CN111941201B - High-precision manufacturing device for Fabry-Perot interferometer mirror plate - Google Patents
High-precision manufacturing device for Fabry-Perot interferometer mirror plate Download PDFInfo
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- CN111941201B CN111941201B CN202010848454.XA CN202010848454A CN111941201B CN 111941201 B CN111941201 B CN 111941201B CN 202010848454 A CN202010848454 A CN 202010848454A CN 111941201 B CN111941201 B CN 111941201B
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- glass mirror
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 23
- 238000005498 polishing Methods 0.000 claims abstract description 144
- 239000011521 glass Substances 0.000 claims abstract description 59
- 238000011084 recovery Methods 0.000 claims abstract description 21
- 238000003756 stirring Methods 0.000 claims abstract description 10
- 239000007788 liquid Substances 0.000 claims description 47
- 238000005507 spraying Methods 0.000 claims description 21
- 230000005540 biological transmission Effects 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 239000006052 feed supplement Substances 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 claims 2
- 230000007423 decrease Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000003825 pressing Methods 0.000 claims 1
- 239000010985 leather Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000007599 discharging Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 230000001502 supplementing effect Effects 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/0031—Machines having several working posts; Feeding and manipulating devices
- B24B13/0037—Machines having several working posts; Feeding and manipulating devices the lenses being worked by different tools, e.g. for rough-grinding, fine-grinding, polishing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/005—Blocking means, chucks or the like; Alignment devices
- B24B13/0052—Lens block moulding devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
- B24B21/004—Machines or devices using grinding or polishing belts; Accessories therefor using abrasive rolled strips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
- B24B9/14—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of optical work, e.g. lenses, prisms
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The invention discloses a high-precision manufacturing device for a Fabry-Perot interferometer mirror plate, which comprises a machine body, a recovery groove, a centering table and a clamping seat, wherein the recovery groove is fixed on one side of the machine body; stirring blades are distributed on the outer surface of the shaft body positioned in the recovery tank, and the rotation of the shaft body is driven by a rotating motor fixed at the bottom of the recovery tank; a belt body polishing component is arranged above the clamping seat, the belt body polishing component can polish the glass mirror plate in a way of retracting and releasing a polishing belt, and the width of the polishing belt is smaller than the diameter of the glass mirror plate; an auxiliary polishing component is arranged on the machine body and can assist in polishing the edge part of the glass mirror plate in a rotary polishing mode.
Description
Technical Field
The invention relates to the technical field of interferometer mirror plate processing, in particular to a high-precision manufacturing device for a Fabry-Perot interferometer mirror plate.
Background
The Fabry-Perot interferometer is a common interferometer, has a simple structure and mainly comprises two parallel glass plates, wherein the opposite inner surfaces of the two glass plates have high reflectivity, a high-reflectivity film layer with high flatness is usually adhered to the inner surfaces of the two glass plates in order to ensure the high reflectivity of the opposite inner surfaces of the two glass plates, and in order to improve the flatness of the film layer, the glass plates are required to be polished with high precision firstly to ensure that the surfaces of the glass plates are smooth and flat when being manufactured, however, the conventional polishing equipment usually adopts polishing leather to polish the glass plates comprehensively, wastes material and increases the manufacturing cost.
Therefore, it is necessary to provide a high precision manufacturing apparatus for a fabry-perot interferometer mirror plate to solve the above problems in the background art.
Disclosure of Invention
In order to achieve the purpose, the invention provides the following technical scheme: a high-precision manufacturing device for a Fabry-Perot interferometer mirror plate comprises a machine body, a recovery groove, a centering table and a clamping seat, wherein the recovery groove is fixed on one side of the machine body, the centering table which is horizontally placed is fixed in the recovery groove, a shaft body is rotatably arranged in the centering table, and the clamping seat capable of clamping a glass mirror plate is fixed at the top of the shaft body;
stirring blades are distributed on the outer surface of the shaft body positioned in the recovery tank, and the rotation of the shaft body is driven by a rotating motor fixed at the bottom of the recovery tank;
a belt body polishing component is arranged above the clamping seat, the belt body polishing component can polish the glass mirror plate in a way of retracting and releasing a polishing belt, and the width of the polishing belt is smaller than the diameter of the glass mirror plate;
an auxiliary polishing component is arranged on the machine body and can assist in polishing the edge part of the glass mirror plate in a rotary polishing mode.
Further, as preferred, adopt the body to communicate with the feed liquor end of circulating pump in the accumulator, the play liquid end of circulating pump adopts another body and a collecting tank to be linked together, the collecting tank can be for the polishing of glass mirror plate to continuously provide the polishing solution, just, the top of collecting tank is equipped with the feed supplement mouth for regularly supply new polishing solution.
Further, as preferred, area body polishing subassembly includes mount pad, installation arm, drive roller one and drive roller two, wherein, drive roller one rotates and sets up on the installation arm, drive roller one can provide the polishing belt, the polishing belt is collected by drive roller two after being supported by two sets of backing rollers.
Preferably, the two groups of supporting rollers are rotatably arranged below the mounting rods, one mounting rod is fixed below the adjusting seat, the other mounting rod is arranged in a limiting sliding chute formed in the adjusting seat in a sliding manner by adopting a sliding seat, and the sliding action of the sliding seat is controlled by a telescopic rod fixed in the adjusting seat, so that the distance between the two groups of supporting rollers is adjusted;
the distance between the two sets of support rollers is the same as the diameter of the glass mirror plate.
Further, preferably, the polishing device further comprises a connecting arm and two sets of liquid discharging rollers, wherein the two sets of liquid discharging rollers are symmetrically and rotatably arranged on two sides of the mounting seat and used for discharging polishing liquid attached to the polishing belt in a squeezing mode while supporting and adjusting the polishing belt;
the connecting arm is fixedly connected with the mounting arm, and the other end of the connecting arm is connected to the output end of the linear pressurizing device and used for adjusting the polishing pressure between the polishing belt and the glass mirror plate.
Further, as preferred, the auxiliary polishing assembly comprises a [ type seat, a rotary polishing assembly and a pressure adjusting assembly, wherein the [ type seat is fixed on the machine body, a mounting plate is fixed on one side of the [ type seat, a base shaft is rotatably arranged in the mounting plate, the base shaft is driven to rotate by a polishing motor fixed on the top of the [ type seat through a belt wheel assembly, the base shaft is of a cavity structure, an adjusting shaft is slidably and non-rotatably arranged in the cavity, a polishing seat is coaxially fixed at the other end of the adjusting shaft, and a polishing leather is arranged on the polishing seat.
Further, preferably, the pressure adjusting assembly comprises a guide rod, a lead screw, an adjusting motor, a guide sleeve and a follower plate, wherein the guide rod and the lead screw are arranged in parallel and are both rotatably arranged between the [ type seat and the machine body, the lead screw is driven by the adjusting motor fixed below the [ type seat through another belt pulley assembly to rotate, the lead screw is in transmission connection with a nut seat, the nut seat is fixedly connected with the guide sleeve, the guide sleeve is slidably sleeved outside the guide rod, and the guide sleeve is connected with the adjusting shaft through a bearing through the follower plate, so that the polishing pressure of the polishing seat on the glass mirror plate is adjusted through the up-down displacement of the guide sleeve.
Further, preferably, a half-pack bin is further fixed below the follow-up plate, and the half-pack bin is sleeved outside the polishing seat.
Preferably, an inclined liquid spraying head gradually decreasing from left to right is embedded in the bottom of the half-pack bin, the spraying direction of the liquid spraying head faces the circle center of the polishing seat, and the liquid spraying head supplies liquid through a collecting pipe.
Preferably, a hook-shaped multi-angle liquid spraying seat is further arranged on one side of the clamping seat, liquid is supplied to the multi-angle liquid spraying seat through a collecting tank, and liquid can be sprayed towards the glass mirror plate and the polishing belt simultaneously by the multi-angle liquid spraying seat.
Compared with the prior art, the invention provides a high-precision manufacturing device for a Fabry-Perot interferometer mirror plate, which has the following beneficial effects:
1. in the device, the belt polishing component is arranged above the clamping seat, the belt polishing component can polish the glass mirror plate in a mode of retracting and releasing the polishing belt, the width of the polishing belt is smaller than the diameter of the glass mirror plate, the reduction of consumables is facilitated on the premise of not influencing the precision of a main body, further, the precision required by the edge of the glass mirror plate for manufacturing the Fabry-Perot interferometer is low, so that the glass mirror plate is not required to be finely polished, in addition, the edge of the glass mirror plate can be polished at intervals by the polishing belt under the rotation of the glass mirror plate, so that consumables can be fully utilized, and the manufacturing cost is reduced;
2. in the device, the auxiliary polishing component is arranged on the machine body, can be used for a long time in a rotary polishing mode to assist in polishing the edge part of the glass mirror plate, so that a polishing belt is matched, and only a polishing skin needs to be replaced for replacing consumable materials of the auxiliary polishing component;
3. among this device, the stirring leaf has been laid to the axis body surface that lies in the accumulator, and the rotation of axis body is by the rotating electrical machines drive of fixing at the accumulator bottom, and the rotating electrical machines drive axis body rotates, can drive the glass mirror board on the one hand and rotate, and the glass mirror board of being convenient for polishes, and on the other hand can stir the collecting liquid in the accumulator through the stirring leaf, prevents that the polishing solution from subsiding and piles up, leads to follow-up polishing badly.
Drawings
FIG. 1 is a schematic diagram of the overall structure of a high precision fabrication apparatus for a Fabry-Perot interferometer mirror plate;
FIG. 2 is a schematic diagram of a partially enlarged structure of a high precision fabrication apparatus for a Fabry-Perot interferometer mirror plate;
FIG. 3 is a schematic diagram of a tape polishing assembly for use in an apparatus for high precision fabrication of a Fabry-Perot interferometer mirror plate;
FIG. 4 is a schematic diagram of a processing principle for a high precision fabrication apparatus for a Fabry-Perot interferometer mirror plate; in the figure: 1. a body; 2. a recovery tank; 3. a rotating electric machine; 4. a righting platform; 5. a clamping seat; 6. a belt polishing assembly; 7. an auxiliary polishing component; 8. a circulation pump; 9. a collection tank; 10. a multi-angle liquid spraying seat; 61. a mounting seat; 62. mounting an arm; 63. a first driving roller; 64. a connecting arm; 65. a second driving roller; 66. an adjusting seat; 67. a support roller; 68. a telescopic rod; 69. a sliding seat; 610. mounting a rod; 611. a draining roller; 71. [ type seat; 72. a guide bar; 73. a lead screw; 74. adjusting the motor; 75. a guide sleeve; 76. a follower plate; 77. an adjustment shaft; 78. a base shaft; 79. mounting a plate; 710. polishing the motor; 711. half-packaging the bins; 712. a liquid jet head; 713. and (4) polishing the seat.
Detailed Description
Referring to fig. 1 to 4, in an embodiment of the present invention, a high precision manufacturing apparatus for a fabry-perot interferometer mirror plate includes a machine body 1, a recovery tank 2, a centering table 4 and a clamping seat 5, wherein the recovery tank 2 is fixed at one side of the machine body 1, the centering table 4 is fixed in the recovery tank 2, an axis body is rotatably arranged in the centering table 4, and the clamping seat 5 capable of clamping a glass mirror plate is fixed at the top of the axis body;
stirring blades are distributed on the outer surface of the shaft body in the recovery tank 2, the shaft body is driven to rotate by a rotating motor 3 fixed at the bottom of the recovery tank 2, and the rotating motor 3 drives the shaft body to rotate, so that the glass mirror plate can be driven to rotate and polished conveniently, and the collecting liquid in the recovery tank can be stirred by the stirring blades to prevent the polishing liquid from settling and accumulating to cause poor subsequent polishing;
a belt polishing component 6 is arranged above the clamping base 5, the belt polishing component 6 can polish the glass mirror plate in a way of retracting and releasing a polishing belt, and the width of the polishing belt is smaller than the diameter of the glass mirror plate, it needs to be explained that, as shown in fig. 4, the width of the polishing belt is smaller than the diameter of the glass mirror plate, which is beneficial to reducing consumables on the premise of not influencing the precision of a main body, further, the precision required for manufacturing the edge of the glass mirror plate of the fabry-perot interferometer is lower, so that the glass mirror plate does not need to be finely polished, and in addition, the edge of the glass mirror plate can be polished at intervals by the polishing belt under the rotation of the glass mirror plate, so that the consumables can be fully utilized;
the machine body 1 is provided with an auxiliary polishing component 7, and the auxiliary polishing component 7 can be used for assisting in polishing the edge part of the glass mirror plate in a rotating polishing mode.
In this embodiment, as shown in fig. 1, the liquid inlet end of the pipe body and the circulating pump 8 in the recycling tank 2 is communicated, the liquid outlet end of the circulating pump 8 is communicated with the collecting tank 9 by using another pipe body, the collecting tank 9 can continuously provide polishing liquid for polishing the glass mirror plate, and the top of the collecting tank 9 is provided with a material supplementing port for supplementing new polishing liquid at regular time.
In this embodiment, as shown in fig. 1 and fig. 3, the belt polishing assembly 6 includes a mounting seat 61, a mounting arm 62, a first driving roller 63 and a second driving roller 65, wherein the first driving roller 63 is rotatably disposed on the mounting arm 62, the first driving roller 63 can provide a polishing belt, and the polishing belt is supported by two sets of supporting rollers 67 and then collected by the second driving roller 65.
In a preferred embodiment, two sets of the supporting rollers 67 are rotatably disposed below the mounting rods 610, one mounting rod 610 is fixed below the adjusting seat 66, the other mounting rod 610 is slidably disposed in a limiting sliding chute formed in the adjusting seat 66 by using a sliding seat 69, and the sliding motion of the sliding seat 69 is controlled by an expansion link 68 fixed in the adjusting seat 66, so as to adjust the distance between the two sets of the supporting rollers 67;
the distance between the two sets of support rollers 67 is the same as the diameter of the glass mirror plate, and the length of the polishing tape in the horizontal state is slightly longer than the diameter of the glass mirror plate.
As a preferred embodiment, the polishing pad further comprises a connecting arm 64 and a drainage roller 611, wherein two sets of drainage rollers 611 are symmetrically and rotatably disposed on two sides of the mounting base 61, and are used for supporting and adjusting the polishing belt, and simultaneously draining away polishing liquid attached to the polishing belt in a squeezing manner, so as to prevent the polishing liquid from being carried out to the outside and causing waste;
the connecting arm 64 is fixedly connected with the mounting arm 62, and the other end of the connecting arm 64 is connected to an output end of a linear pressurizing device, which is used for adjusting polishing pressure between the polishing belt and the glass mirror plate, and the linear pressurizing device comprises an electric telescopic rod or a hydraulic rod and the like.
In this embodiment, as shown in fig. 1-2, the auxiliary polishing assembly 7 includes a [ type seat 71, a rotary polishing assembly and a pressure adjusting assembly, wherein the [ type seat 71 is fixed on the machine body 1, a mounting plate 79 is fixed on one side of the [ type seat, a base shaft 78 is rotatably disposed in the mounting plate 79, the base shaft 78 is driven to rotate by a polishing motor 710 fixed on the top of the [ type seat through a pulley assembly, the pulley assembly includes two sets of pulleys and a transmission belt connecting the two sets of pulleys, one set of pulleys is fixed on the top of the base shaft 78, the other set of pulleys is fixed at the output end of the polishing motor for transmission, the base shaft 78 is a cavity structure, an adjusting shaft 77 is slidably and non-rotatably disposed in the cavity, specifically, a slider may be disposed on the adjusting shaft 77, a chute extending along the axial direction of the slider may be opened in the cavity of the base shaft 78, so that the adjusting shaft 77 is slidably and non-rotatably disposed in the base shaft 78 through the cooperation of the slider and the chute The other end of the adjusting shaft 77 is coaxially fixed with a polishing seat 713, and a polishing leather is arranged on the polishing seat 713, it should be noted that, as shown in fig. 1, the polishing seat 713 and the polishing leather are located behind the polishing belt and do not collide with the polishing belt, and the edge of the glass mirror plate can be polished by the polishing leather.
In this embodiment, as shown in fig. 2, the pressure adjusting assembly includes a guide rod 72, a lead screw 73, an adjusting motor 74, a guide sleeve 75, and a follower plate 76, wherein the guide rod 72 and the lead screw 73 are disposed in parallel and both rotatably disposed between the [ shaped seat 71 and the machine body 1, the lead screw 73 is driven by the adjusting motor 74 fixed below the [ shaped seat 71 to rotate by using another pulley assembly, the lead screw 73 is drivingly connected with a nut seat, the nut seat is fixedly connected with the guide sleeve 75, the guide sleeve 75 is slidably sleeved outside the guide rod 72, and the guide sleeve 75 is connected with the adjusting shaft 77 by using the follower plate 76 through a bearing, so as to adjust the polishing pressure of the polishing seat 713 on the glass mirror plate by the up-down displacement of the guide sleeve 75.
In a preferred embodiment, a half-pack chamber 711 is further fixed below the follower plate 76, and the half-pack chamber 711 is sleeved outside the polishing seat 713.
In a preferred embodiment, an inclined liquid spraying head 712 gradually decreasing from left to right is embedded in the bottom of the half-pack chamber 711, the liquid spraying head 712 sprays towards the center of the polishing base 713 to pre-wet the polishing skin, and the liquid spraying head 712 is supplied with liquid by a collecting pipe 9.
In this embodiment, a hook-shaped multi-angle liquid spraying base 10 is further disposed on one side of the clamping base 5, the multi-angle liquid spraying base 10 is supplied with liquid from the collecting tank 9, and the multi-angle liquid spraying base 10 can spray liquid towards the glass mirror plate and the polishing belt simultaneously.
When concrete implementation, fix the glass mirror plate on grip slipper 5 earlier, utilize 3 drive axis bodies of rotating electrical machines to rotate, can drive the glass mirror plate on the one hand and rotate, be convenient for the glass mirror plate to polish, on the other hand, can stir the collecting liquid in the accumulator through the stirring leaf, prevent that the polishing solution from subsiding and piling up, area body polishing subassembly 6 can be with the mode polishing glass mirror plate of receiving and releasing the polishing band this moment, and utilize supplementary polishing subassembly 7 can be with the supplementary polishing glass mirror plate's of mode polishing of rotation polishing border part, open circulating pump 8, retrieve the polishing solution in accumulator 2 and add new polishing solution regularly in collection tank 9, the utilization efficiency of polishing solution is improved.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention are equivalent to or changed within the technical scope of the present invention.
Claims (7)
1. A high-precision manufacturing device for a Fabry-Perot interferometer mirror plate comprises a machine body (1), a recovery groove (2), a centering table (4) and a clamping seat (5), wherein the recovery groove (2) is fixed on one side of the machine body (1), the centering table (4) which is horizontally placed is fixed in the recovery groove (2), a shaft body is rotatably arranged in the centering table (4), and the clamping seat (5) capable of clamping a glass mirror plate is fixed at the top of the shaft body;
the method is characterized in that: stirring blades are distributed on the outer surface of the shaft body in the recovery tank (2), and the rotation of the shaft body is driven by a rotating motor (3) fixed at the bottom of the recovery tank (2);
a belt body polishing component (6) is arranged above the clamping seat (5), the belt body polishing component (6) can polish the glass mirror plate in a way of retracting and releasing a polishing belt, and the width of the polishing belt is smaller than the diameter of the glass mirror plate;
an auxiliary polishing component (7) is arranged on the machine body (1), and the auxiliary polishing component (7) can be used for assisting in polishing the edge part of the glass mirror plate in a rotary polishing mode;
the belt polishing assembly (6) comprises a mounting seat (61), a mounting arm (62), a first driving roller (63) and a second driving roller (65), wherein the first driving roller (63) is rotatably arranged on the mounting arm (62), the first driving roller (63) can provide a polishing belt, and the polishing belt is supported by two groups of supporting rollers (67) and then collected by the second driving roller (65);
the two groups of supporting rollers (67) are rotatably arranged below the mounting rods (610), one mounting rod (610) is fixed below the adjusting seat (66), the other mounting rod (610) is arranged in a limiting sliding groove formed in the adjusting seat (66) in a sliding mode through a sliding seat (69), and the sliding action of the sliding seat (69) is controlled through a telescopic rod (68) fixed in the adjusting seat (66), so that the distance between the two groups of supporting rollers (67) is adjusted;
the distance between the two sets of support rollers (67) is the same as the diameter of the glass mirror plate;
supplementary polishing subassembly (7) are including [ type seat (71), rotatory polishing subassembly and pressure adjustment subassembly, wherein, [ type seat (71) are fixed in on organism (1), one side of [ type seat is fixed with mounting panel (79), it is provided with basic axle (78) to rotate in mounting panel (79), basic axle (78) adopt the drive of band pulley subassembly to rotate by fixing polishing motor (710) at [ type seat top, basic axle (78) are the cavity structure, and slidable and can not rotate in the cavity is provided with regulating spindle (77), the other end coaxial fixed of regulating spindle (77) has polishing seat (713), be provided with the polishing skin on polishing seat (713).
2. A high precision fabrication apparatus for a fabry-perot interferometer mirror plate as claimed in claim 1, wherein: adopt the body to communicate with the feed liquor end of circulating pump (8) in accumulator (2), the play liquid end of circulating pump (8) adopts another body and is linked together with holding tank (9), holding tank (9) can be for the polishing of glass mirror plate to continuously provide the polishing solution, just, the top of holding tank (9) is equipped with the feed supplement mouth for regularly supply new polishing solution.
3. A high precision fabrication apparatus for a fabry-perot interferometer mirror plate as claimed in claim 1, wherein: the polishing belt polishing device further comprises a connecting arm (64) and liquid draining rollers (611), wherein two groups of liquid draining rollers (611) are symmetrically and rotatably arranged on two sides of the mounting base (61) and are used for draining polishing liquid attached to the polishing belt in a pressing mode while supporting and adjusting the polishing belt;
the connecting arm (64) is fixedly connected with the mounting arm (62), and the other end of the connecting arm (64) is connected to the output end of the linear pressurizing device and is used for adjusting the polishing pressure between the polishing belt and the glass mirror plate.
4. A high precision fabrication apparatus for a fabry-perot interferometer mirror plate as claimed in claim 1, wherein: the pressure adjusting assembly comprises a guide rod (72), a lead screw (73), an adjusting motor (74), a guide sleeve (75) and a follow-up plate (76), wherein the guide rod (72) and the lead screw (73) are arranged in parallel and are both rotatably arranged between a [ shaped seat (71) and the machine body (1), the lead screw (73) is driven to rotate by the adjusting motor (74) fixed below the [ shaped seat (71) through another pulley assembly, a nut seat is in transmission connection with the lead screw (73), the nut seat is fixedly connected with the guide sleeve (75), the guide sleeve (75) is slidably sleeved outside the guide rod (72), and the guide sleeve (75) is connected with an adjusting shaft (77) through a bearing through the follow-up plate (76), so that the polishing pressure of the polishing seat (713) on the glass mirror plate is adjusted through the up-down displacement of the guide sleeve (75).
5. A high precision manufacturing apparatus for a Fabry-Perot interferometer mirror plate according to claim 4, characterized in that: a half-packed cabin (711) is further fixed below the follow-up plate (76), and the half-packed cabin (711) is sleeved outside the polishing seat (713).
6. A high precision manufacturing apparatus for a Fabry-Perot interferometer mirror plate according to claim 5, characterized in that: an inclined liquid spraying head (712) which gradually decreases from left to right is embedded into the bottom of the half-pack bin (711), the spraying direction of the liquid spraying head (712) faces the circle center of the polishing seat (713), and liquid is supplied to the liquid spraying head (712) through a collecting tank (9).
7. A high precision fabrication apparatus for a fabry-perot interferometer mirror plate as claimed in claim 2, wherein: a hook-shaped multi-angle liquid spraying seat (10) is further arranged on one side of the clamping seat (5), liquid is supplied to the multi-angle liquid spraying seat (10) through a collecting tank (9), and liquid can be sprayed towards the glass mirror plate and the polishing belt simultaneously by the multi-angle liquid spraying seat (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010848454.XA CN111941201B (en) | 2020-08-21 | 2020-08-21 | High-precision manufacturing device for Fabry-Perot interferometer mirror plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010848454.XA CN111941201B (en) | 2020-08-21 | 2020-08-21 | High-precision manufacturing device for Fabry-Perot interferometer mirror plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111941201A CN111941201A (en) | 2020-11-17 |
| CN111941201B true CN111941201B (en) | 2021-12-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010848454.XA Expired - Fee Related CN111941201B (en) | 2020-08-21 | 2020-08-21 | High-precision manufacturing device for Fabry-Perot interferometer mirror plate |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101332580A (en) * | 2007-06-29 | 2008-12-31 | 株式会社荏原制作所 | Polishing apparatus and polishing method |
| US20120244787A1 (en) * | 2011-03-25 | 2012-09-27 | Masaya Seki | Polishing apparatus and polishing method |
| CN207155466U (en) * | 2017-09-12 | 2018-03-30 | 潘汉祥 | A kind of dustless belt internally polisher of high speed |
| CN109590865A (en) * | 2019-01-03 | 2019-04-09 | 重庆大学 | A kind of curved surface precision abrasive belt grinding head |
| CN109702583A (en) * | 2019-02-19 | 2019-05-03 | 文华学院 | Optical lens processing unit (plant) |
| CN210649979U (en) * | 2019-09-02 | 2020-06-02 | 中山市智强机械有限公司 | Automatic hinge grinding device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1638919A (en) * | 2001-06-12 | 2005-07-13 | 纳托尔公司 | Improved method and apparatus for bi-directionally polishing a workpiece |
| JP4999417B2 (en) * | 2006-10-04 | 2012-08-15 | 株式会社荏原製作所 | Polishing apparatus, polishing method, processing apparatus |
| CN111230668B (en) * | 2020-03-23 | 2021-04-02 | 深圳市鼎润实业有限公司 | Aluminum alloy ex-trusions mechanical polishing device |
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2020
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101332580A (en) * | 2007-06-29 | 2008-12-31 | 株式会社荏原制作所 | Polishing apparatus and polishing method |
| US20120244787A1 (en) * | 2011-03-25 | 2012-09-27 | Masaya Seki | Polishing apparatus and polishing method |
| CN207155466U (en) * | 2017-09-12 | 2018-03-30 | 潘汉祥 | A kind of dustless belt internally polisher of high speed |
| CN109590865A (en) * | 2019-01-03 | 2019-04-09 | 重庆大学 | A kind of curved surface precision abrasive belt grinding head |
| CN109702583A (en) * | 2019-02-19 | 2019-05-03 | 文华学院 | Optical lens processing unit (plant) |
| CN210649979U (en) * | 2019-09-02 | 2020-06-02 | 中山市智强机械有限公司 | Automatic hinge grinding device |
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| CN111941201A (en) | 2020-11-17 |
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