CN113474111B - Surface-coated cutting tool - Google Patents
Surface-coated cutting tool Download PDFInfo
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- CN113474111B CN113474111B CN201980093151.7A CN201980093151A CN113474111B CN 113474111 B CN113474111 B CN 113474111B CN 201980093151 A CN201980093151 A CN 201980093151A CN 113474111 B CN113474111 B CN 113474111B
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- 238000005520 cutting process Methods 0.000 title claims abstract description 70
- 239000010410 layer Substances 0.000 claims abstract description 306
- 239000000203 mixture Substances 0.000 claims abstract description 52
- 239000011247 coating layer Substances 0.000 claims abstract description 33
- 239000013078 crystal Substances 0.000 claims abstract description 31
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 claims abstract description 28
- 239000011780 sodium chloride Substances 0.000 claims abstract description 14
- 229910052984 zinc sulfide Inorganic materials 0.000 claims abstract description 11
- 229910052719 titanium Inorganic materials 0.000 claims description 30
- 229910052782 aluminium Inorganic materials 0.000 claims description 29
- 239000002131 composite material Substances 0.000 claims description 26
- 229910052757 nitrogen Inorganic materials 0.000 claims description 21
- 150000004767 nitrides Chemical class 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 15
- 239000000758 substrate Substances 0.000 abstract description 11
- 239000007789 gas Substances 0.000 description 49
- 239000010936 titanium Substances 0.000 description 42
- 239000011248 coating agent Substances 0.000 description 38
- 238000000576 coating method Methods 0.000 description 38
- 230000015572 biosynthetic process Effects 0.000 description 20
- 239000000843 powder Substances 0.000 description 17
- 230000000052 comparative effect Effects 0.000 description 15
- 229910001018 Cast iron Inorganic materials 0.000 description 11
- 238000002347 injection Methods 0.000 description 11
- 239000007924 injection Substances 0.000 description 11
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 238000005259 measurement Methods 0.000 description 6
- 239000012495 reaction gas Substances 0.000 description 6
- 238000010884 ion-beam technique Methods 0.000 description 5
- 238000004227 thermal cracking Methods 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 4
- 230000002159 abnormal effect Effects 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 229910000851 Alloy steel Inorganic materials 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 238000000498 ball milling Methods 0.000 description 2
- 239000011195 cermet Substances 0.000 description 2
- 238000005253 cladding Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000003801 milling Methods 0.000 description 2
- 239000012188 paraffin wax Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000013256 coordination polymer Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/36—Carbonitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/048—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with layers graded in composition or physical properties
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
A surface-coated cutting tool comprising a tool substrate and a hard coating layer provided on the surface of the tool substrate, wherein the hard coating layer comprises a layer of TiAlCN layer alpha (1) containing 70 area% or more of wurtzite hexagonal crystal structure laminated on the tool surface side (S), and a layer of TiAlCN layer beta (2) containing 70 area% or more of NaCl type face-centered cubic structure laminated on the tool substrate side (B), and wherein the hard coating layer is formed by (Ti (1‑xα) Al xα )(C yα N (1‑yα) ) When the composition of TiAlCN layer alpha (1) is represented, xalpha is 0.70.ltoreq.xalpha is 0.95 and yalpha is 0.000.ltoreq.yalpha is 0.010, and the composition is represented by (Ti (1‑xβ) Al xβ )(C yβ N (1‑yβ) ) When the composition of TiAlCN layer beta (2) is represented, 0.65.ltoreq.xbeta.ltoreq.0.95 and 0.000.ltoreq.ybeta.ltoreq.0.010, and when the average layer thicknesses of TiAlCN layer alpha (1) and TiAlCN layer beta (2) are denoted by Lalpha and Lbeta, 0.5 μm.ltoreq.Lalpha.ltoreq.10.0 μm and 1.0 μm.ltoreq.Lbeta.ltoreq.20.0 μm.
Description
Technical Field
The present invention relates to a surface-coated cutting tool (hereinafter, sometimes referred to as a coated tool) which exhibits excellent chipping resistance even when used in high-speed intermittent cutting processing such as cast iron, and which exhibits excellent cutting performance when used for a long period of time.
The present application claims priority based on patent application nos. 2018-243963 of the japanese application at 12 months 27 and patent application nos. 2019-227056 of the japanese application at 12 months 17 of 2019, and the contents thereof are incorporated herein.
Background
Conventionally, a coated tool has been known in which a surface of a tool base body such as a cemented carbide based on tungsten carbide (hereinafter, referred to as WC) is coated with a ti—al composite carbonitride layer as a hard coating layer, and these coated tools exhibit excellent wear resistance.
However, the conventional coating tools coated with the ti—al composite carbonitride layer are relatively excellent in wear resistance, but are prone to abnormal wear such as chipping when used under high-speed intermittent cutting conditions, and various proposals have been made for improvement of the hard coating layer.
For example, patent document 1 discloses a titanium aluminum nitride film coating tool in which a coating layer formed of one or more layers is provided on a tool base, at least one of the coating layers is a titanium aluminum nitride film containing at least titanium, aluminum, and nitrogen, and the titanium aluminum nitride film has a cubic crystal structure, a residual tensile stress, and a chlorine content of 0.01 to 2 mass%.
For example, patent document 2 describes a coating tool coated with a hard material, characterized in that a plurality of Ti formed by CVD (chemical vapor deposition) 1-x Al x N layer and/or Ti 1-x Al x C layer and/or Ti 1-x Al x CN layer (where x is 0.65 to 0.95) is provided with Al 2 O 3 The layer serves as an outer layer.
For example, patent document 3 describes a coating tool having a coating film formed as follows: comprises Ti as a main component 1-x Al x N is a first unit layer formed by Ti 1-y Al y The multilayer structure is formed by alternately stacking second unit layers formed by N, wherein the first unit layers have fcc type crystal structures and are more than 0 and less than 0.65, and the second unit layers have hcp type crystal structures and are more than or equal to 0.65 and less than or equal to y and less than 1.
Further, for example, patent document 4 describes a coating tool having a hard coating film as follows: comprising a plurality of grains each having Ti having fcc structure and an amorphous phase between the grains 1- x Al x N layer and Ti having hcp structure 1-y Al y And N layers are alternately laminated to form a structure, and the relation that x is more than or equal to 0 and less than 1, y is more than or equal to 0 and less than or equal to 1, and (y-x) is more than or equal to 0.1 is satisfied, wherein the amorphous phase comprises at least one carbide, nitride or carbonitride in Ti and Al.
Further, for example, patent document 5 describes a hard coating film having a lower layer formed of a titanium aluminum nitride coating film mainly having fcc structure and an upper layer formed of an aluminum nitride coating film having hcp structure, wherein the upper layer has a columnar crystal structure, the columnar crystal has an average cross-sectional diameter of 0.05 to 0.6 μm, and the ratio of an X-ray diffraction peak value Ia (100) of a (100) plane to an X-ray diffraction peak value Ia (002) of a (002) plane in the upper layer satisfies a relationship of Ia (002)/Ia (100) not less than 6.
Patent document 1: japanese patent laid-open No. 2001-34008 (A)
Patent document 2: japanese patent application laid-open No. 2011-516722 (A)
Patent document 3: japanese patent application laid-open No. 2015-124407 (A)
Patent document 4: japanese patent laid-open publication 2016-3369 (A)
Patent document 5: international patent publication No. 2018/008554 (A)
However, when the coating tools described in patent documents 1 to 4 are used for high-speed intermittent cutting processing such as cast iron, abnormal damage such as thermal cracking is generated in a coating film on a rake face of the coating tool, and chipping is likely to occur from this point, so that satisfactory cutting performance cannot be said to be exhibited.
In addition, when the coating tool described in patent document 5 is used for high-speed intermittent cutting processing such as cast iron, adhesion between the upper layer and the lower layer is insufficient, and peeling of the upper layer and chipping starting from the upper layer are likely to occur, so that satisfactory cutting performance cannot be said to be exhibited.
Disclosure of Invention
Accordingly, an object of the present invention is to provide a coated tool that exhibits excellent chipping resistance even when used in high-speed intermittent cutting processing such as cast iron, and that exhibits excellent cutting performance when used for a long period of time.
The present inventors have conducted intensive studies on the occurrence of chipping due to abnormal damage such as thermal cracking of a composite nitride layer or a composite carbonitride layer of Ti and Al (hereinafter, this composite nitride layer or composite carbonitride layer is also referred to as TiAlCN layer) as a hard coating layer, and as a result, have found the following new findings: when a layer of a wurtzite hexagonal structure (sometimes referred to as hexagonal) in which a TiAlCN layer having a NaCl face-centered cubic structure (sometimes referred to as cubic) with good wear resistance is arranged close to a layer of a tool base (layer on the tool base side) and a TiAlCN layer having good thermal cracking resistance is laminated, chipping resistance in high-speed intermittent cutting processing such as cast iron is improved.
The present invention is based on the discovery that,
"(1) a surface-coated cutting tool provided with a hard coating layer on the surface of a tool base body, characterized in that,
(a) The hard coating layer has the following laminated structure: a TiAlCN layer alpha containing 70 area% or more of grains of a composite nitride or composite carbonitride of Ti and Al having a wurtzite type hexagonal structure, and a TiAlCN layer beta containing 70 area% or more of grains of a composite nitride or composite carbonitride of Ti and Al having a NaCl type face centered cubic structure, respectively, on the tool surface side,
(b) The method comprises the following steps: (Ti) (1-xα) Al xα )(C yα N (1-yα) ) In the case of representing the composition of the TiAlCN layer alpha, the average content ratio xalpha of Al in the total amount of Ti and Al and the average content ratio yalpha of C in the total amount of C and N (wherein xalpha and yalpha are atomic ratios) satisfy 0.70.ltoreq.xalpha.ltoreq.0.95 and 0.000.ltoreq.yalpha.ltoreq.0.010, respectively,
(c) The method comprises the following steps: (Ti) (1-xβ) Al xβ )(C yβ N (1-yβ) ) When the composition of the TiAlCN layer beta is expressed, the average content ratio xbeta of Al in the total amount of Ti and Al and the average content ratio ybeta of C in the total amount of C and N (wherein x beta and ybeta are atomic ratios) satisfy 0.65-0.95 and 0.000-0.010,
(d) When the average layer thicknesses of the TiAlCN layer alpha and the TiAlCN layer beta are L alpha and L beta, L alpha is 0.5 [ mu ] m or less and 10.0 [ mu ] m or less and L beta is 1.0 [ mu ] m or less and 20.0 [ mu ] m or less.
(2) The surface-coated cutting tool according to (1), wherein the difference between xα and xβ satisfies |xα -xβ| of 0.20 or less.
(3) The surface-coated cutting tool according to (1) or (2), wherein a TiAlCN layer γ including at least grains of a composite nitride or a composite carbonitride of Ti and Al having a face-centered cubic structure of NaCl is present between the TiAlCN layer α and the TiAlCN layer β,
(a) The method comprises the following steps: (Ti) (1-xγ) Al xγ )(C yγ N (1-yγ) ) In the case of representing the composition of the TiAlCN layer gamma, regarding the average content ratio xgamma of Al in the total amount of Ti and Al and the average content ratio ygamma of C in the total amount of C and N (wherein xgamma, ygamma are both atomic ratios),
xgamma satisfies xalpha is less than or equal to xgamma is less than or equal to xbeta or xalpha is more than or equal to xgamma is more than or equal to xbeta,
y gamma satisfies 0.000.ltoreq.ygamma.ltoreq.0.010,
(b) When the average layer thickness of the TiAlCN layer gamma is Lgamma, lgamma is 0.1 μm or less and 1.0 μm or less.
(4) The surface-coated cutting tool according to (1) or (2), wherein when xα and xβ are xα+.xβ, a tiacn layer δ including at least grains of a composite nitride or a composite carbonitride of Ti and Al having a face-centered cubic structure of NaCl is present between the tiacn layer α and the tiacn layer β,
(a) With respect to the TiAlCN layer delta,
the method comprises the following steps: (Ti) (1-xδL) Al xδL )(C yδL N (1-yδL) ) In the case of the composition of the region on the tool base side, which is bisected in the layer thickness direction of the TiAlCN layer δ, the average content ratio xδl of Al in the total amount of Ti and Al and the average content ratio yδl of C in the total amount of C and N (where x δ L, y δl is an atomic ratio),
and, in the composition formula: (Ti) (1-xδH) Al xδH )(C yδH N (1-yδH) ) The average content ratio xδh of Al in the total amount of Ti and Al and the average content ratio yδh of C in the total amount of C and N (where xδ H, y δh is an atomic ratio) satisfy the following conditions:
xα is equal to or less than xδH is equal to or less than xδL is equal to or less than xβ or less than xδL is equal to or less than xδH is equal to or less than xα
Y delta L is more than or equal to 0.000 and less than or equal to 0.010, y delta H is more than or equal to 0.000 and less than or equal to 0.010,
(b) When the average layer thickness of the TiAlCN layer delta is L delta, L delta of 0.1 μm or less and 1.0 μm or less is satisfied.
(5) The surface-coated cutting tool according to any one of (1) to (4), wherein the rake face of the surface-coated cutting tool has the hard coating layer, and the flank face has the TiAlCN layer β on the surface thereof, the hard coating layer including a laminated structure of the TiAlCN layer α and the TiAlCN layer β. ".
The surface-coated cutting tool of the present invention exhibits the following excellent effects: the wear resistance of the flank face is maintained, and the occurrence of thermal cracks in the rake face is prevented, thereby preventing damage from the rake face to the flank face, and the life is long even when the cutting tool is used for high-speed intermittent cutting such as cast iron.
Drawings
Fig. 1 is a schematic diagram of a surface-coated cutting tool according to an embodiment of the present invention, in which the hard coating layer is a longitudinal section (section perpendicular to the tool base) of the surface-coated cutting tool, and the TiAlCN layer γ and the TiAlCN layer δ are not provided between the TiAlCN layer α on the tool surface side and the TiAlCN layer β on the tool base side.
Fig. 2 is a schematic diagram of another embodiment of a longitudinal section (section perpendicular to a tool base) of a hard coating layer of a surface-coated cutting tool according to the present invention, and the surface-coated cutting tool having a TiAlCN layer γ or a TiAlCN layer δ between a TiAlCN layer α on the tool surface side and a TiAlCN layer β on the tool base side.
Fig. 3 is a schematic view of a surface-coated cutting tool according to still another embodiment of the present invention, in which the surface-coated cutting tool has a hard coating layer having a laminated structure of TiAlCN layers α and TiAlCN layers β on a rake face and TiAlCN layers β on a flank face, and a longitudinal section (section perpendicular to a tool base) of the hard coating layer.
Detailed Description
The cladding tool of the present invention will be described in more detail below. In the description of the present specification and claims, when the numerical range is expressed using "to" the range includes upper limit and lower limit values.
Laminate structure of hard coating layer:
as shown in fig. 1, the cladding tool according to the present invention has a laminated structure as follows: the tool has a TiAlCN layer α (1) containing 70 area% or more (the upper limit may be 100 area%) of grains of a complex nitride or complex carbonitride of Ti and Al having a wurtzite-type hexagonal structure on the tool surface side (S), and a TiAlCN layer β (2) containing 70 area% or more (the upper limit may be 100 area%) of grains of a complex nitride or complex carbonitride of Ti and Al having a NaCl-type face-centered cubic structure on the tool base side (B), respectively.
The reason for this laminated structure is that by disposing the TiAlCN layer α (1) having good thermal crack resistance on the tool surface side (S) and disposing the TiAlCN layer β (2) having good wear resistance on the tool base side (B), it is possible to prevent the occurrence of thermal cracks on the rake face (5) while maintaining the wear resistance of the flank face (6), and further to prevent damage from the rake face (5) to the flank face (6), and thus excellent cutting performance can be exhibited for a long period of time even in high-speed intermittent cutting processing such as cast iron.
Further, by containing Al in both the TiAlCN layer α (1) and the TiAlCN layer β (2), adhesion between layers can be improved. As shown in fig. 2, in order to improve adhesion between the TiAlCN layer α (1) and the TiAlCN layer β (2), it is preferable to provide either the TiAlCN layer γ having a NaCl face-centered cubic structure or the TiAlCN layer δ having a NaCl face-centered cubic structure between the two layers, as needed.
The respective layers will be described in detail below.
TiAlCN layer alpha:
the TiAlCN layer (1) is a layer which has excellent thermal crack resistance (thermal shock resistance) and contains at least grains of a composite nitride or composite carbonitride of Ti and Al having a wurtzite hexagonal structure, and is provided on the tool surface side (S).
Composition of TiAlCN layer α:
the method comprises the following steps: (Ti) (1-xα) Al xα )(C yα N (1-yα) ) In the case of the composition, the composition of the TiAlCN layer α (1) is controlled so that the average content ratio xα of Al in the total amount of Ti and Al and the average content ratio yα of C in the total amount of C and N (where xα and yα are both atomic ratios) satisfy 0.70.ltoreq.xα.ltoreq.0.95 and 0.000.ltoreq.yα.ltoreq.0.010, respectively.
The reason why xα is within this range is that if xα is less than 0.70, a wurtzite hexagonal structure cannot be stably formed and thermal crack resistance is reduced, which is not preferable, and if xα exceeds 0.95, adhesion with TiAlCN layer β (2) is reduced and abrasion resistance is reduced, which is not preferable. The reason why y α is set within this range is that lubricity is improved in this range, and the chipping resistance is improved by reducing the impact during cutting, and if y α is out of this range, adhesion to TiAlCN layer β (2) is reduced.
Average layer thickness of TiAlCN layer a:
the average layer thickness Lα of the TiAlCN layer α (1) is preferably 0.5 μm to 10.0. Mu.m. The reason for this is that if the grain size is smaller than 0.5. Mu.m, the hard coating layer will wear out earlier even on the rake face (5) and the effect of improving the thermal cracking resistance will not be exhibited, whereas if the grain size exceeds 10.0. Mu.m, the grains will coarsen and the chipping resistance will be reduced. More preferably, the average layer thickness is in the range of 1.0 μm to 3.0. Mu.m.
Area ratio of crystal grains of TiAlCN layer alpha with wurtzite type hexagonal crystal structure:
the area ratio of crystal grains having a wurtzite hexagonal structure in the TiAlCN layer alpha (1) is 70 area% or more. If the content is not 70 area% or more, the amount of crystal grains having a wurtzite-type hexagonal structure is insufficient, resulting in a decrease in thermal crack resistance and chipping resistance. The area ratio is more preferably 85 area% or more, and may be 100 area%.
TiAlCN layer beta:
the TiAlCN layer β (2) is a layer having excellent wear resistance and containing at least grains of a composite nitride or composite carbonitride of Ti and Al having a NaCl face-centered cubic structure, and is provided on the tool base side (B).
Composition of TiAlCN layer beta:
the method comprises the following steps: (Ti) (1-xβ) Al xβ )(C yβ N (1-yβ) ) In the case of the composition, the composition of the TiAlCN layer β (2) is controlled so that the average content ratio xβ of Al in the total amount of Ti and Al and the average content ratio yβ of C in the total amount of C and N (where xβ and yβ are both atomic ratios) satisfy 0.65 and 0.95 and 0.000 and 0.010, respectively.
The reason why x β is in this range is that if it is less than 0.65, the hardness of TiAlCN layer β (2) decreases and the abrasion resistance is insufficient, while if it exceeds 0.95, the Ti content ratio relatively decreases, so that crystal grains of wurtzite hexagonal structure are easily contained and the abrasion resistance decreases, which is not preferable. When y β is within this range, the adhesion between the TiAlCN layer β (2) and the tool base (3) or a lower layer described later is improved, and the lubricity is improved to alleviate the impact during cutting, so that the chipping resistance and chipping resistance of the TiAlCN layer β (2) are improved, while when it is out of this range, the adhesion between the TiAlCN layer α (1) is reduced, which is not preferable.
Average layer thickness of TiAlCN layer beta:
the average layer thickness Lβ of the TiAlCN layer β (2) is preferably 1.0 μm to 20.0. Mu.m. The reason for this is that if the grain size is smaller than 1.0 μm, the layer thickness is thin, so that the wear resistance cannot be sufficiently ensured in long-term use, whereas if the grain size exceeds 20.0 μm, grains of the TiAlCN layer β (2) are liable to coarsen, and chipping is liable to occur, which is not preferable. More preferably, the average layer thickness is in the range of 5.0 μm to 12.0. Mu.m.
Area ratio of grains of TiAlCN layer β having NaCl-type face centered cubic structure:
the area ratio of grains having a NaCl-type face-centered cubic structure in TiAlCN layer beta (2) is 70% or more by area. If it is not 70 area% or more, the wear resistance is lowered and the wear of the flank face (6) tends to be increased, resulting in early reaching of the life as a clad tool. The area ratio is more preferably 85 area% or more, and may be 100 area%.
Composition difference between average Al content ratio xα of TiAlCN layer α and average Al content ratio xβ of TiAlCN layer β:
the composition difference between the average content ratio xα of Al of TiAlCN layer α (1) and the average content ratio xβ of Al of TiAlCN layer β (2) is preferably |xα -xβ| or less than or equal to 0.20, i.e., -0.20 or less than or equal to xα -xβ or less than or equal to 0.20. If the amount is within this range, the adhesion between the TiAlCN layer α (1) and the TiAlCN layer β (2) is improved, and chipping after occurrence of thermal cracking is easily prevented.
TiAlCN layer gamma:
in order to improve adhesion between the TiAlCN layer α (1) and the TiAlCN layer β (2), it is preferable to provide the TiAlCN layer γ (4) having a NaCl face-centered cubic structure between the two layers.
Composition of TiAlCN layer γ:
is composed ofThe formula: (Ti) (1-xγ) Al xγ )(C yγ N (1-yγ) ) In the case of representing the composition of the TiAlCN layer γ (4), the average content ratio xγ of Al in the total amount of Ti and Al and the average content ratio yγ of C in the total amount of C and N (where xγ and yγ are both atomic ratios) satisfy xα+.ltoreq.xγ.ltoreq.xβ or xα+.xγ.gtoreq.xβ, and are preferably 0.000+.ltoreq.yγ.ltoreq.0.010. By providing the TiAlCN layer γ (4) having such a composition, the initial nuclei of the crystal grains of the TiAlCN layer α (1) can be easily generated to increase the nuclei density, and the adhesion between the TiAlCN layer α (1) and the TiAlCN layer β (2) can be increased to improve the chipping resistance.
Average layer thickness of TiAlCN layer γ:
the average layer thickness of TiAlCN layer gamma is set to 0.1-1.0 μm. The reason for this is that if the average layer thickness of the TiAlCN layer γ is smaller than 0.1 μm, the TiAlCN layer γ is too thin to have a region of TiAlCN layer β (2) which is not sufficiently covered with the TiAlCN layer γ, and if it exceeds 1.0 μm, the grains of the TiAlCN layer γ become coarse, initial nuclei of the grains of the TiAlCN layer α (1) cannot be sufficiently generated, and the nuclear density cannot be improved, and thus, it is not expected to improve the adhesion between the TiAlCN layer α (1) and the TiAlCN layer β (2).
TiAlCN layer delta:
when xα+.xβ, in order to improve adhesion between the TiAlCN layer α (1) and the TiAlCN layer β (2), it is further preferable to provide a TiAlCN layer δ having a NaCl face-centered cubic structure between the two layers instead of the TiAlCN layer γ.
Composition of TiAlCN layer δ:
when the TiAlCN layer delta is halved in its layer thickness direction,
preferably in the range consisting of the formula: (Ti) (1-xδL) Al xδL )(C yδL N (1-yδL) ) In the case of showing the composition of the region on the tool base side (B), an average content ratio xδL of Al in the total amount of Ti and Al and an average content ratio yδL of C in the total amount of C and N (wherein xδ L, y δL is an atomic ratio),
The method comprises the following steps: (Ti) (1-xδH) Al xδH )(C yδH N (1-yδH) ) In the case of representing the composition of the region on the tool surface side (S), al is a flat portion of the total amount of Ti and AlThe average content ratio yδH of the both content ratios xδH and C in the total amount of C and N (wherein xδ H, y δ2H is an atomic ratio) satisfies xδ1.ltoreq.xδ3H < xδL.ltoreq.xβ or xβ.ltoreq.xδL < xδH.ltoreq.xα, and 0.000.ltoreq.yδH.ltoreq.0.010 and 0.000.ltoreq.yδL.ltoreq.0.010, respectively.
By setting the composition so that xβ in TiAlCN layer β (2) is close to xδl of TiAlCN layer δ, adhesion between TiAlCN layer β (2) and TiAlCN layer δ (4) can be further improved, and by setting xα in TiAlCN layer α (1) to xδh of TiAlCN layer δ (4), adhesion between TiAlCN layer α (1) and TiAlCN layer δ (4) can be improved, and adhesion between TiAlCN layer α (1) and TiAlCN layer β (2) can be improved, so that chipping resistance can be improved.
Average layer thickness of TiAlCN layer δ:
the average layer thickness of TiAlCN layer delta (4) is set to 0.1-1.0 μm. The reason for this is that if the average layer thickness of the TiAlCN layer δ (4) is smaller than 0.1 μm, there is a region of the TiAlCN layer β (2) which is not sufficiently covered with the TiAlCN layer δ (4), and if it exceeds 1.0 μm, the crystal grains of the TiAlCN layer δ (4) become coarse, the initial nuclei of the crystal grains of the TiAlCN layer α (1) cannot be sufficiently generated, the nuclear density is not high, and thus it is not expected to improve the adhesion between the TiAlCN layer α (1) and the TiAlCN layer β (2).
The rake face has a hard coating layer of a laminated structure including TiAlCN layers α and TiAlCN layers β, and the relief face has TiAlCN layers β on its surface:
as shown in fig. 3, it is preferable that a hard coating layer having a laminated structure of TiAlCN layers α (1) and TiAlCN layers β (2) is provided on the rake face (5), and only the TiAlCN layers β (2) are provided on the surface of the flank face (6). The rear tool face (6) can be provided with the TiAlCN layer alpha (1), but when the TiAlCN layer alpha (1) with low wear resistance does not exist on the surface of the rear tool face (6) with the greatest friction with the workpiece material, the TiAlCN layer beta (2) at the lower part of the TiAlCN layer alpha (1) can be prevented from falling off together with the TiAlCN layer alpha (1), so that the tool life is further prolonged.
Other layers:
the hard clad layer having the laminated structure of the present invention may also include other layers. For example, when a lower layer including a Ti compound layer formed of one or more of a carbide layer, a nitride layer, a carbonitride layer, a oxycarbide layer, and a oxycarbonitride layer and having a total average layer thickness of 0.1 to 20.0 μm is provided adjacent to the tool base body (3), the effects exerted by these layers are mutually coordinated, and further excellent wear resistance and thermal stability can be exerted.
Here, if the total average layer thickness of the lower layers is less than 0.1 μm, the effect of the lower layers cannot be fully exerted, whereas if it exceeds 20.0 μm, the grains of the lower layers are liable to coarsen and chipping is liable to occur.
The measuring method of the boundary and average layer thickness, composition, crystal structure and area ratio of each TiAlCN layer of the TiAlCN layer alpha, the TiAlCN layer beta, the TiAlCN layer gamma and the TiAlCN layer delta comprises the following steps:
the boundaries of the TiAlCN layers α (1), tiAlCN layer β (2), tiAlCN layer γ (4), and TiAlCN layer δ (4) are determined as follows: the hard coating layer was polished by using a focused ion beam apparatus (FIB: focused IonBeam system), an ion beam profile polisher (CP: cross section Polisher) and the like to prepare a polished vertical section (section perpendicular to the tool base), and in the vertical section, a quadrangle having a thickness of the entire hard coating layer in the longitudinal direction and a thickness of 100 μm in the transverse direction parallel to the tool base was used as a measurement region, and a crystal structure of each crystal grain was analyzed by using an electron beam back scattering diffraction image obtained by irradiating an electron beam having an acceleration voltage of 15kV at an incidence angle of 70 degrees and at intervals of 0.01 μm on the measurement region by using an electron beam back scattering analysis apparatus.
A portion having an orientation difference of 5 degrees or more between adjacent measurement points (pixels) is defined as a grain boundary. However, a pixel that exists alone and has an orientation difference of 5 degrees or more from all pixels adjacent to each other is not regarded as a crystal grain, but a pixel that connects two or more pixels is regarded as a crystal grain.
The individual crystal grains are determined in this way and the crystal structures thereof are discriminated to determine the individual layers, whereby the area ratio of the crystal grains of wurtzite-type hexagonal structure or NaCl-type face-centered cubic structure in the individual layers can be found.
When the boundaries of the TiAlCN layers are defined, the average layer thickness can be obtained between the defined boundary regions of the layers, and the average content ratio (xα, xβ, xγ, xδ L, x δh) of Al in each layer can be obtained as follows: a plurality of (for example, 5 or more) line analyses were performed in the layer thickness direction by irradiating an electron beam using auger electron spectroscopy, and the obtained analysis results were averaged.
The average content ratio (yα, yβ, yγ, yδ L, y δh) of C in each layer can be determined by a secondary ion mass spectrometry. That is, the content ratio measurement in the depth direction is performed by alternately repeating the ion beam-based surface analysis and the sputter ion beam-based etching. Specifically, in each TiAlCN layer, from a site where 0.5 μm or more is entered, an average value obtained by measurement at a pitch of 0.1 μm or less and at least a length of 0.5 μm is obtained, and the measurement is performed at 5 sites or more, whereby the average content ratio of C in each layer is obtained.
Tool base:
as for the tool base (3), any conventionally known base material can be used as long as it does not inhibit the achievement of the object of the present invention. For example, any of cemented carbide (including WC-based cemented carbide, WC, co, alloys containing carbonitrides such as Ti, ta, nb, etc.), cermet (cermet containing TiC, tiN, tiCN, etc. as a main component), ceramic (titanium carbide, silicon nitride, aluminum oxide, etc.), and cBN sintered body is preferable.
The manufacturing method comprises the following steps:
the TiAlCN layers according to the present invention can be obtained, for example, as follows: two kinds of reaction gases, for example, a gas group a and a gas group B, composed of the following are supplied to the tool substrate or at least one layer of the carbide layer, nitride layer, carbonitride layer, oxycarbide layer, and oxycarbonitride layer of Ti on the tool substrate with a predetermined phase difference.
As an example of the gas composition of the reaction gas,% is set to volume% (the sum of the gas group a and the gas group B is set as a whole),
(1) Reaction gas alpha for forming TiAlCN layer alpha
Gas group a: NH (NH) 3 ：5.0～10.0％、N 2 ：3.0～5.0％、
Ar：1.0～5.0％、H 2 ：50～60％
Gas group B: alCl 3 ：0.70～1.20％、TiCl 4 ：0.10～0.30％、
N 2 ：3.0～12.0％、
HCl：0.00～0.10％、C 2 H 4 ：0.0～0.5％、H 2 : remainder of the
Reaction atmosphere pressure: 4.5 to 5.0kPa
Reaction atmosphere temperature: 750-950 DEG C
Supply cycle: 4.0 to 12.0 seconds
Gas supply time per cycle: 0.20 to 0.70 seconds
Phase difference between the supplies of gas group a and gas group B: 0.18 to 0.60 seconds
(2) Reaction gas beta for forming TiAlCN layer beta
Gas group a: NH (NH) 3 ：1.0～2.0％、Ar：1.0～5.0％、H 2 ：50～60％
Gas group B: alCl 3 ：0.60～1.40％、TiCl 4 ：0.05～0.50％、
N 2 ：0.0～5.0％、C 2 H 4 ：0.0～0.5％、H 2 : remainder of the
Reaction atmosphere pressure: 4.5 to 5.0kPa
Reaction atmosphere temperature: 700-850 DEG C
Supply cycle: 4.0 to 12.0 seconds
Gas supply time per cycle: 0.20 to 0.70 seconds
Phase difference between the supplies of gas group a and gas group B: 0.18 to 0.60 seconds
(3) Reaction gas gamma and delta for forming TiAlCN layer gamma and delta
Gas group a: NH (NH) 3 ：3.0～4.0％、N 2 ：1.0～2.0％、
Ar：1.0～5.0％、H 2 ：50～60％
Gas group B: alCl 3 ：0.6～1.2％、TiCl 4 ：0.10～0.30％、
N 2 ：0.0～5.0％、C 2 H 4 ：0.0～0.5％、H 2 : remainder of the
Reaction atmosphere pressure: 4.5 to 5.0kPa
Reaction atmosphere temperature: 700-850 DEG C
Supply cycle: 4.0 to 12.0 seconds
Gas supply time per cycle: 0.20 to 0.70 seconds
Phase difference between the supplies of gas group a and gas group B: 0.18 to 0.60 seconds
In the formation of the TiAlCN layer δ, the composition of the gas changes linearly (inclination change) from the start of the formation of the TiAlCN layer δ to the end of the formation of the film, or the gas composition can be changed from the start of the formation of the TiAlCN layer δ to the end of the formation of the film, and the TiAlCN layer δ can be formed by fixing the composition for a predetermined period of time a plurality of times during this period.
Examples
Next, examples will be described.
Here, as a specific example of the coated tool of the present invention, a coated tool suitable for an insert cutting tool using WC-based cemented carbide as a tool base will be described, but the same applies even in the case of using other aforementioned materials as a tool base, and the same applies also in the case of applying to a drill, an end mill, or the like.
Example 1 >
As raw material powders, WC powder, tiC powder, taC powder, nbC powder, cr powder each having an average particle diameter of 1 to 3 μm were prepared 3 C 2 Powder and Co powder, these raw material powders were mixed into a mixture composition shown in Table 1, further mixed with paraffin wax in acetone by ball milling for 24 hours, dried under reduced pressure, press-molded into a compact of a predetermined shape under a pressure of 98MPa, and kept for 1 minute at a predetermined temperature in the range of 1370℃to 1470℃in a vacuum of 5PaThe press-molded article was vacuum sintered under the same conditions, and after sintering, a tool base a to a tool base C made of WC-based cemented carbide having a blade shape of ISO standard SEEN1203AFSN were produced, respectively.
Next, a TiAlCN layer was formed by CVD on the surfaces of the tool substrates a to C using a CVD apparatus, thereby obtaining the clad tools 1 to 10 of the present invention shown in table 7.
The film formation conditions are described in tables 2 to 4, but are substantially as follows. The% of the gas composition is the volume% (the sum of the gas group a and the gas group B is taken as a whole (100 volume%)).
(1) Reaction gas α for formation of TiAlCN layer α (Table 2)
Gas group a: NH (NH) 3 ：5.0～10.0％、N 2 ：3.0～5.0％、
Ar：1.0～5.0％、H 2 ：50～60％
Gas group B: alCl 3 ：0.70～1.20％、TiCl 4 ：0.10～0.30％、
N 2 ：3.0～12.0％、
HCl：0.00～0.10％、C 2 H 4 ：0.0～0.5％、H 2 : remainder of the
Reaction atmosphere pressure: 4.5 to 5.0kPa
Reaction atmosphere temperature: 750-950 DEG C
Supply cycle: 4.0 to 12.0 seconds
Gas supply time per cycle: 0.20 to 0.70 seconds
Phase difference between the supplies of gas group a and gas group B: 0.18 to 0.60 seconds
(2) Reaction gas beta for formation of TiAlCN layer beta (Table 3)
Gas group a: NH (NH) 3 ：1.0～2.0％、Ar：1.0～5.0％、H 2 ：50～60％
Gas group B: alCl 3 ：0.60～1.40％、TiCl 4 ：0.05～0.50％、
N 2 ：0.0～5.0％、C 2 H 4 ：0.0～0.5％、H 2 : remainder of the
Reaction atmosphere pressure: 4.5 to 5.0kPa
Reaction atmosphere temperature: 700-850 DEG C
Supply cycle: 4.0 to 12.0 seconds
Gas supply time per cycle: 0.20 to 0.70 seconds
Phase difference between the supplies of gas group a and gas group B: 0.18 to 0.60 seconds
(3) Reaction gases gamma and delta for formation of TiAlCN layers gamma and delta (Table 4)
Gas group a: NH (NH) 3 ：3.0～4.0％、N 2 ：1.0～2.0％、
Ar：1.0～5.0％、H 2 ：50～60％
Gas group B: alCl 3 ：0.6～1.2％、TiCl 4 ：0.10～0.30％、
N 2 ：0.0～5.0％、C 2 H 4 ：0.0～0.5％、H 2 : remainder of the
Reaction atmosphere pressure: 4.5 to 5.0kPa
Reaction atmosphere temperature: 700-850 DEG C
Supply cycle: 4.0 to 12.0 seconds
Gas supply time per cycle: 0.20 to 0.70 seconds
Phase difference between the supplies of gas group a and gas group B: 0.18 to 0.60 seconds
As shown in table 4, the gas composition of the TiAlCN layer γ was not changed, and the gas composition was changed to L (inclination change) from the start of film formation of the TiAlCN layer γ to the end of film formation during formation of the TiAlCN layer δ, or was changed from the start of film formation of the TiAlCN layer γ to the end of film formation, and the composition was changed for a plurality of times during this period (stepwise change).
The coating tool of the present invention, in which the hard coating layer of the flank face is merely TiAlCN layer β, removes TiAlCN layer α of the flank face by grinding with an elastic grinding wheel.
The coating tools 4 to 6 according to the present invention and the coating tools 8 to 10 according to the present invention form the lower layers shown in table 6 according to the film forming conditions shown in table 5.
For comparison purposes, film formation using a CVD apparatus was performed on the surfaces of the tool substrates a to C under the conditions shown in tables 2 to 4, and comparative coating tools 1 to 10 shown in table 7 were produced.
The comparative coating tools 4 to 6 and the comparative coating tools 8 to 10 were formed with the lower layers shown in table 6 according to the film forming conditions shown in table 5.
The composition, average layer thickness, area ratio of the crystal grains of wurtzite hexagonal structure, and area ratio of the crystal grains of NaCl type surface-centered cubic structure of each TiAlCN layer were obtained by the above methods for the coating tools 1 to 10 of the present invention and comparative coating tools 1 to 10, and the results are shown in table 7.
TABLE 1
TABLE 2
TABLE 3
TABLE 4
Note 1: the change of the gas composition is L in the case of inclination change and S in the case of stepwise change
And (2) injection: the gas composition in the upper stage is the composition at the start of film formation at the time of the inclination change L, and the gas composition in the lower stage is the composition at the end of film formation, note 3: the gas composition of the upper section is the composition of the first half of film formation when the gas composition of the lower section is the composition of the second half of film formation
TABLE 5
TABLE 6
TABLE 7
Note 1: "-" means no or no study is required
And (2) injection: * The area ratio of hexagonal crystals refers to the area ratio (%)
And (3) injection: * The area ratio of the cubic crystal means the area ratio (%)
And (4) injection: the establishment of inequality 1 means that x alpha < x gamma < x beta or x alpha > x gamma > x beta is marked with O when established and marked with X when not established
And (5) injection: the establishment of inequality 2 means that x.alpha.ltoreq.xδH < xδL.ltoreq.xβ or x.alpha.ltoreq.xδH > xδL.gtoreq.xβ is marked with O when established and marked with X when not established
And (6) injection: the flank-only means the o mark when the surface of the flank-only has the TiAlCN layer β, and the o mark is not the/mark
Next, the following cutting tests were performed on the inventive coated tools 1 to 10 and the comparative coated tools 1 to 10.
The following wet high-speed face milling and center cutting test of cast iron were performed with the various coating tools clamped to the front end portion of an alloy steel tool having a tool diameter of 85mm by a fixing jig, and the flank wear width of the cutting edge was measured. The results of the cutting test are shown in table 8. In addition, the comparative coating tools 1 to 10 have a life due to occurrence of chipping, and therefore the time until the life is reached is shown.
Cutting test: wet high-speed face milling and center cutting test
Diameter of cutter: 85mm
Workpiece material: JIS FCD700 block material having width of 60mm and length of 400mm
Rotational speed: 1124min -1
Cutting speed: 300m/min
Incision: 3.0mm
Single blade feed: 0.3 mm/blade
Cutting time: for 5 minutes
(typical cutting speed is 200 m/min)
TABLE 8
The cutting time (minutes) to reach the life of the comparative clad tool represents the cutting time (minutes) to reach the life due to occurrence of chipping.
Example 2 >
As raw material powders, WC powder, tiC powder, zrC powder, taC powder, nbC powder, cr each having an average particle diameter of 1 to 3 μm were prepared 3 C 2 The powder, tiN powder and Co powder were mixed with the above-mentioned mixed compositions shown in table 9, and further, paraffin was added, followed by ball-milling and mixing in acetone for 24 hours, and drying under reduced pressure. Thereafter, a compact of a predetermined shape was press-formed at a pressure of 98MPa, and the compact was vacuum-sintered under a vacuum of 5Pa at a predetermined temperature in the range of 1370 to 1470 ℃ for 1 hour. After sintering, by implementing R to the edge line portion: cutting edges of 0.07mm were ground to produce a WC-based cemented carbide tool base α to tool base γ having the shape of an insert of ISO standard CNMG120412, respectively.
Next, by the same method as in example 1, a TiAlCN layer α, a TiAlCN layer β, a TiAlCN layer γ, and a TiAlCN layer δ were formed on the surfaces of the tool substrates α to γ by using a CVD apparatus under the conditions shown in tables 2 to 4, thereby obtaining the coating tools 11 to 20 of the present invention shown in table 11.
The lower layers shown in table 10 were formed by the coating tools 14 to 16 according to the present invention and the coating tools 18 and 19 according to the film forming conditions described in table 5.
For comparison, similar to example 1, film formation was performed on the surfaces of the tool substrates α to γ by the CVD method under the conditions shown in tables 2 to 4, thereby producing comparative coating tools 11 to 20 shown in table 11.
In addition, the comparative clad tools 14 to 16 and the comparative clad tools 18 and 19 formed the lower layers shown in table 10 according to the forming conditions shown in table 5.
In the same manner as in example 1, the composition, average layer thickness, area ratio of the crystal grains of wurtzite hexagonal structure, and area ratio of the crystal grains of NaCl surface-centered cubic structure of each TiAlCN layer were obtained by the above-described methods for the coating tools 11 to 20 of the present invention and the hard coating layers of the comparative coating tools 11 to 20. These results are shown in table 11.
TABLE 9
TABLE 10
TABLE 11
Note 1: "-" means no or no study is required
And (2) injection: * The area ratio of hexagonal crystals refers to the area ratio (%)
And (3) injection: * The area ratio of the cubic crystal means the area ratio (%)
And (4) injection: the establishment of inequality 1 means that x alpha < x gamma < x beta or x alpha > x gamma > x beta is marked with O when established and marked with X when not established
And (5) injection: the establishment of inequality 2 means that x.alpha.ltoreq.xδH < xδL.ltoreq.xβ or x.alpha.ltoreq.xδH > xδL.gtoreq.xβ is marked with O when established and marked with X when not established
And (6) injection: the flank-only means the o mark when the surface of the flank-only has the TiAlCN layer β, and the o mark is not the/mark
Next, the coating tools 11 to 20 of the present invention and the comparative coating tools 11 to 20 were subjected to the following dry high-speed intermittent cutting test in a state where the various coating tools were screw-fastened to the tip portion of the alloy steel turning blade by a fixing jig, and the flank wear width of the cutting edge was measured. The results are shown in Table 12. In addition, the comparative coating tools 11 to 20 have a life due to occurrence of chipping, and therefore the time until the life is reached is shown.
Cutting test: dry high speed interrupted cutting process
Workpiece material: round bar with 8 longitudinal grooves formed at equal intervals in JIS FCD600 length direction
Cutting speed: 350m/min
Incision: 3.0mm
Feed rate: 0.3mm/rev
Cutting time: for 5 minutes
(typical cutting speed is 200 m/min)
TABLE 12
The cutting time (minutes) to reach the life of the comparative clad tool represents the cutting time (minutes) to reach the life due to occurrence of chipping.
As is clear from the results shown in tables 8 and 12, in all of the coated tools 1 to 20 according to the present invention, the hard coating layer has excellent chipping resistance, and therefore, even when used in high-speed intermittent cutting processing such as cast iron, chipping does not occur, and excellent wear resistance can be exhibited for a long period of time. In contrast, in the comparative coating tools 1 to 20, which do not satisfy any of the predetermined matters in the coating tool of the present invention, chipping occurs when the coating tool is used in high-speed intermittent cutting processing of cast iron or the like, and the service life is achieved in a short period of time.
Industrial applicability
As described above, the coating tool of the present invention can be used as a coating tool for high-speed intermittent cutting such as cast iron, and can exhibit excellent wear resistance over a long period of time, and thus can sufficiently satisfy the requirements of high performance of a cutting device, and labor and energy saving and low cost of cutting.
Symbol description
1-TiAlCN layer alpha, 2-TiAlCN layer beta, 3-tool substrate, 4-TiAlCN layer gamma or TiAlCN layer delta, 5-rake face, 6-flank face, S-tool surface side, B-tool substrate side.
Claims (7)
1. A surface-coated cutting tool provided with a hard coating layer on a surface of a tool base body, characterized in that,
a. the hard coating layer has the following laminated structure: a TiAlCN layer alpha containing 70 area% or more of grains of a composite nitride or composite carbonitride of Ti and Al having a wurtzite type hexagonal structure, and a TiAlCN layer beta containing 70 area% or more of grains of a composite nitride or composite carbonitride of Ti and Al having a NaCl type face centered cubic structure, respectively, on the tool surface side,
b. the method comprises the following steps: (Ti) （1-xα） Al xα ）（C yα N （1-yα） ) In the case of representing the composition of the TiAlCN layer alpha, the average content ratio xalpha of Al in the total amount of Ti and Al and the average content ratio yalpha of C in the total amount of C and N satisfy 0.70.ltoreq.xalpha.ltoreq.0.95 and 0.000.ltoreq.yalpha.ltoreq.0.010, respectivelyWherein x alpha and y alpha are atomic ratios,
c. the method comprises the following steps: (Ti) （1-xβ） Al xβ ）（C yβ N （1-yβ） ) When the composition of the TiAlCN layer beta is expressed, the average content ratio xbeta of Al in the total amount of Ti and Al and the average content ratio ybeta of C in the total amount of C and N respectively satisfy 0.65-0.95 and 0.000-0.010, wherein x beta and y beta are atomic ratios,
d. when the average layer thicknesses of the TiAlCN layer alpha and the TiAlCN layer beta are L alpha and L beta, L alpha is 0.5 [ mu ] m or less and 10.0 [ mu ] m or less and L beta is 1.0 [ mu ] m or less and 20.0 [ mu ] m or less.
2. The surface coated cutting tool according to claim 1, wherein,
the difference between xalpha and xbeta satisfies |xalpha-xbeta| less than or equal to 0.20.
3. The surface-coated cutting tool according to claim 1 or 2, wherein,
a TiAlCN layer gamma is arranged between the TiAlCN layer alpha and the TiAlCN layer beta, the TiAlCN layer gamma at least comprises crystal grains of composite nitrides or composite carbonitrides of Ti and Al with NaCl-type face-centered cubic structure,
a. the method comprises the following steps: (Ti) （1-xγ） Al xγ ）（C yγ N （1-yγ） ) In the case of representing the composition of the TiAlCN layer gamma, regarding the average content ratio xgamma of Al in the total amount of Ti and Al and the average content ratio ygamma of C in the total amount of C and N,
xgamma satisfies xalpha is less than or equal to xgamma is less than or equal to xbeta or xalpha is more than or equal to xgamma is more than or equal to xbeta,
y gamma satisfies 0.000.ltoreq.ygamma.ltoreq.0.010,
wherein, xgamma and ygamma are atomic ratios,
b. when the average layer thickness of the TiAlCN layer gamma is Lgamma, lgamma is 0.1 μm or less and 1.0 μm or less.
4. The surface-coated cutting tool according to claim 1 or 2, wherein,
in the case where xα and xβ are xα+.xβ, there is a TiAlCN layer δ between the TiAlCN layer α and the TiAlCN layer β, the TiAlCN layer δ containing at least grains of a composite nitride or composite carbonitride of Ti and Al having a face-centered cubic structure of NaCl type,
a. with respect to the TiAlCN layer delta,
the method comprises the following steps: (Ti) （1-xδL） Al xδL ）（C yδL N （1-yδL） ) The average content ratio xδl of Al in the total amount of Ti and Al and the average content ratio yδl of C in the total amount of C and N are shown in the case of the composition of the region on the tool base side bisected in the layer thickness direction of the TiAlCN layer delta,
and, in the composition formula: (Ti) （1-xδH） Al xδH ）（C yδH N （1-yδH） ) The average content ratio xδh of Al in the total amount of Ti and Al and the average content ratio yδh of C in the total amount of C and N, when the composition of the tool surface side region bisected in the layer thickness direction of the TiAlCN layer δ, are expressed, satisfy:
xα is equal to or less than xδH is equal to or less than xδL is equal to or less than xβ or less than xδL is equal to or less than xδH is equal to or less than xα
Y delta L is more than or equal to 0.000 and less than or equal to 0.010, y delta H is more than or equal to 0.000 and less than or equal to 0.010,
wherein x delta L, y delta L, x delta H, y delta H is the atomic ratio,
b. when the average layer thickness of the TiAlCN layer delta is L delta, L delta of 0.1 μm or less and 1.0 μm or less is satisfied.
5. The surface-coated cutting tool according to claim 1 or 2, wherein,
the rake face of the surface-coated cutting tool is provided with the hard coating layer, the surface of the flank face is provided with the TiAlCN layer beta, and the hard coating layer comprises a laminated structure of the TiAlCN layer alpha and the TiAlCN layer beta.
6. A surface-coated cutting tool according to claim 3, wherein,
the rake face of the surface-coated cutting tool is provided with the hard coating layer, the surface of the flank face is provided with the TiAlCN layer beta, and the hard coating layer comprises a laminated structure of the TiAlCN layer alpha and the TiAlCN layer beta.
7. The surface-coated cutting tool according to claim 4, wherein,
the rake face of the surface-coated cutting tool is provided with the hard coating layer, the surface of the flank face is provided with the TiAlCN layer beta, and the hard coating layer comprises a laminated structure of the TiAlCN layer alpha and the TiAlCN layer beta.
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| JP2018-243963 | 2018-12-27 | ||
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| JP2019-227056 | 2019-12-17 | ||
| JP2019227056A JP7520286B2 (en) | 2018-12-27 | 2019-12-17 | Surface-coated cutting tools |
| PCT/JP2019/051161 WO2020138304A1 (en) | 2018-12-27 | 2019-12-26 | Surface-coated cutting tool |
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| CN113474111A (en) | 2021-10-01 |
| JP7520286B2 (en) | 2024-07-23 |
| JP2020104255A (en) | 2020-07-09 |
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