CN1118680C

CN1118680C - Laser auto-collimation collimator

Info

Publication number: CN1118680C
Application number: CN 99122617
Authority: CN
Inventors: 艾华; 郑乃捷; 韩旭东
Original assignee: Changchun Institute of Optics Fine Mechanics and Physics of CAS
Current assignee: Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority date: 1999-12-10
Filing date: 1999-12-10
Publication date: 2003-08-20
Anticipated expiration: 2019-12-10
Also published as: CN1299956A

Abstract

The present invention belongs to the technical field of automatic detection, which relates to the improvement of a position detecting device in the field of optical instruments. The present invention can be widely used for extracting auto-punctual information at high speed from targets moving at high speed, such as the detection of theodolites and rotating tables, the detection of blade balance for airplane engines in flying experiments, the detection of the dynamic characteristics of angular displacement sensors, the detection of accuracy, and the detection of optical plane cold-working members in minor angles.

Description

Laser auto-collimation collimator

The invention belongs to the test technique automatic field, relate to a kind of improvement the position detecting device in the optical instrument field.

Optics is called for short parallel light tube from quasi-parallel autocollimatic instrument, is light orientation (direction) detecting instrument.Thereby traditional detection method is to utilize directional light that the autocollimatic instrument sends to measure angle position value between tested optical surface through the sight offset between tested optical parallel, principle is seen Fig. 1, include light source 1, graticule 2, spectroscope 3, telephotolens 4, measured object 5, graticule 6, eyepiece 7, normally divide measuring eyepiece human eye aiming form and photoelectronic collimating form, because this kind structure adopts crosshair and photoelectric vibration narrow slit structure, need certain stabilization time, belong to the static measurement mode, measuring accuracy 0.2 ", it is big that light source sends optical energy loss.

The object of the present invention is to provide a kind of dynamic and static weighing that is applicable to, measuring accuracy height, the parallel light tube that the efficiency of light energy utilization is high.

The principle of the invention as shown in Figure 2, include LASER Light Source 1, lens 2, slit 3, polarization spectroscope 4, collimator objective 5,1/4 wavelength sheet 6, measured object 7, depolarization spectroscope 8, micro actuator 9, vibrating slot 10, photelectric receiver 11 (D1, D2), the long chi 12 of micrometer, eyepiece 13, the position of slit 3 is on the focus of parallel light tube, send the horizontal vibration linearly polarized laser from LASER Light Source 1, focus on the slit 3 through lens 2, again through polarization spectroscope 4, all be transmitted on the object lens 5, behind 1/4 wavelength sheet 6, be mapped on the plane of measured object 7, reflected back 1/4 wavelength sheet 6, origin is returned and is come and gone twice through 1/4 wavelength sheet 6, and the polarization direction of laser beam changes vertical vibration into by horizontal vibration, when polarization spectroscope 4 light all is mapped on the depolarization spectroscope 8 again, be divided into two-way, wherein 50% be transmitted on the vibrating slot 10, (D1 D2) receives by two photelectric receivers 11, be used for the aiming of high speed dynamic object, or static high-acruracy survey; 50% reflexes on the eyepiece 13, be used for the mark aiming of static person eyes and measure, vibrating slot 10 and slit 3 conjugation, and all on the focal plane of object lens, wherein vibrating slot 10 be black chromium, middle logical light around the slit 3; Punctual certainly when measured object 7, (D1 D2) sends signal as shown in Figure 3, and transverse axis is an offset axis, and Z-axis is that (their intersection point A is the aiming point position of measured object 7 to two photelectric receivers 11 for D1, D2) output signal amplitude from two photelectric receivers 11.

Because what invention was used is two photodiodes, its dynamic response time extracts the A dot information time in tens nanoseconds in 0.1 μ S through electric treatment, so when tested object plane passed through light pipe at a high speed, light pipe can be caught target fast.Make full use of the energy of the laser that light source sends, owing to adopt polarization spectroscope, 1/4 wavelength sheet, laser.Eliminated every in the traditional approach and lost 50% energy through a prismatic decomposition.Improved capacity usage ratio more than 4 times.Measurement pointing accuracy height.As can be seen from Figure 3 because D1 and D2 are the misphase signals.The signal slope that extracts the A dot information doubles.With connect signal maximum in single channel relatively, its aiming resolution improves nearly 10 times.

The present invention can be widely used in high-speed moving object and extract from punctual high speed information, as the tachometric survey to the high speed rotating target of: transit, turntable, noncontact.The detection of angular displacement sensor dynamic perfromance, and the detection of precision.The low-angle detection of optical flat cold working part.

Description of drawings:

Fig. 1 prior art schematic diagram

Fig. 2 principle of the invention figure

Fig. 3 photelectric receiver signal of the present invention output map

Most preferred embodiment: LASER Light Source 1 adopts semiconductor laser, lens 2, slit 3, polarization spectroscope 4, collimator objective 5,1/4 wavelength sheet 6, measured object 7, depolarization spectroscope 8, micro actuator 9, vibrating slot 10, photelectric receiver (D1, D2) 11, the long chi 12 of micrometer, eyepiece 13.

Claims

1, a kind of laser auto-collimation collimator, include: lens (2), collimator objective (5), measured object (7), depolarization spectroscope (8), micro actuator (9), vibrating slot (10), eyepiece (13), it is characterized in that: the position of slit (3) is on the focus of parallel light tube, send the horizontal vibration linearly polarized laser from LASER Light Source (1), focus on the slit (3) through lens (2), again through polarization spectroscope (4), all be transmitted on the object lens (5), behind 1/4 wavelength sheet (6), be mapped on the plane of measured object (7), reflected back 1/4 wavelength sheet (6), origin is returned and is come and gone twice through 1/4 wavelength sheet (6), the polarization direction of laser beam changes vertical vibration into by horizontal vibration, light all is mapped on the depolarization spectroscope (8) when polarization spectroscope (4) again, wherein 50% is transmitted on the vibrating slot (10), by two photelectric receivers (11) (D1, D2) receive, 50% reflexes on the eyepiece (13).

2, a kind of laser auto-collimation collimator as claimed in claim 1, its feature also is: vibrating slot (10) and slit (3) conjugation, and all on the focal plane of object lens, wherein vibrating slot (10) be black chromium, middle logical light around the slit (3).

3, a kind of laser auto-collimation collimator as claimed in claim 1, its feature also is: oneself is punctual when measured object (7), from two photelectric receivers (11) (D1, D2) send signal, transverse axis is an offset axis, Z-axis is that (intersection point of two signals (A) is the aiming point position of measured object (7) to two photelectric receivers (11) for D1, D2) output signal amplitude.