CN112184682B

CN112184682B - Detection method and detection device of detection equipment

Info

Publication number: CN112184682B
Application number: CN202011069221.6A
Authority: CN
Inventors: 陈鲁; 吕肃; 黄有为; 方一; 张嵩
Original assignee: Shenzhen Zhongke Feice Technology Co Ltd
Current assignee: Shenzhen Zhongke Feice Technology Co Ltd
Priority date: 2020-09-30
Filing date: 2020-09-30
Publication date: 2024-08-06
Anticipated expiration: 2040-09-30
Also published as: CN112184682A

Abstract

The embodiment of the application discloses a detection method and a detection device of detection equipment, wherein the detection equipment is provided with a measurement direction, an equipment reference system determined according to the measurement direction and a reference direction corresponding to the measurement direction, the detection equipment comprises a detection module, an object to be detected comprises a first characteristic point and a second characteristic point, a preset distance is reserved between the first characteristic point and the second characteristic point, when the detection module and the first characteristic point are provided with first relative positions, the first characteristic point can be detected by the detection equipment to obtain first position information of the first characteristic point in the equipment reference system, when the detection module and the second characteristic point are provided with second relative positions, the second characteristic point can be detected by the detection equipment to obtain second position information of the second characteristic point in the equipment reference system, and an included angle to be detected is obtained according to the preset distance, the first position information and the second position information, so that the detection accuracy of the detection equipment is improved.

Description

Detection method and detection device of detection equipment

Technical Field

The present application relates to the field of detection, and in particular, to a detection method and a detection device for a detection apparatus.

Background

At present, a detection device can be used for detecting characteristic points on an object to be detected to obtain detection results of detecting a plurality of characteristic points, and then the shape of the object to be detected is determined according to the detection results of the plurality of characteristic points. In the process of detecting the feature points, a reference direction can be preset for the detection equipment, and the detection result obtained by the detection equipment can be processed into position information along the reference direction through the detection characteristics, the fixed direction and the analysis of the detection result of the detection equipment, so that the actual position of the feature points can be determined. Wherein, the reference direction is consistent for a plurality of feature points, so that the relative positions of the feature points can be represented. For example, when the reference direction is a vertical direction, the position information of the feature points in the reference direction can be represented by the heights of the feature points, and the fixed direction of the detection device can have various corresponding different analysis processes, so that the heights of the feature points can be obtained by using the detection results of the feature points. That is, the detection characteristics of the detection device, the fixed direction, and the analysis process of the detection result are corresponding, so that the detection result can be converted into the positional information in the reference direction.

However, there may be a fixing error in the fixing process of the detecting device, and in the case that the detecting characteristics and the analyzing process of the detecting result are not changed, the obtained position information is not along the reference direction any more, but along a direction having a certain included angle with the reference direction, and this direction may be used as an actual measuring direction, and the included angle between the actual measuring direction and the reference direction is related to the error in the fixing process of the detecting device. For example, when the reference direction is a vertical direction, the height measuring device may be fixed vertically downward, and the distance between the detected height measuring device and the feature point may be used as a height difference between the height measuring device and the feature point in the vertical direction, so as to determine the height of the feature point.

Therefore, when there is a fixed error in the detection apparatus, there is also an error in the position information obtained based on the analysis of the detection result, resulting in lower detection accuracy of the detection apparatus.

Disclosure of Invention

In order to solve the technical problems, embodiments of the present application provide a detection method and a detection device for a detection device, which accurately determine an included angle between a measurement direction and a reference direction of the detection device, so as to improve detection accuracy of the detection device.

The embodiment of the application provides a detection method of detection equipment, the detection equipment is provided with a measurement direction, an equipment reference system determined according to the measurement direction and a datum direction corresponding to the measurement direction, the detection equipment comprises a detection module, an object to be detected comprises a first characteristic point and a second characteristic point, a preset distance is arranged between the first characteristic point and the second characteristic point, and the method comprises the following steps:

When the detection module and the first feature point have first relative positions, the detection equipment is utilized to carry out first detection on the first feature point, and first position information of the first feature point in the equipment reference frame is obtained; a first distance vector is arranged between the detection module and the first characteristic point when the first relative position is set;

When the detection module and the second feature point have second relative positions, the detection equipment is utilized to carry out second detection on the second feature point, and second position information of the second feature point in the equipment reference frame is obtained; a second distance vector is arranged between the detection module and the second characteristic point at the second relative position, the first distance vector and the second distance vector have a first preset difference value in the reference direction, and the first preset difference value is a non-zero value;

And acquiring an included angle to be measured between the reference direction and the measurement direction according to the preset distance, the first position information and the second position information.

Optionally, the measurement direction and the reference direction are both located in a measurement plane, and the preset distance is a distance between projections of the first feature point and the second feature point in the measurement plane; the equipment reference system comprises a first direction and a second direction in the measuring plane, wherein the first direction and the second direction are perpendicular or have an acute included angle, a first reference angle is formed between the first direction and the reference direction, and a second reference angle is formed between the second direction and the reference direction;

The first location information includes: a first position component of the first feature point along the first direction, and a second position component of the first feature point along the second direction; the second position information includes: a third position component of the second feature point along the first direction, and a fourth position component of the second feature point along the second direction.

Optionally, the detection module has a first datum point, the object to be detected has a second datum point, the second datum point is located in the equipment reference frame, and has a fixed position in the equipment reference frame;

The step of obtaining the first and second location components comprises: acquiring a first reference relative displacement of the first reference point and the second reference point and a first feature relative displacement of the first feature point and the first reference point at the first relative position; acquiring the first position component according to the first reference relative displacement, the first characteristic relative displacement, the first reference angle and the included angle to be measured; acquiring the second position component according to the first reference relative displacement, the first characteristic relative displacement, the second reference angle and the included angle to be measured;

the step of obtaining the third and fourth location components comprises: acquiring a second reference relative displacement of the first reference point and the second reference point and a second feature relative displacement of the second feature point and the first reference point at the second relative position; acquiring the third position component according to the second reference relative displacement, the second characteristic relative displacement, the first reference angle and the included angle to be measured; and acquiring the fourth position component according to the second reference relative displacement, the second characteristic relative displacement, the second reference angle and the included angle to be measured.

Optionally, the detection device further includes a moving device, where the moving device is configured to relatively rotate the detection module and/or the object to be detected around a rotation axis, and the rotation axis is perpendicular to the measurement surface; the detection module is further provided with a first datum line, the object to be detected is further provided with a second datum line, the first datum line and the second datum line are perpendicular to the rotating shaft, the first datum line rotates along with the detection module, the second datum line rotates along with the object to be detected, the datum direction is perpendicular to the rotating shaft, and the second datum point comprises a rotating center of the object to be detected; at a reference position, the first reference line, the second reference line, and the first reference direction coincide;

the step of obtaining the first reference relative displacement includes: the object to be detected and the detection module are rotated relatively through a moving device, so that the detection module and the first characteristic point have a first relative position, and the first reference relative displacement is obtained; the first reference relative displacement includes: a first relative angle between the first reference line and the second reference line at the first relative position, and a first axial relative displacement between the first reference point and the center of rotation at the first relative position;

The step of obtaining the first characteristic relative displacement comprises: when the detection module and the first feature point have a first relative position, detecting the first feature point through the detection module to obtain the first feature relative displacement;

And/or the number of the groups of groups,

The step of obtaining the second reference relative displacement includes: after the first detection, the object to be detected and the detection module are relatively rotated through the moving device, so that the detection module and the second characteristic point have second relative positions, and the second reference relative displacement is obtained; the second reference relative displacement includes: a second relative angle between the first reference line and the second reference line at the second relative position, and a second axial relative displacement between the first reference point and the center of rotation at the second relative position;

the step of obtaining the second characteristic relative displacement comprises: and when the detection module and the second feature point have second relative positions, detecting the second feature point through the detection module, and acquiring the second feature relative displacement.

Optionally, at least one of the first relative angle and the second relative angle is zero.

Optionally, the step of obtaining the first position component according to the first reference relative displacement, the first feature relative displacement, the first reference angle and the included angle to be measured includes:

acquiring a first partial displacement of the first axial relative displacement in the first direction according to the first axial relative displacement, the first reference angle and the first opposite angle;

Acquiring a first relation representation of the first characteristic relative displacement in the first direction according to the first characteristic relative displacement, the first reference angle, the first opposite angle and the included angle to be measured;

acquiring the first position component according to the vector sum of the first partial displacement and the first relation representation;

The step of obtaining the second position component according to the first reference relative displacement, the first characteristic relative displacement, the second reference angle and the included angle to be measured comprises the following steps:

Acquiring a second partial displacement of the first axial relative displacement in the second direction according to the first axial relative displacement, the second reference angle and the first opposite angle;

Acquiring a second relation representation of the first characteristic relative displacement in the second direction according to the first characteristic relative displacement, the second reference angle, the first opposite angle and the included angle to be measured;

Acquiring the second position component according to the vector sum represented by the second partial displacement and the second relation;

The step of obtaining the third position component according to the second reference relative displacement, the second characteristic relative displacement, the first reference angle and the included angle to be measured includes:

Acquiring a third partial displacement of the second axial relative displacement in the first direction according to the second axial relative displacement, the first reference angle and the second relative angle;

Acquiring a third relation representation of the second characteristic relative displacement in the first direction according to the second characteristic relative displacement, the first reference angle, the second relative angle and the included angle to be measured;

obtaining the third position component according to the vector sum represented by the third partial displacement and the third relation;

the step of determining the fourth position component according to the second reference relative displacement, the second characteristic relative displacement, the second reference angle and the included angle to be measured, includes:

Acquiring a fourth partial displacement of the second axial relative displacement in the second direction according to the second axial relative displacement, the second reference angle and the second relative angle;

acquiring a fourth relation representation of the second characteristic relative displacement in the second direction according to the second characteristic relative displacement, the second reference angle, the second relative angle and the included angle to be measured;

and acquiring the fourth position component according to the vector sum of the fourth partial displacement and the fourth relation representation.

Optionally, the step of obtaining a first partial displacement of the first axial relative displacement in the first direction according to the first axial relative displacement, the first reference angle and the first relative angle includes: obtaining a vector sum of the first relative angle and the first reference angle to obtain a first projection angle; carrying out projection processing on the first axial relative displacement by using the first projection angle to obtain the first partial displacement;

The step of obtaining a first relation representation of the first feature relative displacement in the first direction according to the first feature relative displacement, the first reference angle, the first opposite angle and the included angle to be measured comprises the following steps: obtaining a vector sum of the first reference angle, the first opposite angle and the included angle to be measured to obtain a first projection angle expression; obtaining the projection of the first characteristic relative displacement in the first direction by using the first projection angle expression to obtain the first relation expression;

The step of obtaining a second partial displacement of the first axial relative displacement in the second direction according to the first axial relative displacement, the second reference angle and the first relative angle comprises the following steps: obtaining a vector sum of the first opposite angle and the second reference angle to obtain a second projection angle; carrying out projection processing on the first axial relative displacement by using the second projection angle to obtain the second partial displacement;

The step of obtaining a second relation representation of the first feature relative displacement in the second direction according to the first feature relative displacement, the second reference angle, the first relative angle and the included angle to be measured comprises the following steps: obtaining a vector sum of the second reference angle, the first opposite angle and the included angle to be measured to obtain a second projection angle expression; obtaining a projection of the second characteristic relative displacement in the second direction by using the second projection angle expression to obtain the second relation expression;

The step of obtaining a third partial displacement of the second axial relative displacement in the first direction according to the second axial relative displacement, the first reference angle and the second relative angle comprises: obtaining a vector sum of the second relative angle and the first reference angle to obtain a third projection angle; performing projection processing on the second axial relative displacement by using the third projection angle to obtain the third partial displacement;

The step of obtaining a third relation representation of the second feature relative displacement in the first direction according to the second feature relative displacement, the first reference angle, the second relative angle and the included angle to be measured comprises the following steps: obtaining a vector sum of the first reference angle, the second relative angle and the included angle to be measured to obtain a third projection angle expression; obtaining the projection of the second characteristic relative displacement in the first direction by using the third projection angle expression to obtain the third relation expression;

The step of obtaining a fourth partial displacement of the second axial relative displacement in the second direction according to the second axial relative displacement, the second reference angle and the second relative angle comprises: obtaining a vector sum of the second relative angle and the second reference angle to obtain a fourth projection angle; performing projection processing on the second axial relative displacement by using the fourth projection angle to obtain the fourth partial displacement;

The step of obtaining a fourth relation representation of the second feature relative displacement in the second direction according to the second feature relative displacement, the second reference angle, the second relative angle and the included angle to be measured includes: obtaining a vector sum of the second reference angle, the second relative angle and the included angle to be measured to obtain a fourth projection angle expression; and obtaining the projection of the second characteristic relative displacement in the second direction by using the fourth projection angle expression to obtain the fourth relation expression.

Optionally, the detection module has an equipment built-in coordinate system, the equipment built-in coordinate system rotates along with rotation of the detection module, and the first reference point is an origin of the equipment built-in coordinate system of the detection equipment; the first characteristic relative displacement is determined according to a first coordinate of the first characteristic point in the built-in coordinate system of the equipment, and the second characteristic relative displacement is determined according to a second coordinate of the second characteristic point in the built-in coordinate system of the equipment.

Optionally, the detection device is a linear array camera, and a coordinate axis of the built-in coordinate system of the device is along an array extending direction of the linear array camera; or the detection equipment is an area array camera, and two coordinate axes of the built-in coordinate system of the equipment are respectively along two extending directions of the array of the area array camera.

Optionally, a first coordinate of the first feature point in the built-in coordinate system of the device is obtained according to a first image obtained by shooting the first feature point by the detection device, and a second coordinate of the second feature point in the built-in coordinate system of the device is obtained according to a second image obtained by shooting the second feature point.

Optionally, the obtaining the to-be-measured included angle between the reference direction and the measurement direction according to the preset distance, the first position information and the second position information includes:

Establishing a relation equation among the first position information, the second position information, the included angle to be measured and the preset distance;

acquiring the included angle to be measured according to the relation equation;

The step of establishing a relation equation between the first position information, the second position information, the included angle to be measured and the preset distance includes:

acquiring a first distance component of the first characteristic point and the second characteristic point along the first direction according to a first position component of the first characteristic point along the first direction and a third position component of the second characteristic point along the first direction;

Acquiring second distance components of the first feature point and the second feature point along the second direction according to the second position component of the first feature point along the second direction and the fourth position component of the second feature point along the second direction;

And establishing a relational equation by using the first distance component, the second distance component, the preset distance and the included angle between the first direction and the second direction.

Optionally, the first direction and the second direction are coordinate axis directions of the device reference system, and the device reference system is a rectangular coordinate system, and the establishing a relational equation by using the first distance component, the second distance component, the preset distance, and an included angle between the first direction and the second direction includes:

and establishing a relation equation by using the square sum of the first distance component and the second distance component and the preset distance.

Optionally, the relational equation is: d0 ²＝m²+n², or

Wherein d0 is the preset distance, m is the first distance component, and n is the second distance component;

When the first relative angle is 0 °, the first axial relative displacement is denoted as OA1, the first reference angle is denoted as β1, the second axial relative displacement is denoted as OA2, the second relative angle is denoted as θ1, the first characteristic relative displacement is denoted as A1P1, the included angle between the line where the A1P1 is located and the coordinate axis of the built-in coordinate system of the device is denoted as α1, the included angle to be measured is denoted as θ2, the second characteristic relative displacement is denoted as A2P2, and the included angle between the line where the A2P2 is located and the coordinate axis of the built-in coordinate system of the device is denoted as α2, where m and n may be expressed as:

m＝OA1*cosβ1-OA2*cos(β1+θ1)+A1P1*cos(θ2+β1+α1)-A2P2*cos(θ2+β1+α2+θ1)；

n＝OA1*sinβ1-OA2*sin(θ1+β1)+A1P1*sin(θ2+β1+α2)-A2P2*sin(θ2+β1+θ1+α2)。

optionally, obtaining the included angle to be measured according to the relational equation includes:

setting an initial value for the angle to be measured in the relation equation;

And performing function fitting on the relation equation through the first position information, the second position information and the preset distance, and optimizing the initial value to obtain the included angle to be measured.

Optionally, the method of function fitting includes a least squares method or a linear regression.

Optionally, the projection of the detection module and the first feature point on the measurement surface at the first relative position has a third distance vector; the projection of the detection module and the second feature point on the measurement surface at the second relative position has a fourth distance vector; a second preset difference value is arranged between the third distance vector and the fourth distance vector;

the component of the second preset difference value in the reference direction is the first preset difference value.

Optionally, the method further comprises:

when the detection equipment and the point to be detected have a third relative position, the detection equipment is utilized to carry out third detection on the point to be detected, and third position information of the point to be detected in the equipment reference frame is obtained;

and adjusting the third position information based on the included angle to be measured between the reference direction and the measurement direction to obtain fourth position information of the third feature point in the equipment reference system.

Optionally, the first feature point and the second feature point are plural.

Optionally, the first feature point and the second feature point are a center point of a round hole, a vertex of a cone or a sphere center of a sphere.

Optionally, the first feature point and the second feature point are the same point; or the projection positions of the first feature point and the second feature point in the reference direction are different.

The embodiment of the application also provides a detection device, which comprises detection equipment and a processing module, wherein the detection equipment is provided with a measurement direction, an equipment reference system determined according to the measurement direction and a reference direction corresponding to the measurement direction, the detection equipment comprises a detection module, an object to be detected comprises a first characteristic point and a second characteristic point, a preset distance is reserved between the first characteristic point and the second characteristic point, and the processing module comprises: the device comprises a detection unit and an included angle determination unit;

The detection unit is used for carrying out first detection on the first characteristic point by using the detection equipment when the detection module and the first characteristic point have first relative positions, and acquiring first position information of the first characteristic point in the equipment reference frame; a first distance vector is arranged between the detection module and the first characteristic point when the first relative position is set;

the included angle determining unit is used for obtaining an included angle to be measured between the reference direction and the measurement direction according to the preset distance, the first position information and the second position information.

The step of the detection unit acquiring the first and second position components includes: acquiring a first reference relative displacement of the first reference point and the second reference point and a first feature relative displacement of the first feature point and the first reference point at the first relative position; acquiring the first position component according to the first reference relative displacement, the first characteristic relative displacement, the first reference angle and the included angle to be measured; acquiring the second position component according to the first reference relative displacement, the first characteristic relative displacement, the second reference angle and the included angle to be measured;

The step of the detection unit acquiring the third position component and the fourth position component includes: acquiring a second reference relative displacement of the first reference point and the second reference point and a second feature relative displacement of the second feature point and the first reference point at the second relative position; acquiring the third position component according to the second reference relative displacement, the second characteristic relative displacement, the first reference angle and the included angle to be measured; and acquiring the fourth position component according to the second reference relative displacement, the second characteristic relative displacement, the second reference angle and the included angle to be measured.

The step of acquiring the first reference relative displacement by the detection unit includes: the object to be detected and the detection module are rotated relatively through a moving device, so that the detection module and the first characteristic point have a first relative position, and the first reference relative displacement is obtained; the first reference relative displacement includes: a first relative angle between the first reference line and the second reference line at the first relative position, and a first axial relative displacement between the first reference point and the center of rotation at the first relative position;

The step of acquiring the first characteristic relative displacement by the detection unit comprises the following steps: when the detection module and the first feature point have a first relative position, detecting the first feature point through the detection module to obtain the first feature relative displacement;

And/or the number of the groups of groups,

The step of the detection unit obtaining the second reference relative displacement includes: after the first detection, the object to be detected and the detection module are relatively rotated through the moving device, so that the detection module and the second characteristic point have second relative positions, and the second reference relative displacement is obtained; the second reference relative displacement includes: a second relative angle between the first reference line and the second reference line at the second relative position, and a second axial relative displacement between the first reference point and the center of rotation at the second relative position;

The step of acquiring the second characteristic relative displacement by the detection unit comprises the following steps: and when the detection module and the second feature point have second relative positions, detecting the second feature point through the detection module, and acquiring the second feature relative displacement.

Alternatively to this, the method may comprise,

The step of obtaining the first position component by the detection unit according to the first reference relative displacement, the first characteristic relative displacement, the first reference angle and the included angle to be detected includes:

The detection unit obtains a first partial displacement of the first axial relative displacement in the first direction according to the first axial relative displacement, the first reference angle and the first opposite angle;

The detection unit obtains a first relation representation of the first characteristic relative displacement in the first direction according to the first characteristic relative displacement, the first reference angle, the first opposite angle and the included angle to be detected;

the detection unit obtains the first position component according to the vector sum represented by the first partial displacement and the first relation;

The step of obtaining the second position component by the detection unit according to the first reference relative displacement, the first characteristic relative displacement, the second reference angle and the included angle to be detected includes:

the detection unit obtains second partial displacement of the first axial relative displacement in the second direction according to the first axial relative displacement, the second reference angle and the first opposite angle;

the detection unit obtains a second relation representation of the first characteristic relative displacement in the second direction according to the first characteristic relative displacement, the second reference angle, the first opposite angle and the included angle to be detected;

The detection unit obtains the second position component according to the vector sum represented by the second partial displacement and the second relation;

the step of obtaining the third position component by the detection unit according to the second reference relative displacement, the second characteristic relative displacement, the first reference angle and the included angle to be detected includes:

the detection unit obtains a third partial displacement of the second axial relative displacement in the first direction according to the second axial relative displacement, the first reference angle and the second relative angle;

the detection unit obtains a third relation representation of the second characteristic relative displacement in the first direction according to the second characteristic relative displacement, the first reference angle, the second relative angle and the included angle to be detected;

The detection unit obtains the third position component according to the vector sum represented by the third partial displacement and the third relation;

The step of the detection unit according to the second reference relative displacement, the second characteristic relative displacement, the second reference angle and the included angle to be detected and the fourth position component comprises the following steps:

The detection unit obtains fourth partial displacement of the second axial relative displacement in the second direction according to the second axial relative displacement, the second reference angle and the second relative angle;

the detection unit obtains a fourth relation representation of the second characteristic relative displacement in the second direction according to the second characteristic relative displacement, the second reference angle, the second relative angle and the included angle to be detected;

the detection unit obtains the fourth position component according to the vector sum represented by the fourth partial displacement and the fourth relation.

Optionally, the included angle determining unit includes:

a relation equation establishing unit, configured to establish a relation equation between the first position information, the second position information, the included angle to be measured, and the preset distance;

an included angle determining subunit, configured to obtain the included angle to be measured according to the relational equation;

The relational equation establishing unit includes:

A first distance component obtaining unit, configured to obtain a first distance component of the first feature point and the second feature point along the first direction according to a first position component of the first feature point along the first direction and a third position component of the second feature point along the first direction;

A second distance component obtaining unit configured to obtain a second distance component of the first feature point and the second feature point along the second direction according to a second position component of the first feature point along the second direction and a fourth position component of the second feature point along the second direction;

And the relation equation establishing subunit is used for establishing a relation equation by using the first distance component, the second distance component, the preset distance and the included angle between the first direction and the second direction.

Optionally, the first direction and the second direction are coordinate axis directions of the device reference system, and the device reference system is a rectangular coordinate system, and the relationship equation building subunit is specifically configured to:

Optionally, the relational equation is: d0 ²＝m²+n², or

optionally, the included angle determining subunit is specifically configured to:

setting an initial value for the angle to be measured in the relation equation;

Optionally, the projection of the detection module and the first feature point on the measurement surface at the first relative position has a third distance vector; the projection of the detection module and the second feature point on the measurement surface at the second relative position has a fourth distance vector; a second preset difference value is arranged between the third distance vector and the fourth distance vector; the component of the second preset difference value in the reference direction is the first preset difference value.

Optionally, the detection unit is further configured to: when the detection equipment and the point to be detected have a third relative position, the detection equipment is utilized to carry out third detection on the point to be detected, and third position information of the point to be detected in the equipment reference frame is obtained;

The processing unit further comprises an information adjusting unit; the information adjustment unit is configured to adjust the third position information based on an included angle to be measured between the reference direction and the measurement direction, so as to obtain fourth position information of the third feature point in the equipment reference frame.

Optionally, the first feature point and the second feature point are plural.

The embodiment of the application provides a detection method and a detection device of detection equipment, wherein the detection equipment is provided with a measurement direction, an equipment reference system determined according to the measurement direction and a reference direction corresponding to the measurement direction, the detection equipment comprises a detection module, an object to be detected comprises a first characteristic point and a second characteristic point, a preset distance is reserved between the first characteristic point and the second characteristic point, when the detection module and the first characteristic point have a first relative position, the first characteristic point can be detected by the detection equipment to obtain first position information of the first characteristic point in the equipment reference system, a first distance vector is reserved between the detection module and the first characteristic point, when the detection module and the second characteristic point have a second relative position, the second characteristic point can be detected by the detection equipment to obtain second position information of the second characteristic point in the equipment reference system, a second distance vector is reserved between the detection module and the second characteristic point, the first distance vector and the second distance vector have a first preset difference value in the reference direction, and the first preset difference value is a non-zero value.

The device reference system is determined according to the measurement direction, so that the obtained first position information of the first feature point in the device reference system and the obtained second position information of the second feature point in the device reference system are both related to the measurement direction, the reference direction corresponds to the measurement direction, when the detection device is accurately fixed, the measurement direction coincides with the reference direction, when the detection device has a fixed error, a certain included angle exists between the measurement direction and the reference direction, the detection of the detection device is inaccurate, the obtained first position information and second position information are also inaccurate, and therefore, the detection distance between the first feature point and the second feature point, which is determined according to the first relative position and the second relative position, is different from the preset distance between the first feature point and the second feature point, and the difference between the detection distance and the preset distance is determined by the included angle to be detected between the reference direction and the measurement direction, so that the included angle to be detected can be obtained according to the preset distance, the first position information and the second position information, so as to improve the detection accuracy of the detection device.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments described in the present application, and other drawings may be obtained according to these drawings for those of ordinary skill in the art.

FIG. 1 is a flow chart of a detection method of a detection device according to an embodiment of the present application;

FIG. 2 is a schematic diagram of detection according to an embodiment of the present application;

FIG. 3 is a schematic diagram of another embodiment of the present application;

fig. 4 is a schematic structural diagram of a detection device according to an embodiment of the present application.

Detailed Description

In order to make the present application better understood by those skilled in the art, the following description will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings, and it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.

At present, a detection device can be used for detecting a characteristic point on an object to be detected, so that the actual position of the characteristic point is determined, a reference direction can be preset for the detection device in the process of detecting the characteristic point, and the detection result obtained by the detection device can be processed into position information along the reference direction through the detection characteristic, the fixed direction and the analysis of the detection result of the detection device, so that the actual position of the characteristic point is determined. Wherein, the reference direction is consistent for a plurality of feature points, so that the relative positions of the feature points can be represented. For example, when the reference direction is a vertical direction, the position information of the feature points in the reference direction can be represented by the heights of the feature points, and the fixed direction of the detection device can have various corresponding different analysis processes, so that the heights of the feature points can be obtained by using the detection results of the feature points. That is, the detection characteristics of the detection device, the fixed direction, and the analysis process of the detection result are corresponding, so that the detection result can be converted into the positional information in the reference direction.

Based on the above technical problems, the embodiment of the application provides a detection method and a detection device of a detection device, the detection device has a measurement direction, a device reference frame determined according to the measurement direction and a reference direction corresponding to the measurement direction, the detection device comprises a detection module, an object to be detected comprises a first feature point and a second feature point, a preset distance is reserved between the first feature point and the second feature point, when the detection module and the first feature point have a first relative position, the detection device can be used for carrying out first detection on the first feature point to obtain first position information of the first feature point in the device reference frame, at the moment, a first distance vector is reserved between the detection module and the first feature point, when the detection module and the second feature point have a second relative position, the detection device can be used for carrying out second detection on the second feature point to obtain second position information of the second feature point in the device reference frame, at the moment, a second distance vector is reserved between the detection module and the second feature point, the first distance vector and the second distance vector have a first preset difference in the reference direction, and the first preset difference is a non-zero value.

For convenience of explanation, the detection apparatus according to the embodiment of the present application will be described below.

In the embodiment of the application, the detection device is used for detecting the object to be detected, the object to be detected can comprise at least one characteristic point, the characteristic point on the object to be detected can be detected through the detection device, the position of the characteristic point is obtained, and the position of the detected characteristic point can be a position along a certain direction or a position in a two-dimensional coordinate system. In the embodiment of the application, the object to be detected may be a wafer, and the position of the detected feature point may be the position of the feature point on the surface of the wafer.

The detection device can comprise a detection module and a moving device, wherein the detection module is used for detecting the characteristic points to obtain detection results, and the moving device can move the detection module and/or the object to be detected, so that the relative position between the detection module and the object to be detected is adjusted. Specifically, the moving device can enable the detection module to rotate around the rotating shaft, can enable the detection module to translate along the rotating radius, and can enable the object to be detected to rotate around the rotating shaft, and of course, can enable the detection module and the object to be detected to rotate simultaneously, wherein the object to be detected and the detection module can have the rotating shaft, the rotating shaft is perpendicular to the rotating plane of the object to be detected and is also perpendicular to the rotating plane of the detection module, and the rotating centers of the object to be detected and the detection module are located on the rotating shaft.

After the detection module and/or the object to be detected are moved by the moving device, movement data can be obtained, and the movement data can comprise a rotation angle, a rotation radius, a movement distance and the like. In order to be convenient for carry out the quantization to the removal of detection module and the thing that awaits measuring, can set up first datum line for detection module, set up the second datum line for the thing that awaits measuring, first datum line and second datum line all can intersect with the rotation axis is perpendicular, first datum line is rotatory along with the detection module, the second datum line is rotatory along with the thing that awaits measuring, for example first datum line can be located the rotation plane of check out test set, the second datum line can be located the rotation plane of thing that awaits measuring, the rotation angle that utilizes rotation and the second datum line of first datum line can characterize the rotation angle of detection module and thing that awaits measuring. At the reference position, the first reference line, the second reference line, and the first reference direction coincide, that is, the first reference line and the second reference line can start to rotate from the first reference direction.

The detection module can be provided with an equipment built-in coordinate system, after the position of the detection module is changed, the equipment built-in coordinate system also moves, for example, the equipment built-in coordinate system rotates along with the rotation of the detection module and translates along with the translation of the detection module, so that the equipment built-in coordinate system cannot accurately represent the actual position of the detected characteristic point, the equipment reference system can be determined for the detection equipment, the equipment reference system is always unchanged in the movement process of the detection module, and the conversion relation between the equipment built-in coordinate system and the equipment reference system is established according to the movement condition of the detection module, so that the detection module is utilized to detect the characteristic point, and the actual position of the characteristic point is obtained.

In the detection process, the detection mode and the fixed direction of the detection module are determined, and the conversion relation between the built-in coordinate system of the device and the reference system of the device is also determined, so that the reference system of the device where the detection data after conversion are located is also determined. In the case that the fixed direction is accurate, based on the detection data after conversion by the conversion strategy, corresponding to the device reference system established based on the reference direction, where the reference direction is a predefined ideal direction; in the case that there is a deviation in the fixed direction, based on the detection data after the conversion of the conversion policy, the corresponding device reference frame established based on the measurement direction is different from the device reference frame established based on the reference direction, where the measurement direction is an actual direction determined according to the detection mode of the detection module, the fixed direction and the conversion relationship, and when the measurement direction has a certain included angle with the reference direction, there is also a certain included angle between the device reference frame established based on the reference direction and the corresponding coordinate axis of the device reference frame established based on the measurement direction, it is obvious that determining the actual position of the feature point as the detection data in the device reference frame established based on the measurement direction is inaccurate. Therefore, the embodiment of the application can determine the included angle to be measured between the reference direction and the measurement direction, and further can utilize the included angle to be measured to realize the conversion of data in the equipment reference system established based on the measurement direction and the equipment reference system established based on the reference direction, thereby improving the detection accuracy of the detection equipment.

Specifically, the device reference system may be a rectangular coordinate system, or may be another coordinate system, and the reference direction or the measurement direction may be used as a coordinate axis to establish the coordinate system, or a direction forming a certain included angle with the reference direction or the measurement direction may be used as a coordinate axis to establish the coordinate system. The device reference frame, the reference direction and the measurement direction may lie in the same plane, which may be referred to as the measurement plane, and the predicted angle between the reference direction and the measurement direction is also located in the measurement plane.

Specifically, the detection module may be a camera, the feature points may be detected by shooting the feature points with the camera, and the camera may be an array of image sensors, for example, may be a white light confocal device. The detection result of the detection module on the feature points can be coordinates of the feature points in a coordinate system built in the equipment, so that the position relationship between the feature points and the detection module is reflected.

The image sensor can form a linear array, the detection module is a linear array camera, and the coordinate axis of the built-in coordinate system of the equipment can be along the extending direction of the array of the linear array camera, so that the actual position of the characteristic point can be determined according to the position of the characteristic point in the built-in coordinate system of the equipment and the position of the detection module; or the image sensor can also form an array plane, the detection module can also be an area array camera, and two coordinate axes of the built-in coordinate system of the device can be along two extending directions of the array of the area array camera, so that the actual position of the feature point can be determined according to the position of the feature point in the built-in coordinate system of the device and the position of the detection module.

In order to facilitate understanding, the specific implementation of the detection method and the detection device of the detection device in the embodiment of the application will be described in detail by the embodiments below with reference to the accompanying drawings.

Referring to fig. 1, a flowchart of a detection method of a detection device according to an embodiment of the present application is shown, where the method may include the following steps:

And S101, when the detection module and the first feature point have first relative positions, first detection is carried out on the first feature point by using detection equipment, and first position information of the first feature point in an equipment reference frame is obtained.

In the embodiment of the application, when the detection module and the first feature point have the first relative position, the first feature point is in the detection range of the detection module, and the first detection device can be utilized to carry out the first detection on the first feature point, so as to obtain the first position information of the first feature point in the device reference frame, wherein the device reference frame is determined based on the measurement direction of the detection device.

The detection device may include a moving apparatus and a detection module, the moving apparatus may move the detection module, and the detection module may detect the feature point. The first feature point may be located on the object to be measured, where the first feature point may be a center point of a circular hole, a vertex of a cone, or a center of a sphere, for example, the object to be measured may be a wafer, and the first feature point may be a feature point on the wafer, for example, a center point of a circular hole on the wafer. The first feature points may be plural, and when the detection device and the first feature points have the first relative positions, the plural first feature points are all located in the detection range of the detection module.

For the detection device, the reference direction is a direction corresponding to preset ideal detection data, and the measurement direction is a direction corresponding to actual data, and the position information detected by the detection device is set to correspond to the device reference frame determined based on the reference direction. When the reference direction and the measurement direction of the detection device are coincident, it is indicated that the detection device is fixed accurately, the first position information of the first feature point in the device reference frame determined based on the measurement direction of the detection device is accurate, and when the detection device has a fixed error, it is indicated that the detection device is fixed in error, a certain included angle exists between the reference direction and the measurement direction of the detection device, the obtained first feature point is inaccurate based on the first position information in the device reference frame determined based on the measurement direction based on the detection characteristic and the detection direction of the detection device, and the first position information is related to the fixed error of the detection device, so that the fixed error of the detection device can be reflected by using the first position information. In the following description, unless otherwise specified, a device reference frame refers to a device reference frame determined based on a measurement direction.

The reference direction and the measuring direction may be located in the same plane, the device reference system established based on the reference direction or the measuring direction may also be located in the plane, the plane may be referred to as a measuring plane, the device reference system may have a coordinate axis, and the device reference system may include a first direction and a second direction, which are also located in the measuring plane, and may be perpendicular or have an acute angle, the first direction and the second direction may be two coordinate axis directions, or may be other directions than the coordinate axis, and when the first direction and the second direction are not coordinate axis directions, the angle between the first direction and the coordinate axis is fixed. The reference direction and the first direction may have a first reference angle, and the reference direction and the second direction may have a second reference angle, the first reference angle and the second reference angle being directional characteristics, the reference direction and the second direction having opposite directions when the reference direction is located between the first direction and the second direction. In general, the reference direction is preset, known, the measurement direction is uncertain, the coordinate axis direction of the reference system of the device is uncertain and the first direction and the second direction are unknown, and then the first reference angle and the second reference angle are unknown.

Specifically, the first position information of the first feature point in the device reference frame may include a first position component of the first feature point along the first direction and a second position component of the first feature point along the second direction. When the first direction and the second direction are coordinate axis directions of the device reference frame, the first position component and the second position component are coordinate values along the two coordinate axis directions.

Since the detection module and the object to be detected are movable, the first relative positions of the detection module and the object to be detected can be the result of moving the detection module and the object to be detected, the movement is generalized movement, the displacement of the movement can be zero, and the detection module and the object to be detected are considered to be in an initial state. It should be noted that, the object to be detected is movable, which is to better place the first feature point in the object to be detected within the detection range of the detection module, if the object to be detected moves before detection, the position of the detected first feature point is the position after the object to be detected moves, and the position of the first feature point before the movement can be obtained according to the movement data of the object to be detected and the position of the detected first feature point, for example, when the object to be detected is a wafer, the rotation center of the wafer is the center of a circle, and then after the detection module detects the first feature point on the wafer, in order to accurately analyze the position of the first feature point, the detection result needs to be corresponding to a certain fixed plane of the wafer. The first relative position of the detection module and the first feature point may be represented by a first distance vector between the detection module and the first feature point, where the detection module and the first feature point are located in two rotation planes parallel to the measurement plane, and the first distance vector may be projected into the measurement plane, and the projection of the first distance vector in the measurement plane may be denoted as a third distance vector.

Since the detection module is mobile, the position of the detection module itself relative to the device reference frame is variable, the first position information of the first feature point in the device reference frame can be determined from the real-time position information of the detection module relative to the device reference frame and the real-time position information of the first feature point relative to the detection module. Specifically, the detection module may have a first reference point, where the first reference point may be any feature point of the detection module and is used to characterize a position of the detection module, where the position of the first reference point relative to the device reference frame may embody a position of the detection module relative to the device reference frame, the device reference frame may have a second reference point, where the second reference point is a point that is stationary relative to the device reference frame, and the second reference point may be a point on the object to be detected. At this time, the first distance vector between the detection module and the first feature point may be represented by the first distance vector between the first reference point of the detection module and the first feature point.

Since the first position information of the first feature point in the device reference frame may include a first position component and a second position component, acquiring the first position information may include acquiring the first position component and the second position component, specifically, a first reference relative displacement of the first reference point and the second reference point and a first feature relative displacement of the first feature point and the first reference point may be acquired at a first relative position, and then acquiring the first position component according to the first reference relative displacement, the first feature relative displacement, the first reference angle and the included angle to be measured, and acquiring the second position component according to the first reference relative displacement, the first feature relative displacement, the second reference angle and the included angle to be measured.

The first reference relative displacement represents real-time position information of the detection module relative to the equipment reference frame when the first relative position is represented, the first characteristic relative displacement represents real-time position information of the first characteristic point relative to the detection module when the first relative position is represented, and the first reference relative displacement and the first characteristic point relative to the detection module are combined to determine first position information of the first characteristic point in the equipment reference frame when the first relative position is represented. The first position component is determined by a first reference angle and an included angle to be measured, when the first reference angle and the included angle to be measured are unknown, the first position component can be represented by a symbol as an unknown number, and similarly, the second reference angle is also represented by the symbol as the unknown number.

The first relative position of the object to be detected and the detection module can be obtained by moving the object to be detected and/or the detection module through the moving device, the movement can comprise rotation and also can comprise translation of the detection module along a rotation radius, wherein the object to be detected and the detection module can have a rotation axis, the rotation axis is perpendicular to a rotation plane of the object to be detected and is also perpendicular to the rotation plane of the detection module, for example, the detection module can be arranged above the object to be detected, and in the rotation process of the object to be detected and/or the detection module, the rotation planes of the object to be detected and/or the detection module have approximately the same distance. In addition, the measurement surface where the device reference system is located may be parallel to the rotation plane of the object to be measured, or may coincide with the rotation plane of the object to be measured, and the rotation axis may also be perpendicular to the measurement surface, so that the reference direction is perpendicular to the rotation axis, the measurement direction is perpendicular to the rotation axis, when the measurement surface coincides with the rotation plane of the object to be measured, the reference direction may intersect with the rotation axis at the rotation center of the object to be measured, the rotation center of the object to be measured may be the second reference point, and when the object to be measured is a wafer, the rotation center of the object to be measured may be the center of the circle of the wafer.

The detection module may have a first reference line, the object to be detected may have a second reference line, the first reference line and the second reference line may each intersect the rotation axis perpendicularly, the first reference line rotates with the detection module, the second reference line rotates with the object to be detected, the rotation angle of the detection module and the object to be detected may be represented by using the rotation of the first reference line and the rotation angle of the second reference line, for example, the first reference line may be located in a rotation plane of the detection device, and the second reference line may be located in a rotation plane of the object to be detected. For example, the first reference line may be a line between any point on the detection module and the rotation center of the detection module, for example, a line between the first reference point and the rotation center, the second reference line may be a line between any point on the object to be detected and the rotation center of the object to be detected, for example, when the object to be detected is a wafer, the second reference line may be a line between a point on an edge of the wafer and the rotation center, that is, a radial direction of the wafer, and the radial direction may pass through a mark point of the wafer.

In this scenario, the step of obtaining the first reference relative displacement may include: the moving device enables the object to be detected and the detection module to relatively rotate, so that the detection module and the first characteristic point have first relative positions, and first reference relative displacement is obtained. The first reference relative displacement may be obtained by movement data of the movement device, and may include a first relative angle between the first reference line and the second reference line at the first relative position, and a first axial relative displacement between the first reference point and a rotation center of the object to be measured at the first relative position. The first relative angle represents a relative rotation angle between the detection module and the object to be detected, the first relative angle may be zero or not, the first axial relative displacement represents a distance between the first datum point and the rotation center, namely, a rotation radius of the first datum point of the detection module, the rotation radius of the first datum point can be kept consistent in a rotation process of the detection module, if the detection module translates in a rotation radius direction, the rotation radius of the first datum point changes, and the first relative position obtains a real-time rotation radius.

In this scenario, the step of obtaining the first feature relative displacement may include: when the detection module and the first feature point have a first relative position, the detection module detects the first feature point to obtain a first feature relative displacement. The detection module may have a built-in coordinate system, the built-in coordinate system may move along with movement of the detection module, the first reference point may be an origin of the built-in coordinate system of the detection module, and the first feature relative displacement may be determined according to a first coordinate of the first feature point in the built-in coordinate system of the device. The detection module can be a linear array camera or an area array camera, a first image can be obtained by shooting the first characteristic points through the detection module, and the first coordinates of the first characteristic points in the built-in coordinate system of the equipment can be determined according to the first image. Specifically, the first coordinate may be represented by a distance between the first feature point and the origin of coordinates of the built-in coordinate system of the device in the coordinate system of the device along the coordinate axis direction, or may be represented by a distance between the first feature point and the origin of coordinates of the built-in coordinate system of the device, and an included angle between a line between the first feature point and the origin of coordinates and the coordinate axis direction in the built-in coordinate system of the device.

Referring to fig. 2, a schematic diagram of detection in an embodiment of the present application is shown, wherein the detection module is a line camera, the array extension direction of the line camera is the direction A1B1, A1 and B1 are array endpoints of the line camera, and the built-in coordinate system of the device is along the array extension direction A1B1 of the line camera, and the A1 is taken as the origin of coordinates, and it can be understood that fig. 2 is only a specific example and does not limit the detection mode of the line camera in the present application.

The detection module can rotate around the O point, the current position of the detection module and the first feature point P1 can be used as a first relative position, the reference direction is enabled to be the vertical direction, the first reference point of the detection module is the A1 point, the O point is used as a second reference point of the detection module along with the rotation of the detection module, the O point is used as the rotation center of the detection module, the first reference line of the detection module can be the connecting line of the first reference point and the rotation center, the second reference line of the detection module can coincide with the first reference line, the first reference line and the second reference line can be along the vertical direction, when the detection module and the detection module rotate, the first reference line and the second reference line can also rotate, the first reference line and the second reference line can be represented by using an OA1, the rotation radius of the first reference point A1 is the OA1, in actual operation, the array extending direction of the detection module is generally coincident with the rotation radius direction of the detection module, and the position of the feature point to be directly determined according to the detection result of the detection module, however, in the embodiment of the application, when the array extending direction of the detection module is fixed, the rotation radius of the detection module and the rotation radius 2 can also have a positive value and a negative value and the angle 2B can be represented by using the measurement direction 1 along the reference direction. When the detection module and the first feature point P1 are at the first relative position, the first relative angle between the first reference line and the second reference line is zero, and the first axial relative displacement between the first reference point A1 and the rotation center O of the object to be detected can be represented by OA1, that is, the first reference relative displacement can be represented by a first relative angle of 0 ° and a first axial relative displacement OA 1.

In the built-in coordinate system of the linear camera, the distance between the first feature point P1 and the coordinate origin A1 of the built-in coordinate system of the linear camera along the coordinate axis direction is A1P1, and then the first coordinate is A1P1, and the first feature relative displacement can be represented by using A1P 1.

Referring to fig. 3, another detection schematic diagram provided in this embodiment of the present application is shown, where the detection device is an area camera, the array of the area camera may be denoted as A1B1E1D1, the array extension directions of the area camera are A1B1 and A1D1, the respective endpoints are A1, B1, C1 and D1, two coordinate axes of the built-in coordinate system of the device may be along two extension directions of the array of the area camera, specifically, the first extension direction A1B1 may be taken as the y1 axis, the second extension direction A1D1 may be taken as the x1 axis, and A1 may be taken as the origin to form the built-in coordinate system of the device, which is understood that fig. 3 is only a specific example and does not constitute a limitation to the detection mode of the area camera in the present application.

The detection device can rotate around an O point, the current position of the detection module and the first feature point P1 can be used as a first relative position, the reference direction is made to be a vertical direction, the first reference point of the detection module is made to be an A1 point, the O point is used as a second reference point of the detected feature point along with the rotation of the detection module, the first reference line of the detection module and the second reference line of the detected feature point can be used as the rotation center of the detected feature point, when the detection module and the detected feature point rotate, the first reference line and the second reference line can also rotate along the vertical direction, the first reference line and the second reference line can be represented by OA1, the rotation radius of the first reference point A1 is set to be the OA1, in actual operation, the array extending direction of the detection module is generally coincident with the rotation radius direction of the detection module, and thus the position of the detected feature point can be directly determined according to the rotation angle and the detection result of the detection module. When the detection module and the first feature point P1 are at the first relative position, the first relative angle between the first reference line and the second reference line is zero, and the first axial relative displacement between the first reference point A1 and the rotation center O of the object to be detected can be represented by OA1, that is, the first reference relative displacement can be represented by a first relative angle of 0 ° and a first axial relative displacement OA 1.

In the built-in coordinate system of the area camera, the first coordinate of the first feature point P1 in the built-in coordinate system of the area camera may be denoted as (a, b), and the distances between the first feature point P1 and the origin A1 of the built-in coordinate system of the area camera along the coordinate axis directions x1 and y1 are a and b, respectively, in fig. 3, a is 0. Further, the distance A1P1 between P1 and the origin of coordinates A1 isThe angle between A1P1 and y1 axis is denoted by α1 (α1 can represent direction by positive and negative values),In fig. 3, α1 is zero. Thus the relative displacement of the first feature may be determined by the distanceAnd (3) representing. It will be appreciated that the scene of the line camera of fig. 2 is similar to the scene where α1 is zero.

After the first reference relative displacement and the first feature relative displacement are obtained, a first position component can be obtained according to the first reference relative displacement, the first feature relative displacement, the first reference angle and the included angle to be measured, specifically, a first partial displacement of the first axial relative displacement in the first direction can be obtained according to the first axial relative displacement, the first reference angle and the first opposite angle, a first relation representation of the first feature relative displacement in the first direction can be obtained according to the first feature relative displacement, the first reference angle, the first opposite angle and the included angle to be measured, and a first position component can be obtained according to a vector sum of the first partial displacement and the first relation representation.

The step of obtaining a first partial displacement of the first axial relative displacement in the first direction according to the first axial relative displacement, the first reference angle and the first relative angle comprises the following steps: obtaining a vector sum of a first relative angle and a first reference angle to obtain a first projection angle; carrying out projection processing on the first axial relative displacement by using a first projection angle to obtain a first partial displacement; according to the first characteristic relative displacement, the first reference angle, the first opposite angle and the included angle to be measured, the step of obtaining a first relation representation of the first characteristic relative displacement in the first direction comprises the following steps: obtaining a vector sum of a first reference angle, a first opposite angle and an included angle to be measured to obtain a first projection angle expression; and obtaining the projection of the first characteristic relative displacement in the first direction by using a first projection angle expression to obtain a first relation expression.

Referring to fig. 2, the first reference angle may be denoted as β1 (β1 may represent a direction by a positive value and a negative value), the first relative angle may be an angle between the first reference line and the second reference line, and when the first relative angle is zero, the first reference line and the second reference line may be considered as not rotating relatively, and at this time, the first reference line and the second reference line may actually rotate by the same angle. In specific implementation, the initial included angle between the first reference line and the second reference line may be zero, and the initial positions of the first reference line and the second reference line may be vertical directions, that is, the initial positions of the first reference line and the second reference line coincide with the reference directions.

The first reference angle may be denoted as β1, the second reference angle β2 may be (90 ° - β1), and the first reference angle may be equal to the angle θ2 to be measured when the first direction is a direction along the measurement direction and the second direction may be a direction perpendicular to the measurement direction. When the initial positions of the first reference line and the second reference line are overlapped with the reference direction, a first opposite angle between the first reference line and the second reference line can be equivalent to an included angle between the first reference line and the reference direction when the second reference line is kept motionless (the second reference line is overlapped with the reference direction), and the first reference angle is an included angle between the reference direction and the first direction, a vector sum of the first opposite angle and the first reference angle beta 1 can be used as a first projection angle, namely, an included angle between the first reference line and the first direction, and the first projection angle is beta 1 when the first opposite angle is zero. The first axial relative displacement OA1 is along the first reference line direction, and thus the first partial displacement of the first axial relative displacement OA1 in the first direction may be denoted as OA1×cos β1.

Similarly, the first partial displacement of the first axial relative displacement OA1 in the first direction in fig. 3 may also be denoted as OA1 x cos β1.

Referring to fig. 2, the first feature relative displacement of the first feature point P1 in the built-in coordinate system of the device is A1P1, the first feature relative displacement A1P1 is along the coordinate axis direction of the built-in coordinate system of the device, the included angle between the coordinate axis direction and the first reference line OA1 is an included angle θ2 to be measured, the included angle between the first reference line OA1 and the reference direction is a first opposite angle, and the first reference angle β1 is an included angle between the reference direction and the first direction, and then the included angle between the coordinate axis direction and the first direction is expressed as a first projection angle, and may be expressed as a vector sum of the included angle θ2 to be measured, the first opposite angle and the first reference angle β1, and the first projection angle expression may be expressed as (θ2+β1), and the first relation expression of the first feature relative displacement A1P1 in the first direction may be expressed as A1P1×cos (θ2+β1).

Similarly, referring to fig. 3, the first characteristic relative displacement is A1P1, the included angle α1 between the A1P1 and the y1 axis, the first relation of the first characteristic relative displacement A1P1 in the first direction may be denoted as A1P1×cos (θ2+β1+α1), and the first relation may be denoted as A1P1×cos (θ2+β1) when α1 is zero.

The vector sum represented by the first partial displacement and the first relation may be regarded as a first position component, and in the scenario of fig. 2, the first position component may be represented as OA1×cos β1+a1p1× cos (θ2+β1), and in the scenario of fig. 3, the first position component may be represented as OA1×cos β1+a1p1× cos (θ2+β1+α1).

After the first reference relative displacement and the first characteristic relative displacement are obtained, the second position component can be obtained according to the first reference relative displacement, the first characteristic relative displacement, the second reference angle and the included angle to be measured, specifically, the second partial displacement of the first axial relative displacement in the second direction can be obtained according to the first axial relative displacement, the second reference angle and the first opposite angle, the second relation expression of the first characteristic relative displacement in the second direction can be obtained according to the first characteristic relative displacement, the second reference angle, the first opposite angle and the included angle to be measured, and the second position component can be obtained according to the vector sum expressed by the second partial displacement and the second relation expression.

The step of obtaining a second partial displacement of the first axial relative displacement in the second direction according to the first axial relative displacement, the second reference angle and the first relative angle comprises the following steps: obtaining a vector sum of the first opposite angle and the second reference angle to obtain a second projection angle; carrying out projection processing on the first axial relative displacement by using a second projection angle to obtain a second partial displacement; according to the first characteristic relative displacement, the second reference angle, the first opposite angle and the included angle to be measured, the step of obtaining a second relation representation of the first characteristic relative displacement in the second direction comprises the following steps: obtaining a vector sum of a second reference angle, a first opposite angle and an included angle to be measured to obtain a second projection angle expression; and obtaining the projection of the second characteristic relative displacement in the second direction by using a second projection angle expression to obtain a second relation expression.

Similarly, referring to fig. 2, the vector sum of the first relative angle and the second reference angle β2 may be used as the second projection angle, that is, the angle between the first reference line and the second direction, where the second projection angle is β2 when the first relative angle is zero, and the first axial relative displacement OA1 is along the first reference line, so that the second partial displacement of the first axial relative displacement OA1 in the second direction may be denoted as OA1×cos β2 or OA1×sin β1.

Similarly, the second partial displacement of the first axial relative displacement OA1 in the second direction in fig. 3 may also be denoted as OA1 sin β1.

Referring to fig. 2, the first characteristic relative displacement A1P1 has opposite directions along a coordinate axis direction of the built-in coordinate system of the device, an included angle between the coordinate axis direction and the second direction is represented as a second projection angle, which may be represented as a vector sum of the included angle θ2 to be measured, the first relative angle and the second reference angle β2, where the first relative angle is zero, the second projection may be represented as (- θ2+β2), and the second relationship of the first characteristic relative displacement A1P1 in the second direction may be represented as a1p1×cos (- θ2+β2), or as a1p1×sin (θ2+β1).

Similarly, referring to fig. 3, the first characteristic relative displacement is A1P1, the included angle α1 between the A1P1 and the y1 axis, and the first relation of the first characteristic relative displacement A1P1 in the second direction is expressed as A1P1×cos (- θ2+β2- α1), A1P1×sin (θ2+β1+α1), and A1 zero, where the first relation is A1P1×sin (θ2+β1).

The vector sum represented by the second partial displacement and the second relation may be regarded as a second position component, and in the scenario of fig. 2, the second position component may be represented as OA1×sin β1+a1p1sin (θ2+β1), and in the scenario of fig. 3, the second position component may be represented as OA1×sin β1+a1p1sin (θ2+β1+α1).

And S102, when the detection module and the second feature point have second relative positions, second detection is carried out on the second feature point by using detection equipment, and second position information of the second feature point in the equipment reference frame is obtained.

In the embodiment of the application, when the detection module and the second feature point have the second relative position, the second feature point is in the detection range of the detection module, and the detection equipment can be utilized to carry out second detection on the second feature point, so as to acquire the second position information of the second feature point in the equipment reference frame, wherein the equipment reference frame is determined based on the measurement direction of the detection equipment.

The second feature point may be located on the object to be measured, where the second feature point may be a center point of a circular hole, a vertex of a cone, or a sphere center of a sphere, for example, the object to be measured may be a wafer, the second feature point may be a feature point on the wafer, for example, a center point of a circular hole on the wafer, and the second feature point and the first feature point may belong to the same type of feature point, or may belong to different types of feature points. The second feature points may be plural, and when the detection device and the second feature points have the second relative positions, the plural second feature points are all located in the detection range of the detection module.

The first feature point and the second feature point may have a preset distance, and the preset distance may be represented by d0, and in actual operation, the preset distance may be a distance between projections of the first feature point and the second feature point in the measurement plane. The detection device is set to correspond to a device reference frame determined based on a reference direction, the detection device is accurately fixed when the reference direction and the measurement direction of the detection device are coincident, the first position information of the first feature point in the device reference frame determined based on the measurement direction of the detection device is accurate, the second position information of the second feature point in the device reference frame determined based on the measurement direction of the detection device is also accurate, and the distance between the first feature point and the second feature point calculated based on the first position information and the second position information is equal to a preset distance. When the detection equipment has a fixed error, the detection equipment is fixed and has an error, a certain included angle exists between the reference direction and the measurement direction of the detection equipment, the obtained first position information and second position information are inaccurate based on the detection characteristics and the detection direction of the detection equipment, the distance between the first characteristic point and the second characteristic point determined according to the first position information and the second position information is not equal to a preset distance any more, a certain distance error exists, and the calculated distance error is related to the fixed error of the detection equipment.

The second relative position of the detection module and the second feature point may be represented by a second distance vector between the detection module and the second feature point, and a projection of the second distance vector in the measurement plane may be denoted as a third distance vector. In order to embody the fixed error of the detection device by using the first position information and the second position information, the first distance vector and the second distance vector may have a first preset difference value in the reference direction, and the first preset difference value is a non-zero value, that is, the first relative position and the second relative position are not completely consistent in the reference direction, so that the distance between the first feature point and the second feature point obtained by final calculation is not equal to the preset distance any more, and the fixed error of the detection device can be embodied.

When determining the first preset difference value of the first distance vector and the second distance vector in the reference direction, the projection of the first distance vector in the measurement plane can be marked as a third distance vector, the projection of the second distance vector in the measurement plane can be marked as a third distance vector, the second preset difference value is arranged between the third distance vector and the fourth distance vector, and the component of the second preset difference value in the reference direction is the first preset difference value. Specifically, when the first preset difference value is a non-zero value, the first feature point and the second feature point may be the same point, and the detection module and the object to be detected have relative rotation, or the detection module and the object to be detected do not have relative rotation, and the projection positions of the first feature point and the second feature point in the reference direction are different, or the detection module and the object to be detected have relative rotation, and the projection positions of the first feature point and the second feature point in the reference direction are different, as shown in fig. 2 and fig. 3.

In particular, the second position information of the second feature point in the device reference frame may include a third position component of the second feature point along the first direction and a fourth position component of the second feature point along the second direction. When the first direction and the second direction are coordinate axis directions of the device reference frame, the third position component and the fourth position component are coordinate values along the two coordinate axis directions. The obtaining of the second position information may include obtaining a third position classification and a fourth position component, and specifically, may obtain, at the second relative position, a second reference relative displacement of the first reference point and the second reference point, and a second feature relative displacement of the second feature point and the first reference point, and then obtain the third position component according to the second reference relative displacement, the second feature relative displacement, the first reference angle, and the included angle to be measured, and obtain the fourth position component according to the second reference relative displacement, the second feature relative displacement, the second reference angle, and the included angle to be measured.

The second reference relative displacement represents real-time position information of the detection module relative to the equipment reference frame when the second reference relative displacement represents real-time position information of the second feature point relative to the detection module when the second feature relative displacement represents the second relative position, and the second reference relative displacement represents real-time position information of the second feature point relative to the detection module when the second reference relative position is combined with the real-time position information of the first feature point in the equipment reference frame when the second reference relative position is determined.

The step of obtaining the second reference relative displacement may comprise: after the first detection, the to-be-detected object and the detection module are relatively rotated through the moving device, so that the detection module and the second characteristic point have second relative positions, and second reference relative displacement is obtained. The second reference relative displacement may be obtained by movement data of the movement device, and may include a second relative angle between the first reference line and the second reference line at the second relative position, and a second axial relative displacement between the first reference point and the rotation center of the object to be measured at the second relative position along the first reference line. The second opposite angle represents a relative rotation angle between the detection module and the object to be detected, the second opposite angle can be zero or not, and at least one of the first opposite angle and the second opposite angle can be zero, so that subsequent calculation is facilitated. The second axial relative displacement represents the distance between the first datum point and the rotation center, namely the rotation radius of the first datum point of the detection module.

The step of obtaining the relative displacement of the second feature may comprise: and when the detection module and the second feature point have second relative positions, detecting the second feature point through the detection module to acquire second feature relative displacement. The first reference point may be an origin of a coordinate system built in the device of the detection module, and the second feature relative displacement may be determined according to a second coordinate of the second feature point in the coordinate system built in the device. The detection module can be a linear array camera or an area array camera, a second image can be obtained by shooting the second characteristic points through the detection module, and second coordinates of the second characteristic points in an equipment built-in coordinate system can be determined according to the second image. Specifically, the second coordinate may be represented by a distance between the second feature point and the origin of coordinates of the built-in coordinate system of the device in the coordinate system of the device along the coordinate axis direction, or by a distance between the second feature point and the origin of coordinates of the built-in coordinate system of the device, or by an included angle between a line between the second feature point and the origin of coordinates in the built-in coordinate system of the device and the coordinate axis direction.

Referring to fig. 2, the detection module rotates around the O-point, the object to be detected does not rotate, so that a second relative position of the detection module and the object to be detected is obtained, and the array extension direction of the line camera moves from the A1B1 direction to the A2B2 direction, so that the coordinate system built in the device moves to the A2B2 direction, and A2 is the origin of coordinates. The first reference point is moved to A2, the reference line is moved to OA2, the vertical direction (OA 1) is still the reference direction, the A1B1 direction is still the measurement direction, the O point is the second reference point of the object to be measured, the second relative angle between the first reference line and the second reference line can be represented by θ1 (θ1 can be represented by a positive or negative value), and since the object to be measured does not rotate, the second reference line coincides with the reference direction, and therefore the angle between the first reference line and the reference direction can be represented by θ1. When the detection module and the second feature point P2 are at the second relative position, the rotation radius of the first reference point A2 is OA2, and the second relative displacement between the first reference point A2 and the rotation center O of the object to be detected along the second axis of the first reference line can be represented by OA2, that is, the second relative displacement can be represented by the second relative angle θ1 and the second relative displacement OA 2.

In the built-in coordinate system of the linear camera, the distance between the second feature point P2 and the coordinate origin A2 of the built-in coordinate system of the linear camera along the coordinate axis direction is A2P2, and then the second coordinate is A2P2, and the second feature relative displacement can be represented by using A2P 2.

Referring to fig. 3, the detection module does not rotate about the O-point, so as to obtain a second relative position of the detection module and the object, the array extension direction of the area camera is moved to A2B2E2D2, the built-in coordinate system of the device is moved to x2A2y2, correspondingly, the first extension direction A2B2 is taken as the y2 axis, the second extension direction A2D2 is taken as the x2 axis, and A2 is the origin of coordinates. The first reference point is moved to A2, the reference line is moved to OA2, the vertical direction (OA 1) is still the reference direction, the A1B1 direction is still the measurement direction, the O point is the second reference point of the object to be measured, the second relative angle between the first reference line and the second reference line can be represented by θ1 (θ1 can be represented by a positive or negative value), and since the object to be measured does not rotate, the second reference line coincides with the reference direction, and therefore the angle between the first reference line and the reference direction can be represented by θ1. When the detection module and the second feature point P2 are at the second relative position, the rotation radius of the first reference point A2 is OA2, and the second relative displacement between the first reference point A2 and the rotation center O of the object to be detected along the second axis of the first reference line can be represented by OA2, that is, the second relative displacement can be represented by the second relative angle θ1 and the second relative displacement OA 2.

In the built-in coordinate system of the area camera, the second coordinates of the second feature point P2 in the built-in coordinate system of the area camera may be denoted as (c, d), and the distances between the second feature point P2 and the origin A2 of coordinates of the built-in coordinate system of the area camera along the coordinate axis directions x2 and y2 are c and d, respectively, in fig. 3, c is 0. Further, the distance A2P2 between P2 and the origin of coordinates A2 isThe angle between the A2P2 and y2 axis is denoted by A2 (A2 can represent direction by positive and negative values),In fig. 3, α2 is zero. Thus the relative displacement of the second feature may be determined by the distanceAnd (3) representing. It will be appreciated that the line camera of fig. 2 is similar to the scene where α2 is zero.

After the second reference relative displacement and the second feature relative displacement are obtained, a third position component can be obtained according to the second reference relative displacement, the second feature relative displacement, the first reference angle and the included angle to be measured, specifically, a third partial displacement of the second axial relative displacement in the first direction can be obtained according to the second axial relative displacement, the first reference angle and the second relative angle, a third relation representation of the second feature relative displacement in the first direction can be obtained according to the second feature relative displacement, the first reference angle, the second relative angle and the included angle to be measured, and a third position component can be obtained according to a vector sum represented by the third partial displacement and the third relation.

The step of obtaining a third partial displacement of the second axial relative displacement in the first direction according to the second axial relative displacement, the first reference angle and the second relative angle comprises: obtaining a vector sum of the second relative angle and the first reference angle to obtain a third projection angle; performing projection processing on the second axial relative displacement by using a third projection angle to obtain a third partial displacement; according to the second characteristic relative displacement, the first reference angle, the second relative angle and the included angle to be measured, the step of obtaining a third relation representation of the second characteristic relative displacement in the first direction comprises the following steps: obtaining a vector sum of a first reference angle, a second relative angle and an included angle to be measured, and obtaining a third projection angle expression; and obtaining the projection of the second characteristic relative displacement in the first direction by using a third projection angle expression to obtain a third relation expression.

Referring to fig. 2, the first reference angle may be denoted as β1, the second reference angle β2 may be (90 ° - β1), the first direction may be a direction along the measurement direction, and the second direction may be a direction perpendicular to the measurement direction. The second relative angle between the first reference line and the second reference line may correspond to an angle between the first reference line and the reference direction when the second reference line is kept stationary (the second reference line coincides with the reference direction), and the first reference angle is an angle between the reference direction and the first direction, and then the vector sum of the second relative angle and the first reference angle β1 may be expressed as (β1+θ1) as a third projection angle, that is, an angle between the first reference line and the first direction. The second axial relative displacement OA2 is along the first reference line direction, and thus the third partial displacement of the second axial relative displacement OA2 in the first direction may be denoted as OA2×cos (β1+θ1).

Similarly, the third partial displacement of the second axial relative displacement OA2 in the first direction in fig. 3 may also be denoted as OA2 x cos (β1+θ1).

Referring to fig. 2, the second feature relative displacement of the second feature point P2 in the built-in coordinate system of the device is A2P2, the second feature relative displacement A2P2 is along the coordinate axis direction of the built-in coordinate system of the device, the included angle between the coordinate axis direction and the first reference line OA2 is an included angle θ2 to be measured, the included angle between the first reference line OA2 and the reference direction is a second relative angle, and the first reference angle β1 is an included angle between the reference direction and the first direction, so that the included angle between the coordinate axis direction and the first direction is represented as a third projection, which may be represented as a vector sum of the included angle θ2 to be measured, the second relative angle and the first reference angle β1, specifically, as (θ2+β1+θ1), and the third relationship of the second feature relative displacement in the first direction may be represented as a2p2×cos (θ2+β1+θ1).

Similarly, referring to fig. 3, the second characteristic relative displacement is A2P2, the angle α2 between the A2P2 and the y1 axis, the third relationship between the second characteristic relative displacement A2P2 in the first direction is represented by A2P2 x cos (θ2+β1+α2+θ1), and the third relationship is represented by A2P2 x cos (θ2+β1+θ1) when α2 is zero.

The vector sum represented by the third partial displacement and the third relationship may be referred to as a third position component, and in the scenario of fig. 2, the third position component may be represented as OA2×cos (β1+θ1) +a2p2×cos (θ2+β1+θ1), and in the scenario of fig. 3, the third position component may be represented as OA2×cos (β1+θ1) +a2p2×cos (θ2+β1+α2+θ1).

After the second reference relative displacement and the second feature relative displacement are obtained, a fourth position component can be obtained according to the second reference relative displacement, the second feature relative displacement, the second reference angle and the included angle to be measured, specifically, a fourth partial displacement of the second axial relative displacement in the second direction can be obtained according to the second axial relative displacement, the second reference angle and the second relative angle, a fourth relation representation of the second feature relative displacement in the second direction can be obtained according to the second feature relative displacement, the second reference angle, the second relative angle and the included angle to be measured, and a fourth position component can be obtained according to a vector sum represented by the fourth partial displacement and the fourth relation representation.

The step of obtaining a fourth partial displacement of the second axial relative displacement in the second direction according to the second axial relative displacement, the second reference angle and the second relative angle comprises: obtaining a vector sum of a second relative angle and a second reference angle to obtain a fourth projection angle; performing projection processing on the second axial relative displacement by using a fourth projection angle to obtain a fourth partial displacement; according to the second characteristic relative displacement, the second reference angle, the second relative angle and the included angle to be measured, the step of obtaining a fourth relation representation of the second characteristic relative displacement in the second direction comprises the following steps: obtaining a vector sum of a second reference angle, a second relative angle and an included angle to be measured to obtain a fourth projection angle expression; and obtaining the projection of the second characteristic relative displacement in the second direction by using a fourth projection angle expression to obtain a fourth relation expression.

Similarly, referring to fig. 2, the vector sum of the second relative angle and the second reference angle β2 may be expressed as a fourth projection angle, that is, an angle between the first reference line and the second direction, denoted as (β2- θ1), and the second axial relative displacement OA2 is along the first reference line direction, so that the fourth partial displacement of the second axial relative displacement OA2 in the second direction may be expressed as OA2×cos (β2- θ1) or OA2×sin (θ1+β1).

Similarly, the fourth partial displacement of the second axial relative displacement OA2 in the second direction in fig. 3 may also be denoted as OA2 x sin (θ1+β1).

Referring to fig. 2, the included angle between the coordinate axis direction and the second direction may be represented as a fourth projection angle, may be represented as a vector sum of the included angle θ2 to be measured, the second relative angle and the second reference angle β2, specifically represented as (- θ2+β2- θ1), and the fourth relationship of the second characteristic relative displacement A2P2 in the second direction may be represented as a2p2×cos (- θ2+β2- θ1), and may also be represented as a2p2×sin (θ2+β1+θ1).

Similarly, referring to fig. 3, the second characteristic relative displacement is A2P2, the angle α2 between the A2P2 and the y1 axis, the fourth relationship between the second characteristic relative displacement A2P2 in the second direction is expressed as A2P2 x cos (- θ2+β2- θ1- α2), A2P2 x sin (θ2+β1+θ1+α2), and A2P2 x sin (θ2+β1+θ1).

The vector sum represented by the fourth partial displacement and the fourth relation may be referred to as a fourth position component, and in the scenario of fig. 2, the fourth position component may be represented as OA2 sin (θ1+β1) +a2p2+sin (θ2+β1+θ1), and in the scenario of fig. 3, the fourth position component may be represented as OA2 sin (θ1+β1) +a2p2+sin (θ2+β1+θ2).

S103, acquiring an included angle to be measured between the reference direction and the measurement direction according to the preset distance, the first position information and the second position information.

When the fixed error exists in the detection equipment, a certain included angle exists between the reference direction and the measurement direction of the detection equipment, the obtained first position information and the obtained second position information are inaccurate based on the detection characteristic and the detection direction of the detection equipment, the distance between the first characteristic point and the second characteristic point determined according to the first position information and the second position information is not equal to the preset distance any more, a certain distance error exists, and the calculated distance error is related to the fixed error of the detection equipment, so that the included angle between the reference direction and the measurement direction can be determined according to the first position information and the second position information and the preset distance between the first characteristic point and the second characteristic point.

Specifically, a relation equation between the first position information, the second position information, the included angle to be measured and the preset distance can be established, and the included angle to be measured is obtained according to the established relation equation. Wherein the relation equation comprises an unknown number and a known number, and the numerical value of the unknown number can be calculated.

The establishing of the relational equation may specifically be to obtain a first distance component of the first feature point and the second feature point along the first direction according to a first position component of the first feature point along the first direction and a third position component of the second feature point along the first direction, obtain a second distance component of the first feature point and the second feature point along the second direction according to a second position component of the first feature point along the second direction and a fourth position component of the second feature point along the second direction, and establish the relational equation by using the first distance component, the second distance component, the preset distance and an included angle between the first direction and the second direction.

Referring to fig. 2, the first position component may be denoted as OA1×cos β1+a1p1×cos (θ2+β1), the second position component may be denoted as OA1×sin β1+a1p1×sin (θ2+β1), the third position component may be denoted as OA2×cos (β1+θ1) +a2p2×cos (θ2+β1+θ1), the fourth position component may be denoted as OA2×sin (θ1+β1) +a2p2×sin (θ2+β1+θ1), the first distance component m may be a vector difference between the first position component and the third position component, may be denoted as OA1×cos β1-OA2×θ1) +a1p1×cos (θ2+β1), the second position component may be denoted as OA2×β1+θ1+θ2×sin, and the fourth position component may be denoted as a vector difference between the first position component and the third position component (θ1+β1×β1+θ1).

Let OA1 and OA2 be the same parameters r, β1 be zero, the first distance component m may be reduced to r-r cos (θ1) +A1P1 cos (θ2) -A2P2 cos (θ2+θ1), and the second distance component n may be reduced to-r sin (θ1) +A1P1 sin (θ2) -A2P2 sin (θ2+θ1).

Referring to fig. 3, the first position component may be denoted as OA1×cos β1+a1p1×cos (θ2+β1+α1), the second position component may be denoted as OA1×sin β1+a1p1×sin (θ2+β1+α1), the third position component may be denoted as OA2×cos (β1+θ1) +a2p2×cos (θ2+β1+α2+θ1), the fourth position component may be denoted as OA2×sin (θ1+β1) +a2p2×sin (θ2+β1+θ1+α2), the first distance component m may be a vector difference between the first position component and the third position component, the third position component may be denoted as OA1×cos β1-OA2×cos (β1+θ1) +a1p1×cos (θ1+θ2+β1) -a2p2+θ1×sin (θ2+β1+θ1+α2), and the fourth position component may be denoted as a vector difference between the OA2×1+β1+β1+θ2+α1+θ2.

Let OA1 and OA2 be the same parameters r, β1 be zero, the first distance component m may be reduced to r-r cos (θ1) +A1P1_cos (θ2+α1) -A2P2_cos (θ2+α2+θ1), and the second distance component n may be reduced to-r sin (θ1) +A1P1_sin (θ2+α2) -A2P2_sin (θ2+θ1+α2).

So far, the first distance component, the second distance component and the preset distance d0 form a triangle, the included angle between the first distance component and the second distance component is the included angle between the first direction and the second direction and is expressed as gamma, and then a relation equation, d0 ²＝m²+n² -2 mm x cos gamma, can be established according to the cosine theorem. Where θ1, γ, and d0 are known parameters, A1P1 and A2P2 can be obtained from the results of the first detection and the second detection, and r and θ2 can be solved simultaneously by plural sets of feature points.

When the first direction and the second direction are coordinate axis directions of the equipment reference frame and the equipment reference frame is a rectangular coordinate system, the first direction and the second direction are vertical, at the moment, gamma is 90 degrees, cos gamma is 0, and then a relation equation is established by using the first distance component, the second distance component, a preset distance and an included angle between the first direction and the second direction, and specifically, a relation equation is established by using the square sum of the first distance component and the second distance component and the preset distance. The established relational equation may be d0 ²＝m²+n², or

After establishing a relation equation between the first position information, the second position information, the included angle to be measured and the preset distance, the included angle to be measured can be obtained according to the relation equation. Specifically, an initial value can be set for the angle to be measured in the relation equation, the established relation equation is subjected to function fitting through the first position information, the second position information and the preset distance, and the initial value is optimized, so that the included angle to be measured is obtained. The method of function fitting may include least squares or linear regression, among others.

In order to improve the accuracy of the calculated included angle to be measured, the plurality of first feature points and the plurality of second feature points can be detected to obtain a plurality of first position information, a plurality of second position information and a plurality of preset distances, so that a plurality of relation equations are established, and function fitting is performed on the plurality of relation equations, so that the accurate included angle to be measured is obtained.

After the included angle to be measured between the reference direction and the measuring direction is obtained, when the detection equipment and the point to be measured have a third relative position, the detection equipment is used for carrying out third detection on the point to be measured, third position information of the point to be measured in the equipment reference system is obtained, and the third position information is adjusted based on the included angle to be measured between the reference direction and the measuring direction, so that fourth position information in the equipment reference system of the point to be measured is obtained.

Specifically, taking the linear array camera of fig. 2 as an example, the third position information of the to-be-measured point P3 in the device reference system may be obtained at the third position, where a third diagonal angle between the first reference line of the detection module and the second reference line of the to-be-measured object is θ3, and a distance between the to-be-measured point and the origin in the device built-in coordinate system is l _camera, the third position information may include a fifth position component along the first direction and a sixth position component along the second direction, so that the OA1 and the OA2 are the same parameters r, β1 is zero, the fifth position component may be r×cos (θ3) +l _camera ×cos (θ3), the sixth position component may be r×sin (θ3) +l _camera ×sin (θ3), and when the θ2 is obtained, the adjusted fifth position component may be r×cos (θ3) +θ _camera +θ3), and the sixth position component may be adjusted as the fifth position component (θ3+θ34).

Specifically, taking the line camera of fig. 3 as an example, the third position information of the point to be measured P3 in the device reference frame can be obtained at the third position, where a third diagonal angle between the first reference line of the detection module and the second reference line of the object to be measured is θ3, a distance between the point to be measured and the origin in the device built-in coordinate system is l _camera, an included angle between a line of the point to be measured, in the device built-in coordinate system, and the origin and a longitudinal axis of the device built-in coordinate system is α3, the third position information can include a fifth position component along the first direction and a sixth position component along the second direction, let OA1 and OA2 be the same parameter r, β1 be zero, the fifth position component may be r×cos (θ3) +l _camera ×cos (α3+θ3), the sixth position component may be r×sin (θ3) +l _camera ×sin (θ3+α3), and when θ2 is obtained, the third position information may be adjusted by θ2, the adjusted fifth position component may be r×cos (θ3) +l _camera ×cos (θ2+α3), the adjusted sixth position component may be r×sin (θ3) +l _camera ×sin (θ2+θ3+α3), and the adjusted fifth position component and the adjusted sixth position component may be used as the fourth position information.

In the above examples, the vertical direction in the drawing is taken as the reference direction, and in fact, the reference direction may be other directions, for example, may be a horizontal right direction, a vertical downward direction and a horizontal left direction in the drawing, and the manner of determining the included angle between the reference direction and the measurement direction may refer to the above examples, which are not further illustrated herein.

The embodiment of the application provides a detection method of detection equipment, the detection equipment is provided with a measurement direction, an equipment reference system determined according to the measurement direction and a reference direction corresponding to the measurement direction, the detection equipment comprises a detection module, an object to be detected comprises a first characteristic point and a second characteristic point, a preset distance is reserved between the first characteristic point and the second characteristic point, when the detection module and the first characteristic point have a first relative position, the detection equipment can be used for carrying out first detection on the first characteristic point to obtain first position information of the first characteristic point in the equipment reference system, a first distance vector is reserved between the detection module and the first characteristic point, when the detection module and the second characteristic point have a second relative position, the detection equipment can be used for carrying out second detection on the second characteristic point to obtain second position information of the second characteristic point in the equipment reference system, a second distance vector is reserved between the detection module and the second characteristic point, and the first distance vector and the second distance vector have a first preset difference in the reference direction, and the first preset difference is a non-zero value.

Based on the above calibration method, the embodiment of the present application further provides a detection device, referring to fig. 4, which is a block diagram of a structure of the detection device provided in the embodiment of the present application, the device may include a detection apparatus 110 and a processing module 120, where the detection apparatus 110 has a measurement direction, an apparatus reference system determined according to the measurement direction, and a reference direction corresponding to the measurement direction, the detection apparatus 110 includes a detection module, an object to be detected includes a first feature point and a second feature point, a preset distance is between the first feature point and the second feature point, and the processing module 120 includes: a detection unit 121 and an angle determination unit 122;

The detecting unit 121 is configured to perform, when the detecting module and the first feature point have a first relative position, first detection on the first feature point by using the detecting device, to obtain first position information of the first feature point in the device reference frame; a first distance vector is arranged between the detection module and the first characteristic point when the first relative position is set;

The included angle determining unit 122 is configured to obtain an included angle to be measured between the reference direction and the measurement direction according to the preset distance, the first position information, and the second position information.

And/or the number of the groups of groups,

Alternatively to this, the method may comprise,

Optionally, the included angle determining unit includes:

The relational equation establishing unit includes:

Optionally, the relational equation is: d0 ²＝m²+n², or

setting an initial value for the angle to be measured in the relation equation;

Optionally, the first feature point and the second feature point are plural.

The embodiment of the application provides a detection device, wherein the detection device is provided with a measurement direction, a device reference frame determined according to the measurement direction and a reference direction corresponding to the measurement direction, the detection device comprises a detection module, an object to be detected comprises a first characteristic point and a second characteristic point, a preset distance is reserved between the first characteristic point and the second characteristic point, when the detection module and the first characteristic point are provided with first relative positions, the detection device can be used for carrying out first detection on the first characteristic point to obtain first position information of the first characteristic point in the device reference frame, at the moment, a first distance vector is reserved between the detection module and the first characteristic point, when the detection module and the second characteristic point are provided with second relative positions, the detection device can be used for carrying out second detection on the second characteristic point to obtain second position information of the second characteristic point in the device reference frame, at the moment, a second distance vector is reserved between the detection module and the second characteristic point, the first distance vector and the second distance vector are provided with first preset differences in the reference direction, and the first preset differences are non-zero values.

The "first" in the names of the "first feature point", "first relative position", "first detection", etc. mentioned in the embodiments of the present application are only used for making name identifiers, and do not represent the first in sequence. The rule applies equally to "second" etc.

From the above description of embodiments, it will be apparent to those skilled in the art that all or part of the steps of the above described example methods may be implemented in software plus general hardware platforms. Based on such understanding, the technical solution of the present application may be embodied in the form of a software product, which may be stored in a storage medium, such as a read-only memory (ROM)/RAM, a magnetic disk, an optical disk, etc., and includes several instructions for causing a computer device (which may be a personal computer, a server, or a network communication device such as a router) to perform the method according to the embodiments or some parts of the embodiments of the present application.

In this specification, each embodiment is described in a progressive manner, and identical and similar parts of each embodiment are all referred to each other, and each embodiment mainly describes differences from other embodiments. In particular, for the apparatus embodiments, since they are substantially similar to the method embodiments, the description is relatively simple, and reference is made to the description of the method embodiments for relevant points. The above-described apparatus and system embodiments are merely illustrative, in which the modules illustrated as separate components may or may not be physically separate, and the components shown as modules may or may not be physical modules, i.e., may be located in one place, or may be distributed across multiple network elements. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of this embodiment. Those of ordinary skill in the art will understand and implement the present invention without undue burden.

The foregoing is merely a preferred embodiment of the present application and is not intended to limit the scope of the present application. It should be noted that modifications and adaptations to the present application may occur to one skilled in the art without departing from its scope.

Claims

1. A detection method of a detection device, wherein the detection device has a measurement direction, a device reference frame determined according to the measurement direction, and a reference direction corresponding to the measurement direction, the detection device includes a detection module, an object to be detected includes a first feature point and a second feature point, and a preset distance is provided between the first feature point and the second feature point, the method includes:

2. The method according to claim 1, wherein the measurement direction and the reference direction are both located in a measurement plane, and the preset distance is a distance between projections of the first feature point and the second feature point in the measurement plane; the equipment reference system comprises a first direction and a second direction in the measuring plane, wherein the first direction and the second direction are perpendicular or have an acute included angle, a first reference angle is formed between the first direction and the reference direction, and a second reference angle is formed between the second direction and the reference direction;

3. The method of claim 2, wherein the detection module has a first fiducial point and the test object has a second fiducial point, the second fiducial point being located in the device reference frame and having a fixed position in the device reference frame;

4. A method according to claim 3, wherein the detection apparatus further comprises moving means for relatively rotating the detection module and/or the test object about an axis of rotation, the axis of rotation being perpendicular to the measurement face; the detection module is further provided with a first datum line, the object to be detected is further provided with a second datum line, the first datum line and the second datum line are perpendicular to the rotating shaft, the first datum line rotates along with the detection module, the second datum line rotates along with the object to be detected, the datum direction is perpendicular to the rotating shaft, and the second datum point comprises a rotating center of the object to be detected; at a reference position, the first reference line, the second reference line, and the first reference direction coincide;

And/or the number of the groups of groups,

5. The method of claim 4, wherein at least one of the first relative angle and the second relative angle is zero.

6. The method of claim 4, wherein the step of determining the position of the first electrode is performed,

The step of obtaining the first position component according to the first reference relative displacement, the first characteristic relative displacement, the first reference angle and the included angle to be measured includes:

7. The method of claim 6, wherein the step of obtaining a first partial displacement of the first axial relative displacement in the first direction based on the first axial relative displacement, the first reference angle, and the first relative angle comprises: obtaining a vector sum of the first relative angle and the first reference angle to obtain a first projection angle; carrying out projection processing on the first axial relative displacement by using the first projection angle to obtain the first partial displacement;

8. The method of claim 4, wherein the detection module has a built-in coordinate system that rotates as the detection module rotates, the first reference point being an origin of the built-in coordinate system of the detection device; the first characteristic relative displacement is determined according to a first coordinate of the first characteristic point in the built-in coordinate system of the equipment, and the second characteristic relative displacement is determined according to a second coordinate of the second characteristic point in the built-in coordinate system of the equipment.

9. The method of claim 8, wherein the detection device is a line camera, and the coordinate axes of the built-in coordinate system of the device are along the array extension direction of the line camera; or the detection equipment is an area array camera, and two coordinate axes of the built-in coordinate system of the equipment are respectively along two extending directions of the array of the area array camera.

10. The method according to any one of claims 4-9, wherein the obtaining the included angle to be measured between the reference direction and the measurement direction according to the preset distance, the first position information, and the second position information includes:

acquiring the included angle to be measured according to the relation equation;

11. The method of claim 10, wherein the first direction and the second direction are coordinate axis directions of the device reference frame, and the device reference frame is a rectangular coordinate system, and wherein the establishing a relational equation using the first distance component, the second distance component, the predetermined distance, and the included angle between the first direction and the second direction comprises:

12. The method of claim 11, wherein the relational equation is: d0 ²＝m²+n², or

When the first relative angle is 0 °, the first axial relative displacement is denoted as OA1, the first reference angle is denoted as β1, the second axial relative displacement is denoted as OA2, the second relative angle is denoted as θ1, the first characteristic relative displacement is denoted as A1P1, an included angle between a line where A1P1 is located and a first coordinate axis of the built-in coordinate system of the device is denoted as α1, the included angle to be measured is denoted as θ2, the second characteristic relative displacement is denoted as A2P2, and an included angle between a line where A2P2 is located and the first coordinate axis of the built-in coordinate system of the device is denoted as α2, where m and n may be expressed as:

13. the method of claim 10, wherein obtaining the included angle to be measured according to the relational equation comprises:

setting an initial value for the angle to be measured in the relation equation;

14. The method of claim 13, wherein the method of function fitting comprises least squares or linear regression.

15. The method according to any one of claims 1-9, further comprising:

and adjusting the third position information based on the included angle to be measured between the reference direction and the measurement direction to obtain fourth position information of the third characteristic point in the equipment reference system.

16. The method according to any one of claims 1-9, wherein the first feature point and the second feature point are a plurality.

17. The method according to any one of claims 1-9, wherein the first feature point and the second feature point are a center point of a circular hole, a vertex of a cone, or a center of a sphere.

18. The method according to any one of claims 1-9, wherein the first feature point and the second feature point are the same point; or the projection positions of the first feature point and the second feature point in the reference direction are different.

19. The utility model provides a detection device, its characterized in that includes detection equipment and processing module, detection equipment has measuring direction, according to the equipment reference system of measuring direction determination and with the direction of reference that measuring corresponds, detection equipment includes detection module, and the thing that awaits measuring includes first feature point and second feature point, first feature point with have the preset distance between the second feature point, processing module includes: the device comprises a detection unit and an included angle determination unit;

20. The apparatus of claim 19, wherein the measurement direction and the reference direction are both located in a measurement plane, and the preset distance is a distance between projections of the first feature point and the second feature point in the measurement plane; the equipment reference system comprises a first direction and a second direction in the measuring plane, wherein the first direction and the second direction are perpendicular or have an acute included angle, a first reference angle is formed between the first direction and the reference direction, and a second reference angle is formed between the second direction and the reference direction;

21. The apparatus of claim 20, wherein the detection module has a first fiducial point, the test object has a second fiducial point, the second fiducial point is located in the device reference frame and has a fixed position in the device reference frame;

22. The apparatus according to claim 21, wherein the detection device further comprises a moving means for relatively rotating the detection module and/or the object to be detected about a rotation axis, the rotation axis being perpendicular to the measurement face; the detection module is further provided with a first datum line, the object to be detected is further provided with a second datum line, the first datum line and the second datum line are perpendicular to the rotating shaft, the first datum line rotates along with the detection module, the second datum line rotates along with the object to be detected, the datum direction is perpendicular to the rotating shaft, and the second datum point comprises a rotating center of the object to be detected; at a reference position, the first reference line, the second reference line, and the first reference direction coincide;

And/or the number of the groups of groups,

23. The apparatus of claim 22, wherein at least one of the first relative angle and the second relative angle is zero.

24. The apparatus of claim 22, wherein the detection module has a device-built-in coordinate system that rotates as the detection module rotates, the first reference point being an origin of the device-built-in coordinate system of the detection device; the first characteristic relative displacement is determined according to a first coordinate of the first characteristic point in the built-in coordinate system of the equipment, and the second characteristic relative displacement is determined according to a second coordinate of the second characteristic point in the built-in coordinate system of the equipment.

25. The apparatus of claim 22, wherein the device comprises a plurality of sensors,

The detection unit obtains fourth partial displacement of the second characteristic relative displacement in the second direction according to the second axial relative displacement, the second reference angle and the second relative angle;

26. The apparatus according to any one of claims 20-25, wherein the angle determination unit comprises:

an included angle determining subunit, configured to obtain the included angle to be measured according to the relational equation; the relational equation establishing unit includes:

27. The apparatus of claim 26, wherein the first direction and the second direction are coordinate axis directions of the device reference system, the device reference system is a rectangular coordinate system, and the relational equation building subunit is specifically configured to:

28. The apparatus of claim 26, wherein the included angle determination subunit is specifically configured to:

setting an initial value for the angle to be measured in the relation equation;

29. The apparatus according to any one of claims 19-25, wherein the detection unit is further configured to: when the detection equipment and the point to be detected have a third relative position, the detection equipment is utilized to carry out third detection on the point to be detected, and third position information of the point to be detected in the equipment reference frame is obtained;

the processing unit further comprises an information adjusting unit; the information adjustment unit is used for adjusting the third position information based on the included angle to be measured between the reference direction and the measurement direction to obtain fourth position information of the third characteristic point in the equipment reference system.