CN112968294A - Dual-tuning large-angle filter unit, filter and transmission type sensor based on metamaterial - Google Patents
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Abstract
The invention relates to a metamaterial-based double-tuned large-angle filter unit, a filter and a transmission type sensor, wherein the filter and the transmission type sensor are composed of the unit, the unit structure comprises a substrate layer, a dielectric layer is coated on the front surface of the substrate layer, the cross sections of the substrate layer and the dielectric layer are rectangular, the length of the substrate layer and the dielectric layer is 18-24 mu m, and the width of the substrate layer and the dielectric layer is 14-18 mu m; two graphene strips parallel to the wide sides of the rectangle are manufactured on the dielectric layer, the two graphene strips are rectangles with the same size, the length is 9-12 mu m, the width is 0.8-3.2 mu m, and the distance between the two graphene strips is 3-6 mu m. The base layer material is liquid crystal. The invention has the characteristic of wide-angle multiband filtering, and the frequency spectrums of the filter and the sensor are respectively and independently influenced by the voltage loaded on the liquid crystal and the voltage loaded on the graphene strip, so the invention has the characteristic of double-voltage control.
Description
Technical Field
The invention relates to the technical field of electromagnetic metamaterials, in particular to a metamaterial-based double-tuned large-angle filter unit, a filter formed by the unit and a transmission type sensor.
Background
Meta-materials are a generic term for materials in which sub-wavelength structures create properties through periodic or non-periodic arrangements that are not found in natural materials. The characteristics of the materials depend on artificial structures and do not depend on the materials, namely, the characteristics of the same materials are changed by designing different artificial structures. The concept of metamaterials was first introduced in 1968, when both electronegative (negative permittivity or negative permeability) and electronegative (both negative permittivity and negative permeability) materials were proposed by Veselago, and they were later classified into metamaterials. But the introduction of these concepts at that time was questioned without experimentally verified conditions, and the explosion of metamaterials began until 1999 where j.b.pendry introduced artificial magnetic conductors, followed by d.r.smith et al demonstrated the presence of negative dielectric constant materials through open resonant rings. The metamaterial has the characteristics which are not possessed by natural materials, such as negative refraction effect, inverse Doppler effect, negative electricity (magnetic) conductivity, perfect imaging, perfect wave absorption and the like, becomes an important branch of materials science, and has potential application in the aspects of electromagnetic stealth, electromagnetic sensors, electromagnetic filters and the like.
Filters (Filters) are devices that pass frequency components in a specific frequency range and block frequency components in other ranges, and are widely used in the fields of communication systems, signal processing, and the like. With the development of research work in recent years, the implementation modes of filters are diversified, such as microstrip lines, frequency selective surfaces, metamaterials and the like. Filters play an important role in communication systems, and their performance affects the overall system performance. Therefore, whether the filter has the characteristics of high performance and tunability also becomes an important technical index for weighing the filter. The metamaterial provides a possibility for realizing a high-performance and tunable filter. However, electrically dual controlled multiband metamaterial filters remain a challenge.
Liquid Crystal (Liquid Crystal) has birefringence and adjustable dielectric characteristics, and can be used for constructing adjustable terahertz devices. Many tunable terahertz millimeter wave devices based on liquid crystals have been reported in the prior art. The literature appl.phys.lett. 2014,105 proposes a tunable metamaterial sensor based on nematic liquid crystal, and through experimental results, it is indicated that the transmittance of the proposed metamaterial device can be effectively adjusted by changing the alternating bias voltage applied to the nematic liquid crystal layer from 0V to 300V. The literature appl.phys.lett.,2015,107:171109 realizes a Fano resonance (Fano resonance) based high performance optical modulator by combining a nematic liquid crystal layer with a binary silicon nanohole array. The document Sci Rep,2016,6:34536 studies the electromagnetic properties of a hybrid reconfigurable three-dimensional metamaterial based on liquid crystal tuning elements to build new functional devices operating in the THz range. The document Microwave & Optical Technology Letters,2018,60: 672-. The tunable value of the stopband frequency was 3% by applying an ac bias voltage of 14V across the 38 μm thick LC layer.
Graphene (Graphene) is a novel two-dimensional material, the Fermi level of the Graphene can be changed under the regulation and control of different external voltages, the conductivity and the dielectric constant of the Graphene also change, and the Graphene is a flexible electrically-tuned two-dimensional material. And the conductivity and dielectric constant of the graphene do not change with temperature.
Disclosure of Invention
The invention aims to manufacture a filter and a transmission type sensor with the characteristics of a double-tuning large-angle filter by using the novel material, wherein the filter and the sensor have the characteristics of large-angle filtering and sensing and double-voltage control.
In order to achieve the purpose, the invention adopts the following technical scheme.
The metamaterial-based double-tuned large-angle filter unit comprises a substrate layer, wherein the front surface of the substrate layer is coated with a dielectric layer, the cross sections of the substrate layer and the dielectric layer are rectangular, the length of the substrate layer and the dielectric layer is 18-24 mu m, and the width of the substrate layer and the dielectric layer is 14-18 mu m; two graphene strips parallel to the wide sides of the rectangle are manufactured on the dielectric layer, the two graphene strips are rectangles with the same size, the length is 9-12 mu m, the width is 0.8-3.2 mu m, the distance between the two graphene strips is 3-6 mu m, and the two graphene strips are not close to the edge of the dielectric layer of the unit structure.
Specifically, the substrate layer is made of a liquid crystal layer, and the change range of the dielectric constant of the liquid crystal layer is 2.47-3.06 after the liquid crystal layer is controlled by an external voltage; the dielectric layer material is a material which can be processed and has a dielectric constant not more than 4.
Specifically, the thickness of the substrate layer is 1-3 μm, and the thickness of the dielectric layer is 0.5-3 μm.
Specifically, the dielectric layer material is polyimide.
Specifically, the distance between the graphene strip and the edge of the dielectric layer is not less than 2.8 μm.
Specifically, the graphene strip is not more than 4 layers of graphene.
When the external electromagnetic wave is a transverse electric wave and is transmitted from the graphene strip and the dielectric layer on the top layer to the substrate layer, the unit structure can generate filtering characteristics at certain specific frequency points; when the incident angle of the external electromagnetic wave is selected to change from 0 to 89 degrees, the filter characteristic generated by the unit structure obviously changes.
The external voltage can respectively and independently influence the dielectric constants of the substrate layer and the graphene strip, and further control the transmissivity of the filter unit.
The invention also proposes a filter comprising one or more metamaterial-based double-tuned large-angle filter cells as described above.
The invention also proposes a transmission type sensor comprising one or more metamaterial-based double-tuned large angle filter units as described above, the resulting transmission window being changed when the refractive index of the environment is changed, and being used as a refractive index sensor according to this characteristic.
The invention has the advantages that: the physical characteristics of the invention can be controlled by respectively controlling the parameters of the liquid crystal and the graphene through two paths of voltages, and particularly, the transmission frequency spectrum of the whole structure is controlled by controlling the dielectric constant of the liquid crystal and the dielectric constant of the graphene through an external voltage. The invention has the characteristics of large-angle filtering and sensing, and multiband filtering and sensing, and is suitable for the preparation of tunable devices.
Drawings
FIG. 1 is a front view of the cell structure of the present invention.
Fig. 2 is a cross-sectional view of the cell structure of the present invention.
FIG. 3 shows the effect of varying the angle of incident electromagnetic waves on the transmittance of the structure of the embodiment of the present invention during an experiment.
Fig. 4 is a graph of the effect of applied voltage control graphene on the transmittance of structures according to embodiments of the present invention during an experiment.
FIG. 5 is a graph showing the effect of an applied voltage on the dielectric constant of liquid crystals on the transmittance of a structure according to an embodiment of the present invention.
Fig. 6 is a graph of experimental data showing the effect of graphene strip width variation on the transmittance of structures according to embodiments of the present invention.
Fig. 7 is a graph of experimental data showing the effect of graphene strip length variation on the transmittance of structures according to embodiments of the present invention.
FIG. 8 is a graph of experimental data showing the effect of dielectric layer thickness variation on the transmission of structures according to embodiments of the present invention.
FIG. 9 is a graph of experimental data showing the effect of ambient refractive index changes on the transmission of structures according to embodiments of the present invention.
Detailed Description
The invention is further illustrated by the following figures and examples.
As shown in fig. 1-2, the metamaterial-based double-tuned large-angle filter unit structure comprises a substrate layer 3, a dielectric layer 3 is coated on the front surface of the substrate layer 3, and graphene strips 1 are manufactured on the dielectric layer 3. Graphene strips 1 on the dielectric layer 2 are of two rectangular structures which are equal in length, equal in width and parallel, the cross sections of the substrate layer 3 and the dielectric layer 2 are also rectangular, and the two graphene strips 1 are parallel to rectangular wide edges of the substrate layer 3 and the dielectric layer 2.
During specific processing, two graphene strips are manufactured on the prepared substrate layer 3 and the prepared dielectric layer 2 through masks, and the unit structure is formed. The edges of the graphene strips 1 and the dielectric layer 2 cannot be close to each other, otherwise, when the graphene strips 1 of adjacent units are arranged in an array, the graphene strips 1 of adjacent units are connected into a whole, and the structure of the invention is damaged. From the process point of view, the distance between the graphene strip 1 and the edge of the dielectric layer 2 is not less than 2.8 μm.
The length l of the substrate layer 3 and the dielectric layer 2 ranges from 18 to 24 μm, the width h ranges from 14 to 18 μm, and the length and the width are equal, that is, the substrate layer 3 and the dielectric layer 2 are square, at this time, frequency points can shift, and the transmittance can change.
Preferably, the thickness t3 of the substrate layer 3 is 1-3 μm, the thickness t2 of the dielectric layer 2 is 0.5-3 μm, and the length l of the graphene strip 11Is 8-12 μm, the width w is 0.8-3.2 μm, and the distance s between two graphene strips 1 is 3-6 μm. Variations in the thickness and width dimensions of the material cause a range of frequency shifts. As shown in FIGS. 6 to 8, the influence of the variation of the width w of the graphene strip on the structural transmittance and the length l of the graphene strip are shown1The effect of the change on the structural transmittance, and the effect of the change in the dielectric layer thickness t2 on the structural transmittance.
The preferable material of the substrate layer 3 is liquid crystal, and the dielectric constant of the liquid crystal layer is controlled by an external voltage and is in a range of 2.47-3.06. The preferred material for the dielectric layer 2 is polyimide, but other materials that can be processed to have a dielectric constant of no more than 4 can be used. The preferred material for the graphene strip 1 is single-layer graphene, and double-layer or few-layer (less than or equal to four layers) graphene can produce similar results according to the processing technology, and therefore, the invention is also within the protection scope.
In the structure shown in fig. 1 and 2, when external electromagnetic waves are selected as transverse electric waves TE and are transmitted from the graphene strips 1 and the dielectric layer 2 on the top layer to the substrate layer 3, the unit structure can generate a transmission effect at a specific frequency point to realize a filtering characteristic; when the incident angle of the applied electromagnetic wave is selected to change from 0 to 89 degrees, the filter characteristic of the unit structure changes obviously, and the transmission frequency point generated along with the increase of the incident angle also increases, as shown in fig. 3.
The unit structure is manufactured into an array, and then the double-tuned large-angle filter and the transmission type sensor can be formed.
The double-tuning large-angle filter unit, the filter and the transmission type sensor structure designed by the invention have double-voltage tunable characteristics, namely, the voltage loaded on the liquid crystal and the voltage loaded on the graphene strip can be independently and simultaneously adjusted to the response characteristics of the structure to electromagnetic waves. Mainly due to the presence of two voltage sensitive materials in the structure of the invention: the liquid crystal and the graphene materials are set to be mutually independent in the experimental process, so that the regulation and control functions of the sensor can be realized respectively, as shown in fig. 3 and 4.
Since the conductivity of the graphene material on the top layer is adjusted by the voltage, when the voltage loaded on the graphene strip 1 changes, the corresponding resonance frequency point changes, and the obtained transmission window changes, so that the transmission spectrum can be adjusted, as shown in fig. 4. I.e. the applied voltage has a tuning effect on the invention. The underlying liquid crystal layer has a similar condition, when the voltage applied to the liquid crystal layer is low, the liquid crystal dielectric constant is 2.47, when the voltage value is increased, the dielectric constant is increased, in the present invention, when the voltage is increased to a specific value, the liquid crystal dielectric constant is increased to 3.06, and accordingly, the transmission spectrum of the present invention is changed, as shown in fig. 5. Therefore, the invention has dual voltage tunable characteristic. Meanwhile, in the frequency band range of research, the Q value of the resonance frequency point of the medium-frequency band and the high-frequency band is large, as shown in fig. 9, and thus, the sensor can be applied as a transmission type sensor.
To further illustrate the features of the present invention, the following are experimental data for the structures described herein. The parameters of the unit structure of the materials used in the experiments are as follows: the base layer 3 is made of liquid crystal and has a thickness of 1.6 μm, and the dielectric layer 2 has a thickness of 1 μm. The base layer 3 and the dielectric layer 2 are rectangular with a length of 18 μm and a width of 15 μm. The material of the dielectric layer 2 is polyimide. The graphene strips 1 are single-layer graphene, the length of each graphene strip is 10 micrometers, the width of each graphene strip is 2.4 micrometers, and the distance between every two graphene strips 1 is 3 micrometers.
As shown in fig. 3, under the condition that the incident electromagnetic wave is selected to be incident in the transverse direction, when the incident angle of the electromagnetic wave is changed from 0 to 89 degrees, the transmission spectrum of the structure is greatly changed, when the electromagnetic wave is vertically incident (the incident angle is 0), only one resonance frequency point is generated in the low frequency band, which is represented as a band-stop filter, and as the incident angle increases, a new resonance frequency point is generated in the high frequency band, and the frequency point generates a red shift as the incident angle increases. The low-frequency band resonance frequency point disappears along with the increase of the incident angle to 80 degrees, the high-frequency band generates a plurality of resonance frequency points, and the characteristic of band-pass filtering is generated after the incident angle is increased to 70 degrees.
As shown in fig. 4, when the incident electromagnetic wave is a transverse wave and the applied voltage is changed so that the chemical potential μ c of graphene is increased to 0.1eV to 0.8eV, respectively, the transmission spectrum of the structure changes. When the voltage is increased, the resonant frequency point generates blue shift, and the Q value of the resonant frequency point of the high frequency band is reduced accordingly.
As shown in fig. 5, when the chemical potential of graphene is 0.1eV and the incident angle is 70 degrees, and the voltage applied to the liquid crystal is changed so that the dielectric constant EPS of the liquid crystal is 2.47,2.62,2.77,2.91, and 3.06, respectively, the resonant frequency point position of the high frequency band is unchanged and the transmittance decreases as the voltage increases. The resonance frequency points of the intermediate frequency and the low frequency bands generate a small-range red shift phenomenon. Therefore, it can be found from fig. 4 and 5 that the applied voltage can respectively affect the dielectric constants of the liquid crystal and the graphene, and further control the transmittance of the present invention, that is, the present invention has the filtering and sensing characteristics of the electrical double control.
Experiment 3
As shown in fig. 9, when the voltage applied to the graphene strip is such that μ c is 0.1eV and the voltage applied to the liquid crystal is such that the dielectric constant of the liquid crystal is 2.47 at normal temperature, the present invention is tested in the environments with refractive indexes n of 1, 1.1, 1.18, 1.27, 1.34 and 1.41:
when the environment with the refractive index of 1 is selected, the resonance frequency points are respectively 5.44, 8.36, 10.48 and 11.58 THz;
when the environment with the refractive index of 1.1 is selected, the resonance frequency points are respectively 5.27, 7.74, 9.89 and 10.68 THz;
when the environment with the refractive index of 1.18 is selected, the resonance frequency points are respectively 5.06, 7.28, 9.42 and 10.3 THz;
when the environment with the refractive index of 1.27 is selected, the resonance frequency points are respectively 4.9, 6.89, 9.08 and 10.1 THz;
when the environment with the refractive index of 1.34 is selected, the resonance frequency points are respectively 4.59, 6.51, 8.76 and 9.33 THz;
when the environment with the refractive index of 1.41 is selected, the resonance frequency points are respectively 4.06, 6.23, 8.49 and 8.97 THz.
Therefore, the position of the resonance frequency point can be controlled by changing the background environment parameters of the invention, and the sensing characteristic of electric double control can be realized, and the characteristic can be used for environment (including liquid environment, such as water, oil and the like) detection.
In conclusion, the transmission characteristic of electric double control can be generated, and the resonant frequency point can be used as a voltage sensor due to the high Q value of the resonant frequency point; meanwhile, the invention is sensitive to the incident angle of the electromagnetic wave, thus being capable of being used as an angle sensor; the invention has refractive index sensing property, so the invention can be used as a transmission type sensor. The invention has convenient tuning and simple structure and is very suitable for preparing miniaturized devices.
Claims (10)
1. Double-tuning large-angle filter unit based on metamaterial is characterized in that: the anti-corrosion coating comprises a substrate layer (3), wherein the front surface of the substrate layer (3) is coated with a dielectric layer (2), the cross sections of the substrate layer (3) and the dielectric layer (2) are rectangular, the length is 18-24 mu m, and the width is 14-18 mu m; two graphene strips (1) parallel to the wide sides of the rectangle are manufactured on the dielectric layer (2), the two graphene strips (1) are rectangles with the same size, the length is 9-12 mu m, the width is 0.8-3.2 mu m, the distance between the two graphene strips (1) is 3-6 mu m, and the two graphene strips do not lean against the edge of the dielectric layer (2) of the unit structure.
2. The metamaterial-based double-tuned large-angle filter unit as claimed in claim 1, wherein the base layer (3) is made of a liquid crystal layer, and the dielectric constant of the liquid crystal layer is controlled to be in a range of 2.47-3.06 by an applied voltage; the dielectric layer (2) is made of a material which can be processed and has a dielectric constant not more than 4.
3. The metamaterial-based double-tuned large angle filter cell of claim 2, wherein the base layer (3) has a thickness of 1-3 μm and the dielectric layer (2) has a thickness of 0.5-3 μm.
4. A metamaterial-based double-tuned large-angle filter unit as claimed in claim 2, wherein the dielectric layer (2) material is polyimide.
5. The metamaterial-based double-tuned large-angle filter unit as claimed in claim 1, wherein the graphene strips (1) are not less than 2.8 μm from the edge of the dielectric layer (2).
6. A metamaterial-based double-tuned large-angle filter unit as claimed in claim 1, wherein the graphene strips (1) are no more than 4 layers of graphene.
7. The metamaterial-based double-tuned large-angle filter unit as claimed in any one of claims 1 to 7, wherein the applied electromagnetic waves are transverse waves, and when the transverse waves are transmitted from the graphene strips (1) and the dielectric layer (2) on the top layer to the base layer (3), the unit structure generates filtering characteristics at specific frequency points; when the incident angle of the external electromagnetic wave is selected to change from 0 to 89 degrees, the filter characteristic generated by the unit structure obviously changes.
8. A metamaterial-based double-tuned large angle filter unit as claimed in any one of claims 1 to 7, wherein the applied voltage can independently affect the dielectric constant of the substrate layer (3) and the graphene strip (1) to control the transmissivity of the filter unit.
9. A filter comprising one or more metamaterial based double tuned large angle filter cells as claimed in any one of claims 1 to 7.
10. A transmissive sensor comprising one or more metamaterial based double tuned large angle filter units as claimed in any one of claims 1 to 7, wherein the resulting transmission window changes when the refractive index of the environment is changed, and is used as a refractive index sensor based on this property.
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| CN113471713A (en) * | 2021-08-13 | 2021-10-01 | 电子科技大学长三角研究院(湖州) | Angular domain filter based on super surface structure |
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