CN112798015A - Dynamic angle calibration device - Google Patents
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- CN112798015A CN112798015A CN202011534838.0A CN202011534838A CN112798015A CN 112798015 A CN112798015 A CN 112798015A CN 202011534838 A CN202011534838 A CN 202011534838A CN 112798015 A CN112798015 A CN 112798015A
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Abstract
The invention provides a dynamic angle calibration device, comprising: the invention relates to a universal adapter plate, a multi-degree-of-freedom micro-motion adjusting table, a circular grating shaft sleeve tool, a precise circular grating disc, a grating reading head, a reading head adjusting tool, a reading head mounting adjusting seat, an upper computer and the like.
Description
Technical Field
The invention relates to a dynamic angle calibration device.
Background
The turntable is a complex modern optical collector-mechatronic device, and is a special measuring device for calibrating the attitude angular position, angular rate and dynamic characteristics of an inertial device. The function of the inertial device of the core component is to determine the instantaneous position and speed of the projectile (arrow) after the projectile leaves the ground by measuring the motion parameters of the projectile, so that a guidance system guides the projectile to fly according to a predetermined orbit. Therefore, the performance of the satellite navigation system directly influences the navigation precision, directly determines the hitting precision of the missile (arrow) and the synchronous fixed-point operation precision of the satellite, and plays a very important role in the national defense technology.
At present, the angular rate calibration of a turntable in first-class foreign countries is measured by depending on the technical advantages of high-precision sensing devices, for example, a novel speed measuring chip of ADXRS developed by American analog device company has the volume of 7mm multiplied by 3mm, and is about one hundred times smaller than measuring instruments with other similar performances due to the adoption of BGA.32 packaging, the power consumption is 30mW, the weight is only 0.5g, and an angular speed detection system formed by the chip can accurately measure the angular speed. However, such a chip is expensive and cannot be introduced domestically. The existing revolving stage speed measurement in China is more by adopting a non-contact type tachometer, particularly an electronic counting type tachometer, and the method has the advantages of simple measurement process, higher measurement efficiency and lower precision.
Disclosure of Invention
The invention aims to provide a dynamic angle calibration device which is high in measurement accuracy.
To solve the above problems, the present invention provides a dynamic angle calibration apparatus, comprising: a universal adapter plate, a multi-degree-of-freedom micro-motion adjusting platform, a circular grating shaft sleeve tool, a precise circular grating disc, a circular grating reading head, a reading head adjusting tool, a reading head mounting and adjusting seat and an upper computer, wherein,
the universal adapter plate is arranged on a shafting mounting surface of a rotating component of the calibrated rotary table, the multi-degree-of-freedom micro-motion adjusting table is arranged on the universal adapter plate, and the multi-degree-of-freedom micro-motion adjusting table comprises an X-direction translational fine adjustment mechanism and a Y-direction translational fine adjustment mechanism;
a circular grating shaft sleeve tool provided with a precise circular grating disc is arranged on the platform mounting surface of the multi-degree-of-freedom micro-motion adjusting table;
the circular grating reading head and the reading head adjusting tool are arranged on a reading head mounting and adjusting seat, wherein the reading head mounting and adjusting seat comprises a magnetic base, a universal joint and a multi-dimensional fine adjustment tool which are sequentially connected, the circular grating reading head and the reading head adjusting tool are arranged on the multi-dimensional fine adjustment tool, the magnetic base is adsorbed on a non-rotating part of a rotary table, and the reading head adjusting tool is used for acquiring deviation information;
the upper computer is connected with the circular grating reading head.
Furthermore, in the device, the precise circular grating disk adopts an absolute circular grating with a split stainless steel disk type structure
Furthermore, in the device, the inner diameter of the precise circular grating disk adopts a conical surface mounting mode, and is fixed on the circular grating shaft sleeve tool by fastening screws.
Furthermore, in the device, four through grooves are formed in the universal adapter plate in four equal parts of 90 degrees, the universal adapter plate is fixed on the mounting surface of the measured shaft of the rotary table through the adapter plate fixing bolts, and the adapter plate fixing bolts are matched with adjusting blocks with various heights to adapt to the mounting surface with complicated conditions of various multi-shaft rotary tables.
Furthermore, in the device, the multi-degree-of-freedom micro-motion adjusting table further comprises an inclination angle adjusting plate, the inclination angle adjusting plate comprises two adjusting plates with flat plate structures and adjusting bolts connected with the two adjusting plates, and the included angle between the two adjusting plates is changed by rotating the adjusting bolts so as to change the inclination angle of the whole multi-degree-of-freedom micro-motion adjusting table and ensure that the normal line of the measured coordinate is parallel to the rotation axis of the rotary table.
Further, in the above device, the X-direction translational fine adjustment mechanism and the Y-direction translational fine adjustment mechanism are connected to the two adjustment plates.
Further, in the above device, the X-direction and Y-direction translational fine adjustment mechanisms adopt a guide rail structure to realize the translational movement of the mechanism.
Further, in the device, the multi-dimensional fine adjustment tool adopts a fine adjustment screw pair with high resolution to adjust the horizontal direction and the inclination angle direction.
Further, in the above device, the universal adapter plate is made of a carbon fiber material.
Further, in the device, the multi-degree-of-freedom micro-motion adjusting table and the circular grating shaft sleeve tool are made of aluminum alloy materials.
Compared with the prior art, the invention comprises the following steps: the invention relates to a universal adapter plate, a multi-degree-of-freedom micro-motion adjusting table, a circular grating shaft sleeve tool, a precise circular grating disc, a grating reading head, a reading head adjusting tool, a reading head mounting adjusting seat, an upper computer and the like.
Drawings
FIG. 1 is a block diagram of a dynamic angle calibration apparatus according to an embodiment of the present invention;
FIG. 2 is a first schematic diagram of a dynamic angle calibration apparatus according to an embodiment of the present invention;
FIG. 3 is a second schematic diagram of an angular dynamic angle calibration apparatus according to an embodiment of the present invention;
FIG. 4 is an overall block diagram of a dynamic angle calibration apparatus according to an embodiment of the present invention;
FIG. 5 is a schematic view of a bevel mount according to an embodiment of the present invention;
FIG. 6 is a schematic view of a universal adapter plate according to one embodiment of the present invention;
FIG. 7 is a schematic view of a multi-degree-of-freedom micro-motion adjustment stage according to an embodiment of the present invention;
FIG. 8 is a schematic view of a readhead mount adjustment mount according to one embodiment of this invention;
FIG. 9 is a schematic view of a multi-dimensional trimming tool according to an embodiment of the invention;
FIG. 10 is a schematic view of a circular grating readhead according to one embodiment of this invention.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
As shown in fig. 1 to 10, the dynamic angle calibration apparatus includes: a universal adapter plate 1, a multi-degree-of-freedom micro-motion adjusting platform, a circular grating shaft sleeve tool 2, a precise circular grating disk 3, a circular grating reading head 4, a reading head adjusting tool 5, a reading head mounting adjusting seat, an upper computer 6 and the like, wherein,
the universal adapter plate 1 is arranged on a shafting mounting surface of a rotating component 7 of a calibrated rotary table, the multi-degree-of-freedom micro-motion adjusting table is arranged on the universal adapter plate 1, and the multi-degree-of-freedom micro-motion adjusting table comprises an X-direction translational fine adjustment mechanism 8 and a Y-direction translational fine adjustment mechanism 9;
a circular grating shaft sleeve tool 2 provided with a precise circular grating disk 3 is arranged on the platform mounting surface of the multi-degree-of-freedom micro-motion adjusting table;
the circular grating reading head 4 and the reading head adjusting tool 5 are installed on a reading head installation adjusting seat, wherein the reading head installation adjusting seat comprises a magnetic base 10, a universal joint 11 and a multi-dimensional fine adjustment tool 12 which are sequentially connected, the circular grating reading head 4 and the reading head adjusting tool 5 are installed on the multi-dimensional fine adjustment tool, the magnetic base 10 is adsorbed on a non-rotating part (such as a fixed frame) 15 of a rotary table, and the reading head adjusting tool 5 is used for collecting deviation information;
the upper computer is connected with the circular grating reading head.
As shown in fig. 1 to 10, the present invention provides an online calibration method for a turntable, including:
1) the method comprises the steps of firstly installing a universal adapter plate on a shafting installation surface of a rotating part of a calibrated rotary table, then installing a multi-degree-of-freedom micro-motion adjusting table on the universal adapter plate, wherein the multi-degree-of-freedom micro-motion adjusting table comprises an X-direction translational micro-adjusting mechanism and a Y-direction translational micro-adjusting mechanism, and then installing a circular grating shaft sleeve tool provided with a precise circular grating disc on a platform installation surface of the multi-degree-of-freedom micro-motion adjusting table.
2) And a high-precision electronic level meter is placed on a horizontal plane of the circular grating shaft sleeve tool, the horizontal adjusting knob of the X-direction translational fine adjusting mechanism and the Y-direction translational fine adjusting mechanism of the multi-degree-of-freedom fine adjusting table is adjusted to enable the plane of the circular grating shaft sleeve tool to be parallel to the installation plane of the rotary table, then the rotary table is rotated, and a dial gauge is used for striking the radial surface of the circular grating shaft sleeve tool to enable the shafting of the precise circular grating disc to be superposed with the shafting of the rotary table.
3) Installing a circular grating reading head and a reading head adjusting tool on a reading head installing and adjusting seat, wherein the reading head installing and adjusting seat comprises a magnetic base, a universal joint and a multi-dimensional fine adjustment tool which are sequentially connected, installing the circular grating reading head and the reading head adjusting tool on the multi-dimensional fine adjustment tool, adsorbing the magnetic base on a non-rotating part (such as a fixed frame) of a rotary table, reading deviation information displayed by the reading head adjusting tool, aligning the circular grating reading head with a measuring surface of a circular grating by adjusting the degree of freedom of the multi-dimensional fine adjustment tool, and ensuring that the gap and the radial jump between the circular grating reading head and the circular grating meet the calibration requirements.
4) Setting the rotary table to rotate according to a preset angular rate, carrying out signal processing on signals acquired by the circular grating reading head to obtain processed signals, acquiring the processed signals to obtain corresponding first angular parameter values, and calculating by upper computer software through standard time base signals of an upper computer to obtain corresponding angular rate; and setting the rotary table to move according to a preset sine angular vibration mode, similarly obtaining a corresponding second angle parameter value, and calculating the second angle parameter value after filtering and secondary differentiation through upper computer software to obtain a corresponding angular acceleration value.
Aiming at a multi-axis rotary table serving as special test equipment in national defense and military model product production tests, the invention designs the on-line calibration device for the angular motion parameter calibration of the rotary table, which has the advantages of compact structure, convenience in installation and high measurement accuracy.
Specifically, the accuracy of product test data is directly influenced by whether the angular motion parameter index of a multi-axis turntable used in the research and test of various products in the field of national defense and military industry is correct or not. Because the existing multi-axis rotary table has the defects of complex and various structure sizes, table interfaces and installation spaces, great inconvenience is brought to the on-line angular motion parameter calibration, and therefore a set of universal angular motion calibration device suitable for the on-site on-line calibration of various multi-axis rotary tables needs to be designed.
As shown in fig. 4, the hardware part of the calibration device is composed of an angle measuring unit, a tool clamp, an upper computer and the like. The angle measuring unit consists of a precise circular grating disc, a circular grating reading head and a reading head adjusting tool, and the tool clamp consists of a universal adapter plate, a multi-degree-of-freedom micro-motion adjusting table, a reading head mounting and adjusting seat and the like.
The principle of the dynamic angle calibration device is as follows: the precise circular grating disc and the rotating shaft of the calibrated turntable are coaxially arranged by using the tool clamp, and the circular grating reading head and the fixed part of the turntable are arranged. And matching the circular grating reading head and the precise circular grating disk to a position meeting the requirement by using a reading head adjusting tool. And then starting the calibrated turntable, when the brick rotates, the precise circular grating disc rotates synchronously with the brick, a plurality of pulse signals are output through the circular grating reading head, and the angle, the angular rate and the angular acceleration parameter value of the turntable can be respectively obtained by conditioning and obtaining by an upper computer according to the standard time base signal through calculation.
The angle measuring unit consists of a precise circular grating disc and a grating reading head (comprising a reading head adjusting tool). The precise circular grating disc is connected with the rotary table shafting through a tool clamp. The circular grating reading head is arranged on the reading head mounting and adjusting frame, and is aligned to the grating measuring surface through the adjusting frame, so that the gap and the radial jump between the circular grating reading head and the grating are ensured to meet the calibration requirement.
As shown in fig. 5, the precise circular grating disk 3 adopts an absolute circular grating with a split stainless steel disk type structure, and has the advantages of light and thin volume, small mass and rotational inertia, and suitability for integrated installation. The inner diameter of the precise circular grating disk 3 adopts a conical surface design installation mode and is fixed on a circular grating shaft sleeve tool by a fastening screw 14. The butt joint is convenient and quick to connect to a connection tool, and the installation precision is improved. In addition, the installation mode of the conical surface enables the adjustment to be very simple, and eccentricity can be compensated. Has excellent mechanical stability and can resist thermal cycling, impact and vibration.
As shown in fig. 6, in order to solve the problem of matching with the mounting surface of the multi-axis turntable with different mounting conditions during online calibration, a universal adapter plate based on adjustable bolts is designed.
The universal adapter plate 1 is provided with four through grooves 15 according to 90-degree quartering, the universal adapter plate 1 is fixed on a mounting surface of a measured shaft of the rotary table through adapter plate fixing bolts 16, and the adapter plate fixing bolts 16 are matched with adjusting blocks 17 with various heights to adapt to mounting surfaces with complex conditions of various multi-shaft rotary tables (such as the mounting surfaces are rough and uneven in surface, and tool interfaces which cannot be disassembled and assembled and are higher than the plane are fixed on the mounting surfaces). The multi-freedom-degree micro-motion platform is aligned through four threaded holes 18 in the end face of the universal adapter plate 1 and connected through adjusting and fixing bolts.
When angular motion parameters of the multi-axis rotary table are calibrated on line, a rotating axis coordinate system of the rotary table must be overlapped with a measuring coordinate system of the calibrating device, and the original center of the rotating shaft of the rotary table and the center of the calibrating device are ensured to be on the same straight line. Otherwise, the reference error is different, the measurement angle offset is generated, and the accurate online calibration of the rotary table cannot be carried out.
Therefore, as shown in fig. 7, a multi-degree-of-freedom fine adjustment stage was developed in cooperation with the calibration device. Mainly comprises an X-direction translational fine adjustment mechanism 8, a Y-direction translational fine adjustment mechanism 9, an inclination angle adjusting plate (comprising an adjusting bolt) and the like.
The inclination angle adjusting plate comprises two adjusting plates 19 of a flat plate structure and an inclination angle adjusting bolt 20 connected with the two adjusting plates, and the included angle of the two adjusting plates 19 is changed by rotating the inclination angle adjusting bolt 20 so as to change the inclination angle of the whole multi-degree-of-freedom micro-motion adjusting table and ensure that the normal line of the measuring coordinate is parallel to the rotation axis of the rotary table, thereby leveling the calibrating device. The X-direction translational fine adjustment mechanism and the Y-direction translational fine adjustment mechanism are connected with the two adjusting plates.
The X-direction and Y-direction translational fine adjustment mechanisms adopt a guide rail structure to realize the translational motion of the mechanism, and the movement stability and the stationarity are good; the micro head is adopted to realize the fine adjustment of the mechanism, and the minimum resolution can reach 1 mu m. The bottom of the mechanism is provided with an installation screw hole which can be directly connected with an inclination angle adjusting plate, the upper surface of the X-direction and Y-direction translation fine adjustment mechanism is provided with a standard installation positioning hole, and a precise circular grating can be connected with a tool clamp through a circular grating shaft sleeve tool, so that the integral positioning and online calibration functions are realized.
As shown in fig. 8, the reading head mounting and adjusting base is composed of a magnetic base 10, a multi-dimensional fine adjustment tool 12 and a gimbal bracket 11.
The magnetic base is used as a support base of the reading head installation adjusting seat and can be adsorbed on the non-rotating fixed frame of the rotary table. The circular grating reading head is installed on the universal joint support through the multi-dimensional fine adjustment tool, and the matching coarse adjustment of the reading head and the circular grating is completed through adjusting the angle of the universal joint; through adjusting the multidimensional fine adjustment tool, fine adjustment is carried out in real time according to the displayed deviation value, and the matching time is greatly reduced. The design scheme of the universal joint and the magnetic base can be suitable for calibrating the mounting planes of the inner ring and the outer ring of the multi-axis turntable under different working conditions and different inclination angles.
The multi-dimensional fine adjustment tool uses a fine adjustment screw pair with high resolution to adjust the horizontal direction and the inclination angle direction, as shown in fig. 9 and 10. And a reading head mounting hole on the multi-dimensional fine adjustment tool is used for matching and mounting the circular grating reading head.
The inclined angle thread pair 21 is used for adjusting the pitch angle and the roll angle of a reading head mounting hole 25 of the multi-dimensional fine adjustment tool, and the X-direction translational adjustment pair 22 and the Z-direction translational adjustment pair 23 are respectively used for fine adjustment of the circular grating reading head in the transverse direction and the vertical direction. The Y-direction translation adjusting pair 24 is used for adjusting the gap between the reading head and the precise circular grating disc, and is matched with the display value of the reading head adjusting tool measuring software for fine adjustment, so that the measuring precision of the calibrating device is ensured to meet the requirement.
The upper computer of data acquisition analysis is the core part of calibrating device. The circular grating reading head picks up a measuring electric signal, the upper computer amplifies, shapes, collects and calculates the signal to obtain the current position of the grating encoder, and the required angle measurement value is calculated according to the collected position information of the grating encoder. The time frequency parameter in the angle acquisition process can be accurately acquired by the standard time base signal contained in the upper computer, and the measurement precision in the process of acquiring the angular rate and the angular acceleration value by carrying out angle differentiation is ensured.
In order to further improve the angle measurement precision of the grating, a differential amplifier is adopted to process the grating acquisition signals, new vectors are obtained through addition and subtraction operation, the phase difference between the new vectors and the signals obtained by the two reading heads is ensured to be constant, the moire fringe of the grating is subdivided and multiplied, the resolution of a calibration device is improved, and the subdivision error of grating measurement is reduced on the basis of a data processing method.
The beneficial effects of the invention are as follows:
1. the rotary table angular motion calibration device can realize the online calibration of angular motion parameters (angle, angular rate and angular acceleration parameters) of each axis of a multi-axis rotary table for weapon models.
2. The universal adapter plate is made of carbon fiber materials, the multi-degree-of-freedom micro-motion adjusting table and the round grating shaft sleeve tool are made of aluminum alloy materials, and the universal adapter plate has the advantages of being light in overall weight, high in strength and the like. The universal adapter plate is provided with a plurality of hollow grooves according to the angle equal division principle, and can be adapted to mounting holes of different rotary tables. The multi-degree-of-freedom micro-motion adjusting table has the advantages that the horizontal two-dimensional direction translation micro-motion adjusting table and the vertical direction inclination angle micro-motion adjusting table can be adjusted, and the shaft systems can be conveniently overlapped. The horizontal plane and the radial plane of the circular grating shaft sleeve tool can be used as reference planes for horizontal and radial adjustment after being processed and polished. The universal adapter plate adopts an adjusting cushion block and a special fixing bolt, and is suitable for a turntable mounting surface with uneven surface or an unassemblable tool.
3. The rear end of the circular grating reading head is connected with a reading head adjusting tool in series, and the deviation value can be displayed in real time in the matching process of the circular grating disc and the reading head of the calibrating device. The reading head mounting and adjusting seat adopts a magnetic base, a multi-dimensional fine adjustment tool and a universal joint support, the magnetic base is used as a mounting base and is absorbed on the non-rotating fixed frame of the rotary table, the reading head is mounted on the universal joint support through the multi-dimensional fine adjustment tool, and the matching coarse adjustment of the reading head and the circular grating is completed through adjusting the angle of the universal joint; through adjusting the multidimensional fine adjustment tool, fine adjustment is carried out in real time according to the displayed deviation value, and the matching time is greatly reduced. The design scheme of the universal joint and the magnetic base can be suitable for calibrating the mounting planes of the inner ring and the outer ring of the multi-axis turntable under different working conditions and different inclination angles.
4. The angle signals are acquired by adopting the double-circle grating reading heads according to 180-degree distribution, and the precision of angle measurement is greatly improved by utilizing a signal difference technology. When the rotary table is calibrated, the upper computer can respectively acquire the angle, the angular rate and the angular acceleration parameters of the rotary table through upper computer software according to the angle measurement value and the standard time base signal, and the calibration work of a certain rotary shaft can be completed only by once installation without replacing other calibration equipment.
5. Adopt split type circle grating encoder, the volume is littleer than integral type grating encoder volume, and easily field layout is applicable to the angular motion parameter online calibration of the various operating modes of multiaxis revolving stage inner and outer lane.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
It will be apparent to those skilled in the art that various changes and modifications may be made in the invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (10)
1. An online calibration method for a turntable, comprising: a universal adapter plate, a multi-degree-of-freedom micro-motion adjusting platform, a circular grating shaft sleeve tool, a precise circular grating disc, a circular grating reading head, a reading head adjusting tool, a reading head mounting and adjusting seat and an upper computer, wherein,
the universal adapter plate is arranged on a shafting mounting surface of a rotating component of the calibrated rotary table, the multi-degree-of-freedom micro-motion adjusting table is arranged on the universal adapter plate, and the multi-degree-of-freedom micro-motion adjusting table comprises an X-direction translational fine adjustment mechanism and a Y-direction translational fine adjustment mechanism;
a circular grating shaft sleeve tool provided with a precise circular grating disc is arranged on the platform mounting surface of the multi-degree-of-freedom micro-motion adjusting table;
the circular grating reading head and the reading head adjusting tool are arranged on a reading head mounting and adjusting seat, wherein the reading head mounting and adjusting seat comprises a magnetic base, a universal joint and a multi-dimensional fine adjustment tool which are sequentially connected, the circular grating reading head and the reading head adjusting tool are arranged on the multi-dimensional fine adjustment tool, the magnetic base is adsorbed on a non-rotating part of a rotary table, and the reading head adjusting tool is used for acquiring deviation information;
the upper computer is connected with the circular grating reading head.
2. The dynamic angle calibration device of claim 1, wherein the precision circular grating disk is an absolute circular grating of a split stainless steel disk type structure.
3. The dynamic angle calibration device of claim 1, wherein the inner diameter of the precision circular grating disk is mounted with a tapered surface and fixed to the circular grating bushing fixture with fastening screws.
4. The dynamic angle calibration device according to claim 1, wherein the universal adapter plate is provided with four through grooves in 90 ° quartering, the universal adapter plate is fixed on the mounting surface of the measured shaft of the turntable through an adapter plate fixing bolt, and the adapter plate fixing bolt is matched with adjusting blocks of various heights to adapt to the mounting surface with complex conditions of various multi-shaft turntables.
5. The dynamic angle calibration device of claim 1, wherein the multi-degree-of-freedom fine motion adjustment stage further comprises an inclination angle adjustment plate, the inclination angle adjustment plate comprises two adjustment plates of a flat plate structure and an adjustment bolt connected with the two adjustment plates, and the included angle between the two adjustment plates is changed by rotating the adjustment bolt, so that the inclination angle of the whole multi-degree-of-freedom fine motion adjustment stage is changed, and the normal of the measurement coordinate is ensured to be parallel to the rotation axis of the turntable.
6. The dynamic angle calibration device of claim 5, wherein the X-direction translational fine adjustment mechanism and the Y-direction translational fine adjustment mechanism are connected with the two adjustment plates.
7. The dynamic angle calibration device of claim 1, wherein the X-direction and Y-direction translational fine adjustment mechanisms are configured to achieve translational movement of the mechanism using a rail structure.
8. The dynamic angle calibration device of claim 1, wherein the multi-dimensional fine adjustment tooling employs a fine adjustment screw pair with high resolution to adjust the horizontal direction and the tilt angle direction.
9. The dynamic angle calibration device of claim 1, wherein the universal adapter plate is a carbon fiber material.
10. The dynamic angle calibration device of claim 1, wherein the multi-degree-of-freedom fine adjustment stage and the circular grating sleeve tool are made of aluminum alloy.
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| CN114895422A (en) * | 2022-03-30 | 2022-08-12 | 中国船舶重工集团公司第七0七研究所 | Mounting and adjusting structure and mounting and adjusting method of sheet type circular grating |
| CN114895422B (en) * | 2022-03-30 | 2024-04-23 | 中国船舶重工集团公司第七0七研究所 | Mounting and adjusting structure and mounting and adjusting method for sheet type circular grating |
| CN115230155A (en) * | 2022-08-22 | 2022-10-25 | 江苏乾度智造高科技有限公司 | Three-degree-of-freedom optical machine position fine-adjustment locking structure |
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| CN112798015B (en) | 2022-10-14 |
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