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CN113587822B - Device for measuring aiming deviation of laser optical axis and laser equipment provided with device - Google Patents

Device for measuring aiming deviation of laser optical axis and laser equipment provided with device Download PDF

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Publication number
CN113587822B
CN113587822B CN202110768079.2A CN202110768079A CN113587822B CN 113587822 B CN113587822 B CN 113587822B CN 202110768079 A CN202110768079 A CN 202110768079A CN 113587822 B CN113587822 B CN 113587822B
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CN
China
Prior art keywords
laser
mirror
axis
optical axis
base
Prior art date
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Active
Application number
CN202110768079.2A
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Chinese (zh)
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CN113587822A (en
Inventor
李梦庆
韦博
胡黎明
宋磊
武春风
李强
张贵清
彭小康
熊准
潘浩
姚刚
庞中昊
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General Designing Institute of Hubei Space Technology Academy
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General Designing Institute of Hubei Space Technology Academy
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Priority to CN202110768079.2A priority Critical patent/CN113587822B/en
Publication of CN113587822A publication Critical patent/CN113587822A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0221Testing optical properties by determining the optical axis or position of lenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/105Scanning systems with one or more pivoting mirrors or galvano-mirrors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The application relates to a device for measuring laser optical axis aiming deviation and laser equipment provided with the device, relates to the technical field of high-energy laser, and the device comprises: a base rotatable about a vertical axis; the laser receiving mechanism comprises a hollow cover body and a scanning mirror assembly arranged in the cover body, an inlet and an outlet through which laser can pass are formed in the cover body, the scanning mirror assembly is used for receiving the laser passing through the inlet, and the received laser is reflected and emitted downwards vertically towards the base; the reflecting mirror group is arranged on the base and is used for receiving the laser passing through the outlet, reflecting the laser received at least once and outputting the laser; the target surface assembly comprises a focusing lens arranged on the base and a target with a marking point, wherein the focusing lens is used for converging output laser to form a light spot on the target, and the light spot and the marking point can be used for calculating aiming deviation of a laser optical axis. The laser equipment can also meet the measurement of the aiming deviation of the laser equipment in the full working range without a large-field measuring environment.

Description

Device for measuring aiming deviation of laser optical axis and laser equipment provided with device
Technical Field
The application relates to the technical field of high-energy lasers, in particular to a device for measuring the aiming deviation of a laser optical axis and laser equipment provided with the device.
Background
The aiming deviation of the laser optical axis is used as one of the performance indexes of the laser equipment, and directly influences the working efficiency of the laser equipment. The related laser device aiming performance test generally adopts an external field test, and the test method comprises the following steps:
placing a target with a cross mark (mark point) in an outfield test area, imaging the target by using a tracking camera, enabling the cross mark imaged on the target in the tracking camera to be approximately coincident with the cross at the center of the target surface of the camera, and controlling an electronic tuning mirror to carry out closed loop on the cross at the center of the target surface by using the tracking camera, so that the cross at the center of the target surface is imaged at the center of a detector of the tracking camera; then, the laser equipment works, emits laser, ablates on the target, and uses the measuring tool to measure the distance between the ablation point of the target and the cross at the center of the target surface, namely calculates the aiming deviation of the laser optical axis.
However, in the above-mentioned test method, there are still several obvious disadvantages, such as a site requiring a long distance for measurement, and a high space requirement for the test site; the aiming deviation of the laser optical axis of the laser equipment at a certain azimuth angle and a certain pitch angle is measured, and the condition that the emitted laser optical axis is at other azimuth angles or other pitch angles is difficult to continuously measure, namely the laser equipment cannot be suitable for measurement in the full working range of the laser equipment.
Disclosure of Invention
The embodiment of the application provides a device for measuring the aiming deviation of a laser optical axis and laser equipment provided with the device, so as to solve the problems of overlarge space and narrow measuring range required when the aiming deviation of the laser optical axis is measured in the related technology.
In a first aspect, there is provided an apparatus for measuring an aiming deviation of a laser optical axis, comprising:
a base rotatable about a vertical axis;
the laser receiving mechanism comprises a hollow cover body and a scanning mirror assembly arranged in the cover body, an inlet and an outlet through which laser can pass are formed in the cover body, and the scanning mirror assembly is used for receiving the laser passing through the inlet, refracting and reflecting the received laser and emitting the laser downwards vertically towards the base;
the reflecting mirror group is arranged on the base and is used for receiving the laser passing through the outlet, reflecting the laser received at least once and outputting the laser;
the target surface assembly comprises a focusing lens arranged on the base and a target with a marking point, wherein the focusing lens is used for converging output laser to form a light spot on the target, and the light spot and the marking point can be used for calculating aiming deviation of a laser optical axis.
In some embodiments, the scanning mirror assembly comprises a control device and a positive lens group, an electrokinetically tunable mirror, a negative lens group and a wide-angle lens group which are sequentially arranged;
the control device is connected with the electric tuning mirror and is used for controlling the electric tuning mirror to rotate around a rotating shaft so as to change the deflection angle of laser;
the center axis of the negative lens group is substantially coincident with the center axis of the wide-angle lens group, and is also substantially perpendicular to the center axis of the positive lens group at a position substantially coincident with the rotation axis.
In some embodiments, the focal length of the wide angle lens group is less than the focal length of the negative lens group.
In some embodiments, further comprising:
the beam shrinking lens group is arranged on the base and is positioned between the reflecting mirror group and the focusing lens.
In some embodiments, the beam shrinking lens group specifically includes a concave transparent reflector and a convex transparent reflector sequentially disposed between the reflector group and the focusing lens.
In some embodiments, further comprising:
a annularly arranged rail, the central axis of which is substantially coincident with the vertical axis;
the sliding piece is assembled on the track and can move along the track, and the sliding piece is connected with the base.
In some embodiments, the mirror assembly includes at least one mirror, and the apparatus further includes:
a driving mechanism disposed between the reflector and the base, the driving mechanism comprising:
-a linear slide located directly below the outlet and arranged radially of the track;
-a mirror mount assembled on the linear carriage and on which the mirror is mounted, the mirror mount being reciprocally movable along the linear carriage to enable the mirror to receive different lasers emitted from the outlet.
In some embodiments, the outlet is larger in caliber than the inlet.
In some embodiments, the target surface assembly further comprises:
a visible light emitter disposed on the base for illuminating a marked point on the target.
In a second aspect, there is also provided a laser apparatus mounted with a device for measuring an aiming deviation of a laser optical axis, comprising:
a turntable rotatable about an azimuth axis, the turntable having a pitch axis thereon that is substantially perpendicular to the azimuth axis;
the laser emission cylinder can rotate around the pitching axis, and the laser emission cylinder is movably arranged on the turntable in a group;
in the device for measuring the aiming deviation of the laser optical axis, the cover body is blocked on the laser emission cylinder, and the vertical axis is approximately coincident with the azimuth axis;
an imaging camera coupled to the target for imaging the light spot and the marker point;
and the terminal is connected with the imaging camera and is used for acquiring imaging information of the light spots and the marking points and calculating aiming deviation of the laser optical axis according to the acquired imaging information.
The beneficial effects that technical scheme that this application provided brought include: when the aiming deviation of the laser optical axis is measured, a large-field measuring environment is not needed, the measurement of the aiming deviation of the laser equipment in a full working range can be met, and the defect of narrow measuring working range is overcome.
The embodiment of the application provides a device for measuring the aiming deviation of a laser optical axis and laser equipment provided with the device, wherein the device is mainly divided into two parts, one part comprises a laser receiving mechanism, the other part comprises a base capable of rotating around a vertical axis, a reflecting mirror group on the base and a target surface component, the laser receiving mechanism comprises a hollow cover body and a scanning mirror component in the cover body, and the target surface component comprises a focusing lens and a target with a marking point; when the aiming deviation of the laser optical axis is measured, the cover body covers the laser emission cylinder in the laser equipment and moves along with the laser emission cylinder, and when the laser emission cylinder changes in a pitch angle, the scanning mirror assembly receives laser emitted from the laser emission cylinder and adjusts the scanning mirror assembly according to the beam direction of the laser so that the laser is vertically and downwards transmitted from the laser receiving mechanism; when the azimuth angle of the laser emission cylinder changes, the base rotating around the vertical axis drives the reflecting mirror group and the target surface component on the base to rotate so that the reflecting mirror group can receive laser vertically downwards output from the laser receiving mechanism; obviously, when the laser emission cylinder has different pitch angles and azimuth angles, the reflecting mirror group can receive laser, and the reflecting mirror group forms a light spot on a target through the focusing lens by the received laser, wherein the positions of the light spot and the marking point can be used as the basis for calculating the aiming deviation of the laser optical axis. Therefore, when the aiming deviation of the laser optical axis is measured, a large-field measuring environment is not needed, the measurement of the aiming deviation of the laser equipment in a full working range can be met, and the defect of narrow measuring working range is overcome.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic distribution diagram of a device for measuring an aiming deviation of a laser optical axis according to an embodiment of the present application;
FIG. 2 is a schematic diagram of a distribution of scanning mirror assemblies;
fig. 3 is a schematic distribution diagram of a laser device with a device for measuring the aiming deviation of a laser optical axis according to an embodiment of the present application;
in the figure: 1. a base; 2. a laser receiving mechanism; 21. a cover body; 211. an inlet; 212. an outlet; 22. a scanning mirror assembly; 221. a positive lens group; 222. an electric tuning mirror; 223. a negative lens group; 224. a wide angle lens group; 3. a mirror group; 4. a target surface assembly; 41. a focusing lens; 42. a target; 43. a visible light emitter; 5. a beam shrinking lens group; 51. a concave transflector; 52. a convex transflector; 61. a track; 62. a sliding member; 7. a driving mechanism; 71. a linear slide; 72. a lens base; 73. a driving motor; 81. a turntable; 811. an azimuth axis; 812. a pitch axis; 82. a laser emitting barrel; 83. an imaging camera; 84. and (5) a terminal.
Detailed Description
For the purposes of making the objects, technical solutions and advantages of the embodiments of the present application more clear, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present application based on the embodiments herein.
The embodiment of the application provides a device for measuring the aiming deviation of a laser optical axis, which can be used for measuring the aiming deviation of the laser optical axis without a large-field measuring environment and can meet the requirement of measuring the aiming deviation of laser equipment in a full working range, thereby solving the defect of narrow measuring working range.
As shown in fig. 1, an embodiment of the present application provides an apparatus for measuring an aiming deviation of an optical axis of a laser, including:
a base 1 rotatable about a vertical axis;
the laser receiving mechanism 2 comprises a hollow cover body 21 and a scanning mirror assembly 22 arranged in the cover body 21, wherein an inlet 211 and an outlet 212 through which laser can pass are formed in the cover body 21, and the scanning mirror assembly 22 is used for receiving the laser passing through the inlet 211, refracting and reflecting the received laser and emitting the laser downwards vertically towards the base 1;
a reflecting mirror group 3 provided on the base 1 for receiving the laser light passing through the exit 212, reflecting the laser light received at least once, and outputting the reflected laser light;
the target surface assembly 4 comprises a focusing lens 41 and a target 42 with a marking point, wherein the focusing lens 41 is arranged on the base 1, and is used for converging output laser so as to form a light spot on the target 42, and the light spot and the marking point can be used for calculating aiming deviation of an optical axis of the laser.
The working principle of the device for measuring the aiming deviation of the laser optical axis provided by the embodiment of the application is as follows:
the device is mainly divided into two parts, wherein one part comprises a laser receiving mechanism 2, the other part comprises a base 1 which can rotate around a vertical axis, a reflector group 3 and a target surface component 4 which are arranged on the base 1, the laser receiving mechanism 2 comprises a hollow cover body 21 and a scanning mirror component 22 in the cover body 21, and the target surface component 4 comprises a focusing lens 41 and a target 42 with a marking point;
as shown in fig. 3, when the deviation of the aiming of the laser optical axis is measured, the cover 21 is covered on the laser emitting cylinder 82 in the laser device and moves along with the laser emitting cylinder 82, and when the laser emitting cylinder 82 changes in pitch angle, the scanning mirror assembly 22 receives the laser light emitted from the laser emitting cylinder 82 and adjusts the scanning mirror assembly 22 according to the beam direction of the laser light so that the laser light is transmitted vertically downward from the laser light receiving mechanism 2; when the laser emission cylinder 82 changes in azimuth angle, the base 1 rotating around the vertical axis drives the reflecting mirror group 3 and the target surface component 4 on the base 1 to rotate so that the reflecting mirror group 3 can receive the laser vertically downwards output from the laser receiving mechanism 2; obviously, when the laser emitting barrel 82 has different pitch angles and azimuth angles, the reflecting mirror group 3 can receive laser, and the reflecting mirror group 3 forms a light spot on the target 42 through the focusing lens 41, wherein the positions of the light spot and the marking point can be used as the basis for calculating the aiming deviation of the laser optical axis.
It can be seen that, under the rotation of the base 1, the target 42 in the embodiment of the present application can correspondingly rotate by the same angle along with the change of the azimuth angle, and the scanning mirror assembly 22 can adaptively change the reflection angle along with the change of the pitch angle, so that the optical path direction of the laser output by the laser receiving mechanism 2 is vertically downward, each group of pitch angle and azimuth angle can correspond to a group of light spots and mark points, and thus the aiming deviation of all laser optical axes of the laser device in the full working range is obtained.
As shown in fig. 2, as an implementation of the embodiment of the present application, the scanning mirror assembly 22 includes a control device and a positive lens group 221, an electrolens 222, a negative lens group 223, and a wide-angle lens group 224, which are sequentially arranged;
the control device is connected with the galvanometer mirror 222 and is used for controlling the galvanometer mirror 222 to rotate around a rotation axis so as to change the deflection angle of the laser;
the center axis of the negative lens group 223 is substantially coincident with the center axis of the wide-angle lens group 224, and is also substantially perpendicular to the center axis of the positive lens group 221, where it is substantially coincident with the rotation axis.
In the embodiment of the present application, the positive lens group 221, the galvanometer mirror 222, the negative lens group 223 and the wide-angle lens group 224 are all in the cover 21, and the positive lens group 221 is at the entrance of the scanning mirror assembly 22, so that the laser light emitted from the entrance 211 is focused on the galvanometer mirror 222; the galvanometer mirror 222 receives the laser light focused by the positive lens group 221; the negative lens group 223 is positioned below the electric tuning mirror 222 and receives the laser reflected by the electric tuning mirror 222; the wide-angle lens group 224 is positioned below the negative lens group 223, receives the laser light transmitted through the negative lens group 223 so that the laser light is changed into parallel light and emitted toward the base 1, and simultaneously, the laser light transmitted through the wide-angle lens group 224 is refracted; and the control device is electrically connected with the galvanometer mirror 222, and controls the galvanometer mirror 222 to rotate around a rotation axis, so as to change the deflection angle of the reflected laser until the laser emitted from the wide-angle lens group 224 is vertically downward.
Further, the focal length of the wide angle lens group 224 is smaller than that of the negative lens group 223. In this embodiment, when the focal length f1 of the wide-angle lens group 224 is smaller than the focal length f2 of the negative lens group 223, the scanning angle of the scanning mirror assembly 22 can be enlarged, so that the laser receiving mechanism 2 can vertically emit the laser light with any pitch angle and any azimuth angle.
As shown in fig. 2, three input optical axes in different directions pass through the laser receiving mechanism 2 to emit output optical axes in corresponding directions.
In this embodiment of the present application, the deflection angle of the galvanometer mirror 222 is correspondingly adjusted according to the pitch angle of the laser device, where the focal length f2 is 10 times of the focal length f1, the initial angle of the galvanometer mirror 222 is 45 ° with respect to the laser beam passing through the inlet 211, and when the pitch angle of the laser emitting barrel 82 in the laser device is a, the galvanometer mirror 222 reversely adjusts a/20 to achieve that the laser emitted from the wide-angle lens group 224 is vertically downward.
Preferably, the method further comprises:
and a beam condensing lens group 5 which is arranged on the base 1 and is positioned between the reflecting mirror group 3 and the focusing lens 41.
Further, the beam shrinking lens group 5 specifically includes a concave transparent mirror 51 and a convex transparent mirror 52 sequentially disposed between the reflecting mirror group 3 and the focusing lens 41.
In this embodiment, the concave transparent mirror 51 and the convex transparent mirror 52 are disposed opposite to each other, the concave transparent mirror 51 receives the laser beam emitted from the mirror group 3, and reflects the laser beam onto the convex transparent mirror 52, and then the laser beam is reflected by the convex transparent mirror 52 and emitted to the focusing lens 41 along the optical axis of the focusing lens 41, and the concave transparent mirror 51 and the convex transparent mirror 52 are used in cooperation, so as to reduce the beam caliber of the laser beam and increase the focal length of the laser beam.
Preferably, the method further comprises:
a annularly arranged rail 61, a central axis of the rail 61 being substantially coincident with the vertical axis;
and a slider 62 which is assembled on the rail 61 and is movable along the rail 61, and the slider 62 is connected to the base 1.
In this embodiment, the track 61 is disposed on the ground, and is in a ring shape, and the central axis of the ring shape is approximately coincident with the vertical axis, so that it can be ensured that the base 1 rotates along the track 61 through the sliding member 62 when the azimuth angle of the laser emitting barrel 82 in the laser device changes, and the bottom of the sliding member 62 can roll by adopting a roller, so that the sliding member 62 drives the base 1 to perform a circular motion, that is, the base 1 can also perform the same angular change, and further ensure that the optical elements in the device for measuring the aiming deviation of the laser optical axis remain unchanged relatively, and further measure the aiming deviation of all azimuth angles.
Further, the mirror group 3 includes at least one mirror, and the apparatus further includes:
a driving mechanism 7 provided between the mirror and the base 1, the driving mechanism 7 including:
a linear slide 71 located directly below the outlet 212 and arranged radially of the track 61;
a mirror mount 72 assembled on the linear carriage 71 and on which the mirror is mounted, the mirror mount 72 being reciprocally movable along the linear carriage 71 to enable the mirror to receive different lasers emitted from the outlet 212.
In the embodiment of the present application, the number of the reflecting mirrors is one, and the reflecting mirrors receive the laser light vertically downward and horizontally emit the laser light to the concave transparent reflecting mirror 51 after reflecting the laser light. The position of the reflecting mirror relative to the cover body 21 is changed on the base 1 through the driving mechanism 7, so that laser is sent to a proper position on the reflecting mirror, and the transmission of the whole light path is facilitated.
Further, the lens holder 72 is driven by a driving motor 73 installed at an end of the linear slider 71 to perform a linear reciprocating movement, so that the position of the lens holder 72 can be accurately controlled.
Specifically, the outlet 212 has a larger caliber than the inlet 211. The inlet 211 is used for intercepting part of the laser emitted by the laser emission tube 82 to measure aiming deviation, the caliber of the laser emission tube is limited, and the outlet 212 is used for enabling the laser to be emitted onto the reflecting mirror group 3 smoothly, so that the laser can be normally supplied to pass through when the pitch angle of the outlet 212 changes.
Further, the target surface assembly 4 further includes:
a visible light emitter 43, provided on the base 1, for illuminating a marked point on the target 42.
In this embodiment of the present application, the visible light emitter 43 is an illumination lamp, and is used for illuminating the marking point on the target 42, so that the marking point and the light spot can be clearly and accurately captured by the imaging camera 83, that is, the imaging is clear, and the processing calculation in the later stage is convenient.
As shown in fig. 3, an embodiment of the present application further provides a laser apparatus mounted with a device for measuring an aiming deviation of a laser optical axis, including:
a turntable 81 rotatable about an azimuth axis 811, said turntable 81 having a pitch axis 812 substantially perpendicular to said azimuth axis 811;
the laser emission cylinder 82 can rotate around the pitching axis 812, and the laser emission cylinder 82 is movably arranged on the turntable 81 in a group manner;
as described above, the cover 21 is plugged onto the laser emitting cylinder 82, and the vertical axis is substantially coincident with the azimuth axis 811;
an imaging camera 83 coupled to the target 42 for imaging the light spot and the marker point;
and a terminal 84 connected to the imaging camera 83, for acquiring imaging information of the light spot and the mark point, and calculating an aiming deviation of the laser optical axis according to the acquired imaging information.
The device for measuring the aiming deviation of the laser optical axis in the embodiment of the present application is described in detail in the above device embodiment, so that detailed description thereof is omitted here.
The azimuth angle of the full working range of the laser equipment is equally divided into N parts, the measuring points of azimuth angles are 0, 2.360 degrees/N, 3.360 degrees/N, … … and N.360 degrees/N, the pitch angle boundary is (k, t), the pitch angle of the full working range is equally divided into M parts, and the measuring points of pitch angles are k, k+ (t-k)/M, k +2 (t-k)/M, k +3 (t-k)/M, … … and t.
When the device is mounted on the laser emission tube 82 through the cover 21, the azimuth angle of the laser emission tube 82 is equal to 0, the pitch angle is equal to k as a measurement starting point, the base 1 is moved so that the light emitting optical axis and the azimuth axis of the reflecting mirror are coplanar with the laser optical axis emitted by the laser emission tube 82, the driving mechanism 7 is controlled so that the reflecting mirror receives the laser emitted by the laser receiving mechanism 2 vertically downwards, the visible light emitter 43 illuminates the target 42, the center of the target surface in the imaging camera 83 is adjusted to coincide with the mark point of the target 42 in an imaging manner, at this time, the laser emitted by the laser emission tube 82 ablates a light spot on the target 42, the terminal 84 records the deviation coordinate of the center of the light spot relative to the mark point according to the imaging information of the light spot and the mark point acquired by the imaging camera 83, namely, acquires one aiming deviation data, keeps the pitch angle or the azimuth angle unchanged, changes the azimuth angle or pitch angle according to the point taking rule, and acquires all the aiming deviation data of the laser emission tube 82 in the whole working range continuously.
In the description of the present application, it should be noted that the azimuth or positional relationship indicated by the terms "upper", "lower", etc. are based on the azimuth or positional relationship shown in the drawings, and are merely for convenience of description of the present application and simplification of the description, and are not indicative or implying that the apparatus or element in question must have a specific azimuth, be configured and operated in a specific azimuth, and thus should not be construed as limiting the present application. Unless specifically stated or limited otherwise, the terms "mounted," "connected," and "coupled" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.
It should be noted that in this application, relational terms such as "first" and "second" and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
The foregoing is merely a specific embodiment of the application to enable one skilled in the art to understand or practice the application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (6)

1. An apparatus for measuring the aiming deviation of a laser optical axis, comprising:
a base (1) rotatable about a vertical axis;
the laser receiving mechanism (2) comprises a hollow cover body (21) and a scanning mirror assembly (22) arranged in the cover body (21), an inlet (211) and an outlet (212) through which laser can pass are formed in the cover body (21), and the scanning mirror assembly (22) is used for receiving the laser passing through the inlet (211), refracting and reflecting the received laser and emitting the laser downwards vertically towards the base (1);
a reflecting mirror group (3) provided on the base (1) for receiving the laser light passing through the exit (212), reflecting the laser light received at least once, and outputting the reflected laser light;
the target surface assembly (4) comprises a focusing lens (41) arranged on the base (1) and a target (42) with a marking point, wherein the focusing lens (41) is used for converging output laser so as to form a light spot on the target (42), and the light spot and the marking point can be used for calculating aiming deviation of an optical axis of the laser;
the scanning mirror assembly (22) comprises a control device and a positive lens group (221), an electrotone mirror (222), a negative lens group (223) and a wide-angle lens group (224) which are sequentially arranged;
the control device is connected with the electric tuning mirror (222) and is used for controlling the electric tuning mirror (222) to rotate around a rotation axis so as to change the deflection angle of laser;
the center axis of the negative lens group (223) is approximately coincident with the center axis of the wide-angle lens group (224), and is also approximately perpendicular to the center axis of the positive lens group (221), and is approximately coincident with the rotation axis;
a focal length of the wide angle lens group (224) is smaller than a focal length of the negative lens group (223);
the beam shrinking lens group (5) is arranged on the base (1) and is positioned between the reflecting mirror group (3) and the focusing lens (41);
the beam shrinking lens group (5) specifically comprises a concave transparent reflecting mirror (51) and a convex transparent reflecting mirror (52) which are sequentially arranged between the reflecting mirror group (3) and the focusing lens (41).
2. The apparatus for measuring the aiming deviation of the optical axis of a laser as claimed in claim 1, further comprising:
a annularly arranged track (61), a central axis of the track (61) substantially coinciding with the vertical axis;
and the sliding piece (62) is assembled on the track (61) and can move along the track (61), and the sliding piece (62) is connected with the base (1).
3. An apparatus for measuring the aiming deviation of the optical axis of a laser light according to claim 2, characterized in that said mirror group (3) comprises at least one mirror, said apparatus further comprising:
a driving mechanism (7) provided between the mirror and the base (1), the driving mechanism (7) including:
-a linear slide (71) located directly below the outlet (212) and arranged radially of the track (61);
-a mirror mount (72) assembled on the linear slide (71) and on which the mirror is mounted, the mirror mount (72) being reciprocally movable along the linear slide (71) to enable the mirror to receive different lasers emitted from the outlet (212).
4. A device for measuring deviation of the aiming of the optical axis of a laser as claimed in claim 1, characterized in that the aperture of the outlet (212) is larger than the aperture of the inlet (211).
5. The apparatus for measuring the aiming deviation of the optical axis of a laser according to claim 1, wherein the target surface assembly (4) further comprises:
a visible light emitter (43) provided on the base (1) for illuminating a marked point on the target (42).
6. A laser apparatus equipped with a device for measuring an aiming deviation of an optical axis of laser light, comprising:
a turntable (81) rotatable about an azimuth axis (811), said turntable (81) having a pitch axis (812) substantially perpendicular to said azimuth axis (811);
a laser emission tube (82) which can rotate around the pitching axis (812), wherein the laser emission tube (82) is movably arranged on the turntable (81);
the device for measuring the aiming deviation of the optical axis of a laser beam according to any one of claims 1 to 5, wherein the cover (21) is blocked on the laser emitting cylinder (82), and the vertical axis is substantially coincident with the azimuth axis (811);
an imaging camera (83) coupled to the target (42) for imaging the spot and the marker point;
and the terminal (84) is connected with the imaging camera (83) and is used for acquiring imaging information of the light spot and the mark point and calculating aiming deviation of a laser optical axis according to the acquired imaging information.
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CN114939718B (en) * 2022-06-30 2024-02-13 广东舜元激光科技有限公司 Laser scribing device

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