CN113236828A - Anti-deposition check valve - Google Patents
Anti-deposition check valve Download PDFInfo
- Publication number
- CN113236828A CN113236828A CN202110434790.4A CN202110434790A CN113236828A CN 113236828 A CN113236828 A CN 113236828A CN 202110434790 A CN202110434790 A CN 202110434790A CN 113236828 A CN113236828 A CN 113236828A
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- China
- Prior art keywords
- check valve
- sealing element
- opening
- upper flange
- settling
- Prior art date
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- 238000007789 sealing Methods 0.000 claims abstract description 96
- 238000005192 partition Methods 0.000 claims abstract description 22
- 238000000034 method Methods 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 7
- 229910052731 fluorine Inorganic materials 0.000 claims description 5
- 239000011737 fluorine Substances 0.000 claims description 5
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 4
- 125000006850 spacer group Chemical group 0.000 claims description 2
- 230000000717 retained effect Effects 0.000 claims 1
- 230000008021 deposition Effects 0.000 abstract description 5
- 238000000151 deposition Methods 0.000 description 7
- 239000012530 fluid Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 238000005086 pumping Methods 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- 239000000376 reactant Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000011112 process operation Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K15/00—Check valves
- F16K15/02—Check valves with guided rigid valve members
- F16K15/06—Check valves with guided rigid valve members with guided stems
- F16K15/063—Check valves with guided rigid valve members with guided stems the valve being loaded by a spring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
- F16K27/0209—Check valves or pivoted valves
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Check Valves (AREA)
Abstract
The invention provides an anti-settling check valve, which at least comprises: the upper flange is provided with a first opening, and a chamfer ring surface is formed on one side of the first opening of the upper flange; a lower flange having a second opening; the middle partition frame is arranged between the upper flange and the lower flange; and the top side of the sealing element is a conical plate, the sealing element is axially movably arranged on the middle bulkhead frame, the annular joint area of the conical plate is constantly kept to be substantially parallel and is far away from or abutted against the chamfer annular surface, and the sealing element correspondingly opens or closes the first opening of the upper flange by moving to an opening position or a closing position, so that the first opening of the upper flange is communicated or not communicated with the second opening of the lower flange. The invention can avoid the problem of poor sealing performance caused by the deposition phenomenon in the check valve.
Description
Technical Field
The invention relates to a check valve, in particular to an anti-settling check valve.
Background
In recent years, as semiconductor technology is developed rapidly, technology products are greatly advanced. In the manufacture of semiconductor wafers, the wafers are typically placed in a process chamber for performing the relevant process operations, and a vacuum pump is used to pump out air or gas from the process chamber to maintain the process chamber at a negative pressure, i.e., a certain degree of vacuum.
Check valve (also called check valve, check valve) can provide the function of automatically stopping the fluid from flowing backwards. When the vacuum pump is activated to draw a vacuum, the flap of the check valve opens to allow fluid to flow from the process chamber. When the vacuum pump is closed, the valve clack of the check valve will close automatically owing to the fluid pressure difference, so as to prevent the fluid from flowing back to the processing chamber. However, in the semiconductor process, the solid particles carried by the gas reactant or gas are easily deposited or accumulated in the check valve, and these deposits may cause the problem of poor sealing performance of the check valve, which may further affect the process quality.
Disclosure of Invention
In view of the above problems in the prior art, an object of the present invention is to provide an anti-settling check valve, which solves the problem of poor sealing performance caused by settling phenomenon inside the check valve.
To achieve the above object, the present invention provides an anti-settling check valve, at least comprising: the upper flange is provided with a first opening, and a chamfer ring surface is formed on one side of the first opening of the upper flange; a lower flange having a second opening; the middle partition frame is arranged between the upper flange and the lower flange; and the top side of the sealing element is a conical plate, the sealing element is axially movably arranged on the middle bulkhead frame, and the annular joint area of the conical plate of the sealing element is constantly kept to be substantially parallel and is far away from or abutted against the chamfer ring surface, wherein the sealing element correspondingly opens or closes the first opening of the upper flange by moving to an opening position or a closing position, so that the first opening of the upper flange is communicated or not communicated with the second opening of the lower flange.
Wherein an angle of a central angle of the annular region of the conical plate of the sealing element is substantially the same as an angle of a chamfer of the chamfered annulus.
Wherein the angle of the central angle of the annular joint region of the conical plate of the sealing element is less than 90 degrees.
The bottom side of the sealing element is provided with a guide rod, and when the sealing element is switched between the closed position and the open position, the guide rod is movably limited in the guide groove of the middle partition frame.
The middle partition frame includes one ring hollow frame and one transverse connecting rod connected to two sides of the ring hollow frame, and the sealing element is axially set on the middle partition frame movably and has axis parallel to that of the conic plate.
Wherein, this conical plate is connected to this guide arm integral type.
Wherein, the guide rod is detachably connected with the tapered plate.
When the air extractor is switched between the air extracting state and the air extracting stopping state, the sealing element is correspondingly displaced between the opening position and the closing position, so that the air extractor is correspondingly allowed to extract the gas in the processing chamber or prevent the gas from flowing back to the processing chamber.
The chamfered ring surface of the upper flange is provided with a first airtight gasket, and when the sealing element is in the closed position, the ring joint area of the conical plate is abutted to the first airtight gasket on the chamfered ring surface of the upper flange.
When the sealing element is located at the opening position, a top end of the conical plate of the sealing element is located adjacent to the first side of the first opening of the upper flange.
Wherein, when the sealing element is in the closed position, the position of the top end of the tapered plate of the sealing element is located in the first opening of the upper flange.
Wherein, when the sealing element is in the closed position, the top end of the tapered plate of the sealing element is positioned adjacent to a second side of the first opening of the upper flange, the second side being opposite the first side.
Wherein the surface of the conical plate of the top side of the sealing element is further provided with a covering element.
Wherein the covering element is a fluorine-containing material layer.
Wherein, the top end of the conical plate of the sealing element is conical, planar or circular arc-shaped.
Wherein, the diameter of the conical plate of the sealing element is larger than or equal to the inner diameter of the first opening of the upper flange.
Wherein, the middle partition frame is screwed between the upper flange and the lower flange.
Wherein, be equipped with second air-tight packing ring respectively between this upper flange and this well septum frame and between this lower flange and this well septum frame.
The anti-settling check valve further comprises an elastic element arranged between the conical plate and the middle partition frame, and the guide rod penetrates through the elastic element.
Wherein, the diameter of the elastic element is between the diameter of the conical plate and the diameter of the guide rod.
As mentioned above, compared to the conventional flat plate design, the anti-settling check valve of the present invention uses the tapered plate as the sealing element, so as to reduce the areas of the low velocity zone and the recirculation zone in the check valve, and prevent solid particles carried by the gas reactant or gas from settling and accumulating on the first airtight gasket and the sealing element. Therefore, the problem of poor sealing performance of the first airtight gasket due to deposition can be avoided. In addition, the surface of the conical plate can be selectively provided with a fluorine-containing material coating so as to improve the surface smoothness and reduce the friction.
So that the manner in which the above recited features of the present invention can be understood and appreciated, a more particular description of the invention, briefly summarized above, may be had by reference to embodiments, some of which are illustrated in the appended drawings.
Drawings
Fig. 1 is an external view schematically showing an anti-settling check valve according to the present invention.
FIG. 2 is a side view of the anti-settling check valve of the present invention.
FIG. 3 is a schematic cross-sectional view of an anti-settling check valve of the present invention.
FIG. 4 is a cross-sectional exploded view of the anti-settling check valve of the present invention.
Fig. 5 is a side view of a sealing member of the present invention.
FIG. 6 is a schematic cross-sectional view of another aspect of the tapered plate of the present invention.
FIG. 7 is a schematic cross-sectional view of yet another aspect of the tapered plate of the present invention.
FIG. 8 is a schematic view of the deposition prevention check valve, the process chamber and the pumping device of the present invention.
FIG. 9 is an exploded cross-sectional view of another embodiment of the tapered plate and the middle frame of the present invention.
FIG. 10 is an exploded cross-sectional view of another embodiment of the tapered plate and the middle frame of the present invention.
Description of reference numerals:
100: anti-settling check valve 42: tapered plate
10: upper flange 44: guide rod
12: first opening 51: first airtight gasket
14: chamfered annular surface 52: second airtight gasket
20: lower flange θ: centre angle
22: second opening α: chamfering
30: middle spacer frame 60: covering element
31: annular hollow frame 70: bolt
32: guide groove 200: process chamber
33: the transverse connecting rod 300: air extractor
40: sealing element 80: elastic element
41: loop regions r, r1, r 2: diameter of
Detailed Description
In order to facilitate understanding of the technical features, contents and advantages of the present invention and the effects achieved thereby, the present invention is described in detail below with reference to the accompanying drawings, wherein the drawings are used for illustration and assistance of the specification, and are not necessarily true to scale and precise arrangement after the implementation of the present invention, and therefore, the scope of the present invention in practical implementation should not be read and limited by the scale and arrangement of the attached drawings. Moreover, for ease of understanding, like elements in the following embodiments are illustrated with like reference numerals.
Furthermore, the words used throughout the specification and claims have the ordinary meaning as is usually accorded to each word described herein, including any words which have been commonly referred to in the art, in the context of this disclosure, and in any other specific context. Certain terms used to describe the invention are discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in describing the invention.
The terms "first," "second," "third," and the like, as used herein, are not intended to be limited to the specific order or sequence presented, nor are they intended to be limiting, but rather are intended to distinguish one element from another or from another element or operation described by the same technical term.
Furthermore, as used herein, the terms "comprising," "including," "having," "containing," and the like are open-ended terms that mean including, but not limited to.
Referring to fig. 1 to 4, fig. 1 is an external view of an anti-settling check valve of the present invention, fig. 2 is a side view of the anti-settling check valve of the present invention, fig. 3 is a cross-sectional view of the anti-settling check valve of the present invention, and fig. 4 is a cross-sectional exploded view of the anti-settling check valve of the present invention.
As shown in fig. 1 to 4, the anti-settling check valve 100 of the present invention at least comprises an upper flange 10, a lower flange 20 and a middle partition frame 30. The upper flange 10 has a first opening 12, and a chamfered annular surface 14 is formed at one side of the first opening 12. The lower flange 20 has a second opening 22. The middle bulkhead 30 is arranged between the upper flange 10 and the lower flange 20. The top side of the sealing element 40 is a tapered plate 42, the sealing element 40 is axially movably disposed on the middle bulkhead 30, and the annular joint region 41 of the tapered plate 42 of the sealing element 40 is constantly kept substantially parallel away from or abutting against the chamfered annular surface 14, wherein the sealing element 40 correspondingly opens or closes the first opening 12 of the upper flange 10 by moving to the open position or the closed position, so that the first opening 12 of the upper flange 10 is communicated or not communicated with the second opening 22 of the lower flange 20.
As shown in FIG. 8, the anti-settling check valve 100 of the present invention can be installed between the process chamber 200 and the pumping device 300. The evacuation device 300 may be, for example, but not limited to, a vacuum pump, and the vacuum pump may be, for example, but not limited to, a pre-pump or a turbo-vacuum pump. When the gas-exhausting apparatus 300 is activated to perform the gas-exhausting operation, the annular region 41 of the tapered plate 42 of the sealing member 40 is away from the chamfered annular surface 14 of the upper flange 10, and the first opening 12 of the upper flange 10 is not closed by the sealing member 40 (the sealing member 40 is in the open position), so that the first opening 12 of the upper flange 10 is connected to the second opening 22 of the lower flange 20, so that the gas in the process chamber 200 can be exhausted by the gas-exhausting apparatus 300. When the gas-extracting device 300 is closed, the sealing element 40 will move towards the upper flange 10 until the annular region 41 of the tapered plate 42 abuts against the chamfered annular surface 14 of the upper flange 10 due to the fluid pressure difference (at this time, the sealing element 40 closes the first opening 12 of the upper flange 10, and the sealing element 40 is in the closed position), so that the first opening 12 of the upper flange 10 will not be communicated with the second opening 22 of the lower flange 20, and the fluid can be prevented from flowing back to the process chamber 200. Therefore, when the pumping device 300 is switched between the pumping state and the pumping-stopped state, the sealing element 40 is correspondingly displaced between the open position and the closed position, thereby correspondingly allowing the pumping device 300 to pump the gas out of the process chamber 200 or preventing the gas from flowing back into the process chamber 200.
In the present invention, when the sealing member 40 is located at the open position, the top end of the tapered plate 42 of the sealing member 40 is located adjacent to the first side of the first opening 12 of the upper flange 10. In addition, the position of the top end of the tapered plate 42 of the sealing member 40 may be, for example, inside or outside the first opening 12 of the upper flange 10.
And when the sealing member 40 is in the closed position, the position of the top end of the tapered plate 42 of the sealing member 40 is located inside the first opening 12 of the upper flange 10. At this time, the top end of the tapered plate 42 is positioned adjacent to the second side of the first opening 12 of the upper flange 10, and the second side is opposite to the first side. The first side of the first opening 12 faces the middle bulkhead 30, and the second side of the first opening 12 faces away from the middle bulkhead 30.
In the present invention, the tip of the tapered plate 42 of the sealing member 40 may be, for example, tapered (see fig. 3 to 5), flat (see fig. 6), or rounded (see fig. 7). The shape of the top end of the tapered plate 42 is merely exemplary and not limiting. In addition, in the present invention, regardless of the shape of the top end of the tapered plate 42, the angle of the central angle θ of the annular joint 41 (i.e., the contact area with the chamfered annular surface 14) of the tapered plate 42 is substantially the same as the angle of the chamfer α of the chamfered annular surface 14, and the tolerable error is about 10 degrees. For example, the angle of the central angle θ of the annular joint region 41 and the angle of the chamfer α of the chamfer annulus 14 may have the following relationship, for example: α ± 10, i.e. the angle of α is between the angle of θ plus 10 degrees and the angle of θ minus 10 degrees. Thus, during displacement of the sealing element 40, the land 41 of the conical plate 42 will remain substantially parallel to the chamfered annulus 14. In addition, the angle of the central angle θ of the annular land 41 of the conical plate 42 of the sealing element 40 is less than 90 degrees. For example, the central angle θ is preferably between 45 degrees and 60 degrees. More preferably, the angle of the central angle θ may be 60 degrees. The angle of the central angle θ is merely an example and is not limited.
As previously described, the top side of the sealing member 40 is the tapered plate 42, while the bottom side of the sealing member 40 is the guide bar 44. The number of the guide rods 44 and the guide grooves 32 may be one or more, respectively. When the sealing element 40 is switched between the closed position and the open position, the guide rod 44 is movably limited in the guide groove 32 on the middle bulkhead 30, wherein the guide groove 32 may be a groove body with holes on one side or a groove body with holes on both sides. Taking the guide groove 32 as a groove body with a hole opened on one side as an example, when the sealing element 40 is located at the closed position, the length of the bottom end of the guide rod 44 penetrating through the guide groove 32 is smaller; when the sealing member 40 is in the open position, the bottom end of the guide rod 44 is inserted into the guide groove 32 for a long distance. Through such a design, the sealing element 40 can be moved up and down freely by the operation of the air-extracting device 300, so as to open and close the first opening 12. In addition, the length of the guide bar 44 corresponds to the depth of the guide slot 32, and the length of the guide bar 44 is greater than or equal to the longitudinal distance of the sealing element 40 between the open position and the closed position. Taking the guide groove 32 as a groove body with openings on both sides as an example, the guide rod 44 penetrates through the guide groove 32, and the length of the guide rod 44 is, for example, greater than or equal to the longitudinal distance between the opening position and the closing position of the sealing element 40.
The middle partition frame 30 includes a ring-shaped hollow frame 31 and a horizontal connecting rod 33, the horizontal connecting rod 33 is connected to two sides of the ring-shaped hollow frame 31, the above-mentioned guiding groove 32 is provided on the horizontal connecting rod 33, and when the sealing element 40 is axially movably provided on the middle partition frame 30, the axis of the guiding groove 32 is parallel to the axis of the conical plate 42 of the sealing element 40. Taking the numbers of the guide rods 44 and the guide grooves 32 as an example, the axes of the guide grooves 32 overlap and are parallel to the axis of the tapered plate 42 of the sealing member 40. Taking the number of the guide rods 44 and the guide grooves 32 as an example, the axis of the guide grooves 32 is parallel to the axis of the tapered plate 42 of the sealing member 40. Preferably, the horizontal bar 33 can be, for example, a straight line, a Y-shape or a cross shape, so as to divide the annular hollow frame 31 into two, three or four equal parts. And the guide groove 32 is located at the center of the transverse rod 33, so that the guide rod 44 located at the center of the bottom end of the tapered plate 42 penetrates through the guide groove 32, and the tapered plate 42 can move along the axis of the first opening 12.
In addition, an elastic element 80 may be further disposed between the tapered plate 42 and the septum frame 30, and the guide rod 44 penetrates the elastic element 80. The elastic element 80 may be, for example, a spring, but is not limited thereto. By providing the resilient member 80, an additional function may be provided to enhance the sealing effect when the sealing member 40 is displaced towards the closed position. The diameter r of the elastic element 80 is between the diameter r1 of the tapered plate 42 and the diameter r2 of the guide rod 44, and the diameter r of the elastic element 80, the diameter r1 of the tapered plate 42 and the diameter r2 of the guide rod 44 may have the following relationships: r2< r < r1, i.e., the diameter r of the resilient member 80 is between the diameter r1 of the tapered plate 42 and the diameter r2 of the guide rod 44. The diameter r2 of the guide rod 44 is preferably an outer diameter. The elastic member 80 may be provided outside the guide groove 32 or in the guide groove 32. As shown in fig. 9, the elastic element 80 is disposed outside the guiding groove 32, and two ends of the elastic element 80 are respectively configured to abut against the bottom side of the tapered plate 42 and the transverse rod 33 of the septum housing 30. Alternatively, as shown in fig. 10, the elastic element 80 is disposed in the guide groove 32, two ends of the elastic element 80 are respectively used for abutting against the bottom side of the tapered plate 42 or the inner walls of the guide rod 44 and the guide groove 32, and the diameter r of the elastic element 80 is between the diameter r2 (outer diameter) of the guide rod 44 and the inner diameter of the guide groove 32.
The material of the sealing element 40 may be, for example, stainless steel, aluminum, or an aluminum alloy, but is not limited thereto. In addition, the surface of the conical plate 42 of the top side of the sealing element 40 may be further provided with a covering element 60. As shown in fig. 5, a covering member 60 may be provided on the entire surface or a part of the surface of the tapered plate 42. The cover member 60 may be a coating of a fluorine-containing material or a nickel layer, for example, to improve the smoothness of the surface of the sealing member 40, thereby reducing the deposition phenomenon by reducing the friction. In addition, the guide rods 44 may be integrally connected to the tapered plate 42, for example. Alternatively, the guide rods 44 may be detachably connected to the tapered plate 42, for example. The material of the guide rod 44 and the tapered plate 42 may be the same or different, for example. The guide rod 44 can be detachably connected to the tapered plate 42, for example, but not limited to, by screwing, locking, clipping, or magnetic attraction. For example, the tapered plate 42 and the guide bar 44 have bolts and screw holes that can be screwed into each other, respectively, so that the tapered plate 42 can be detachably connected to the guide bar 44. For example, the tapered plate 42 and the guide bar 44 may have screw holes, respectively, and a single bolt may be screwed into the screw holes of the tapered plate 42 and the guide bar 44, so that the tapered plate 42 is detachably connected to the guide bar 44.
The chamfered annular surface 14 of the upper flange 10 may, for example, have a first airtight gasket 51, and the annular land 41 of the conical plate 42 abuts the first airtight gasket 51 on the chamfered annular surface 14 of the upper flange 10 when the sealing element 40 is in the closed position. In addition, second airtight gaskets 52 may be respectively disposed between the upper flange 10 and the middle partition frame 30 and between the lower flange 20 and the middle partition frame 30. The first and second airtight gaskets 51 and 52 are made of rubber, for example, and the airtight effect of the anti-settling check valve 100 can be improved by the first and second airtight gaskets 51 and 52.
The diameter of the conical plate 42 of the sealing element 40 may be, for example, greater than or equal to the inner diameter of the first opening 12 of the upper flange 10, so as to completely seal the first opening 12.
The intermediate frame 30 can be screwed, for example, between the upper flange 10 and the lower flange 20. For example, the upper flange 10 and the middle partition frame 30, and the lower flange 20 and the middle partition frame 30 may be screwed together by using connecting elements such as bolts 70. The above-mentioned connection method is only an example, and other connection methods such as a snap or a welding may be used to connect the upper flange 10 and the middle partition frame 30, and the lower flange 20 and the middle partition frame 30 together.
If deposits continue to form on the first airtight gasket 51 or the sealing element 40, the airtight effect will be poor, which will affect the efficacy of the check valve. Therefore, the present invention can reduce the area of the low velocity region (and the recirculation region) at the first opening 12 by improving the structural design of the sealing element 40, so as to prevent the solid particles carried by the gas reactant or gas from depositing and accumulating on the first hermetic gasket 51, and also prevent the solid particles from depositing on the sealing element 40, thereby achieving the effect of long-term use.
In summary, compared to the conventional flat plate design, the anti-settling check valve of the present invention employs a tapered plate as the sealing element, so as to reduce the areas of the low velocity region and the recirculation region in the check valve, and prevent solid particles carried by the gas reactant or gas from settling and accumulating on the first airtight gasket and the sealing element. Therefore, the problem of poor sealing performance of the first airtight gasket due to deposition can be avoided. In addition, the surface of the conical plate can be provided with a coating layer made of fluorine-containing materials and the like so as to improve the surface smoothness and reduce the friction.
The foregoing is by way of example only, and not limiting. It is intended that all equivalent modifications or variations without departing from the spirit and scope of the present invention shall be included in the appended claims.
Claims (20)
1. An anti-settling check valve comprising:
the upper flange is provided with a first opening, and a chamfer ring surface is formed on one side of the first opening of the upper flange;
a lower flange having a second opening;
the middle partition frame is arranged between the upper flange and the lower flange; and
the top side of the sealing element is a conical plate, the sealing element is axially movably arranged on the middle bulkhead frame, a ring joint area of the conical plate of the sealing element is constantly kept away from or abutted against the chamfer ring surface in a substantially parallel manner, and the sealing element correspondingly opens or closes the first opening of the upper flange by moving to an opening position or a closing position, so that the first opening of the upper flange is communicated or not communicated with the second opening of the lower flange.
2. The anti-settling check valve of claim 1, wherein an angle of a central angle of the annular region of the conical plate of the sealing element is substantially the same as an angle of a chamfer of the chamfered annulus.
3. The anti-settling check valve of claim 2, wherein the angle of the central angle of the annular junction of the conical plate of the sealing element is less than 90 degrees.
4. The anti-settling check valve as claimed in claim 1, wherein the bottom side of the sealing member is a guide rod, and the guide rod is movably retained in the guide groove of the spacer when the sealing member is switched between the closed position and the open position.
5. The anti-settling check valve as claimed in claim 4, wherein the middle partition frame comprises an annular hollow frame and a cross rod, the cross rod is connected to two sides of the annular hollow frame, the guiding groove is disposed on the cross rod, and when the sealing element is axially movably disposed on the middle partition frame, the axis of the guiding groove is parallel to the axis of the tapered plate of the sealing element.
6. The anti-settling check valve of claim 4, wherein the guide rod is integrally connected to the tapered plate.
7. The anti-settling check valve of claim 4, wherein the guide rod is removably coupled to the tapered plate.
8. The valve of claim 1, wherein the check valve is disposed between a process chamber and an air-extracting device, and when the air-extracting device is switched between an air-extracting state and an air-extracting stopping state, the sealing element is correspondingly displaced between the open position and the closed position, so as to correspondingly allow the air-extracting device to extract air from the process chamber or prevent the air from flowing back into the process chamber.
9. The anti-settling check valve of claim 1, wherein the chamfered annular surface of the upper flange has a first gas-tight gasket, and the annular land of the tapered plate abuts the first gas-tight gasket on the chamfered annular surface of the upper flange when the sealing element is in the closed position.
10. The anti-settling check valve of claim 9, wherein a top end of the tapered plate of the sealing element is positioned adjacent a first side of the first opening of the upper flange when the sealing element is in the open position.
11. The anti-settling check valve of claim 10, wherein the top end of the tapered plate of the sealing element is positioned in the first opening of the upper flange when the sealing element is in the closed position.
12. The anti-settling check valve of claim 11, wherein the top end of the tapered plate of the sealing element is positioned adjacent a second side of the first opening of the upper flange opposite the first side when the sealing element is in the closed position.
13. The anti-settling check valve of claim 1, wherein the surface of the conical plate of the top side of the sealing element is further provided with a cover element.
14. The anti-settling check valve of claim 13, wherein the cover element is a layer of a fluorine-containing material.
15. The anti-settling check valve of claim 1, wherein the top end of the tapered plate of the sealing element is tapered, planar, or rounded.
16. The anti-settling check valve of claim 1, wherein the diameter of the tapered plate of the sealing element is greater than or equal to the inner diameter of the first opening of the upper flange.
17. The anti-settling check valve of claim 1, wherein the septum frame is threaded between the upper flange and the lower flange.
18. The anti-settling check valve as claimed in claim 1, wherein a second airtight gasket is disposed between the upper flange and the middle partition frame and between the lower flange and the middle partition frame, respectively.
19. The anti-settling check valve of claim 4, further comprising an elastic element disposed between the tapered plate and the middle partition frame, wherein the guide rod penetrates the elastic element.
20. The anti-settling check valve of claim 19, wherein the diameter of the resilient element is between the diameter of the tapered plate and the diameter of the guide rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110434790.4A CN113236828A (en) | 2021-04-22 | 2021-04-22 | Anti-deposition check valve |
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| CN202110434790.4A CN113236828A (en) | 2021-04-22 | 2021-04-22 | Anti-deposition check valve |
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|---|---|---|---|---|
| FR2677101A1 (en) * | 1991-05-30 | 1992-12-04 | Cloup Philippe | Non-return valve with self-cleaning sealing surfaces |
| CN2177148Y (en) * | 1993-12-16 | 1994-09-14 | 北京海淀普惠机电技术开发公司 | Energy saving check valve |
| CN2233015Y (en) * | 1995-07-19 | 1996-08-14 | 杨进山 | Check valve |
| CN2379669Y (en) * | 1999-05-12 | 2000-05-24 | 辽阳给排水设备公司 | Quick-action, taper shaped, sealing and silencing check valve |
| TWM295213U (en) * | 2006-02-14 | 2006-08-01 | Yung-Wen Chen | V-shaped core guiding check valve |
| CN200989479Y (en) * | 2006-12-18 | 2007-12-12 | 宝山钢铁股份有限公司 | Conic spool oneyway valve |
| CN203926948U (en) * | 2014-07-01 | 2014-11-05 | 合肥爱诺伟机械设备有限公司 | A kind of unidirectional cone valve |
| CN204099663U (en) * | 2014-09-13 | 2015-01-14 | 浙江耐氟隆阀业有限公司 | Anti-backflow leaks Vertical lift check valve |
| US20190383407A1 (en) * | 2018-06-14 | 2019-12-19 | Titan Flow Control, Inc. | Insert check valves and methods |
| CN215950490U (en) * | 2021-04-22 | 2022-03-04 | 日扬科技股份有限公司 | Anti-deposition check valve |
-
2021
- 2021-04-22 CN CN202110434790.4A patent/CN113236828A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2677101A1 (en) * | 1991-05-30 | 1992-12-04 | Cloup Philippe | Non-return valve with self-cleaning sealing surfaces |
| CN2177148Y (en) * | 1993-12-16 | 1994-09-14 | 北京海淀普惠机电技术开发公司 | Energy saving check valve |
| CN2233015Y (en) * | 1995-07-19 | 1996-08-14 | 杨进山 | Check valve |
| CN2379669Y (en) * | 1999-05-12 | 2000-05-24 | 辽阳给排水设备公司 | Quick-action, taper shaped, sealing and silencing check valve |
| TWM295213U (en) * | 2006-02-14 | 2006-08-01 | Yung-Wen Chen | V-shaped core guiding check valve |
| CN200989479Y (en) * | 2006-12-18 | 2007-12-12 | 宝山钢铁股份有限公司 | Conic spool oneyway valve |
| CN203926948U (en) * | 2014-07-01 | 2014-11-05 | 合肥爱诺伟机械设备有限公司 | A kind of unidirectional cone valve |
| CN204099663U (en) * | 2014-09-13 | 2015-01-14 | 浙江耐氟隆阀业有限公司 | Anti-backflow leaks Vertical lift check valve |
| US20190383407A1 (en) * | 2018-06-14 | 2019-12-19 | Titan Flow Control, Inc. | Insert check valves and methods |
| CN215950490U (en) * | 2021-04-22 | 2022-03-04 | 日扬科技股份有限公司 | Anti-deposition check valve |
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