CN113639677B - High-frequency response two-dimensional photoelectric auto-collimation method and device based on wavefront correction - Google Patents
High-frequency response two-dimensional photoelectric auto-collimation method and device based on wavefront correction Download PDFInfo
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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Abstract
The invention belongs to the technical field of precision test metering, and provides a two-dimensional photoelectric auto-collimation method and device based on wavefront sensing and correction. According to the invention, a wavefront measuring and correcting link is added in the traditional autocollimator measuring method, the measuring and regulating of the aberration of an autocollimator optical system are realized by measuring the wavefront distortion information of a reference light path in an instrument and compensating the distortion phase by driving a deformable mirror, the imaging quality and the light spot positioning precision of the optical system are improved, and the angle measuring precision of the autocollimator is further improved; the angle measurement and the correction process are carried out simultaneously, so that the measurement speed of the auto-collimator is improved. Meanwhile, the link is introduced, so that the autocollimator has the capability of resisting the interference of the external environment, and the resolution and the stability of the angle measurement of the autocollimator are further improved. The method makes the autocollimator possess nanoradian magnitude (5×10) ‑9 rad, i.e., 0.001') of angular resolution and sub-microradian scale (10 ‑7 rad, i.e., 0.02'). The invention has the technical advantages of realizing the angle measurement with high frequency response, high resolution, high precision and high stability under the same condition, and simultaneously has the capabilities of resisting environmental disturbance and compensating errors caused by disturbance.
Description
Technical Field
The invention belongs to the technical field of precision test metering, and particularly relates to a high-frequency response two-dimensional photoelectric auto-collimation method and device based on wavefront correction.
Background
Along with the continuous development of fields such as ultra-precise machining and manufacturing, large-scale equipment manufacturing, large scientific engineering and the like, a self-alignment angle measurement technology capable of realizing high resolution, high precision and high stability under a large measurement range and having a certain anti-interference capability on a measurement site is urgently required. This technology plays an important supporting role in the development of the above-mentioned fields.
In the field of ultra-precise machining and manufacturing, the combination of the auto-collimator, the plane mirror, the polygon prism and the like can measure the shape tolerance and the position tolerance of parts, and the angular resolution can reach 0.1 'to 0.001'; in the manufacturing and mounting process of the large-scale equipment, the auto-collimator is matched with the cooperative target, and the measuring distance can reach several meters or even tens of meters; and the yaw angle and the pitch angle are measured in real time and remotely by using an autocollimator in an assembly workshop, so that the equipment posture is monitored. In the field of large scientific engineering, the auto-collimator can be used for measuring the rotation precision of the rotation of a large-scale scientific instrument, the linear precision of linear motion and the relative posture and position between the instruments. In addition, the application scenario is not limited to the detection room and laboratory environment. Limited by the target to be measured, there is a need for an auto-collimation instrument capable of performing real-time, remote, high-precision and high-stability measurements in a manufacturing site, assembly shop, or even field environment.
The photoelectric auto-collimator is based on the optical auto-collimation principle, and the conventional structure is shown in fig. 1, and the device comprises a laser light source 1, a first convex lens 41, a first spectroscope 2 and an image sensor 3. The light beam emitted from the laser light source 1 is collimated into a parallel light beam by the first convex lens 41, and then enters the reflecting surface of the object to be measured. The light beam reflected from the object reflecting surface is condensed by the first convex lens 41, and spot information is collected by the image sensor 3. The angle information of the measured object can be calculated by utilizing the position information of the light spot.
The autocollimator of conventional structure has the following problems:
the collimating objective lens is a single lens, the focal length is generally about 500mm and is difficult to continuously improve, the limit displacement resolution of the commonly used photoelectric sensor is between 30 and 50nm, and the autocollimator is difficult to realize nano radian magnitude angle measurement according to the measurement principle; the aberration of the single lens optical system is larger, the positioning error of the photoelectric sensor light spot is larger, and the autocollimator is difficult to realize high-precision angle measurement; the auto-collimator light source is generally a laser light source, and due to the light emitting mechanism, the emergent light beam has flat drift and angle drift, and the auto-collimator is difficult to realize high-stability measurement; the structure does not have any compensation link, is extremely easy to be influenced by external disturbance, for example, the air disturbance can cause the reflection light beam to have extra angle drift under the long-distance measurement condition, and the measurement accuracy and stability of the auto-collimator are reduced.
In summary, the conventional photoelectric auto-collimator is limited by the hardware of the optical system and the sensor, is sensitive to the measuring environment, is influenced by various factors such as air disturbance, and the like, so that the technical index and the service environment of the auto-collimator are greatly limited, and the nano radian order angle measuring task with long distance, high resolution, high precision and high stability is difficult to realize in a complex environment.
Disclosure of Invention
The invention aims to overcome the defects in the traditional structural auto-collimator measuring method and device, so as to realize the angle measurement with high frequency response, high precision, high resolution and high stability, and provides a wavefront correction-based high-frequency response two-dimensional photoelectric auto-collimation method and device.
The high-frequency response two-dimensional photoelectric auto-collimation method based on wavefront correction comprises the following steps:
step a, light emitted by two laser sources with different wavelengths is collimated into parallel light by a convex lens, is transmitted in a common way after passing through a first spectroscope, and forms a collimated light beam after passing through a diaphragm, a spectroscope, a turning mirror and a collimating objective lens group and is emitted;
step b, the emergent beam is split by a first dichroic mirror in the instrument, wherein the transmitted beam is used as a measuring beam to be incident on a measured reflecting mirror outside the instrument and is reflected and carries the two-dimensional angle change information of a measured target; the reflected light beam is used as a reference light beam to be incident on a reference reflector fixed in the instrument and returns in the original path;
c, returning the measuring beam and the reference beam along the original emergent light path until the measuring beam and the reference beam are split by a second dichroic mirror after being reflected by the second dichroic mirror; wherein the transmitted beam is a measuring beam received by the image sensor; the reflected light beam is a reference light beam, and is converged into parallel light by a convex lens to be received by a wavefront sensor;
step d, the wavefront sensor measures displacement information and wavefront information of an incident reference beam spot, and measurement errors introduced by factors such as beam drift, environmental disturbance and the like in the measurement process are calculated to be alpha 0 and beta 0;
step e, when the plane reflecting mirror rotates along with the detected object to generate a yaw angle and a pitch angle, the image sensor measures the displacement value of an incident measuring beam light spot, wherein the distance of the light spot deviating from the center position of the image sensor is x1 and y1 respectively;
step f, calculating alpha according to x1=f.tan (2 a) by using the spot displacement x1 and y1 of the measuring beam, wherein (alpha-alpha 0) is the angle of the yaw angle generated by the measured object after compensation; calculating beta according to y1=f.tan (2 beta), wherein (beta-beta 0) is the angle at which the pitch angle of the measured object is generated after compensation; wherein f represents the equivalent focal length of the collimator objective set.
The invention relates to a wavefront correction-based high-frequency response two-dimensional photoelectric auto-collimation device, which comprises the following components:
the device comprises a light source unit, a second beam splitter, an image sensor, a collimating objective lens group, a plane reflector, a small aperture diaphragm, a first turning mirror, a second turning mirror, a first dichroic mirror, a reference reflector, a second dichroic mirror, a third convex lens and a wavefront sensor;
the device comprises a first light source, a second light source, a first dichroic mirror and a second dichroic mirror. Wherein the first light source and the second light source can emit light beams with two different wavelengths; the first dichroic mirror and the second dichroic mirror exhibit high transmittance for the first light source and high reflectance for the second light source;
the light source unit consists of a first light source, a second light source, a first convex lens, a second convex lens and a first spectroscope. The first light source is positioned on the focal plane of the first convex lens, the second light source is positioned on the focal plane of the second convex lens, and the second light source is respectively positioned on two sides of the light splitting section of the first spectroscope;
the light emitted by the first light source and the second light source is collimated into two parallel light beams which are perpendicular to each other through the corresponding convex lenses, the two parallel light beams are converged through the first spectroscope and then enter the aperture diaphragm, and the transmitted light beams are sequentially transmitted through the second spectroscope, reflected by the first turning mirror, reflected by the second turning mirror and transmitted by the collimating objective lens group and then become parallel light beams; the parallel light beam is split into a transmission light beam and a reflection light beam by a first dichroic mirror, the transmission light beam is a measuring light beam, and the transmission light beam is vertical to an incidence plane reflecting mirror; the reflected light beam is a reference light beam and vertically enters a reference reflector; the two paths of light beams are reflected by the reflecting mirror respectively and then return along the original path, and after being reflected by the second dichroic mirror, the reference light beam and the measuring light beam are separated by the second dichroic mirror; the measuring beam is transmitted and vertically incident to the image sensor for acquisition and imaging, and the reference beam is reflected and becomes parallel light after being transmitted by the third convex lens for acquisition and imaging by the wavefront sensor.
The aperture diaphragm is used as an object plane and is positioned at an equivalent focal plane of the collimating objective lens group;
the collimating objective lens group consists of a first combined lens and a second combined lens to form a telephoto objective lens group; the first combined lens is formed by combining 2 or more convex lenses and concave lenses, and has the converging effect on light beams consistent with the convex lenses; the second combined lens is formed by combining 2 or more convex lenses and concave lenses, and has the same light beam scattering effect as the concave lenses; the focal length of the lens is far larger than that of a single convex lens, so that the limit angle resolution of the auto-collimator is improved, and the lens has smaller aberration and nonlinearity;
the third convex lens is positioned on the right side of a focusing focus of the light beam reflected by the second dichroic mirror, the focus is positioned at the focus surface of the third convex lens, the reference light beam is focused firstly after being reflected by the second dichroic mirror and then diverged, becomes a parallel light beam after being transmitted by the third convex lens, and is incident to the center position of the wavefront sensor.
Advantageous effects of the invention
The high-frequency response two-dimensional photoelectric auto-collimation method based on wavefront correction adds wavefront measurement and correction links in the traditional auto-collimator measurement method, the wavefront distortion information of a reference light path in a measuring instrument and compensates distortion phases by driving a deformable mirror, so that the measurement and regulation of the aberration of an auto-collimator optical system are realized, the imaging quality and the light spot positioning precision of the optical system are improved, and the angle measurement precision of the auto-collimator is further improved; the angle measurement and the correction process are carried out simultaneously, so that the measurement speed of the auto-collimator is improved. Meanwhile, the link is introduced, so that the autocollimator has the capability of resisting the interference of external environment, such as temperature change, tiny vibration, air disturbance and the like, and the resolution and the stability of the angle measurement of the autocollimator are further improved; the method enables the traditional auto-collimator to have the angular resolution of nanometer radian magnitude (5 multiplied by 10 < -9 > rad, namely 0.001 ') and the angular measurement precision of submicron radian magnitude (10 < -7 > rad, namely 0.02').
Compared with the traditional auto-collimator structure, the high-frequency response two-dimensional photoelectric auto-collimator based on wavefront correction has the following advantages:
(1) The single collimating objective lens is replaced by a telephoto objective lens group, the focal length is enlarged, the light path volume is reduced, and the ultimate angular resolution of the system is improved to the nano radian level under the same condition;
(2) The reference beam is introduced to realize the measurement and regulation of the aberration of the optical system of the auto-collimator, so that the imaging quality of the light spots is improved, the positioning accuracy of the light spots is improved, and the measurement accuracy and stability of the auto-collimator are further improved;
(3) The laser light source is replaced by light transmitted by the aperture diaphragm to be used as an autocollimator light source, so that measurement instability caused by self drift of the light source is directly reduced;
(4) An independent light source is added in the device to serve as a reference beam, angle measurement is carried out, and meanwhile, angle drift and wave front phase information of the beam are measured and compensated, so that the measuring speed and frequency response of the device are improved, the imaging quality of light spots on an image sensor is improved, the positioning accuracy of the light spots is improved, and the measuring accuracy and stability of the auto-collimation device are further improved;
(5) The turning mirror is used for folding the system long-focus light path twice, so that the volume of the device is reduced, the device is more suitable for an on-site measurement environment, and meanwhile, the influence of air disturbance on the transmission of light beams caused by oversized devices is avoided;
therefore, compared with the traditional self-alignment angle measuring device, the self-alignment angle measuring device has the technical advantages of realizing angle measurement with high frequency response, high precision and high stability while the angle limit resolution reaches the nanoradian magnitude under the same measuring range, and has the capabilities of resisting environmental disturbance and compensating errors caused by disturbance.
Drawings
FIG. 1 is a schematic view of a conventional self-alignment angle measurement device;
FIG. 2 is a schematic view of a collimator lens assembly formed by combining a first combined lens and a second combined lens according to the present invention;
FIG. 3 is a schematic structural diagram of a first embodiment of a wavefront correction based high frequency response two-dimensional photoelectric auto-collimation method and apparatus according to the present invention;
FIG. 4 is a schematic structural diagram of a second embodiment of a wavefront correction based high frequency response two-dimensional photoelectric auto-collimation method and apparatus according to the present invention;
fig. 5 is a schematic structural diagram of a third embodiment of a wavefront correction-based two-dimensional photoelectric auto-collimation method and apparatus for high frequency response according to the present invention.
In the figure: 1 light source unit, 1-1 first light source, 1-2 second light source, 1-3 first convex lens, 1-4 second convex lens, 1-5 first spectroscope, 2 second spectroscope, 3 image sensor, 4 collimation objective group, 4-1 first combined lens, 4-2 second combined lens, 5 plane mirror, 6 aperture diaphragm, 7 first turning mirror, 8 second turning mirror, 9 first dichroic mirror, 10 reference mirror, 11 second dichroic mirror, 12 third convex lens, 13 wavefront sensor, 14 deformable mirror, 15 deformable mirror driver, 16 spatial light modulator.
DETAILED DESCRIPTION OF EMBODIMENT (S) OF INVENTION
Specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.
Detailed description of the preferred embodiments
The embodiment is an embodiment of a high-frequency response two-dimensional photoelectric auto-collimation method and device based on wavefront correction.
The high-frequency response two-dimensional photoelectric auto-collimation device based on wavefront correction in the embodiment has a structure schematically shown in fig. 3. The angle measuring device comprises a first light source 1-1, a second light source 1-2, a first convex lens 1-3, a second convex lens 1-4, a first spectroscope 1-5, a second spectroscope 2, an image sensor 3, a first combined lens 4-1, a second combined lens 4-2, a plane reflecting mirror 5, an aperture diaphragm 6, a first turning mirror 7, a second turning mirror 8, a first dichroic mirror 9, a reference reflecting mirror 10, a second dichroic mirror 11, a third convex lens 12 and a wavefront sensor 13;
the light beams emitted by the first light source 1-1 and the light beams emitted by the second light source 1-2 are combined after being collimated and pass through the first spectroscope 1-5, the optical axes of the two light beams coincide, the propagation directions are the same, and the combined light beams are parallel to be incident on the aperture diaphragm 6; the aperture diaphragm 6 is used as an object plane, and the two emitted light beams are transmitted through the second beam splitter 2, reflected by the first turning mirror 7 and the second turning mirror 8, and vertically incident on the collimating objective lens group 4 to be collimated into parallel light beams.
The parallel beam is split into a transmitted beam and a reflected beam by the first dichroic mirror 9, and the first light source 1-1 beam is transmitted at this time to be used as a measuring beam, and is perpendicularly incident to the plane mirror 5; the second light source 1-2 beam is reflected and is used as a reference beam to be vertically incident on the reference reflector 10; the two paths of light beams are reflected by the reflecting mirror respectively and then return along the original path, reflected by the second dichroic mirror 2, and split by the second dichroic mirror 11 to separate the reference light beam and the measuring light beam; the measuring beam is transmitted and vertically incident on the image sensor 3 for imaging, and the reference beam is reflected and transmitted through the third convex lens 12 to become parallel light for imaging by the wavefront sensor 13.
The first light source 1-1 is positioned on the focal plane of the first convex lens 1-3, the second light source 1-2 is positioned on the focal plane of the second convex lens 1-4, and the two sides of the light splitting section of the first spectroscope 1-5 are respectively;
the aperture diaphragm 6 is used as an object plane and is positioned at the equivalent focal plane of the collimating objective group 4;
the collimating objective lens group 4 consists of a first combined lens 4-1 and a second combined lens 4-2, and forms a telephoto objective lens group; the first combined lens 4-1 is formed by combining 2 or more convex lenses and concave lenses, and has the function of converging light beams consistent with the convex lenses; the second combined lens 4-2 is formed by combining 2 or more convex lenses and concave lenses, and has the same scattering effect on light beams as the concave lenses; the focal length of the lens is far larger than that of a single convex lens, so that the limit angle resolution of the auto-collimator is improved, and the lens has smaller aberration and nonlinearity;
the third convex lens 12 is located on the right side of the focal point of the second dichroic mirror 11, where the focal point is located at the focal plane of the third convex lens 12, and the reference beam is reflected by the second dichroic mirror 11, converged and diverged first, transmitted by the third convex lens 12, and changed into a parallel beam, and is incident on the center position of the wavefront sensor 13.
The first turning mirror 7 and the second turning mirror 8 are arranged in parallel, and have a fixed small angle with the main optical axis.
The measurement principle is as follows:
when the measured object changes the angles of the yaw angle α and the pitch angle β, the planar mirror 5 also changes the angles of the yaw angle a and the pitch angle β. The measuring beam incident on the plane reflecting mirror 5 generates yaw angle and pitch angle rotation along with the measured object by the plane reflecting mirror 5, so that the beam reflected by the plane reflecting mirror 5 and the original beam generate 2 alpha and 2 beta angle deflection; the reference reflector 10 does not change with the rotation of the measured object, and the reference beam incident on the reference reflector 10 is reflected and returns in the original path;
the returned measuring beam is reflected by the second beam splitter 2, transmitted by the second dichroic mirror 11, and enters the image sensor 3, and the displacements of the light spot in the vertical and horizontal directions from the center of the sensor are obtained as x1 and y1, and the following relations are satisfied, x1=f·tan (2α), y1=f·tan (2β), f being the equivalent focal length of the collimating objective lens group 4.
The returned reference beam is reflected by the second beam splitter 2 and the second dichroic mirror 11, is converged and diverged firstly, is incident into the third convex lens 12 to become a parallel beam, is incident into the wavefront sensor 13, and collects the beam wavefront phase information of the reference beam; the information reflects the information of flat drift and angle drift caused by external environment disturbance, light source beam drift and other factors in the transmission process of the reference beam in the device; the measurement beam transmitted in common with the reference beam will also carry measurement error information α0 and β0 due to the factors described above.
And (3) performing error compensation on the yaw angle alpha and the pitch angle beta obtained by the calculation formula, wherein the compensated (alpha-alpha 0) and (beta-beta 0) are the yaw angle and the pitch angle of the measured object obtained by final measurement.
The high-frequency response two-dimensional photoelectric auto-collimation method based on wavefront correction of the embodiment comprises the following steps:
step a, fixing a plane reflecting mirror 5 on the surface of a measured object;
step b, two laser light sources 1-1 and 1-2 are lightened, the positions of a measured object and a plane reflecting mirror 5 are adjusted, and the geometric center of a measuring beam spot image received by an image sensor 3 is positioned at the center of the sensor;
step c, the wavefront sensor 13 measures displacement information and wavefront information of an incident reference beam spot to obtain measurement errors alpha 0 and beta 0 which are introduced by environmental disturbance, light source drift and other factors in the device measurement process;
step d, when the plane reflecting mirror 5 rotates along with the detected object to generate a yaw angle and a pitch angle, the image sensor 3 measures the displacement value of the incident measuring beam light spot, wherein the distance of the light spot deviating from the center position of the image sensor is x1 and y1 respectively;
step e, calculating alpha according to x1=f.tan (2 alpha) by using the spot displacement x1 and y1 of the measuring beam, wherein (alpha-alpha 0) is the angle of the yaw angle generated by the measured object after compensation; calculating beta according to y1=f.tan (2 beta), wherein (beta-beta 0) is the angle at which the pitch angle of the measured object is generated after compensation; wherein f represents the equivalent focal length of the collimator objective set.
In the embodiment, the first convex lens 41 is replaced by a collimating objective lens group 4 consisting of a first combined lens 4-1 and a second combined lens 4-2, and the collimating objective lens unit of the device is used for expanding the focal length of the collimating objective lens, so that the ultimate angular resolution of the device is improved to the nanoradian level under the same condition; the multi-lens combination enables the optical system to have smaller aberration and nonlinearity, improves the light spot imaging quality, and is beneficial to improving the light spot positioning precision;
the laser light source 1 is replaced by light transmitted by the small aperture diaphragm 6 to be used as a light source, so that measurement instability caused by self drift of the laser light source 1 is directly reduced;
the device is added with an independent light source as a reference beam and is transmitted with a measuring beam common-path, and the real-time monitoring and regulation of the aberration of the optical system of the auto-collimation device are realized through the real-time measurement and correction of the wavefront of the reference beam, so that the aberration of the optical system is reduced, the imaging quality of light spots on an image sensor is improved, and the measurement precision and stability of the auto-collimation device are further improved.
In addition, the first turning mirror 7 and the second turning mirror 8 are selected to fold the system long-focus light path twice, so that the volume of the system device is reduced, the system device is more suitable for an on-site measurement environment, and meanwhile, the influence of air disturbance caused by oversized system devices on measurement results is avoided.
Second embodiment
The embodiment is an embodiment of a high-frequency response two-dimensional photoelectric auto-collimation method and device based on wavefront correction.
The structure of the high-frequency response two-dimensional photoelectric auto-collimation device based on wavefront correction in this embodiment is shown in fig. 4. On the basis of the first embodiment, the present embodiment replaces the second turning mirror 8 with the deformable mirror 14 and the deformable mirror driver 15.
The high-frequency response two-dimensional photoelectric auto-collimation method based on wavefront correction of the embodiment comprises the following steps:
step a, fixing a plane reflecting mirror 5 on the surface of a measured object;
step b, two laser light sources 1-1 and 1-2 are lightened, the positions of a measured object and a plane reflecting mirror 5 are adjusted, and the geometric center of a measuring beam spot image received by an image sensor 3 is positioned at the center of the sensor;
step c, the wavefront sensor 13 measures displacement information and wavefront information of an incident reference beam spot to obtain measurement errors alpha 0 and beta 0 which are introduced by environmental disturbance, light source drift and other factors in the device measurement process;
step d, according to the wavefront information of the reference beam measured by the wavefront sensor 13, the shape of the deformable mirror 14 is adjusted, so that the measurement error introduced by the factors such as environmental disturbance, light source drift and the like in the instrument is 0;
step e, when the plane reflecting mirror 5 rotates along with the detected object to generate a yaw angle and a pitch angle, the image sensor 3 measures the displacement value of the incident measuring beam light spot, wherein the distance of the light spot deviating from the center position of the image sensor is x1 and y1 respectively;
step f, calculating alpha according to x1=f.tan (2 alpha) by using the spot displacement x1 and y1 of the measuring beam, wherein alpha is an angle of a yaw angle generated by a measured object; calculating beta according to y1=f.tan (2 beta), wherein beta is an angle of a pitch angle generated by a tested object; f represents the equivalent focal length of the collimator objective set.
The innovation point of the embodiment is that:
the deformable mirror 14 and the deformable mirror driver 15 are added as wavefront correction units, and the deformable mirror 14 is driven to correct the wavefront according to the wavefront phase information of the reference beam detected by the wavefront sensor 13, so that the real-time measurement and regulation of the aberration of the optical system of the auto-collimation device are realized; meanwhile, the compensation of the phase distortion of the light beam generated by the environmental disturbance in the transmission process of the light beam in the instrument can be realized, the imaging quality and stability of the image sensor 3 are improved, and the accuracy and stability of the nanoradian magnitude angle measuring device are further improved.
Detailed description of the preferred embodiments
The embodiment is an embodiment of a high-frequency response two-dimensional photoelectric auto-collimation method and device based on wavefront correction.
The structure of the high-frequency response two-dimensional photoelectric auto-collimation device based on wavefront correction in this embodiment is shown in fig. 5. On the basis of the first embodiment, a spatial light modulator 16 is added between the first spectroscope 1-5 and the aperture diaphragm 6, and the second turning mirror 8 is replaced with a deformable mirror 14 and a deformable mirror driver 15.
The high-frequency response two-dimensional photoelectric auto-collimation method based on wavefront correction of the embodiment comprises the following steps:
step a, fixing a plane reflecting mirror 5 on the surface of a measured object;
step b, two laser light sources 1-1 and 1-2 are lightened, the positions of a measured object and a plane reflecting mirror 5 are adjusted, and the geometric center of a measuring beam spot image received by an image sensor 3 is positioned at the center of the sensor;
step c, the wavefront sensor 13 measures displacement information and wavefront information of an incident reference beam spot to obtain measurement errors alpha 0 and beta 0 which are introduced by environmental disturbance, light source drift and other factors in the device measurement process;
step d, according to the wavefront information of the reference beam measured by the wavefront sensor 13, adjusting the gesture of the spatial light modulator 16 and the shape of the deformable mirror 14 to make the measurement error introduced by the factors such as environmental disturbance, light source drift and the like in the instrument 0;
step e, when the plane reflecting mirror 5 rotates along with the detected object to generate a yaw angle and a pitch angle, the image sensor 3 measures the displacement value of the incident measuring beam light spot, wherein the distance of the light spot deviating from the center position of the image sensor is x1 and y1 respectively;
step f, calculating alpha according to x1=f.tan (2 a) by using the spot displacement x1 and y1 of the measuring beam, wherein alpha is an angle of a yaw angle generated by a measured object; calculating beta according to y1=f.tan (2 beta), wherein beta is an angle of a pitch angle generated by a tested object; f represents the equivalent focal length of the collimator objective set.
In this embodiment, the reference mirror 11 is placed on the side of the object to be measured; the reference beam and the measuring beam are transmitted in a common optical path, and are disturbed by the same air, the wavefront sensor 13 is used for measuring the wavefront phase information of the returned reference beam in real time, the deformable mirror 14 and the spatial light modulator 16 are driven to correct the wavefront distortion caused by the light source beam angle drift and the air disturbance, the light spot imaging quality of an optical system is improved, the light spot positioning precision and stability are improved, and the angle measurement precision, stability and air disturbance resistance of the auto-collimation device are improved under the long-distance measurement condition.
The foregoing description of the preferred embodiments of the invention is not intended to limit the invention to the particular embodiments disclosed, but on the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention.
Claims (3)
1. A high-frequency response two-dimensional photoelectric auto-collimation method based on wavefront correction is characterized in that the influence of beam drift and beam wavefront distortion on light spot positioning errors is calculated by software, the measurement frequency response is improved, and the measurement method comprises the following steps:
a, fixing a plane reflecting mirror (5) on the surface of a measured object;
step b, two laser light sources (1-1, 1-2) are lightened, the positions of a measured object and a plane reflecting mirror (5) are adjusted, and the geometric center of a measuring beam spot image received by an image sensor (3) is positioned at the center of the image sensor (3);
step c, the wavefront sensor (13) measures displacement information and wavefront information of an incident reference beam spot, and measurement errors alpha 0 and beta 0 caused by environmental disturbance and light source drift factors in the device measurement process are obtained through calculation;
step d, when the plane reflecting mirror (5) rotates along with the detected object to generate a yaw angle and a pitch angle, the image sensor (3) measures the displacement value of the incident measuring beam light spot, wherein the distance of the light spot deviating from the center position of the image sensor is x1 and y1 respectively;
step e, calculating alpha according to x1=f.tan (2 alpha) by using the spot displacement x1 and y1 of the measuring beam, wherein (alpha-alpha 0) is an angle at which a yaw angle is generated by the measured object after compensation; calculating beta according to y1=f.tan (2 beta), wherein (beta-beta 0) is the angle at which the pitch angle of the measured object is generated after compensation; wherein f represents the equivalent focal length of the collimating objective lens group (4);
the auto-collimation method applies a high-frequency response two-dimensional photoelectric auto-collimation device based on wavefront correction, and the auto-collimation device comprises a light source unit (1), a second beam splitter (2), an image sensor (3), a collimating objective lens group (4), a plane reflecting mirror (5), a small aperture diaphragm (6), a first turning mirror (7), a second turning mirror (8), a first dichroic mirror (9), a reference reflecting mirror (10), a second dichroic mirror (11), a third convex lens (12) and a wavefront sensor (13);
the light source unit (1) consists of a first light source (1-1), a second light source (1-2), a first convex lens (1-3), a second convex lens (1-4) and a first spectroscope (1-5);
the light beams emitted by the first light source (1-1) and the light beams emitted by the second light source (1-2) are combined after being collimated and pass through the first spectroscope (1-5), the optical axes of the two light beams coincide, the propagation directions are the same, and the combined light beams are parallel to enter the aperture diaphragm (6); the aperture diaphragm (6) is used as an object plane, two emitted light beams are transmitted through the second beam splitter (2), reflected by the first turning mirror (7) and the second turning mirror (8), and vertically incident on the collimating objective lens group (4) to be collimated into parallel light beams;
the parallel light beam is split into a transmission light beam and a reflection light beam by a first dichroic mirror (9), and the light beam of the first light source (1-1) is transmitted at the moment and is used as a measuring light beam to be vertically incident to a plane reflecting mirror (5); the light beam of the second light source (1-2) is reflected and is used as a reference light beam to vertically enter the reference reflector (10); the two paths of light beams are reflected by the reflecting mirror respectively and then return along the original path, reflected by the second dichroic mirror (2), and split by the second dichroic mirror (11) to separate the reference light beam and the measuring light beam; the measuring beam is transmitted and vertically incident to the image sensor (3) for acquisition and imaging, and the reference beam is reflected and becomes parallel light after being transmitted by the third convex lens (12) for acquisition and imaging by the wave front sensor (13);
the first light source (1-1) is positioned on the focal plane of the first convex lens (1-3), the second light source (1-2) is positioned on the focal plane of the second convex lens (1-4), and the two sides of the light splitting section of the first spectroscope (1-5) are respectively;
the aperture diaphragm (6) is used as an object plane and is positioned at an equivalent focal plane of the collimating objective lens group (4);
the collimating objective lens group (4) consists of a first combined lens (4-1) and a second combined lens (4-2) to form a tele objective lens group; the first combined lens (4-1) is formed by combining 2 or more convex lenses and concave lenses, and has the converging effect on light beams consistent with the convex lenses; the second combined lens (4-2) is formed by combining 2 or more convex lenses and concave lenses, and has the same scattering effect on light beams as the concave lenses; the equivalent focal length of the collimating objective lens group (4) is far larger than that of a single lens;
the third convex lens (12) is positioned on the right side of a focusing focus of the light beam reflected by the second dichroic mirror (11), the focus is positioned at the focal plane of the third convex lens (12), the reference light beam is focused firstly after being reflected by the second dichroic mirror (11) and then diverged, becomes a parallel light beam after being transmitted by the third convex lens (12), and is incident to the center position of the wavefront sensor (13);
the first turning mirror (7) and the second turning mirror (8) are arranged in parallel, and a fixed small angle exists between the first turning mirror and the main optical axis.
2. A high-frequency response two-dimensional photoelectric auto-collimation method based on wavefront correction is characterized in that beam drift and beam wavefront distortion are compensated by a deformable mirror (14), system aberration is reduced, and the measurement method comprises the following steps:
a, fixing a plane reflecting mirror (5) on the surface of a measured object;
step b, two laser light sources (1-1, 1-2) are lightened, the positions of a measured object and a plane reflecting mirror (5) are adjusted, and the geometric center of a measuring beam spot image received by an image sensor (3) is positioned at the center of the image sensor (3);
step c, a wavefront sensor (13) measures displacement information and wavefront information of an incident reference beam spot to obtain measurement errors alpha 0 and beta 0 which are introduced by environmental disturbance and light source drift factors in the device measurement process;
step d, according to the wavefront information of the reference beam measured by the wavefront sensor (13), the shape of the deformable mirror (14) is adjusted, so that the measurement error in the instrument due to the environmental disturbance and the light source drift factors is 0;
step e, when the plane reflecting mirror (5) rotates along with the detected object to generate a yaw angle and a pitch angle, the image sensor (3) measures the displacement value of an incident measuring beam light spot, wherein the distance of the light spot deviating from the center position of the image sensor (3) is x1 and y1 respectively;
step f, calculating alpha according to x1=f.tan (2 alpha) by using the spot displacement x1 and y1 of the measuring beam, wherein alpha is an angle of a yaw angle generated by a measured object; calculating beta according to y1=f.tan (2 beta), wherein beta is an angle of a pitch angle generated by a tested object; wherein f represents the equivalent focal length of the collimating objective lens group (4);
the auto-collimation method applies a high-frequency response two-dimensional photoelectric auto-collimation device based on wavefront correction, and the auto-collimation device comprises a light source unit (1), a second beam splitter (2), an image sensor (3), a collimating objective lens group (4), a plane reflecting mirror (5), a small aperture diaphragm (6), a first turning mirror (7), a first dichroic mirror (9), a reference reflecting mirror (10), a second dichroic mirror (11), a third convex lens (12), a wavefront sensor (13), a deformable mirror (14) and a deformable mirror driver (15);
the light source unit (1) consists of a first light source (1-1), a second light source (1-2), a first convex lens (1-3), a second convex lens (1-4) and a first spectroscope (1-5);
the light beams emitted by the first light source (1-1) and the light beams emitted by the second light source (1-2) are combined after being collimated and pass through the first spectroscope (1-5), the optical axes of the two light beams coincide, the propagation directions are the same, and the combined light beams are parallel to enter the aperture diaphragm (6); the aperture diaphragm (6) is used as an object plane, two emitted light beams are transmitted through the second beam splitter (2), reflected by the first turning mirror (7) and the deformable mirror (14), and vertically incident into the collimating objective lens group (4) to be collimated into parallel light beams;
the parallel light beam is split into a transmission light beam and a reflection light beam by a first dichroic mirror (9), and the light beam of the first light source (1-1) is transmitted at the moment and is used as a measuring light beam to be vertically incident to a plane reflecting mirror (5); the light beam of the second light source (1-2) is reflected and is used as a reference light beam to vertically enter the reference reflector (10); the two paths of light beams are reflected by the reflecting mirror respectively and then return along the original path, reflected by the second dichroic mirror (2), and split by the second dichroic mirror (11) to separate the reference light beam and the measuring light beam; the measuring beam is transmitted and vertically incident to the image sensor (3) for acquisition and imaging, and the reference beam is reflected and becomes parallel light after being transmitted by the third convex lens (12) for acquisition and imaging by the wave front sensor (13);
the first light source (1-1) is positioned on the focal plane of the first convex lens (1-3), the second light source (1-2) is positioned on the focal plane of the second convex lens (1-4), and the two sides of the light splitting section of the first spectroscope (1-5) are respectively;
the aperture diaphragm (6) is used as an object plane and is positioned at an equivalent focal plane of the collimating objective lens group (4);
the collimating objective lens group (4) consists of a first combined lens (4-1) and a second combined lens (4-2) to form a tele objective lens group; the first combined lens (4-1) is formed by combining 2 or more convex lenses and concave lenses, and has the converging effect on light beams consistent with the convex lenses; the second combined lens (4-2) is formed by combining 2 or more convex lenses and concave lenses, and has the same scattering effect on light beams as the concave lenses; the equivalent focal length of the collimating objective lens group (4) is far larger than that of a single lens;
the third convex lens (12) is positioned on the right side of a focusing focus of the light beam reflected by the second dichroic mirror (11), the focus is positioned at the focal plane of the third convex lens (12), the reference light beam is focused firstly after being reflected by the second dichroic mirror (11) and then diverged, becomes a parallel light beam after being transmitted by the third convex lens (12), and is incident to the center position of the wavefront sensor (13);
the first turning mirror (7) and the deformable mirror (14) are mutually parallel and are respectively provided with a fixed small angle with the main optical axis;
the deformable mirror (14) is connected with a deformable mirror driver (15), and the deformable mirror driver (15) controls the surface shape of the reflecting surface of the deformable mirror (14).
3. The high-frequency response two-dimensional photoelectric auto-collimation method based on wavefront correction is characterized by adding a link of compensating light source drift by a spatial light modulator (16) to improve light source stability, and the measurement method comprises the following steps:
a, fixing a plane reflecting mirror (5) on the surface of a measured object;
step b, two laser light sources (1-1, 1-2) are lightened, the positions of a measured object and a plane reflecting mirror (5) are adjusted, and the geometric center of a measuring beam spot image received by an image sensor (3) is positioned at the center of the image sensor (3);
step c, a wavefront sensor (13) measures displacement information and wavefront information of an incident reference beam spot to obtain measurement errors alpha 0 and beta 0 which are introduced by environmental disturbance and light source drift factors in the device measurement process;
step d, according to the wavefront information of the reference beam measured by the wavefront sensor (13), adjusting the posture of the spatial light modulator (16) and the shape of the deformable mirror (14) to enable the measurement error introduced by the factors such as environmental disturbance, light source drift and the like in the instrument to be 0;
step e, when the plane reflecting mirror (5) rotates along with the detected object to generate a yaw angle and a pitch angle, the image sensor (3) measures the displacement value of an incident measuring beam light spot, wherein the distance of the light spot deviating from the center position of the image sensor (3) is x1 and y1 respectively;
step f, calculating alpha according to x1=f.tan (2 alpha) by using the spot displacement x1 and y1 of the measuring beam, wherein alpha is an angle of a yaw angle generated by a measured object; calculating beta according to y1=f.tan (2 beta), wherein beta is an angle of a pitch angle generated by a tested object; wherein f represents the equivalent focal length of the collimating objective lens group (4);
the auto-collimation method applies a high-frequency response two-dimensional photoelectric auto-collimation device based on wavefront correction, and the auto-collimation device comprises a light source unit (1), a second beam splitter (2), an image sensor (3), a collimating objective lens group (4), a plane reflecting mirror (5), a small aperture diaphragm (6), a first turning mirror (7), a first dichroic mirror (9), a reference reflecting mirror (10), a second dichroic mirror (11), a third convex lens (12), a wavefront sensor (13), a deformable mirror (14), a deformable mirror driver (15) and a spatial light modulator (16);
the light source unit (1) consists of a first light source (1-1), a second light source (1-2), a first convex lens (1-3), a second convex lens (1-4) and a first spectroscope (1-5);
the light beams emitted by the first light source (1-1) and the light beams emitted by the second light source (1-2) are combined after being collimated and pass through the first spectroscope (1-5), the optical axes of the two light beams coincide, the propagation directions are the same, and the combined light beams are parallel to enter the aperture diaphragm (6); the aperture diaphragm (6) is used as an object plane, two emitted light beams are transmitted through the second beam splitter (2), reflected by the first turning mirror (7) and the deformable mirror (14), and vertically incident into the collimating objective lens group (4) to be collimated into parallel light beams;
the parallel light beam is split into a transmission light beam and a reflection light beam by a first dichroic mirror (9), and the light beam of the first light source (1-1) is transmitted at the moment and is used as a measuring light beam to be vertically incident to a plane reflecting mirror (5); the light beam of the second light source (1-2) is reflected and is used as a reference light beam to vertically enter the reference reflector (10); the two paths of light beams are reflected by the reflecting mirror respectively and then return along the original path, reflected by the second dichroic mirror (2), and split by the second dichroic mirror (11) to separate the reference light beam and the measuring light beam; the measuring beam is transmitted and vertically incident to the image sensor (3) for acquisition and imaging, and the reference beam is reflected and becomes parallel light after being transmitted by the third convex lens (12) for acquisition and imaging by the wave front sensor (13);
the first light source (1-1) is positioned on the focal plane of the first convex lens (1-3), the second light source (1-2) is positioned on the focal plane of the second convex lens (1-4), and the two sides of the light splitting section of the first spectroscope (1-5) are respectively;
the aperture diaphragm (6) is used as an object plane and is positioned at an equivalent focal plane of the collimating objective lens group (4);
the collimating objective lens group (4) consists of a first combined lens (4-1) and a second combined lens (4-2) to form a tele objective lens group; the first combined lens (4-1) is formed by combining 2 or more convex lenses and concave lenses, and has the converging effect on light beams consistent with the convex lenses; the second combined lens (4-2) is formed by combining 2 or more convex lenses and concave lenses, and has the same scattering effect on light beams as the concave lenses; the equivalent focal length of the collimating objective lens group (4) is far larger than that of a single lens;
the third convex lens (12) is positioned on the right side of a focusing focus of the light beam reflected by the second dichroic mirror (11), the focus is positioned at the focal plane of the third convex lens (12), the reference light beam is focused firstly after being reflected by the second dichroic mirror (11) and then diverged, becomes a parallel light beam after being transmitted by the third convex lens (12), and is incident to the center position of the wavefront sensor (13);
the first turning mirror (7) and the deformable mirror (14) are mutually parallel and are respectively provided with a fixed small angle with the main optical axis;
the deformable mirror (14) is connected with a deformable mirror driver (15), and the deformable mirror driver (15) controls the surface shape of the reflecting surface of the deformable mirror (14);
a spatial light modulator (16) is added between the first spectroscope (1-5) and the aperture diaphragm (6), the spatial light modulator (16) is placed between the first spectroscope (1-5) and the aperture diaphragm (6), and light emitted by the first light source (1-1) and the second light source (1-2) is projected by the spatial light modulator (16) which is vertically placed after being combined by the first spectroscope (1-5) and vertically incident on the aperture diaphragm (6); the spatial light modulator (16) can adjust the direction of the parallel light incident on the aperture stop (6).
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