CN113739717B - Line laser sensor pose calibration method in on-machine measurement system - Google Patents
Line laser sensor pose calibration method in on-machine measurement system Download PDFInfo
- Publication number
- CN113739717B CN113739717B CN202110962375.6A CN202110962375A CN113739717B CN 113739717 B CN113739717 B CN 113739717B CN 202110962375 A CN202110962375 A CN 202110962375A CN 113739717 B CN113739717 B CN 113739717B
- Authority
- CN
- China
- Prior art keywords
- sensor
- coordinate system
- line laser
- laser sensor
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005259 measurement Methods 0.000 title claims abstract description 88
- 238000000034 method Methods 0.000 title claims abstract description 78
- 238000013519 translation Methods 0.000 claims abstract description 23
- 239000011159 matrix material Substances 0.000 claims description 17
- 238000004364 calculation method Methods 0.000 claims description 12
- 230000033001 locomotion Effects 0.000 claims description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 10
- 239000010949 copper Substances 0.000 claims description 10
- 229910052802 copper Inorganic materials 0.000 claims description 10
- 239000000919 ceramic Substances 0.000 claims description 6
- 238000006073 displacement reaction Methods 0.000 claims description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000001514 detection method Methods 0.000 abstract description 9
- 238000012545 processing Methods 0.000 abstract description 9
- 238000010586 diagram Methods 0.000 description 7
- 238000003754 machining Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 238000013178 mathematical model Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/045—Correction of measurements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Machine Tool Sensing Apparatuses (AREA)
Abstract
The invention discloses a line laser sensor pose calibration method in an on-machine measurement system, which comprises the following steps: dividing the coordinate system of the on-machine measuring system into a sensor measuring coordinate system O M X M Y M Z M Tool coordinate system O C X C Y C Z C And a workpiece coordinate system O P X P Y P Z P The method comprises the steps of carrying out a first treatment on the surface of the The method comprises the steps of taking a standard plane and a standard sphere as measurement objects, calculating the three-dimensional posture of a line laser sensor according to multi-dimensional translation information of a machine tool and distance information measured by the line laser sensor, and converting a sensor measurement coordinate system into a workpiece coordinate system; and the three-dimensional posture of the line laser sensor is adjusted to an ideal posture by using a sensor clamp in a parallel adjustment mode. The invention is suitable for three-axis, four-axis and five-axis numerical control machine tools, has low calibration error, can improve the detection precision of the three-dimensional contour of the workpiece to the level of tens of microns or even tens of microns, and can improve the processing precision and the processing efficiency of the workpiece.
Description
Technical Field
The invention relates to the technical field of numerical control machining equipment, in particular to a line laser sensor pose calibration method in an on-machine measurement system.
Background
With the development of modern manufacturing technology, on-machine measurement systems formed by coupling detection devices in numerically controlled machine tools are increasingly being studied and applied. The on-machine measurement can realize product quality tracking and feedback of a processing and manufacturing site, and directly guide or correct the processing process, so that the processing precision and the processing efficiency of the numerical control machine tool are improved, and the method has very important significance for improving the automation and informatization of the processing and manufacturing process and reducing the rejection rate.
The on-machine measuring system mainly comprises a sensor unit and a signal receiving unit. For the detection of the geometric information of the machined parts, the measurement technology adopted by the sensor unit can be divided into two main types, namely contact type and non-contact type. In non-contact measurement, the point laser or line laser sensing technology based on the principle of laser triangulation is an important means for on-machine measurement due to the characteristics of high measurement accuracy, high measurement speed, no damage to the surface to be measured and the like. Compared with the point laser sensor, the line laser sensor can obtain the height information of a plurality of points in the linear profile at the same time, and has higher detection efficiency, so that the detection device adopting the line laser sensor becomes more and more an on-machine measurement development trend.
When the linear laser sensor is adopted for on-machine measurement, the machine tool spindle drives the sensor to scan the surface of the workpiece, and the linear profile measured by the sensor is combined with the variable quantity of the machine tool motion axis to obtain the three-dimensional profile of the surface of the workpiece. Before measurement, the position and the gesture of a sensor measurement coordinate system relative to a tool coordinate system are required to be calibrated, and the calibration precision directly influences the measurement precision of the three-dimensional contour of the workpiece.
Among the existing line laser sensor pose calibration methods, a standard ball-based hand-eye calibration method is a typical one. According to the method, a machine tool spindle drives a sensor to do multiple translation and rotation motions relative to a standard ball, a measurement equation of the center of the standard ball under each gesture is established, and the measurement equation is solved according to the position invariance of the center of the ball in a workpiece coordinate system to obtain a gesture matrix of the sensor measurement coordinate system relative to a tool coordinate system. The method is simple to operate, and can simultaneously obtain a rotation matrix and a translation matrix; however, the mathematical model for solving the pose matrix is sensitive to the measurement error of the sensor, so that the pose calibration precision is low, and the three-dimensional contour measurement error is generally more than one hundred micrometers. In addition, the calibration method needs to perform three-dimensional translation and two-dimensional rotation, so that the method can only be applied to on-machine measurement of a five-axis numerical control machine tool and has no universality.
The hand-eye calibration method based on the step plate is another pose calibration method. According to the method, inflection points and characteristic points of the step plate are measured by a sensor, the translational motion of a machine tool is combined, the gesture of the sensor is obtained through calculation of the measured distance and the translational distance information, and the gesture is corrected by a three-dimensional gesture adjusting clamp. The method can be applied to multi-axis numerical control machine tools such as three axes, four axes and the like, has universality, but a high-precision step plate with diffuse reflection characteristic is not easy to process, the height measurement error of inflection points and characteristic points is often larger, and the pose calibration precision of a sensor and the measurement precision of a workpiece contour are lower; in addition, the three-dimensional posture adjustment fixture generally adopts a serial adjustment mode, an adjustment error of the upper-stage direction can be transmitted to the lower stage, and the sensor can be adjusted to an ideal posture through multiple iterations, so that the efficiency is low.
In order to further improve the workpiece contour detection precision in the on-machine measurement of the line laser and improve the machining precision and the machining efficiency of the numerical control machine tool, a novel sensor pose calibration method with universality and high precision needs to be searched.
Disclosure of Invention
In view of the above, the invention provides a linear laser sensor pose calibration method in an on-machine measurement system, which is suitable for three-axis, four-axis and five-axis numerical control machine tools, has low calibration error, can improve the detection precision of the three-dimensional contour of a workpiece to the level of tens or even tens of micrometers, and can improve the machining precision and the machining efficiency of the workpiece.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
the online measurement system comprises a machine tool, a online laser sensor, a sensor clamp, a workpiece table and a workpiece to be processed; the line laser sensor is loaded at the tail end of a main shaft of the machine tool through the sensor clamp; the calibration method comprises the following steps:
dividing the coordinate system of the on-machine measuring system into a sensor measuring coordinate system O M X M Y M Z M Tool coordinate system O C X C Y C Z C And a workpiece coordinate system O P X P Y P Z P The method comprises the steps of carrying out a first treatment on the surface of the The three coordinate axis directions of the tool coordinate system and the workpiece coordinate system are parallel to the moving direction of the translation axis of the machine tool; tool coordinate systemOrigin O of (2) C At the tool control point, the origin O of the workpiece coordinate system P X on the work-piece table for the tool control point P -Y P Projection points of the plane; sensor measurement coordinate system X M The axis being perpendicular to the light plane of the sensor, Y M Axis and Z M The axis is parallel to the light plane;
the method comprises the steps of taking a standard plane and a standard sphere as measurement objects, calculating the three-dimensional posture of a line laser sensor according to multi-dimensional translation information of a machine tool and distance information measured by the line laser sensor, and converting a sensor measurement coordinate system into a workpiece coordinate system;
and adjusting the three-dimensional posture of the line laser sensor to an ideal posture by using the sensor clamp in a parallel adjustment mode.
Preferably, in the above-mentioned method for calibrating the pose of a line laser sensor in an on-machine measurement system, the profile data measured by the line laser sensor is represented in a workpiece coordinate system as follows:
wherein R is 1 And T 1 A rotation matrix and a translation matrix representing the sensor measurement coordinate system relative to the tool coordinate system; r is R 2 And T 2 The rotation matrix and the translation matrix of the tool coordinate system relative to the workpiece coordinate system are expressed and are known by the readings of the motion axes of the machine tool and the calibrated parameters among the axes of the machine tool; t (T) 1 By comparing the coordinates of a certain mark point in the sensor measurement coordinate system with the coordinates in the tool coordinate system.
Preferably, in the method for calibrating the pose of the line laser sensor in the on-machine measurement system, the process of calculating and adjusting the three-dimensional pose of the line laser sensor includes the following steps:
introducing a standard plane, and adjusting the posture of the standard plane until the standard plane is parallel to the X axis and the Y axis of the translation axis of the machine tool;
calculating a sensor measurement coordinate system Y M Angle alpha between axis and standard plane Y Regulating the instituteThe line laser sensor is in the posture until the included angle alpha Y Approaching 0 °;
calculating a sensor measurement coordinate system Z M The included angle alpha between the axis and the Z axis of the machine tool Z Adjusting the posture of the line laser sensor until an included angle alpha Z Approaching 0 °;
taking a standard sphere as a measurement object, calculating a measurement coordinate system X of a sensor M The included angle alpha between the axis and the X axis of the machine tool X Adjusting the posture of the line laser sensor until an included angle alpha X Approaching 0 deg..
Preferably, in the above-mentioned line laser sensor pose calibration method in an on-machine measurement system, the adjustment process of the standard plane pose includes the following steps:
placing a standard plane on the workpiece table together with a supporting platform capable of adjusting the two-dimensional pitching posture of the standard plane; for the machine tool to move along X-axis for displacement s X Calculating to obtain the difference h between the two heights detected by a pixel point of the line laser sensor before and after the movement DX Calculating the included angle theta between the standard plane and the X axis of the machine tool according to the following formula X ：
Adjusting the posture of the supporting platform of the standard plane, and iterating for a plurality of times until theta X Approaching 0; similarly, according to the adjustment of theta X The method of (2) adjusts the included angle theta between the standard plane and the Y axis of the machine tool Y Multiple iterations up to theta Y Approaching 0.
Preferably, in the above-mentioned line laser sensor pose calibration method in an on-machine measurement system, the standard plane adopts a ceramic surface, or adopts a surface made by spraying titanium powder on a high-precision optical plane element; the standard ball adopts a matte ceramic surface ball body.
Preferably, in the method for calibrating the pose of the line laser sensor in the on-machine measurement system, the included angle α Y The calculation steps of (a) are as follows:
and acquiring a certain line contour of the standard plane by using the line laser sensor, and performing straight line fitting on the line contour by using a least square method, wherein the calculation formula is as follows:
[a b] T ＝(C T C) -1 C T H；
wherein a and b are coefficients of a linear fitting first order term and a constant term, respectively, and matrices C and H are expressed as:
H＝[z M1 …z Mi …z MN ] T ；
wherein y is Mi And z Mi Coordinate values respectively representing line profile data points;
calculating the sensor measurement coordinate system Y according to M Angle alpha between axis and standard plane Y ；
α Y ＝arctan(a)；
Adjusting the attitude of the line laser sensor using the sensor fixture, iterating a plurality of times until alpha Y Approaching 0 deg..
Preferably, in the method for calibrating the pose of the line laser sensor in the on-machine measurement system, α Z The calculation steps of (a) are as follows:
the standard plane is used as the measuring object to drive the linear laser sensor to move by a distance l along the Z axis of the machine tool Z Calculating the difference h between the two heights detected by a pixel point of the line laser sensor before and after the movement DZ The sensor measurement coordinate system Z is calculated using M Included angle alpha between axis and Z axis of machine tool Z ：
Adjusting the attitude of the line laser sensor using the sensor fixture, iterating a plurality of times until alpha Z Approaching 0 deg..
Preferably, in one of the aboveIn a linear laser sensor pose calibration method in an on-machine measurement system, alpha X The calculation steps of (a) are as follows:
taking a standard ball as a measuring object, designating two positions on the surface of the standard ball as a position 1 and a position 2 respectively, wherein the position 1 and the position 2 are positioned on two sides of a ball center respectively;
the line laser sensor is used for acquiring the line profile of the ball surface position 1, and then the machine tool is moved along the X axis for displacement l X The line laser sensor acquires the line profile of the ball surface position 2, and the line profiles of the position 1 and the position 2 are respectively subjected to circle center fitting by adopting a least square method to acquire a circle center coordinate (y MP1 ,z MP1 ) And (y) MP2 ,z MP2 ) The calculation formula is as follows:
calculating the sensor measurement coordinate system X according to M Included angle alpha between axis and X axis of machine tool X ：
Adjusting the attitude of the line laser sensor using the sensor fixture, iterating a plurality of times until alpha X Approaching 0 deg..
Preferably, in the method for calibrating the pose of the line laser sensor in the on-machine measurement system, the sensor clamp adopts a parallel adjustment mode to independently adjust the poses of all directions; the sensor clamp is of a hollow tetrahedron structure, the front end face, the left side end face and the right side end face of the sensor clamp are composed of copper sheets, and the rear end face of the sensor clamp is composed of rubber pads; the line laser sensor is clamped inside four end faces of the sensor clamp; the front end face of the sensor clamp is provided with a knob K X Knob K Y And knob Ks; knob K X X for adjusting the line laser sensor M Axial direction, knob K Y Y for adjusting the line laser sensor M An axial direction;the left end face of the sensor clamp is provided with a knob K Z1 And K Z4 The right end face is provided with a knob K Z2 And K Z3 The method comprises the steps of carrying out a first treatment on the surface of the Knob K Z1 And K Z3 Is diagonally arranged and forms a group of knob pairs, knob K Z2 And K Z4 Is diagonally arranged and forms another group of knob pairs; z to the line laser sensor M When the axial direction is adjusted, the same group of knob pairs rotate in the same direction, and the other group of knob pairs rotate in opposite directions; the line laser sensor Z M The deflection angle of the shaft and the feeding length of the knob are in a nonlinear relation, and the feeding length of the knob is set in an iterative approximation mode.
Preferably, in the method for calibrating the pose of the line laser sensor in the on-machine measurement system, the telescopic length of the rubber pad on the rear end surface of the sensor clamp determines the X of the line laser sensor M Axes and Y M The deflection angle of the shaft is calculated as follows:
wherein l FX 、l FY Rubber pads are respectively arranged on the sensor X M Axes and Y M Length of extension in axial direction d X 、d Y Respectively is a knob K X And K Y Distance from knob Ks.
Compared with the prior art, the invention discloses a line laser sensor pose calibration method in an on-machine measurement system, which has the following beneficial effects:
1. and taking the standard plane and the standard sphere as measurement objects, and calculating and acquiring the three-dimensional posture of the line laser sensor by using the multidimensional translation information of the machine tool and the distance information measured by the line laser sensor. The mathematical model for gesture calibration is simple, the gesture and the ranging information form a direct mapping relation, and the low morphology error of the measured object and the high precision of the ranging information ensure the high precision of gesture calibration.
2. The three-dimensional posture adjustment mode of the sensor clamp is designed into a parallel mode, the two-dimensional pitching adjustment is realized on the front face of the online laser sensor in a knob feeding mode, and the one-dimensional tilting adjustment is realized on the side face. The designed parallel adjustment mode can not form crosstalk among different directions, can quickly converge to an ideal posture without repeated iteration, and has simple and efficient adjustment process.
3. The invention has lower calibration error, can improve the detection precision of the workpiece contour to the level of tens of micrometers, only uses three translation shafts of the numerical control machine tool in the calibration process, and does not use a rotating shaft, so the invention is suitable for three-shaft, four-shaft and five-shaft numerical control machine tools comprising three-dimensional translation shafts, and has universality.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present invention, and that other drawings can be obtained according to the provided drawings without inventive effort for a person skilled in the art.
FIG. 1 is a flow chart of a line laser sensor pose calibration method in an on-machine measurement system provided by the invention;
FIG. 2 is a schematic diagram of the on-machine measurement system of the five-axis numerical control machine tool provided by the invention;
FIG. 3 is a drawing showing the alpha Y Schematic diagram of solving principle;
FIG. 4 is a drawing showing the alpha-form provided by the present invention Z Schematic diagram of solving principle;
FIG. 5 is a drawing showing the alpha X Schematic diagram of solving principle;
fig. 6 is a schematic structural view of a sensor fixture provided by the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The embodiment of the invention discloses a line laser sensor pose calibration method in an on-machine measurement system, as shown in fig. 2, wherein the on-machine measurement system comprises a machine tool, a line laser sensor 1, a sensor clamp 2, a workpiece table 3 and a workpiece 4 to be processed; the line laser sensor 1 is loaded at the tail end of a machine tool spindle through the sensor clamp 2, has all degrees of freedom of a machine tool feeding mechanism, and realizes contour measurement of a workpiece processing area; the tool 5 is mounted on a machine tool spindle for machining a workpiece to be machined.
As shown in fig. 1, the calibration method includes the following steps:
dividing the coordinate system of the on-machine measuring system into a sensor measuring coordinate system O M X M Y M Z M Tool coordinate system O C X C Y C Z C And a workpiece coordinate system O P X P Y P Z P The method comprises the steps of carrying out a first treatment on the surface of the The three coordinate axis directions of the tool coordinate system and the workpiece coordinate system are parallel to the moving direction of the translation axis of the machine tool; origin O of tool coordinate system C At the tool control point, the origin O of the workpiece coordinate system P X on the work-piece table for the tool control point P -Y P Projection points of the plane; sensor measurement coordinate system X M The axis being perpendicular to the light plane of the sensor, Y M Axis and Z M The axis is parallel to the light plane;
the method comprises the steps of taking a standard plane and a standard sphere as measurement objects, calculating the three-dimensional posture of a line laser sensor according to multi-dimensional translation information of a machine tool and distance information measured by the line laser sensor, and converting a sensor measurement coordinate system into a workpiece coordinate system;
and the three-dimensional posture of the line laser sensor is adjusted to an ideal posture by using a sensor clamp in a parallel adjustment mode.
Specifically, in the machine measurement process, the contour data measured by the line laser sensor is based on the sensor measurement coordinate system, and the detection data based on the workpiece coordinate system is required to be used in the final processing, so that the conversion from the sensor measurement coordinate system to the workpiece coordinate system needs to be realized. Respectively defining a sensor measurement coordinate system O M X M Y M Z M Tool coordinate system O C X C Y C Z C And a workpiece coordinate system O P X P Y P Z P The method comprises the steps of carrying out a first treatment on the surface of the Wherein, the directions of three coordinate axes of the tool coordinate system and the workpiece coordinate system are parallel to the moving direction of the translation axis of the machine tool, and the origin O of the tool coordinate system C At the tool control point, the origin O of the workpiece coordinate system P X on the work-piece table for the tool control point P -Y P Projection points of the plane; sensor measurement coordinate system X M The axis being perpendicular to the light plane of the sensor, Y M Axis and Z M The axis is parallel to the light plane. The profile data measured by the sensor are expressed in the workpiece coordinate system as:
in the formula (1), R 1 And T 1 A rotation matrix and a translation matrix representing the sensor measurement coordinate system relative to the tool coordinate system; r is R 2 And T 2 The rotation matrix and the translation matrix of the tool coordinate system relative to the workpiece coordinate system are expressed and are known by the readings of the motion axes of the machine tool and the calibrated parameters among the axes of the machine tool; t (T) 1 By comparing the coordinates of a certain mark point in the sensor measurement coordinate system with the coordinates in the tool coordinate system.
The included angles between the corresponding coordinate axes of the sensor measurement coordinate system and the tool coordinate system are respectively obtained by adopting the following method, and then the corresponding coordinate axes are adjusted to be in a mutually parallel state by adopting a sensor clamp, so that R 1 The method is a unit matrix, and comprises the following specific steps:
1) And adjusting the standard plane posture to be parallel to the X axis and the Y axis of the translation axis of the machine tool.
The specific method comprises the following steps: placing a standard plane on a workpiece table of a machine tool together with a supporting platform capable of adjusting the two-dimensional pitching attitude of the standard plane, and moving the X-axis displacement s of the machine tool X Calculating and obtaining the difference h between the two heights detected by a certain pixel point of the sensor before and after movement DX Calculating the included angle theta between the standard plane and the X axis of the machine tool according to the following formula X ：
Adjusting the posture of the standard plane supporting platform, and iterating for a plurality of times until theta X Near 0, the included angle theta between the standard plane and the Y axis of the machine tool can be adjusted by the same method Y Close to 0. The standard plane can be a ceramic surface with small flatness, or a surface made by spraying titanium powder on a high-precision optical plane element.
2) Acquiring a sensor measurement coordinate system Y M The included angle between the shaft and the standard plane is adjusted to be close to 0 degrees.
The specific method comprises the following steps: the line laser sensor collects a certain line outline of the standard plane, and adopts a least square method to carry out straight line fitting on the line outline, and the algorithm is as follows:
[a b] T ＝(C T C) -1 C T H (3)；
in the formula (3), a and b are coefficients of a linear fitting first order term and a constant term, respectively, and matrices C and H are expressed as:
H＝[z M1 …z Mi …z MN ] T (5)；
in the formula (4) and the formula (5), y Mi And z Mi Representing coordinate values of the line profile data points.
Calculating a sensor measurement coordinate systemY M Angle alpha between axis and standard plane Y The formula is as follows:
α Y ＝arctan(a) (6)；
α Y the schematic diagram of the solving principle is shown in fig. 3. Adjusting sensor attitude using a three-dimensional attitude adjustment fixture, iterating multiple times until α Y Approximately 0 deg..
3) Acquiring a sensor measurement coordinate system Z M And (3) adjusting the attitude of the sensor to an included angle between the axis and the main shaft (Z axis) of the machine tool to be close to 0 degrees.
The specific method comprises the following steps: the standard plane is used as a measuring object, and the main shaft of the machine tool drives the sensor to move a distance l Z Calculating and obtaining the difference h between the two heights detected by a certain pixel point of the sensor before and after movement DZ The sensor measurement coordinate system Z is calculated by the following formula M Included angle alpha between axis and Z axis of machine tool Z The formula is as follows:
α Z the schematic diagram of the solving principle is shown in fig. 4. Adjusting the attitude of the sensor using a three-dimensional attitude adjustment jig, iterating a plurality of times until α Z Approximately 0 deg..
4) Acquiring a sensor measurement coordinate system X M And adjusting the attitude of the sensor to an included angle close to 0 degrees by using the included angle between the axis and the X axis of the machine tool.
The specific method comprises the following steps: after the line profile of the ball surface position 1 is acquired by a sensor by taking a standard ball as a measuring object, the X-axis displacement l of the machine tool is moved X The line profile of the ball surface position 2 is obtained by a sensor, the line profiles of the position 1 and the position 2 are respectively subjected to circle center fitting by adopting a least square method, and the circle center coordinates (y MP1 ,z MP1 ) And (y) MP2 ,z MP2 ) The algorithm is as follows:
according toThe measuring coordinate system X of the sensor is calculated as follows M Included angle alpha between axis and X axis of machine tool X ：
α X The schematic diagram of the solving principle is shown in fig. 5. Adjusting the attitude of the sensor using a three-dimensional attitude adjustment jig, iterating a plurality of times until α X Approximately 0 deg.. The standard ball used adopts a matte ceramic surface ball with very small roundness.
As shown in fig. 6, the direction adjustment of the sensor holder 2 is designed in a parallel manner. The sensor clamp is of a hollow tetrahedron structure, the front end face and the left and right side end faces of the sensor clamp are composed of copper sheets 201, and the rear end face of the sensor clamp is composed of rubber pads 202; the line laser sensor clamps are arranged inside the four end faces of the sensor clamp; the front end face of the sensor clamp is provided with a knob K X Knob K Y And knob Ks; the three knobs are distributed in a right triangle; the front and back of the line laser sensor are clamped between the copper sheet and the rubber pad, and the rubber pad has certain elasticity and expansion space.
When the knob K is turned clockwise X When K is X The pressure is conducted to the rubber pad through the copper sheet and the sensor, the rubber pad is compressed, and the sensor winds around K Y And K S The combined shaft rotates clockwise by a certain angle; when the knob K is turned anticlockwise X When the rubber pad is released a certain pressure and stretches, the sensor winds around K Y And K S The combined shaft rotates anticlockwise by a certain angle; thus, the knob K is turned X Changeable sensor X M And an included angle between the axis and the X axis of the machine tool. Similarly, turn knob K Y When the sensor is wound around K X And K S The combined axes being rotated, thereby changing the sensor Y M And the included angle between the axis and the X-Y plane of the machine tool. Telescopic length of rubber pad determines line laser sensor X M Axes and Y M Deflection angle of the shaft, calculated by the following formula:
in the formulas (10) and (11), l FX 、l FY Rubber pad on-line laser sensor X M Axes and Y M Length of extension in axial direction d X 、d Y Respectively is a knob K X And K Y Distance from knob Ks.
Two sides of the sensor are clamped between two copper sheets, and the left end face of the sensor clamp 2 is provided with a knob K Z1 And K Z4 The right end face is provided with a knob K Z2 And K Z3 The method comprises the steps of carrying out a first treatment on the surface of the The 4 knobs are distributed in a rectangular shape. By knob K Z1 、K Z2 、K Z3 And K Z4 Z of control sensor M The axial direction. The knobs are divided into two groups, K Z1 And K Z3 Is a group of K Z2 And K Z4 Another group; the same group of knobs rotate in the same direction and the other group rotates in the opposite direction.
Z to sensor M When the axial direction is adjusted, when K Z1 And K Z3 When the rotary knob rotates clockwise, the two conduct pressure to the side face of the sensor through the copper sheet, the sensor rotates clockwise by taking a rectangular center vertical line formed by 4 rotary knobs as an axial direction, and Z is a value of Z M The axial direction is changed; because the spatial position of the sensor after rotation can be changed, K is needed Z2 And K Z4 At K Z1 And K Z3 Rotation of the front counter-clockwise reduces the feed length, thereby freeing up sufficient space for sensor rotation. When the sensor is required to rotate in the counterclockwise direction, K is required Z1 And K Z3 Rotate anticlockwise to release a certain space, K Z2 And K Z4 Rotation in the clockwise direction increases the feed length. Sensor Z M The deflection angle of the shaft and the feeding length of the knob are in a nonlinear relation, and the feeding length of the knob is set in an iterative approximation mode.
The linear laser sensor is clamped among the front end surface copper sheet, the rear end surface rubber pad and the side surface copper sheet of the sensor clamp body, and the rubber pad provides telescopic space and friction resistance; when the knob applies pressure to the line laser sensor, the copper sheet plays a role in pressure buffering and transmission, and the line laser sensor is protected from damage. The clamp after loading the line laser sensor is connected to the machine spindle through the bottom plate bar hole 203, thus having all degrees of freedom of the machine feed mechanism like the spindle.
The parallel adjusting mode adopted by the sensor clamp can not form crosstalk to other two directions when the gesture in a single direction is adjusted, and the sensor can be adjusted to an ideal gesture without repeated iteration, so that the adjusting process is simpler and more efficient than a serial mode.
In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant points refer to the description of the method section.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (8)
1. The online measurement system comprises a machine tool, a online laser sensor, a sensor clamp, a workpiece table and a workpiece to be processed; the line laser sensor is loaded at the tail end of a main shaft of the machine tool through the sensor clamp; the calibration method is characterized by comprising the following steps of:
dividing the coordinate system of the on-machine measuring system into a sensor measuring coordinate system O M X M Y M Z M Tool coordinate system O C X C Y C Z C And a workpiece coordinate system O P X P Y P Z P The method comprises the steps of carrying out a first treatment on the surface of the The three coordinate axis directions of the tool coordinate system and the workpiece coordinate system are parallel to the moving direction of the translation axis of the machine tool; origin O of tool coordinate system C At the tool control point, the origin O of the workpiece coordinate system P X on the work-piece table for the tool control point P -Y P Projection points of the plane; sensor measurement coordinate system X M The axis being perpendicular to the light plane of the sensor, Y M Axis and Z M The axis is parallel to the light plane;
the method comprises the steps of taking a standard plane and a standard sphere as measurement objects, calculating the three-dimensional posture of the line laser sensor according to multi-dimensional translation information of the machine tool and distance information measured by the line laser sensor, and converting a sensor measurement coordinate system into a workpiece coordinate system;
the three-dimensional posture of the line laser sensor is adjusted to an ideal posture by using the sensor clamp in a parallel adjustment mode;
the three-dimensional attitude calculation and adjustment process of the line laser sensor comprises the following steps:
introducing a standard plane, and adjusting the posture of the standard plane until the standard plane is parallel to the X axis and the Y axis of the translation axis of the machine tool;
calculating a sensor measurement coordinate system Y M Angle alpha between axis and standard plane Y Adjusting the posture of the line laser sensor until an included angle alpha Y Approaching 0 °;
calculating a sensor measurement coordinate system Z M The included angle alpha between the axis and the Z axis of the machine tool Z Adjusting the posture of the line laser sensor until an included angle alpha Z Approaching 0 °;
taking a standard sphere as a measurement object, calculating a measurement coordinate system X of a sensor M The included angle alpha between the axis and the X axis of the machine tool X Adjusting the posture of the line laser sensor until an included angle alpha X Approaching 0 °;
the sensor clamp adopts a parallel adjustment mode to independently adjust the gestures in all directions; the sensor clamp is of a hollow tetrahedron structure, the front end face, the left side end face and the right side end face of the sensor clamp are composed of copper sheets, and the rear end face of the sensor clamp is composed of rubber pads; the line laser sensor is clamped inside four end faces of the sensor clamp; the front end face of the sensor clamp is provided with a knob K X Knob K Y And knob Ks; knob K X X for adjusting the line laser sensor M Axial direction, knob K Y Y for adjusting the line laser sensor M An axial direction; the left end face of the sensor clamp is provided with a knob K Z1 And K Z4 The right end face is provided with a knob K Z2 And K Z3 The method comprises the steps of carrying out a first treatment on the surface of the Knob K Z1 And K Z3 Is diagonally arranged and forms a group of knob pairs, knob K Z2 And K Z4 Is diagonally arranged and forms another group of knob pairs; z to the line laser sensor M When the axial direction is adjusted, the same group of knob pairs rotate in the same direction, and the other group of knob pairs rotate in opposite directions; the line laser sensor Z M The deflection angle of the shaft and the feeding length of the knob are in a nonlinear relation, and the feeding length of the knob is set in an iterative approximation mode.
2. The method for calibrating the pose of a line laser sensor in an on-machine measurement system according to claim 1, wherein the contour data measured by the line laser sensor are represented in a workpiece coordinate system as follows:
wherein R is 1 And T 1 A rotation matrix and a translation matrix representing the sensor measurement coordinate system relative to the tool coordinate system; r is R 2 And T 2 A rotation matrix and a translation matrix representing a tool coordinate system relative to a workpiece coordinate system, and calibrated by readings of a machine tool motion axis and each machine tool axisObtaining parameters; t (T) 1 By comparing the coordinates of a certain mark point in the sensor measurement coordinate system with the coordinates in the tool coordinate system.
3. The method for calibrating the pose of the line laser sensor in the on-machine measuring system according to claim 1, wherein the adjusting process of the standard plane pose comprises the following steps:
placing a standard plane on the workpiece table together with a supporting platform capable of adjusting the two-dimensional pitching posture of the standard plane; for the machine tool to move along X-axis for displacement s X Calculating to obtain the difference h between the two heights detected by a pixel point of the line laser sensor before and after the movement DX Calculating the included angle theta between the standard plane and the X axis of the machine tool according to the following formula X ：
Adjusting the posture of the supporting platform of the standard plane, and iterating for a plurality of times until theta X Approaching 0; similarly, according to the adjustment of theta X The method of (2) adjusts the included angle theta between the standard plane and the Y axis of the machine tool Y Multiple iterations up to theta Y Approaching 0.
4. The method for calibrating the pose of the line laser sensor in the on-machine measuring system according to claim 1, wherein a standard plane is made of a ceramic surface or titanium powder sprayed on a high-precision optical plane element; the standard ball adopts a matte ceramic surface ball body.
5. The method for calibrating the pose of a line laser sensor in an on-machine measuring system according to claim 1, wherein the included angle alpha is as follows Y The calculation steps of (a) are as follows:
and acquiring a certain line contour of the standard plane by using the line laser sensor, and performing straight line fitting on the line contour by using a least square method, wherein the calculation formula is as follows:
[a b] T ＝(C T C) -1 C T H；
wherein a and b are coefficients of a linear fitting first order term and a constant term, respectively, and matrices C and H are expressed as:
H＝[z M1 …z Mi …z MN ] T ；
wherein y is Mi And z Mi Coordinate values respectively representing line profile data points;
calculating the sensor measurement coordinate system Y according to M Angle alpha between axis and standard plane Y ；
α Y ＝arctan(a)；
Adjusting the attitude of the line laser sensor using the sensor fixture, iterating a plurality of times until alpha Y Approaching 0 deg..
6. The method for calibrating the pose of a line laser sensor in an on-machine measuring system according to claim 1, wherein alpha is as follows Z The calculation steps of (a) are as follows:
the standard plane is used as the measuring object to drive the linear laser sensor to move by a distance l along the Z axis of the machine tool Z Calculating the difference h between the two heights detected by a pixel point of the line laser sensor before and after the movement DZ The sensor measurement coordinate system Z is calculated using M Included angle alpha between axis and Z axis of machine tool Z ：
Adjusting the attitude of the line laser sensor using the sensor fixture, iterating a plurality of times until alpha Z Approaching 0 deg..
7. An on-machine measurement system as set forth in claim 1The linear laser sensor pose calibration method is characterized in that alpha is X The calculation steps of (a) are as follows:
taking a standard ball as a measuring object, designating two positions on the surface of the standard ball as a position 1 and a position 2 respectively, wherein the position 1 and the position 2 are positioned on two sides of a ball center respectively;
the line laser sensor is used for acquiring the line profile of the ball surface position 1, and then the machine tool is moved along the X axis for displacement l X The line laser sensor acquires the line profile of the ball surface position 2, and the line profiles of the position 1 and the position 2 are respectively subjected to circle center fitting by adopting a least square method to acquire a circle center coordinate (y MP1 ,z MP1 ) And (y) MP2 ,z MP2 ) The calculation formula is as follows:
calculating the sensor measurement coordinate system X according to M Included angle alpha between axis and X axis of machine tool X ：
Adjusting the attitude of the line laser sensor using the sensor fixture, iterating a plurality of times until alpha X Approaching 0 deg..
8. The method for calibrating the pose of a line laser sensor in an on-machine measuring system according to claim 1, wherein the telescopic length of a rubber pad on the rear end surface of the sensor clamp determines the X of the line laser sensor M Axes and Y M The deflection angle of the shaft is calculated as follows:
wherein l FX 、l FY Rubber pads are respectively arranged on the sensor X M Axes and Y M Length of extension in axial direction d X 、d Y Respectively is a knob K X And K Y Distance from knob Ks.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110962375.6A CN113739717B (en) | 2021-08-20 | 2021-08-20 | Line laser sensor pose calibration method in on-machine measurement system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110962375.6A CN113739717B (en) | 2021-08-20 | 2021-08-20 | Line laser sensor pose calibration method in on-machine measurement system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113739717A CN113739717A (en) | 2021-12-03 |
| CN113739717B true CN113739717B (en) | 2023-10-24 |
Family
ID=78732024
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110962375.6A Active CN113739717B (en) | 2021-08-20 | 2021-08-20 | Line laser sensor pose calibration method in on-machine measurement system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113739717B (en) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6743115B2 (en) * | 2018-12-14 | 2020-08-19 | Dmg森精機株式会社 | Contact detection device |
| CN114131217A (en) * | 2021-12-28 | 2022-03-04 | 浙江华工光润智能装备技术有限公司 | Multi-size super-thick glass laser hole cutting equipment |
| CN114279344A (en) * | 2021-12-31 | 2022-04-05 | 思格测量技术(苏州)有限公司 | Line laser measuring device and using method thereof |
| CN114440796B (en) * | 2022-01-14 | 2024-08-06 | 湖北三江航天险峰电子信息有限公司 | Wireless laser on-machine measurement system and method |
| CN114061459B (en) * | 2022-01-18 | 2022-05-10 | 成都飞机工业（集团）有限责任公司 | Non-contact photographic hole measurement calibration device and method |
| CN114782513B (en) * | 2022-04-22 | 2023-11-10 | 成都飞机工业（集团）有限责任公司 | Point laser sensor mounting pose calibration method based on plane |
| CN115307575A (en) * | 2022-06-28 | 2022-11-08 | 北京工业大学 | Columnar part non-contact three-dimensional measuring device and method |
| CN115145221B (en) | 2022-07-05 | 2024-07-19 | 湖南大学 | Workpiece and cutter pose calibration method based on robot edge milling error tracing |
| CN115365941B (en) * | 2022-07-15 | 2023-10-20 | 朗信(苏州)精密光学有限公司 | Automatic workpiece pose calibration method for optical polishing |
| CN117073582B (en) * | 2023-09-12 | 2024-01-26 | 梅卡曼德（北京）机器人科技有限公司 | Calibration method and device of line laser profilometer system and electronic equipment |
| CN117516408B (en) * | 2023-09-27 | 2024-06-25 | 苏州佳祺仕科技股份有限公司 | Curved surface detection device and magnetic flux detection device |
| CN117848218B (en) * | 2023-12-28 | 2024-09-10 | 南京邮电大学 | Combined calibration method of laser displacement sensor and contour scanner |
Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE836785A (en) * | 1974-12-19 | 1976-04-16 | OPTO-ELECTRONIC APPARATUS AND METHOD FOR DETECTION AND POSITION CONTROL | |
| DE10144718A1 (en) * | 2001-09-11 | 2002-05-02 | Karl Heinz Schmall | Sensor element and mounting for contactless control of gap between machining tool and workpiece for use in flame and water jet cutting machines has air cooled capacitive sensor position adjustable to match cutting angle |
| CA2597891A1 (en) * | 2007-08-20 | 2009-02-20 | Marc Miousset | Multi-beam optical probe and system for dimensional measurement |
| CN103407343A (en) * | 2013-08-14 | 2013-11-27 | 重庆大江工业有限责任公司 | Hydro-pneumatic spring adjusting device and method for wheel type armored vehicle |
| DE102013219389A1 (en) * | 2013-09-26 | 2015-03-26 | Carl Zeiss Industrielle Messtechnik Gmbh | Reduction of errors of a turning device used in determining coordinates of a workpiece or machining a workpiece |
| CN106568381A (en) * | 2016-10-25 | 2017-04-19 | 西北工业大学 | Calibration method for linear radar measurement system based on standard plane |
| CN106681336A (en) * | 2016-12-29 | 2017-05-17 | 湖北三江航天红峰控制有限公司 | Unmanned-aerial-vehicle height measurement control system based on fault-tolerance processing and control method |
| CN107424653A (en) * | 2017-07-31 | 2017-12-01 | 中国工程物理研究院激光聚变研究中心 | Beam target coupling aimed positioning system and localization method with multiterminal injection target |
| CN107741198A (en) * | 2017-09-25 | 2018-02-27 | 北京华睿盛德科技有限公司 | A kind of method based on the demarcation of four axle optical scanning system turntables |
| CN109454281A (en) * | 2018-12-21 | 2019-03-12 | 华中科技大学无锡研究院 | A kind of propeller workpiece coordinate system scaling method in robotic milling processing |
| CN111060025A (en) * | 2019-12-23 | 2020-04-24 | 上海交通大学 | Pose calibration method and system for in-situ mounting line laser sensor of five-axis machine tool |
| CN111215967A (en) * | 2019-11-27 | 2020-06-02 | 上海交通大学 | Device and method for detecting dynamic precision of numerical control machine tool |
| CN111536877A (en) * | 2020-06-19 | 2020-08-14 | 无锡身为度信息技术有限公司 | Method for calibrating attitude of line laser sensor on three-coordinate measuring machine |
| CN111578866A (en) * | 2020-06-16 | 2020-08-25 | 大连理工大学 | Spatial pose calibration method for multi-line laser sensor combined measurement |
| CN111873744A (en) * | 2020-07-15 | 2020-11-03 | 吉林大学 | Active suspension pre-aiming control method based on camera sensor road surface information identification |
| CN112936237A (en) * | 2021-02-26 | 2021-06-11 | 中国农业大学 | Force feedback control system and method of tapping robot and tapping robot |
-
2021
- 2021-08-20 CN CN202110962375.6A patent/CN113739717B/en active Active
Patent Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE836785A (en) * | 1974-12-19 | 1976-04-16 | OPTO-ELECTRONIC APPARATUS AND METHOD FOR DETECTION AND POSITION CONTROL | |
| DE10144718A1 (en) * | 2001-09-11 | 2002-05-02 | Karl Heinz Schmall | Sensor element and mounting for contactless control of gap between machining tool and workpiece for use in flame and water jet cutting machines has air cooled capacitive sensor position adjustable to match cutting angle |
| CA2597891A1 (en) * | 2007-08-20 | 2009-02-20 | Marc Miousset | Multi-beam optical probe and system for dimensional measurement |
| CN103407343A (en) * | 2013-08-14 | 2013-11-27 | 重庆大江工业有限责任公司 | Hydro-pneumatic spring adjusting device and method for wheel type armored vehicle |
| DE102013219389A1 (en) * | 2013-09-26 | 2015-03-26 | Carl Zeiss Industrielle Messtechnik Gmbh | Reduction of errors of a turning device used in determining coordinates of a workpiece or machining a workpiece |
| CN106568381A (en) * | 2016-10-25 | 2017-04-19 | 西北工业大学 | Calibration method for linear radar measurement system based on standard plane |
| CN106681336A (en) * | 2016-12-29 | 2017-05-17 | 湖北三江航天红峰控制有限公司 | Unmanned-aerial-vehicle height measurement control system based on fault-tolerance processing and control method |
| CN107424653A (en) * | 2017-07-31 | 2017-12-01 | 中国工程物理研究院激光聚变研究中心 | Beam target coupling aimed positioning system and localization method with multiterminal injection target |
| CN107741198A (en) * | 2017-09-25 | 2018-02-27 | 北京华睿盛德科技有限公司 | A kind of method based on the demarcation of four axle optical scanning system turntables |
| CN109454281A (en) * | 2018-12-21 | 2019-03-12 | 华中科技大学无锡研究院 | A kind of propeller workpiece coordinate system scaling method in robotic milling processing |
| CN111215967A (en) * | 2019-11-27 | 2020-06-02 | 上海交通大学 | Device and method for detecting dynamic precision of numerical control machine tool |
| CN111060025A (en) * | 2019-12-23 | 2020-04-24 | 上海交通大学 | Pose calibration method and system for in-situ mounting line laser sensor of five-axis machine tool |
| CN111578866A (en) * | 2020-06-16 | 2020-08-25 | 大连理工大学 | Spatial pose calibration method for multi-line laser sensor combined measurement |
| CN111536877A (en) * | 2020-06-19 | 2020-08-14 | 无锡身为度信息技术有限公司 | Method for calibrating attitude of line laser sensor on three-coordinate measuring machine |
| CN111873744A (en) * | 2020-07-15 | 2020-11-03 | 吉林大学 | Active suspension pre-aiming control method based on camera sensor road surface information identification |
| CN112936237A (en) * | 2021-02-26 | 2021-06-11 | 中国农业大学 | Force feedback control system and method of tapping robot and tapping robot |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113739717A (en) | 2021-12-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN113739717B (en) | Line laser sensor pose calibration method in on-machine measurement system | |
| US8401692B2 (en) | System and method for tool testing and alignment | |
| US6519860B1 (en) | Position feedback control system | |
| CN106441117B (en) | Turntable error detection method based on multi-station etalon laser tracking system | |
| CN109454281B (en) | Method for calibrating propeller workpiece coordinate system in robot milling | |
| CN111360586A (en) | Laser light emitting direction calibration method based on standard ball | |
| CN113146613B (en) | Three-dimensional self-calibration device and method for D-H parameters of industrial robot | |
| CN103659806A (en) | Industrial robot zero position defining method | |
| CN106705880B (en) | A kind of large caliber reflecting mirror face shape profile detection method and device in place | |
| CN114012585B (en) | Polishing point position calibration method for double-pendulum-shaft type five-axis magnetorheological machine tool | |
| CN113814870B (en) | Method for measuring and calculating pose of magnetorheological polished workpiece and polishing method | |
| Yao et al. | Modeling of kinematics errors and alignment method of a swing arm ultra-precision diamond turning machine | |
| CN115365941B (en) | Automatic workpiece pose calibration method for optical polishing | |
| CN115179323A (en) | Machine end pose measuring device based on telecentric vision constraint and precision improving method | |
| CN108827210A (en) | A kind of articulated coordinate machine scaling method of combining with digital control lathe | |
| CN112762822B (en) | Mechanical arm calibration method and system based on laser tracker | |
| CN113686278B (en) | High-precision industrial robot tool TCP calibration method | |
| CN114571436B (en) | Robot external parameter calibration method independent of ground rail absolute precision | |
| CN112621385B (en) | Rapid identification method for geometric errors of linear axis based on 8 displacement line measurements | |
| CN109062138B (en) | Five-axis platform system calibration method based on three-dimensional calibration block | |
| CN115284079A (en) | Magnetorheological polishing calibration method | |
| CN114859820A (en) | On-machine measurement data compensation method and system for multi-axis numerical control machine tool | |
| TW202146187A (en) | Coordinate calibration method of manipulator | |
| CN112192370B (en) | Manipulator positioning method for polishing spatial curved surface of optical element | |
| CN102890266A (en) | Non-contact detection device and detection method for relative poses between two planes |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |