CN112197940A - Single-optical-path precise measurement near-far field reference and collimation device - Google Patents
Single-optical-path precise measurement near-far field reference and collimation device Download PDFInfo
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- CN112197940A CN112197940A CN202010965089.0A CN202010965089A CN112197940A CN 112197940 A CN112197940 A CN 112197940A CN 202010965089 A CN202010965089 A CN 202010965089A CN 112197940 A CN112197940 A CN 112197940A
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- 238000005259 measurement Methods 0.000 title claims description 6
- 230000003287 optical effect Effects 0.000 claims abstract description 15
- 238000002834 transmittance Methods 0.000 claims 2
- 150000001875 compounds Chemical class 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 3
- 238000000576 coating method Methods 0.000 abstract 1
- 239000011159 matrix material Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
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- Length Measuring Devices By Optical Means (AREA)
Abstract
A single optical path device for accurately measuring near-far field reference and collimation. In the invention, the light path adopts double lenses with different coatings, and through the transmission and reflection of light in the first lens and the passing of the light by the second lens, accurate near-field (reduced image after double lenses) and far-field (focusing at infinity) light spot images can be respectively presented in the high-resolution CCD behind the light path. And the near field and far field images are now presented in the same image. Compared with the traditional collimation reference device, the device has the advantages of simple structure, accurate collimation result and easy realization. The method can simplify the design scheme of the collimation system by collimating the light path of the laser, and can simultaneously acquire accurate near-far field images in the light path through a single CCD so as to achieve the aim of quickly collimating the light path.
Description
Technical Field
The invention relates to automatic collimation of a laser light path and accurate measurement of a near-far field, in particular to a single light path accurate measurement near-far field reference and collimation device.
Background
In a laser system, the direction directivity of a laser beam which needs to be output is often good, so that a large-scale light path collimation system which is correspondingly controlled by a high-precision computer is produced. The light path needs to be collimated before the laser collimating system is used, the whole space of the system is fixed, along with the continuous increase of the number of components, the space reserved for the collimating system is relatively reduced, the traditional near-far field separation type collimating system is complex in structure and multiple in device requirement, the traditional complex multi-device automatic collimating system does not meet the requirement any more, and therefore the collimating speed and the collimating efficiency of a large-scale laser system are improved by the collimating system which is required to be modularized and low in complexity urgently.
Disclosure of Invention
The invention aims to provide a single-light-path precise measurement near-far field reference and collimation device based on the problems in the prior art, and the device provides an ideal selection with low complexity and high collimation efficiency for a large laser light path collimation system.
The technical solution of the invention is as follows:
a single optical path device for accurately measuring near-far field reference and collimation is characterized by comprising the following steps:
the device comprises a first lens (a semi-transparent and semi-reflective film is plated on two sides of the lens), a second lens (a highly-transparent film is plated on two sides of the lens) and a CCD (charge coupled device) which are sequentially arranged along the input direction of light to be collimated.
The second lens is positioned behind the image side focus of the first lens, the two lenses are confocal (the focal length of the first lens is larger than that of the second lens), namely the image side focus of the first lens is superposed with the object side focus of the second lens, the image side focus of the second lens is positioned on the image plane of the CCD, and the optical axes of the first lens and the second lens are parallel to the normal of the image plane of the CCD.
The first lens and the second lens share an optical axis, and the image plane center position of the CCD is positioned above the optical axes of the first lens and the second lens.
The single optical path accurately measures the near-far field reference and the common optical axis of the double lenses of the collimating device, and the straight line determined by the optical axis is the reference of the device. When the centroid points of the near-field light spot image and the far-field light spot image of the light beam coincide with the reference point, the automatic collimation of the light path can be realized through fine adjustment of a long-short axis interpolation method after the radius comparison and the ellipse fitting.
The identification of the light beam near-field center in the process of collimation with a laser system can be realized by detecting the contour edge and solving the interpolation value of the centroid position and the reference to identify and adjust the light path; for the far-field center of the light beam, the light beam is positioned in the near-field light spot image, because the near-field light spot and the far-field light spot are simultaneously superposed in the area, the image intensity of the far-field light spot is very high at the moment and easy to detect, the near-field edge is filtered through image processing to extract a far-field image, the edge profile of the far-field image is detected, and the collimation of a far-field light path is achieved through the deviation of the centroid position and the reference.
The invention has the advantages that:
1. the invention can simultaneously and accurately measure the near-far field image of the laser spot through a single CCD and then collimate the image.
2. Compared with the traditional collimation system, the automatic collimation system can quickly and effectively realize the automatic collimation of the light path.
3. Compared with the traditional collimation system, the invention has the advantages of fewer elements, simpler structure and more suitability for the reference detection and collimation of a large-scale laser device.
Drawings
FIG. 1 is a schematic diagram of a single optical path device for accurately measuring near-far field reference and collimation.
In the figure:
1-first lens (plating semi-transparent and semi-reflective film on both sides of lens);
2-second lens (plating high-permeability film on two sides of lens);
3-CCD；
4-computer
FIG. 2 is a detailed view of the parameters of the first lens (the semi-transparent and semi-reflective film is plated on both sides of the lens)
FIG. 3: to detect an image containing both near field and far field spots.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Fig. 1 is a schematic diagram of a single optical path device for accurately measuring near-far field reference and collimation, which is shown in the figure, and the device is composed of a first lens (with a semi-transparent and semi-reflective film plated on two sides of the lens), a second lens (with a highly transparent film plated on two sides of the lens), and a CCD, which are sequentially arranged along the input direction of light to be collimated. FIG. 2 shows that CCD detects the alignment to be performed and contains near field (X)N，YN) With far field spot (X)F，YF) A schematic image of (a). We analyze with this example.
For a near-field light spot, the focal length of the first lens is f1The focal length of the second lens is f2(ii) a And f is1>f2Parallel light beams for near-field imaging firstly pass through the first lens along a solid line in the figure and are converged at an image space focus F of the first lens1Since the first lens and the second lens are confocal, F1While being the object focus of the second lens, so that the secondary beam F1The light emitted by the point can be emitted in parallel through the second lens, and the image displayed on the CCD at the moment is the image of the near-field light spot.
For far-field light spots, when a light beam to be collimated passes through the first lens, part of light is reflected by the emergent surface and passes through the first lens again, and is reflected by the incident surface again, and finally the light beam is refracted out of the lens to form a parallel light beam, which is equivalent to passing through two same lenses; and then, converging the parallel light beams through a second lens on a CCD image surface, wherein the focus image converged by the second lens is a far-field light spot image.
According to the knowledge of the geometrical optical transmission matrix, the curvature radius of the incident side of the light to be collimated of the first lens is preset to be R1Refractive index of R at the exit side2The refractive index of the lens 1 is n2Refractive index of air n1。
Near-field beam transmission matrix:
and (3) after simplification:
according to the light
When B is 0, the transmission matrix satisfies image transfer, and the image at this time can be regarded as the image of the near-field light spot.
Far field beam transmission matrix:
and (3) after simplification:
according to optical geometrical relations and optics
The far-field light spot is converged to a focus image, the image height of the far-field light spot in the center point of the CCD camera, namely the focus image is 0, and therefore the requirement that A is 0, namely the image height of the far-field light spot is satisfied
At this time, the parameters are set
Is obtained after simplification and needs to meet
So that it is brought into the far-field transmission matrix of
Let the incident beam matrix be
The CCD detects that the central coordinate of the near-field light spot in the image to be collimated is (X)N，YN) Far field center coordinate spot of (X)F，YF) The center reference coordinate of the CCD is (0, 0), and it can be calculated by introducing a near-far field transmission matrix to obtain:
by the above two formulas, the incident light beam matrix can be reversely solved
Based on the parameter, the target direction of the light beam to be collimated can be adjusted by controlling the collimating electron microscopeNamely, the reference coordinate of the center of the CCD is (0, 0), so that the near-field light beam and the far-field light beam are superposed with the reference to realize collimation.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (4)
1. A single optical path precise measurement near-far field reference and collimation device is characterized by comprising a first lens (1), a second lens (2) and a CCD (3) which are sequentially arranged along the input direction of light to be collimated; the second lens (2) is positioned behind the focus of the first lens (1) on the image side, the two lenses are confocal, the focus of the second lens (2) is positioned on the image plane of the CCD (3), and the optical axes of the first lens (1) and the second lens (2) are parallel to the normal of the image plane of the CCD (3);
the two sides of the first lens (1) are plated with semi-transparent and semi-reflective films, and the two sides of the second lens (2) are plated with highly transparent films.
2. Single light path accurate near-far field reference and collimation apparatus as claimed in claim 1, characterized in that the focal length of the first lens (1) is larger than the focal length (2) of the second lens, i.e. the image-side focal point of the first lens (1) coincides with the object-side focal point of the second lens (2).
3. The single optical path precise near-far field reference and collimation apparatus as claimed in claim 1, wherein said transflective film has a refractive index T and a reflectance R of 50%, and said high-transmittance film is a transmissive film having a transmittance R > 98.5%.
4. Single light path accurate near-far field reference and collimation device as in any of claims 1-3, characterized in that the first lens (1) is collimatedThe radius of curvature of the direct light incident side is R1Refractive index of n2Refractive index of air n1The refractive index of the first lens (1) on the exit side is R2The following formula is satisfied:
in the formula (I), the compound is shown in the specification,
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| CN202010965089.0A CN112197940B (en) | 2020-09-15 | 2020-09-15 | Single-optical-path precise measurement near-far field reference and collimation device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112903248A (en) * | 2021-01-25 | 2021-06-04 | 中国科学院西安光学精密机械研究所 | Single-light-path optical system and method capable of realizing simultaneous measurement of near and far fields of laser |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4993812A (en) * | 1987-07-08 | 1991-02-19 | Fuji Photo Film Co., Ltd. | Semiconductor laser optical system |
| US20100177253A1 (en) * | 2007-07-17 | 2010-07-15 | Michael Golub | Coherent imaging method of laser projection and apparatus thereof |
| CN102354055A (en) * | 2011-11-08 | 2012-02-15 | 上海激光等离子体研究所 | Light path collimation integrated device and method for high-power laser device |
| CN104155771A (en) * | 2014-08-26 | 2014-11-19 | 中国工程物理研究院应用电子学研究所 | Online monitoring device for micro-optics lens in semiconductor laser to be precisely adjusted and using method of online monitoring device |
| CN105675265A (en) * | 2016-01-25 | 2016-06-15 | 中国科学院上海光学精密机械研究所 | Large-aperture light beam collimating and measuring device |
| CN108535932A (en) * | 2018-05-30 | 2018-09-14 | 中国工程物理研究院激光聚变研究中心 | The debugging apparatus and adjustment method of a kind of nearly far field light path simultaneously |
-
2020
- 2020-09-15 CN CN202010965089.0A patent/CN112197940B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4993812A (en) * | 1987-07-08 | 1991-02-19 | Fuji Photo Film Co., Ltd. | Semiconductor laser optical system |
| US20100177253A1 (en) * | 2007-07-17 | 2010-07-15 | Michael Golub | Coherent imaging method of laser projection and apparatus thereof |
| CN102354055A (en) * | 2011-11-08 | 2012-02-15 | 上海激光等离子体研究所 | Light path collimation integrated device and method for high-power laser device |
| CN104155771A (en) * | 2014-08-26 | 2014-11-19 | 中国工程物理研究院应用电子学研究所 | Online monitoring device for micro-optics lens in semiconductor laser to be precisely adjusted and using method of online monitoring device |
| CN105675265A (en) * | 2016-01-25 | 2016-06-15 | 中国科学院上海光学精密机械研究所 | Large-aperture light beam collimating and measuring device |
| CN108535932A (en) * | 2018-05-30 | 2018-09-14 | 中国工程物理研究院激光聚变研究中心 | The debugging apparatus and adjustment method of a kind of nearly far field light path simultaneously |
Non-Patent Citations (1)
| Title |
|---|
| 杨野等: "高功率激光光场耦合的准直光学系统", 《中国激光》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112903248A (en) * | 2021-01-25 | 2021-06-04 | 中国科学院西安光学精密机械研究所 | Single-light-path optical system and method capable of realizing simultaneous measurement of near and far fields of laser |
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