B2307/304Insulating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/50Properties of the layers or laminate having particular mechanical properties

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Joining Of Glass To Other Materials (AREA)

Abstract

The vacuum glass is provided with an outer layer glass sheet and one or more layers of middle layer glass sheets, wherein the distance between two side surfaces of each middle layer glass sheet and the edge is 1-10 cm, the two side surfaces of each middle layer glass sheet are used as frames, areas in the frames on the two side surfaces of each middle layer glass sheet are selectively etched, and un-etched areas on the two side surfaces of each middle layer glass sheet are respectively used as a first surface support and a second surface support, so that the first surface support and the second surface support do not have overlapped areas in the direction vertical to the plane of the glass; the frames on the two sides of the middle-layer glass sheet are sealed and attached to the glass sheets on the two sides into a whole through molecular bonding. The whole process of the invention omits all complex process procedures in the prior art, does not need to arrange solder for high-temperature edge sealing, does not need to arrange support points in advance, can be directly output after sheet combination in a vacuum environment with small volume, greatly breaks through and improves the production efficiency compared with the prior art, and greatly simplifies the production process.

Description

Vacuum glass and manufacturing method thereof
Technical Field
The invention relates to vacuum glass.
Background
In the prior art, the sound and heat insulation effect of the vacuum glass mainly depends on the vacuum degree in the sealed cavity, and the manufacturing difficulty index is rapidly improved along with the improvement of the vacuum degree. The support points need to be arranged in the manufacturing process, the arrangement process requirement of the support points is high, if the height of the support points exceeds an error, the stress of the convex support points is far larger than that of the adjacent support points during vacuum pumping, so that the glass is very easy to break at the support points, the manufacturing failure of the whole piece of vacuum glass is caused, and the high failure rate of the vacuum glass in the production process is a main factor causing the high cost of the vacuum glass. Therefore, the supporting points are usually fixed without using an adhesive which may cause height errors, and ensuring that the supporting points do not move stably in the manufacturing process also becomes one of the difficulties in laying. After the production is finished, the supporting points which are not fixed are easy to move and fall off, and the appearance effect is greatly influenced. On the other hand, the supporting points also become the direct factor of heat conduction of the vacuum glass, and sound and heat are conducted through the supporting points on the two sides of the double-layer vacuum glass, so that the product effect is directly influenced. Thirdly, the edges of the double-layer glass sheets of the vacuum glass are sealed by the solder, the solder needs to be melted and sealed in a high-temperature furnace, and the process requirement is high.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the problems that the supporting point arrangement process is complicated and the heat conduction is caused by the supporting points in the vacuum glass manufacturing process need to be solved; the frame sealing problem caused by the welding material sealing process is avoided.
The vacuum glass is provided with an outer layer glass sheet and one or more layers of interlayer glass sheets, and is characterized in that: the distance between the two side surfaces of the middle-layer glass sheet and the edge is 1-10 cm, the two side surfaces of the middle-layer glass sheet are used as frames, the inner areas of the frames on the two side surfaces of the middle-layer glass sheet are selectively etched, and the unetched areas on the two side surfaces of the middle-layer glass sheet are respectively used as a first surface support and a second surface support, so that the first surface support and the second surface support do not have overlapped areas in the direction vertical to the plane of the glass; the frames on the two sides of the middle-layer glass sheet are sealed and attached to the glass sheets on the two sides into a whole through molecular bonding.
As an example, the first or second face support is point-shaped with a diameter not exceeding 5 mm.
As an example, the first face support or the second face support is linear or curved with a width not exceeding 5 mm.
By way of example, the distribution density of the middle un-etched area of the interlayer glass sheet in the frame is higher than that of the area close to the edge.
In an embodiment, the first surface support is shaped like a radial line from the middle to the edge of the area in the frame, the second surface support is shaped like a plurality of concentric circles from the center of the radial line to the frame, and one side surface or both side surfaces at the intersection point of the radial line and the concentric circles are etched in the direction perpendicular to the glass plane.
As an example, the first and second face supports are both point-like.
As a special case, both sides of the interlayer glass sheet are completely etched except for the frame, and no un-etched area exists.
The manufacturing method of the vacuum glass is characterized in that: preparing three or more layers of flat glass sheets for manufacturing vacuum glass, planning an etching area on an intermediate layer glass sheet, taking two side faces of the intermediate layer glass sheet, which are 1-10 cm away from edges, as frames which do not need to be etched, and selectively etching an area in the frames by using hydrofluoric acid to ensure that a first face support and a second face support do not have an overlapped area in a direction vertical to a glass plane; the frames on the two sides of the middle layer glass sheet and the outer layer glass sheets on the two sides are sealed and attached into a whole through molecular bonding, and the glass is manufactured in a vacuum environment in a way of sheet combination or sheet combination and then vacuum pumping.
The invention discloses vacuum glass and a manufacturing method thereof, which can greatly improve the problems of complex support point arrangement process, support point falling, high thermal conductivity and high requirement on a solder edge sealing process. Therefore, compared with the prior art, the production efficiency is greatly broken through and improved, the production process is greatly simplified, and the breakage rate is almost zero.
The support points on the two sides of the middle-layer glass sheet are arranged through etching, the height error of the support points is avoided, the support point arrangement process requirement of continuous production is not required, the etched glass sheet as a semi-finished product can be produced in stages without fixing the support points, and therefore the problems of support point falling and fixing are avoided.
The molecular bonding sealing is adopted in the vacuum state of the middle cavity, the sealing effect is good, the complex processes of solder laying and multi-section temperature control melting edge sealing in the traditional process are avoided, and the edge sealing process is greatly simplified.
Hydrofluoric acid etching degree of depth is even, etching depth is less than 1mm, can only regard the frame as the support this moment completely, monoblock vacuum glass receives the atmospheric pressure effect, the middle part of outer glass piece is incurved slightly, furthest's bending degree is for contacting at middle part certain outer glass piece and intermediate level glass piece, the middle part has only 0 ~ 3 contact points in essence microcosmically, the yield of outer glass piece this moment does not reach the intensity that makes the glass piece damaged far away, and the vacuum layer between outer glass piece and the intermediate level glass piece still exists, consequently, the thermal-insulated effect that gives sound insulation that vacuum glass has still exists. The whole process is further simplified, the production efficiency is further improved, and the requirements of the production process and the production conditions are greatly reduced.
Drawings
Figure 1 is a schematic view of the overall structure of the invention,
figure 2 is a schematic view of an example of a first side structure of an interlayer glass sheet,
figure 3 is a schematic view of an example of a second side structure of an interlayer glass sheet,
figure 4 is a schematic view of a cross-sectional structure of an embodiment of the present invention,
figure 5 is an enlarged view at a in figure 4,
FIG. 6 is a schematic cross-sectional view of a second embodiment of the present invention,
figure 7 is an enlarged view at B in figure 6,
figure 8 is a front view of a fully etched unsupported vacuum glass,
fig. 9 is a schematic cross-sectional structure of fig. 8.
In the figure: 1-frame, 2-first face support, 3-second face support, 4-outer glass sheet, 6-interlayer glass sheet, and 7-vacuum layer.
Detailed Description
The invention is further described below with reference to the accompanying drawings: as shown in fig. 1, 4 and 6, the vacuum glass is provided with an outer layer glass sheet 4 and one or more layers of interlayer glass sheets 6, which are usually one or two layers of interlayer glass sheets 6, wherein the distance between two side surfaces of the interlayer glass sheets 6 and the edge is 1-10 cm, the two side surfaces are taken as a frame 1, all adjacent glass sheets at the frame 1 of the finished vacuum glass are sealed and jointed into a whole through molecular bonding when the vacuum layer is under vacuum negative pressure, and in order to achieve the purpose that the surfaces are sealed and jointed through molecular bonding, the surfaces of the glass sheets at the frame are necessarily smooth and the roughness is lower than the mirror surface standard.
The areas within the frame 1 on both sides of the intermediate glass sheet 6 are selectively etched, in particular the areas within the frame 1 are completely etched. Typically, a planned area of the glass is etched by hydrofluoric acid, and the etched area is used as a semi-finished product which can be stored as an interlayer glass sheet for later use.
The unetched areas on the two side surfaces of the middle-layer glass sheet 6 are respectively used as the first surface support 2 and the second surface support 3, so that the etching planning areas of the first surface support 2 and the second surface support 3 in the direction perpendicular to the glass plane are free of overlapping areas, and the heat and sound isolation of the two side surfaces can be realized by utilizing a vacuum layer.
As an example of an etching plan area, the first face support 2 or the second face support 3 is in the form of a dot with a diameter of not more than 5mm, in a special case the first face support 2 and the second face support 3 are both in the form of dots. And the first face support 2 and the second face support 3 do not coincide, seen in a direction perpendicular to the plane of the glass sheet, preferably the first face support 2 and the second face support 3 are provided with a spacing of more than 5mm in a direction along the plane of the glass sheet.
In a second embodiment, the first face support 2 or the second face support 3 is linear or curved with a width not exceeding 5mm, and the first face support 2 and the second face support 3 do not overlap when viewed in a direction perpendicular to the plane of the glass sheet, preferably the first face support 2 and the second face support 3 are provided with a spacing of more than 5mm in a direction along the plane of the glass sheet.
The distribution density of the middle un-etched area of the interlayer glass sheet 6 in the frame 1 is higher than that of the area close to the edge. Because the central position of the glass sheet of the frame is bent to be closest to the central position under the action of the negative pressure of the vacuum area, the supporting point is concentrated at the central position.
As shown in fig. 1, 2 and 3, the first surface support 2 is in a radial shape from the middle of the area in the frame 1 to the edge, the second surface support 3 is in a multi-layer concentric circle shape from the center of the radial to the frame 1, and one side surface or both side surfaces at the intersection point of the radial and the concentric circle are etched in the direction perpendicular to the glass plane.
As a special case, both sides of the intermediate glass sheet 6 are completely etched except for the frame, and there is no unetched region. Because hydrofluoric acid etching degree of depth is even, and the etching degree of depth is less than 1mm, can only regard the frame as the support completely this moment, and monoblock vacuum glass receives atmospheric pressure effect, and the middle part of outer glass piece is incurved slightly, and furthest's bending degree is for contacting at middle part certain outer glass piece and intermediate level glass piece, and the middle part has 0 ~ 3 contact points in essence microcosmically, and can not have more contact points. At the moment, the yield of the outer layer glass sheet is far less than the strength of breaking the glass sheet, and the vacuum layer between the outer layer glass sheet and the middle layer glass sheet still exists, so the sound insulation and heat insulation functions of the vacuum glass still exist. The whole process is further simplified, the production efficiency is further improved, and the requirements of the production process and the production conditions are greatly reduced.
According to the manufacturing method of the vacuum glass, three or more layers of flat glass sheets of the vacuum glass are prepared, the surfaces are required to be smooth and flat, the roughness of the frame is lower than the mirror surface standard, the middle layer glass sheet 6 is planned to be an etching area, the distance between the two side surfaces of the middle layer glass sheet 6 and the edge is 1-10 cm, the middle layer glass sheet is used as the frame 1 which does not need to be etched, and the area in the frame 1 is selectively etched or completely etched by hydrofluoric acid. So that the first face support 2 and the second face support 3 have no overlapping area in the direction perpendicular to the plane of the glass; the etched glass sheet is used as an interlayer glass sheet for standby, the frames 1 on two side surfaces of the interlayer glass sheet 6 and the outer glass sheets 4 on two side surfaces are laminated in a vacuum chamber, the frames are sealed and attached into a whole through molecular bonding when the glass sheet returns to the atmosphere, the molecular bonding sealing is adopted in the vacuum state of the middle cavity, the sealing effect is good, the complex processes of solder laying and multi-section temperature-control melting edge sealing in the traditional process are avoided, and the edge sealing process is greatly simplified. Or the vacuum layer can be vacuumized through the air nozzle to achieve the purpose, and the vacuum degree of the vacuum area can be maintained through repeated vacuumizing.

Claims (8)

1. Vacuum glass provided with an outer glass sheet (4) and one or more intermediate glass sheets (6), characterized in that: the distance between the two side faces of the middle-layer glass sheet (6) and the edges is 1-10 cm, the two side faces are used as frames (1), the areas in the frames (1) on the two side faces of the middle-layer glass sheet (6) are selectively etched, and the unetched areas on the two side faces of the middle-layer glass sheet (6) are used as a first face support (2) and a second face support (3) respectively, so that the first face support (2) and the second face support (3) are free of overlapping areas in the direction perpendicular to the plane of the glass; the frames (1) on the two side surfaces of the middle layer glass sheet (6) and the glass sheets on the two side surfaces are sealed and attached into a whole through molecular bonding.
2. The vacuum glass as claimed in claim 1, wherein: the first surface support (2) or the second surface support (3) is in a dot shape with the diameter not more than 5 mm.
3. The vacuum glass as claimed in claim 1, wherein: the first surface support (2) or the second surface support (3) is in a straight line or curve shape with the width not exceeding 5 mm.
4. The vacuum glass as claimed in claim 1, wherein: the distribution density of the middle layer glass sheet (6) in the middle area in the frame (1) is higher than that of the area close to the edge.
5. The vacuum glass as claimed in any one of claims 1 to 4, wherein: the shape of the first surface support (2) is a radial line shape from the middle part of an area in the frame (1) to the edge, the shape of the second surface support (3) is a multilayer concentric circle shape from the center of the radial line to the frame (1), and one side surface or both side surfaces at the intersection point of the radial line and the concentric circle are etched in the direction perpendicular to the glass plane.
6. Vacuum glass according to any one of claims 1 to 4, wherein: the first surface support (2) and the second surface support (3) are both in a point shape.
7. The vacuum glass as claimed in claim 1, wherein: the two side faces of the interlayer glass sheet (6) are completely etched except the frame, and no un-etched area exists.
8. A method for manufacturing a vacuum glass as defined in any one of claims 1 to 7, wherein: preparing three-layer or multi-layer flat glass sheets for manufacturing vacuum glass, planning an etching area for the middle-layer glass sheet (6), taking two side faces of the middle-layer glass sheet (6) which are 1-10 cm away from the edge as a frame (1) which does not need etching, and selectively etching the area in the frame (1) by using hydrofluoric acid to ensure that the first surface support (2) and the second surface support (3) do not have a superposed area in the direction vertical to the plane of the glass; the frames (1) on the two side surfaces of the middle layer glass sheet (6) and the outer layer glass sheets on the two side surfaces are sealed and attached into a whole through molecular bonding, and the glass is manufactured in a vacuum environment in a way of sheet combination or sheet combination and then vacuum pumping.
CN202010646521.XA 2020-07-07 2020-07-07 Vacuum glass and manufacturing method thereof Pending CN113910709A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010646521.XA CN113910709A (en) 2020-07-07 2020-07-07 Vacuum glass and manufacturing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010646521.XA CN113910709A (en) 2020-07-07 2020-07-07 Vacuum glass and manufacturing method thereof

Publications (1)

Publication Number Publication Date
CN113910709A true CN113910709A (en) 2022-01-11

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201066022Y (en) * 2007-06-06 2008-05-28 兆宁 Metal vacuum heat-insulation plate
CN102446809A (en) * 2010-10-12 2012-05-09 S.O.I.Tec绝缘体上硅技术公司 Process for molecular bonding of silicon and glass substrate
US20120213951A1 (en) * 2011-02-22 2012-08-23 Guardian Industries Corp. Vanadium-based frit materials, and/or methods of making the same
CN103241964A (en) * 2013-04-27 2013-08-14 洛阳兰迪玻璃机器股份有限公司 Vacuum glass with intermediate spacer plate
CN104541365A (en) * 2012-02-08 2015-04-22 康宁股份有限公司 Processing flexible glass with a carrier
JP2015202992A (en) * 2014-04-15 2015-11-16 旭硝子株式会社 vacuum double glazing
CN105293877A (en) * 2015-11-05 2016-02-03 金弼 Manufacturing method and equipment for composite glass
CN212446590U (en) * 2020-07-07 2021-02-02 海南大学 Vacuum glass

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201066022Y (en) * 2007-06-06 2008-05-28 兆宁 Metal vacuum heat-insulation plate
CN102446809A (en) * 2010-10-12 2012-05-09 S.O.I.Tec绝缘体上硅技术公司 Process for molecular bonding of silicon and glass substrate
US20120213951A1 (en) * 2011-02-22 2012-08-23 Guardian Industries Corp. Vanadium-based frit materials, and/or methods of making the same
CN104541365A (en) * 2012-02-08 2015-04-22 康宁股份有限公司 Processing flexible glass with a carrier
CN103241964A (en) * 2013-04-27 2013-08-14 洛阳兰迪玻璃机器股份有限公司 Vacuum glass with intermediate spacer plate
JP2015202992A (en) * 2014-04-15 2015-11-16 旭硝子株式会社 vacuum double glazing
CN105293877A (en) * 2015-11-05 2016-02-03 金弼 Manufacturing method and equipment for composite glass
CN212446590U (en) * 2020-07-07 2021-02-02 海南大学 Vacuum glass

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