CN112504152A - Vacuum sputtering gap measuring device - Google Patents
Vacuum sputtering gap measuring device Download PDFInfo
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- CN112504152A CN112504152A CN202011428449.XA CN202011428449A CN112504152A CN 112504152 A CN112504152 A CN 112504152A CN 202011428449 A CN202011428449 A CN 202011428449A CN 112504152 A CN112504152 A CN 112504152A
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- China
- Prior art keywords
- measuring device
- vacuum sputtering
- slide rail
- displacement mechanism
- workstation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a vacuum sputtering gap measuring device, relates to the technical field of vacuum sputtering, and aims to solve the problem that the measuring accuracy is poor due to the fact that an existing measuring tool cannot be flexibly adjusted according to changes of a use environment. One side of workstation is provided with the fly leaf, the upper end of workstation is provided with measuring device, the intermediate position department of measuring device upper end installs the slide rail, the externally mounted of slide rail has the regulation shell, and adjusts shell and slide rail sliding connection, the fixed displacement mechanism that is provided with of one end of adjusting the shell and being close to the fly leaf, infrared distance measuring sensor is installed to one side of displacement mechanism, one side of measuring device is fixed and is provided with horizontal mechanism, the four corners department of workstation lower extreme all is provided with the base, the upper end of measuring device one side is provided with the scale mark.
Description
Technical Field
The invention relates to the technical field of vacuum sputtering, in particular to a vacuum sputtering gap measuring device.
Background
The vacuum magnetron sputtering technology is characterized in that a magnetic field matched with the surface of a cathode is utilized to form an electron trap, electrons are enabled to closely cling to the surface of the cathode under the effect of E x B, a magnetic field orthogonal to an electric field of a target surface is arranged, fast electrons generated in sputtering make approximate cycloid motion in the orthogonal electromagnetic field, the electron stroke is increased, the ionization rate of gas is improved, high-energy particles lose energy after colliding with the gas, the temperature of a base body is low, coating can be completed on a material which does not resist temperature, the base body is arranged at the upper end of a workbench when magnetron sputtering is carried out, and a movable plate is connected to the side of a cavity of equipment and mainly plays a role in controlling the shape of a formed film, so that the edge. The adjustment of the film forming area is mainly realized by adjusting the distance between the workbench and the movable plate.
However, the existing tool for measuring the distance between the workbench and the movable plate is single in structure and cannot be flexibly adjusted according to the change of the use environment, so that the measuring accuracy is poor, the existing requirements are not met, and the vacuum sputtering gap measuring device is provided.
Disclosure of Invention
The invention aims to provide a vacuum sputtering gap measuring device, which aims to solve the problem that the measuring tool provided by the background technology cannot be flexibly adjusted according to the change of the use environment, so that the measuring accuracy is poor.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a vacuum sputtering gap measuring device, includes the workstation, one side of workstation is provided with the fly leaf, the upper end of workstation is provided with measuring device, the intermediate position department of measuring device upper end installs the slide rail, the externally mounted of slide rail has the regulation shell, and adjusts shell and slide rail sliding connection, it is provided with displacement mechanism to adjust the fixed one end that the shell is close to the fly leaf, infrared distance measuring sensor is installed to one side of displacement mechanism, one side of measuring device is fixed and is provided with horizontal mechanism, the four corners department of workstation lower extreme all is provided with the base, the upper end of measuring device one side is provided with the scale mark.
Preferably, the internally mounted of displacement mechanism has the lead screw, and the one end of lead screw passes through the bearing rotation with displacement mechanism and is connected, one side fixed mounting of displacement mechanism has servo motor, and servo motor's the output shaft passes through the shaft coupling transmission with the other end of lead screw and is connected, infrared distance measuring sensor's rear end passes through screw-thread fit with the lead screw.
Preferably, the both sides of infrared distance measuring sensor front end are provided with infrared signal transmitter and receiving diode respectively, the display screen is installed to one side of measuring device upper end, and display screen and infrared distance measuring sensor electric connection.
Preferably, measuring device's inside is provided with adjusts the chamber, the internally mounted who adjusts the chamber has the gear, and the one end of gear and measuring device rotate through the pivot and be connected, the inside of adjusting the shell is provided with the tooth's socket, and the tooth's socket is located the upper end between the slide rail, the tooth's socket is connected with gear engagement, the intermediate position department of measuring device one side installs the regulating wheel, and the opposite side fixed connection of the one end of regulating wheel and gear.
Preferably, a cord is arranged inside the horizontal mechanism, and an indicator is fixedly arranged at the lower end of the cord.
Preferably, the movable block is all installed to the inside of base, and the lower extreme of movable block extends to the below of base, the movable block passes through screw-thread fit with the base.
Compared with the prior art, the invention has the beneficial effects that:
1. the invention is characterized in that a displacement mechanism is arranged on one side of the upper end of a measuring device, when the distance between a workbench and a movable plate is measured, an infrared signal emitter on an infrared distance measuring sensor is started to emit infrared light to the movable plate, a reflection process is formed after the infrared light irradiates the movable plate, the infrared light is reflected to a receiving diode and then receives signals, CCD image processing is utilized to receive data of time difference between emission and reception, the distance of an object is calculated after the data is processed by a signal processor and displayed on a display screen, a servo motor is started simultaneously, an output shaft of the servo motor drives a lead screw to rotate, the rear end of the infrared distance measuring sensor is matched with the lead screw through threads, rotary motion is converted into linear motion under the action of friction force, and the infrared distance measuring sensor is horizontally moved on the displacement mechanism, the distance between the workbench and the movable plate can be measured on a fixed straight line, and the precision is improved.
2. According to the invention, the adjusting shell provided with the displacement mechanism is connected with the measuring device in a sliding manner through the sliding rail, so that the condition that the upper end of the workbench is placed is limited, the front end of the infrared distance measuring sensor and the edge of the workbench are positioned on the same plane, the adjusting wheel is rotated to drive the gear in the adjusting cavity to rotate, the gear is meshed with the tooth groove in the adjusting shell, the adjusting shell can be transversely moved at the upper end of the measuring device by rotating the adjusting wheel, and the moving distance can be recorded through the scale marks.
3. According to the invention, the horizontal mechanism is arranged on one side of the measuring device, the cord internally provided with the indicator is always vertical to the ground under the action of gravity, the measuring device and the workbench cannot be kept parallel due to the fact that the measuring device and the workbench are uneven on the workbench, so that the measuring accuracy is influenced, the offset angle of the measuring device can be known through the indicator, the movable block at the lower end of the base is matched with the movable block through threads, the movable block can move up and down under the action of friction force of the movable block and the workbench through rotation, and the movable block can be adjusted according to the offset angle of the horizontal mechanism.
Drawings
FIG. 1 is a schematic view of the internal structure of the present invention;
FIG. 2 is an overall side view of the present invention;
FIG. 3 is a top view of the present invention;
FIG. 4 is a schematic view of the internal structure of the displacement mechanism of the present invention;
FIG. 5 is a schematic view of a connecting structure of the adjusting housing and the slide rail according to the present invention;
FIG. 6 is a perspective view of the base of the present invention;
fig. 7 is a partially enlarged view of the region a of the present invention.
In the figure: 1. a work table; 2. a measuring device; 3. a movable plate; 4. adjusting the housing; 5. a displacement mechanism; 6. an infrared ranging sensor; 7. a tooth socket; 8. a gear; 9. an adjustment chamber; 10. a slide rail; 11. a base; 12. scale marking; 13. an adjustment wheel; 14. a display screen; 15. a servo motor; 16. a lead screw; 17. a movable block; 18. a horizontal mechanism; 19. a cord; 20. an indicator mark; 21. an infrared signal transmitter; 22. a receive diode.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Referring to fig. 1-7, an embodiment of the present invention is shown: the utility model provides a vacuum sputtering gap measuring device, comprises a workbench 1, one side of workstation 1 is provided with fly leaf 3, the upper end of workstation 1 is provided with measuring device 2, intermediate position department of measuring device 2 upper end installs slide rail 10, the externally mounted of slide rail 10 has regulation shell 4, and adjust shell 4 and slide rail 10 sliding connection, it is provided with displacement mechanism 5 to adjust the fixed one end that shell 4 is close to fly leaf 3, infrared distance measuring sensor 6 is installed to one side of displacement mechanism 5, one side of measuring device 2 is fixed to be provided with horizontal mechanism 18, the four corners department of workstation 1 lower extreme all is provided with base 11, the upper end of measuring device 2 one side is provided with scale mark 12.
Further, the internally mounted of displacement mechanism 5 has lead screw 16, and lead screw 16's one end passes through the bearing rotation with displacement mechanism 5 and is connected, and one side fixed mounting of displacement mechanism 5 has servo motor 15, and servo motor 15's output shaft passes through the shaft coupling transmission with lead screw 16's the other end and is connected, and infrared distance measuring sensor 6's rear end passes through screw-thread fit with lead screw 16, through this kind of mode, can measure the distance between workstation 1 and fly leaf 3 on fixed straight line, and the precision is improved.
Further, both sides of the front end of the infrared ranging sensor 6 are respectively provided with an infrared signal emitter 21 and a receiving diode 22, a display screen 14 is installed on one side of the upper end of the measuring device 2, the display screen 14 is electrically connected with the infrared ranging sensor 6, infrared light is emitted to the movable plate 3, a reflecting process is formed after the infrared light irradiates the movable plate 3, the infrared light is reflected to the receiving diode 22 to receive signals, then data of time difference between emission and reception is received by CCD image processing, the distance of an object is calculated after the processing of the signal processor, and the distance is displayed on the display screen 14.
Further, measuring device 2's inside is provided with adjusts chamber 9, the internally mounted who adjusts the chamber has gear 8, and gear 8's one end is connected through the pivot rotation with measuring device 2, the inside of adjusting shell 4 is provided with tooth's socket 7, and tooth's socket 7 is located the upper end between slide rail 10, tooth's socket 7 is connected with the meshing of gear 8, regulating wheel 13 is installed to the intermediate position department of measuring device 2 one side, and regulating wheel 13's one end and gear 8's opposite side fixed connection, so through rotating regulating wheel 13, can realize adjusting shell 4 lateral shifting in measuring device 2 upper end, the distance accessible scale mark 12 of removal is taken notes, through this kind of mode, measuring device 2's environment suitability obtains further improvement.
Furthermore, a cord 19 is arranged inside the horizontal mechanism 18, an indicator 20 is fixedly arranged at the lower end of the cord 19, and the angle of deviation of the measuring device 2 can be known through the indicator 20.
Further, the movable block 17 is all installed to the inside of base 11, and the lower extreme of movable block 17 extends to the below of base 11, and movable block 17 passes through screw-thread fit with base 11, through rotating movable block 17, can realize reciprocating under the effect of both friction forces to according to the skew angle of horizontal mechanism 18, adjust it can.
The working principle is as follows: when the device is used, in order to avoid the limited placing condition at the upper end of the workbench 1 and ensure that the front end of the infrared distance measuring sensor 6 and the edge of the workbench 1 are positioned on the same plane, the adjusting wheel 13 is rotated to drive the gear 8 in the adjusting cavity 9 to rotate, the gear 8 is meshed with the tooth socket 7 in the adjusting shell 4, then the adjusting shell 4 can be transversely moved at the upper end of the measuring device 2 by rotating the adjusting wheel 13, the moving distance can be recorded by the scale mark 12, when the distance between the workbench 1 and the movable plate 3 is measured, the infrared signal emitter 21 on the infrared distance measuring sensor 6 is started to emit infrared light to the movable plate 3, a reflecting process is formed after the infrared light irradiates the movable plate, the infrared light is reflected to the receiving diode 22 to receive signals, and then the data of the time difference between emitting and receiving is received by utilizing CCD image processing, the distance of calculating the object after signal processor handles, and show on display screen 14, start servo motor 15 simultaneously, servo motor 15's output shaft drives lead screw 16 and rotates, and infrared distance measuring sensor 6's rear end and lead screw 16 pass through screw-thread fit, so under the effect of frictional force with rotary motion conversion linear motion, thereby make infrared distance measuring sensor 6 carry out horizontal migration on displacement mechanism 5, through this kind of mode, can measure the distance between workstation 1 and fly leaf 3 on fixed straight line, the precision obtains improving.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (6)
1. The utility model provides a vacuum sputtering gap measuring device, includes workstation (1), its characterized in that: one side of workstation (1) is provided with fly leaf (3), the upper end of workstation (1) is provided with measuring device (2), intermediate position department of measuring device (2) upper end installs slide rail (10), the externally mounted of slide rail (10) has regulation shell (4), and adjusts shell (4) and slide rail (10) sliding connection, the one end of adjusting shell (4) being close to fly leaf (3) is fixed and is provided with displacement mechanism (5), infrared distance measuring sensor (6) are installed to one side of displacement mechanism (5), one side of measuring device (2) is fixed and is provided with horizontal mechanism (18), four corners department of workstation (1) lower extreme all is provided with base (11), the upper end of measuring device (2) one side is provided with scale mark (12).
2. The vacuum sputtering gap measuring device according to claim 1, characterized in that: the internally mounted of displacement mechanism (5) has lead screw (16), and the one end of lead screw (16) passes through the bearing rotation with displacement mechanism (5) and is connected, one side fixed mounting of displacement mechanism (5) has servo motor (15), and the output shaft of servo motor (15) passes through the shaft coupling transmission with the other end of lead screw (16) and is connected, the rear end of infrared distance measuring sensor (6) passes through screw-thread fit with lead screw (16).
3. The vacuum sputtering gap measuring apparatus according to claim 2, wherein: the both sides of infrared ranging sensor (6) front end are provided with infrared signal transmitter (21) and receiving diode (22) respectively, display screen (14) are installed to one side of measuring device (2) upper end, and display screen (14) and infrared ranging sensor (6) electric connection.
4. The vacuum sputtering gap measuring device according to claim 1, characterized in that: the inside of measuring device (2) is provided with adjusts chamber (9), the internally mounted who adjusts the chamber has gear (8), and the one end of gear (8) rotates through the pivot with measuring device (2) and is connected, the inside of adjusting shell (4) is provided with tooth's socket (7), and tooth's socket (7) are located the upper end between slide rail (10), tooth's socket (7) are connected with gear (8) meshing, intermediate position department of measuring device (2) one side installs regulating wheel (13), and the opposite side fixed connection of the one end of regulating wheel (13) and gear (8).
5. The vacuum sputtering gap measuring device according to claim 1, characterized in that: a wire rope (19) is arranged in the horizontal mechanism (18), and an indicating sign (20) is fixedly arranged at the lower end of the wire rope (19).
6. The vacuum sputtering gap measuring device according to claim 1, characterized in that: the inside of base (11) all installs movable block (17), and the lower extreme of movable block (17) extends to the below of base (11), movable block (17) pass through screw-thread fit with base (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011428449.XA CN112504152A (en) | 2020-12-07 | 2020-12-07 | Vacuum sputtering gap measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011428449.XA CN112504152A (en) | 2020-12-07 | 2020-12-07 | Vacuum sputtering gap measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112504152A true CN112504152A (en) | 2021-03-16 |
Family
ID=74971721
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011428449.XA Withdrawn CN112504152A (en) | 2020-12-07 | 2020-12-07 | Vacuum sputtering gap measuring device |
Country Status (1)
| Country | Link |
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| CN (1) | CN112504152A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010060320A (en) * | 2008-09-01 | 2010-03-18 | Railway Technical Res Inst | Device for measuring opening of rail joint |
| US20110102811A1 (en) * | 2008-05-01 | 2011-05-05 | Kabushiki Kaisha Bridgestone | Apparatus and method for measuring cylindrically-shaped object and apparatus for inspecting tire appearance |
| CN206300597U (en) * | 2017-01-03 | 2017-07-04 | 京东方科技集团股份有限公司 | One kind sputtering slot measurement instrument, magnetron sputtering apparatus |
| CN206876874U (en) * | 2017-06-22 | 2018-01-12 | 深圳市国银建设工程项目管理有限公司 | A kind of adjusting means of infrared range-measurement system |
| CN206919840U (en) * | 2017-04-24 | 2018-01-23 | 杭州嘉固建筑工程检测有限公司 | A kind of device for measuring concrete structure member crevices width |
| CN108594212A (en) * | 2018-06-19 | 2018-09-28 | 河海大学 | A kind of comprehensive range unit |
-
2020
- 2020-12-07 CN CN202011428449.XA patent/CN112504152A/en not_active Withdrawn
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110102811A1 (en) * | 2008-05-01 | 2011-05-05 | Kabushiki Kaisha Bridgestone | Apparatus and method for measuring cylindrically-shaped object and apparatus for inspecting tire appearance |
| JP2010060320A (en) * | 2008-09-01 | 2010-03-18 | Railway Technical Res Inst | Device for measuring opening of rail joint |
| CN206300597U (en) * | 2017-01-03 | 2017-07-04 | 京东方科技集团股份有限公司 | One kind sputtering slot measurement instrument, magnetron sputtering apparatus |
| CN206919840U (en) * | 2017-04-24 | 2018-01-23 | 杭州嘉固建筑工程检测有限公司 | A kind of device for measuring concrete structure member crevices width |
| CN206876874U (en) * | 2017-06-22 | 2018-01-12 | 深圳市国银建设工程项目管理有限公司 | A kind of adjusting means of infrared range-measurement system |
| CN108594212A (en) * | 2018-06-19 | 2018-09-28 | 河海大学 | A kind of comprehensive range unit |
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Application publication date: 20210316 |