CN112290206B - Silicon-based wide-bandwidth angle scanning antenna unit - Google Patents
Silicon-based wide-bandwidth angle scanning antenna unit Download PDFInfo
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- CN112290206B CN112290206B CN202011081479.8A CN202011081479A CN112290206B CN 112290206 B CN112290206 B CN 112290206B CN 202011081479 A CN202011081479 A CN 202011081479A CN 112290206 B CN112290206 B CN 112290206B
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 63
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 63
- 239000010703 silicon Substances 0.000 title claims abstract description 63
- 239000000758 substrate Substances 0.000 claims abstract description 40
- 230000008878 coupling Effects 0.000 claims abstract description 19
- 238000010168 coupling process Methods 0.000 claims abstract description 19
- 238000005859 coupling reaction Methods 0.000 claims abstract description 19
- 239000011521 glass Substances 0.000 claims abstract description 19
- 230000009466 transformation Effects 0.000 claims abstract description 17
- 230000005540 biological transmission Effects 0.000 claims abstract description 13
- 230000000149 penetrating effect Effects 0.000 claims abstract description 4
- 239000002184 metal Substances 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 21
- 230000008569 process Effects 0.000 abstract description 20
- 238000012545 processing Methods 0.000 abstract description 11
- 239000010410 layer Substances 0.000 description 27
- 230000005855 radiation Effects 0.000 description 7
- 238000004891 communication Methods 0.000 description 6
- 230000010354 integration Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000006855 networking Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/36—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
- H01Q1/38—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith formed by a conductive layer on an insulating support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/50—Structural association of antennas with earthing switches, lead-in devices or lightning protectors
Landscapes
- Variable-Direction Aerials And Aerial Arrays (AREA)
- Waveguide Aerials (AREA)
Abstract
The invention discloses a silicon-based wide-bandwidth angle scanning antenna unit which comprises a rectangular patch 1, a glass substrate 2, a slot coupling feed layer 3, a silicon-based substrate integrated waveguide back cavity 4 and an impedance transformation layer 6 from top to bottom, wherein silicon-based metallized shielding through holes 5 penetrating through the upper surface and the lower surface of the silicon-based substrate integrated waveguide back cavity 4 are arranged in the silicon-based substrate integrated waveguide back cavity 4, the silicon-based metallized shielding through holes 5 are used for connecting the slot coupling feed layer 3 and the impedance transformation layer 6, the impedance transformation layer 6 is of a common-ground coplanar waveguide structure, and a strip-shaped extension part in the middle is a microstrip feed transmission line 7. The silicon-based wide-bandwidth angle scanning antenna unit disclosed by the invention is realized by adopting a standardized glass substrate, a silicon substrate, standardized wiring, a via hole and a copper-tin bonding process, the process complexity and the processing cost are reduced, and the whole structure has the advantages of low profile, high reliability, simple process, low cost and the like.
Description
Technical Field
The invention belongs to the technical field of microwave antennas, and particularly relates to a silicon-based wide-bandwidth angle scanning antenna unit.
Background
With the increasing exhaustion of wireless communication frequency band resources below 6GHz, the millimeter wave frequency band becomes a necessary trend of wireless communication development. The millimeter wave frequency spectrum resource comprises frequency bands from 30GHz to 300GHz, and can be divided into an atmospheric window and a non-atmospheric window according to atmospheric attenuation, and the frequency bands respectively correspond to the minimum value and the maximum value of the attenuation. In addition to the "atmospheric window" frequency band which is more suitable for long-range wireless transmission, the "non-atmospheric window" frequency band has also received extensive attention and research due to its privacy and frequency reuse advantages. Spectral resources around 60GHz (V-band) in the "non-atmospheric window" are of greatest concern, and countries have successively opened unlicensed continuous spectral resources around 60 GHz.
Because the 60GHz working frequency band is affected by atmospheric attenuation and cannot realize long-distance communication, the wireless high-definition multimedia transmission system is mainly used for meeting the requirements of high-speed transmission and radar detection in short-distance interconnection application, and comprises wireless high-definition multimedia transmission, intelligent home Internet of things, gesture radar and other applications. Although the transmission distance is limited, the unlicensed at least 5GHz continuous bandwidth in the V-band, the single-channel bandwidth exceeding 2GHz, and the power limit of other short-distance communication frequency bands are far larger, so that the high-speed transmission rate of gigabits can be easily realized and the method is suitable for low-delay application scenes. Potential application markets such as wireless networking of household electronic equipment, sharing and interconnection of multimedia files, high-precision gesture control and the like describe rich application scenes for short-distance communication and detection technology research and development of V-band.
Part of V-band radar or communication systems also start to adopt a phased array system on the basis of multiple antennas, so as to realize beam forming, improve wireless transmission performance and reduce interference among users. The working wavelength and the corresponding circuit size corresponding to the 60GHz frequency band are smaller, the requirements on processing precision are higher, and particularly, in the application of a phased array system, the circuit size of a radiation unit and the like needs to meet the half-wavelength limit, so that great challenges are brought to the unit size, the processing precision and the processing cost. Meanwhile, the working frequency band, the scanning angle, the section height and the integration difficulty of the radiation unit are also important considerations in the design and implementation process.
Conventional millimeter wave low profile phased array antenna units may be implemented in printed form. The microwave board used for business in Ka wave band can still provide good radio frequency performance and processing precision. However, in the V-band, the size of the antenna unit is reduced to about 2mm, and the printed antenna unit cannot meet the precision requirement of antenna processing, so that it is important to find a low-cost, high-precision and high-integration process. The traditional semiconductor field often adopts a silicon substrate to realize circuit packaging and integration, has extremely high processing precision and standardized process, and is very suitable for processing the V-band antenna unit. However, the traditional silicon-based process has higher dielectric constant and large loss, and the radiation efficiency of the antenna unit integrated by the whole silicon-based process cannot meet the general application requirements. How to combine materials, processes and designs on the basis of a silicon-based process, and to realize an antenna unit with simple structure, low cost, low profile, large bandwidth and large scanning angle is always a difficult problem for realizing a high-frequency millimeter wave antenna unit.
Disclosure of Invention
The invention aims to solve the problems, and provides a silicon-based wide-bandwidth angle scanning antenna unit, which consists of a rectangular patch 1, a glass substrate 2, a slot coupling feed layer 3, a silicon-based substrate integrated waveguide back cavity 4 and an impedance transformation layer 6 from top to bottom, wherein a silicon-based metallized shielding via hole 5 penetrating through the upper surface and the lower surface of the silicon-based substrate integrated waveguide back cavity 4 is arranged in the silicon-based substrate integrated waveguide back cavity 4, the silicon-based metallized shielding via hole 5 connects the slot coupling feed layer 3 and the impedance transformation layer 6, the impedance transformation layer 6 is of a common-ground coplanar waveguide structure, and a strip-shaped extension part of the impedance transformation layer 6 is a microstrip feed transmission line 7.
Further, the slot coupling feed layer 3 is provided with a rectangular hollowed-out portion, and the rectangular hollowed-out portion is covered by the rectangular patch 1 in the vertical direction.
Further, the silicon-based metallized shielding via hole 5 is a hollow or solid cylinder made of metal.
Further, the dielectric constants of the glass substrate 2 and the silicon-based substrate integrated waveguide back cavity 4 are 3.82 and 11.9, respectively.
Further, the section height of the antenna unit is 0.48mm.
Compared with the prior art, the invention has the following advantages:
(1) The scanning performance is excellent. The antenna unit fully combines the characteristics of silicon-based and glass-based media, adopts glass to realize a rectangular patch with low loss and high efficient radiation, adopts high-resistance silicon-based media to realize a compact feed circuit, can effectively expand the bandwidth of the antenna, improves the radiation efficiency, and reduces the switching and unit size.
(2) The antenna profile is low. The antenna unit feeds the glass patch unit in a silicon-based back cavity slot coupling mode, and is transited to the microstrip interface through the switching structure, so that the impedance matching performance of the antenna unit during wide-angle broadband scanning is improved, and meanwhile, the integrated low-profile integration of the antenna unit is realized.
(3) The antenna is low in cost. The antenna unit is realized by adopting a single-layer glass substrate and a silicon substrate, and a silicon-based feed layer and a glass radiation layer are respectively realized through standardized wiring and via hole processes. The feed layer and the radiation layer are interconnected and integrated through a copper-tin bonding process, and the slot coupling feed mode is adopted to reduce the requirement on integration precision, reduce the process complexity and further reduce the processing cost.
Drawings
Fig. 1 is a three-dimensional perspective view of an antenna unit according to an embodiment of the present invention.
Fig. 2 is an exploded perspective view of an antenna unit according to an embodiment of the present invention.
Fig. 3 is a side view of an antenna unit according to an embodiment of the present invention.
Fig. 4 is a two-dimensional plan view of a slot coupling layer of an antenna unit according to an embodiment of the present invention.
Fig. 5 is a two-dimensional plan view of a feed and back cavity layer of an antenna unit according to an embodiment of the present invention.
Fig. 6 is a periodic boundary H-plane scanning standing wave of an antenna element according to an embodiment of the present invention.
Fig. 7 shows a periodic boundary E-plane scanning standing wave of an antenna element according to an embodiment of the present invention.
The reference numerals in the figures represent the meanings:
The micro-strip power supply comprises a rectangular patch 1, a glass substrate 2, a gap coupling feed layer 3, a silicon-based substrate integrated waveguide back cavity 4, a silicon-based metallized shielding via hole 5, an impedance transformation layer 6 and a micro-strip feed transmission line 7.
Detailed Description
Embodiments of the present invention are described in further detail below with reference to the accompanying drawings.
Aspects of the invention are described in this disclosure with reference to the accompanying drawings, in which a number of illustrative embodiments are shown. The embodiments of the present disclosure are not necessarily intended to include all aspects of the invention. It should be appreciated that the various concepts and embodiments described above, as well as those described in more detail below, may be implemented in any of a number of ways, as the disclosed concepts and embodiments are not limited to any implementation. Additionally, some aspects of the disclosure may be used alone or in any suitable combination with other aspects of the disclosure.
Example 1
Referring to fig. 1-5, the silicon-based wide bandwidth angular scanning antenna unit of the embodiment is composed of a rectangular patch 1, a glass substrate 2, a slot coupling feed layer 3, a silicon-based substrate integrated waveguide back cavity 4 and an impedance transformation layer 6 from top to bottom, wherein the slot coupling feed layer 3 is provided with a rectangular hollowed-out part, and the rectangular hollowed-out part is covered by the rectangular patch 1 in the vertical direction; a silicon-based metallized shielding via hole 5 penetrating through the upper surface and the lower surface of the silicon-based substrate integrated waveguide back cavity 4 is arranged in the silicon-based substrate integrated waveguide back cavity, and the silicon-based metallized shielding via hole 5 is a hollow or solid cylinder made of metal; the silicon-based metallized shielding via hole 5 connects the connecting slot coupling feed layer 3 and the impedance transformation layer 6, the impedance transformation layer 6 is of a common-ground coplanar waveguide structure, and the strip-shaped extension part of the impedance transformation layer is a microstrip feed transmission line 7. In the embodiment, microstrip transmission line type feeding is adopted, after excitation signals are fed into the silicon-based substrate integrated waveguide back cavity 4 through the impedance transformation layer 6, rectangular patches 1 on the glass substrate 2 are fed through the slot coupling feeding layer 3, and finally, the excitation signals are radiated to free space. The glass substrate 2 and the silicon substrate integrated waveguide back cavity 4 are interconnected in a standardized copper-tin bonding mode, and the interconnection of radio frequency signals is ensured through the gap coupling feed layer 3.
The silicon-based wide-bandwidth angle scanning antenna unit provided by the embodiment of the invention is realized by adopting standardized glass substrates, silicon substrates and standardized wiring, via holes and copper-tin bonding processes.
The overall dimensions of the antenna element are 2.24mm x 0.48mm; the heights of the glass substrate 2 and the silicon-based substrate integrated waveguide back cavity 4 are respectively 0.15mm and 0.3mm, and the dielectric constants are respectively 3.82 and 11.9; the side length of the bottom surface of the silicon-based metallized shielding via hole 5 is 0.05mm; the size of the rectangular patch 1 is 1.78mm multiplied by 1.05mm, and the center of the rectangular patch 1 is offset from the center of the antenna unit by 0.41mm; the size of the gap coupling feed layer 3 is 1.05mm multiplied by 0.27mm, and the center of the gap coupling feed layer 3 is offset from the center of the antenna unit by 0.41mm; the size of the silicon-based substrate integrated waveguide back cavity 4 is 2.1mm multiplied by 1.08mm.
In order to meet the index requirement of the V-band wide-bandwidth angle scanning, the structural size of the antenna unit can be optimally designed by using full-wave electromagnetic simulation software. In the process of optimizing design, the size and the position of the rectangular patch, the coupling gap, the silicon-based substrate integrated waveguide back cavity and the impedance transformation can be adjusted, the antenna unit with optimal performance is realized, and the index requirement of the active phased array is met.
The E-plane and H-plane scanning standing wave indexes of the V-band silicon-based wide-bandwidth angle scanning antenna unit are shown in figures 6-7, and the standing wave is less than or equal to 2.8 in the scanning range of 57 GHz-65 GHz and +/-45 degrees.
The whole antenna unit of the embodiment is realized by adopting standardized glass substrates, silicon substrates, standardized wiring, via holes and copper-tin bonding processes, the process complexity and the processing cost are reduced, and the whole structure has the advantages of low profile, high reliability, simple process, low cost and the like.
Compared with the prior art, the invention has the advantages that:
(1) The scanning performance is excellent. According to the V-band silicon-based wide-bandwidth angle scanning antenna unit, scanning at + -45 degrees can be achieved within a frequency range of 57-65GHz, and standing waves are smaller than 2.8.
(2) The antenna profile is low. The V-band silicon-based wide-bandwidth angle scanning antenna unit provided by the embodiment of the invention has the cross section height of 0.48mm.
(3) The antenna is low in cost. The V-band silicon-based wide-bandwidth angle scanning antenna unit provided by the embodiment of the invention is realized by adopting single-layer glass and a silicon substrate and is realized by standardized wiring, via holes and copper-tin bonding processes, so that the process complexity and the processing cost are reduced.
The foregoing description of the preferred embodiment of the invention is not intended to limit the invention to the particular form disclosed, but on the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention.
Claims (5)
1. The silicon-based wide-bandwidth angle scanning antenna unit is characterized by comprising a rectangular patch 1, a glass substrate 2, a slot coupling feed layer 3, a silicon-based substrate integrated waveguide back cavity 4 and an impedance transformation layer 6 from top to bottom, wherein silicon-based metallized shielding through holes 5 penetrating through the upper surface and the lower surface of the silicon-based substrate integrated waveguide back cavity 4 are formed in the silicon-based substrate integrated waveguide back cavity 4, the silicon-based metallized shielding through holes 5 are used for connecting the slot coupling feed layer 3 and the impedance transformation layer 6, the impedance transformation layer 6 is of a common-ground coplanar waveguide structure, and a strip-shaped extension part in the middle is a microstrip feed transmission line 7.
2. The silicon-based wide bandwidth angular scanning antenna unit according to claim 1, characterized in that the slot-coupled feed layer 3 is provided with rectangular hollowed-out portions, which are covered by rectangular patches 1 in the vertical direction.
3. The silicon-based wide bandwidth angular scanning antenna unit according to claim 2, characterized in that the silicon-based metallized shielded vias 5 are hollow or solid cylinders made of metal.
4. A silicon-based wide bandwidth angular scanning antenna unit according to claim 3, characterized in that the dielectric constants of the glass substrate 2 and the silicon-based substrate integrated waveguide back cavity 4 are 3.82 and 11.9, respectively.
5. A silicon-based wide bandwidth angular scanning antenna unit according to claim 3, characterized in that the cross-sectional height of the antenna unit is 0.48mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011081479.8A CN112290206B (en) | 2020-10-10 | 2020-10-10 | Silicon-based wide-bandwidth angle scanning antenna unit |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011081479.8A CN112290206B (en) | 2020-10-10 | 2020-10-10 | Silicon-based wide-bandwidth angle scanning antenna unit |
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| CN112290206A CN112290206A (en) | 2021-01-29 |
| CN112290206B true CN112290206B (en) | 2024-05-24 |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115020964B (en) * | 2022-06-14 | 2024-04-23 | 中国电子科技集团公司第十四研究所 | Laminated antenna based on BCB transmission structure |
| CN115425394B (en) * | 2022-08-05 | 2024-02-27 | 中国电子科技集团公司第十四研究所 | Strip line based on laminated structure and laminated array antenna unit based on heterogeneous substrate three-dimensional stacking |
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