CN113466246B - High-precision imaging system, method, image acquisition device and detection equipment - Google Patents
High-precision imaging system, method, image acquisition device and detection equipment Download PDFInfo
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Abstract
The embodiment of the invention discloses a high-precision imaging system, a high-precision imaging method, an image acquisition device and detection equipment, wherein the imaging system comprises: a first point light source and/or a second point light source, and an ultra-telecentric lens; wherein the ultra-telecentric lens and the first point light source are arranged on the same side of a first plane to be imaged; and/or the ultra-telecentric lens and the second point light source are arranged on the same side of the second plane to be imaged. According to the technical scheme, through the integrated corresponding arrangement of the ultra-telecentric lens and the point light source, the consistency of imaging is effectively improved, and a high-precision and stable workpiece image can be obtained.
Description
Technical Field
The invention relates to the technical field of imaging equipment, in particular to a high-precision imaging system, a high-precision imaging method, an image acquisition device and detection equipment.
Background
In the field of workpiece inspection at present, defect inspection of small workpieces, particularly fine parts, is also largely dependent on visual inspection by pipelining workers. In order to improve the detection efficiency, the prior art attempts to introduce a machine vision technology based on image recognition, and detect and discover defects on a workpiece by intelligently recognizing collected workpiece images.
Machine vision technology has long faced many challenges, particularly the high reflectivity of metal surface parts, and stable high quality imaging has long been difficult. Machine vision techniques rely heavily on the quality of the acquired image, which in turn is affected by many factors. Wherein, for most workpieces, multiple surfaces may need to be detected, relying on manual flipping of the workpiece is obviously inefficient and unreliable, and the prior art typically uses other auxiliary means to capture images of the multiple surfaces of the workpiece.
Typical acquisition means include the use of super-telecentric lenses to acquire images from directly above the workpiece, the use of multiple cameras to acquire images from multiple sides, or the use of multiple mirrors to reflect images from different sides to one camera to acquire images, which can solve the problem of automatically acquiring images from multiple different surfaces of the workpiece to some extent using these prior art approaches.
However, in the process of implementing the technical scheme related to the embodiment of the present invention, it is found that the image acquisition mode in the prior art still has obvious defects: firstly, due to high reflection of the metal surface, the super-telecentric lens above the workpiece has extremely poor imaging effect (basically cannot image) on the metal upper surface; the side images are severely compressed, the resolution is insufficient, the imaging consistency is poor, images presented when the workpiece is placed at different positions are different, and when the workpiece is positioned at certain positions in the visual field, slight defects such as scratches cannot be obviously imaged, so that the detection of certain surface defects of the workpiece is very unstable. Secondly, the mode of a plurality of cameras is obviously high in cost, complex in light path and not easy to realize. The multi-mirror approach is also too complex to be implemented in a limited space. In addition, on an automatic detection assembly line, a workpiece usually keeps a motion state, and the effective position alignment is difficult to ensure in the dynamic detection process by the acquisition mode in the prior art, so that an ideal acquisition image cannot be obtained, the imaging quality is poor, the precision is low, and the detection rate of the surface defects of the workpiece is low.
Disclosure of Invention
Aiming at the technical problems in the prior art, the embodiment of the invention provides a high-precision imaging system, a high-precision imaging method, an image acquisition device and detection equipment, so as to solve the problem of poor dynamic detection imaging quality in the prior art.
A first aspect of an embodiment of the present invention provides a high-precision imaging system, including: a first point light source 120 and/or a second point light source 130, and an ultra-telecentric lens 110; wherein the super telecentric lens 110 and the first point light source 120 are disposed on the same side of a first plane to be imaged; and/or the super telecentric lens 110 and the second point light source 130 are disposed on the same side of the second plane to be imaged.
In some embodiments, the first point light source 120 and/or the second point light source 130 has more than two different color regions.
In some embodiments, the first point light source 120 and/or the second point light source 130 has three different color regions distributed in a Y-shape.
In some embodiments, the lens optical axis of the super telecentric lens 110 is disposed obliquely with respect to the first plane to be imaged; and/or the lens optical axis of the super telecentric lens 110 is arranged obliquely with respect to the second plane to be imaged.
In some embodiments, the first point light source 120 has a center point O and a boundary point B, and the angle OPB is not greater than 12 degrees for any point P on the first plane to be imaged within the field of view of the super telecentric lens.
In some embodiments, the first point light source 120 and/or the second point light source 130 is generated by a display device.
In some embodiments, in the imaging system: the super telecentric lens (110) has a faithless, and the spatial distance between the mirror point of faithless of the super telecentric lens (110) relative to the first plane to be imaged and the center of the first point light source (120) is not more than a first error range; and/or the spatial distance between the mirror point of faithless of the super-telecentric lens 110 relative to the second plane to be imaged and the center of the second point light source 130 does not exceed a first error range; wherein the first error range is within 40 mm.
In some embodiments, the first error range is within 20 mm.
A second aspect of an embodiment of the present invention provides a high-precision imaging system including: a super telecentric lens 210, a first point light source 220, and an object carrying stage 240; wherein,
The included angle between the lens optical axis of the super-telecentric lens 210 and the normal line of the carrying platform 240 is 15-70 degrees;
the first point light source 220 and the super telecentric lens 210 are both disposed on a first side of the carrying platform 240.
In some embodiments, the imaging system further comprises a second point light source 230, the second point light source 230 being disposed on a second side of the loading platform 240.
In some embodiments, the super telecentric lens 210 has faithless, the faithless is spaced apart from the center of the first point light source 220 by no more than a first error range, which is less than 40mm, relative to the image point of the first side surface of the loading platform 240.
In some embodiments, the faithless of the super-telecentric lens 210 is spaced apart from the center of the second point light source 230 by no more than a first error range with respect to an image point of a vertical plane of the stage 240.
In some embodiments, the first point light source 220 and/or the second point light source 230 have more than two different color regions.
In some embodiments, the first point light source 220 and/or the second point light source 230 have three different color regions distributed in a Y-shape.
In some embodiments, the first point light source 220 and/or the second point light source 230 are generated by a display device.
In some embodiments, the first point light source 220 has a center point O and a boundary point B, with an angle OPB of no more than 12 degrees for any point P on the first side surface of the object-carrying platform 240 within the field of view of the super telecentric lens.
In some embodiments, the first error range is within 20 mm.
A third aspect of the embodiments of the present invention provides an image capturing device, including an image sensor and an imaging system as described above, where the image sensor is configured to capture an optical image output by the super-telecentric lens.
In some embodiments, the target surface of the image sensor is disposed obliquely with respect to the lens optical axis of the super-telecentric lens.
A fourth aspect of embodiments of the present invention provides a high precision imaging method for obtaining images of a plurality of surfaces of an object to be inspected using an imaging system as described above.
A fifth aspect of an embodiment of the present invention provides a detection apparatus, including: the system comprises an object carrying platform, an image acquisition device, an image recognition device and an imaging system as described above; the object carrying platform can bear an object to be detected and dynamically move the object to be detected into or out of the visual field range of the lens; the imaging system is used for projecting light rays to the object to be detected and outputting an optical image through the lens; the image acquisition device is used for acquiring the optical image; the image recognition device is used for recognizing the collected optical image so as to detect the defect condition of the object to be detected.
According to the technical scheme provided by the embodiment of the invention, through the integrated corresponding arrangement of the ultra-telecentric lens and the point light source, the consistency and quality of imaging are effectively improved, and particularly, through the inclined arrangement of the lens, the imaging capability of fine defects of a workpiece is effectively improved, so that a high-precision and stable workpiece image can be obtained.
Drawings
The features and advantages of the present invention will be more clearly understood by reference to the accompanying drawings, which are illustrative and should not be construed as limiting the invention in any way, in which:
FIG. 1 is a schematic diagram of a high-precision imaging system according to some embodiments of the invention;
FIG. 2 is a schematic diagram of the imaging principle of an ultra-telecentric lens;
FIG. 3 is a schematic diagram of a high-precision imaging system according to further embodiments of the invention;
Fig. 4 is a block diagram showing an example of arrangement of a plurality of different color areas of a point light source according to some embodiments of the present invention;
Fig. 5 is a schematic structural view of an image pickup apparatus according to some embodiments of the present invention.
Detailed Description
In the following detailed description, numerous specific details are set forth by way of examples in order to provide a thorough understanding of the relevant disclosure. However, it will be apparent to one of ordinary skill in the art that the present invention may be practiced without these specific details. It should be appreciated that the terms "system," "apparatus," "unit," and/or "module" are used herein to describe various elements, components, portions or assemblies in a sequential order. However, these terms may be replaced with other expressions if the other expressions can achieve the same purpose.
It will be understood that when a device, unit, or module is referred to as being "on," "connected to," or "coupled to" another device, unit, or module, it can be directly on, connected to, or coupled to, or in communication with the other device, unit, or module, or intervening devices, units, or modules may be present unless the context clearly indicates an exception. Although the terms "top," "bottom," "front," "back," "side," etc. may be used herein to describe various example features and elements of the invention, these terms are used herein merely for convenience, e.g., in the direction of the examples depicted in the figures. Nothing in this specification should be construed as requiring a particular three-dimensional orientation of the structure in order to fall within the scope of the invention.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the scope of the invention. As used in the specification and in the claims, the terms "a," "an," "the," and/or "the" are not specific to a singular, but may include a plurality, unless the context clearly dictates otherwise. In general, the terms "comprises" and "comprising" are intended to cover only those features, integers, steps, operations, elements, and/or components that are explicitly identified, but do not constitute an exclusive list, as other features, integers, steps, operations, elements, and/or components may be included. For example, the term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.
These and other features and characteristics of the present invention, as well as the methods of operation and functions of the related elements of structure, the combination of parts and economies of manufacture, may be better understood with reference to the following description and the accompanying drawings, all of which form a part of this specification. It is to be expressly understood, however, that the drawings are for the purpose of illustration and description only and are not intended as a definition of the limits of the invention. It will be understood that the figures are not drawn to scale.
Various block diagrams are used in the description of the various embodiments according to the present invention. It should be understood that the foregoing or following structures are not intended to limit the present invention. The scope of the invention is defined by the appended claims.
The prior art hopes to improve the efficiency and accuracy of workpiece detection through a machine vision technology, but for a plurality of surfaces of a workpiece, the image acquisition mode of the prior art is often over-ideal or complex in design, the imaging quality of the acquired image cannot be ensured, the requirement of dynamic detection cannot be met, the requirement of increasingly severe workpiece surface defect detection cannot be met, and the method is especially not suitable for detecting metal surface parts. In view of the above, the embodiment of the invention provides a high-precision imaging system, which effectively improves the consistency of illumination and imaging through the integrated corresponding arrangement of the ultra-telecentric lens and the point light source, and can obtain a plurality of surface images of a workpiece with high precision and stability.
In one embodiment of the present invention, as shown in fig. 1, the high-precision imaging system includes: a first point light source 120 and/or a second point light source 130, and an ultra-telecentric lens 110; wherein the super telecentric lens 110 and the first point light source 120 are disposed on the same side of a first plane to be imaged; and/or the super telecentric lens 110 and the second point light source 130 are disposed on the same side of the second plane to be imaged.
In an embodiment of the invention, the high precision imaging system is used for simultaneously imaging a plurality of surfaces of an object (workpiece) to be detected. The super-telecentric lens (HYPERCENTRIC/PERICENTRIC LENS) is a special lens, and is different from other lenses, and has two key characteristics, namely, the entrance pupil of the super-telecentric lens is positioned in front of the physical lens; the other is that it can image the surface of the object parallel to the optical axis, i.e. both the top and the sides of the subject can be seen in the image. Thus, as shown in FIG. 2, the super-telecentric lens is capable of providing a converging view of the subject, i.e., the captured images are convergent, resulting in simultaneous images of the top and sides of the subject. However, as described in the background section, the use of ultra-telecentric lenses is still limited by a number of factors, and typically the imaging quality is poor. In an embodiment of the invention, in order to acquire a clear workpiece image through the ultra-telecentric lens, point light source auxiliary illumination matched with the workpiece image is further provided. In the embodiment of the invention, at least one point light source is provided, the super-telecentric lens and the point light source are arranged on the same side of the plane to be imaged, and the obliquely arranged super-telecentric lens can effectively receive the light reflected by the point light source through the plane to be imaged: on one hand, the embodiment of the invention avoids the shielding of the light source to the view field of the lens; on the other hand, the front high reflection light is not generated, and the imaging quality is high; meanwhile, as a plurality of reflectors are not needed to guide light, the light-emitting quality is improved, meanwhile, the light path system is simplified, the cost is reduced, the integration level is improved, and the system can be further miniaturized and facilitated. In the embodiment of the invention, the point light source refers to a micro light source with a smaller light emitting area, and is not limited to a point light emitting object. More specifically, in the embodiment of the present invention, the point light source refers to a miniature light source with a light emitting area not exceeding 1000 square millimeters, and more preferably, a light emitting area not exceeding 500 square millimeters. The point light source can be in any shape such as a circle, an ellipse, a rectangle and the like, and preferably, the radius of the circumcircle of the point light source in the embodiment of the invention is not more than 20mm, more preferably not more than 10mm; or the circumscribed rectangle of the point light source in the embodiment of the invention is not more than 20mm by 20mm, preferably not more than 20mm by 10mm, and more preferably not more than 10mm by 10mm. In fact, the point light source according to the embodiments of the present invention can achieve an effect by having a smaller light emitting area than a conventional surface light source, and the specific shape and size of the point light source are not limited.
Further, in order to ensure effective illumination, the positions of the point light sources and the ultra-telecentric lens have a certain corresponding relationship. Preferably, the super telecentric lens 110 has faithless 112,112, and the spatial distance between the mirror point of the faithless 112,112 relative to the first plane to be imaged 141 and the center of the first point light source 120 is not more than a first error range; and/or the spatial distance between the mirror point of faithless of the super-telecentric lens 110 relative to the second plane to be imaged and the center of the second point light source 130 does not exceed the first error range. In an embodiment of the present invention, the super telecentric lens 110 has a faithless (or focus point, convergence Point, CP), the faithless is an entrance pupil center of the super telecentric lens 110, the faithless has a first image point relative to the first plane to be imaged 141, and a spatial distance between a center of the first point light source 120 and the first image point is not greater than a first error range. The imaging system in the embodiment of the invention is mainly used for acquiring images of a plurality of surfaces of an object to be detected (workpiece, micro part and the like), wherein the object to be detected is usually placed above the carrying platform and is parallel (or approximately parallel) to the upper surface of the carrying platform. The first to-be-imaged plane 141 in this embodiment of the present invention refers to a main to-be-detected surface of the to-be-detected object, and generally refers to an upper surface (of course, other side surfaces are also possible, and the upper surface is taken as an example herein and hereinafter, this is not meant to exclude the possibility of other side surfaces), and the light emitted by the first point light source 120 is reflected by the first to-be-imaged plane 141 (the upper surface of the workpiece) and then enters the lens 110 to form an optical image, and then the defect of the to-be-detected object can be detected according to the optical image through manual or machine vision (after the image is acquired by using an image sensor or the like for recognition).
Faithless of the ultra-telecentric lens can be determined by a test method, for example, the target surface of a sensor corresponding to the ultra-telecentric lens is replaced by flat light, and the lens is in a light-emitting structure; a piece of white paper (the distance between the white paper and the front end of the lens is different, and the size of the light spot is also different) is placed in front of the lens, and when the diameter of the light spot approaches to the light spot (i.e. the minimum area), the position of the light spot (light spot) is the position of faithless of the super telecentric lens. The super-telecentric lens faithless is typically located further from the lens, typically with the object to be inspected positioned between the lens and faithless (i.e., the lens is above the workpiece and faithless is below the workpiece), so that the first image point of faithless relative to the first plane to be imaged (upper surface of the workpiece) is also above the workpiece. In the embodiment of the invention, the first point light source is arranged near the first mirror image point (the space distance does not exceed the first error range), so that light emitted by the point light source can effectively enter the ultra-telecentric lens after being reflected by the first plane to be imaged (the upper surface of the workpiece), and stray light rays with other angles are prevented from entering the ultra-telecentric lens after being reflected, so that defect imaging is inhibited, and clear and stable imaging is ensured.
Of course, it will be understood by those skilled in the art that the above-mentioned setting of the first point light source near the first mirror point may be to set the position of the super-telecentric lens first and then correspondingly adjust the position setting of the first point light source, or may be to set the position of the first point light source first and then correspondingly adjust the position setting of the super-telecentric lens, so long as the relative positional relationship between the first point light source and the second point light source is ensured, and the specific setting mode should not be regarded as limiting the embodiment of the present invention. More specifically, the first point light source may have a light emitting area, and positioning the first point light source near the first mirror point preferably means that the center of the first point light source coincides with the first mirror point. Since the shape of the first point light source is not necessarily a regular shape, the center of the circumscribed rectangle of the boundary curve of the light emitting surface of the first point light source is taken as the center of the first point light source for an irregular shape without a clear center. In addition, the above-mentioned form of overlapping two points is only the most preferable embodiment, and in fact, a certain deviation of the spatial distance between two points may also solve the problem, and usually the deviation does not exceed the first error range. The first error range is generally within 40mm (or, within 30% of the distance from the lens faithless to the front end of the super-telecentric lens, more specifically, the distance from the lens faithless to the front end of the super-telecentric lens refers to the distance from the lens faithless to the midpoint of the object side of the super-telecentric lens, which is measured on the first lens surface) according to the accuracy requirements of imaging and/or detection; for scenes with high precision requirements, the distance from the lens faithless to the front end of the super-telecentric lens can be within 30mm, 20mm, or even within 10mm (or within 22%, 15%, or even within 7% of the distance from the lens faithless to the front end of the super-telecentric lens). Meanwhile, the positions of the super-telecentric lens and the first point light source can be manually or automatically adjusted, and the space distance between the super-telecentric lens and the first point light source can be dynamically adjusted according to the actual imaging quality or precision requirement in the detection process.
In one embodiment of the present invention, the first point light source 120 may be implemented in a variety of ways, and some specific arrangements may be made to obtain more desirable outgoing light. Preferably, the first point light source 120 has more than two different color areas; more preferably, the first point light source 120 has three different color areas distributed in a Y shape. Some embodiments of the preferred embodiments are shown in fig. 4 as I-IV, for example, for a circular or rectangular point light source, the point light source may be divided into left and right two different color areas, and further the colors may be red and green, respectively; the color-changing material can be divided into three different color areas distributed in Y shape, and further the colors can be red, green and blue. In another preferred embodiment of the present invention, the first point light source 120 may also be a point light source in the embodiment of the present invention obtained by a display device, such as various existing display panels or display screens, including but not limited to a liquid crystal screen (LCD or LED format, etc.), a CRT display screen, a PDP display screen, etc., which emits light by masking or displaying only in a designated area; furthermore, the point light source can be realized at any appointed position, so that the position setting of the point light source is more flexible and quick, and the system can be more conveniently configured and adjusted. By arranging more than two different color areas in the preferred embodiment of the invention, the emergent light projected on the object to be detected can have different color areas, and further the images collected from different directions can show different color effects, so that the fine defects on the object to be detected (miniature workpiece) can show obvious differences in the collected images (the surface of the workpiece at the defect position has geometrical differences, and the collected images show color differences at the position), thereby improving the imaging quality of the defect position, improving the precision and accuracy of defect detection, and being applicable to dynamic detection.
In a preferred embodiment of the invention, the position of the lens can be further optimized. Preferably, the lens optical axis 111 of the super telecentric lens 110 is disposed obliquely with respect to the first plane to be imaged 141; more preferably, the included angle between the lens optical axis 111 of the super telecentric lens 110 and the normal line of the first plane to be imaged 141 is 15-70 degrees. Through the slope setting of camera lens, provide bigger more free adjustment space for the position of pointolite, not only make things convenient for the setting of pointolite, also make the position of pointolite have certain off-angle for the camera lens, avoided the shielding to the camera lens promptly, can avoid the mechanical interference between light and the device again, therefore realized better imaging quality.
In a preferred embodiment of the invention, the light emitting area of the point light source has a certain boundary. For example, the first point light source 120 has a center point O and a boundary point B, and the angle OPB is not greater than 12 degrees for any point P in the field of view of the super telecentric lens on the first plane to be imaged. Further, the angle OPB does not exceed 9 degrees or even 7 degrees. The definition of the center point O of the first point light source is the same as before, the center point O is the geometric center, and for the irregular shape without the definite center, the center of the circumscribed rectangle of the boundary curve of the light emitting surface of the first point light source is used as the center of the first point light source. The distance from each boundary point B to the center point O should generally be equal (i.e. the boundary is preferably circular or nearly circular), whereas for non-circular light emitting surfaces, the boundary point B is a point on the largest inscribed circle of the smallest bounding rectangle of the boundary curve of the light emitting surface of the first point light source. By limiting the size of the light emitting area, the divergence degree of the light emitted by the light source can be controlled, so that the final emergent light has a better illumination angle matched with the lens. With this preferred embodiment, the light from the point light source is irradiated onto the metal surface (the surface of the metal product or the surface of any product plated with metal), and a clear image of the metal surface is obtained through the super-telecentric lens. Typical metal plated surfaces are usually nickel plated, chrome plated, zinc plated, etc., but it is apparent that other forms are also suitable for use in the present invention, and no specific limitation is placed herein on the specific form of the metal surface. By adopting the technical scheme provided by the embodiment of the invention, the metal surface with high reflection property can have excellent imaging effect, and the technical problem which cannot be solved for a long time in the prior art is effectively solved.
In the preferred embodiment of fig. 1, the imaging system may further include a second point source 130, and the mirror point of faithless of the super-telecentric lens 110 relative to the second plane to be imaged 142 is spaced from the center of the second point source 130 by no more than a first error range. Wherein the second to-be-imaged plane refers to another to-be-detected surface of the to-be-detected object, for example, when the first to-be-imaged plane is an upper surface of the to-be-detected object (workpiece), the second to-be-imaged plane may be one side surface of the to-be-detected object (workpiece); when the first plane to be imaged is one side of the workpiece, the second plane to be imaged may be the upper surface or the other side of the workpiece. The specific form of the first plane to be imaged and the second plane to be imaged is not limited here, as long as they are two different surfaces of the object to be detected. The definition of point light sources has been described above, and is not limited to a small light emitting area, but is a small light source. The concept of the center of the second point light source is similar to that of the first point light source, the geometric center is referred to when the geometric center exists, and the center of the circumscribed rectangle of the boundary curve of the luminous surface is taken as the center of the point light source for the irregular shape without the clear center. The logic for the first error range is also similar to that described above, and is typically within 40mm (or, within 30% of the distance from the lens faithless to the front of the super-telecentric lens, more specifically, the distance from the lens faithless to the front of the super-telecentric lens is the distance from the lens faithless to the center point of the object side of the super-telecentric lens on the first lens surface) depending on the accuracy requirements of imaging and/or detection; for scenes with high precision requirements, the distance from the lens faithless to the front end of the super-telecentric lens can be within 30mm, 20mm, or even within 10mm (or within 22%, 15%, or even within 7% of the distance from the lens faithless to the front end of the super-telecentric lens). The arrangement of the second point light source enables the side surface of the object to be detected to be effectively irradiated, so that reliable high-definition side surface imaging can be obtained through the lens, and simultaneous identification and detection of possible defects on the side surface of the workpiece are achieved.
It should be noted that, although some of the above embodiments are described only by taking the first point light source as an example, since the structure and principle of the second point light source are similar, the second point light source can obviously also be implemented in a similar manner, and the description thereof will not be repeated here. The corresponding conversion and/or transformation of the second point light source for the various implementations is not necessary for the person skilled in the art to carry out the inventive task and is also within the scope of the present invention.
The embodiment of the invention can collect images of a plurality of surfaces of the object to be measured through the ultra-telecentric lens, and through the arrangement of the first point light source and/or the second point light source in the preferred embodiment of the invention, the angle of light projected to the surface to be measured is standardized, the display of unnecessary stray light inhibition defects is avoided, and meanwhile, the position relation between the lens and the point light source is specially regulated so as to enable the imaging light path and the illumination light path to be matched with each other. Further through the slope setting of camera lens, the geometric characteristics on article surface that awaits measuring changes to the off-normal distribution from conforming to normal distribution relative to the camera lens optical axis, and then has further enlarged the imaging ability of fine defect, cooperates the angle assorted illumination light of integrative design, corresponds metal surface detectability and promotes by a wide margin. Through the setting of a plurality of different color areas in the preferred embodiment, can let the emergent light of projection on the article of waiting to detect have the subregion of different colours, based on the reflection relation of camera lens and illumination, and then the image that gathers from different directions can demonstrate different color effects, this makes the subtle defect on the article of waiting to detect (miniature work piece, metal surface etc.) can demonstrate apparent difference in gathering the image (defect part work piece surface has the geometric difference, gathering the image and can present the color difference here), thereby promoted defect part imaging quality, improved defect detection's precision and accuracy, and is applicable to dynamic detection.
Fig. 3 is a schematic structural diagram of a high-precision imaging system according to another embodiment of the present invention, and the preferred embodiment of fig. 3 is mainly to adjust the reference plane compared with fig. 1. In fig. 1, one surface (a first to-be-imaged plane) of the object to be detected is taken as a reference plane, and although the imaging effect is good in this embodiment, the object to be detected needs to be matched; in practical situations, in the system initialization installation configuration process, the specific situation of the object to be detected may not be known, and one object to be detected may not be placed in advance as a reference, so the embodiment of fig. 3 directly uses the object carrying platform as a reference.
Specifically, as shown in fig. 3, an embodiment of the present invention further provides a high-precision imaging system, including: a super telecentric lens 210, a first point light source 220, and an object carrying stage 240; wherein, the included angle between the lens optical axis 211 of the super telecentric lens 210 and the normal line of the carrying platform 240 is 15-70 degrees; the first point light source 220 and the super telecentric lens 210 are both disposed on a first side of the carrying platform 240. In the preferred embodiment of fig. 3, the super-telecentric lens 210 is disposed obliquely with respect to the stage 240, and the first point light source 220 and the super-telecentric lens 210 are disposed on the same side of the stage 240, typically above the stage, i.e., the side of the stage that is used to carry the object (workpiece) to be inspected. The concept of point light sources and the advantages of lens tilt arrangement are fully described in the previous embodiments, and the logic is similar and will not be repeated here.
In the preferred embodiment of fig. 3, the imaging system further comprises a second point light source 230, the second point light source 230 being arranged at a second side of the loading platform 240. The stage is usually a thin plate with a smaller thickness, and the thickness and the corresponding side elevation thereof are negligible, so that the first side and the second side of the stage are considered to be only the upper side and the lower side in the present invention, and therefore, when the first point light source 220 and the super-telecentric lens 210 are disposed above the stage 240, the second point light source 230 is disposed below the stage 240. To ensure efficient illumination of the second point light source, the carrying platform 240 is preferably a transparent platform.
Further, the super telecentric lens 210 has faithless to 212, and the spatial distance between the mirror point of the faithless to the first side surface 241 of the loading platform 240 and the center of the first point light source 220 is not more than a first error range. More preferably, the faithless is configured such that the spatial distance between the image point of the vertical plane 242 of the stage 240 and the center of the second point light source 230 does not exceed the first error range. Similar to the embodiment of fig. 1, when the super-telecentric lens is above the load platform, its faithless is generally below the load platform, the center of the first point light source 220 is preferably symmetrical to the faithless about the first side surface (upper surface) of the load platform (i.e., the center of the point light source coincides with the faithless mirror point); the center of the second point light source 230 is preferably symmetrical with respect to a vertical plane (which may be understood as a hypothetical workpiece side) of the carrier stage faithless. Through the corresponding arrangement mode of the lens and the point light source, light emitted by the point light source can effectively enter the ultra-telecentric lens after being reflected by the upper surface of the object carrying platform, so that clear and stable imaging is ensured. The concept of the center of the point light source is similar to the foregoing embodiment, and similar to the embodiment of fig. 1, the form that the center of the point light source coincides with the mirror image point is only the most preferred embodiment, and in fact, the problem can be solved just as well by having a certain deviation of the spatial distance between the two points, and the deviation does not exceed the first error range. The first error range is generally within 40mm (or, within 30% of the distance from the lens faithless to the front end of the super-telecentric lens, more specifically, the distance from the lens faithless to the front end of the super-telecentric lens refers to the distance from the lens faithless to the midpoint of the object side of the super-telecentric lens, which is measured on the first lens surface) according to the accuracy requirements of imaging and/or detection; for scenes with high precision requirements, the distance from the lens faithless to the front end of the super-telecentric lens can be within 30mm, 20mm, or even within 10mm (or within 22%, 15%, or even within 7% of the distance from the lens faithless to the front end of the super-telecentric lens).
In some embodiments of the present invention, the first point light source 220 and/or the second point light source 230 have more than two different color regions. More preferably, the first point light source 220 and/or the second point light source 230 have three different color areas distributed in a Y-shape. In some embodiments, the first point light source 220 and/or the second point light source 230 are generated by a display device. In some embodiments, the first point light source 220 has a center point O and a boundary point B, with an angle OPB of no more than 12 degrees for any point P on the first side surface of the object-carrying platform 240 within the field of view of the super telecentric lens.
In these embodiments, the point light sources are arranged in a manner similar to that of the related embodiment of fig. 1, and the specific principles, logic and functions are also substantially similar, which can be understood by referring to the description of the embodiment of fig. 1, and the description thereof will not be repeated here. However, it should be noted that, since the embodiment of fig. 3 uses the object carrying platform as a reference, there is still a certain difference from the actual plane to be imaged (the surface of the workpiece), and thus some errors will definitely occur, so there may be some influence on the accuracy of imaging. Typically, the embodiment of fig. 3 ensures that the desired imaging results are obtained for workpieces having a thickness of no more than 30 mm. Or in a scenario where the accuracy requirement is not too high, the embodiment of fig. 3 may solve the related technical problem; when the accuracy is high, the position of the super-telecentric lens and/or the point light source can be further finely adjusted (for example, the workpiece to be detected is adjusted to be in the form of the embodiment of fig. 1) on the basis of the embodiment of fig. 3, so as to obtain a more ideal imaging effect.
It should be understood by those skilled in the art that the preferred embodiment of fig. 1 or fig. 3 is merely an example, and in the technical solution of the present invention, the positional relationship of the first point light source and/or the second point light source only needs to ensure that a certain illumination range effectively falls within the field of view of the super-telecentric lens, and thus the preferred embodiment of fig. 1 or fig. 3 should not be regarded as limiting the specific implementation of the present invention.
In a preferred embodiment of the present invention, as shown in fig. 5, there is also provided an image acquisition apparatus including: an image sensor 560 and an imaging system as previously described, wherein the image sensor 560 is configured to capture an optical image output by the super telecentric lens 510. Preferably, the target surface of the image sensor 560 is disposed obliquely (indicated at 561) with respect to the lens optical axis 511 of the super telecentric lens 510. Typically, the photosurface device of the image sensor is a CMOS (Complementary Metal Oxide Semiconductor ) or CCD (Charge Coupled Device, charge coupled device) element, so the target surface of the image sensor described herein preferably refers to a CMOS target surface or a CCD target surface. Through the inclination setting of the sensor relative to the optical axis of the lens, the geometric deviation of the defect position of the workpiece can be enabled to be larger and more clearly deformed in the acquired image, so that the light difference of the defect position can be better reflected, and the detection capability of the system on the defect of the workpiece is further improved. When the lens is tilted, tan (T ')=mtan (T) is included in an angle T' of a normal line of the target surface of the image sensor/camera 560 with respect to the lens optical axis 511; t is an angle of the lens optical axis 511 relative to a normal line of the object carrying platform 540, and M is a lens magnification, specifically, a lens magnification at an intersection point position of the lens optical axis 511 and the object carrying platform 540 (or the upper surface of the workpiece/the first to-be-imaged plane 550). Of course, the inclination angle T' may deviate within 1 ° to 2 ° due to the presence of the higher order aberration.
Further, in one embodiment of the present invention, there is also provided a high-precision imaging method for obtaining images of a plurality of surfaces of an object to be inspected using the imaging system as described above.
Further, in one embodiment of the present invention, there is also provided a detection apparatus comprising a carrier platform, an image acquisition device (which may be in the form of an inclined arrangement of the embodiment of fig. 5), an image recognition device and an imaging system as described above; the object carrying platform can bear an object to be detected and dynamically move the object to be detected into or out of the visual field range of the lens; the imaging system is used for projecting light rays to the object to be detected and outputting an optical image through the lens; the image acquisition device is used for acquiring the optical image; the image recognition device is used for recognizing the collected optical image so as to detect the defect condition of the object to be detected. Preferably, detecting a defect condition of the object to be tested means: detecting whether the object to be detected has a defect, and when the object to be detected has the defect, further detecting the position and/or the type of the defect.
It should be understood by those skilled in the art that the various embodiments of the present invention are given by way of example only and not by way of limitation. Typically, the subject of the various positional relationships illustrated may be an objective subject, or a virtual image may be constructed by a plane mirror or other feasible means, such that the subject of the various positional relationships is a virtual image of the objective subject. Those skilled in the art can make various transformations of the exemplary positional relationships and their bodies without undue effort, and the results of such transformations should be considered to be within the scope of the claimed invention.
In summary, the embodiment of the invention provides a high-precision imaging system, a high-precision imaging method, an image acquisition device and a detection device, which effectively improve the consistency of imaging and can obtain a high-precision and stable workpiece image through the integrated corresponding arrangement of the ultra-telecentric lens and the point light source. More specifically, in the preferred embodiment of the invention, the imaging consistency of the part to be detected in the field of view of the lens is improved, the imaging effect of the defects can be further improved by setting the shape and/or the color of the luminous area in the imaging system, the defects of the illumination and imaging system affecting the imaging stability are further eliminated, and the better realization of the dynamic detection of the machine vision is ensured.
It is to be understood that the above-described embodiments of the present invention are merely illustrative of or explanation of the principles of the present invention and are in no way limiting of the invention. Accordingly, any modification, equivalent replacement, improvement, etc. made without departing from the spirit and scope of the present invention should be included in the scope of the present invention. Furthermore, the appended claims are intended to cover all such changes and modifications that fall within the scope and boundary of the appended claims, or equivalents of such scope and boundary.
Claims (16)
1. A high precision imaging system, the imaging system comprising: a first point light source and a second point light source, and an ultra-telecentric lens; wherein,
The super-telecentric lens and the first point light source are arranged on the same side of a first plane to be imaged, and the lens optical axis of the super-telecentric lens is obliquely arranged relative to the first plane to be imaged; and
The super-telecentric lens and the second point light source are arranged on the same side of a second plane to be imaged, and the lens optical axis of the super-telecentric lens is obliquely arranged relative to the second plane to be imaged;
wherein the first point light source and the second point light source are miniature light sources;
The super-telecentric lens is provided with faithless, and the space distance between the mirror image point of the faithless of the super-telecentric lens relative to the first plane to be imaged and the center of the first point light source is not more than a first error range; and/or
The space distance between the mirror image point of the faithless of the super telecentric lens relative to the second plane to be imaged and the center of the second point light source does not exceed a first error range;
wherein the first error range is within 40 mm.
2. The imaging system of claim 1, wherein the first point light source and/or the second point light source has more than two different color regions.
3. The imaging system of claim 2, wherein the first point light source and/or the second point light source has three different color regions distributed in a Y-shape.
4. The imaging system of any of claims 1-3, wherein the first point light source has a center point O and a boundary point B, and wherein the angle OPB is no greater than 12 degrees for any point P on the first plane to be imaged within the field of view of the super telecentric lens.
5. The imaging system of any of claims 1-3, wherein the first point light source and/or the second point light source is generated by a display device.
6. The imaging system of claim 1, wherein the first error range is within 20 mm.
7. A high precision imaging system, the imaging system comprising: the system comprises an ultra-telecentric lens, a first point light source and an object carrying platform; wherein,
The included angle between the lens optical axis of the super-telecentric lens and the normal line of the carrying platform is 15-70 degrees;
the first point light source and the super-telecentric lens are arranged on the first side of the carrying platform;
The super-telecentric lens is provided with faithless, and the space distance between an image point of the faithless relative to the first side surface of the carrying platform and the center of the first point light source does not exceed a first error range, and the first error range is less than 40 mm;
the imaging system further comprises a second point light source, wherein the second point light source is arranged on the second side of the carrying platform;
The super-telecentric lens and the second point light source are arranged on the same side of a second plane to be imaged, and the lens optical axis of the super-telecentric lens is obliquely arranged relative to the second plane to be imaged;
The spatial distance between the image point of the faithless of the super-telecentric lens relative to a vertical plane of the object carrying platform and the center of the second point light source does not exceed a first error range.
8. The imaging system of claim 7, wherein the first point light source (and/or second point light source) has more than two different color regions.
9. The imaging system of claim 8, wherein the first point light source and/or the second point light source has three different color regions distributed in a Y-shape.
10. The imaging system of any of claims 7 to 9, wherein the first point light source and/or the second point light source is generated by a display device.
11. The imaging system of any of claims 7 to 9, wherein the first point light source has a center point O and a boundary point B, and wherein the angle +.opb is no greater than 12 degrees for any point P on the first side surface of the stage that is within the field of view of the super telecentric lens.
12. The imaging system of claim 7, wherein the first error range is within 20 mm.
13. An image acquisition device comprising an image sensor and an imaging system according to any one of claims 1-12, wherein the image sensor is configured to acquire an optical image output by the ultra-telecentric lens.
14. The image acquisition device of claim 13, wherein the target surface of the image sensor is disposed obliquely with respect to the lens optical axis of the super-telecentric lens.
15. A high precision imaging method, characterized in that an imaging system according to any of claims 1-12 is used to obtain images of a plurality of surfaces of an object to be inspected.
16. A detection apparatus, characterized by comprising: a loading platform, an image acquisition device, an image recognition device and an imaging system according to any one of claims 1-12; wherein,
The object carrying platform can bear an object to be detected and dynamically move the object to be detected into or out of the visual field range of the lens;
the imaging system is used for projecting light rays to the object to be detected and outputting an optical image through the lens;
The image acquisition device is used for acquiring the optical image;
the image recognition device is used for recognizing the collected optical image so as to detect the defect condition of the object to be detected.
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| CN112098426B (en) | 2021-06-29 |
| CN112098426A (en) | 2020-12-18 |
| CN113466246A (en) | 2021-10-01 |
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