CN112082477A - Universal tool microscope three-dimensional measuring device and method based on structured light - Google Patents
Universal tool microscope three-dimensional measuring device and method based on structured light Download PDFInfo
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- CN112082477A CN112082477A CN202010902612.5A CN202010902612A CN112082477A CN 112082477 A CN112082477 A CN 112082477A CN 202010902612 A CN202010902612 A CN 202010902612A CN 112082477 A CN112082477 A CN 112082477A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
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Abstract
The invention discloses a three-dimensional measuring device of a universal tool microscope based on structured light, which comprises a universal tool microscope body, an image acquisition device, a structured light projection device, a synchronous driving device and a computer control and processing device, wherein the structured light projection device projects the structured light to a calibration surface and a measured workpiece surface, the structured light projection device and the image acquisition device synchronously move in the Z direction through the synchronous driving device, and the computer control and processing device controls the image acquisition device to acquire calibration and a series of measured workpiece images and process the acquired images through a preset algorithm so as to realize three-dimensional non-contact measurement; the universal tool microscope is simply transformed based on the structured light measurement principle by combining the digital photogrammetry and the image processing technology, the application range of the original universal tool microscope is expanded, the non-contact measurement of three-dimensional geometric dimension information can be realized, and information such as Z-axis direction shape error and surface defect can be detected.
Description
Technical Field
The invention relates to the field of photogrammetry, in particular to a three-dimensional measuring device and method of a universal tool microscope based on structured light.
Background
The universal tool microscope is a high-efficiency measuring optical instrument adopting grating subdivision and digitization technology, is simple and convenient to operate, intuitive in reading, high in accuracy and stable in performance, and is widely applied to measurement and detection work (see the basic principle and the measuring method [ J ] value engineering of the universal tool microscope in Viviae, Muyajuan, 2018,37(17): 239-.
The X-axis and Y-axis dimensions of the workpiece to be measured can be conveniently measured by using the universal tool microscope, but the Z-axis dimension cannot be measured. However, the current research on the modification of the universal tool microscope is still relatively deficient. In order to solve the problem, a dial indicator is used for replacing a main microscope and a main microscope body to be fixedly connected to carry out contact measurement on a measured workpiece, but the method cannot simultaneously carry out three-dimensional measurement, the main microscope needs to be replaced in the measurement process, the operation process is complicated, the contact measurement range is limited, a measuring head is frequently worn, and the measurement precision is low.
Therefore, the universal tool microscope is modified based on the structured light measurement principle, so that the non-contact measurement of the geometric dimension in the Z-axis direction and the detection of information such as shape errors, surface defects and the like can be performed on the basis of keeping the original non-contact measurement of the geometric dimensions of the X-axis and the Y-axis.
Disclosure of Invention
The invention aims to provide a three-dimensional measuring device and a three-dimensional measuring method of a universal tool microscope based on structured light, aiming at the defects of the prior art. The universal tool microscope is modified based on structured light by combining digital photogrammetry and image processing technologies, so that non-contact three-dimensional measurement and Z-axis direction shape error and surface defect detection can be performed simply and conveniently, and the method is simple to implement and convenient to modify.
The technical scheme adopted by the invention is as follows: a universal tool microscope three-dimensional measuring device based on structured light comprises a universal tool microscope body, wherein the universal tool microscope body comprises a base, a workbench, longitudinal and transverse guide rails, an aiming microscope system and an illuminating system; the sighting microscope system comprises an optical lens imaging system and a grating reading system; the measuring device also comprises an image acquisition device, a structured light projection device, a synchronous driving device and a computer control and processing device, wherein:
the image acquisition device reserves an optical lens imaging system and a grating reading system in a universal tool microscope aiming microscope system, and adopts a CCD camera to replace an original eyepiece to acquire calibration images and image information of a workpiece to be detected;
the structured light projection device comprises a fiber laser and a conical refractor, a host LED (light emitting diode) lighting source in the universal tool microscope lighting system is transformed into the structured light projection device, the original structure which synchronously moves in the direction X, Y with an eyepiece of a sighting microscope system is reserved, a laser beam emitted by the fiber laser in the structured light projection device is refracted by the conical refractor to form conical structured light to be projected to a blank light-transmitting flat plate, the structured light is projected to the surface of a workpiece to be measured after a corresponding halo image is calibrated, and the image is acquired by an image acquisition device;
the synchronous driving device comprises a displacement sensor, a single chip microcomputer, a driver, a stepping motor and a secondary gear, wherein the displacement sensor is fixed on a Z-axis lifting arm to detect the moving distance of a CCD camera of the image acquisition device in the Z direction, and the pulse generator signal in the driver is sent to drive the stepping motor through the single chip microcomputer so as to drive the secondary gear to enable the structured light projection device and the CCD camera of the image acquisition device to synchronously move in the Z direction;
and the computer control and processing device is used for controlling the image acquisition device to acquire images of the calibrated and detected workpiece and processing the acquired images through a preset algorithm.
A structured light-based universal tool microscope three-dimensional measurement method comprises the following steps:
step 1, using the transformed universal tool microscope for the first time, obtaining the internal and external parameters of the camera and the conical structured light parameters by calibration, and then using the universal tool microscope without calibration again on the premise of ensuring that the relative positions of the image acquisition device and the structured light projection device are not changed;
providing a blank light-transmitting flat plate and a CCD camera only used for calibration;
calibrating the included angle between the CCD camera and the CCD camera optical axis of the image acquisition device to be less than 90 degrees;
1) calibration of internal and external parameters of camera
The computer control and processing device controls a CCD camera and a calibration CCD camera of the image acquisition device to shoot a calibration plate plane with uniform marking points;
processing the acquired image by using a Zhangyingyou plane template calibration method, calibrating a CCD camera of the image acquisition device and calibrating internal and external parameters of the CCD camera, and unifying external parameters of the two cameras under the same world coordinate system;
2) calibration of conical structured light
Controlling the structured light projection device to project conical structured light to the blank light-transmitting flat plate, and moving the Z-axis lifting arm to focus the projected structured light on the blank light-transmitting flat plate;
the computer control and processing device controls the image acquisition device and the calibration CCD camera to acquire a corresponding halo calibration image of the structured light projected to the blank light-transmitting flat plate;
detecting the inner edge of the halo calibration image and fitting the inner edge of the halo into an elliptical halo image;
constructing an oblique elliptic cone expression by the fitted elliptic light ring and the light center of a CCD camera of the image acquisition device;
any point on the fitted elliptical halo forms an imaging straight line expression with the optical center of the calibrated CCD camera;
the surface equation of the oblique elliptic cone and the imaging linear equation are jointly solved to obtain the three-dimensional coordinates of a point on the smooth surface of the conical structure to be calibrated;
a series of corresponding three-dimensional coordinates can be obtained by selecting points on a series of elliptical light rings, but the points are coplanar and cannot realize fitting of a conical surface, so that the position and the posture of a blank light-transmitting flat plate need to be changed randomly to obtain a non-coplanar light ring calibration image, and generally 6 different positions and postures need to be shot;
and performing least square fitting on the fitted elliptic light ring center to determine the axis of the conical surface of the structured light, obtaining the surface equation of the conical structured light, reconstructing the conical surface of the structured light, and finishing the calibration of the conical structured light.
firstly, controlling a structured light projection device to project calibrated structured light to an inner hole of a workpiece to be measured, driving a CCD (charge coupled device) camera of the structured light projection device and an image acquisition device to synchronously move in a Z direction to complete scanning of the inner hole of the workpiece to be measured by a synchronous driving device, and acquiring a series of corresponding halo images of the structured light projected to the inner hole of the workpiece to be measured by the image acquisition device;
and transferring a series of corresponding halo images to a computer control and processing device, fitting the halo images captured by the image acquisition device, substituting the halo images into a conical structured light surface equation to obtain the three-dimensional coordinates of the scanning points in a world coordinate system, and obtaining the three-dimensional geometric dimension, the shape error and the surface defect information of the inner hole of the workpiece to be measured.
The invention has the advantages and positive effects that:
the universal tool microscope is simply transformed based on the structured light measurement principle by combining the digital photogrammetry and the image processing technology, the application range of the original universal tool microscope is expanded, the Z-axis dimension information is rapidly and accurately obtained on the basis of obtaining X, Y-axis dimension information, the non-contact measurement of three-dimensional geometric dimension information is realized, the information such as Z-axis direction shape error and surface defect can be detected, the original accuracy is kept while the efficiency is improved, the transformation structure is simple, the cost is low, the processing and manufacturing are easy, the operation is convenient, the detection result is visual and reliable, the requirement of automatic measurement is met, and the method has wide application prospect in the measurement field.
Drawings
FIG. 1 is a schematic diagram of a three-dimensional measurement device of a universal tool microscope based on structured light according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of system calibration provided by an embodiment of the present invention;
FIG. 3 is a schematic diagram of a halo calibration image according to an embodiment of the present invention;
fig. 4 is a light diagram of a conical structure provided by an embodiment of the present invention.
Wherein: the universal tool display mirror comprises a universal tool display mirror body 1, an image acquisition device 2, a structured light projection device 3, a synchronous driving device 4, a computer control and processing device 5, a CCD camera 6, a calibration plate plane 7, a light-transmitting flat plate 8, a base 11, a workbench 12, a transverse guide rail 13, a longitudinal guide rail 14, a CCD camera 21, a fiber laser 31, a conical refractor 32 and a displacement sensor 41.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1, the three-dimensional measuring device of the universal tool microscope based on structured light comprises a universal tool display body 1, an image acquisition device 2, a structured light projection device 3, a synchronous driving device 4 and a computer control and processing device 5.
The universal tool microscope body 1 mainly comprises a base 11, a workbench 12, a transverse guide rail 13, a longitudinal guide rail 14, an aiming microscope system, a grating reading system, an illuminating system and other accessories;
the image acquisition device 2 reserves an optical lens imaging system and a grating reading system in the universal tool microscope aiming microscope system, and adopts a CCD camera 21 to replace the original ocular lens to acquire calibration images and image information of the workpiece to be detected;
the structured light projection device 3 comprises a fiber laser 31 and a conical refractor 32, wherein laser beams emitted by the fiber laser 31 are refracted by the conical refractor 32 to form conical structured light, the conical structured light is projected to the blank light-transmitting flat plate 8 and the surface of a workpiece to be measured, and a calibration and image of the workpiece to be measured are obtained by an image acquisition device;
the synchronous driving device 4 comprises a displacement sensor 41, a single chip microcomputer, a driver, a stepping motor and a secondary gear, wherein the displacement sensor 41 is fixed on a Z-axis lifting arm to detect the moving distance of a CCD camera of the image acquisition device in the Z direction, and the pulse generator signal in the driver is supplied to drive the stepping motor through the single chip microcomputer so as to drive the secondary gear to enable the structured light projection device and the CCD camera of the image acquisition device to synchronously move in the Z direction;
and the computer control and processing device 5 is used for controlling the image acquisition device 2 to acquire images of the calibrated and detected workpiece and processing the acquired images through a preset algorithm.
The universal tool microscope used for the first time needs to be calibrated to obtain the internal and external parameters of the camera and the conical structured light parameters, as shown in fig. 2, and then is used without being calibrated again on the premise of ensuring that the relative positions of the image acquisition device 2 and the structured light projection device 3 are unchanged.
Firstly, calibrating internal and external parameters of the camera. Another CCD camera 6 for calibration is fixed, whose optical axis makes an angle of less than 90 ° with the optical axis of the CCD camera 21 of the image acquisition device 2. The computer control and processing device 5 controls the CCD camera 21 of the image acquisition device 2 and the calibration CCD camera 6 to shoot a calibration plate plane 7 with uniform marking points at the same time, processes the acquired image by using a Zhang Yongyou plane template calibration method, calibrates the internal and external parameters of the CCD camera 21 and the calibration CCD camera 6 of the image acquisition device 2, and unifies the external parameters of the two cameras into the same world coordinate system.
Secondly, calibration of the conical structured light is performed. Controlling the structured light projection device 3 to project conical structured light to the blank light-transmitting flat plate 8, moving the Z-axis lifting arm to focus the projected structured light on the blank light-transmitting flat plate 8, and intersecting the light-transmitting flat plate 8 and the projected structured light in any direction and position (generally 6 different poses), wherein the intersecting line (light ring) is a space ellipse EiThe expression is:
in the formula,. DELTA.x、Δy、ΔzIs the offset of the structured light conical surface in three axial directions, alpha is the cone apex angle of the structured light conical surface,
gamma is the pitch angle and the yaw angle of the conical surface of the structured light, and x, y and z are world coordinates, and the camera coordinates of the CCD camera 21 of the calibration image acquisition device 2 are selected as the world coordinates.
The computer control and processing device 5 controls the image acquisition device 2 and the calibration CCD camera 6 to acquire non-coplanar corresponding halo calibration images of the structured light projected to the blank light-transmitting flat plate 8, namely the elliptical halo EiCaptured by both cameras simultaneously. The corresponding halo calibration image is shown in fig. 3, and it can be known from geometric projection that the images captured by the two cameras are also elliptical, so that the inner edge of the halo calibration image is fitted to an elliptical halo, and the halo calibration image captured by the image acquisition device 2 is fitted to an elliptical halo of ei1The ellipse halo of the halo calibration image fitting captured by the calibration CCD camera 6 is ei2The expression is:
focal length f of CCD camera 21 of image acquisition device 2 known after camera parameter calibration1Then ei1The expression under the world coordinate system is:
space ellipse halo EiAnd the optical center of the CCD camera 21 of the image acquisition device constructs an oblique elliptic cone AiFitting space ellipse halo EiAny point on the optical axis of the calibrated CCD camera 6 forms an imaging light LpAs shown in fig. 4. Oblique elliptic cone AiThe expression of (a) is:
imaging light LpThe expression of (a) is:
where (R T) is the coordinate transformation between the calibration camera and the inspection camera.
Performing least square fitting on the centers of the elliptic aureoles which are obtained under different poses and then fitted to determine the axes of the conical surfaces of the structured light, namely two parameters in the formula (1)
And gamma. Then searching the remaining four parameters (delta) by a least square methodx，Δy，Δzα) optimum value:
wherein d isikIs the distance from point to axis, rikIs the radius of the corresponding cross section.
Oblique elliptic cone AiEquation (4) and imaging ray LpThe joint solution of equation (5) can determine the solution conic surface points. A group of surface points construct a space ellipse, different groups of surface points are generated by moving the blank light-transmitting flat plate 8, different space ellipses are obtained, and then a structured light conical surface can be reconstructed, so that calibration of conical structured light is completed.
And obtaining the three-dimensional geometric dimension, shape error and surface defect information of the inner hole of the workpiece to be measured after calibration is completed.
Firstly, fixing a workpiece to be detected on a workbench 12, and controlling a structured light projection device 3 to project calibrated structured light to an inner hole of the workpiece to be detected;
then, the synchronous driving device 4 drives the structured light projecting device 3 and the CCD camera 21 of the image acquisition device 2 to synchronously move in the Z direction to complete the scanning of the inner hole of the workpiece to be measured, and the computer control and processing device 5 controls the image acquisition device 2 to acquire a series of corresponding halo images projected by the structured light to the inner hole of the workpiece to be measured;
and finally, transmitting a series of corresponding halo images to a computer control and processing device 5, fitting the halo images captured by the image acquisition device 2, substituting the halo images into the previously calibrated conical structured light surface equation to obtain the three-dimensional coordinates of the scanning points in the world coordinate system, obtaining the three-dimensional point cloud data of the inner hole of the workpiece to be measured, and further obtaining the geometric dimension, the shape error and the surface defect information in the Z-axis direction.
Claims (2)
1. A universal tool microscope three-dimensional measuring device based on structured light comprises a universal tool microscope body, wherein the universal tool microscope body comprises a base, a workbench, longitudinal and transverse guide rails, an aiming microscope system and an illuminating system; the sighting microscope system comprises an optical lens imaging system and a grating reading system; the method is characterized in that: the measuring device also comprises an image acquisition device, a structured light projection device, a synchronous driving device and a computer control and processing device, wherein:
the image acquisition device reserves an optical lens imaging system and a grating reading system in a universal tool microscope aiming microscope system, and adopts a CCD camera to replace an original eyepiece to acquire calibration images and image information of a workpiece to be detected;
the structured light projection device comprises a fiber laser and a conical refractor, a host LED (light emitting diode) lighting source in the universal tool microscope lighting system is transformed into the structured light projection device, the original structure which synchronously moves in the direction X, Y with an eyepiece of a sighting microscope system is reserved, a laser beam emitted by the fiber laser in the structured light projection device is refracted by the conical refractor to form conical structured light to be projected to a blank light-transmitting flat plate, the structured light is projected to the surface of a workpiece to be measured after a corresponding halo image is calibrated, and the image is acquired by an image acquisition device;
the synchronous driving device comprises a displacement sensor, a single chip microcomputer, a driver, a stepping motor and a secondary gear, wherein the displacement sensor is fixed on a Z-axis lifting arm to detect the moving distance of a CCD camera of the image acquisition device in the Z direction, and the pulse generator signal in the driver is sent to drive the stepping motor through the single chip microcomputer so as to drive the secondary gear to enable the structured light projection device and the CCD camera of the image acquisition device to synchronously move in the Z direction;
and the computer control and processing device is used for controlling the image acquisition device to acquire images of the calibrated and detected workpiece and processing the acquired images through a preset algorithm.
2. A three-dimensional measurement method of a universal tool microscope based on structured light is characterized in that: the method comprises the following steps:
step 1, using the transformed universal tool microscope for the first time, obtaining the internal and external parameters of the camera and the conical structured light parameters by calibration, and then using the universal tool microscope without calibration again on the premise of ensuring that the relative positions of the image acquisition device and the structured light projection device are not changed;
providing a blank light-transmitting flat plate and a CCD camera only used for calibration;
calibrating the included angle between the CCD camera and the CCD camera optical axis of the image acquisition device to be less than 90 degrees;
1) calibration of internal and external parameters of camera
The computer control and processing device controls a CCD camera and a calibration CCD camera of the image acquisition device to shoot a calibration plate plane with uniform marking points;
processing the acquired image by using a Zhangyingyou plane template calibration method, calibrating a CCD camera of the image acquisition device and calibrating internal and external parameters of the CCD camera, and unifying external parameters of the two cameras under the same world coordinate system;
2) calibration of conical structured light
Controlling the structured light projection device to project conical structured light to the blank light-transmitting flat plate, and moving the Z-axis lifting arm to focus the projected structured light on the blank light-transmitting flat plate;
the computer control and processing device controls the image acquisition device and the calibration CCD camera to acquire a corresponding halo calibration image of the structured light projected to the blank light-transmitting flat plate;
detecting the inner edge of the halo calibration image and fitting the inner edge of the halo into an elliptical halo image;
constructing an oblique elliptic cone expression by the fitted elliptic light ring and the light center of a CCD camera of the image acquisition device;
any point on the fitted elliptical halo forms an imaging straight line expression with the optical center of the calibrated CCD camera;
the surface equation of the oblique elliptic cone and the imaging linear equation are jointly solved to obtain the three-dimensional coordinates of a point on the smooth surface of the conical structure to be calibrated;
a series of corresponding three-dimensional coordinates can be obtained by selecting points on a series of elliptical light rings, but the points are coplanar and cannot realize fitting of a conical surface, so that the position and the posture of a blank light-transmitting flat plate need to be changed randomly to obtain a non-coplanar light ring calibration image, and generally 6 different positions and postures need to be shot;
performing least square fitting on the fitted elliptic light ring center to determine the axis of the conical surface of the structured light, obtaining the surface equation of the conical structured light, reconstructing the conical surface of the structured light, and completing calibration of the conical structured light;
step 2, obtaining three-dimensional geometric dimension information of an inner hole of the workpiece to be measured:
firstly, controlling a structured light projection device to project calibrated structured light to an inner hole of a workpiece to be measured, driving a CCD (charge coupled device) camera of the structured light projection device and an image acquisition device to synchronously move in a Z direction to complete scanning of the inner hole of the workpiece to be measured by a synchronous driving device, and acquiring a series of corresponding halo images of the structured light projected to the inner hole of the workpiece to be measured by the image acquisition device;
and transferring a series of corresponding halo images to a computer control and processing device, fitting the halo images captured by the image acquisition device, substituting the halo images into a conical structured light surface equation to obtain the three-dimensional coordinates of the scanning points in a world coordinate system, and obtaining the three-dimensional geometric dimension, the shape error and the surface defect information of the inner hole of the workpiece to be measured.
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