CN112670227A - High-efficient type wafer adsorption equipment - Google Patents
High-efficient type wafer adsorption equipment Download PDFInfo
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- CN112670227A CN112670227A CN202011551971.7A CN202011551971A CN112670227A CN 112670227 A CN112670227 A CN 112670227A CN 202011551971 A CN202011551971 A CN 202011551971A CN 112670227 A CN112670227 A CN 112670227A
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Abstract
The invention relates to a high-efficiency wafer adsorption device, which comprises a movable rod, wherein the movable rod is vertically arranged, two vacuum devices are arranged on the movable rod, an adsorption mechanism and an auxiliary mechanism are arranged on the movable rod, the adsorption mechanism and the auxiliary mechanism are both arranged below the movable rod, the adsorption mechanism comprises a fixed pipe, a rotating shaft, a power assembly, two sealing blocks, two bearings and two adsorption assemblies, the adsorption component comprises a connecting pipe and a suction nozzle, the power component comprises a driving motor, a driving gear and a driven gear, the auxiliary mechanism comprises an air pipe, a one-way valve, a sealing rod, a connecting rod, a supporting rod and two transmission components, this high-efficient type wafer adsorption equipment has realized adsorbing the function of two wafers through adsorption mechanism, has improved work efficiency not only, has still realized the function of cleaing away impurity on the suction nozzle through complementary unit.
Description
Technical Field
The invention relates to the field of chip manufacturing, in particular to efficient wafer adsorption equipment.
Background
The chip is a general name of semiconductor component products, and is also called as microcircuit, microchip, and integrated circuit, and during the packaging process of the chip, the suction nozzle needs to suck the wafer through the suction device and move the wafer to the substrate for mounting.
When absorbing the wafer, current adsorption equipment can only absorb a wafer at a single time, and work efficiency is lower, has reduced the practicality, and moreover, current adsorption equipment all adsorbs the wafer through the suction nozzle, and after producing impurity on the suction nozzle, can influence the suction nozzle and adsorb the wafer effect, easily makes the wafer drop from the suction nozzle, reduces absorbent stability.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: in order to overcome the defects of the prior art, the high-efficiency wafer adsorption equipment is provided.
The technical scheme adopted by the invention for solving the technical problems is as follows: an efficient wafer adsorption device comprises a moving rod, wherein the moving rod is vertically arranged, two vacuum devices are arranged on the moving rod, an adsorption mechanism and an auxiliary mechanism are arranged on the moving rod, and the adsorption mechanism and the auxiliary mechanism are arranged below the moving rod;
the adsorption mechanism comprises a fixed pipe, a rotating shaft, a power assembly, two sealing blocks, two bearings and two adsorption assemblies, the axis of the fixed tube is vertical to and intersected with the axis of the movable tube, the middle end of the fixed tube is positioned on the axis of the movable rod, the fixed tube is fixedly connected with the movable rod, the two sealing blocks are respectively sealed and fixedly connected with the two ends of the fixed tube, the axis of the rotating shaft is vertical to and intersected with the axis of the connecting rod, the rotating shaft is parallel to the fixed pipe and is positioned below the fixed pipe, the inner rings of the two bearings are respectively arranged at the two ends of the rotating shaft, the outer ring of the bearing is fixedly connected with the fixed pipe, the power assembly is arranged on the rotating shaft and is in transmission connection with the rotating shaft, the two adsorption assemblies are uniformly distributed in the circumferential direction by taking the axis of the rotating shaft as the center, and one adsorption assembly is arranged between the rotating shaft and the fixed pipe;
the adsorption assembly comprises a connecting pipe and a suction nozzle, the connecting pipe and the movable rod are coaxially arranged, one end of the connecting pipe is fixed on the rotating shaft, the suction nozzle is arranged at the other end of the connecting pipe, and the two vacuum devices are both positioned in the connecting pipe;
the power assembly comprises a driving motor, a driving gear and a driven gear, the driven gear is installed on a rotating shaft, the driving motor is located between the fixed pipe and the rotating shaft and is fixedly connected with the fixed pipe, the driving motor is in transmission connection with the driving gear, the driving gear is meshed with the driven gear, two air holes are formed in the rotating pipe, the air holes correspond to the sealing blocks one by one and are formed in the bottom of the fixed pipe, and the driving motor is opposite to one of the air holes;
the auxiliary mechanism comprises an air pipe, a one-way valve, a sealing rod, a connecting rod, a supporting rod and two transmission assemblies, wherein the top of the fixing pipe is provided with a mounting hole, the bottom of the fixing pipe is provided with a round hole, the mounting hole, the round hole, the sealing rod, the connecting rod and the air pipe are all coaxially arranged with the connecting rod, the air pipe penetrates through the mounting hole and is provided with a gap with the connecting rod, the air pipe is hermetically and fixedly connected with the inner wall of the mounting hole, the one-way valve is installed in the air pipe, the diameter of the sealing rod is equal to the inner diameter of the round hole and is larger than that of the connecting rod, the sealing rod is arranged in the fixing pipe and is provided with a gap with the inner wall of the fixing pipe, the top end of the connecting rod penetrates through the round hole and is fixed at the bottom end of the sealing rod, the supporting, the transmission assemblies correspond to the sealing blocks one by one, and the air pipe and the sealing rod are positioned between the two transmission assemblies;
the transmission assembly comprises a transmission unit and two connecting units, and the connecting units are circumferentially and uniformly distributed by taking the axis of the rotating shaft as a center;
the connecting unit comprises a fixed rod and a first magnet block, the axis of the fixed rod is perpendicular to and intersected with the axis of the rotating shaft, the fixed rod is parallel to the connecting pipe, one end of the fixed rod is fixed on the rotating shaft, the first magnet block is fixed at the other end of the fixed rod, the first magnet block close to the moving rod is positioned between the fixed rod and the rotating shaft, and the distance between one side of the first magnet block, far away from the rotating shaft, and the rotating shaft is smaller than the distance between one side of the suction nozzle, far away from the rotating shaft, and the axis of the rotating shaft;
the transmission unit comprises a connecting rod, a moving plate, a push rod, a spring, a second magnet block and guide holes, wherein the two second magnet blocks are respectively fixed at two ends of the supporting rod and are positioned between the first magnet block close to the moving rod and the fixed rod, the second magnet block is just opposite to the first magnet block, the magnetic poles of the second magnet block and one side of the first magnet block, which is far away from the rotating shaft, are the same, the guide holes are formed in the bottom of the fixed tube, the push rod is parallel to the moving rod, the axis of the push rod is crossed with the axis of the fixed tube, the push rod penetrates through the guide holes, the push rod is in sliding and sealing connection with the inner wall of the guide holes, the bottom end of the push rod is fixed on the second magnet block, the spring is positioned between the fixed tube and the second magnet block, the second magnet block is connected with the fixed tube through the spring, the spring is in a compression state, the moving plate is arranged in the, the other side of the movable disc is hinged with the top end of the push rod through a connecting rod, and the distance between one end of the connecting rod, close to the movable disc, and the rotating shaft is larger than the distance between the other end of the connecting rod and the rotating shaft.
Preferably, the drive motor is a servo motor in order to increase the drive force of the drive motor.
Preferably, a filter screen is installed in the air pipe for dust prevention.
Preferably, in order to reduce a gap between the inner wall of the stationary pipe and the moving plate, the inner wall of the stationary pipe is coated with a sealing grease.
Preferably, the drive gear is coated with a lubricating oil in order to reduce the frictional force between the drive gear and the driven gear.
Preferably, in order to facilitate the installation of the push rod, chamfers are arranged at two ends of the push rod.
Preferably, in order to improve the reliability of the connection between the rotating shaft and the fixing rod, the rotating shaft and the fixing rod are integrally formed.
Preferably, in order to reduce noise, two sound-absorbing plates are arranged in the fixing pipe, and the sound-absorbing plates correspond to the push rods one to one.
Preferably, in order to prolong the service life of the moving rod, the moving rod is provided with an anti-corrosion zinc coating.
Preferably, in order to save energy, two photovoltaic panels are arranged at the top of the fixed pipe and correspond to the push rods one by one.
The high-efficiency wafer adsorption equipment has the advantages that the function of adsorbing two wafers is realized through the adsorption mechanism, the working efficiency is improved, compared with the existing adsorption mechanism, the adsorption mechanism can also control the movable disc to move in the fixed pipe through the rotation of the rotating shaft, an integrated linkage structure is realized through the auxiliary mechanism, the practicability is higher, and moreover, the function of removing impurities on the suction nozzle is realized through the auxiliary mechanism.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is a schematic view showing the structure of a high-efficiency wafer adsorption apparatus according to the present invention;
FIG. 2 is a schematic diagram of the power assembly of the high efficiency wafer chucking apparatus of the present invention;
FIG. 3 is a schematic structural view of an auxiliary mechanism of the high-efficiency wafer suction apparatus of the present invention;
FIG. 4 is an enlarged view of portion A of FIG. 3;
in the figure: 1. the movable type photovoltaic air conditioner comprises a movable rod, a fixed pipe, a rotating shaft, a sealing block, a bearing, a connecting pipe, a suction nozzle, a driving motor, a driving gear, a driven gear, an air pipe, a check valve, a sealing rod, a connecting rod, a supporting rod, a fixing rod, a magnet block, a connecting rod, a movable disk, a push rod, a spring, a second magnet block, a filter screen, a sound absorption plate and a photovoltaic plate, wherein the movable rod is 2, the fixed pipe is 3, the rotating shaft, the sealing block is 4, the.
Detailed Description
The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic views illustrating only the basic structure of the present invention in a schematic manner, and thus show only the constitution related to the present invention.
As shown in fig. 1-2, an efficient wafer adsorption apparatus includes a movable rod 1, wherein the movable rod 1 is vertically disposed, two vacuum devices are disposed on the movable rod 1, an adsorption mechanism and an auxiliary mechanism are disposed on the movable rod 1, and both the adsorption mechanism and the auxiliary mechanism are disposed below the movable rod 1;
the adsorption mechanism comprises a fixed pipe 2, a rotating shaft 3, a power assembly, two sealing blocks 4, two bearings 5 and two adsorption assemblies, wherein the axis of the fixed pipe 2 is perpendicular to and intersected with the axis of the movable pipe, the middle end of the fixed pipe 2 is positioned on the axis of the movable rod 1, the fixed pipe 2 is fixedly connected with the movable rod 1, the two sealing blocks 4 are respectively sealed and fixedly connected with the two ends of the fixed pipe 2, the axis of the rotating shaft 3 is perpendicular to and intersected with the axis of the connecting rod 14, the rotating shaft 3 is parallel to the fixed pipe 2 and is positioned below the fixed pipe 2, the inner rings of the two bearings 5 are respectively installed at the two ends of the rotating shaft 3, the outer rings of the bearings 5 are fixedly connected with the fixed pipe 2, the power assembly is arranged on the rotating shaft 3 and is in transmission connection with the rotating shaft 3, and the two adsorption assemblies are uniformly distributed by taking the axis of the rotating shaft, one of the adsorption components is arranged between the rotating shaft 3 and the fixed pipe 2;
the adsorption assembly comprises a connecting pipe 6 and a suction nozzle 7, the connecting pipe 6 and the movable rod 1 are coaxially arranged, one end of the connecting rod 14 is fixed on the rotating shaft 3, the suction nozzle 7 is installed at the other end of the connecting pipe 6, and the two vacuum devices are both positioned in the connecting pipe 6;
the power assembly comprises a driving motor 8, a driving gear 9 and a driven gear 9, the driven gear 9 is installed on the rotating shaft 3, the driving motor 8 is located between the fixed pipe 2 and the rotating shaft 3 and is fixedly connected with the fixed pipe 2, the driving motor 8 is in transmission connection with the driving gear 9, the driving gear 9 is meshed with the driven gear 9, two air holes are formed in the rotating pipe, the air holes correspond to the sealing blocks 4 one by one and are formed in the bottom of the fixed pipe 2, and the driving motor 8 is opposite to one of the air holes;
during the use of the equipment, the top end of the movable rod 1 is connected with an external mobile device, and the movable rod 1 can be moved by the external mobile device, when the suction nozzle 7 below the rotating pipe is abutted to the wafer, the air pressure in the suction nozzle 7 is reduced by a vacuum device, the suction nozzle 7 adsorbs the wafer by the air pressure, then, the driving gear 9 is rotated by the driving motor 8, the rotating shaft 3 is rotated under the supporting action of the bearing 5 by the rotation of the driving gear 9 through the driven gear 9, and through calculation, the rotating shaft 3 is rotated by 180 degrees, then, the two suction nozzles 7 are exchanged in position, and the other suction nozzle 7 is abutted to and adsorbs the wafer with the wafer, namely, the function of adsorbing two wafers can be realized, and the working efficiency is improved.
As shown in fig. 3-4, the auxiliary mechanism includes an air tube 11, a check valve 12, a sealing rod 13, a connecting rod 14, a supporting rod 15 and two transmission assemblies, the top of the fixing tube 2 is provided with a mounting hole, the bottom of the fixing tube 2 is provided with a round hole, the mounting hole, the round hole, the sealing rod 13, the connecting rod 14 and the air tube 11 are all coaxially arranged with the connecting rod 14, the air tube 11 passes through the mounting hole and is provided with a gap with the connecting rod 14, the air tube 11 is hermetically and fixedly connected with the inner wall of the mounting hole, the check valve 12 is installed in the air tube 11, the diameter of the sealing rod 13 is equal to the inner diameter of the round hole and is larger than the diameter of the connecting rod 14, the sealing rod 13 is arranged in the fixing tube 2 and is provided with a gap with the inner wall of the fixing tube 2, the top end of the connecting rod 18 passes through the round hole and is fixed at the bottom end of the sealing rod 13, the supporting, the middle end of the supporting rod 15 is fixed at the bottom end of the connecting rod 14, the transmission assemblies correspond to the sealing blocks 4 one by one, and the air pipe 11 and the sealing rod 13 are located between the two transmission assemblies;
the transmission assembly comprises a transmission unit and two connecting units, and the connecting units are circumferentially and uniformly distributed by taking the axis of the rotating shaft 3 as a center;
the connecting unit comprises a fixed rod 16 and a first magnet block 17, the axis of the fixed rod 16 is perpendicular to and intersected with the axis of the rotating shaft 3, the fixed rod 16 is parallel to the connecting pipe 6, one end of the fixed rod 16 is fixed on the rotating shaft 3, the first magnet block 17 is fixed at the other end of the fixed rod 16, the first magnet block 17 close to the movable rod 1 is positioned between the fixed rod 16 and the rotating shaft 3, and the distance between the side of the first magnet block 17 far away from the rotating shaft 3 and the rotating shaft 3 is smaller than the distance between the side of the suction nozzle 7 far away from the rotating shaft 3 and the axis of the rotating shaft 3;
the transmission unit comprises a connecting rod 18, a moving disk 19, a push rod 20, a spring 21, a second magnet block 22 and guide holes, wherein the two second magnet blocks 22 are respectively fixed at two ends of a supporting rod 15 and are positioned between a first magnet block 17 close to the moving rod 1 and a fixed rod 16, the second magnet block 22 is opposite to the first magnet block 17, the second magnet block 22 and the first magnet block 17 have the same magnetic pole at one side far away from the rotating shaft 3, the guide holes are arranged at the bottom of the fixed tube 2, the push rod 20 is parallel to the moving rod 1, the axis of the push rod 20 is crossed with the axis of the fixed tube 2, the push rod 20 passes through the guide holes, the push rod 20 is connected with the inner walls of the guide holes in a sliding and sealing manner, the bottom end of the push rod 20 is fixed on the second magnet block 22, the spring 21 is positioned between the fixed tube 2 and the second magnet block 22, and the second magnet block 22 is connected with the fixed tube 2 through, the spring 21 is in a compressed state, the moving disc 19 is arranged in the fixed pipe 2 and is positioned on one side of the push rod 20 close to the axis of the connecting rod 14, the other side of the moving disc 19 is hinged with the top end of the push rod 20 through the connecting rod 18, and the distance between one end of the connecting rod 18 close to the moving disc 19 and the rotating shaft 3 is greater than the distance between the other end of the connecting rod 18 and the rotating shaft 3.
During the mounting, after the wafer on the suction nozzle 7 below the rotation shaft 3 is mounted on the substrate, the rotation shaft 3 is rotated in the reverse direction 180 degrees, so that the wafer on the other suction nozzle 7 is mounted on the substrate, wherein when no wafer is on the suction nozzle 7, the rotation shaft 3 rotates from 0 degree to 90 degrees, the distance between the first magnet block 17 and the second magnet block 22 is increased, and the repulsive force between the first magnet block 17 and the second magnet block 22 is in inverse proportion to the distance, so that the second magnet block 22 moves downward under the elastic action of the spring 21, the downward movement of the second magnet block 22 drives the push rod 20 to synchronously descend, the descending of the push rod 20 drives the moving disk 19 to move in the direction away from the axis of the moving rod 1 through the connecting rod 18, so that the two moving disks 19 move away, and air can be sucked into the fixed tube 2, and the downward movement of the second magnet block 22 drives the sealing rod 13 to be inserted into the round hole through the supporting rod 15 and the connecting rod 14, namely, the function of sealing the circular hole can be realized, when the rotating shaft 3 rotates from 90 degrees to 180 degrees, the distance between the first magnet block 17 and the second magnet block 22 can be reduced, the repulsive force on the second magnet block 22 is increased, the second magnet block 22 can drive the push rod 20 to ascend, the push rod 20 ascends to drive the two movable disks 19 to move close to each other, and at the same time, the sealing rod 13 is still inserted into the circular hole, and the air in the fixed pipe 2 cannot be discharged from the air pipe 11 through the one-way characteristic of the one-way valve 12, namely, the air compression can be realized, when the movable disks 19 stop moving, the sealing rod 13 can be moved into the fixed pipe 2 and separated from the circular hole through calculation, at the same time, the compressed air in the fixed pipe 2 is discharged from the circular hole and acts on the suction nozzle 7, the impurities on the suction nozzle 7 can be separated from the suction nozzle 7 under the action of the air flow, and the function of cleaning the suction nozzle 7 is realized, here, the air in the fixed pipe 2 can be discharged from the air holes by the remote movement of the two movable disks 19, and the air discharged from one of the air holes acts on the driving motor 8, so that the heat dissipation of the driving motor 8 can be realized.
Preferably, the driving motor 8 is a servo motor in order to increase the driving force of the driving motor 8.
The servo motor has a high strength characteristic, so that the driving force of the driving motor 8 can be improved.
Preferably, a strainer 23 is installed in the air tube 11 for dust prevention.
Dust in the air can be trapped through the filter screen 23, and dust prevention is achieved.
Preferably, in order to reduce the gap between the inner wall of the fixed pipe 2 and the moving plate 19, the inner wall of the fixed pipe 2 is coated with a sealing grease.
The sealing grease serves to reduce the gap between the inner wall of the fixed pipe 2 and the movable disk 19, and improves the sealing property.
Preferably, the drive gear 9 is coated with a lubricating oil in order to reduce the frictional force between the drive gear 9 and the driven gear 9.
The lubricating oil has the function of reducing the friction force between the driving gear 9 and the driven gear 9 and improving the smoothness of the rotation of the driven gear 9 driven by the driving gear 9.
Preferably, in order to facilitate the installation of the push rod 20, both ends of the push rod 20 are provided with chamfers.
The chamfer angle is used for reducing the caliber of the push rod 20 when passing through the guide hole, and the effect of convenient installation is achieved.
Preferably, in order to improve the reliability of the connection between the rotating shaft 3 and the fixing rod 16, the rotating shaft 3 and the fixing rod 16 are integrally formed.
The integrally formed structure has a high strength, so that the reliability of the connection of the rotating shaft 3 and the fixing lever 16 can be improved.
Preferably, in order to reduce noise, two sound-absorbing plates 24 are arranged in the fixing tube 2, and the sound-absorbing plates 24 correspond to the push rods 20 one by one.
The sound-absorbing panel 24 can absorb noise, achieving noise reduction.
Preferably, in order to prolong the service life of the moving rod 1, the moving rod 1 is provided with an anti-corrosion zinc coating.
The function of anticorrosive galvanizing coat is to promote the rust-resistant ability of carriage release lever 1, prolongs the life of carriage release lever 1.
Preferably, for energy conservation, two photovoltaic panels 25 are arranged on the top of the fixed pipe 2, and the photovoltaic panels 25 correspond to the push rods 20 one by one.
The photovoltaic panel 25 can absorb light rays to perform photovoltaic power generation, and energy conservation is realized.
During the use of the equipment, the top end of the movable rod 1 is connected with an external mobile device, the movable rod 1 can be moved by the external mobile device, when a suction nozzle 7 below the rotating pipe is abutted to a wafer, the air pressure in the suction nozzle 7 is reduced by a vacuum device, the suction nozzle 7 adsorbs the wafer by the air pressure, then, a driving gear 9 is rotated by a driving motor 8, the rotating shaft 3 is rotated under the supporting action of a bearing 5 by the rotation of the driving gear 9 through a driven gear 9, the rotating shaft 3 is rotated 180 degrees by calculation, then, the two suction nozzles 7 are exchanged in position, and the other suction nozzle 7 is abutted to the wafer and adsorbs the wafer, so that the function of adsorbing two wafers can be realized, the working efficiency is improved, during the pasting, after the wafer on the suction nozzle 7 below the rotating shaft 3 is pasted on a substrate, the rotating shaft 3 is reversely rotated 180 degrees, that is, when there is no wafer on the suction nozzle 7, the distance between the first magnet block 17 and the second magnet block 22 is increased during the rotation of the rotation shaft 3 from 0 degree to 90 degrees, and the repulsive force between the first magnet block 17 and the second magnet block 22 is inversely proportional to the distance, that is, the second magnet block 22 can be moved downward by the elasticity of the spring 21, the lowering of the second magnet block 22 drives the push rod 20 to be lowered synchronously, the lowering of the push rod 20 drives the moving disk 19 to move away from the axis of the moving rod 1 by the connecting rod 18, that is, the two moving disks 19 can be moved away, and air can be sucked into the fixed pipe 2, and the downward movement of the second magnet block 22 drives the sealing rod 13 to be inserted into the round hole by the support rod 15 and the connecting rod 14, so that the function of sealing the round hole can be realized, when the rotation shaft 3 is rotated from 90 degrees to 180 degrees, that is, the distance between the first magnet 17 and the second magnet 22 can be reduced, the repulsive force applied to the second magnet 22 can be increased, the second magnet 22 can drive the push rod 20 to ascend, the two movable disks 19 are driven to move close to each other by the ascending of the push rod 20, and at this time, the sealing rod 13 is still inserted into the circular hole, and the air in the fixed pipe 2 cannot be discharged from the air pipe 11 due to the one-way characteristic of the one-way valve 12, i.e., the air compression can be realized, when the movable disks 19 stop moving, the sealing rod 13 can be moved into the fixed pipe 2 and separated from the circular hole by calculation, at this time, the compressed air in the fixed pipe 2 is discharged from the circular hole and acts on the suction nozzle 7, the impurities on the suction nozzle 7 can be separated from the suction nozzle 7 by the air flow, the function of cleaning the suction nozzle 7 can be realized, here, the air in the fixed pipe 2 can be discharged from the air hole by the remote movement of the two movable disks 19, and the air discharged from one of the air holes acts on the driving motor 8, so that the heat dissipation of the driving motor 8 can be realized.
Compared with the prior art, this high-efficient type wafer adsorption equipment has realized the function of adsorbing two wafers through adsorption apparatus, and the work efficiency is improved, compare with current adsorption apparatus, this adsorption apparatus can also control removal dish 19 through the rotation of axis of rotation 3 and remove in fixed pipe 2, integral type linkage structure has been realized with complementary unit, and the practicality is stronger, moreover, still realize the function of cleaing away impurity on suction nozzle 7 through complementary unit, compare with current complementary unit, this complementary unit passes through compressed air and uses on suction nozzle 7, clean effect is better, and, only can make compressed air follow the round hole and discharge near removing the back that stops when two removal dishes 19, can reduce the distance between fixed pipe 2 and the suction nozzle 7 when the round hole exhausts, promote the clean suction nozzle 7 effect of air current, and the practicality is stronger.
In light of the foregoing description of the preferred embodiment of the present invention, many modifications and variations will be apparent to those skilled in the art without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.
Claims (10)
1. The efficient wafer adsorption equipment comprises a moving rod (1), wherein the moving rod (1) is vertically arranged, and two vacuum devices are arranged on the moving rod (1), and the efficient wafer adsorption equipment is characterized in that an adsorption mechanism and an auxiliary mechanism are arranged on the moving rod (1), and are arranged below the moving rod (1);
the adsorption mechanism comprises a fixed pipe (2), a rotating shaft (3), a power assembly, two sealing blocks (4), two bearings (5) and two adsorption assemblies, wherein the axis of the fixed pipe (2) is perpendicular to the axis of the movable pipe and intersected with the axis of the movable pipe, the middle end of the fixed pipe (2) is positioned on the axis of the movable rod (1), the fixed pipe (2) is fixedly connected with the movable rod (1), the two sealing blocks (4) are respectively sealed and fixedly connected with the two ends of the fixed pipe (2), the axis of the rotating shaft (3) is perpendicular to the axis of the connecting rod (14) and intersected with the axis of the connecting rod, the rotating shaft (3) is parallel to the fixed pipe (2) and positioned below the fixed pipe (2), the inner rings of the two bearings (5) are respectively arranged at the two ends of the rotating shaft (3), the outer ring of the bearings (5) is fixedly connected with the fixed pipe (2), the power assembly is arranged on the rotating shaft (3) and is in transmission connection with the rotating shaft, the two adsorption components are uniformly distributed in the circumferential direction by taking the axis of the rotating shaft (3) as the center, wherein one adsorption component is arranged between the rotating shaft (3) and the fixed pipe (2);
the adsorption assembly comprises a connecting pipe (6) and a suction nozzle (7), the connecting pipe (6) and the movable rod (1) are coaxially arranged, one end of a connecting rod (14) is fixed on the rotating shaft (3), the suction nozzle (7) is installed at the other end of the connecting pipe (6), and the two vacuum devices are both located in the connecting pipe (6);
the power assembly comprises a driving motor (8), a driving gear (9) and a driven gear (9), the driven gear (9) is installed on the rotating shaft (3), the driving motor (8) is located between the fixed pipe (2) and the rotating shaft (3) and fixedly connected with the fixed pipe (2), the driving motor (8) is in transmission connection with the driving gear (9), the driving gear (9) is meshed with the driven gear (9), two air holes are formed in the rotating pipe, the air holes correspond to the sealing blocks (4) one by one and are formed in the bottom of the fixed pipe (2), and the driving motor (8) is opposite to one of the air holes;
the auxiliary mechanism comprises an air pipe (11), a one-way valve (12), a sealing rod (13), a connecting rod (14), a supporting rod (15) and two transmission assemblies, wherein a mounting hole is formed in the top of the fixing pipe (2), a round hole is formed in the bottom of the fixing pipe (2), the mounting hole, the round hole, the sealing rod (13), the connecting rod (14) and the air pipe (11) are coaxially arranged with the connecting rod (14), the air pipe (11) penetrates through the mounting hole and is provided with a gap with the connecting rod (14), the air pipe (11) is hermetically and fixedly connected with the inner wall of the mounting hole, the one-way valve (12) is installed in the air pipe (11), the diameter of the sealing rod (13) is equal to the inner diameter of the round hole and is larger than that of the connecting rod (14), the sealing rod (13) is arranged in the fixing pipe (2) and is provided with a gap between the inner wall of the fixing, the top end of the connecting rod (18) penetrates through the circular hole and is fixed at the bottom end of the sealing rod (13), the supporting rod (15) is parallel to the fixed pipe (2) and is located between the suction nozzle (7) close to the fixed pipe (2) and the connecting rod (14), the middle end of the supporting rod (15) is fixed at the bottom end of the connecting rod (14), the transmission assemblies correspond to the sealing blocks (4) one to one, and the air pipe (11) and the sealing rod (13) are located between the two transmission assemblies;
the transmission assembly comprises a transmission unit and two connecting units, and the connecting units are circumferentially and uniformly distributed by taking the axis of the rotating shaft (3) as a center;
the connecting unit comprises a fixing rod (16) and a first magnet block (17), the axis of the fixing rod (16) is perpendicular to and intersected with the axis of the rotating shaft (3), the fixing rod (16) is parallel to the connecting pipe (6), one end of the fixing rod (16) is fixed on the rotating shaft (3), the first magnet block (17) is fixed at the other end of the fixing rod (16), the first magnet block (17) close to the moving rod (1) is positioned between the fixing rod (16) and the rotating shaft (3), and the distance between one side, far away from the rotating shaft (3), of the first magnet block (17) and the rotating shaft (3) is smaller than the distance between one side, far away from the rotating shaft (3), of the suction nozzle (7) and the axis of the rotating shaft (3);
the transmission unit comprises a connecting rod (18), a moving disc (19), a push rod (20), a spring (21), a second magnet block (22) and guide holes, wherein the two second magnet blocks (22) are respectively fixed at two ends of a supporting rod (15) and are positioned between a first magnet block (17) close to the moving rod (1) and a fixed rod (16), the second magnet block (22) is just opposite to the first magnet block (17), the magnetic poles of the second magnet block (22) and one side of the first magnet block (17) far away from a rotating shaft (3) are the same, the guide holes are formed in the bottom of a fixed tube (2), the push rod (20) is parallel to the moving rod (1), the axis of the push rod (20) is crossed with the axis of the fixed tube (2), the push rod (20) penetrates through the guide holes, the push rod (20) is in sliding and sealing connection with the inner walls of the guide holes, and the bottom end of the push rod (20) is fixed on the second magnet block (22), spring (21) are located between fixed pipe (2) and second magnet piece (22), second magnet piece (22) are connected with fixed pipe (2) through spring (21), spring (21) are in compression state, it sets up in fixed pipe (2) and is located push rod (20) one side that is close to connecting rod (14) axis to remove dish (19), it is articulated that the top of connecting rod (18) and push rod (20) is passed through to the opposite side of removing dish (19), the distance between one end that is close to removal dish (19) of connecting rod (18) and axis of rotation (3) is greater than the distance between the other end of connecting rod (18) and axis of rotation (3).
2. A high efficiency wafer chucking apparatus as recited in claim 1, wherein said drive motor (8) is a servo motor.
3. The high efficiency wafer suction apparatus as set forth in claim 1, wherein a strainer (23) is installed in said gas pipe (11).
4. The high efficiency wafer adsorption apparatus of claim 1, wherein the inner wall of the fixed pipe (2) is coated with a sealing grease.
5. A high efficiency wafer suction apparatus as claimed in claim 1, wherein said driving gear (9) is coated with a lubricating oil.
6. The high efficiency wafer chucking apparatus as set forth in claim 1, wherein both ends of said push rod (20) are chamfered.
7. The high efficiency wafer suction apparatus as set forth in claim 1, wherein said rotary shaft (3) and said fixing rod (16) are of an integrally formed structure.
8. A high efficiency wafer adsorption apparatus as claimed in claim 1 wherein two sound absorbing plates (24) are provided in said holding tube (2), said sound absorbing plates (24) corresponding one-to-one to said pusher rods (20).
9. The high efficiency wafer adsorption apparatus of claim 1, wherein the movable rod (1) is provided with an anti-corrosion zinc coating.
10. A high efficiency wafer adsorption apparatus as claimed in claim 1, wherein two photovoltaic panels (25) are provided on the top of the fixed tube (2), the photovoltaic panels (25) corresponding to the pushing rods (20) one to one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011551971.7A CN112670227A (en) | 2020-12-24 | 2020-12-24 | High-efficient type wafer adsorption equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011551971.7A CN112670227A (en) | 2020-12-24 | 2020-12-24 | High-efficient type wafer adsorption equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112670227A true CN112670227A (en) | 2021-04-16 |
Family
ID=75410025
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011551971.7A Withdrawn CN112670227A (en) | 2020-12-24 | 2020-12-24 | High-efficient type wafer adsorption equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112670227A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114104727A (en) * | 2021-11-10 | 2022-03-01 | 广东赛尼智能装备科技有限公司 | Conveying device |
| CN114929005A (en) * | 2022-05-27 | 2022-08-19 | 宁波复洋光电有限公司 | Auxiliary device convenient to installation four-color paster |
-
2020
- 2020-12-24 CN CN202011551971.7A patent/CN112670227A/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114104727A (en) * | 2021-11-10 | 2022-03-01 | 广东赛尼智能装备科技有限公司 | Conveying device |
| CN114929005A (en) * | 2022-05-27 | 2022-08-19 | 宁波复洋光电有限公司 | Auxiliary device convenient to installation four-color paster |
| CN114929005B (en) * | 2022-05-27 | 2023-08-11 | 宁波复洋光电有限公司 | Auxiliary device convenient to four-color patch is installed |
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Application publication date: 20210416 |
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