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CN113029209B - A unipolar capacitive sensor and joint device - Google Patents

A unipolar capacitive sensor and joint device Download PDF

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Publication number
CN113029209B
CN113029209B CN202110355429.2A CN202110355429A CN113029209B CN 113029209 B CN113029209 B CN 113029209B CN 202110355429 A CN202110355429 A CN 202110355429A CN 113029209 B CN113029209 B CN 113029209B
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layer
ring
outer shell
equalization
equipotential
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CN113029209A (en
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闫鹏
刘国帅
鲁帅帅
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Ami Precision Control Technology Shandong Co ltd
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Shandong University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
  • Details Of Connecting Devices For Male And Female Coupling (AREA)

Abstract

The invention belongs to the field of non-contact measuring devices, and provides a single-pole capacitive sensor and a connector device. The single-pole capacitive sensor comprises a measuring pole, an equipotential ring, a shielding ring and an insulating ring; the measuring electrode, the equipotential ring and the shielding ring are of stepped structures, and the measuring electrode, the equipotential ring and the shielding ring are coaxial and are assembled from inside to outside in sequence; annular grooves are formed in the same horizontal height and opposite positions of the measuring electrode, the equipotential ring and the shielding ring, and radially fixed insulating rings are arranged between the step position outside the measuring minimum shaft and the inner side of the equipotential ring and between the step position outside the small shaft of the equipotential ring and the inner side of the shielding ring. The connector device adopts a shell layer and shell layer wire seat, an equipotential layer and equipotential layer wire seat and a measuring layer to realize good conduction between three conductive layers of a cable and a single-pole capacitive sensor.

Description

一种单极电容传感器和接头装置A unipolar capacitive sensor and joint device

技术领域technical field

本发明属于非接触式测量装置领域,尤其涉及一种单极电容传感器和接头装置。The invention belongs to the field of non-contact measurement devices, in particular to a unipolar capacitive sensor and a joint device.

背景技术Background technique

本部分的陈述仅仅是提供了与本发明相关的背景技术信息,不必然构成在先技术。The statements in this section merely provide background information related to the present invention and do not necessarily constitute prior art.

随着现代工业技术的快速发展,诸多高端精密设备和制造加工技术对精度检测技术提出更高的要求。高精度的测定微小位移、振动、微小角度的变化,在现代精密仪器领域是越来越重要。其中电容位移传感器具有动态特性好、分辨力高、精度高、稳定性好等优点非常适合高精度、非接触动态测量。因此在测量微小位移、振动、尺寸等各工业领域中得到了广泛的应用。电容传感器包括单极板电容传感器和双极板电容传感器两种。With the rapid development of modern industrial technology, many high-end precision equipment and manufacturing and processing technologies put forward higher requirements for precision detection technology. High-precision measurement of small displacement, vibration, and small angle changes is more and more important in the field of modern precision instruments. Among them, the capacitive displacement sensor has the advantages of good dynamic characteristics, high resolution, high precision, and good stability, which are very suitable for high-precision, non-contact dynamic measurement. Therefore, it has been widely used in various industrial fields such as measuring micro-displacement, vibration, and size. Capacitive sensors include unipolar plate capacitive sensors and bipolar plate capacitive sensors.

单极式探头能够实现非接触且对被测极板不做任何处理,被测极板不用接入传感器电路,因而具有广泛的应用范围。但是,发明人发现,单极电容传感器的测定精度与三同轴的环结构同轴度的装配精度有直接联系,单极电容传感器探头与三同轴线缆直接相接且不可拆卸的方式给组装、使用、调整和维修带来极大不便,而且直接装配其精度不易保证。The unipolar probe can achieve non-contact and do not do any processing on the electrode plate under test, and the electrode plate under test does not need to be connected to the sensor circuit, so it has a wide range of applications. However, the inventor found that the measurement accuracy of the unipolar capacitive sensor is directly related to the assembly accuracy of the coaxiality of the triaxial ring structure. Assembly, use, adjustment and maintenance bring great inconvenience, and the accuracy of direct assembly is not easy to guarantee.

发明内容SUMMARY OF THE INVENTION

为了解决上述背景技术中存在的技术问题,本发明的第一方面提供一种单极电容传感器,其中的测量极、等位环和屏蔽环直接通过绝缘环进行径向固定来实现更可靠的装配。In order to solve the technical problems existing in the above-mentioned background art, a first aspect of the present invention provides a unipolar capacitive sensor, wherein the measuring electrode, the equipotential ring and the shielding ring are directly fixed radially by the insulating ring to achieve more reliable assembly .

为了实现上述目的,本发明采用如下技术方案:In order to achieve the above object, the present invention adopts the following technical solutions:

一种单极电容传感器,包括测量极、等位环、屏蔽环和绝缘环;所述测量极、等位环和屏蔽环均为阶梯式结构,所述测量极、等位环和屏蔽环三者同轴且依次由内向外装配;在所述测量极、等位环和屏蔽环的同一水平高度且两两相对位置处均开设有环形槽,在测量极小轴外侧阶梯处与等位环内侧之间以及等位环小轴外侧阶梯处与屏蔽环内侧之间均设置有径向固定的绝缘环。A unipolar capacitive sensor includes a measuring pole, an equipotential ring, a shielding ring and an insulating ring; the measuring pole, the equipotential ring and the shielding ring are all stepped structures, and the measuring pole, the equipotential ring and the shielding ring are three They are coaxial and assembled from the inside to the outside in sequence; annular grooves are opened at the same level and at the opposite positions of the measuring pole, the equipotential ring and the shielding ring. A radially fixed insulating ring is arranged between the inner sides and between the outer stepped part of the small axis of the equalization ring and the inner side of the shielding ring.

作为一种实施方式,所述屏蔽环的上部内侧还开设有第一卡接槽,用于与外界设备卡接。As an embodiment, the upper inner side of the shielding ring is further provided with a first clamping groove, which is used for clamping with external equipment.

上述技术方案的优点在于,利用第一卡接槽来卡接外界设备,提高设备之间的连接稳定性。The advantage of the above technical solution is that the first clamping slot is used to clamp the external device, thereby improving the connection stability between the devices.

作为一种实施方式,所述测量极为轴状阶梯式结构。As an embodiment, the measuring pole has a shaft-like stepped structure.

作为一种实施方式,所述测量极的轴外侧开设有环形槽。As an embodiment, an annular groove is provided on the outside of the shaft of the measuring electrode.

上述技术方案的优点在于,利用轴外侧的环形槽与等位环和屏蔽环相应位置的环形槽通过绝缘环固定连接,提高了单极电容传感器的径向稳定性。The advantage of the above technical solution is that the radial stability of the unipolar capacitive sensor is improved by using the annular groove on the outside of the shaft and the annular groove at the corresponding position of the equalization ring and the shielding ring to be fixedly connected through the insulating ring.

为了解决上述问题,本发明的第二个方面提供一种接头装置,其与上述所述的单极电容传感器相匹配插拔式连接。In order to solve the above-mentioned problems, a second aspect of the present invention provides a connector device, which is matched with the above-mentioned unipolar capacitive sensor for pluggable connection.

作为一种实施方式,所述接头装置包括外壳层、外壳层线座、等位层、等位层线座和测量层;所述外壳层、等位层和测量层依次由外向内装配;所述外壳层线座、等位层线座和测量层分别对应连接三同轴线缆的最外层、中层和导电层;所述外壳层线座安装在外壳层的一端,外壳层的另一端伸入至所述单极电容传感器的屏蔽环内且插拔式连接;所述等位层线座设置在等位层两端,所述测量层与所述单极电容传感器的测量极相连。As an embodiment, the joint device includes an outer shell layer, an outer shell layer wire seat, an equalization layer, an equalization layer cable seat and a measurement layer; the outer shell layer, the equalization layer and the measurement layer are sequentially assembled from outside to inside; The outermost layer, the middle layer and the conductive layer of the triaxial cable are respectively connected to the outermost layer, the middle layer and the conductive layer of the outer shell layer wire seat, the equipotential layer wire seat and the measurement layer; the outer shell layer wire seat is installed at one end of the outer shell layer and the other end of the outer shell layer. It extends into the shielding ring of the unipolar capacitive sensor and is connected by plugging; the equipotential layer wire seat is arranged at both ends of the equipotential layer, and the measuring layer is connected with the measuring pole of the unipolar capacitive sensor.

上述技术方案的优点在于,采用外壳层与外壳层线座、等位层与等位层线座、测量层,实现线缆的三层导电层与单极电容传感器的良好导通。The advantage of the above technical solution is that the outer shell layer and the outer shell layer wire seat, the equipotential layer and the equipotential layer wire seat, and the measurement layer are used to achieve good conduction between the three-layer conductive layer of the cable and the unipolar capacitive sensor.

作为一种实施方式,所述外壳层的一端设置有与所述第一卡接槽相匹配的第一环状凸起。As an embodiment, one end of the outer shell layer is provided with a first annular protrusion matching with the first clamping groove.

上述技术方案的优点在于,采用环状凸起和卡槽装配,既能实现可靠实用的可拆卸的插拔机构,又能实现接头装置与单极电容传感器的良好的可拆卸性。The advantage of the above technical solution is that the annular protrusion and the slot assembly are used to realize a reliable and practical detachable plug-in mechanism and good detachability of the joint device and the unipolar capacitive sensor.

作为一种实施方式,设有环状凸起的外壳层一端开设有若干个纵向缝隙。As an embodiment, a plurality of longitudinal slits are opened at one end of the outer shell layer provided with the annular protrusion.

上述技术方案的优点在于,采用环状凸起设置缝隙的结构,保证良好的插拔实用性。The advantage of the above technical solution is that the annular protrusion is used to set the gap, so as to ensure good plugging and unplugging practicability.

作为一种实施方式,所述外壳层内侧开设有第二卡接槽,外壳层线座外侧设置有第二环状凸起,所述第二环状凸起卡设在第二卡接槽内。As an embodiment, the inner side of the outer shell layer is provided with a second engaging groove, the outer side of the outer shell layer wire seat is provided with a second annular protrusion, and the second annular protrusion is clamped in the second engaging groove .

作为一种实施方式,所述等位层内侧开设有第三卡接槽,等位层线座外侧设置有第三环状凸起,所述第三环状凸起卡设在第三卡接槽内。As an embodiment, the inner side of the equalization layer is provided with a third clamping groove, and the outer side of the equalization layer wire seat is provided with a third annular protrusion, and the third annular protrusion is clamped on the third clamping connection. in the slot.

作为一种实施方式,与所述测量极相连的所述测量层一端还开设有若干个纵向缝隙。As an embodiment, a plurality of longitudinal slits are further opened at one end of the measurement layer connected to the measurement electrode.

作为一种实施方式,所述等位层和测量层之间以及等位层和外壳层之间均设置有绝缘套,以实现绝缘和固定的作用。As an embodiment, insulating sleeves are provided between the equalization layer and the measurement layer and between the equalization layer and the outer shell layer, so as to achieve the functions of insulation and fixation.

本发明的有益效果是:The beneficial effects of the present invention are:

(1)本发明提供了一种实用的可插拔式的单极电容传感器,其中的测量极、等位环和屏蔽环三者同轴且依次由内向外装配,在测量极、等位环和屏蔽环的同一水平高度且两两相对位置处均开设有环形槽,在测量极小轴外侧阶梯处与等位环内侧之间以及等位环小轴外侧阶梯处与屏蔽环内侧之间均设置有径向固定的绝缘环。采用绝缘环的轴向限位,解决了单极电容传感器探头与三同轴线缆直接相接且不可拆卸的方式给组装、使用、调整和维修带来极大不便的问题,提高了单级电容传感器的可拆卸性及结构的稳定性。(1) The present invention provides a practical pluggable unipolar capacitive sensor, wherein the measuring electrode, the equipotential ring and the shielding ring are coaxial and assembled from the inside to the outside in sequence. There are annular grooves at the same level as the shielding ring and at opposite positions, between the outer step of the measurement minimum axis and the inner side of the equalization ring, and between the outer step of the equalization ring minor axis and the inner side of the shielding ring. A radially fixed insulating ring is provided. The axial limit of the insulating ring is adopted, which solves the problem that the unipolar capacitive sensor probe is directly connected to the triaxial cable and cannot be disassembled, which brings great inconvenience to assembly, use, adjustment and maintenance. Removability and structural stability of capacitive sensors.

(2)本发明采用环形槽,能够借助绝缘填充胶的凝固,能实现传感器很好的轴向的限位。(2) The present invention adopts an annular groove, which can realize a good axial limit of the sensor by means of the solidification of the insulating filler.

(3)本发明采用环状凸起和卡槽装配以及切出缝隙,能实现可靠实用的可拆卸的插拔机构。实现接头装置与单极传感器的良好的可拆卸性。(3) The present invention adopts the assembly of annular protrusions and card grooves and cutting out gaps, and can realize a reliable and practical detachable plug-in and pull-out mechanism. Good detachability of the joint device and the unipolar sensor is achieved.

(4)本发明采用外壳层与外壳层线座、等位层与等位层线座、测量层,实现线缆的三层导电层与单极电容传感器的良好导通。(4) The present invention adopts the shell layer and the shell layer wire seat, the equipotential layer and the equipotential layer wire seat, and the measurement layer, so as to realize the good conduction between the three-layer conductive layer of the cable and the unipolar capacitive sensor.

(5)本发明带阶梯机构的绝缘套,实现接头装置的三层电路的绝缘和固定。(5) The insulating sleeve with the stepped mechanism of the present invention realizes the insulation and fixation of the three-layer circuit of the joint device.

本发明附加方面的优点将在下面的描述中部分给出,部分将从下面的描述中变得明显,或通过本发明的实践了解到。Advantages of additional aspects of the invention will be set forth in part in the description which follows, and in part will become apparent from the description which follows, or may be learned by practice of the invention.

附图说明Description of drawings

构成本发明的一部分的说明书附图用来提供对本发明的进一步理解,本发明的示意性实施例及其说明用于解释本发明,并不构成对本发明的不当限定。The accompanying drawings forming a part of the present invention are used to provide further understanding of the present invention, and the exemplary embodiments of the present invention and their descriptions are used to explain the present invention, and do not constitute an improper limitation of the present invention.

图1是本发明实施例的单极电容传感器的主视图;1 is a front view of a unipolar capacitive sensor according to an embodiment of the present invention;

图2是本发明实施例的单极电容传感器的剖视图;2 is a cross-sectional view of a unipolar capacitive sensor according to an embodiment of the present invention;

图3是本发明实施例的测量极的示意图;Fig. 3 is the schematic diagram of the measuring pole of the embodiment of the present invention;

图4是本发明实施例的等位环的示意图;Fig. 4 is the schematic diagram of the allelic ring of the embodiment of the present invention;

图5是本发明实施例的屏蔽环示意图;5 is a schematic diagram of a shielding ring according to an embodiment of the present invention;

图6是本发明实施例的绝缘环示意图;6 is a schematic diagram of an insulating ring according to an embodiment of the present invention;

图7是本发明实施例的等位层的立体示意图;FIG. 7 is a three-dimensional schematic diagram of an isostatic layer according to an embodiment of the present invention;

图8是本发明实施例的等位层线座的立体示意图;FIG. 8 is a three-dimensional schematic diagram of an isobaric line seat according to an embodiment of the present invention;

图9是本发明实施例的等位层的剖视图;9 is a cross-sectional view of an isostatic layer according to an embodiment of the present invention;

图10是本发明实施例的等位层线座的剖视图;10 is a cross-sectional view of an isolevel line seat according to an embodiment of the present invention;

图11是本发明实施例的外壳层的立体示意图;FIG. 11 is a schematic perspective view of an outer shell layer according to an embodiment of the present invention;

图12是本发明实施例的外壳层线座的立体示意图;FIG. 12 is a perspective view of the outer shell wire seat according to the embodiment of the present invention;

图13是本发明实施例的外壳层的剖视图;13 is a cross-sectional view of an outer shell layer of an embodiment of the present invention;

图14是本发明实施例的外壳层线座的剖视图;FIG. 14 is a cross-sectional view of an outer shell wire seat according to an embodiment of the present invention;

图15是本发明实施例的测量层示意图;15 is a schematic diagram of a measurement layer according to an embodiment of the present invention;

图16是本发明实施例的测量层剖视图;16 is a cross-sectional view of a measurement layer of an embodiment of the present invention;

图17是本发明实施例的测量层和等位层之间的绝缘套示意图;17 is a schematic diagram of an insulating sleeve between a measurement layer and an equalization layer according to an embodiment of the present invention;

图18是本发明实施例的等位层和外壳层之间的绝缘套示意图;18 is a schematic diagram of an insulating sleeve between an equalization layer and an outer shell layer according to an embodiment of the present invention;

图19是本发明实施例的接头装置侧视图;Figure 19 is a side view of a joint device according to an embodiment of the present invention;

图20是本发明实施例的接头装置剖视图;20 is a cross-sectional view of a joint device according to an embodiment of the present invention;

图21是本发明实施例的接头与单极电容传感器整体的装配图;Fig. 21 is the overall assembly diagram of the joint and the unipolar capacitive sensor according to the embodiment of the present invention;

图22是本发明实施例的接头与单极电容传感器整体的装配剖视图.Figure 22 is a cross-sectional view of the overall assembly of the joint and the monopolar capacitive sensor according to the embodiment of the present invention.

其中:1-测量极;101-测量极小轴;102-第一环形槽;2-等位环;201-等位环小端;202-第二环形槽;3-屏蔽环;301-第一卡接槽;302-第三环形槽;4-绝缘环;5-等位层;501-第一缝隙;502-阶梯孔;503-第三卡接槽;6-等位层线座;601-第三环状凸起;602-第二缝隙;603-等位层内侧;7-外壳层;701-第一环状凸起;702-第三缝隙;703-第二卡接槽;704-阶梯孔;8-外壳层线座;801-第二环状凸起;802-第四缝隙;803-外壳层线座的内侧;9-测量层;901-第五缝隙;902-传感器侧的孔;903-线缆侧的孔;10-第一绝缘套;1001-阶梯轴;11-第二绝缘套;1101-阶梯轴。Among them: 1-measurement pole; 101-measurement minimum axis; 102-first annular groove; 2-equipotential ring; 201-equipotential ring small end; 202-second annular groove; 3-shield ring; 301-th 1 clamping slot; 302-third annular groove; 4-insulation ring; 5-equipotential layer; 501-first gap; 502-step hole; 503-third clamping groove; 6-equipotential layer wire seat; 601-the third annular protrusion; 602-the second gap; 603-the inner side of the equalization layer; 7-the outer shell layer; 701-the first annular protrusion; 702-the third gap; 703-the second clamping groove; 704-step hole; 8-outer shell wire seat; 801-second annular protrusion; 802-fourth slot; 803-inside of outer shell wire seat; 9-measurement layer; 901-fifth slot; 902-sensor 903-hole on the cable side; 10-first insulating sleeve; 1001-step shaft; 11-second insulating sleeve; 1101-step shaft.

具体实施方式Detailed ways

下面结合附图与实施例对本发明作进一步说明。The present invention will be further described below with reference to the accompanying drawings and embodiments.

应该指出,以下详细说明都是例示性的,旨在对本发明提供进一步的说明。除非另有指明,本文使用的所有技术和科学术语具有与本发明所属技术领域的普通技术人员通常理解的相同含义。It should be noted that the following detailed description is exemplary and intended to provide further explanation of the invention. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.

需要注意的是,这里所使用的术语仅是为了描述具体实施方式,而非意图限制根据本发明的示例性实施方式。如在这里所使用的,除非上下文另外明确指出,否则单数形式也意图包括复数形式,此外,还应当理解的是,当在本说明书中使用术语“包含”和/或“包括”时,其指明存在特征、步骤、操作、器件、组件和/或它们的组合。It should be noted that the terminology used herein is for the purpose of describing specific embodiments only, and is not intended to limit the exemplary embodiments according to the present invention. As used herein, unless the context clearly dictates otherwise, the singular is intended to include the plural as well, furthermore, it is to be understood that when the terms "comprising" and/or "including" are used in this specification, it indicates that There are features, steps, operations, devices, components and/or combinations thereof.

在本发明中,术语如“上”、“下”、“左”、“右”、“前”、“后”、“竖直”、“水平”、“侧”、“底”等指示的方位或位置关系为基于附图所示的方位或位置关系,只是为了便于叙述本发明各部件或元件结构关系而确定的关系词,并非特指本发明中任一部件或元件,不能理解为对本发明的限制。In the present invention, terms such as "upper", "lower", "left", "right", "front", "rear", "vertical", "horizontal", "side", "bottom", etc. The orientation or positional relationship is based on the orientation or positional relationship shown in the accompanying drawings, and is only a relational word determined for the convenience of describing the structural relationship of each component or element of the present invention. Invention limitations.

本发明中,术语如“固接”、“相连”、“连接”等应做广义理解,表示可以是固定连接,也可以是一体地连接或可拆卸连接;可以是直接相连,也可以通过中间媒介间接相连。对于本领域的相关科研或技术人员,可以根据具体情况确定上述术语在本发明中的具体含义,不能理解为对本发明的限制。In the present invention, terms such as "fixed connection", "connected", "connected", etc. should be understood in a broad sense, indicating that it can be a fixed connection, an integral connection or a detachable connection; it can be directly connected, or through the middle media are indirectly connected. For the relevant scientific research or technical personnel in the field, the specific meanings of the above terms in the present invention can be determined according to the specific situation, and should not be construed as a limitation of the present invention.

为了解决背景技术中提及到的针对单极电容传感器直接装配时,不易保证装配时同轴度精度的问题,本发明提供了一种单极电容传感器。In order to solve the problem mentioned in the background art that when the unipolar capacitive sensor is directly assembled, it is difficult to ensure the accuracy of the coaxiality during assembly, the present invention provides a unipolar capacitive sensor.

参照图1和图2,本实施例的所提供一种单极电容传感器包括测量极1、等位环2、屏蔽环3和绝缘环4。Referring to FIG. 1 and FIG. 2 , a unipolar capacitive sensor provided in this embodiment includes a measuring pole 1 , an equipotential ring 2 , a shielding ring 3 and an insulating ring 4 .

在具体实施中,所述测量极1、等位环2和屏蔽环3均为阶梯式结构,所述测量极1、等位环2和屏蔽环3三者同轴且依次由内向外装配;在所述1、等位环2和屏蔽环3的同一水平高度且两两相对位置处均开设有环形槽,在测量极小轴101外侧阶梯处与等位环2内侧之间以及等位环小端201外侧阶梯处与屏蔽环3内侧之间均设置有径向固定的绝缘环4。In a specific implementation, the measuring electrode 1, the equalizing ring 2 and the shielding ring 3 are all stepped structures, and the measuring electrode 1, the equalizing ring 2 and the shielding ring 3 are coaxial and assembled from the inside to the outside in sequence; 1. Annular grooves are provided at the same level and at the opposite positions of the equalizing ring 2 and the shielding ring 3. Between the step outside the measuring minimum axis 101 and the inner side of the equalizing ring 2 and the equalizing ring A radially fixed insulating ring 4 is provided between the step on the outer side of the small end 201 and the inner side of the shielding ring 3 .

如图2和图3所示的测量极为两个轴构成的轴状阶梯式结构。这样两轴的轴状阶梯式结构所构成的测量极结构简单且易于实现。其中,这两个轴分别为测量极大轴和测量极小轴101。The measuring pole as shown in Figures 2 and 3 is a shaft-like stepped structure composed of two shafts. The measuring pole formed by the shaft-shaped stepped structure of the two axes has a simple structure and is easy to implement. Among them, the two axes are the measurement maximum axis and the measurement minimum axis 101 respectively.

在图3中,测量极大轴外侧面开设有第一环形槽102。测量极小轴101与等位环2通过阶梯处的绝缘环4固定限位。In FIG. 3 , a first annular groove 102 is opened on the outer side surface of the measuring maximum axis. The measuring minimum shaft 101 and the equal position ring 2 are fixed and limited by the insulating ring 4 at the step.

在图4中,等位环2是阶梯式壳体结构,包括等位环小端201和等位环大端。等位环大端内侧面与外侧面均开第二环形槽口202,内侧面通过绝缘环4与测量极1固定,外侧面与屏蔽环3通过另一个绝缘环4径向固定。其中,绝缘环的结构如图6所示。In FIG. 4 , the equipotential ring 2 is a stepped housing structure, including a small end 201 of the equipotential ring and a big end of the equipotence ring. A second annular notch 202 is opened on the inner side and outer side of the big end of the equipotential ring. The structure of the insulating ring is shown in FIG. 6 .

在图5中,屏蔽环3是阶梯式壳体结构,屏蔽环3的上部内侧还开设有第一卡接槽301,用于与外界设备卡接。这样能够利用第一卡接槽来卡接外界设备,提高设备之间的连接稳定性。屏蔽环3的下端内侧面开设有第三环形槽,其与等位环的第二环形槽202对应。In FIG. 5 , the shielding ring 3 is a stepped casing structure, and a first clamping groove 301 is further opened on the inner side of the upper part of the shielding ring 3 for clamping with external equipment. In this way, the first clamping slot can be used to clamp the external device, and the connection stability between the devices can be improved. The inner side of the lower end of the shielding ring 3 is provided with a third annular groove, which corresponds to the second annular groove 202 of the equalization ring.

本实施例利用底层的轴外侧的环形槽与等位环和屏蔽环相应位置的环形槽通过绝缘环固定连接,提高了单极电容传感器的径向稳定性。In this embodiment, the annular groove on the outer side of the shaft of the bottom layer is fixedly connected with the annular groove at the corresponding position of the equalization ring and the shielding ring through the insulating ring, which improves the radial stability of the unipolar capacitive sensor.

此处需要说明的是,测量极也可采用三个轴或三个以上的轴构成的轴状阶梯式结构来实现。这样并不影响本发明的单极电容传感器达到可拆卸且装配精度高的效果。在三个轴或三个以上的轴构成的轴状阶梯式结构中,除了所述测量极的最顶层的轴,其余轴中的至少一个轴外侧开设有环形槽。It should be noted here that the measuring pole can also be realized by adopting a shaft-shaped stepped structure composed of three axes or more than three axes. This does not affect the effect of the unipolar capacitive sensor of the present invention being detachable and having high assembly accuracy. In the shaft-shaped stepped structure composed of three shafts or more, except for the shaft on the topmost layer of the measuring pole, at least one of the remaining shafts is provided with an annular groove outside.

参照图19和图20,还提供了一种接头装置,其与上述所述的单极电容传感器相匹配插拔式连接,如图21和图22所示。Referring to FIGS. 19 and 20 , a connector device is also provided, which is matched with the above-mentioned unipolar capacitive sensor for pluggable connection, as shown in FIGS. 21 and 22 .

在具体实施中,所述接头装置包括外壳层7、外壳层线座8、等位层5、等位层线座6和测量层9;所述外壳层7、等位层5和测量层9依次由外向内装配;所述外壳层线座8、等位层线座6和测量层9分别对应连接三同轴线缆的最外层、中层和导电层;所述外壳层线座8安装在外壳层7的一端,外壳层7的另一端伸入至所述单极电容传感器的屏蔽环3内且插拔式连接;所述等位层线座6设置在等位层5两端,所述测量层9与所述单极电容传感器的测量极1相连。本实施例采用外壳层与外壳层线座、等位层与等位层线座、测量层,实现线缆的三层导电层与单极电容传感器的良好导通。In a specific implementation, the joint device includes an outer shell layer 7 , an outer shell layer wire seat 8 , an equalization layer 5 , an equalization layer cable seat 6 and a measurement layer 9 ; the outer shell layer 7 , the equalization layer 5 and the measurement layer 9 The outermost layer, the middle layer and the conductive layer of the triaxial cable are respectively connected to the outermost layer, the middle layer and the conductive layer of the outer layer wire seat 8, the equipotential layer wire seat 6 and the measurement layer 9 respectively; the outer layer wire seat 8 is installed At one end of the outer shell layer 7, the other end of the outer shell layer 7 extends into the shielding ring 3 of the unipolar capacitive sensor and is connected by plugging; The measurement layer 9 is connected to the measurement electrode 1 of the monopolar capacitive sensor. In this embodiment, the shell layer and the shell layer wire seat, the equipotential layer and the equipotential layer wire seat, and the measurement layer are used to achieve good conduction between the three-layer conductive layer of the cable and the unipolar capacitive sensor.

在具体实施中,测量极小轴101与接头装置的测量层9的传感器侧的孔902相连。等位环小端201与接头装置的等位层5相连。In a specific implementation, the measuring minima axis 101 is connected to the hole 902 on the sensor side of the measuring layer 9 of the joint device. The allelic ring small end 201 is connected to the allelic layer 5 of the joint device.

在具体实施中,所述外壳层7内侧开设有第二卡接槽,外壳层线座8外侧设置有第二环状凸起801,所述第二环状凸起801卡设在第二卡接槽内。In a specific implementation, the inner side of the outer shell layer 7 is provided with a second clamping groove, and the outer side of the outer shell layer wire seat 8 is provided with a second annular protrusion 801 , and the second annular protrusion 801 is clamped on the second clamping groove. in the slot.

具体地,如图11和图12所示,外壳层线座的内侧803可通过锡焊和导电胶与三同轴线缆的最外层相连,通过卡扣机构与外壳层7相连。Specifically, as shown in FIG. 11 and FIG. 12 , the inner side 803 of the outer shell wire seat can be connected to the outermost layer of the triaxial cable through soldering and conductive glue, and connected to the outer shell layer 7 through a snap mechanism.

如图13和图14所示,外壳层7是一个壳体结构,外壳层小端面是第一环状凸起701,与传感器的屏蔽层小端内侧的第一卡接槽301配合形成卡扣装置。在外壳层小端切出若干个(比如:四个)第三缝隙702,保证卡扣装置的良好的柔性,保证良好的可拆卸性。外壳层大端面7与外壳层线座8根据第二卡接槽703和第二环状凸起801配合的卡扣机构相连。具体地,所述外壳层7的一端设置有与所述第一卡接槽301相匹配的第一环状凸起701。本实施例采用环状凸起和卡槽装配,既能实现可靠实用的可拆卸的插拔机构,又能实现接头装置与单极电容传感器的良好的可拆卸性。As shown in FIGS. 13 and 14 , the outer shell layer 7 is a shell structure, and the small end face of the outer shell layer is a first annular protrusion 701, which cooperates with the first snap groove 301 inside the small end of the shielding layer of the sensor to form a snap button device. Several (for example: four) third slits 702 are cut out at the small end of the outer shell layer to ensure good flexibility of the snap device and good detachability. The large end surface 7 of the outer shell layer is connected to the outer shell layer wire seat 8 according to the buckle mechanism in which the second clamping groove 703 and the second annular protrusion 801 cooperate. Specifically, one end of the outer shell layer 7 is provided with a first annular protrusion 701 matching with the first clamping groove 301 . This embodiment adopts annular protrusions and card grooves to assemble, which can not only realize a reliable and practical detachable plug-in mechanism, but also realize good detachability of the joint device and the unipolar capacitive sensor.

如图7-图10所示,等位层5两端分别连接等位层线座6和单极电容传感器的等位环2。与等位环2相连的一侧,切出若干个(比如4个:)第一缝隙501,保证与传感器等位环插拔时良好的柔性。所述等位层5内侧开设有第三卡接槽,等位层线座6外侧设置有第三环状凸起601,所述第三环状凸起601卡设在第三卡接槽503内。等位层5和等位层线座6通过第三卡接槽503和第三环状凸起601配合的卡扣机构相连。其中,等位层线座6,内侧603通过锡焊或导电胶连接三同轴线缆的中层,外侧通过卡扣机构与等位层5连接。As shown in FIGS. 7-10 , both ends of the equipotential layer 5 are respectively connected to the equipotential layer wire base 6 and the equipotential ring 2 of the unipolar capacitive sensor. On the side connected with the equipotential ring 2, several (for example, 4:) first slits 501 are cut out to ensure good flexibility when plugging and unplugging the equipotential ring with the sensor. The inner side of the equalization layer 5 is provided with a third clamping groove, and the outer side of the equalization layer wire seat 6 is provided with a third annular protrusion 601 , and the third annular protrusion 601 is clamped in the third clamping groove 503 Inside. The equipotential layer 5 and the equipotential layer wire seat 6 are connected to each other through a clasp mechanism in which the third clasp groove 503 cooperates with the third annular protrusion 601 . Among them, the equipotential layer wire seat 6, the inner side 603 is connected to the middle layer of the triaxial cable by soldering or conductive glue, and the outer side is connected to the equipotential layer 5 by a snap mechanism.

如图15和图16所示,测量层9是一个两端打孔的柱状体,线缆侧的孔903通过锡焊或导电胶连接三同轴线缆的最中间导电层,靠传感器侧的孔902连接传感器的测量极小轴101。在测量极一侧,切出第五缝隙901,保证插拔时的柔性。As shown in Figures 15 and 16, the measurement layer 9 is a cylindrical body with holes punched at both ends. The hole 903 on the cable side is connected to the middle conductive layer of the triaxial cable by soldering or conductive glue. The hole 902 is connected to the measuring miniature axis 101 of the sensor. On the measuring pole side, a fifth slit 901 is cut out to ensure flexibility during insertion and removal.

具体地,第一绝缘套10设置在等位层5和测量层9中间,起到绝缘和固定的作用。同时阶梯轴1001和等位层阶梯孔502结合,保证轴向的良好刚性连接。第二绝缘套11设置在等位层5和外壳层7中间,起到绝缘和固定的作用。同时阶梯轴1101和等位层阶梯孔704结合,保证轴向的良好刚性连接。Specifically, the first insulating sleeve 10 is arranged between the equalization layer 5 and the measurement layer 9, and plays the role of insulation and fixation. At the same time, the stepped shaft 1001 is combined with the stepped hole 502 of the equalization layer to ensure a good rigid connection in the axial direction. The second insulating sleeve 11 is arranged between the equalization layer 5 and the outer shell layer 7, and plays the role of insulation and fixation. At the same time, the stepped shaft 1101 is combined with the stepped hole 704 of the equalization layer to ensure a good rigid connection in the axial direction.

通过外壳层7与外壳层线座8,实现了线缆外侧导电层和传感器屏蔽环3的连接;通过等位层5与等位层线座6,实现线缆的中间导电层和传感器等位环2的连接;通过测量层9,实现线缆的最中间导电层和传感器测量极1的连接。采用卡扣机构和缝隙的存在,也保证良好的插拔实用性。The connection between the outer conductive layer of the cable and the sensor shielding ring 3 is realized through the outer shell layer 7 and the outer shell layer wire seat 8; through the equipotential layer 5 and the equipotential layer wire seat 6, the middle conductive layer of the cable and the sensor are equalized. The connection of the ring 2; through the measurement layer 9, the connection between the middlemost conductive layer of the cable and the sensor measurement pole 1 is realized. The existence of a snap mechanism and a gap also ensures good plugging and unplugging practicability.

本实施例的一种插拔式的单极电容器和接头装置可以应用在测量压电微位移、微小尺寸、微振动等领域,在精密测量领域具有较为广泛的应用。The plug-in type unipolar capacitor and the connector device of this embodiment can be applied in the fields of measuring piezoelectric micro-displacement, micro-dimension, micro-vibration, etc., and has a relatively wide application in the field of precision measurement.

以上所述仅为本发明的优选实施例而已,并不用于限制本发明,对于本领域的技术人员来说,本发明可以有各种更改和变化。凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims (10)

1.一种单极电容传感器,其特征在于,包括测量极、等位环、屏蔽环和绝缘环;所述测量极、等位环和屏蔽环均为阶梯式结构,所述测量极、等位环和屏蔽环三者同轴且依次由内向外装配;在所述测量极、等位环和屏蔽环的同一水平高度且两两相对位置处均开设有环形槽,在测量极小轴外侧阶梯处与等位环内侧之间以及等位环小轴外侧阶梯处与屏蔽环内侧之间均设置有径向固定的绝缘环;所述屏蔽环的上部内侧还开设有第一卡接槽,用于与外界设备卡接。1. a unipolar capacitive sensor, is characterized in that, comprises measuring pole, equipotential ring, shielding ring and insulating ring; Described measuring pole, equipotential ring and shielding ring are all stepped structures, and described measuring pole, etc. The position ring and the shielding ring are coaxial and assembled from the inside to the outside in sequence; annular grooves are opened at the same level and opposite positions of the measuring pole, the equalization ring and the shielding ring. A radially fixed insulating ring is arranged between the step and the inner side of the equalization ring and between the outer step of the small axis of the equalization ring and the inner side of the shielding ring; the upper inner side of the shielding ring is also provided with a first clamping groove, Used to connect with external devices. 2.如权利要求1所述的单极电容传感器,其特征在于,所述测量极为轴状阶梯式结构。2 . The unipolar capacitive sensor according to claim 1 , wherein the measurement pole has an axial stepped structure. 3 . 3.一种接头装置,其特征在于,其与权利要求1-2中任一项所述的单极电容传感器相匹配插拔式连接。3. A connector device, characterized in that it is matched with the unipolar capacitive sensor according to any one of claims 1-2 and is connected in a pluggable manner. 4.如权利要求3所述的接头装置,其特征在于,所述接头装置包括外壳层、外壳层线座、等位层、等位层线座和测量层;所述外壳层、等位层和测量层依次由外向内装配;所述外壳层线座、等位层线座和测量层分别对应连接三同轴线缆的最外层、中层和导电层;所述外壳层线座安装在外壳层的一端,外壳层的另一端伸入至所述单极电容传感器的屏蔽环内且插拔式连接;所述等位层线座设置在等位层两端,所述测量层与所述单极电容传感器的测量极相连。4. The joint device according to claim 3, characterized in that, the joint device comprises an outer shell layer, an outer shell layer wire seat, an equalization layer, an equalization layer cable seat and a measurement layer; the outer shell layer, the equalization layer The outermost layer, the middle layer and the conductive layer of the triaxial cable are respectively connected to the outermost layer, the middle layer and the conductive layer of the outer layer, and the outermost layer, the middle layer and the conductive layer of the triaxial cable are respectively connected; One end of the outer shell layer, the other end of the outer shell layer extends into the shielding ring of the unipolar capacitive sensor and is connected by plugging; The measuring poles of the unipolar capacitive sensor are connected. 5.如权利要求4所述的接头装置,其特征在于,所述外壳层的一端设置有与所述第一卡接槽相匹配的第一环状凸起。5 . The joint device according to claim 4 , wherein one end of the outer shell layer is provided with a first annular protrusion matching with the first engaging groove. 6 . 6.如权利要求5所述的接头装置,其特征在于,设有环状凸起的外壳层一端开设有若干个纵向缝隙。6 . The joint device according to claim 5 , wherein a plurality of longitudinal slits are opened at one end of the outer shell layer provided with the annular protrusion. 7 . 7.如权利要求5所述的接头装置,其特征在于,所述外壳层内侧开设有第二卡接槽,外壳层线座外侧设置有第二环状凸起,所述第二环状凸起卡设在第二卡接槽内。7 . The joint device according to claim 5 , wherein a second clamping groove is provided on the inner side of the outer shell layer, and a second annular protrusion is provided on the outer side of the wire seat of the outer shell layer. The lifting card is arranged in the second engaging groove. 8.如权利要求5所述的接头装置,其特征在于,所述等位层内侧开设有第三卡接槽,等位层线座外侧设置有第三环状凸起,所述第三环状凸起卡设在第三卡接槽内。8 . The joint device according to claim 5 , wherein the inner side of the equalization layer is provided with a third clamping groove, the outer side of the equalization layer wire seat is provided with a third annular protrusion, and the third ring The shaped protrusion is clamped in the third clamping groove. 9.如权利要求8所述的接头装置,其特征在于,与所述测量极相连的所述测量层一端还开设有若干个纵向缝隙。9 . The joint device according to claim 8 , wherein a plurality of longitudinal slits are opened at one end of the measurement layer connected to the measurement electrode. 10 . 10.如权利要求8所述的接头装置,其特征在于,所述等位层和测量层之间以及等位层和外壳层之间均设置有绝缘套,以实现绝缘和固定的作用。10 . The joint device according to claim 8 , wherein an insulating sleeve is provided between the equalization layer and the measurement layer and between the equalization layer and the outer shell layer, so as to realize the functions of insulation and fixation. 11 .
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