CN113355656A - Special graphite boat for tubular PECVD (plasma enhanced chemical vapor deposition) coating - Google Patents
Special graphite boat for tubular PECVD (plasma enhanced chemical vapor deposition) coating Download PDFInfo
- Publication number
- CN113355656A CN113355656A CN202110777810.8A CN202110777810A CN113355656A CN 113355656 A CN113355656 A CN 113355656A CN 202110777810 A CN202110777810 A CN 202110777810A CN 113355656 A CN113355656 A CN 113355656A
- Authority
- CN
- China
- Prior art keywords
- graphite boat
- graphite
- net
- hollow
- special
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 88
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 84
- 239000010439 graphite Substances 0.000 title claims abstract description 84
- 238000000576 coating method Methods 0.000 title claims abstract description 22
- 239000011248 coating agent Substances 0.000 title claims abstract description 21
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 title claims abstract description 21
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000000839 emulsion Substances 0.000 claims description 3
- 229910021389 graphene Inorganic materials 0.000 claims description 3
- 239000007888 film coating Substances 0.000 abstract description 10
- 238000009501 film coating Methods 0.000 abstract description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 5
- 229910052710 silicon Inorganic materials 0.000 abstract description 5
- 239000010703 silicon Substances 0.000 abstract description 5
- 229910021419 crystalline silicon Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000011712 cell development Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Plasma & Fusion (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The invention provides a special graphite boat for tubular PECVD (plasma enhanced chemical vapor deposition) coating, which comprises a plurality of graphite boat sheets which are sequentially arranged in parallel, wherein a plurality of hollow-out regions are formed on the graphite boat sheets, the hollow-out regions are sequentially arranged at intervals, and a plurality of clamping points are arranged around the positions, corresponding to the hollow-out regions, of the graphite boat sheets; the hollow-out area is covered with a graphite net. The graphite net replaces the hollow area of the original graphite boat piece, so that the discharge is uniform during film coating, the periphery of the coated silicon wafer is free from color difference, and the film coating quality is improved. Compared with the prior art, a hollowed-out area can be still opened on the graphite boat piece, and the graphite net is only additionally arranged on the hollowed-out area, so that the hollowed-out area extends to the corresponding clamping point position, the overall quality of the graphite boat is not increased, and the problem that the original graphite boat is not uniform in film coating is solved.
Description
Technical Field
The invention relates to a graphite boat special for tubular PECVD (plasma enhanced chemical vapor deposition) coating.
Background
In recent years, the solar photovoltaic industry has developed rapidly, many countries begin to develop solar energy resources gradually, new power for economic development is sought, among solar cells made of numerous materials, crystalline silicon cell processes and materials have developed gradually, and in consideration of the natural environment and the influence on human health, the crystalline silicon solar cells are advancing towards more environmental protection, and the crystalline silicon solar cells can be expected to remain the mainstream direction of solar cell research in future, so that the key problem of restricting the solar cell development is that the cost is reduced and the conversion efficiency is improved.
At present, the tubular PECVD is widely applied to solar cell coating as the most mature coating method at present, a tubular PECVD loading and unloading silicon wafer is attached to a graphite boat sheet to be clamped at a clamping point, the weight of the graphite boat needs to be reduced due to the structural limitation of a tubular PECVD transmission system, and a plurality of hollowed-out through holes are usually arranged on the graphite boat sheet to reduce the quality of the graphite boat. However, after the graphite boat piece is provided with the hollowed-out through holes, the electric field is not uniform, so that the condition of non-uniform film coating on the surface of the silicon wafer can occur during film coating, a circle of chromatic aberration exists around the hollowed-out through holes, and the thickness of the film coating at the position, corresponding to the hollowed-out through holes, on the silicon wafer is thinner, so that the film coating quality is greatly influenced;
disclosure of Invention
The invention aims to solve the technical problem of providing a tubular PECVD coating special graphite boat which is reasonable in structure and uniform in coating.
In order to solve the technical problem, the invention provides a tubular special graphite boat for PECVD (plasma enhanced chemical vapor deposition) coating, which comprises a plurality of graphite boat sheets which are sequentially arranged in parallel, wherein a plurality of hollow-out regions are formed on the graphite boat sheets, the hollow-out regions are sequentially arranged at intervals, and a plurality of clamping points are arranged around the positions, corresponding to the hollow-out regions, of the graphite boat sheets;
the hollow-out area is covered with a graphite net.
In order to more clearly understand the technical content of the present invention, the tube-type PECVD coating dedicated graphite boat is simply referred to as the present dedicated graphite boat hereinafter.
Preferably, the graphite mesh comprises a frame body and a mesh surface, the mesh surface is tensioned in the frame body, the outline of the frame body is consistent with the outline of the corresponding hollow area on the graphite boat piece, the frame body is fixedly connected with the graphite boat piece at the periphery of the corresponding hollow area, and the mesh surface completely covers the hollow area.
As the special graphite boat is preferred, the net surface of the graphite net is selected from 10 meshes to 1000 meshes.
Preferably, the special graphite boat is characterized in that the side frame body of the graphite net is fixedly connected with the graphite boat piece through a ceramic buckle.
Preferably, the net surface is a metal net with a graphite emulsion coating or a metal net with a graphene coating.
Preferably, the hollowed-out area extends to the position corresponding to the stuck point.
After the structure is adopted, the graphite net replaces the hollow-out area of the original graphite boat piece, so that the discharge is uniform during film coating, the periphery of the coated silicon wafer is free from color difference, and the film coating quality is improved. Compared with the prior art, a hollowed-out area can be still opened on the graphite boat piece, and the graphite net is only additionally arranged on the hollowed-out area, so that the hollowed-out area extends to the corresponding clamping point position, the overall quality of the graphite boat is not increased, and the problem that the original graphite boat is not uniform in film coating is solved.
Drawings
FIG. 1 is a top view of the graphite boat in the first embodiment.
FIG. 2 is a front view of a graphite boat piece in a first embodiment of the present dedicated graphite boat.
FIG. 3 is a second front view of a graphite boat piece in the first embodiment of the present dedicated graphite boat.
FIG. 4 is a front view of a graphite boat piece in the second embodiment of the present dedicated graphite boat.
Detailed Description
Example one
As shown in fig. 1 to 3 (four graphite nets 2 are omitted in fig. 3)
The special graphite boat comprises a plurality of graphite boat sheets 1 which are sequentially arranged in parallel.
Four hollow areas 11 are arranged on each graphite boat piece 1, the four hollow areas 11 are sequentially and uniformly arranged at intervals along the length direction of the graphite boat piece 1, a plurality of clamping points 12 are arranged around the positions, corresponding to the hollow areas 11, of the graphite boat piece 1, and the hollow areas 11 extend to the positions, corresponding to the clamping points 12.
Every fretwork area 11 of graphite boat piece 1 all covers graphite net 2, and graphite net 2 includes frame body 21 and wire side 22, and wire side 22 tensioning is in frame body 21, frame body 21 outline with the last fretwork area 11 profile that corresponds of graphite boat piece 1 is unanimous, and 700 meshes are chooseed for use to the wire side 22 of graphite net 2, and frame body 21 is fixed with the graphite boat piece 1 that is in corresponding fretwork area 11 periphery, frame body 21 with through ceramic buckle 23 fixed connection between the graphite boat piece 1, and wire side 22 covers fretwork area 11 completely.
In this embodiment, the mesh surface 22 is a metal mesh coated with graphite emulsion, the thickness of the graphite layer is 1nm to 1mm, the metal mesh can be coated with carbon slurry, physically vapor deposited or chemically vapor deposited, and various metals (such as gold, silver, copper, stainless steel, titanium, iridium, etc.) which can resist the temperature of 400 ℃ can be used.
Example two
As shown in FIG. 4 (five graphite nets 2 are omitted in FIG. 4)
The present embodiment is different from the first embodiment only in that: five hollow areas 11a are arranged on each graphite boat sheet 1a, the net surface of the graphite net is a metal net with a graphene coating, and the mesh number of the net surface is 20 meshes.
The embodiment can achieve the technical effect similar to that of the embodiment, but the uniformity of the subsequent coating is slightly inferior to that of the first embodiment.
While only two embodiments of the present invention have been described, it should be understood that various changes and modifications can be made by one skilled in the art without departing from the spirit of the invention, and these changes and modifications should be construed as falling within the scope of the invention.
Claims (6)
1. The utility model provides a special graphite boat of tubular PECVD coating film, includes a plurality of graphite boat pieces of parallel arrangement in proper order, it has a plurality of fretwork regions to open on the graphite boat piece, and a plurality of fretwork regions are interval arrangement in proper order, be equipped with a plurality of stuck points, characterized in that around the corresponding fretwork region position of graphite boat piece:
the hollow-out area is covered with a graphite net.
2. The graphite boat special for tubular PECVD coating film of claim 1, which is characterized in that:
the graphite net comprises a frame body and a net surface, the net surface is tensioned in the frame body, the outline of the frame body is consistent with the outline of a corresponding hollow area on the graphite boat piece, the frame body is fixedly connected with the graphite boat piece at the periphery of the corresponding hollow area, and the net surface completely covers the hollow area.
3. The graphite boat special for tubular PECVD coating film as claimed in claim 2, wherein:
the screen surface of the graphite net is 10-1000 meshes.
4. The graphite boat special for tubular PECVD coating film as claimed in claim 2, wherein:
the side frame body of the graphite net is fixedly connected with the graphite boat piece through a ceramic buckle.
5. The graphite boat special for tubular PECVD coating film as claimed in claim 2, wherein:
the net surface is a metal net with a graphite emulsion coating or a metal net with a graphene coating.
6. The graphite boat special for tubular PECVD coating film of claim 1, which is characterized in that:
the hollow-out area extends to the position of the corresponding clamping point.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110777810.8A CN113355656A (en) | 2021-07-09 | 2021-07-09 | Special graphite boat for tubular PECVD (plasma enhanced chemical vapor deposition) coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110777810.8A CN113355656A (en) | 2021-07-09 | 2021-07-09 | Special graphite boat for tubular PECVD (plasma enhanced chemical vapor deposition) coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113355656A true CN113355656A (en) | 2021-09-07 |
Family
ID=77538866
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110777810.8A Pending CN113355656A (en) | 2021-07-09 | 2021-07-09 | Special graphite boat for tubular PECVD (plasma enhanced chemical vapor deposition) coating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113355656A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003249544A (en) * | 2002-02-26 | 2003-09-05 | Ge Speciality Materials Japan Kk | Electrostatic chuck and method of manufacturing the same |
| CN101008081A (en) * | 2007-01-29 | 2007-08-01 | 刘卓 | Graphite boat for silicon wafer production |
| CN108165955A (en) * | 2017-12-06 | 2018-06-15 | 中建材浚鑫科技有限公司 | A kind of novel graphite boat |
| CN212461624U (en) * | 2020-07-26 | 2021-02-02 | 浙江爱旭太阳能科技有限公司 | Graphite boat piece and graphite boat |
| CN112962086A (en) * | 2021-03-30 | 2021-06-15 | 江苏微导纳米科技股份有限公司 | Graphite boat piece and graphite boat |
| CN215103542U (en) * | 2021-07-09 | 2021-12-10 | 普乐新能源（蚌埠）有限公司 | Special graphite boat for tubular PECVD (plasma enhanced chemical vapor deposition) coating |
-
2021
- 2021-07-09 CN CN202110777810.8A patent/CN113355656A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003249544A (en) * | 2002-02-26 | 2003-09-05 | Ge Speciality Materials Japan Kk | Electrostatic chuck and method of manufacturing the same |
| CN101008081A (en) * | 2007-01-29 | 2007-08-01 | 刘卓 | Graphite boat for silicon wafer production |
| CN108165955A (en) * | 2017-12-06 | 2018-06-15 | 中建材浚鑫科技有限公司 | A kind of novel graphite boat |
| CN212461624U (en) * | 2020-07-26 | 2021-02-02 | 浙江爱旭太阳能科技有限公司 | Graphite boat piece and graphite boat |
| CN112962086A (en) * | 2021-03-30 | 2021-06-15 | 江苏微导纳米科技股份有限公司 | Graphite boat piece and graphite boat |
| CN215103542U (en) * | 2021-07-09 | 2021-12-10 | 普乐新能源（蚌埠）有限公司 | Special graphite boat for tubular PECVD (plasma enhanced chemical vapor deposition) coating |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69708463T2 (en) | Photovoltaic device which has an opaque substrate with a specific irregular surface structure | |
| CN215103542U (en) | Special graphite boat for tubular PECVD (plasma enhanced chemical vapor deposition) coating | |
| ES2380611T3 (en) | Method to produce a solar cell as well as solar cell produced by this method | |
| CA2325729A1 (en) | Method for making a photovoltaic cell containing a dye | |
| US20140360563A1 (en) | Solar cell interconnection method using a flat metallic mesh | |
| CN105206695B (en) | Flexible solar battery with back of the body protective layer and preparation method thereof | |
| JP2003282909A5 (en) | ||
| CN101315953A (en) | Back electrode suitable for thin solar cell and production method thereof | |
| AU2010202014A1 (en) | A light-transmission thin film solar module and a process thereof | |
| CN113355656A (en) | Special graphite boat for tubular PECVD (plasma enhanced chemical vapor deposition) coating | |
| CN113380917A (en) | Grid line preparation method, heterojunction battery preparation method and heterojunction battery | |
| CN109244156A (en) | More main grid solar battery positive electrode patterns | |
| CN106245009A (en) | A kind of flexible substrate silver CNT composite coating and preparation method and application | |
| Atabaev et al. | Fabrication of TiO2/CuO photoelectrode with enhanced solar water splitting activity | |
| DE112007001497B4 (en) | Process for producing a hydrogen separation membrane fuel cell | |
| JPS5982778A (en) | System and method for producing photocell device | |
| US20150352831A1 (en) | Screen Printing Apparatus Including Support Bars, And Methods Of Using Same | |
| CN109435443B (en) | Solar cell electroplating pattern screen printing plate and electroplating pattern manufacturing method thereof | |
| CN108677209B (en) | Ordered membrane electrode for solid polymer water electrolyzer and preparation method thereof | |
| CN218257261U (en) | Full-opening screen printing plate | |
| DE102010060297A1 (en) | Method for removing contamination from a reactor | |
| JPS61116883A (en) | Transparent electrode with metal wiring | |
| CN115015345B (en) | Non-modified flexible electrochemical sensor for rapidly detecting heavy metal ions and preparation method and application thereof | |
| WO2023208617A3 (en) | Nanostructured anode for a water electrolyzer | |
| JPS6320025B2 (en) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |