CN111853329B - Electromagnetic valve and mass flow controller - Google Patents
Electromagnetic valve and mass flow controller Download PDFInfo
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- CN111853329B CN111853329B CN202010719137.8A CN202010719137A CN111853329B CN 111853329 B CN111853329 B CN 111853329B CN 202010719137 A CN202010719137 A CN 202010719137A CN 111853329 B CN111853329 B CN 111853329B
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- 239000000306 component Substances 0.000 claims abstract description 63
- 239000008358 core component Substances 0.000 claims abstract description 8
- 230000005489 elastic deformation Effects 0.000 claims description 11
- 230000005415 magnetization Effects 0.000 claims description 5
- 238000009434 installation Methods 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000012545 processing Methods 0.000 abstract description 14
- 238000012797 qualification Methods 0.000 abstract description 7
- 239000012530 fluid Substances 0.000 description 30
- 230000005672 electromagnetic field Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000007789 sealing Methods 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- 235000014676 Phragmites communis Nutrition 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
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- 238000003754 machining Methods 0.000 description 2
- 230000005389 magnetism Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
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- 230000000149 penetrating effect Effects 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
- F16K31/0644—One-way valve
- F16K31/0655—Lift valves
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Magnetically Actuated Valves (AREA)
Abstract
The invention provides an electromagnetic valve and a mass flow controller, wherein the electromagnetic valve comprises an electromagnetic component, a valve body component, a valve core component, a plug component and a valve port component, wherein the valve core component, the plug component and the valve port component are sequentially superposed in an accommodating cavity of the valve body component; the electromagnetic part is used for magnetizing the valve core assembly and the magnetic base, so that the magnetic base attracts the valve core assembly to move, the plug is further driven to move, and the distance between the plug and the valve port is adjusted. The electromagnetic valve and the mass flow controller provided by the invention can improve the working reliability and reduce the assembly difficulty, thereby improving the one-time assembly qualification rate, reducing the part processing difficulty, reducing the processing cost and reducing the volume of the electromagnetic valve and the mass flow controller.
Description
Technical Field
The invention relates to the technical field of fluid control devices, in particular to an electromagnetic valve and a mass flow controller.
Background
Fluid control devices are widely used in the semiconductor microelectronics industry, the photovoltaic industry, specialty materials, the chemical industry, the petroleum industry, medicine, environmental protection, vacuum, and other fields. The electromagnetic fluid control device can control fluid with small pressure and large flow, and has the advantages of good sealing performance and small overall dimension.
As shown in fig. 1, the conventional electromagnetic control valve includes a valve housing 10, a coil 11, a valve body 12, a valve core 13, a gasket 14, a magnetic seat 15, and a valve port 16, wherein the coil 11 and the valve body 12 are disposed in the valve housing 10, the valve body 12 has a hollow cavity therein, the valve core 13, the gasket 14, the magnetic seat 15, and the valve port 16 are disposed in the cavity, the valve port 16 is disposed below the magnetic seat 15, two through holes 18 are disposed in the valve port 16, the gasket 14 and the valve core 13 are sequentially disposed above the magnetic seat 15, a reed 17 is disposed on the valve core 13, the reed 17 is overlapped on the gasket 14, a trumpet-shaped through hole 19 is disposed in the center of the magnetic seat 15, the lower end of the valve core 13 passes through the magnetic seat 15 and is disposed in the trumpet-shaped through hole 19, and the two through holes 18 in the valve port 16 and the trumpet-shaped through hole 19 in the magnetic seat 15 form a fluid passage. When the coil 11 is energized, the magnetic seat 15 generates an attractive force to the valve element 13, and the attractive force of the magnetic seat 15 to the valve element 13 changes along with the change of the input voltage value, so that the distance between the lower end of the valve element 13 and the through hole 18 of the valve port member 16 changes, and the fluid flow is adjusted.
However, in the actual installation process, since it is not guaranteed that the valve element 13 is installed at the central position of the inner cavity of the valve body 12, after the coil 11 is energized, the valve element 13 is attracted obliquely, so that the sealing between the valve element 13 and the through hole 18 of the valve port member 16 cannot be realized, and finally the failure of the electromagnetic regulating valve is caused. In order to ensure that the valve core 13 can move in the vertical direction as much as possible, the dimensional accuracy of all parts in the electromagnetic regulating valve is ensured to be high enough, and the assembling accuracy is ensured to be high enough, so that the problems that the production efficiency of the electromagnetic regulating valve is low, the one-time assembling qualification rate is low, the rejection rate of the parts is high and the like are caused.
Disclosure of Invention
The invention aims to at least solve one of the technical problems in the prior art, and provides an electromagnetic valve and a mass flow controller, which can improve the working reliability and reduce the assembly difficulty, thereby improving the one-time assembly qualification rate, reducing the part processing difficulty, reducing the processing cost and reducing the volume of the electromagnetic valve.
To achieve the object of the present invention, there is provided a solenoid valve including: an electromagnetic component, a valve body component, a valve core component, a plug component and a valve port component, wherein,
the valve element assembly, the plug assembly and the valve port component are sequentially superposed in an accommodating cavity of the valve body assembly, the valve element assembly is movably arranged in the accommodating cavity, the plug assembly comprises a magnetic seat and a plug, the magnetic seat is fixedly arranged in the accommodating cavity, the plug is movably arranged in an installation hole of the magnetic seat, the valve element assembly is in point contact with the plug, a valve port is arranged on the end face of the valve port component facing the plug assembly, and the plug and the valve port are arranged oppositely;
the electromagnetic part is used for magnetizing the valve core assembly and the magnetic seat, so that the magnetic seat attracts the valve core assembly to move, the plug is further driven to move, and the distance between the plug and the valve port is adjusted.
Preferably, the valve core assembly includes a magnetic core disposed opposite to the plug, the magnetic core can be attracted by the magnetic seat under magnetization of the electromagnetic member to move, a contact member protruding toward the plug is disposed on the magnetic core, and a surface of the contact member facing the plug includes an arc surface capable of contacting with the plug in point,
or the plug is provided with a contact component protruding towards the magnetic core, and the surface of the contact component facing the magnetic core comprises an arc surface capable of being in point contact with the magnetic core.
Preferably, the contact component comprises a connecting pin and a spherical contact head, one end of the connecting pin is connected with the magnetic core or the plug, and the other end of the connecting pin is connected with the spherical contact head.
Preferably, the contact member is integrally formed on the core or the plug.
Preferably, the plug assembly further comprises a first annular spring piece, the first annular spring piece surrounds the plug, is fixedly arranged in the accommodating cavity and is used for being matched with the first boss on the plug to limit the position of the plug in the accommodating cavity, and the first annular spring piece generates elastic deformation when the valve core assembly drives the plug to move.
Preferably, the valve core assembly further comprises a second annular spring piece, the second annular spring piece is arranged around the magnetic core and is fixedly arranged in the accommodating cavity, the second annular spring piece is used for being matched with a second boss on the magnetic core to limit the position of the magnetic core in the accommodating cavity, and the second annular spring piece generates elastic deformation when the magnetic seat attracts the valve core assembly to move.
Preferably, the valve core assembly further comprises a guide sheet, and the guide sheet is arranged at one end of the magnetic core, which is far away from the plug, and is used for cooperating with the side wall of the accommodating cavity to limit the moving direction of the valve core assembly.
Preferably, the valve further comprises an adjusting pad, the adjusting pad is arranged between the plug assembly and the valve port component and is used for adjusting the distance between the plug assembly and the valve port component.
Preferably, the valve body assembly comprises a valve body magnetic seat, a valve body and a baffle ring, wherein a containing groove for containing the valve core assembly is formed in the valve body magnetic seat, the valve body is arranged around the valve body magnetic seat in a surrounding manner, the peripheral wall of the valve body extends towards the direction away from the groove bottom of the containing groove relative to the groove opening of the containing groove, so that a containing space for containing the plug assembly and the valve port component is formed in the valve body, and the containing groove and the containing space form the containing cavity; the baffle ring is arranged around the valve body magnetic seat and positioned between the valve body magnetic seat and the valve body, and is used for insulating the valve body magnetic seat and the valve body.
The invention also provides a mass flow controller comprising the electromagnetic valve provided by the invention.
The invention has the following beneficial effects:
according to the electromagnetic valve provided by the invention, as the valve core assembly and the plug are in point contact, when the magnetic seat attracts the valve core assembly to move and further drives the plug to move, even if the valve core assembly is in an inclined state in the accommodating cavity of the valve body assembly due to assembly errors or machining errors, the moving direction of the plug carried by the valve core assembly cannot be influenced, the plug can still move towards the valve port according to the preset direction, so that the valve port is blocked, and the function of blocking the fluid by the electromagnetic valve is realized. Therefore, the electromagnetic valve provided by the invention can improve the working reliability and reduce the assembly difficulty, thereby improving the one-time assembly qualification rate, reducing the part processing difficulty and reducing the processing cost, and because the moving direction of the plug is not influenced by the inclination of the valve core assembly, when the passing flow of the electromagnetic valve needs to be improved, the stroke of the plug can be increased, namely, the distance between the plug and the valve port can be increased, so that the flow of the fluid which can pass through the electromagnetic valve can be increased, the volume of the valve port component does not need to be increased, and the volume of the electromagnetic valve can be reduced for the large-flow electromagnetic valve.
The mass flow controller provided by the invention can improve the working reliability and reduce the assembly difficulty by virtue of the electromagnetic valve provided by the invention, thereby improving the one-time assembly qualification rate, reducing the part processing difficulty, reducing the processing cost and reducing the volume of the mass flow controller.
Drawings
FIG. 1 is a schematic structural diagram of a conventional electromagnetic control valve;
FIG. 2 is a schematic structural diagram of a solenoid valve provided in an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a valve body assembly of a solenoid valve according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a valve core assembly of a solenoid valve provided by the embodiment of the invention when a contact component is connected to the valve core assembly;
fig. 5 is a schematic structural diagram of a plug of a solenoid valve according to an embodiment of the present invention;
fig. 6 is a schematic structural view illustrating a valve core assembly of the electromagnetic valve according to the embodiment of the present invention, wherein a contact member is connected to the valve core assembly and is in point contact with a plug assembly;
fig. 7 is a schematic structural view illustrating a plug assembly of the solenoid valve according to the embodiment of the present invention, wherein the plug assembly is connected with a contact member and is in point contact with a valve core assembly;
fig. 8 is a schematic structural view illustrating a valve core assembly of the electromagnetic valve according to the embodiment of the present invention, wherein a contact component is integrally formed on the valve core assembly and is in point contact with a plug assembly;
fig. 9 is a schematic structural view of a plug assembly of the solenoid valve according to the embodiment of the present invention, wherein a contact component is integrally formed on the plug assembly and is in point contact with a valve core assembly;
FIG. 10 is a schematic structural diagram of a solenoid valve and a mass flow controller according to an embodiment of the present invention;
description of reference numerals:
10-a valve housing; 11-a coil; 12-a valve body; 13-a valve core; 14-a gasket; 15-magnetic base; 16-a valve port; 17-a reed; 18-a via hole; 19-trumpet-shaped through holes; 2-an electromagnetic valve; 20-a valve port component; 201-an inflow channel; 202-valve port; 21-a plug assembly; 211-plug; 212-a magnetic mount; 213-a first boss; 214-a first ring spring leaf; 22-a spool assembly; 221-a magnetically movable core; 222-a second boss; 223-a second ring-shaped spring plate; 224-a guide tab; 23-a contact member; 231-a circular arc surface; 232-connecting pin; 233-ball contact; 24-a valve body assembly; 241-valve body magnetic seat; 242-a valve body; 243-stop ring; 244-an accommodation groove; 245-a containment space; 25-an electromagnetic member; 261-adjusting the pad; 262-an annular gasket; 271-a first seal ring; 272-a second seal ring; 28-a valve housing; 31-a fluid line; 32-a housing; 33-an access channel; 34-discharge channel.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the solenoid valve and the mass flow controller provided by the present invention are described in detail below with reference to the accompanying drawings.
As shown in fig. 2 and 10, the present embodiment provides a solenoid valve 2 including: the electromagnetic valve comprises an electromagnetic component 25, a valve body component 24, a valve core component 22, a plug component 21 and a valve port component 20, wherein the valve core component 22, the plug component 21 and the valve port component 20 are sequentially superposed in an accommodating cavity of the valve body component 24, the valve core component 22 is movably arranged in the accommodating cavity, the plug component 21 comprises a magnetic seat 212 and a plug 211, the magnetic seat 212 is fixedly arranged in the accommodating cavity, the plug 211 is movably arranged in a mounting hole of the magnetic seat 212, the valve core component 22 is in point contact with the plug 211, the valve port 202 is arranged on the end face, facing the plug component 21, of the valve port component 20, and the plug 211 is opposite to the valve port 202; the electromagnetic element 25 is used for magnetizing the valve core assembly 22 and the magnetic seat 212, so that the magnetic seat 212 attracts the valve core assembly 22 to move, and further drives the plug 211 to move, thereby adjusting the distance between the plug 211 and the valve port 202.
In the electromagnetic valve 2 provided in this embodiment, because the valve core assembly 22 is in point contact with the plug 211, when the magnetic seat 212 attracts the valve core assembly 22 to move, and further drives the plug 211 to move, even if the valve core assembly 22 is in an inclined state in the accommodating cavity of the valve body assembly 24 due to an assembly error or a machining error, the plug 211 cannot influence the moving direction of the plug 211 driven by the valve core assembly, and the plug 211 can still move toward the valve port 202 according to a preset direction, so as to plug the valve port 202, thereby implementing a blocking function of the electromagnetic valve 2 on fluid. Therefore, the electromagnetic valve 2 provided by this embodiment can improve the working reliability, and reduce the assembly difficulty, thereby improving the one-time assembly yield, reducing the processing difficulty of the components, and reducing the processing cost, and because the moving direction of the plug 211 is not affected by the inclination of the valve core assembly 22, therefore, when the accessible flow of the electromagnetic valve 2 needs to be improved, the stroke of the plug 211 can be increased, that is, the distance between the plug 211 and the valve port 202 can be increased, so as to increase the flow of the fluid that the electromagnetic valve 2 can pass through, and the volume of the valve port component 20 does not need to be increased, thereby for the large-flow electromagnetic valve 2, the volume of the electromagnetic valve 2 itself can be reduced.
Specifically, as shown in fig. 2, the valve core assembly 22, the plug assembly 21, and the valve port component 20 are stacked in the accommodating cavity of the valve body assembly 24 in sequence, where the plug assembly 21 is stacked above the valve port component 20, and the valve core assembly 22 is stacked above the plug assembly 21, where the valve core assembly 22 is stacked above the plug assembly 21 and can move up and down in the accommodating cavity, and the valve core assembly 22 can be magnetized by an electromagnetic field. The plug assembly 21 is located below the valve core assembly 22 and comprises a plug 211 and a magnetic seat 212, the magnetic seat 212 is fixedly arranged in the accommodating cavity and can be magnetized by an electromagnetic field, an installation hole penetrating through the thickness of the magnetic seat is formed in the magnetic seat, and the plug 211 can be vertically moved and arranged in the installation hole and is in point contact with the valve core assembly 22. The valve port component 20 is located below the plug component 21, a valve port 202 is disposed on an end surface of the valve port component 20 facing the plug component 21, an inflow channel 201 is disposed around the valve port 202, and the valve port 202 and the plug 211 are disposed corresponding to the end surface of the valve port component 20. An electromagnet 25 is disposed above the valve body assembly 24, and when energized, the electromagnet 25 is capable of generating an electromagnetic field for magnetizing the valve core assembly 22 and the magnetic seat 212.
However, in practical applications, the valve core assembly 22, the plug assembly 21, and the valve port component 20 are stacked in the accommodating cavity of the valve body assembly 24 in sequence, and the valve core assembly 21 is not limited to be stacked above the valve port component 20, the valve core assembly 22 is stacked above the plug assembly 21, or the valve port component 20 is stacked above the plug assembly 21, the plug assembly 21 is stacked above the valve core assembly 22, or the valve core assembly 22, the plug assembly 21, and the valve port component 20 are stacked in other directions, and at this time, the moving direction of the valve core assembly 22 and the plug 211 in the accommodating cavity is not limited to moving up and down, and can be adjusted according to the stacking direction of the valve core assembly 22, the plug assembly 21, and the valve port component 20. The electromagnetic member 25 is not limited to be disposed above the valve body assembly 24, and the electromagnetic field generated by the electromagnetic member 25 after being energized can cover the valve core assembly 22 and the magnetic seat 212.
In practical applications, fluid flows into the space between the valve port member 20 and the plug assembly 21, i.e., into the solenoid valve 2, through the inflow channel 201 of the valve port member 20, and then flows out of the valve port 202 of the valve port member 20, i.e., out of the solenoid valve 2, so as to circulate in the solenoid valve 2. In this embodiment, the smaller the distance between the plug 211 and the valve port 202 is, the smaller the flow of the fluid that can flow through the solenoid valve 2 is, and the larger the distance between the plug 211 and the valve port 202 is, the larger the flow of the fluid that can flow through the solenoid valve 2 is, and when the plug 211 contacts with the end surface of the valve port component 20 facing the plug assembly 21, the valve port 202 is completely blocked by the plug 211, and the fluid cannot flow out of the valve port 202, so that the function of blocking the fluid by the solenoid valve 2 is realized.
In the use process of the electromagnetic valve 2, the electromagnetic element 25 is energized to generate an electric field in the electromagnetic element 25, so that the valve core assembly 22 and the magnetic seat 212 are magnetized to generate a magnetic force attracting each other, at this time, the magnetic seat 212 can attract the valve core assembly 22 to move downward toward the magnetic element, because the valve core assembly 22 is in point contact with the plug 211, the valve core assembly 22 can simultaneously drive the plug 211 to move downward toward the valve port 202, and the magnitude of the attraction between the valve core assembly 22 and the magnetic seat 212 can be adjusted by adjusting the amount of electricity energized to the electromagnetic valve 2, so that the distance that the valve core assembly 22 can be attracted by the magnetic seat 212 to move downward toward the valve port 22 is adjusted, the distance that the plug 211 moves downward toward the valve port 202 is adjusted, and the distance between the plug 211 and the valve port 202 is adjusted.
Alternatively, the electromagnetic member 25 may employ an electromagnetic coil.
In a preferred embodiment of the present invention, after the valve core assembly 22, the plug assembly 21 and the valve port component 20 are assembled in the accommodating cavity, the valve core assembly 22 is in point contact with the plug assembly 21, that is, after the valve core assembly 22, the plug assembly 21 and the valve port component 20 are assembled in the accommodating cavity, the valve core assembly 22 is in point contact with the plug assembly 21 when the valve core assembly 22 drives the plug assembly 21 to move or when the valve core assembly 22 and the plug assembly 21 are in the non-moving initial position, so that no gap exists between the valve core assembly 22 and the plug assembly 21. Therefore, the relative movement between the valve core assembly 22 and the plug assembly 21 can be avoided, the situation that the valve core assembly 22 inclines relative to the plug assembly 21 due to the movement of the valve core assembly 22 relative to the plug assembly 21 is reduced, and the working reliability of the electromagnetic valve 2 is further improved.
As shown in fig. 2 and 10, the solenoid valve 2 provided in the present embodiment may be applied to a mass flow controller, the mass flow controller may include a fluid line 31 and a housing 32 disposed above the fluid line 31, an inlet passage 33 and an outlet passage 34 may be disposed in the fluid line 31, and the solenoid valve 2 may be disposed in the housing 32 and communicate with the inlet passage 33 and the outlet passage 34 through an inlet passage 201 and a valve port 202, respectively. In practical applications, the fluid flows from the inlet channel 33 into the inlet channel 201 to flow into the solenoid valve 2, and then flows from the valve port 202 to the outlet channel 34 to flow out of the solenoid valve 2, and the flow rate of the solenoid valve 2 can be detected by providing a flow rate detecting member in the mass flow controller and communicating the flow rate detecting member with the outlet channel 34, or by providing a flow rate detecting member directly on the outlet channel 34. However, the solenoid valve 2 provided in the present embodiment is not limited to application to a mass flow controller.
As shown in fig. 2, when the solenoid valve 2 is applied to a mass flow controller, a first sealing ring 271 may be disposed between the valve body 242 and the fluid pipeline 31, and a second sealing ring 272 may be disposed between the valve port member 20 and the fluid pipeline 31, so as to seal between the valve body 242 and the fluid pipeline 31, and seal between the valve port member 20 and the fluid pipeline 31, respectively, so as to seal between the solenoid valve 2 and the mass flow controller.
As shown in fig. 2 and 3, in a preferred embodiment of the present invention, the valve body assembly 24 may include a valve body magnet seat 241, a valve body 242 and a retaining ring 243, wherein a receiving groove 244 for receiving the valve core assembly 22 is provided in the valve body magnet seat 241, the valve body 242 is circumferentially provided around the valve body magnet seat 241, and a peripheral wall of the valve body 242 extends in a direction away from a groove bottom of the receiving groove 244 relative to a groove opening of the receiving groove 244 to form a receiving space 245 for receiving the plug assembly 21 and the valve port component 20 in the valve body 242, and the receiving groove 244 and the receiving space 245 constitute a receiving cavity; the baffle ring 243 is circumferentially arranged around the valve body magnetic seat 241 and is positioned between the valve body magnetic seat 241 and the valve body 242 for insulating the valve body magnetic seat 241 and the valve body 242.
Optionally, the valve body magnetic seat 241 may be made of a metal material capable of conducting magnetism, so that an electromagnetic field generated by the electromagnetic element 25 can be conducted to the valve core assembly 22 accommodated in the accommodating groove 244 of the valve body magnetic seat 241, so that the valve core assembly 22 is magnetized by the electromagnetic element 25, the valve body 242 may also be made of a metal material capable of conducting magnetism, so that an electromagnetic field generated by the electromagnetic element 25 can be conducted to the magnetic seat 212 accommodated in the accommodating space 245 of the valve body 242, so that the magnetic seat 212 is magnetized by the electromagnetic element 25, the baffle ring 243 is disposed around the valve body magnetic seat 241 and located between the valve body magnetic seat 241 and the valve body 242, so as to insulate the valve body magnetic seat 241 and the valve body 242, avoid electrical conduction between the valve body magnetic seat 241 and the valve body 242, and influence on magnetization of the valve core assembly 22 and magnetization of the magnetic seat 212, which may cause the magnetic seat 212 to be unable to attract the valve core assembly 22 to move, thereby improving the stability of use of the solenoid valve 2.
Optionally, the valve body magnetic seat 241, the valve body 242, and the baffle ring 243 may be connected by welding or bolting, and the magnetic seat 212 and the valve body 242 may also be connected by welding or bolting, but the connection among the valve body magnetic seat 241, the valve body 242, and the baffle ring 243, and the connection among the magnetic seat 212 and the valve body 242 are not limited thereto.
In a preferred embodiment of the present invention, as shown in fig. 2, the solenoid valve 2 further comprises a valve housing 28, the valve housing 28 is connected with the valve body assembly 24, and the solenoid 25 is disposed in the valve housing 28. By means of a valve cover 28 to connect the electromagnet member 25 with the valve body assembly 24.
As shown in fig. 6 to 9, in a preferred embodiment of the present invention, the valve core assembly 22 may include a magnetic core 221 disposed opposite to the plug 211, the magnetic core 221 may be attracted and moved by the magnetic seat 212 under magnetization of the electromagnetic element 25, the magnetic core 221 may be provided with a contact part 23 protruding toward the plug 211, and a surface of the contact part 23 facing the plug 211 may include an arc surface 231 capable of making point contact with the plug 211, or the plug 211 may be provided with the contact part 23 protruding toward the magnetic core 221, and a surface of the contact part 23 facing the magnetic core 221 may include an arc surface 231 capable of making point contact with the magnetic core 221.
Specifically, the magnetic core 221 can be magnetized by the electromagnetic field generated by the electromagnet 25 and can be attracted to and moved toward the magnetic seat 212 by the magnetic seat 212, and as shown in fig. 6 and 8, the contact member 23 is provided on the magnetic core 221 so as to protrude toward the plug 211 with respect to the magnetic core 221, and the surface of the contact member 23 facing the plug 211 is the arc surface 231, and the arc surface 231 can be in contact with the end surface of the plug 211 facing the magnetic core 221, so that the surface of the contact member 23 facing the plug 211 can be in point contact with the end surface of the plug 211 facing the magnetic core 221, the contact member 23 can be in point contact with the plug 211, and the magnetic core 221 can be in point contact with the plug 211.
On the other hand, as shown in fig. 7 and 9, the contact member 23 is provided on the plug 211 and projects toward the magnetic core 221 with respect to the plug 211, and the surface of the contact member 23 facing the magnetic core 221 is an arc surface 231, and the arc surface 231 can be in contact with the end surface of the magnetic core 221 facing the plug 211, so that the surface of the contact member 23 facing the magnetic core 221 can be in point contact with the end surface of the magnetic core 221 facing the plug 211, the contact member 23 can be in point contact with the magnetic core 221, and the plug 211 can be in point contact with the magnetic core 221.
In a preferred embodiment of the invention, as shown in fig. 8 and 9, the contact member 23 may be integrally formed on the magnetic core 221 or the plug 211.
Specifically, as shown in fig. 8, the contact member 23 is integrally formed with the magnetic core 221, and is located on the end surface of the magnetic core 221 facing the plug 211, and the arc surface 231 of the contact member 23 is in point contact with the end surface of the plug 211 facing the magnetic core 221. As shown in fig. 9, the contact member 23 is integrally formed with the plug 211 and is located on the end surface of the plug 211 facing the magnetic core 221, and the arc surface 231 of the contact member 23 is in point contact with the end surface of the magnetic core 221 facing the plug 211.
As shown in fig. 6 and 7, in a preferred embodiment of the present invention, the contact member 23 may include a connecting pin 232 and a ball contact 233, wherein one end of the connecting pin 232 is connected to the magnetic core 221 or the plug 211, and the other end is connected to the ball contact 233. In this embodiment, the contact member 23 may be designed separately from the magneto-dynamic core 221 or the plug 211, and the ball contact 233, which is separate from the magneto-dynamic core 221 or the plug 211, is connected to the magneto-dynamic core 221 or the plug 211 via the connecting pin 232.
Specifically, as shown in fig. 6, one end of the connecting pin 232 is connected to the magnetic core 221, and the other end is connected to the spherical contact 233, so as to connect the spherical contact 233 to the magnetic core 221, the outer surface of the spherical contact 233 is in contact with the end surface of the plug 211 facing the magnetic core 221, and the spherical contact 233 is spherical, so that the outer surface of the spherical contact 233 is spherical and can be tangent to the end surface of the plug 211 facing the magnetic core 221, so that the outer surface of the spherical contact 233 can be in point contact with the end surface of the plug 211 facing the magnetic core 221, so that the spherical contact 233 is in point contact with the plug 211, and the magnetic core 221 is in point contact with the plug 211.
Optionally, a groove for accommodating the connecting pin 232 and a part of the spherical contact 233 may be provided on the end surface of the magnetic core 221 facing the plug 211, both ends of the connecting pin 232 connected with the magnetic core 221 and the spherical contact 233 are located in the groove, a part of the spherical contact 233 is located in the groove, another part of the spherical contact 233 is located outside the groove, and another part of the spherical contact 233 located outside the groove is used for making point contact with the end surface of the plug 211 facing the magnetic core 221. Such a design can reduce the space occupied by the connection pin 232 and the ball contact 233 in the solenoid valve 2, so that the volume of the solenoid valve 2 itself can be further reduced.
As shown in fig. 7, one end of the connecting pin 232 is connected to the plug 211, and the other end is connected to the spherical contact 233 to connect the spherical contact 233 to the plug 211, the outer surface of the spherical contact 233 is in contact with the end surface of the magnetic core 221 facing the plug 211, and the spherical contact 233 is spherical, so that the outer surface of the spherical contact 233 is spherical and can be in contact with the end surface of the magnetic core 221 facing the plug 211, so that the outer surface of the spherical contact 233 can be in point contact with the end surface of the magnetic core 221 facing the plug 211, so that the spherical contact 233 is in point contact with the magnetic core 221, and the plug 211 is in point contact with the magnetic core 221.
Optionally, a groove for accommodating the connecting pin 232 and a part of the spherical contact 233 may be provided on the end surface of the plug 211 facing the magnetic core 221, two ends of the connecting pin 232 respectively connected with the plug 211 and the spherical contact 233 are both located in the groove, a part of the spherical contact 233 is located in the groove, another part of the spherical contact 233 is located outside the groove, and another part of the spherical contact 233 located outside the groove is used for making point contact with the end surface of the magnetic core 221 facing the plug 211. Such a design can reduce the space occupied by the connection pin 232 and the ball contact 233 in the solenoid valve 2, so that the volume of the solenoid valve 2 itself can be further reduced.
As shown in fig. 5, in a preferred embodiment of the present invention, the plug assembly 21 may further include a first annular spring strip 214, the first annular spring strip 214 is disposed around the plug 211 and is fixedly disposed in the receiving cavity for cooperating with the first boss 213 on the plug 211 to define a position of the plug 211 in the receiving cavity, and the first annular spring strip 214 is elastically deformed when the spool assembly 22 drives the plug 211 to move.
Specifically, as shown in fig. 2 and 5, the first annular spring strip 214 is disposed around the plug 211 and is fixed to the plug 211, and is located between the magnetic seat 212 and the valve port 20, so that the first annular spring strip 214 is fixed to the accommodating cavity through the magnetic seat 212 and the valve port 20. However, the way that the first annular spring piece 214 is fixedly arranged in the accommodating cavity is not limited to this.
When the magnetic core 221 drives the plug 211 to move toward the valve port 202 under the attraction of the magnetic seat 212, the first ring-shaped spring piece 214 generates elastic deformation and has energy generated by the elastic deformation, and when the attraction of the magnetic seat 212 to the magnetic core 221 disappears, the energy generated by the elastic deformation in the first ring-shaped spring piece 214 will restore the first ring-shaped spring piece 214 to the initial state before the elastic deformation is not generated, so as to drive the plug 211 to restore to the initial position before the movement generated by the driving of the magnetic core 221, so as to open the valve port 202, at this time, the fluid can flow out from the valve port 202, and further, the function that the solenoid valve 2 can flow through the fluid is realized. And in the process that the plug 211 is restored to the initial position before being moved by the magnetic core 221, the first boss 213 of the plug 211 can abut against the inner wall of the mounting hole of the magnetic base 212 to limit the plug 211 in the mounting hole of the magnetic base 212, so as to cooperate with the first annular spring piece 214 to limit the position of the plug 211 in the accommodating cavity.
Optionally, the first annular spring 214 and the plug 211 may be connected by welding or bonding. However, the connection manner of the first ring spring 214 and the plug 211 is not limited to this.
As shown in fig. 2 and 5, in a preferred embodiment of the present invention, the solenoid valve 2 further includes an adjustment pad 261, and the adjustment pad 261 is disposed between the plug assembly 21 and the valve port member 20 for adjusting the distance between the plug assembly 21 and the valve port member 20.
Specifically, the adjusting pad 261 is located between the first ring spring plate 214 and the valve port member 20, and the distance between the plug assembly 21 and the valve port member 20 is adjusted by adjusting the thickness of the adjusting pad 261 or adjusting the number of the adjusting pads 261, so as to adjust the distance between the plug 211 and the valve port 202, and thus adjust the flow rate of the fluid that can pass through the solenoid valve 2 according to the actual requirement of the solenoid valve 2.
As shown in fig. 4, in a preferred embodiment of the present invention, the valve core assembly 22 may further include a second annular spring piece 223, the second annular spring piece 223 is disposed around the magnetic core 221 and is fixedly disposed in the receiving cavity for cooperating with the second boss 222 on the magnetic core 221 to define the position of the magnetic core 221 in the receiving cavity, and the second annular spring piece 223 is elastically deformed when the magnetic seat 212 attracts the valve core assembly 22 to move.
Specifically, as shown in fig. 2 and 4, the second annular spring piece 223 surrounds the magnetic core 221, is fixedly disposed with the magnetic core 221, and is located between the baffle ring 243 and the magnetic base 212, so that the second annular spring piece 223 is fixedly disposed in the accommodating cavity through the magnetic base 212 and the baffle ring 243. However, the manner of fixedly disposing the second annular spring piece 223 in the accommodating cavity is not limited thereto.
When the magnetic core 221 moves toward the magnetic base 212 under the attraction of the magnetic base 212, the second annular spring piece 223 generates elastic deformation and has energy generated by the elastic deformation, and when the attraction of the magnetic base 212 to the magnetic core 221 disappears, the energy generated by the elastic deformation in the second annular spring piece 223 will restore the second annular spring piece 223 toward the initial state before the elastic deformation is not generated, so as to drive the magnetic core 221 to restore to the initial position before the movement generated by the attraction of the magnetic base 212, so that the valve port 202 can move toward the direction away from the valve port 202, and the magnetic core 221 is prevented from interfering with the movement of the plug 211, so that the valve port 202 cannot be opened, and the use stability of the solenoid valve 2 is improved. And in the process that the magnetic core 221 is restored to the initial position before the magnetic core is attracted by the magnetic base 212 and moves, the second boss 222 of the magnetic core 221 can be abutted against the lower surface of the baffle ring 243 to limit the magnetic core 221 at the preset position in the accommodating cavity, so that the position of the plug 211 in the accommodating cavity is limited by the second annular spring piece 223 in a matching manner.
Alternatively, the second annular spring piece 223 and the magnetic core 221 may be connected by welding or bonding, but the connection manner of the second annular spring piece 223 and the magnetic core 221 is not limited thereto.
As shown in fig. 2 and 4, in a preferred embodiment of the present invention, the solenoid valve 2 further includes an annular washer 262, and the annular washer 262 is disposed between the plug assembly 21 and the valve core assembly 22 for adjusting the distance between the plug assembly 21 and the valve core assembly 22.
Specifically, the annular washer 262 is located between the second annular spring piece 223 and the magnetic seat 212, and the distance between the choke plug assembly 21 and the valve core assembly 22 is adjusted by adjusting the thickness of the annular washer 262 or adjusting the number of the annular washers 262, so as to adjust the distance between the magnetic core 221 and the choke plug 211. Because the attractive force of the magnetic base 212 to the magnetic core 221 increases with the increase of the distance between the magnetic core 221 and the magnetic base 212 and decreases with the decrease of the distance between the magnetic core 221 and the magnetic base 212, the excessively large distance between the magnetic core 221 and the magnetic base 212 may cause the electromagnetic attractive force of the magnetic base 212 to the magnetic core 221 to be excessively small, so that the displacement of the magnetic core 221 is excessively small, which may cause the displacement of the plug 211 to be excessively small, which is not favorable for the solenoid valve 2 to control the fluid with a large flow rate, and the excessively small distance between the magnetic core 221 and the magnetic base 212 may also cause the displacement of the magnetic core 221 to be excessively small, which may cause the displacement of the plug 211 to be excessively small, which is also not favorable for the solenoid valve 2 to control the fluid with a large flow rate. Therefore, by adjusting the distance between the magnetic core 221 and the magnetic seat 212 by the annular washer 262, the magnetic seat 212 can have a sufficient attraction force to the magnetic core 221 and a sufficiently large displacement amount of the magnetic core 221, thereby improving the control effect of the solenoid valve 2 on a large flow rate of fluid.
As shown in fig. 2 and 4, in a preferred embodiment of the present invention, the valve core assembly 22 further includes a guide tab 224, and the guide tab 224 is disposed on an end of the magnetic core 221 away from the plug 211 and is used for cooperating with a side wall of the receiving cavity to define a moving direction of the valve core assembly 22, so as to further reduce the possibility of the magnetic core 221 moving obliquely, so as to further improve the operational reliability of the solenoid valve 2.
As another technical solution, as shown in fig. 10, the present embodiment further provides a mass flow controller, including the electromagnetic valve 2 provided in the present embodiment.
The quality flow controller that this embodiment provided with the help of the solenoid valve 2 that this embodiment provided to can improve operational reliability, and reduce the assembly degree of difficulty, thereby improve the assembly qualification rate once, reduce the spare part processing degree of difficulty, reduce the processing cost, reduce self volume.
To sum up, the solenoid valve 2 and the mass flow controller provided by the embodiment can improve the working reliability and reduce the assembly difficulty, thereby improving the one-time assembly qualification rate, reducing the part processing difficulty, reducing the processing cost and reducing the volume.
It is to be understood that the above embodiments are merely exemplary embodiments that have been employed to illustrate the principles of the present invention, and that the present invention is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (9)
1. A solenoid valve, comprising: an electromagnetic component, a valve body component, a valve core component, a plug component and a valve port component, wherein,
the valve element assembly, the plug assembly and the valve port component are sequentially superposed in an accommodating cavity of the valve body assembly, the valve element assembly is movably arranged in the accommodating cavity, the plug assembly comprises a magnetic seat, a plug and a first annular spring piece, the magnetic seat is fixedly arranged in the accommodating cavity, the plug is movably arranged in an installation hole of the magnetic seat, the valve element assembly is in point contact with the plug, a valve port is arranged on the end face of the valve port component facing the plug assembly, and the plug and the valve port are oppositely arranged;
the electromagnetic part is used for magnetizing the valve core assembly and the magnetic seat, so that the magnetic seat attracts the valve core assembly to move, further drives the plug to move, and adjusts the distance between the plug and the valve port;
the first annular spring piece is arranged around the plug and fixedly arranged in the accommodating cavity and used for being matched with the first boss on the plug to limit the position of the plug in the accommodating cavity, and the first annular spring piece generates elastic deformation when the valve core assembly drives the plug to move.
2. The electromagnetic valve according to claim 1, wherein the valve core assembly comprises a magnetic core arranged opposite to the plug, the magnetic core can be attracted and moved by the magnetic seat under the magnetization of the electromagnetic member, a contact component protruding towards the plug is arranged on the magnetic core, and the surface of the contact component facing the plug comprises an arc surface capable of being in point contact with the plug,
or the plug is provided with a contact component protruding towards the magnetic core, and the surface of the contact component facing the magnetic core comprises an arc surface capable of being in point contact with the magnetic core.
3. The electromagnetic valve according to claim 2, wherein the contact member includes a connecting pin and a ball contact, the connecting pin having one end connected to the core or the plug and the other end connected to the ball contact.
4. The solenoid valve of claim 2 wherein said contact member is integrally formed on said core or said plug.
5. The electromagnetic valve according to claim 2, wherein the valve core assembly further comprises a second annular spring strip, the second annular spring strip is disposed around the magnetic core and fixedly disposed in the accommodating cavity, and is used for cooperating with a second boss on the magnetic core to limit the position of the magnetic core in the accommodating cavity, and the second annular spring strip is elastically deformed when the magnetic seat attracts the valve core assembly to move.
6. The electromagnetic valve according to claim 2, wherein the valve core assembly further comprises a guide piece, and the guide piece is arranged at one end of the magnetic core away from the plug and is used for cooperating with a side wall of the accommodating cavity to limit the moving direction of the valve core assembly.
7. The solenoid valve according to any one of claims 1-4, further comprising an adjustment pad disposed between the plug assembly and the valve port member for adjusting a distance between the plug assembly and the valve port member.
8. The solenoid valve according to any one of claims 1 to 4, wherein the valve body assembly comprises a valve body magnetic seat, a valve body and a retainer ring, wherein a receiving groove for receiving the valve core assembly is formed in the valve body magnetic seat, the valve body is circumferentially arranged around the valve body magnetic seat, and the peripheral wall of the valve body extends in a direction away from a groove bottom of the receiving groove relative to a notch of the receiving groove, so as to form a receiving space for receiving the plug assembly and the valve port component in the valve body, and the receiving groove and the receiving space constitute the receiving cavity; the baffle ring is arranged around the valve body magnetic seat and positioned between the valve body magnetic seat and the valve body, and is used for insulating the valve body magnetic seat and the valve body.
9. A mass flow controller comprising a solenoid valve according to any one of claims 1 to 8.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010719137.8A CN111853329B (en) | 2020-07-23 | 2020-07-23 | Electromagnetic valve and mass flow controller |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010719137.8A CN111853329B (en) | 2020-07-23 | 2020-07-23 | Electromagnetic valve and mass flow controller |
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| CN111853329A CN111853329A (en) | 2020-10-30 |
| CN111853329B true CN111853329B (en) | 2022-06-03 |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101418872A (en) * | 2008-11-26 | 2009-04-29 | 北京七星华创电子股份有限公司 | Electromagnetical adjusting valve |
| CN201310673Y (en) * | 2008-11-26 | 2009-09-16 | 北京七星华创电子股份有限公司 | All-metal sealing normally-opened electromagnetic regulating valve |
| CN102011885A (en) * | 2010-11-12 | 2011-04-13 | 北京七星华创电子股份有限公司 | Gas mass flow controller with novel normally open valve |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8430378B2 (en) * | 2008-05-30 | 2013-04-30 | South Bend Controls Holdings Llc | High flow proportional valve |
| US20140326909A1 (en) * | 2013-05-01 | 2014-11-06 | Mks Instruments, Inc. | Pressure-balanced control valves |
-
2020
- 2020-07-23 CN CN202010719137.8A patent/CN111853329B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101418872A (en) * | 2008-11-26 | 2009-04-29 | 北京七星华创电子股份有限公司 | Electromagnetical adjusting valve |
| CN201310673Y (en) * | 2008-11-26 | 2009-09-16 | 北京七星华创电子股份有限公司 | All-metal sealing normally-opened electromagnetic regulating valve |
| CN102011885A (en) * | 2010-11-12 | 2011-04-13 | 北京七星华创电子股份有限公司 | Gas mass flow controller with novel normally open valve |
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Address after: 100176 4s01, 4th floor, building 1, No.8 courtyard, Wenchang Avenue, Beijing Economic and Technological Development Zone, Daxing District, Beijing Patentee after: Beijing Huacheng Electronics Co.,Ltd. Country or region after: China Address before: 100176 room 506, building 1, 8 Wenchang Avenue, Beijing Economic and Technological Development Zone, Beijing Patentee before: BEIJING SEVENSTAR FLOW Co.,Ltd. Country or region before: China |
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