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CN113804314A - Splicing device and splicing method for wavefront curvature sensor - Google Patents

Splicing device and splicing method for wavefront curvature sensor Download PDF

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Publication number
CN113804314A
CN113804314A CN202111223069.7A CN202111223069A CN113804314A CN 113804314 A CN113804314 A CN 113804314A CN 202111223069 A CN202111223069 A CN 202111223069A CN 113804314 A CN113804314 A CN 113804314A
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pair
ccd
rods
imaging substrate
photoelectric sensor
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CN113804314B (en
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王坚
曾锋
张军
陈金挺
张鸿飞
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University of Science and Technology of China USTC
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University of Science and Technology of China USTC
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J2009/002Wavefront phase distribution

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Abstract

本发明汲一种用于波前曲率传感器的拼接装置及拼接方法,属于光电传感器定位安装技术领域。包括装调机构和拼装机构;装调机构包括两对丝杆机构和提拉杆机构;拼装机构包括支撑龙门架、拼装板、两对支柱和底板;通过所述拼接装置完成将一对CCD光电传感器安装到成像基板上。拼接操作时,通过提拉杆连接到CCD底面上的定位销中,再以联动机构牵引一对提拉杆,带动CCD的运动,避免了对CCD的直接接触,防止了对CCD的损伤及污染。本发明装置采用从底面固定并提拉结构,有效防止污染物与CCD的成像硅面的接触,同时使使用者免于与CCD直接接触,保护了CCD光电传感器上的金线,也避免了人体携带的静电。其操作方法实现非人体直接接触完成成像CCD光电传感器安装。

Figure 202111223069

The invention relates to a splicing device and a splicing method for a wavefront curvature sensor, and belongs to the technical field of photoelectric sensor positioning and installation. Including an assembling and adjusting mechanism and an assembling mechanism; the assembling and adjusting mechanism includes two pairs of screw mechanisms and a lifting rod mechanism; the assembling mechanism includes a supporting gantry, an assembling board, two pairs of pillars and a bottom plate; the splicing device is used to complete a pair of CCD photoelectric sensors. Mounted on the imaging substrate. During the splicing operation, the lifting rods are connected to the positioning pins on the bottom surface of the CCD, and then a pair of lifting rods are pulled by the linkage mechanism to drive the movement of the CCD, avoiding direct contact with the CCD and preventing damage and pollution to the CCD. The device of the invention adopts the structure of fixing and pulling from the bottom surface, which effectively prevents the contaminants from contacting the imaging silicon surface of the CCD, and at the same time, prevents the user from directly contacting the CCD, protects the gold wire on the CCD photoelectric sensor, and avoids the human body. carried static electricity. The operation method realizes the installation of the imaging CCD photoelectric sensor without direct contact with the human body.

Figure 202111223069

Description

Splicing device and splicing method for wavefront curvature sensor
Technical Field
The invention belongs to the field of photoelectric sensor positioning and mounting technology and non-human body direct contact type imaging CCD (charge coupled device) operation, and particularly relates to high-precision mounting and dismounting of a wavefront curvature sensor based on a CCD (charge coupled device).
Background
With the increasing demand of earth surface observation, surveying and astronomical observation in the direction of large field of view and high resolution, the requirements on the size and accuracy of an image sensor are high. In order to develop more precise photoelectric detection instruments, scientific grade CCD photoelectric sensors are required. Scientific grade CCDs, i.e., scientific grade charge-coupled devices, are typically expensive, have dense, tiny, highly sensitive pixels, and require different specialized protective enclosures to be designed for shipping and mounting operations, including removing the single-die CCD from a package provided by a supplier and mounting it on a wavefront sensing substrate for assembly and adjustment. In order to increase the effective area of wavefront sensing to the maximum extent, the wavefront curvature sensor adopts a CCD (charge coupled device) which is directly exposed to a user and is not packaged on an imaging silicon surface for splicing operation. For the wavefront curvature sensor, two defocused imaging surfaces are needed, one is located in front of a focal plane, and the other is located behind the focal plane, the telescope wavefront error distribution and the wavefront correction quantity are obtained by calculating the two images before and after the focal plane, and the telescope wavefront error distribution and the wavefront correction quantity are fed back to a telescope control system to be corrected. Wavefront curvature sensors are key components of such active optical modification.
Because the CCD without packaging the imaging silicon surface is adopted in the scheme, the imaging efficiency is greatly improved, and a series of challenges including avoiding direct contact to the CCD under various conditions and considering protection during operation are provided, a corresponding tool needs to be designed to realize safe and contactless CCD splicing.
The existing detector dismounting device basically adopts a mode that a tool clamps a detector to a mounting position for mounting. The clamping tool designed according to the detector appearance is difficult to realize on a bare chip image detector, has limited positioning precision, efficiency and reliability, and is only suitable for mounting the detector with low precision and low requirement.
Disclosure of Invention
In order to realize that 2 CCDs are mounted on the imaging substrate of the wavefront curvature sensor only by means of threaded holes and three mounting columns (as shown in FIG. 9) on two positioning pins on the back surface of a single CCD, and simultaneously, the safety and the final mounting precision in the process of the mounting are ensured, wherein the mounting comprises the parallelism, the defocusing distance, the minimum splicing seam and the like of two imaging surfaces; the invention provides a splicing device for a wavefront curvature sensor and a splicing method based on the splicing device.
A splicing device for a wave front curvature sensor comprises an assembling mechanism 1 and a splicing mechanism;
the adjusting mechanism 1 comprises two pairs of screw rod mechanisms and a pull rod lifting mechanism;
each pair of lead screw mechanisms comprises a lead screw 106 and a lead screw nut 108; the lifting rod mechanism comprises two pairs of lifting rods 105 and two dampers 10; the upper part of each pair of lifting rods 105 is fixedly connected with a corresponding screw rod nut 108 through a clamping plate 107, and moves up and down along a screw rod 106 along with the screw rod nut 108; the lower ends of the two screw rods 106 are both screw rods;
the assembling mechanism comprises a support portal frame 2, an assembling plate 3, two pairs of pillars 4 and a bottom plate 5; the support portal frame 2 is fixedly arranged on the assembling plate 3, the bottom surface of the assembling plate 3 is fixedly arranged at the top ends of the two pairs of supporting columns 4, and the two pairs of supporting columns 4 are symmetrically and fixedly arranged on the bottom plate 5; a pair of L-shaped support plates 7 is arranged on the bottom plate 5;
the assembled plate 3 is a rectangular frame plate, and the mounted imaging substrate 9 is fixedly arranged in the middle of the assembled plate 3 through a support plate; one side surface of the mounted imaging substrate 9 is a mounting surface, and the mounting surface faces downwards;
the lower ends of the screw rods 106 of the two pairs of screw rod mechanisms are fixedly arranged on a horizontal beam for supporting the portal frame 2, so that the two screw rods 106 are in an upright parallel shape; the two pairs of lifting rods 105 are positioned between the two screw rods 106 in parallel, and the lower ends of the two pairs of lifting rods 105 respectively penetrate through the horizontal beam supporting the portal frame 2 and the imaging substrate 9; the two lockers 10 are fixedly arranged on a horizontal beam for supporting the portal frame 2 and are respectively and correspondingly connected with one lifting rod 105 of each pair of lifting rods 105;
the mounting of a pair of CCD photosensors on the imaging substrate 9 is completed by the splicing device.
The further concrete technical scheme is as follows:
the device further comprises a protection mechanism, wherein the protection mechanism comprises a glass upper cover 910, a protection shell 912, a pair of alignment rods 911 and a pair of support columns 913; the protective shell 912 is a rectangular frame, two opposite side edges of the protective shell are respectively sleeved on an alignment straight rod 911, and a pair of support columns 913 are respectively fixedly connected with the lower end of the alignment straight rod 911;
an imaging substrate 9 provided with a pair of CCD photoelectric sensors is fitted around an alignment straight rod 911, and a cover is formed by the glass upper cover 910 and the protective case 912, which covers the pair of CCD photoelectric sensors on the imaging substrate 9.
The adjusting mechanism 1 further comprises a pair of brackets 102 and two hand wheels 101; the support 102 is in a long plate shape, two ends of one side surface of the support 102 are respectively provided with a bearing seat, and the screw rod 106 is fixedly arranged on one side surface of the support 102 through the matching of a pair of bearings and the bearing seats 104; the lower end of the bracket 102 in the length direction is provided with a right-angle flange, and the bracket 102 is fixed on a horizontal beam of the support portal frame 2 through the right-angle flange, so that two screw rods 106 of the two pairs of screw rod mechanisms are vertically and parallelly positioned on the support portal frame 2; the upper ends of the two screw rods 106 are respectively fixedly provided with a hand wheel 101, and the screw rods 106 are rotated through the hand wheels 101, so that the screw rod nuts 108 drive the pair of lifting rods 105 to move up and down.
The right-angle flanging on each support 102 is positioned in the mounting groove 201; a lifting rod hole 202 and a locker mounting hole 203 are also respectively arranged on the horizontal beam for supporting the portal frame 2.
One side of a pair of short sides of the assembled plate 3 is connected with one end of the left support plate 301, the other side of the pair of short sides is connected with one end of the right support plate 302, and the other end of the left support plate 301 and the other end of the right support plate 302 are respectively connected with the imaging substrate 9, so that the imaging substrate 9 is fixed on the assembled plate 3; fixing grooves 305 for mounting and supporting the portal frame 2 are respectively formed in a pair of short edges of the assembling plate 3, and side fixing holes 303 for mounting the imaging substrate 9 are respectively formed in a pair of long edges; four corners of the assembling plate 3 are respectively provided with a pillar fixing hole 304.
A convex table surface is arranged on the mounting surface of the imaging substrate 9, and the convex table surface is formed by sequentially connecting a low mounting boss 903 and a high mounting boss 901; the middle part of the low installation boss 903 and the middle part of the high installation boss 901 are respectively provided with a cable through hole 902, and the two sides of each cable through hole 902 are respectively provided with a positioning pin limiting hole 907 and an installation column through hole 908.
The bottom plate 5 is a rectangular plate, a pair of pillar mounting holes 501 are respectively formed in the two corresponding side edges, and two pairs of rectangular grooves 502 are formed in the middle of the bottom plate 5; one side plates of the pair of L-shaped support plates 7 are respectively and correspondingly fixed in the pair of rectangular grooves 502, and the other side plates of the pair of L-shaped support plates 7 are in an upright and opposite state.
The locker 10 comprises a pressing cylinder 1001, a collar 1002, a polytetrafluoroethylene gasket 1003, a rubber ring 1004 and a base cylinder 1005; the base cylinder 1005 is fixed in a locker fixing hole on the support portal frame 2, the rubber ring 1004, the tetrafluoroethylene gasket 1003 and the shaft collar 1002 are sequentially arranged in the base cylinder 1005 from top to bottom, the inner wall of the pressing cylinder 1001 is provided with internal threads, the lower end of the pressing cylinder is connected with external threads arranged on the cylinder wall of the base cylinder 1005 after penetrating through the shaft collar 1002, the tetrafluoroethylene gasket 1003 and the rubber ring 1004, and the lifting rod 105 is locked or loosened by rotating the pressing cylinder 1001.
The splicing operation based on the splicing device comprises the following steps:
1) positioning CCD and imaging substrate
The two pairs of lifting rods 105 are pulled up to the highest position in a linkage manner, and then the two lockers 10 are screwed down to realize hovering; fixing the imaging substrate 9 to the built-up board 3; the CCD photoelectric sensor 603 with the protection box 601 is placed on the bottom plate 5 with the front facing downward, and the CCD photoelectric sensor 603 is fixed by fixedly connecting a pair of L-shaped brackets 7 on the bottom plate 5 with two bracket fixing grooves 602 on the protection box 601, respectively. Releasing the locker 10 on the lifting rods 105, rotating the hand wheel 101 to slowly put down a pair of lifting rods 105 to enable the lifting rods 105 to penetrate through the positioning pin limiting holes 907 on the imaging substrate 9, and connecting the screw ends of the pair of lifting rods 105 with the threaded holes of the positioning pins of the CCD photoelectric sensor 603 in a matching manner;
2) get rid of CCD installation protection device
A screw connected with the back of the CCD photoelectric sensor 603 and the protection box 601 is removed by a screwdriver, so that the CCD photoelectric sensor 603 and the protection box 601 are separated; removing screws on two sides of the protection box 601 connected with the pair of L-shaped support plates 7, and removing the pair of L-shaped support plates 7;
3) pull-up CCD to imaging substrate mounting
The damping device 10 on the pair of lifting rods 105 is released, and the CCD photoelectric sensor 603 is lifted to the position of the imaging substrate 9 through the pair of lifting rods 105; at this time, the three mounting columns 605 and the two positioning pins 609 on the CCD photoelectric sensor 603 penetrate through the imaging substrate 9, the two positioning pins 609 complete the positioning of the CCD photoelectric sensor 603, and simultaneously, a torque wrench is used to screw the copper columns on the three mounting columns 605 with the same torque, so that the CCD photoelectric sensor 603 is fixed on the imaging substrate 9, and the mounting of one piece of CCD photoelectric sensor 603 is completed; removing the pair of lifting rods 105 which finish the installation of the CCD photoelectric sensor 603, and screwing down the locker 10 to enable the pair of lifting rods 105 to be suspended on the support gantry 2;
4) mounting another CCD
Repeating the steps 1) -3), and finishing the installation of another CCD photoelectric sensor 603;
5) protective housing for mounting wavefront curvature sensor
Dismantling the assembling and adjusting mechanism 1 which supports the portal frame 2, removing the left support plate 301, the right support plate 302 and the assembling plate 3, taking down the imaging substrate 9, installing a support column 913 at the bottom of the imaging substrate 9, installing a protective shell 912 through an alignment straight rod 911, and then installing a glass upper cover 910 to complete the nondestructive assembly of the two CCD photoelectric sensors;
the space between adjacent CCD photoelectric sensors is 0.4-0.6 mm, and the included angle between two CCD photoelectric sensors is 0.03-0.04 degrees.
The beneficial technical effects of the invention are embodied in the following aspects:
1. the splicing device provided by the invention has the function of completing the splicing of two CCDs under the conditions that the imaging silicon surface of the CCD photoelectric sensor is prevented from being polluted and a gold wire is prevented from being touched by mistake. The invention adopts the design of fixing and lifting from the bottom surface, effectively prevents the contact of pollutants with the imaging silicon surface 608 of the CCD, simultaneously prevents a user from directly contacting with the CCD, protects a gold wire 607 on the CCD photoelectric sensor and also avoids static carried by a human body. The invention replaces manual operation with a mechanical structure, so that the installation precision is ensured, and the splicing task can be completed within the range of design requirements. The device can normally complete the precise splicing work of the CCD, and two pieces of CCD are spliced without damage under the condition that the CCD interval is 0.5 mm. The included angle of the two CCD sheets is 0.038 degrees and the height difference is 2.013mm, and the use requirements are met.
2. The operation method of the invention realizes that the imaging CCD photoelectric sensor is installed by non-human body direct contact. The lifting rod is connected to the positioning pin on the bottom surface of the CCD, and then the lifting rod is pulled by the linkage device to drive the CCD to move, so that the direct contact of the CCD is avoided, and the damage and the pollution to the CCD are prevented. The position of the CCD is accurately limited by limiting the positioning pin, so that the precision of the CCD on the position can meet the design requirement. Meanwhile, considering that a cover window is not arranged on an imaging surface of the CCD and the device can be damaged or irreversibly degraded by electrostatic discharge, unnecessary contact with the CCD is reduced in the installation process and comprehensive antistatic treatment precautionary measures are taken, and a corresponding protection mechanism is used for well protecting the whole wavefront curvature sensor after the installation is finished.
Drawings
FIG. 1 is a schematic view of the structure of the present invention.
Fig. 2 is a schematic structural diagram of the adjustment mechanism.
Fig. 3 is a schematic block diagram of a support gantry structure.
Fig. 4 is a schematic structural diagram of an imaging substrate mounted on a built-up board.
Fig. 5 is a schematic view of the structure of the assembled board.
Fig. 6 is a schematic view of the mounting surface structure of the imaging substrate.
Fig. 7 is a schematic view of the bottom plate structure.
Fig. 8 is a schematic view of a scientific grade CCD photosensor located within a protective case.
Fig. 9 is a schematic structural diagram of a scientific grade CCD photoelectric sensor.
FIG. 10 is a schematic view showing the connection state of the CCD photoelectric sensor and the device during splicing.
Fig. 11 is a schematic diagram showing the CCD photoelectric sensor placed on the protection mechanism after splicing.
Fig. 12 is a schematic view of the structure of the locking device.
Sequence numbers in the upper figure: the assembling and adjusting mechanism 1, the supporting portal frame 2, the assembling plate 3, the pillar 4, the bottom plate 5, the protecting box 6, the L-shaped support plate 7, the bottom plate support 8, the wavefront curvature sensor substrate 9, the damper 10, the hand wheel 101, the bracket 102, the lubricating piece 103, the lower end bearing 104, the lifting rod 105, the screw rod 106, the clamp 107, the screw nut 108, the upper end bearing 109, the assembling and adjusting mechanism mounting groove 201, the alignment hole and locker fixing hole 202, the supporting portal fixing hole 203, the left support plate 301, the right support plate 302, the side fixing hole 303, the pillar fixing hole 304, the fixing groove 305, the protecting box 6, the support plate fixing groove 602, the CCD photoelectric sensor 603, the mounting pillar 605, the cable 606, the gold wire 607, the imaging silicon surface 608, the positioning pin 609, the high mounting boss 901, the cable through hole, the low mounting boss 903, the positioning pin limiting hole 907, the mounting pillar through hole 908, the glass upper cover 910, the alignment rod 911, the protective housing 912, the protective housing, Support column 913, compression cylinder 1001, collar 1002, tetrafluoroethylene gasket 1003, rubber ring 1004, base cylinder 1005.
Detailed Description
The present invention will be described in further detail below by way of examples with reference to the accompanying drawings.
Examples
Referring to fig. 1, a splicing apparatus for a wavefront curvature sensor includes a setup mechanism 1 and a splicer frame.
Referring to fig. 2, the adjusting mechanism 1 includes two pairs of screw rod mechanisms and a lifting rod mechanism. Each pair of lead screw mechanisms comprises a lead screw 106 and a lead screw nut 108; the lifting rod mechanism comprises two pairs of lifting rods 105 and two lockers 10; the upper part of each pair of lifting rods 105 is fixedly connected with a corresponding screw rod nut 108 through a clamping plate 107, and moves up and down along a screw rod 106 along with the screw rod nut 108; the lower ends of the two screw rods 106 are both screws.
Referring to fig. 2, the adjustment mechanism 1 further includes a pair of brackets 102 and two handwheels 101. The bracket 102 is in a long plate shape, and two ends of one side surface of the bracket 102 are respectively provided with a bearing seat 104; the lead screw 106 is fixedly mounted on one side of the bracket 102 by the cooperation of a pair of bearings and the bearing block 104. The lower end of the bracket 102 in the length direction is provided with a right-angle flange, and the bracket 102 is fixed on a horizontal beam of the support portal frame 2 through the right-angle flange, so that two lead screws 106 of the two pairs of lead screw mechanisms are vertically and parallelly positioned on the support portal frame 2. The upper ends of the two screw rods 106 are respectively and fixedly provided with a hand wheel 101, and the screw rods 106 are rotated through the hand wheels 101, so that the screw rod nuts 108 drive the pair of lifting rods 105 to move up and down.
Referring to fig. 3, a pair of mounting grooves 201 are respectively formed on two sides of a horizontal beam supporting the gantry 2 corresponding to the right-angle flanges on the pair of brackets 102, and the right-angle flange on each bracket 102 is located in the mounting groove 201; a lifting rod hole 202 and a locker mounting hole 203 are also respectively arranged on the horizontal beam for supporting the portal frame 2.
Referring to fig. 1, the assembling mechanism includes a support gantry 2, an assembling plate 3, two pairs of pillars 4, and a bottom plate 5. The support portal frame 2 is fixedly arranged on the assembling plate 3, the bottom surface of the assembling plate 3 is fixedly arranged at the top ends of the two pairs of pillars 4, and the two pairs of pillars 4 are symmetrically and fixedly arranged on the bottom plate 5; the bottom plate 5 is provided with a pair of L-shaped support plates 7.
Referring to fig. 4, the assembled plate 3 is a rectangular frame plate, and the mounted imaging substrate 9 is fixedly mounted in the middle of the assembled plate 3 through a support plate; one side surface of the mounted imaging substrate 9 is a mounting surface, and the mounting surface faces downward.
Referring to fig. 4, one side of a pair of short sides of the assembled board 3 is connected to one end of the left support plate 301, the other side of the pair of short sides is connected to one end of the right support plate 302, and the other ends of the left support plate 301 and the right support plate 302 are connected to the imaging substrate 9, respectively, so that the imaging substrate 9 is fixed to the assembled board 3. Referring to fig. 5, a pair of short sides of the assembled plate 3 are respectively provided with a fixing groove 305 for mounting and supporting the portal frame 2, and a pair of long sides are respectively provided with a side fixing hole 303 for mounting the imaging substrate 9; four corners of the assembling plate 3 are respectively provided with a pillar fixing hole 304.
Referring to fig. 6, a boss surface is arranged on the mounting surface of the imaging substrate 9, and the boss surface is formed by sequentially connecting a low mounting boss 903 and a high mounting boss 901; the difference in height between the low mounting boss 903 and the high mounting boss 901 is 2 mm. The middle part of the low installation boss 903 and the middle part of the high installation boss 901 are respectively provided with a cable through hole 902, and the two sides of each cable through hole 902 are respectively provided with a positioning pin limiting hole 907 and an installation column through hole 908.
Referring to fig. 1, the lower ends of the screws 106 of the two pairs of screw mechanisms are fixedly mounted on a horizontal beam supporting the gantry 2, so that the two screws 106 are in a vertical parallel shape. The two pairs of lifting rods 105 are positioned between the two screw rods 106 in parallel, and the lower ends of the two pairs of lifting rods 105 respectively penetrate through the horizontal beam supporting the portal frame 2 and the imaging substrate 9; the two locking devices 10 are fixedly arranged on a horizontal beam supporting the portal frame 2 and are respectively and correspondingly connected with one lifting rod 105 of each pair of lifting rods 105.
Referring to fig. 12, the load binder 10 includes a pressure cylinder 1001, a collar 1002, a teflon washer 1003, a rubber ring 1004, and a base cylinder 1005; the base cylinder 1005 is fixed in a locker fixing hole on the support portal frame 2, the rubber ring 1004, the tetrafluoroethylene gasket 1003 and the shaft collar 1002 are sequentially arranged in the base cylinder 1005 from top to bottom, the inner wall of the pressing cylinder 1001 is provided with internal threads, the lower end of the pressing cylinder is connected with external threads arranged on the cylinder wall of the base cylinder 1005 after penetrating through the shaft collar 1002, the tetrafluoroethylene gasket 1003 and the rubber ring 1004, and the lifting rod 105 is locked or loosened by rotating the pressing cylinder 1001.
Referring to fig. 7, the bottom plate 5 is a rectangular plate, a pair of pillar mounting holes 501 are respectively formed at two corresponding side edges, and the two pairs of pillars 4 are symmetrically and fixedly mounted on the bottom plate 5 through the pillar mounting holes 501. Two pairs of rectangular grooves 502 are arranged in the middle of the bottom plate 5; one side plates of the pair of L-shaped support plates 7 are respectively and fixedly mounted in the pair of rectangular grooves 502, and the other side plates of the pair of L-shaped support plates 7 are in an upright opposite state.
The splicing operation steps of the CCD photoelectric sensor and the imaging substrate based on the splicing device are as follows:
1) positioning CCD and imaging substrate
The two pairs of lifting rods 105 are pulled up to the highest position in a linkage manner, and then the rotary pressing cylinders 1001 on the two lockers 10 are screwed down to realize the hovering of the two pairs of lifting rods 105. Fixedly mounting the imaging substrate 9 on the assembling plate 3 through a left support plate 301 and a right support plate 302; referring to fig. 1, a CCD photosensor 603 with a protection box 601 is placed on a bottom plate 5 with its front surface facing downward, and the CCD photosensor 603 is fixed by fixedly connecting a pair of L-shaped brackets 7 on the bottom plate 5 to two bracket fixing grooves 602 on the protection box 601, respectively. Releasing the lockers 10 on the pair of lifting rods 105, rotating the hand wheel 101 to slowly put down the pair of lifting rods 105 to enable the pair of lifting rods 105 to penetrate through positioning pin limiting holes 907 on the imaging substrate 9, and enabling screw ends of the pair of lifting rods 105 to be matched and connected with threaded holes of positioning pins 609 of the CCD photoelectric sensor 603;
2) get rid of CCD installation protection device
A screw connected with the back of the CCD photoelectric sensor 603 and the protection box 601 is removed by a screwdriver, so that the CCD photoelectric sensor 603 and the protection box 601 are separated; removing screws on two sides of the protection box 601 connected with the pair of L-shaped support plates 7, and removing the pair of L-shaped support plates 7;
3) mounting of a pull-up CCD on an imaging substrate
The damper 10 on the pair of lift pins 105 is released, the CCD photosensor 603 is lifted up to the imaging substrate 9 position by the pair of lift pins 105, and the cable 606 is passed through the cable through hole 902 on the imaging substrate 9. At this time, the three mounting columns 605 and the two positioning pins 609 on the CCD photoelectric sensor 603 penetrate through the imaging substrate 9, the two positioning pins 609 complete the positioning of the CCD photoelectric sensor 603, and simultaneously, a torque wrench is used to screw the copper columns on the three mounting columns 605 with the same torque, so that the CCD photoelectric sensor 603 is fixed on the imaging substrate 9, and the mounting of one piece of CCD photoelectric sensor 603 is completed; removing the pair of lifting rods 105 which finish the installation of the CCD photoelectric sensor 603, and screwing down the rotary pressing cylinder 1001 on the locker 10 to enable the pair of lifting rods 105 to be suspended on the supporting gantry 2;
4) mounting another CCD
Repeating the steps 1) -3), and finishing the installation of another CCD photoelectric sensor 603 on the imaging substrate 9;
5) protective housing for mounting wavefront curvature sensor
The assembling and adjusting mechanism 1 which supports the portal frame 2 is removed, the left support plate 301, the right support plate 302 and the assembling plate 3 are removed, the imaging substrate 9 is taken down, a pair of support columns 913 is arranged on the bottom surface of the imaging substrate 9, a protective shell 912 is arranged through an alignment straight rod 911, then a glass upper cover 910 is arranged, and the nondestructive assembly of the two CCD photoelectric sensors is completed.
Splicing without damage under the condition that the distance between two adjacent CCD photoelectric sensors is 0.5mm is realized; the included angle between the two CCD photoelectric sensors is measured to be 0.038 degrees and the height difference is 2.013mm, and the use requirements are met.
It will be understood by those skilled in the art that the foregoing is merely a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included within the scope of the present invention.

Claims (9)

1.一种用于波前曲率传感器的拼接装置,其特征在于:包括装调机构(1)和拼装机构;1. A splicing device for a wavefront curvature sensor, characterized in that it comprises an adjustment mechanism (1) and an assembly mechanism; 所述装调机构(1)包括两对丝杆机构和提拉杆机构;The assembling and adjusting mechanism (1) includes two pairs of screw mechanisms and a pulling rod mechanism; 每对丝杆机构包括丝杆(106)和丝杆螺母(108);提拉杆机构包括两对提拉杆(105)和两只锁紧器(10);每对提拉杆(105)的上部通过夹板(107)固定连接着对应的丝杆螺母(108),且随丝杆螺母(108)实现沿丝杆(106)的上下移动;两根丝杆(106)的下端均为螺杆;Each pair of screw mechanisms includes a screw (106) and a screw nut (108); the lifting rod mechanism includes two pairs of lifting rods (105) and two locking devices (10); the upper part of each pair of lifting rods (105) passes through The splint (107) is fixedly connected to the corresponding lead screw nut (108), and moves up and down along the lead screw (106) along with the lead screw nut (108); the lower ends of the two lead screws (106) are both screw rods; 所述拼装机构包括支撑龙门架(2)、拼装板(3)、两对支柱(4)和底板(5);所述支撑龙门架(2)固定设于拼装板(3)上,所述拼装板(3)的底面固定设于两对支柱(4)的顶端,两对支柱(4)对称固定设于底板(5)上;所述底板(5)上设有一对L形支板(7);The assembling mechanism comprises a supporting gantry (2), an assembling board (3), two pairs of pillars (4) and a bottom plate (5); the supporting gantry (2) is fixed on the assembling board (3), and the The bottom surface of the assembling board (3) is fixedly arranged on the top ends of the two pairs of pillars (4), and the two pairs of pillars (4) are symmetrically fixed on the bottom plate (5); the bottom plate (5) is provided with a pair of L-shaped support plates ( 7); 所述拼装板(3)为矩形框架板,被安装的成像基板(9)通过支板固定设于拼装板(3)的中部;被安装的成像基板(9)的一侧面为安装面,且安装面向下;The assembling board (3) is a rectangular frame board, and the mounted imaging substrate (9) is fixedly arranged in the middle of the assembling board (3) through a support plate; one side of the mounted imaging substrate (9) is the mounting surface, and installation face down; 所述两对丝杆机构的丝杆(106)下端固定设于支撑龙门架(2)的水平梁上,使两根丝杆(106)呈直立平行状;两对提拉杆(105)平行位于两根丝杆(106)之间,且两对提拉杆(105)的下端分别穿过支撑龙门架(2)的水平梁和成像基板(9);两只锁紧器(10)固定设于支撑龙门架(2)的水平梁上,且分别对应连接着每对提拉杆(105)中的一根提拉杆(105);通过所述拼接装置完成将一对CCD光电传感器安装到成像基板(9)上。The lower ends of the screw rods (106) of the two pairs of screw rod mechanisms are fixed on the horizontal beam supporting the gantry frame (2), so that the two screw rods (106) are upright and parallel; Between the two screw rods (106), and the lower ends of the two pairs of lifting rods (105) respectively pass through the horizontal beam supporting the gantry (2) and the imaging base plate (9); the two locking devices (10) are fixedly arranged on The horizontal beam supporting the gantry frame (2) is respectively connected with one lifting rod (105) in each pair of lifting rods (105); the splicing device is used to complete the installation of a pair of CCD photoelectric sensors to the imaging substrate ( 9) on. 2.根据权利要求1所述的一种用于波前曲率传感器的拼接装置,其特征在于:还包括保护机构,所述保护机构包括玻璃上盖(910)、保护壳(912)、一对准直杆(911)和一对支撑柱(913);所述保护壳(912)为矩形框,相对的两侧边分别套设在一对准直杆(911)上,一对支撑柱(913)分别固定连接着一对准直杆(911)的下端;2. A splicing device for a wavefront curvature sensor according to claim 1, further comprising a protection mechanism, the protection mechanism comprising a glass upper cover (910), a protection shell (912), an alignment A straight rod (911) and a pair of support columns (913); the protective shell (912) is a rectangular frame, and opposite sides are respectively sleeved on a pair of straight rods (911), and a pair of support columns (913) ) are respectively fixedly connected to the lower ends of a pair of alignment rods (911); 将安装有一对CCD光电传感器的成像基板(9)套装在一对准直杆(911),玻璃上盖(910)和保护壳(912)形成罩壳,罩壳罩设住成像基板(9)上的一对CCD光电传感器。The imaging substrate (9) mounted with a pair of CCD photoelectric sensors is assembled into a pair of alignment rods (911), the glass upper cover (910) and the protective shell (912) form a cover, and the cover covers the imaging substrate (9) on a pair of CCD photoelectric sensors. 3.根据权利要求1所述的一种用于波前曲率传感器的拼接装置,其特征在于:所述装调机构(1)还包括一对支架(102)和两只手轮(101);所述支架(102)为长板状,支架(102)的一侧面两端分别设有轴承座,所述丝杆(106)通过一对轴承和轴承座(104)的配合固定设于支架(102)的一侧面上;所述支架(102)长度方向的下端设有直角翻边,支架(102)通过直角翻边固定在支撑龙门架(2)的水平梁上,使两对丝杆机构的两根丝杆(106)呈直立平行状位于支撑龙门架(2)上;所述两根丝杆(106)的上端分别固定设有手轮(101),通过手轮(101)转动丝杆(106),实现丝杆螺母(108)带动一对提拉杆(105)的上下移动。3. A splicing device for a wavefront curvature sensor according to claim 1, characterized in that: the adjustment mechanism (1) further comprises a pair of brackets (102) and two handwheels (101); The bracket (102) is in the shape of a long plate, bearing seats are respectively provided on one side and two ends of the bracket (102), and the screw rod (106) is fixedly arranged on the bracket (102) through the cooperation of a pair of bearings and the bearing seat (104). ); the lower end of the bracket (102) in the length direction is provided with a right-angle flange, and the bracket (102) is fixed on the horizontal beam supporting the gantry (2) through the right-angle flange, so that the two pairs of screw mechanisms Two screw rods (106) are located on the support gantry (2) in an upright and parallel shape; the upper ends of the two screw rods (106) are respectively fixed with handwheels (101), and the screw rods are rotated by the handwheel (101) (106), the lead screw nut (108) drives a pair of lifting rods (105) to move up and down. 4.根据权利要求2所述的一种用于波前曲率传感器的拼接装置,其特征在于:与一对支架(102)上的直角翻边对应,所述支撑龙门架(2)的水平梁上两侧分别开设有一对安装槽(201),每个支架(102)上的直角翻边位于安装槽(201)内;支撑龙门架(2)的水平梁上还分别开设有提拉杆孔(202)和锁紧器安装孔(203)。4. A splicing device for a wavefront curvature sensor according to claim 2, characterized in that: corresponding to the right-angle flanges on a pair of brackets (102), the horizontal beams of the supporting gantry (2) A pair of installation grooves (201) are respectively opened on both sides, and the right-angle flanges on each bracket (102) are located in the installation grooves (201); the horizontal beam supporting the gantry (2) is also respectively provided with lifting rod holes (202). ) and Locker Mounting Hole (203). 5.根据权利要求1所述的一种用于波前曲率传感器的拼接装置,其特征在于:所述拼装板(3)的一对短边中的一侧边连接着左支板(301)的一端,一对短边中的另一侧边连接着右支板(302)的一端,左支板(301)的另一端和右支板(302)的另一端分别连接着成像基板(9),使成像基板(9)固定在拼装板(3)上;拼装板(3)的一对短边上分别开设有用于安装支撑龙门架(2)的固定槽(305),一对长边上分别开设有用于安装成像基板(9)的侧面固定孔(303);拼装板(3)的四个角上分别开设有支柱固定孔(304)。5. A splicing device for a wavefront curvature sensor according to claim 1, characterized in that: one side of the pair of short sides of the assembling plate (3) is connected to the left support plate (301). One end, the other side of the pair of short sides is connected to one end of the right support plate (302), and the other end of the left support plate (301) and the other end of the right support plate (302) are respectively connected to the imaging substrate (9) , so that the imaging substrate (9) is fixed on the assembling board (3); a pair of short sides of the assembling board (3) are respectively provided with fixing grooves (305) for installing the supporting gantry (2), and a pair of long sides are respectively provided with fixing grooves (305) Side fixing holes (303) for installing the imaging substrate (9) are respectively opened; pillar fixing holes (304) are respectively opened on the four corners of the assembling board (3). 6.根据权利要求1所述的一种用于波前曲率传感器的拼接装置,其特征在于:所述成像基板(9)的安装面上设有凸台面,所述凸台面由低安装凸台(903)和高安装凸台(901)依次连接组成;低安装凸台(903)的中部和高安装凸台(901)的中部分别开设有电缆通孔(902),每个电缆通孔(902)两侧分别开设有定位销限位孔(907)和安装柱通孔(908)。6. A splicing device for a wavefront curvature sensor according to claim 1, characterized in that: the mounting surface of the imaging substrate (9) is provided with a boss surface, and the boss surface is formed by a low mounting boss ( 903) and the high installation boss (901) are connected in sequence; the middle part of the low installation boss (903) and the middle part of the high installation boss (901) are respectively provided with cable through holes (902), each cable through hole (902) ) are respectively provided with positioning pin limit holes (907) and mounting post through holes (908). 7.根据权利要求1所述的一种用于波前曲率传感器的拼接装置,其特征在于:所述底板(5)为矩形板,相对应的两侧边处分别开设有一对支柱安装孔(501),底板(5)的中部设有两对矩形凹槽(502);所述一对L形支板(7)的一侧边板分别对应固定设于一对矩形凹槽(502)内,且使一对L形支板(7)的另一侧边板呈直立相对状态。7 . The splicing device for a wavefront curvature sensor according to claim 1 , wherein the bottom plate ( 5 ) is a rectangular plate, and a pair of pillar mounting holes ( 501 ) are respectively opened at the corresponding two sides. 8 . ), two pairs of rectangular grooves (502) are arranged in the middle of the bottom plate (5); one side plate of the pair of L-shaped support plates (7) is respectively fixed and fixed in a pair of rectangular grooves (502), And the other side plates of the pair of L-shaped support plates (7) are in an upright and opposite state. 8.根据权利要求1所述的一种用于波前曲率传感器的拼接装置,其特征在于:所述锁紧器(10)包括压筒(1001)、轴环(1002)、聚四氟乙烯垫圈(1003)、橡胶圈(1004)和底座圆筒(1005);所述的底座圆筒(1005)固定于支撑龙门架(2)上的锁紧器固定孔内,底座圆筒(1005)内由上至下依次安装橡胶圈(1004)、四氟乙烯垫圈(1003)和轴环(1002),压筒(1001)的内壁有内螺纹,下端穿过轴环(1002)、四氟乙烯垫圈(1003)和橡胶圈(1004)后与底座圆筒(1005)筒壁设有的外螺纹连接,旋转压筒(1001)实现锁紧或松开提拉杆(105)。8 . The splicing device for a wavefront curvature sensor according to claim 1 , wherein the locking device ( 10 ) comprises a pressing cylinder ( 1001 ), a collar ( 1002 ), and a PTFE gasket. 9 . (1003), rubber ring (1004) and base cylinder (1005); the base cylinder (1005) is fixed in the locker fixing hole on the support gantry (2), and the base cylinder (1005) Install the rubber ring (1004), the tetrafluoroethylene washer (1003) and the collar (1002) in sequence from top to bottom. The inner wall of the pressure cylinder (1001) has internal threads, and the lower end passes through the collar (1002), the tetrafluoroethylene washer (1003) and the rubber ring (1004) are connected with the external thread provided on the wall of the base cylinder (1005), and the cylinder (1001) is rotated to lock or loosen the pull rod (105). 9.基于权利要求1所述的一种用于波前曲率传感器的拼接装置的拼接方法,其特征在于操作步骤如下:9. based on the splicing method of a kind of splicing device for wavefront curvature sensor according to claim 1, it is characterized in that operating steps are as follows: 1)将CCD与成像基板就位1) Position the CCD with the imaging substrate 将两对提拉杆(105)联动拉升至最高位置,然后拧紧两个锁紧器(10)实现悬停;将成像基板(9)固定到拼装板(3)上;将带有保护盒(601)的CCD光电传感器(603)正面朝下放置在底板(5)上,通过底板(5)上的一对L形支板(7)分别与保护盒(601)上的两个支板固定槽(602)的固定连接,完成CCD光电传感器(603)的固定;Pull the two pairs of lifting rods (105) to the highest position, and then tighten the two locks (10) to achieve hovering; fix the imaging base plate (9) to the assembling board (3); attach the protective box ( The CCD photoelectric sensor (603) of 601) is placed face down on the base plate (5), and is respectively fixed to the two support plates on the protection box (601) by a pair of L-shaped support plates (7) on the base plate (5). The fixed connection of the groove (602) completes the fixation of the CCD photoelectric sensor (603); 解除提拉杆(105)上的锁紧器(10),转动手轮(101)缓缓放下一对提拉杆(105),使其穿过成像基板(9)上的定位销限位孔(907),并将一对提拉杆(105)的螺杆端与CCD光电传感器(603)的定位销的螺纹孔配合连接;Release the locks (10) on the lift rods (105), turn the handwheel (101) and slowly lower the pair of lift rods (105) so that they pass through the positioning pin limit holes (907) on the imaging base plate (9). ), and connect the screw ends of a pair of lifting rods (105) with the threaded holes of the positioning pins of the CCD photoelectric sensor (603); 2)去除CCD安装保护装置2) Remove the CCD installation protection device 用螺丝刀拆除CCD光电传感器(603)背面和保护盒(601)连接的螺丝,使得CCD光电传感器(603)和保护盒(601)脱开;拆除保护盒(601)两侧与一对L形支板(7)连接的螺丝,去除一对L形支板(7);Use a screwdriver to remove the screws connecting the back of the CCD photoelectric sensor (603) and the protection box (601) to disengage the CCD photoelectric sensor (603) from the protection box (601). Remove a pair of L-shaped support plates (7) from the screws connecting the plates (7); 3)提拉CCD到成像基板安装3) Pull the CCD to the imaging substrate for installation 解除一对提拉杆(105)上的阻尼装置(10),通过一对提拉杆(105)将CCD光电传感器(603)拉升至成像基板(9)位置;此时,CCD光电传感器(603)上的三个安装柱(605)和两个定位销(609)会穿过成像基板(9),两个定位销(609)完成CCD光电传感器(603)的定位,同时采用扭矩扳手使用相同的扭矩拧动三个安装柱(605)上的铜柱,使CCD光电传感器(603)在成像基板(9)上的固定,完成一片CCD光电传感器(603)的安装;移走完成CCD光电传感器(603)安装的一对提拉杆(105),拧紧锁紧器(10)使这对提拉杆(105)悬停在支撑龙门(2)上;Release the damping device (10) on the pair of lifting rods (105), and pull the CCD photoelectric sensor (603) to the position of the imaging substrate (9) through the pair of lifting rods (105); at this time, the CCD photoelectric sensor (603) The three mounting posts (605) and the two positioning pins (609) on the upper will pass through the imaging substrate (9). The two positioning pins (609) complete the positioning of the CCD photoelectric sensor (603). At the same time, a torque wrench is used to use the same Torque the copper posts on the three mounting posts (605) to fix the CCD photoelectric sensor (603) on the imaging substrate (9) to complete the installation of a piece of CCD photoelectric sensor (603); remove the CCD photoelectric sensor (603) to complete the installation. 603) Install a pair of lifting rods (105), tighten the locker (10) to make the pair of lifting rods (105) hover on the support gantry (2); 4)进行另一片CCD的安装4) Install another CCD 重复步骤1)—3),完成另一片CCD光电传感器(603)的安装;Repeat steps 1)-3) to complete the installation of another CCD photoelectric sensor (603); 5)安装波前曲率传感器保护外壳5) Install the wavefront curvature sensor protective case 拆除支撑龙门架(2)以上的装调机构(1),去掉左支板(301)、右支板(302)和拼装板(3),取下成像基板(9),在成像基板(9)的底部装上支撑柱(913),通过一对准直杆(911)装上保护壳(912),然后装上玻璃上盖(910),完成两件CCD光电传感器的无损伤组装;Remove the adjustment mechanism (1) above the supporting gantry (2), remove the left support plate (301), the right support plate (302), and the assembly plate (3), remove the imaging base plate (9), and install the imaging base plate (9) ), install the support column (913) on the bottom of the ), install the protective case (912) through a pair of alignment rods (911), and then install the glass upper cover (910) to complete the damage-free assembly of the two CCD photoelectric sensors; 实现相邻CCD光电传感器之间的间距为0.4~0.6mm,两片CCD光电传感器之间的夹角0.03°~0.04°。The distance between adjacent CCD photoelectric sensors is 0.4 to 0.6 mm, and the included angle between two CCD photoelectric sensors is 0.03° to 0.04°.
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102564612A (en) * 2012-02-07 2012-07-11 中国科学院光电技术研究所 Phase difference wavefront sensor based on combined prism
US20160018259A1 (en) * 2014-07-18 2016-01-21 Berliner Glas Kgaa Herbert Kubatz Gmbh & Co. Method and apparatus for measuring the shape of a wave-front of an optical radiation field
DE102016210966A1 (en) * 2016-06-20 2017-12-21 Micro-Epsilon Optronic Gmbh Method and device for measuring a curved wavefront with at least one wavefront sensor
CN216349166U (en) * 2021-10-20 2022-04-19 中国科学技术大学 Splicing device for wavefront curvature sensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102564612A (en) * 2012-02-07 2012-07-11 中国科学院光电技术研究所 Phase difference wavefront sensor based on combined prism
US20160018259A1 (en) * 2014-07-18 2016-01-21 Berliner Glas Kgaa Herbert Kubatz Gmbh & Co. Method and apparatus for measuring the shape of a wave-front of an optical radiation field
DE102016210966A1 (en) * 2016-06-20 2017-12-21 Micro-Epsilon Optronic Gmbh Method and device for measuring a curved wavefront with at least one wavefront sensor
CN216349166U (en) * 2021-10-20 2022-04-19 中国科学技术大学 Splicing device for wavefront curvature sensor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
白钊;贺峻峰;原琦;钱钧;杨建莉;薛小朋;王凌;李良福;: "一种提高双CCD图像拼接精度的方法", 应用光学, no. 06, 15 November 2010 (2010-11-15) *

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