CN113008787A - Light source device and optical detection system - Google Patents
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- CN113008787A CN113008787A CN202011357685.7A CN202011357685A CN113008787A CN 113008787 A CN113008787 A CN 113008787A CN 202011357685 A CN202011357685 A CN 202011357685A CN 113008787 A CN113008787 A CN 113008787A
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
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Abstract
本发明提供一种光源装置及光学检测系统，光源装置适于提供检测光束。光源装置包括壳体、多个第一发光元件以及多个导光结构。壳体具有出光口以及第一容置空间。多个第一发光元件配置于第一容置空间，适于提供多个第一光束。多个导光结构配置于第一容置空间，其中多个第一发光元件分别对应于多个导光结构，且多个导光结构分别导引多个第一光束朝不同方向传递。多个第一光束传递出出光口以形成检测光束。
The present invention provides a light source device and an optical detection system. The light source device is suitable for providing a detection beam. The light source device includes a housing, a plurality of first light-emitting elements, and a plurality of light guide structures. The casing has a light outlet and a first accommodating space. The plurality of first light-emitting elements are arranged in the first accommodating space and are suitable for providing a plurality of first light beams. The plurality of light guide structures are disposed in the first accommodating space, wherein the plurality of first light emitting elements respectively correspond to the plurality of light guide structures, and the plurality of light guide structures respectively guide the plurality of first light beams to transmit in different directions. A plurality of first light beams are transmitted out of the light outlet to form detection light beams.
Description
Technical Field
The present invention relates to a light source device and an optical inspection system using the same, and more particularly, to a light source device for measuring a porous structure and an optical inspection system using the same.
Background
Automatic Optical Inspection (AOI) is an Inspection standard technique using machine vision to replace conventional human eye recognition so as to achieve high-precision and high-efficiency Inspection. As an improvement to the conventional defect of using an optical instrument by manpower for detection, the application level includes the fields of research and development from high-tech industries, manufacturing quality control, national defense, civilian life, medical treatment, environmental protection, electric power and the like.
In the field of optical detection, it is difficult to detect a complex surface with a relatively smooth surface, and a visible complex surface generally depends on the depth of field range of an image capturing device, and if the depth of field of the image capturing device is sufficient, the visible complex surface can be overcome. In contrast, defects that are not visible on a plane (e.g., defects on the inner sidewall of a blind hole or a through hole) are difficult to detect by conventional optical methods (e.g., planar photographing), and such defects usually require adjustment of the relative position and photographing angle of the image capturing device, and must be photographed one by one for each target area, so that such detection is very time-consuming and power-consuming, and thus it is difficult to achieve corresponding efficiency.
Disclosure of Invention
The invention provides a light source device and an optical detection system, which can sense image information with different characteristics to analyze and compare an object to be detected.
The invention provides a light source device which is suitable for providing a detection light beam. The light source device comprises a shell, a plurality of first light-emitting elements and a plurality of light guide structures. The shell is provided with a light outlet and a first accommodating space. The first light-emitting elements are arranged in the first accommodating space and are suitable for providing a plurality of first light beams. The light guide structures are disposed in the first accommodating space, wherein the first light emitting elements respectively correspond to the light guide structures, and the light guide structures respectively guide the first light beams to transmit in different directions. The plurality of first light beams are transmitted out of the light outlet to form detection light beams.
The invention also provides an optical detection system which is suitable for measuring the object to be measured. The optical detection system comprises a light source device, an image acquisition device and a processing device. The light source device is adapted to provide a detection light beam. The light source device comprises a shell, a plurality of first light-emitting elements and a plurality of light guide structures. The shell is provided with a light outlet and a first accommodating space. The first light-emitting elements are arranged in the first accommodating space and are suitable for providing a plurality of first light beams. The light guide structures are arranged in the first accommodating space, wherein the first light-emitting elements respectively correspond to the light guide structures, and the light guide structures respectively guide the first light beams to transmit in different directions. The image acquisition device is configured on a transmission path of the detection light beam reflected by the object to be detected so as to acquire an image of the object to be detected. The processing device is electrically connected to the image acquisition device and used for analyzing the image of the object to be detected to obtain a detection result of the object to be detected, wherein the first light beam is transmitted out of the light outlet to form a detection light beam.
The invention further provides a light source device which is suitable for providing the detection light beam. The light source device comprises a shell, a light guide structure, a plurality of first light-emitting elements, a plurality of second light-emitting elements and a light splitting element. The shell is provided with a light outlet, a first accommodating space and a second accommodating space. The light guide structure is arranged in the first accommodating space and is provided with a reflecting curved surface and a third accommodating space. The first light-emitting elements are arranged in the third accommodating space and are suitable for providing the first light beams to the reflecting curved surface. The plurality of second light-emitting elements are arranged in the second accommodating space and are suitable for providing second light beams. The light splitting element is configured on the transmission path of the second light beam, wherein the first light beam and the second light beam are transmitted out of the light outlet to form a detection light beam, and the reflection curved surface is suitable for reflecting the first light beam so as to ensure that the transmission directions of the transmitted light outlet are different.
The invention also provides an optical detection system which is suitable for measuring the object to be measured. The optical detection system comprises a light source device, an image acquisition device and a processing device. The light source device is suitable for providing detection light beams to an object to be detected. The light source device comprises a shell, a light guide structure, a plurality of first light-emitting elements, a plurality of second light-emitting elements and a light splitting element. The shell is provided with a light outlet, a first accommodating space and a second accommodating space. The light guide structure is arranged in the first accommodating space and is provided with a reflecting curved surface and a third accommodating space. The first light-emitting elements are arranged in the third accommodating space and are suitable for providing the first light beams to the reflecting curved surface. The plurality of second light-emitting elements are arranged in the second accommodating space and are suitable for providing second light beams. The light splitting element is configured on the transmission path of the second light beam. The image acquisition device is configured on a transmission path of the detection light beam reflected by the object to be detected. The processing device is electrically connected to the image acquisition device, wherein the first light beam and the second light beam are transmitted to the light outlet to form a detection light beam, and the reflection curved surface is suitable for reflecting the first light beam so as to enable the transmission directions of the light outlet to be different.
In view of the above, in the light source device and the optical detection system of the present invention, the plurality of first light emitting elements are disposed in the first accommodating space of the housing, and provide the plurality of first light beams through the plurality of light guide structures, wherein the first light emitting elements respectively correspond to the light guide structures, and the light guide structures respectively guide the first light beams to transmit in different directions. Therefore, when the object to be detected is sensed, the plurality of first light beams are respectively provided to different areas of the object to be detected, so that the different areas respectively present different image pictures, and further, image information with different characteristics can be sensed to analyze and compare the object to be detected. In addition, compared with the space configuration of the existing coaxial optical architecture, the design of the light guide structure can further concentrate the first light emitting element in the first accommodating space with the extending direction perpendicular to the optical axis direction in the shell, so that other elements can be configured in the space perpendicular to the optical axis direction, and further the working distance between the light source device and the image acquisition device in the optical detection system can be shortened. Meanwhile, the design can save the configuration space and ensure that the volume of the light source device is smaller.
In order to make the aforementioned and other features and advantages of the invention more comprehensible, embodiments accompanied with figures are described in detail below.
Drawings
FIG. 1 is a schematic cross-sectional view of an optical inspection system according to an embodiment of the present invention;
fig. 2 is a partial schematic view illustrating an optical inspection system measuring an object to be inspected according to an embodiment of the present invention.
FIG. 3 is a perspective view of the light source device shown in FIG. 1;
fig. 4 is a schematic cross-sectional view of an optical inspection system according to another embodiment of the present invention.
Description of the reference numerals
10. 10A: optical detection system
20: object to be tested
50: image acquisition device
60: processing apparatus
100. 100A: light source device
110: shell body
120: first light emitting element
130: light splitting element
140: second light emitting element
150. 150A: light guide structure
160: collimating lens group
170: heat sink device
A1: bottom surface area
A2: side wall region
B1, B2, B3: plane surface
E1: the first containing space
E2: the second containing space
E3: the third containing space
L: detecting light beam
L1: first light beam
L2: second light beam
O1: light outlet
O2, O3, O4: opening of the container
S: curved reflecting surface
Detailed Description
Fig. 1 is a schematic cross-sectional view of an optical inspection system according to an embodiment of the invention. Fig. 2 is a partial schematic view illustrating an optical inspection system measuring an object to be inspected according to an embodiment of the present invention. Fig. 3 is a perspective view of the light source device in fig. 1. Please refer to fig. 1 to fig. 3. For convenience of illustration, fig. 3 only shows a partial structure, not a solid structure. The present embodiment provides an optical inspection system 10 suitable for measuring an object 20 to be inspected. In detail, the object 20 to be tested is, for example, a circuit board, and has a hole structure having a bottom region a1 and a sidewall region a 2. The optical inspection system 10 is adapted to provide two kinds of light with different optical characteristics (such as optical characteristics of collimation, wavelength, optical signal intensity, incident angle, etc.) to the bottom area a1 and the sidewall area a2 of the object 20 through the light source device 100, so that the bottom area a1 and the sidewall area a2 respectively present different image frames when being sensitive, and further, image information with different characteristics can be sensed to perform analysis and comparison of the object 20.
The optical detection system 10 includes a light source device 100, an image acquisition device 50, and a processing device 60. The image capturing device 50 is disposed on the light transmission path reflected by the object 20 to be measured, and is used for capturing the light reflected by the object 20 to be measured to obtain an image. The image capturing device 50 includes a photosensitive element such as a Charge Coupled Device (CCD) or a Complementary Metal Oxide Semiconductor (CMOS), but the invention is not limited thereto.
The processing device 60 is electrically connected to the image capturing device 50, and is used for receiving the image captured by the image capturing device 50 for image detection. The processing device 60 is a Central Processing Unit (CPU), a microprocessor (micro processor), a Digital Signal Processor (DSP), a programmable controller, a Programmable Logic Device (PLD), or other similar devices or combinations thereof, but the invention is not limited thereto.
The light source device 100 is adapted to provide a detection light beam L to the object 20 to be detected. Specifically, the light source device 100 includes a housing 110, a plurality of first light emitting elements 120, a light splitting element 130, and a plurality of second light emitting elements 140. The housing 110 has a light outlet O1, a first accommodating space E1 and a second accommodating space E2 spaced apart from each other for loading the first light emitting device 120, the light splitting device 130 and the second light emitting device 140. Specifically, in the present embodiment, an opening O2 is disposed between the first accommodating space E1 and the second accommodating space E2, so that the light beams in the first accommodating space E1 and the second accommodating space E2 pass through and are transmitted through the opening O2. At the edge of the opening O2, the first accommodation space E1 and the second accommodation space E2 may be further separated by a partition or a middle frame, as shown in fig. 1, but the present invention is not limited thereto. On the other hand, the second accommodating space E2 has an opening O3 on a side opposite to the first accommodating space E1, so that the light reflected by the object 20 to be tested is transmitted to the image capturing device 50 through the opening O3.
The plurality of second light emitting elements 140 are disposed in the second accommodating space E2 and adapted to provide the second light beam L2, and the light splitting element 130 is disposed on the transmission path of the second light beam L2. In the present embodiment, the second light emitting element 140 is a light emitting device such as a Light Emitting Diode (LED) or a Laser Diode (LD), but the invention is not limited thereto. In the present embodiment, the light source device 100 further includes a collimating lens set 160 disposed on the transmission path of the second accommodating space E2 and the second light beam L2. Therefore, the second light beam L2 emitted by the second light emitting element 140 passes through the collimating lens assembly 160 to form collimated light, and is reflected by the light splitting element 130 and transmitted through the first accommodating space E1 to the object 20 to be tested, for example, the bottom surface area a1 of the object 20 to be tested is irradiated. It should be noted that the collimated light here refers to a light beam with certain collimation characteristics, i.e. a light beam without large divergence or focus characteristics, and not an absolutely collimated light beam. In other embodiments, different collimating lens assemblies 160 can pass the second light beam L2 emitted by the second light-emitting device 140 to achieve the effects of diverging, focusing, or adjusting the intensity.
The first light-emitting elements 120 are disposed in the first accommodating space E1 and are adapted to provide a plurality of first light beams L1, wherein the transmission directions of the first light beams L1 transmitted out of the light outlet O1 are different. In other words, the transmission directions of the first light beams L1 in the housing 110 are different. More specifically, the light source device 100 further includes a plurality of light guide structures 150 disposed in the first accommodating space E1, wherein the first light emitting elements 120 respectively correspond to the light guide structures 150, and the light guide structures 150 respectively guide the first light beams L1 to transmit in different directions. The light guide structure 150 is, for example, a plate structure, an optical fiber, or a material with diffusion property, but the invention is not limited thereto. In other words, the first light emitting element 120 can guide the first light beam L1 to an area difficult to be irradiated by the shape of the light guiding structure 150, and form a diffused light through the light guiding structure 150 to be irradiated to the object 20, for example, the sidewall area a2 of the object 20.
Therefore, the first light beam L1 and the second light beam L2 pass out of the light outlet O1 to form the detection light beam L, and the optical characteristics of the first light beam L1 and the second light beam L2 are different in the detection light beam L. The first light emitting device 120 may be the same as or different from the second light emitting device 140, and the invention is not limited thereto. The detection light beam L is transmitted to the object 20 to be detected, and is reflected by the object 20 to be detected and transmitted to the image capturing device 50 through the light outlet O1, the opening O2 and the opening O3 in sequence for sensing.
In other embodiments, the optical dissimilarity characteristic between the first light beam L1 and the second light beam L2 may be, for example, that the wavelength of the first light beam L1 is different from the wavelength of the second light beam L2. Still alternatively, the luminous intensity of the first light beam L1 is different from the luminous intensity of the second light beam L2. In different embodiments, the first light emitting element 120 and the second light emitting element 140 with different types or optical characteristics may be configured according to different types of objects 20 to be measured or characteristics of holes thereof, and the invention does not limit the types of optical characteristics difference between the first light beam L1 and the second light beam L2. In this way, when the object 20 is sensed, the first light beam L1 and the second light beam L2 are respectively provided to the side wall region a2 and the bottom surface region a1 of the object 20, so that the bottom surface region a1 and the side wall region a2 respectively present different image frames, and further image information (for example, different brightness) with different characteristics can be sensed to analyze and compare the object 20. In addition, compared to the spatial configuration of the conventional coaxial optical structure, the light guiding structure 150 of the present embodiment can be designed for the first light emitting element 120 in the same area, so that the first light beam L1 provided by the first light emitting element 120 can be transmitted out of the housing 110 at different angles. In addition, the light guide structure 150 is designed such that the first light emitting elements 120 can be further intensively disposed in the first accommodating space E1 in the housing 110, wherein the extending direction of the first light emitting elements is perpendicular to the optical axis direction, so that other elements can be disposed in the space perpendicular to the optical axis direction, and the working distance between the light source device 100 and the image capturing device 50 in the optical detection system 10 can be further shortened. Meanwhile, the design can save the configuration space and make the light source device 100 smaller.
In detail, in the present embodiment, a portion of the first light emitting element 120 is located on a plane B1, and another portion of the first light emitting element 120 is located on another plane B2, and the directions of the two planes are parallel to each other, as shown in fig. 1. In this way, the volume of the light source device 100 can be reduced, and the heat sink can be easily configured to dissipate the heat of the two portions of the first light emitting element 120, thereby achieving the advantage of simple configuration. In other words, the light source device 100 may further include two heat dissipation devices 170 respectively connected to one portion of the first light emitting element 120 and another portion of the first light emitting element 120. As shown in fig. 3, the first light emitting device 120 and the second light emitting device 140 may have circuit substrates, respectively, so that the heat sink 170 (only shown on the left side) can be conveniently disposed on the first light emitting device 120 and the second light emitting device 140.
Fig. 4 is a schematic cross-sectional view of an optical inspection system according to another embodiment of the present invention. Please refer to fig. 2 and fig. 4 simultaneously. The optical inspection system 10A of the present embodiment is similar to the optical inspection system 10 of fig. 1. The difference between the two is that, in the present embodiment, the light source device 100A of the optical detection system 10A is different from the light source device 100 of fig. 1. In detail, in the present embodiment, the light guiding structure 150A of the light source device 100A has a curved reflecting surface S and a third accommodating space E3. The plurality of first light-emitting elements 120 are disposed in the third accommodating space E3 and adapted to provide a plurality of first light beams L1 to the curved reflective surface S, wherein the curved reflective surface S is adapted to reflect the first light beams L1 so that the transmission directions of the first light beams transmitted through the light outlet O1 are different. The dome of the light guide structure 150A has an opening O4 for allowing the light reflected by the object 20 to be tested to pass through the opening O4 and pass through the opening O3 to the image capturing device 50.
In detail, in the present embodiment, the first light emitting elements 120 are located on the same plane B3 and provide the first light beams L1 in the same direction, i.e., upward direction. Therefore, the first light beam L1 can be reflected by the curved reflective surface S to transmit in different directions, and can be guided to an area difficult to be irradiated, and form a diffused light through the curved reflective surface S to be irradiated to the object 20, such as the sidewall area a2 of the object 20. In this way, when the object 20 is sensed, the second light beam L2 and the first light beam L1 are respectively provided to the bottom area a1 and the side wall area a2 of the object 20, so that the bottom area a1 and the side wall area a2 respectively present different image frames, and further image information (e.g., different brightness) with different characteristics can be sensed to analyze and compare the object 20.
In addition, it should be noted that in the present embodiment, the first light emitting elements 120 may be respectively disposed on two same regions of the plane B3, for example, disposed as a light bar, as shown in fig. 4. Thus, the heat sink can be easily configured to dissipate the heat of the two portions of the first light emitting element 120, thereby achieving the advantage of simple configuration. In other words, the light source device 100 may further include two heat dissipation devices 170 respectively connected to one portion of the first light emitting element 120 and another portion of the first light emitting element 120.
In summary, in the light source device and the optical detection system of the present invention, the plurality of first light emitting elements are disposed in the first accommodating space of the housing, and provide the plurality of first light beams through the plurality of light guide structures, wherein the first light emitting elements respectively correspond to the light guide structures, and the light guide structures respectively guide the first light beams to transmit in different directions. Therefore, when the object to be detected is sensed, the plurality of first light beams are respectively provided to different areas of the object to be detected, so that the different areas respectively present different image pictures, and further, image information with different characteristics can be sensed to analyze and compare the object to be detected. In addition, compared with the space configuration of the existing coaxial optical architecture, the design of the light guide structure can further concentrate the first light emitting element in the first accommodating space with the extending direction perpendicular to the optical axis direction in the shell, so that other elements can be configured in the space perpendicular to the optical axis direction, and further the working distance between the light source device and the image acquisition device in the optical detection system can be shortened. Meanwhile, the design can save the configuration space and ensure that the volume of the light source device is smaller.
Although the present invention has been described with reference to the above embodiments, it should be understood that various changes and modifications can be made therein by those skilled in the art without departing from the spirit and scope of the invention.
Claims (15)
1. A light source apparatus adapted to provide a detection beam, comprising:
the shell is provided with a light outlet and a first accommodating space;
the first light-emitting elements are configured in the first accommodating space and are suitable for providing a plurality of first light beams;
and the light guide structures are configured in the first accommodating space, wherein the first light-emitting elements respectively correspond to the light guide structures, the light guide structures respectively guide the first light beams to transmit in different directions, and the first light beams are transmitted out of the light outlet to form the detection light beams.
2. The light source device according to claim 1, wherein a part of the plurality of first light emitting elements is located on a plane, another part of the plurality of first light emitting elements is located on another plane, and directions of the two planes are parallel to each other.
3. The light source device of claim 1, further comprising:
and the two heat dissipation devices are respectively configured and connected with one part of the first light-emitting elements and the other part of the first light-emitting elements.
4. The light source device according to claim 1, wherein the housing further includes a second receiving space spaced apart from the first receiving space, the light source device further comprising:
the plurality of second light-emitting elements are configured in the second accommodating space and are suitable for providing second light beams; and
and the light splitting element is configured on a transmission path of the second light beam, wherein the plurality of first light beams and the second light beam form the detection light beam.
5. The light source device of claim 4, wherein the plurality of first light beams are diffuse light and the second light beam is collimated light.
6. The light source device of claim 4, wherein a wavelength of the plurality of first light beams is different from a wavelength of the second light beam or a luminous intensity of the plurality of first light beams is different from a luminous intensity of the second light beam.
7. The light source device of claim 4, further comprising:
and the collimating lens group is configured on the second accommodating space and the transmission path of the second light beam.
8. The light source device according to claim 4, wherein the first accommodating space is located between the second accommodating space and the light outlet, and the second light beam passes through the first accommodating space.
9. The light source device of claim 1, wherein the plurality of light guiding structures are comprised of at least one of plate-like structures, optical fibers, or materials with diffusive properties.
10. An optical inspection system adapted to measure an object to be inspected, comprising:
the light source device is suitable for providing detection light beams to the object to be detected, and comprises:
the shell is provided with a light outlet and a first accommodating space;
the first light-emitting elements are configured in the first accommodating space and are suitable for providing a plurality of first light beams; and
a plurality of light guide structures configured in the first accommodating space, wherein the plurality of first light emitting elements respectively correspond to the plurality of light guide structures, and the plurality of light guide structures respectively guide the plurality of first light beams to transmit in different directions;
the image acquisition device is configured on a transmission path of the detection light beam reflected by the object to be detected so as to acquire an image of the object to be detected; and
and the processing device is electrically connected with the image acquisition device and used for carrying out image analysis on the image of the object to be detected so as to obtain a detection result of the object to be detected, wherein the plurality of first light beams are transmitted out of the light outlet to form the detection light beams.
11. The optical inspection system of claim 10, wherein the housing further includes a second receiving space spaced apart from the first receiving space, the light source device further comprising:
the plurality of second light-emitting elements are configured in the second accommodating space and are suitable for providing second light beams; and
and a light splitting element configured on a transmission path of the second light beam, wherein the plurality of first light beams and the second light beam form the detection light beam, the object to be detected has a hole structure, the hole structure has a bottom area and a sidewall area, the second light beam is transmitted to the bottom area, and the plurality of first light beams are transmitted to the sidewall area.
12. A light source apparatus adapted to provide a detection beam, comprising:
the shell is provided with a light outlet, a first accommodating space and a second accommodating space;
the light guide structure is arranged in the first accommodating space and is provided with a reflecting curved surface and a third accommodating space;
the first light-emitting elements are configured in the third accommodating space and are suitable for providing a plurality of first light beams to the reflecting curved surface;
the plurality of second light-emitting elements are configured in the second accommodating space and are suitable for providing second light beams; and
and the light splitting element is configured on a transmission path of the second light beam, wherein the plurality of first light beams and the second light beam are transmitted out of the light outlet to form the detection light beam, and the reflecting curved surface is suitable for reflecting the plurality of first light beams so as to ensure that the transmission directions of the plurality of first light beams transmitted out of the light outlet are different.
13. The light source device of claim 12, wherein the plurality of first light emitting elements are located on a same plane and provide the plurality of first light beams toward a same direction.
14. An optical inspection system adapted to measure an object to be inspected, comprising:
the light source device is suitable for providing detection light beams to the object to be detected, and comprises:
the shell is provided with a light outlet, a first accommodating space and a second accommodating space;
the light guide structure is arranged in the first accommodating space and is provided with a reflecting curved surface and a third accommodating space;
the first light-emitting elements are configured in the third accommodating space and are suitable for providing a plurality of first light beams to the reflecting curved surface;
the plurality of second light-emitting elements are configured in the second accommodating space and are suitable for providing second light beams; and
a light splitting element disposed on a transmission path of the second light beam;
the image acquisition device is configured on a transmission path of the detection light beam reflected by the object to be detected; and
and the processing device is electrically connected to the image acquisition device, wherein the plurality of first light beams and the plurality of second light beams are transmitted out of the light outlet to form the detection light beams, and the reflection curved surface is suitable for reflecting the plurality of first light beams so that the transmission directions transmitted out of the light outlet are different.
15. The optical inspection system of claim 14, wherein the object under test has an aperture structure, and the aperture structure has a bottom region and a sidewall region, the first beams pass to the sidewall region, and the second beam passes to the bottom region.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
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| TW108146785 | 2019-12-19 | ||
| TW108146785A TWI721720B (en) | 2019-12-19 | 2019-12-19 | Light source device and optical inspection system |
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| CN113008787A true CN113008787A (en) | 2021-06-22 |
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| TWI825682B (en) * | 2022-04-20 | 2023-12-11 | 由田新技股份有限公司 | Integrated light source device and optical inspection system comprising thereof |
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| TW202125034A (en) | 2021-07-01 |
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