CN113340479A - Three-dimensional force flexible touch sensor based on eddy current and piezoelectric principle coupling - Google Patents
Three-dimensional force flexible touch sensor based on eddy current and piezoelectric principle coupling Download PDFInfo
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- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
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Abstract
The invention relates to a three-dimensional force flexible touch sensor based on eddy current and piezoelectric principle coupling, which comprises a quadrangular frustum pyramid-shaped body with a hollow structure and a single excitation coil positioned in the body; the side surface of the quadrangular frustum is surrounded by a PVDF film; the top surface of the quadrangular frustum is formed by a metal thin layer; the bottom surface of the quadrangular frustum is formed by a flexible substrate; the excitation coil is of a planar spiral structure and is positioned right below the metal thin layer; the exciting coil inputs sine alternating current and outputs an impedance signal. The invention utilizes the advantages of large dynamic response range of eddy current type touch sensing and high sensitivity of piezoelectric type touch sensing, processes and manufactures by a micromachining technology, realizes the purposes of simple structure, light and small size and contact force detection, and can be applied to the fields of bionic manipulators, artificial limbs and the like.
Description
Technical Field
The invention belongs to the field of touch sensing, and relates to a three-dimensional force flexible touch sensor based on eddy current and piezoelectric principle coupling.
Background
The sense of touch is an important sense when an organism is in contact with the outside, and humans can feel the shape, texture, quality, temperature, etc. of an object using the sense of touch, since intellectualization is an important direction for the development of robots in the future, which require reliable tactile sensing ability to accurately and properly manipulate an object in unstructured and complex environments, the development and application of tactile sensing technology is an important part of the development field of intelligent robots, and is widely applied to a variety of fields such as medical rehabilitation, health detection, mechanical grasping, and safety measurement. The working principle of the existing touch sensor mainly comprises capacitance type, piezoelectric type, eddy current type, resistance type and the like. Piezoelectric and eddy current applications are wide. The piezoelectric type touch sensor has the advantages of high sensitivity and good stability, and the eddy current type touch sensor has the advantages of large dynamic response range and linear output.
For a touch sensor, the large response range and the high sensitivity are two important metrics, and the relationship between the two is the trade-off. Most of the current touch sensors are based on one principle, so that the sensors cannot simultaneously consider a large response range and high sensitivity, and the application of the touch sensors in practice is limited. And for the touch sensing applied to the fields of bionic manipulators, artificial limbs and the like, the touch sensing device not only needs to have a large response range and high sensitivity, but also needs to have the characteristics of light and small size, simple structure and flexibility.
Therefore, it is very important to design a tactile sensor that satisfies the above characteristics.
Disclosure of Invention
In order to meet the requirements of large response range, high sensitivity and small size of the touch sensor, the invention provides the three-dimensional force flexible touch sensor based on the coupling of the eddy current and the piezoelectric principle.
In order to achieve the purpose, the invention adopts the following scheme:
the three-dimensional force flexible touch sensor based on the eddy current and piezoelectric principle coupling comprises a quadrangular frustum pyramid-shaped body with a hollow structure and a single excitation coil positioned in the body; the side surface of the quadrangular frustum is surrounded by a PVDF film; the top surface of the quadrangular frustum is formed by a metal thin layer; the bottom surface of the quadrangular frustum is formed by a flexible substrate; the excitation coil is of a planar spiral structure and is positioned right below the metal thin layer; the PVDF film can deform under the action of pressure; the exciting coil inputs sine alternating current and outputs an impedance signal.
The PVDF film generates electric charge on the surface after being stressed and deformed, the internal magnetic field of the sensor is changed, the impedance signal of the exciting coil is directly connected to the signal processing circuit, and the induction voltage is output after the signal processing circuit. The touch sensor needs to be small and thin in size, according to the eddy current principle, when eddy current is generated on the thin metal layer, the depth of a skin layer is generated, and through simulation experiments and application requirements of the sensor, the initial distance between the coil and the thin metal layer is set to be 500 micrometers. When a contact force is applied to the sensor, the distance between the excitation coil and the metal thin layer becomes small, and the PVDF film deforms.
As a preferred technical scheme:
in the three-dimensional force flexible touch sensor based on the coupling of the eddy current and the piezoelectric principle, the single excitation coil is bonded with the upper surface of the flexible substrate by using the liquid silicone (the other side of the carrier on which the copper coil is arranged is bonded with the flexible substrate). And the side surfaces surrounded by the metal thin layer and the PVDF film are bonded by liquid silica gel.
According to the three-dimensional force flexible touch sensor based on the coupling of the eddy current and the piezoelectric principle, the metal thin layer can deform under the action of pressure.
According to the three-dimensional force flexible touch sensor based on the coupling of the eddy current and the piezoelectric principle, the metal thin layer is of a layered structure with a certain thickness, the top view of the layered structure is rectangular, and the upper surface and the lower surface of the layered structure are corrugated. The maximum static friction force between the sensor and the surface of a contact object is increased by imitating mastoid lines and Meinasan corpuscles in human skin, and the sensitivity and the response speed of the sensor are improved.
According to the three-dimensional force flexible touch sensor based on the coupling of the eddy current and the piezoelectric principle, the metal thin layer is prepared by mixing copper powder or aluminum powder and liquid silica gel in a mixing ratio of 10:1, pouring the mixture into a mold, and standing the mold at normal temperature for 3 hours until the mixture is solidified. The proportioning can enable the metal thin layer to have metal properties, and also can enable the metal thin layer to have flexibility and be capable of bending deformation.
The three-dimensional force flexible touch sensor based on the coupling of the eddy current and the piezoelectric principle has the thickness of 100-300 microns; the ratio of the projection area of the metal thin layer on the plane where the excitation coil is located to the projection area of the excitation coil on the plane is 1: 1. It is verified that the ratio of the areas is more than 1 or less than 1, which has no great influence on the performance of the flexible tactile sensing unit based on the eddy current principle, and the ratio of the areas is set to 1 for convenience of manufacturing, experiments and calculation.
When the three-dimensional force flexible touch sensor based on the coupling of the eddy current and the piezoelectric principle does not deform, the four side surfaces of the quadrangular frustum pyramid have the same shape.
In the three-dimensional force flexible tactile sensor based on the coupling of the eddy current and the piezoelectric principle, the exciting coil is composed of a flexible carrier and a copper coil which is in a planar spiral structure on the flexible carrier.
In the three-dimensional force flexible tactile sensor based on the coupling of the eddy current and the piezoelectric principle, the excitation coil is formed by plating copper on a polyimide film (flexible carrier) by adopting a magnetron sputtering process. By adopting the magnetron sputtering process in the micro-processing process, the formed metal film has better compactness and is more tightly combined with the flexible substrate.
The three-dimensional force flexible touch sensor based on the coupling of the eddy current and the piezoelectric principle is characterized in that the flexible substrate is 200 microns thick and made of silicon gel. The artificial limb has the advantages of flexibility like human skin, deformation and elasticity, simple and rapid processing and manufacturing, low material cost, low price, higher tensile strength and impact strength than other flexible films, random bending when being applied to a bionic manipulator, an artificial limb and the like, and good application to a curved surface.
In the three-dimensional force flexible touch sensor based on the coupling of the eddy current and the piezoelectric principle, the deformation capacity of the PVDF film meets 0.083P +0.021 w; where P is the vertical pressure and w is the amount of deformation.
The working principle of the invention is described as follows:
when the touch sensor is subjected to external force, the PVDF film is compressed to deform, and the distance between the metal thin layer and the excitation coil is generatedChanging, function generator inputting sinusoidal alternating current I to exciting coil1Then an alternating magnetic field H is generated around the exciting coil1Meanwhile, the exciting coil outputs an impedance signal, the impedance signal is directly connected into the signal processing circuit and processed by the circuit to output an induced voltage, and according to the Faraday's law of electromagnetic induction, an eddy current I is generated on the surface of the metal thin layer2Eddy current I2Will generate an induced magnetic field H with the direction opposite to that of the alternating magnetic field2The alternating magnetic field changes, and the impedance and the induction voltage of the exciting coil change accordingly; at this time, charges are generated on the surface of the deformed PVDF film, so that the internal magnetic field of the touch sensor is changed, and the impedance and the induced voltage of the exciting coil are further changed.
The invention utilizes the advantages of large dynamic response range of eddy current type touch sensing and high sensitivity of piezoelectric type touch sensing to simultaneously apply two principles to the touch sensor, so that the touch sensor can simultaneously give consideration to large response range and high sensitivity; the overall size of the touch sensor is small by utilizing a micro-processing technology; the selected material is flexible, the weight is light, the touch sensor can be applied to a complex curved surface, the output signal is an alternating voltage signal, and the touch sensor can be directly connected to a signal processing circuit, so that the detection system of the touch sensor is simplified. Only a single coil is printed on the flexible substrate, thereby avoiding the complex wiring and signal crosstalk. The exciting coil adopts a plane spiral structure, so that high inductance and low resistance can be obtained, and the sensitivity and the resolution of the touch sensor are improved. The PVDF film has different directions of external force, the charge quantity generated on the surface of the film is different, and three-dimensional force detection can be realized; the structure is simple, the surface applying the contact force is not connected with any electric wire, and the damaged surface is easy to replace.
Has the advantages that:
(1) the three-dimensional force flexible touch sensor based on the eddy current and piezoelectric principle coupling has the advantages that the eddy current type touch sensor has large dynamic range response and the piezoelectric type touch sensor has high sensitivity, and the two principles are combined together, so that the high sensitivity is ensured while the large dynamic range response is realized;
(2) according to the three-dimensional force flexible touch sensor based on the coupling of the eddy current and the piezoelectric principle, the PVDF film is designed to surround the side surface of the three-dimensional force flexible touch sensor based on the coupling of the eddy current and the piezoelectric principle, when the external force direction applied to the touch sensor is different, the PVDF film deforms differently, the internal magnetic field of the touch sensor changes, and at the moment, the induction voltage output by the exciting coil changes accordingly, so that the three-dimensional force detection is realized;
(3) the three-dimensional force flexible touch sensor based on eddy current and piezoelectric principle coupling has simple structure and manufacturing process, and selects proper flexible materials, so that the sensing unit has the advantages of flexibility, simple structure and small size, and can be applied to the fields of bionic manipulators, artificial limbs and the like.
Drawings
FIG. 1 is a schematic diagram of the three-dimensional structure of a three-dimensional force flexible touch sensor based on the coupling of eddy current and piezoelectric principles;
FIG. 2 is a cross-sectional view of a three-dimensional force flexible touch sensor based on eddy current and piezoelectric principles coupling in accordance with the present invention;
FIG. 3 is a schematic plan view of an excitation coil according to the present invention;
FIG. 4 is a perspective view of a metal foil according to the present invention;
FIG. 5 is a top view of a metal foil of the present invention;
FIG. 6 is a longitudinal cross-sectional view of a metal sheet of the present invention;
FIG. 7 is a schematic diagram of the operation of the present invention;
FIG. 8 is a schematic structural view of the three-dimensional force flexible touch sensor of the present invention mounted on a bionic finger of a robot;
FIG. 9 is a schematic view of the direction of the vertical force 1;
FIG. 10 is a graph showing the results of a test corresponding to vertical force 1;
FIG. 11 is a schematic view of the direction of the sliding force 1;
FIG. 12 is a graph showing the results of the test corresponding to the sliding force 1;
FIG. 13 is a schematic view of the direction of the sliding force 2 and the vertical force 2;
FIG. 14 is a graph showing the results of the test for the sliding force 2 and the vertical force 2;
the bionic finger comprises a metal thin layer 1, a PVDF film 2, an excitation coil 3, a flexible substrate 4, a three-dimensional force flexible touch sensor 5 and a robot bionic finger 6.
Detailed Description
The invention will be further illustrated with reference to specific embodiments. It should be understood that these examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Further, it should be understood that various changes or modifications of the present invention may be made by those skilled in the art after reading the teaching of the present invention, and such equivalents may fall within the scope of the present invention as defined in the appended claims.
A three-dimensional force flexible touch sensor based on eddy current and piezoelectric principle coupling is shown in figures 1-3 and comprises a quadrangular frustum pyramid-shaped body with a hollow structure and a single excitation coil 3 positioned in the body; the side surface of the quadrangular frustum is surrounded by a PVDF film 2; the top surface of the quadrangular frustum is formed by a metal thin layer 1; the bottom surface of the quadrangular frustum is formed by a flexible substrate 4; the PVDF film can deform under the action of pressure. When the deformation is not generated, the four side surfaces of the quadrangular frustum are the same in shape.
The excitation coil is of a plane spiral structure and is positioned right below the metal thin layer; the exciting coil inputs sine alternating current and outputs impedance signals. The PVDF film generates electric charge on the surface after being stressed and deformed, the internal magnetic field of the sensor is changed, the impedance signal of the exciting coil is directly connected to the signal processing circuit, and the induction voltage is output after the signal processing circuit.
And the single excitation coil is bonded with the upper surface of the flexible substrate by using liquid silicone (the other side of the carrier on which the copper coil is arranged is bonded with the flexible substrate). And the side surfaces surrounded by the metal thin layer and the PVDF film are bonded by liquid silica gel.
The metal thin layer is prepared by mixing copper powder or aluminum powder and liquid silica gel in a mixing ratio of 10:1, pouring into a mold, and standing at normal temperature for 3 hours until solidification. The proportioning can enable the metal thin layer to have metal properties, and also can enable the metal thin layer to have flexibility and be capable of bending deformation. The metal thin layer is of a layered structure with a certain thickness (100-300 microns), the top view of the layered structure is rectangular, and the upper surface and the lower surface of the layered structure are corrugated. The maximum static friction force between the sensor and the surface of a contact object is increased by imitating mastoid lines and Meinasan corpuscles in human skin, and the sensitivity and the response speed of the sensor are improved. The ratio of the projection area of the metal thin layer on the plane where the excitation coil is located to the projection area of the excitation coil on the plane is 1: 1. It is verified that the ratio of the areas is more than 1 or less than 1, which has no great influence on the performance of the flexible tactile sensing unit based on the eddy current principle, and the ratio of the areas is set to 1 for convenience of manufacturing, experiments and calculation. The metal thin layer can deform under the action of pressure.
The exciting coil is composed of a flexible carrier and a copper coil which is in a spiral structure on the flexible carrier. The exciting coil is formed by plating copper on polyimide by adopting a magnetron sputtering process. By adopting the magnetron sputtering process in the micro-processing process, the formed metal film has better compactness and is more tightly combined with the flexible substrate.
The flexible substrate is of a layered structure and is made of silica gel. The artificial limb has the advantages of flexibility like human skin, deformation and elasticity, simple and rapid processing and manufacturing, low material cost, low price, higher tensile strength and impact strength than other flexible films, random bending when being applied to a bionic manipulator, an artificial limb and the like, and good application to a curved surface.
The three-dimensional force flexible touch sensor based on the eddy current and piezoelectric principle coupling has the capability of detecting the distribution condition of contact force.
The working principle of the invention is described as follows:
as shown in figure 7, when the three-dimensional force flexible touch sensor based on the coupling of the eddy current and the piezoelectric principle is subjected to an external force, the PVDF film is compressed and deformed, the distance between the metal thin layer and the excitation coil is changed, and a function generator inputs a sine alternating current I to the excitation coil1Then an alternating magnetic field H is generated around the exciting coil1While exciting the coil to output an impedance signalConnected to a signal processing circuit, processed by the circuit and then output induced voltage, and according to Faraday's law of electromagnetic induction, eddy current I is generated on the surface of the metal thin layer2Eddy current I2Will generate an induced magnetic field H with the direction opposite to that of the alternating magnetic field2The alternating magnetic field changes, and the impedance and the induction voltage of the exciting coil change accordingly; at this time, charges are generated on the surface of the deformed PVDF film, so that the internal magnetic field of the touch sensor is changed, and the impedance and the induced voltage of the exciting coil are further changed.
In order to verify the technical effect of the invention, the three-dimensional force flexible touch sensor based on the coupling of the eddy current and the piezoelectric principle, which is manufactured by the invention, has the following specific dimensions:
as shown in fig. 4-6, the thickness of the metal thin layer is 200 micrometers (i.e., m shown in fig. 6), the top view is square, and the side length is 4000 micrometers; the distance between the bumps on the upper and lower surfaces of the thin metal layer is 100 micrometers (i.e./in fig. 6); the ratio of the projection area of the metal thin layer on the plane where the excitation coil is located to the projection area of the excitation coil on the plane is 1: 1. The thickness of the PVDF film is 200 microns, and the included angles between the four side surfaces of the quadrangular frustum pyramid and the flexible substrate are 45 degrees. The flexible substrate is a square with a side length of 5000 microns in plan view and a thickness of 200 microns. The three-dimensional force flexible touch sensor prepared by the experiment of the invention has the size that the thickness is 700 micrometers and the area is 25mm2。
The specific using process is as follows: as shown in fig. 8, the three-dimensional force flexible tactile sensor 5 is mounted on a robot bionic finger 6, a sinusoidal alternating current is applied to an excitation coil 3 of the three-dimensional force flexible tactile sensor based on the coupling of the eddy current and the piezoelectric principle, when the robot bionic finger 6 contacts an object, and the surface of the three-dimensional force flexible tactile sensor based on the coupling of the eddy current and the piezoelectric principle is acted by an external force, the PVDF film 2 surrounds the side surface of the three-dimensional force flexible tactile sensor to be compressed to generate deformation, and at this time, the distance between the metal thin layer 1 and the excitation coil 3 is changed. According to the working principle of the three-dimensional force flexible touch sensor based on the coupling of the eddy current and the piezoelectric principle, the external force application condition can be known through the detection of the impedance and the induced voltage on the exciting coil 3, so that the operation state of the bionic finger 6 of the robot is further controlled.
The specific test process is as follows:
as shown in FIGS. 9-10, a vertical force 1 of 10N is applied to the thin metal layer of the sensor, and the curve of the detected output voltage is shown in FIG. 10. The maximum output signal amplitude is 4.97 volts. After 2.2 seconds, the 10N force was removed and the PVDF film began to discharge charge with a minimum output signal amplitude of-5.58 volts.
Next, as shown in fig. 11 to 12, a sliding force 1 of 10N is applied to the sensor, and when the sliding force is applied, the projected area of the thin metal layer on the excitation coil is reduced, causing a change in the magnetic field inside the sensor. Compared to fig. 10, the frequency of the output voltage change is higher, but the voltage value is smaller. The maximum amplitude at 1.9s is 0.397V. Thus, the form and value of the haptic signal can be distinguished by the change in the output voltage waveform.
Next, as shown in fig. 13 to 14, a sliding force 2 of 10N was applied to the sensor, and then a vertical force 2 of 3N was applied from the time of 1.6s with a cycle period of 5 s. When the vertical force 2 is applied, the output voltage value and the curve fluctuation range increase, and the maximum amplitude of the output voltage reaches 1.92V. When the vertical force 2 is removed, the output voltage value and the curve fluctuation range return to the original output state.
It can be seen from the analysis of the above simulation results that when the magnitude and direction of the force are changed, the deformation of PVDF is different, the distance between the metal thin layer and the excitation coil is reduced, the projection area is also reduced, and the output curves of the output voltages have obvious differences. Haptic signals can be distinguished according to output voltage amplitude and curve fluctuations. Thus, the tactile sensor can detect vertical and sliding forces.
Claims (10)
1. Three-dimensional flexible tactile sensor of power based on electric vortex and piezoelectricity principle coupling, its characterized in that: the excitation coil comprises a quadrangular frustum pyramid-shaped body with a hollow structure and a single excitation coil positioned in the body; the side surface of the quadrangular frustum is surrounded by a PVDF film; the top surface of the quadrangular frustum is formed by a metal thin layer; the bottom surface of the quadrangular frustum is formed by a flexible substrate; the excitation coil is of a planar spiral structure and is positioned right below the metal thin layer; the PVDF film can deform under the action of pressure; the exciting coil inputs sine alternating current and outputs an impedance signal.
2. The three-dimensional force flexible touch sensor based on eddy current and piezoelectric principle coupling according to claim 1, wherein the single excitation coil is bonded with the upper surface of the flexible substrate by liquid silicone.
3. The three-dimensional force flexible touch sensor based on eddy current and piezoelectric principle coupling according to claim 1, wherein the thin metal layer can be deformed under pressure.
4. The three-dimensional flexible force tactile sensor based on eddy current and piezoelectric principle coupling according to claim 1, wherein the metal thin layer is a layered structure with a certain thickness, the top view of the layered structure is rectangular, and the upper surface and the lower surface are corrugated.
5. The three-dimensional force flexible touch sensor based on eddy current and piezoelectric principle coupling of claim 1, wherein the metal thin layer is prepared by mixing copper powder or aluminum powder and liquid silica gel in a mixing ratio of 10:1, pouring into a mold, and standing at normal temperature for solidification.
6. The three-dimensional force flexible touch sensor based on eddy current and piezoelectric principle coupling of claim 1, wherein the four sides of the quadrangular frustum are the same shape when no deformation is generated.
7. The three-dimensional force flexible touch sensor based on eddy current and piezoelectric principle coupling of claim 1, wherein the excitation coil is composed of a flexible carrier and a copper coil with a planar spiral structure thereon.
8. The three-dimensional force flexible touch sensor based on eddy current and piezoelectric principle coupling of claim 7, wherein the excitation coil is formed by plating copper on polyimide by magnetron sputtering process.
9. The three-dimensional force flexible touch sensor based on eddy current and piezoelectric principle coupling according to claim 1, wherein the flexible substrate is made of silicon gel.
10. The eddy current and piezoelectric principle coupled based three-dimensional force flexible touch sensor according to claim 1, wherein the PVDF film has a deformation capability of 0.083P +0.021 ═ w; where P is the vertical pressure and w is the amount of deformation.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114076795A (en) * | 2021-11-16 | 2022-02-22 | 中国人民解放军空军工程大学 | Alternate induction type flexible eddy current array sensor and crack monitoring method thereof |
| CN114993165A (en) * | 2022-06-08 | 2022-09-02 | 中国科学技术大学 | Induction type flexible angle sensing film |
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