CN113333973A - Laser beam modulation method and system for processing fiber material - Google Patents
Laser beam modulation method and system for processing fiber material Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
- B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/16—Composite materials, e.g. fibre reinforced
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- Engineering & Computer Science (AREA)
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Abstract
本发明公开了一种用于加工纤维材料的激光光束调制方法及系统，所述调制系统包括：激光器，用于产生激光光束；扩束镜，用于增大激光光斑的直径；波片，用于调节激光光束的线偏振角度；偏振分光镜，用于消除激光光束中的垂直偏振分量；空间光调制器，用于调整激光加工区域的形态分布和能量分布，得到外圈能量低、内圈能量高的圆形加工区域；光学4f系统，对激光光束进行滤波和成像；聚焦组件，用于将多光束激光聚焦形成多个光斑；计算机，用于调控激光器输出激光光束的参数以及控制空间光调制器调整激光加工区域的形态分布和能量分布。
The invention discloses a laser beam modulation method and system for processing fiber materials. The modulation system includes: a laser, which is used to generate a laser beam; a beam expander, which is used to increase the diameter of the laser spot; It is used to adjust the linear polarization angle of the laser beam; the polarizing beam splitter is used to eliminate the vertical polarization component in the laser beam; the spatial light modulator is used to adjust the shape distribution and energy distribution of the laser processing area, so as to obtain low energy in the outer ring and lower energy in the inner ring. Circular processing area with high energy; optical 4f system for filtering and imaging the laser beam; focusing assembly for focusing multi-beam lasers to form multiple spots; computer for adjusting the parameters of the laser output laser beam and controlling the spatial light The modulator adjusts the morphological distribution and energy distribution of the laser machined area.
Description
Technical Field
The invention belongs to the technical field of laser beam modulation, and particularly relates to a laser beam modulation method and a laser beam modulation system for processing fiber materials.
Background
The aramid fiber is a composite material taking reinforcing base resin as a matrix, and is widely applied to the aerospace manufacturing industry due to the advantages of high strength, high modulus, low density, high temperature resistance, corrosion resistance and the like. However, aramid fiber is a typical difficult-to-process material, and has problems of good toughness, difficulty in cutting, and the like.
A large amount of heat generated by drilling cut aramid fiber materials by using a mechanical drilling method can enable resin to be melted and bonded on the machined surface of a workpiece and a drilling tool, so that the drilling quality is poor when the aramid fiber is drilled, the tool is seriously abraded, and the drilling efficiency is low.
When long pulse laser and continuous laser are used for carrying out laser hole making on aramid fibers, a large amount of heat generated by the aramid fibers causes thermal damage such as degradation and decomposition of a resin matrix locally, and a fiber/matrix interface is weakened due to polymer degradation, so that the aramid fiber materials have the defects of layering, napping, silk drawing and the like. When a single laser beam is used for processing, the processing efficiency is too low. And because the thermal conductivity of the aramid fiber composite material is low, when the single pulse energy is too large, the efficiency is high, but the hole making quality is poor, and the edge is easy to be burnt. When the pulse energy is too small, the thermal influence is small, but the processing efficiency is low, and even a hole cannot be cut. Therefore, when modulating the laser beam, it is necessary to reduce the energy of the outer edge of the laser processing region and increase the energy of the inner ring of the laser processing region, thereby reducing the thermal influence as much as possible and improving the hole forming quality while ensuring the processing efficiency.
Chinese patent publication No. CN212569305U discloses a laser beam shaping device, which comprises a laser, an adjusting component for adjusting the diameter of the laser, a spatial light modulator, a first convex lens, a second convex lens, a focusing objective lens and a working platform, which are sequentially arranged along a laser path; laser emitted by the laser is adjusted by the adjusting component and then is incident on the spatial light modulator to generate spatial shaping laser; the shaped space shaping laser is incident to a focusing objective lens through a first convex lens and a second convex lens in sequence, and is focused and irradiated on a material to be processed of the working platform through the focusing objective lens; the spatial light modulator, the first convex lens, the second convex lens and the focusing objective lens together form a 4F system. The laser beam shaping device can freely regulate and control the energy distribution, the appearance and the quantity of the light spots through the change of the loading phase of the spatial light modulator, and improves the quality and the efficiency of laser grooving.
Chinese patent publication No. CN106646895B discloses a laser beam shaping device and method based on a spatial light modulator, the device is composed of a laser, a beam expander, a first reflector, a shutter, a second reflector, the spatial light modulator, a first lens, a diaphragm, a beam splitter, a third reflector, a second lens, a workbench, a third lens, a CCD camera and a computer; firstly, designing a mask pattern according to the requirement of a target shape, then loading the obtained mask pattern on a spatial light modulator, removing high-order light of optical diffraction, transferring an image formed by zero-order light in a near field of the spatial light modulator to a surface to be processed by using an optical 4f system consisting of a first lens and a second lens, and finally observing by using a CCD (charge coupled device) camera; the invention does not need complex calculation, thus saving time; the laser beam of the final imaging is a parallel beam, and can be processed at any position after 3f, so that the limitation of depth of field is overcome; the influence of diffraction and interference can be effectively avoided, and the beam quality is improved.
Therefore, an effective laser beam modulation scheme is not provided in the prior art to solve the problem of heat influence in the laser drilling process of the fiber material; therefore, a laser processing method with high processing efficiency and without causing thermal damage to the hole edge is needed.
Disclosure of Invention
The invention aims to provide a laser beam modulation method and a laser beam modulation system for processing fiber materials, aiming at the problems in the prior art. The invention uses the spatial light modulator to split laser beams, improves the processing efficiency by adopting multi-beam parallel processing, and regulates and controls the energy distribution of a processing area by the multi-beam, so that the energy of the outer ring of the circular processing area is low, the energy of the inner ring is high, the processing efficiency is improved, and the minimum heat affected zone can be ensured.
In order to achieve the purpose, the invention adopts the technical scheme that:
a laser beam modulation system for processing a fibrous material, the modulation system comprising, in order along a laser beam propagation path:
a laser for generating a laser beam;
the beam expander is used for increasing the diameter of the laser facula;
the wave plate is used for adjusting the linear polarization angle of the laser beam emitted by the laser;
the polarization spectroscope is used for eliminating the vertical polarization component in the laser beam and reserving the horizontal polarization component in the laser beam;
the spatial light modulator is used for adjusting the form distribution and the energy distribution of the laser processing area to obtain a circular processing area with low outer ring energy and high inner ring energy; the outer ring energy is equal to the minimum cut-off energy required by the fiber material;
the optical 4f system is used for filtering and imaging the laser beam;
the focusing assembly is used for focusing the multi-beam laser to form a plurality of light spots;
and the computer is respectively connected with the laser and the spatial light modulator and is used for regulating and controlling the parameters of the laser beam output by the laser and controlling the spatial light modulator to adjust the morphological distribution and the energy distribution of the laser processing area.
Specifically, the optical 4f system comprises a first lens and a second lens, wherein the first lens and the second lens are coaxially arranged, and the back focal point of the first lens coincides with the front focal point of the second lens; the spatial light modulator is positioned on the front focal point of the first lens, and the focusing component is positioned on the rear focal point of the second lens.
Preferably, a turning mirror is arranged between the second lens and the focusing assembly, a focusing mirror group and an optical power sensor array are sequentially arranged on one side of the turning mirror, which is far away from the second lens, and the focusing mirror group and the second lens are coaxially arranged; the turning mirror comprises a first state and a second state, and the states of the turning mirror are switched under the control of a remote controller; when the turnover mirror is in the first state, the turnover mirror is parallel to the central axis of the second lens; when the turning mirror is in the second state, the included angle between the turning mirror and the central axis of the second lens is 45 degrees;
when the energy distribution of a laser processing area needs to be detected, the turning mirror is controlled to be switched to a first state through a remote controller, so that a laser beam is horizontally focused through the focusing mirror group; the focused laser beam is received by the optical power sensor array, and the energy distribution of the laser processing area is detected through the optical power sensor array;
when the fiber material needs to be drilled, the remote controller controls the turning mirror to be switched to the second state, and the laser beam enters the focusing assembly for focusing after being reflected by the turning mirror; the focusing assembly is used for focusing the laser beams to form light spots to carry out annular scanning hole making processing on the fiber material.
Particularly, the laser adopts an ultrafast laser, so that the processing precision of the micropores can be improved.
Specifically, the spatial light modulator is a pure-phase spatial light modulator, and is mainly used for adjusting the shape distribution and the energy distribution of a laser processing area.
Corresponding to the modulation system, the invention also provides a laser beam modulation method for processing the fiber material, which comprises the following steps:
s1, adjusting the diameter of the laser spot and the linear polarization angle of the light beam through a beam expander and a wave plate respectively;
s2, eliminating the vertical polarization component in the laser beam by the polarization beam splitter, and keeping the horizontal polarization component in the laser beam;
s3, obtaining the minimum cutting energy required by the fiber material according to the experimental research mechanism;
s4, splitting the single light beam through the spatial light modulator to form multiple light beams, and arranging multiple light beam spots in parallel to form a circle;
s5, adjusting the energy distribution of the multi-beam circular processing area to ensure that the energy of the outer ring is equal to the minimum cut-off energy and the energy of the inner ring is higher than the minimum cut-off energy;
and S6, focusing the adjusted multi-beam laser to form a plurality of light spots.
Specifically, before step S6, the energy distribution of the multi-beam circular processing region is also detected, and the energy distribution of the multi-beam circular processing region is adjusted based on the detection data.
Compared with the prior art, the invention has the beneficial effects that: (1) compared with single-beam light processing, the invention shapes the light into a plurality of beams of light through the spatial light modulator, improves the processing efficiency and simultaneously ensures the processing quality; (2) according to the invention, the minimum cutting energy required by the fiber material is obtained according to an experimental research mechanism, and the energy distribution of the circular processing area is adjusted through the spatial light modulator, so that the energy of the outer ring of the circular processing area is just equal to the minimum cutting energy (namely, the energy just cutting the fiber material), and the energy of the inner ring of the circular processing area is higher than the minimum cutting energy, thereby not only improving the punching efficiency of the fiber material, but also reducing the thermal damage influence of heat generated by laser processing on the hole edge, and avoiding the phenomena of burrs, layering, silk drawing and the like generated by the fiber material processing.
Drawings
Fig. 1 is a schematic structural diagram of a laser beam modulation system for processing a fiber material according to an embodiment of the present invention.
FIG. 2 is a schematic diagram of energy distribution of the outer ring and the inner ring of the circular processing area in the embodiment of the invention.
FIG. 3 is a schematic view of the scanning path of the multi-beam circular processing region in an embodiment of the present invention.
Fig. 4 is a schematic diagram of the effect of punching the aramid fiber material in the embodiment of the present invention.
In the figure: 1. a laser; 2. a beam expander; 3. a wave plate; 4. a polarizing beam splitter; 5. a first reflector; 6. a second reflector; 7. a spatial light modulator; 8. a first lens; 9. a second lens; 10. turning over the mirror; 11. a focusing lens group; 12. an array of optical power sensors; 13. a focusing assembly; 14. a fibrous material; 15. a three-dimensional displacement platform; 16. and (4) a computer.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1, the present embodiment provides a laser perforating system for fibrous materials, the perforating system comprising, in order along a laser beam propagation path:
a laser 1 for generating a laser beam;
the beam expander 2 is used for increasing the diameter of the laser facula;
the wave plate 3 is used for adjusting the linear polarization angle of the laser beam emitted by the laser 1;
the polarization spectroscope 4 is used for eliminating the vertical polarization component in the laser beam and reserving the horizontal polarization component in the laser beam;
a first mirror 5 and a second mirror 6 for changing the propagation path of the laser beam;
the spatial light modulator 7 is used for adjusting the form distribution and the energy distribution of the laser processing area to obtain a circular area with low outer ring energy and high inner ring energy; the outer ring energy is equal to the minimum cut-off energy required for the fibrous material 14;
the optical 4f system is used for filtering and imaging the laser beam;
the focusing assembly 13 is used for focusing the multi-beam laser to form a plurality of light spots which are arranged into a circular processing area;
the three-dimensional displacement platform 15 is used for clamping the fiber material 14 and adjusting the spatial position of the fiber material 14;
and the computer 16 is respectively connected with the laser 1, the spatial light modulator 7 and the three-dimensional displacement platform 15, and is used for regulating and controlling parameters of laser beams output by the laser 1, controlling the spatial light modulator 7 to adjust morphological distribution and energy distribution of a laser processing area, and controlling the three-dimensional displacement platform 15 to adjust the spatial position of the fiber material 14.
Specifically, the optical 4f system comprises a first lens 8 and a second lens 9, wherein the first lens 8 and the second lens 9 are coaxially arranged, and the back focal point of the first lens 8 coincides with the front focal point of the second lens 9; the spatial light modulator 7 is located at the front focal point of the first lens 8 and the focusing assembly 13 is located at the back focal point of the second lens 9. The focal lengths of the first lens 8 and the second lens 9 are the same and are both f, and the distance between the first lens 8 and the second lens 9 is 2 f; the laser beam is divided into a plurality of beams after passing through the spatial light modulator 7, and a circular processing area with low outer ring energy and high inner ring energy is formed.
Preferably, a turning mirror 10 is arranged between the second lens 9 and the focusing assembly 13, a focusing mirror group 11 and an optical power sensor array 12 are sequentially arranged on one side of the turning mirror 10 away from the second lens 9, and the focusing mirror group 11 and the second lens 9 are coaxially arranged; the turnover mirror 10 comprises a first state and a second state, and the states of the turnover mirror 10 are controlled and switched by a remote controller; when the flip mirror 10 is in the state one, the flip mirror 10 is parallel to the central axis of the second lens 9; when the turning mirror 10 is in the second state, the included angle between the turning mirror 10 and the central axis of the second lens 9 is 45 degrees;
when the energy distribution of the laser processing area needs to be detected, the turning mirror 10 is controlled to be switched to the first state through the remote controller, so that the laser beam is horizontally focused through the focusing mirror group 11 (at this time, the laser beam is not reflected by the turning mirror 10); the focused laser beam is received by the optical power sensor array 12, and the energy distribution of the laser processing area is detected through the optical power sensor array 12;
when the fiber material 14 needs to be drilled, the remote controller controls the turning mirror 10 to be switched to the second state, and the laser beam is reflected by the turning mirror 10 to enter the focusing assembly 13 for focusing; the focusing assembly 13 is used for focusing the laser beam to form a light spot to perform annular scanning hole making processing on the fiber material 14.
Specifically, in practical use, the present embodiment further needs a galvanometer, which is located above the focusing assembly 13.
Specifically, the laser 1 adopts a femtosecond laser with the model of femto YL-50, and the basic wavelength is 1030 nm; the processing precision of the micropores can be improved.
Specifically, the spatial light modulator 7 is a pure-phase spatial light modulator with a model number of X10468-02, and is mainly used for adjusting the shape distribution and the energy distribution of a laser processing area.
Corresponding to the punching system, the embodiment also provides a laser punching method for the fiber material, which comprises the following steps:
s1, clamping the fiber material 14 on the three-dimensional displacement platform 15, and adjusting the spatial position of the fiber material 14 to a focal plane through the three-dimensional displacement platform 15;
s2, starting the laser 1, and adjusting the diameter of a laser spot and the linear polarization angle of a light beam through the beam expander 2 and the wave plate 3 respectively;
s3, eliminating the vertical polarization component in the laser beam by the polarization beam splitter 4, and keeping the horizontal polarization component in the laser beam;
s4, obtaining the minimum cutting energy required by the fiber material 14 according to the experimental research mechanism;
s5, splitting the single light beam by the spatial light modulator 7 to form multiple light beams, and arranging multiple light beam spots in parallel to form a circle;
s6, regulating and controlling the energy distribution of the multi-beam circular processing area to enable the energy of the outer ring to be equal to the minimum cut-off energy and the energy of the inner ring to be higher than the minimum cut-off energy;
s7, the adjusted multi-beam laser is focused on the surface of the fiber material 14 to perform circular scanning hole making.
Specifically, before step S7, the energy distribution of the multi-beam circular processing region is also detected, and the energy distribution of the multi-beam circular processing region is adjusted based on the detection data.
The processing method of the present embodiment is further described below with reference to practical cases:
cutting a round hole with the diameter of 6mm on aramid fiber with the thickness of 2mm, wherein the specific processing process is as follows:
firstly, before processing, firstly, wiping the surface of an aramid fiber composite material by using 99.7% absolute ethyl alcohol so as to reduce the influence of other factors, and clamping the wiped aramid fiber on a three-dimensional displacement platform 15;
secondly, mounting each optical element according to the connection mode of the figure 1, and turning on the laser 1;
thirdly, controlling a three-dimensional displacement platform 15 through a computer 16 to enable a focal plane of the focusing assembly 13 to be at one half of the thickness of the aramid fiber material 14;
fourthly, obtaining the minimum cutting energy of the aramid fiber material 14 through experimental research mechanism, and controlling the spatial light modulator 7 to adjust the form distribution and the energy distribution of the laser processing area to obtain a circle (shown in figure 2) with low outer ring energy and high inner ring energy;
fifthly, switching the turnover mirror 10 to the first state through a remote controller, so that the laser beam transmitted by the second lens 9 is focused by the focusing mirror group 11 and then reaches the photosensitive surface of the optical power sensor array 12; detecting the energy distribution of the laser beam by the optical power sensor array 12 (the shape distribution can be obtained according to the energy distribution); the computer 16 further optimizes the morphological distribution and energy distribution of the laser processing area according to the data detected by the optical power sensor array 12;
and sixthly, switching the turning mirror 10 to the second state by using a remote controller, so that the laser beam transmitted by the second lens 9 enters the vibrating mirror after being reflected by the turning mirror 10, and is focused by the focusing component 13 to perform annular scanning hole making on the aramid fiber material 14 (as shown in fig. 3).
The laser parameters in this practical case are as follows;
the pulse width is 500 fs;
the scanning speed is 1050 mm/s;
the repetition frequency is 200 kHz;
the outer ring single pulse energy is 25 muJ, and the inner ring single pulse energy is 36 muJ;
in the present case, the effect of punching holes in the aramid fiber material 14 is shown in fig. 4, and the thermal influence zone is observed under a nikon microscope, and the thermal influence zones around the three holes are 20um, 18um and 17 um; and the requirement of processing precision is met.
As will be appreciated by one skilled in the art, embodiments of the present application may be provided as a method, system, or computer program product.
Accordingly, the present application may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, the present application may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, and the like) having computer-usable program code embodied therein.
The present application is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of the application. It will be understood that each flow and/or block of the flow diagrams and/or block diagrams, and combinations of flows and/or blocks in the flow diagrams and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110584613.4A CN113333973B (en) | 2021-05-27 | 2021-05-27 | A laser beam modulation method and system for processing fiber materials |
Applications Claiming Priority (1)
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| CN119260165A (en) * | 2024-12-10 | 2025-01-07 | 西湖大学光电研究院 | A method for preparing a microchannel heat dissipation chip by modulating laser beam combined with etching |
| CN119260165B (en) * | 2024-12-10 | 2025-05-16 | 西湖大学光电研究院 | A method for preparing a microchannel heat dissipation chip by modulating laser beam combined with etching |
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