CN113917187B - Reconfigurable acceleration sensor - Google Patents
Reconfigurable acceleration sensor Download PDFInfo
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- CN113917187B CN113917187B CN202111173680.3A CN202111173680A CN113917187B CN 113917187 B CN113917187 B CN 113917187B CN 202111173680 A CN202111173680 A CN 202111173680A CN 113917187 B CN113917187 B CN 113917187B
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- acceleration sensor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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Abstract
A reconfigurable acceleration sensor comprising: a substrate; the paper folding structure beam is arranged on the substrate and comprises a first folding film structure, a second folding film structure, a third folding film structure and a fourth folding film structure, and is fixedly connected with the substrate through a first V-shaped beam and a second V-shaped beam; the suspension electrode is arranged between the substrate and the paper folding structure beam, and two ends of the suspension electrode are respectively connected with the first spring structure and the second spring structure; the first spring structure and the second spring structure are fixedly connected to the substrate through a third V-shaped beam and a fourth V-shaped beam respectively; the extending direction of the paper folding structure beam is intersected with the extending directions of the first spring structure and the second spring structure. The sensitivity and the measuring range of the acceleration sensor are reconfigurable by controlling the V-shaped beam, so that the sensitivity and the detecting range of the acceleration sensor are improved.
Description
Technical Field
The invention belongs to the technical field of microelectronic devices, and particularly relates to a reconfigurable acceleration sensor.
Background
Acceleration sensors can measure the speed of movement of an object, and are widely required in applications such as inertial measurement, inertial navigation and vibration measurement. Common acceleration sensors include capacitive, inductive, strain, piezoresistive, piezoelectric, and the like. With the development of the Internet of things technology in China, higher requirements are put forward on the performance of the sensor, and the requirements on the integrated functionalization of the device are stronger.
Therefore, it is necessary to design a high-performance acceleration sensor that is more sensitive and has a large detection range.
Disclosure of Invention
The invention aims to provide a reconfigurable acceleration sensor, which has the following specific technical scheme:
a reconfigurable acceleration sensor, the acceleration sensor comprising:
a substrate (1);
the paper folding structure beam (2 a) is arranged on the substrate, the paper folding structure beam (2 a) comprises a first folding film structure (2 b 1), a second folding film structure (2 b 2), a third folding film structure (2 b 3) and a fourth folding film structure (2 b 4), and the paper folding structure beam (2 a) is fixedly connected with the substrate (1) through a first V-shaped beam (4 a 1) and a second V-shaped beam (4 a 2); the suspension electrode (5) is arranged between the substrate (1) and the paper folding structure beam (2 a), and two ends of the suspension electrode (5) are respectively connected with the first spring structure (3 a) and the second spring structure (3 b);
the first spring structure (3 a) and the second spring structure (3 b) are fixedly connected to the substrate (1) through a third V-shaped beam (4 a 3) and a fourth V-shaped beam (4 a 4) respectively;
the extending direction of the paper folding structure beam (2 a) is intersected with the extending directions of the first spring structure (3 a) and the second spring structure (3 b).
Optionally, the first folded film structure (2 b 1) and the second folded film structure (2 b 2) are concavely folded from the upper surface of the paper folding structure beam (2 a).
Optionally, the third folded film structure (2 b 3) and the fourth folded film structure (2 b 4) are concavely folded from the lower surface of the paper folding structure beam (2 a).
Optionally, the first folded film structure (2 b 1), the second folded film structure (2 b 2) and the third folded film structure (2 b 3), the fourth folded film structure (2 b 4) do not overlap each other.
Optionally, the first V-beam (4 a 1), the second V-beam (4 a 2), the third V-beam (4 a 3), the fourth V-beam (4 a 4) are fixedly connected to the substrate (1) by anchor regions.
Optionally, the first spring structure (3 a) and the second spring structure (3 b) are symmetrically arranged with respect to the suspension electrode (5).
Optionally, the suspension electrode (5) is correspondingly arranged in a central area below the paper folding structural beam (2 a).
Optionally, two ends of the paper folding structural beam (2 a) are respectively connected to the convex vertex areas of the first V-shaped beam (4 a 1) and the second V-shaped beam (4 a 2).
Optionally, the first spring structure (3 a) and the second spring structure (3 b) are connected to the concave apex regions of the third V-beam (4 a 3) and the fourth V-beam (4 a 4), respectively.
Optionally, the anchor region is an electrically conductive input terminal for applying an electrical current to the first (4 a 1), second (4 a 2), third (4 a 3), fourth (4 a 4) V-beams.
The acceleration sensor provided by the invention can enable the sensitivity and the measuring range of the acceleration sensor to have reconfigurability by controlling the V-shaped beam, so that the sensitivity of the acceleration sensor is flexible to adjust and the detecting range is large. In addition, the acceleration sensor is flexible in design, simple in structure and good in process compatibility.
Drawings
Fig. 1 is a top view of a reconfigurable acceleration sensor.
The method comprises the following steps: a substrate (1), a paper-folded structural beam (2 a), a first folded film structure (2 b 1), a second folded film structure (2 b 2), a first spring structure (3 a), a second spring structure (3 b), a first V-beam (4 a 1), a second V-beam (4 a 2), a third V-beam (4 a 3), a fourth V-beam (4 a 4), a first V-beam anchor region (4 b 1), (4 b 2), a second V-beam anchor region (4 b 3), (4 b 4), a third V-beam anchor region (4 b 5), (4 b 6), a fourth V-beam anchor region (4 b 7), (4 b 8).
Fig. 2 is a cross-sectional view of a reconfigurable acceleration sensor.
The method comprises the following steps: a substrate (1), a paper folding structural beam (2 a), a first folding film structure (2 b 1), a second folding film structure (2 b 2), a third folding film structure (2 b 3), a fourth folding film structure (2 b 4), a first V-shaped beam (4 a 1), a second V-shaped beam (4 a 2) and a suspended electrode (5).
Fig. 3 is a cross-sectional view of a reconfigurable acceleration sensor.
The method comprises the following steps: a substrate (1), a paper folding structural beam (2 a), a third V-shaped beam (4 a 3), a fourth V-shaped beam (4 a 4), a first spring structure (3 a), a second spring structure (3 b) and a suspended electrode (5).
Detailed Description
The invention is further described below with reference to the accompanying drawings.
Referring to fig. 1, 2 and 3, the acceleration sensor includes a substrate 1, a folded beam 2a, and first, second, third, fourth and fourth folded film structures 2b1, 2b2, 2b3, 2b4 on the folded beam 2a, a suspension electrode 5, a first spring structure 3a, a second spring structure 3b, a first V-beam 4a1, a second V-beam 4a2, a third V-beam 4a3, a fourth V-beam 4a4, and first V-beam anchor regions 4b1, 4b2, second V-beam anchor regions 4b3, 4b4, third V-beam anchor regions 4b5, 4b6, and fourth V-beam anchor regions 4b7, 4b8. The two ends of the paper folding structure beam 2a are respectively connected with a first V-shaped beam 4a1 and a second V-shaped beam 4a2, the first V-shaped beam 4a1 is connected with first V-shaped beam anchor areas 4b1 and 4b2, the second V-shaped beam 4a2 is connected with second V-shaped beam anchor areas 4b3 and 4b4, a suspension electrode 5 is positioned below the paper folding structure beam 2a, two ends of the suspension electrode 5 are respectively connected with a first spring structure 3a and a second spring structure 3b, the first spring structure 3a is connected with a third V-shaped beam 4a3, the third V-shaped beam 4a3 is connected with third V-shaped beam anchor areas 4b5 and 4b6, the second spring structure 3b is connected with a fourth V-shaped beam anchor area 4a4, and the fourth V-shaped beam 4a4 is connected with fourth V-shaped beam anchor areas 4b7 and 4b8.
The substrate 1 is, for example, a substrate common in the art, including silicon or glass.
The paper folding structural beam 2a is arranged on the substrate and is fixedly connected with the substrate 1 through the first V-shaped beam 4a1 and the second V-shaped beam 4a 2. The paper folding structure beam 2a has a structure similar to paper folding, and comprises a first folding film structure 2b1 and a second folding film structure 2b2 which are concavely folded from the upper surface of the paper folding structure beam 2a, and a third folding film structure 2b3 and a fourth folding film structure 2b4 which are concavely folded from the lower surface of the paper folding structure beam 2 a. Optionally, the first folded film structure 2b1, the second folded film structure 2b2 and the third folded film structure 2b3, the fourth folded film structure 2b4 do not overlap each other.
A suspension electrode 5 disposed between the substrate 1 and the folded-paper structural beam 2a, preferably disposed in a central region below the folded-paper structural beam 2 a; since the suspension electrode 5 is connected to the substrate 1 by the first spring structure 3a and the second spring structure 3b, the overlapping area of the suspension electrode 5 and the folded structure beam (2 a) is variable.
Wherein, the extending direction of the paper folding structural beam 2a is crossed with the extending directions of the first spring structure 3a and the second spring structure 3 b; preferably, they are perpendicular to each other.
Alternatively, the first spring structure 3a and the second spring structure 3b are symmetrically arranged with respect to the suspension electrode 5.
Optionally, two ends of the paper folding structural beam 2a are respectively connected to the outer convex vertex areas of the first V-shaped beam 4a1 and the second V-shaped beam 4a2, so that when the first V-shaped beam 4a1 and the second V-shaped beam 4a2 are expanded by heating, the paper folding structural beam 2a is extruded, and the paper folding structural beam 2a is bent downwards under the action of the folding film structures 2b1, 2b2, 2b3 and 2b4.
Optionally, the first and second spring structures 3a, 3b are connected to the concave apex regions of the third and fourth V-beams 4a3, 4a, respectively, such that the third and fourth V-beams 4a3, 4a are thermally expanded such that the first and second spring structures 3a, 3b are stretched.
Optionally, the first V-beam anchor regions 4b1, 4b2, the second V-beam anchor regions 4b3, 4b4, the third V-beam anchor regions 4b5, 466, the fourth V-beam anchor regions 4b7, 4b8 also serve as electrically conductive input terminals for applying an electrical current to the first V-beam (4 a 1), the second V-beam (4 a 2), the third V-beam (4 a 3), the fourth V-beam (4 a 4).
The using method of the acceleration sensor is as follows: acceleration from the y direction causes the suspension electrode 5 to deviate from the original position, so that the overlapping area of the suspension electrode 5 and the upper paper folding structure beam 2a is changed, thereby generating capacitance change, and completing the measurement of the acceleration. After the current is applied to the first V-shaped beam anchor areas 4b1 and 4b2 and the second V-shaped beam anchor areas 4b3 and 4b4, the first V-shaped beam 4a1 and the second V-shaped beam 4a2 are heated to expand and squeeze the paper folding structural beam 2a, so that the paper folding structural beam 2a is downwards bent under the action of the folding film structures 2b1, 2b2, 2b3 and 2b4, the distance between the paper folding structural beam and the suspension electrode 5 is reduced, the initial capacitance is increased, the sensitivity is increased, and the paper folding structural beam is suitable for the condition of small acceleration. After the third V-beam anchor regions 4b5, 4b6 and the fourth V-beam anchor regions 4b7, 4b8 apply a current, the third V-beam 4a3 and the fourth V-beam 4a4 expand thermally so that the first spring structure 3a and the second spring structure 3b are stretched, and the stiffness is increased, thereby realizing the reconfiguration of the acceleration detection range, and being suitable for the case of large acceleration. The acceleration sensor has the advantages of double-parameter reconfigurability, flexible sensitivity adjustment, large detection range, flexible design, simple structure and the like.
The sensitivity and the measuring range of the acceleration sensor can be reconfigurable by controlling the V-shaped beam, so that the sensitivity of the acceleration sensor is flexible to adjust, and the detecting range is large. In addition, the acceleration sensor is flexible in design, simple in structure and good in process compatibility.
The reconfigurable acceleration sensor of the present invention is different from other acceleration sensors, and has the following main characteristics:
1. the V-shaped beam is connected with the paper folding structure beam, the sensitivity is reconfigurable by driving the V-shaped beam, the sensor has good sensitivity adjustment performance;
2. the V-shaped beam is connected with the suspension electrode, and the structural rigidity of the spring is changed by driving the V-shaped beam, so that the reconfigurable detection range is realized, and the sensor has a wide and flexible detection range;
3. the acceleration sensor is manufactured without special materials and is completely compatible with a typical MEMS processing technology.
The above description is merely of preferred embodiments of the present invention, and the scope of the present invention is not limited to the above embodiments, but all equivalent modifications or variations according to the present disclosure will be within the scope of the claims.
Claims (10)
1. A reconfigurable acceleration sensor, the acceleration sensor comprising:
a substrate (1);
the paper folding structure beam (2 a) is arranged on the substrate, the paper folding structure beam (2 a) comprises a first folding film structure (2 b 1), a second folding film structure (2 b 2), a third folding film structure (2 b 3) and a fourth folding film structure (2 b 4), and the paper folding structure beam (2 a) is fixedly connected with the substrate (1) through a first V-shaped beam (4 a 1) and a second V-shaped beam (4 a 2);
the suspension electrode (5) is arranged between the substrate (1) and the paper folding structure beam (2 a), and two ends of the suspension electrode (5) are respectively connected with the first spring structure (3 a) and the second spring structure (3 b);
the first spring structure (3 a) and the second spring structure (3 b) are fixedly connected to the substrate (1) through a third V-shaped beam (4 a 3) and a fourth V-shaped beam (4 a 4) respectively;
the extending direction of the paper folding structure beam (2 a) is intersected with the extending directions of the first spring structure (3 a) and the second spring structure (3 b).
2. A reconfigurable acceleration sensor according to claim 1, characterized in, that the first folded film structure (2 b 1), the second folded film structure (2 b 2) are concavely folded from the upper surface of the folded structure beam (2 a).
3. A reconfigurable acceleration sensor according to claim 1 or 2, characterized in, that the third folded film structure (2 b 3), the fourth folded film structure (2 b 4) are concavely folded from the lower surface of the folded structure beam (2 a).
4. A reconfigurable acceleration sensor according to claim 3, characterized in that the first folded film structure (2 b 1), the second folded film structure (2 b 2) and the third folded film structure (2 b 3), the fourth folded film structure (2 b 4) do not overlap each other.
5. A reconfigurable acceleration sensor according to claim 1, characterized in, that the first (4 a 1), second (4 a 2), third (4 a 3), fourth (4 a 4) V-beams are fixedly connected to the substrate (1) by anchor areas.
6. A reconfigurable acceleration sensor according to claim 1, characterized in, that the first spring structure (3 a) and the second spring structure (3 b) are symmetrically arranged with respect to the suspension electrode (5).
7. A reconfigurable acceleration sensor according to claim 1 or 6, characterized in, that the suspension electrodes (5) are arranged correspondingly in a central area below the folded structure beam (2 a).
8. A reconfigurable acceleration sensor according to claim 1, characterized in that the two ends of the folded beam (2 a) are connected to the convex apex areas of the first V-beam (4 a 1) and the second V-beam (4 a 2), respectively.
9. A reconfigurable acceleration sensor according to claim 1 or 8, characterized in, that the first (3 a) and second (3 b) spring structures are connected to the concave apex areas of the third (4 a 3) and fourth (4 a 4) V-beams, respectively.
10. A reconfigurable acceleration sensor according to claim 5, characterized in, that the anchor area is an electrically conductive input terminal for applying an electrical current to the first (4 a 1), second (4 a 2), third (4 a 3), fourth (4 a 4) V-beams.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111173680.3A CN113917187B (en) | 2021-10-08 | 2021-10-08 | Reconfigurable acceleration sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111173680.3A CN113917187B (en) | 2021-10-08 | 2021-10-08 | Reconfigurable acceleration sensor |
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| Publication Number | Publication Date |
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| CN113917187A CN113917187A (en) | 2022-01-11 |
| CN113917187B true CN113917187B (en) | 2023-09-05 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114814334B (en) * | 2022-04-14 | 2023-05-16 | 南京高华科技股份有限公司 | Current sensor |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102254741A (en) * | 2011-07-06 | 2011-11-23 | 重庆大学 | Micro-mechanical acceleration switch |
| CN102879608A (en) * | 2012-10-26 | 2013-01-16 | 中国科学院上海微系统与信息技术研究所 | Capacitive acceleration transducer for bending elastic beam and manufacturing method |
| CN108760070A (en) * | 2018-07-23 | 2018-11-06 | 南京林业大学 | A kind of temperature sensor and preparation method thereof of V-beam structure LC resonance |
| CN112033563A (en) * | 2020-09-08 | 2020-12-04 | 东南大学 | double-V-shaped beam passive wireless temperature sensor based on paper folding structure |
| CN112033277A (en) * | 2020-09-08 | 2020-12-04 | 东南大学 | Curvature sensor based on paper folding structure |
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2021
- 2021-10-08 CN CN202111173680.3A patent/CN113917187B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102254741A (en) * | 2011-07-06 | 2011-11-23 | 重庆大学 | Micro-mechanical acceleration switch |
| CN102879608A (en) * | 2012-10-26 | 2013-01-16 | 中国科学院上海微系统与信息技术研究所 | Capacitive acceleration transducer for bending elastic beam and manufacturing method |
| CN108760070A (en) * | 2018-07-23 | 2018-11-06 | 南京林业大学 | A kind of temperature sensor and preparation method thereof of V-beam structure LC resonance |
| CN112033563A (en) * | 2020-09-08 | 2020-12-04 | 东南大学 | double-V-shaped beam passive wireless temperature sensor based on paper folding structure |
| CN112033277A (en) * | 2020-09-08 | 2020-12-04 | 东南大学 | Curvature sensor based on paper folding structure |
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