CN111769398A - Vacuum-penetrating type high-pressure quick-inserting device - Google Patents
Vacuum-penetrating type high-pressure quick-inserting device Download PDFInfo
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- CN111769398A CN111769398A CN201910237478.9A CN201910237478A CN111769398A CN 111769398 A CN111769398 A CN 111769398A CN 201910237478 A CN201910237478 A CN 201910237478A CN 111769398 A CN111769398 A CN 111769398A
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- 229920002530 polyetherether ketone Polymers 0.000 claims description 16
- JUPQTSLXMOCDHR-UHFFFAOYSA-N benzene-1,4-diol;bis(4-fluorophenyl)methanone Chemical compound OC1=CC=C(O)C=C1.C1=CC(F)=CC=C1C(=O)C1=CC=C(F)C=C1 JUPQTSLXMOCDHR-UHFFFAOYSA-N 0.000 claims description 13
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 9
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/46—Bases; Cases
- H01R13/533—Bases, cases made for use in extreme conditions, e.g. high temperature, radiation, vibration, corrosive environment, pressure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/46—Bases; Cases
- H01R13/52—Dustproof, splashproof, drip-proof, waterproof, or flameproof cases
- H01R13/5202—Sealing means between parts of housing or between housing part and a wall, e.g. sealing rings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/46—Bases; Cases
- H01R13/52—Dustproof, splashproof, drip-proof, waterproof, or flameproof cases
- H01R13/5219—Sealing means between coupling parts, e.g. interfacial seal
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/62—Means for facilitating engagement or disengagement of coupling parts or for holding them in engagement
- H01R13/627—Snap or like fastening
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/648—Protective earth or shield arrangements on coupling devices, e.g. anti-static shielding
- H01R13/658—High frequency shielding arrangements, e.g. against EMI [Electro-Magnetic Interference] or EMP [Electro-Magnetic Pulse]
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- Connector Housings Or Holding Contact Members (AREA)
Abstract
The invention discloses a vacuum-penetrating high-voltage quick-plug device, which comprises a shell, a vacuum chamber and a gas protection chamber which are formed by partition plates in the shell in an interval mode, a conductive and insulating assembly on a socket of the partition plates, a cable connecting end connected to an end opening of the gas protection chamber, a first plug end fixed on the vacuum chamber and a second plug end fixed on a panel of high-voltage equipment in a vacuum environment, wherein the first plug end comprises a first insulating ceramic ring and a small conductor shaft fixed on the ring, the second plug end comprises a second insulating ceramic ring capable of being inserted into the first insulating ceramic ring and a small conductor sleeve penetrating and sleeved with the small conductor shaft, the small conductor shaft is electrically connected with a horizontal conductor shaft in the conductive and insulating assembly, and the horizontal conductor is electrically connected with a cable. The invention has stable electric transmission and high-voltage insulation capability, can carry out long-time process operation, and has simple and convenient operation, safety and reliability.
Description
Technical Field
The invention relates to the technical field of high-voltage electricity, in particular to a vacuum-penetrating high-voltage quick-plug device.
Background
A vacuum-through high-voltage electric connection device (installed between vacuum and non-vacuum environments) is a key component for connecting a high-voltage power supply and process equipment in an argon atmosphere, high-purity argon is a gas medium which is easy to breakdown and discharge and is one of the technical difficulties of high-voltage transmission, and the conventional electric connection device cannot achieve the condition that the voltage is not lower than 2 × 10 after being butted with the process equipment-3The requirement of Pa vacuum magnitude, vacuum tightness and gas isolation capability are low, and the immersion of argon and harmful substances cannot be avoided; in addition, the high-voltage insulation and electric transmission functions of the electric connection device applied to the environment are unstable, and the technical requirements of rated working voltage and current of direct current 30kV and 30A are difficult to meet; besides, the traditional electric connection device also has the problems of complex operation and time and labor waste in disassembly and assembly.
Disclosure of Invention
The invention aims to provide a vacuum-through high-voltage quick plug-in device aiming at the problems that the quick plug-in device in the prior art cannot meet the requirement of 30kV high-voltage transmission and has low vacuum magnitude.
The technical scheme adopted for realizing the purpose of the invention is as follows:
a vacuum-penetrating high-voltage quick-inserting device comprises a shell, a conductive and insulating assembly, a connecting end, a first inserting end and a second inserting end, wherein the shell is internally provided with a vacuum cavity and a gas protection cavity which are formed by separating a partition plate at intervals, the conductive and insulating assembly is fixed on a socket of the partition plate through a sealing and fixing assembly, two ends of the conductive and insulating assembly are respectively positioned in the vacuum cavity and the gas protection cavity, the connecting end is connected to an end opening of the gas protection cavity in a sealing way and is sleeved with a cable used for connecting a power supply in a penetrating way, the first inserting end is fixed on the vacuum cavity, the second inserting end is fixed on a panel of high-voltage equipment in a vacuum environment, a sealing surface corresponding to the panel of the high-voltage equipment in the vacuum environment is formed on the shell, the first inserting end comprises a first insulating ceramic ring and a small conductor shaft fixed on the first insulating ceramic ring, the second inserting end comprises a second insulating ceramic ring which, the small conductor shaft, the horizontal conductor shaft in the conductive and insulating assembly and the cable are electrically connected in sequence.
In the above technical scheme, the number of the connecting ends and the number of the conductive and insulating assemblies are three.
In the above technical solution, the connection end includes a corrugated pipe with an end portion hermetically fixed on the end portion opening, and a gland head which is sleeved in the corrugated pipe and is fixed on the end portion opening through a thread, and a cavity for clamping the cable is formed in the center of the gland head.
In the above technical solution, the housing includes a first housing, a second housing, and a cover plate, the cover plate is detachably and sealingly connected to an installation opening formed at the bottom of the first housing, and the second housing is detachably and sealingly connected to one side of the first housing.
In the above technical solution, the conductive and insulating assembly includes a first insulating ceramic located in the vacuum chamber, a horizontal conductor shaft penetrating and sleeved in the first insulating ceramic, an insulating sleeve having one end inserted into the first insulating ceramic and the other end located in the gas protection chamber, and an electrical connector for electrically connecting the horizontal conductor shaft and the cable.
In the above technical solution, the sealing and fixing assembly includes a spigot formed on the socket, a flange formed at an end of the first insulating ceramic, a sealing gasket pressed between the flange and the spigot, a first positioning plate fixed on the partition plate by a bolt and used for pressing the first insulating ceramic, and a second positioning plate fixed on the partition plate by a bolt and used for pressing the insulating sleeve and the first positioning plate, wherein a tapered hole for inserting the outer wall tapered surface of the insulating sleeve is formed at the center of the first positioning plate, a through hole for the insulating sleeve to pass through is formed at the center of the second positioning plate, and a clamping groove for clamping the outer positioning edge of the insulating sleeve is formed at the inner side of the second positioning plate.
In the above technical scheme, a copper gasket is arranged between the first positioning plate and the flange, and the copper gasket is sleeved outside the insulating sleeve.
In the above technical solution, the electrical connector includes a crimping connector sleeved outside the horizontal conductor shaft and a first strap contact finger electrically connected to the cable, wherein the crimping connector is electrically connected to the first strap contact finger.
In the technical scheme, the end part of the cable is inserted into the insulating sleeve after penetrating and sleeving the end part of the cable in the PEEK rod, the end part of the insulating sleeve is provided with a PEEK end cover in threaded connection with the end part of the insulating sleeve, and the PEEK end cover presses the PEEK rod and the outer flange of the crimping head on the inner positioning table of the insulating sleeve.
In the above technical solution, the small conductor shaft is electrically connected with the small conductor sleeve through the second watchband contact finger.
In the above technical solution, the first inserting end and the second inserting end are connected by a guide mechanism, the guide mechanism includes a small guide pin fixed on the first insulating ceramic ring and a small guide sleeve fixed on the second insulating ceramic ring, and the small guide pin can be inserted into the small guide sleeve in a matching manner.
In the technical scheme, the shell is fixedly provided with a large guide pin which can be inserted into the high-pressure equipment in the vacuum environment in a matching manner.
In the above technical solution, the second insulating ceramic ring is fixed to the vacuum environment high voltage equipment through a stainless steel fixing ring.
Compared with the prior art, the invention has the beneficial effects that:
1. after the high-pressure quick-plug device is in butt joint with process equipment and vacuumized, the high-pressure quick-plug device reaches not less than 2 × 10-3The vacuum magnitude of Pa further passes 50kV direct-current high-voltage 5min non-breakdown test and 30kV transmission verification in argon atmosphere, and long-time process operation examination is completed, and the test and examination states are good.
2. The high-voltage quick-plug device has good internal self-sealing performance and external sealing performance between the quick-plug device and process equipment, has stable electrical transmission and high-voltage insulation capacity, and simultaneously has a plugging mechanism easy and simple to operate.
3. The device can be arranged on vacuum environment high-voltage equipment with different purposes, and has strong applicability.
4. The high-voltage quick-plug device is connected with a good shielding layer, and the use scene of a discharge phenomenon is met.
The 5 high-voltage quick-plugging device is simple and convenient to manufacture and is installed on a power device or a manipulator is used for realizing plugging.
Drawings
FIG. 1 is a cross-sectional view of the present invention (cross-sectional view taken along line A-A in FIG. 2).
Fig. 2 shows a bottom view of the present invention.
Fig. 3 is a cross-sectional view taken along line B-B of fig. 2.
Fig. 4 is a front view of the present invention.
Fig. 5 is a half-sectional view of the present invention.
In the figure: 1-bottom cover plate, 2-horizontal conductor shaft, 3-insulating ceramic A, 4-cover plate sealing O-ring, 5-insulating ceramic A sealing O-ring, 6-PEEK insulating sleeve, 7-gas protection chamber, 8-Glan head, 9-corrugated pipe, 10-watchband contact finger, 11-crimping head, 12-gas protection chamber sealing O-ring, 13-vacuum cavity, 14-insulating ceramic B, 15-small guide sleeve, 16-insulating ceramic C, 17-small guide pin, 18-small conductor shaft, 19-watchband contact finger, 20-small conductor sleeve, 21-stainless steel fixing ring, 22-large guide pin, 23-gas protection chamber 7 end opening, 24-first shell, 25-second shell, 26-cable, 27-sealing surface, 28-PEEK rod, 29-PEEK end cover, 30-first positioning plate, 31-second positioning plate and 32-clapboard.
Detailed Description
The invention is described in further detail below with reference to the figures and specific examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Example 1
A vacuum-penetrating type high-pressure quick-inserting device comprises a shell, a vacuum chamber 13 and a gas protection chamber 7 which are formed by partition plates in the shell at intervals, a conductive and insulating assembly, a connecting end, a first inserting end and a second inserting end, wherein the conductive and insulating assembly is fixed on a socket of the partition plates through a sealing fixing assembly, two ends of the conductive and insulating assembly are respectively positioned in the vacuum chamber 13 and the gas protection chamber 7, the connecting end is connected to an end opening 23 of the gas protection chamber 7 in a sealing mode and is sleeved with a cable 26 used for connecting a power supply, the first inserting end is fixed on the vacuum chamber 13, the second inserting end is fixed on a vacuum environment high-pressure equipment panel, a sealing surface 27 corresponding to an O-shaped ring arranged on the vacuum environment high-pressure equipment panel is formed on the periphery of the first inserting end of the shell, the first inserting end comprises a first insulating ceramic ring 14 and a small, the second plug end comprises a second insulating ceramic ring 16 which can be inserted into the first insulating ceramic ring 14 in a matching mode and a small conductor sleeve 20 which is used for penetrating and sleeving the small conductor shaft 18 to achieve electric connection, the small conductor shaft 18 is electrically connected with the horizontal conductor shaft 2 in the conducting and insulating assembly through a connecting cable, and the horizontal conductor shaft 2 is electrically connected with the cable through an electric connector.
The high-pressure quick-inserting device can be butted with a process equipment panel through the shell, the O-shaped sealing ring is arranged on the high-pressure equipment panel in a vacuum environment, the high-pressure quick-inserting device is vacuumized after sealing is realized, negative pressure is formed inside the device, and the device can be fixed without bolts. Good inside self sealss can be realized to electrically conductive and insulating subassembly through sealed fixed subassembly fixed mounting, and the end can be realized inserting soon with the second end of pegging graft of the first end of pegging graft and the end of pegging graft that matches each other to circuit connection structure can realize stable electrical transmission, has good high voltage insulation ability. The horizontal conductor shaft 2, the small conductor shaft 18, the small conductor housing 20 and the electrical connectors are all treated by silver plating.
Preferably, the number of the connecting ends and the number of the conductive and insulating assemblies are three, and the connecting ends and the conductive and insulating assemblies are respectively used for connecting different electrical devices.
Preferably, the connection end includes a corrugated tube 9 with an end portion hermetically fixed on the end opening 23 and a glan head 8 which is sleeved in the corrugated tube 9 and fixed on the end opening 23 through threads, a cavity for clamping the cable is formed in the center of the glan head 8, wherein the end portion of the corrugated tube 9 is fixed on the end opening 23 through bolts, and a sealing rubber ring is arranged between the end portion of the corrugated tube 9 and the gas protection chamber 7. The sealing rubber ring and the bolt form a sealing fixed connection structure of the corrugated pipe 9. The thread connection forms the sealing and fixing connection structure of the gland head 8. Bellows 9 is made of 316L stainless steel. The bellows 8 forms an external gas seal with the gas-protection chamber 7 by means of a sealing rubber ring. The cable 26 is clamped by the gland head 8 and is simultaneously arranged on the gas protection chamber 7, so that the connection of the shielding layer and the shell is realized, and in addition, the gland head is a standard part, so that the cost is reduced while the use effect is ensured.
Preferably, the housing includes a first housing 24, a second housing 25, and a cover plate 1, the cover plate 1 is detachably and hermetically attached to an attachment opening formed at the bottom of the first housing 24 so that the vacuum chamber 13 is formed in the first housing 24, and the second housing is detachably and hermetically attached to one side of the first housing so that the gas protection chamber 7 is formed. The cover plate 1 is fixed to the mounting opening by bolts, a first O-ring 4 is extruded between the cover plate 1 and the first housing 24, the first O-ring 4 is embedded in a sealing groove in the cover plate, when the cover plate 1 is opened, the vacuum chamber 13 is in an open state, the second housing 25 is fixed to the first housing 24 by bolts, a second O-ring 12 is extruded between the first housing 24 and the second housing 25, the second O-ring 12 is embedded in a sealing groove in the second housing 25, and when the first housing 24 is opened, the gas protection chamber 7 is in an open state. And a good external gas seal is formed by the second O-shaped ring 12 and the bolt, so that the whole shell has good sealing performance and is convenient to disassemble. First casing 24, second casing 25 and apron 1 adopt 316L stainless steel to make, can resist the influence of radiation environment, effectively ensure the performance of inside circular telegram components and parts, have increased reliability and life.
Preferably, the conducting and insulating assembly comprises a first insulating ceramic 3 positioned in the vacuum chamber 13, a horizontal conductor shaft 2 penetrating and sleeved in the first insulating ceramic 3, an insulating sleeve 6 with one end inserted into the first insulating ceramic 3 and the other end positioned in the gas protection chamber 7, and a connector for electrically connecting the horizontal conductor shaft 2 and the cable; wherein the end of the cable is inserted into the insulating sleeve 6 and the tip is connected to the electrical connector. The section of first insulating ceramic 3 is the H type, and insulating sleeve 6 is the PEEK sleeve pipe, penetrates in first insulating ceramic 3's the cavity, on the basis of guaranteeing insulation thickness and mechanical strength, has increased creepage distance effectively, very big improvement insulating ability.
Preferably, the sealing and fixing assembly includes a spigot formed on the socket, a flange formed at an end of the first insulating ceramic 3, a gasket pressed between the flange and the spigot, a first positioning plate 30 fixed on the partition by a bolt for pressing the first insulating ceramic 3, and a second positioning plate 31 fixed on the partition by a bolt for pressing the insulating sleeve 6 and the first positioning plate 30, wherein a tapered hole for inserting the tapered surface of the outer wall of the insulating sleeve 6 is formed at the center of the first positioning plate, a through hole for passing the insulating sleeve 6 is formed at the center of the second positioning plate, and a locking groove for locking the outer positioning edge of the insulating sleeve 6 is formed at the inner side of the second positioning plate. During installation, the first insulating ceramic 3 penetrates through the through hole, the flange is clamped on the spigot, the sealing pad is compressed and deformed to form sealing, the first positioning plate is compressed on the socket, the insulating sleeve 6 is inserted into the conical hole of the first positioning plate, one end of the insulating sleeve is inserted into the first insulating ceramic 3, the second positioning plate penetrates through the insulating sleeve 6, the outer positioning edge of the second positioning plate is compressed, and the second positioning plate is fastened on the partition plate through bolts.
Preferably, a copper gasket 32 is disposed between the first positioning plate and the flange, and the copper gasket 32 is sleeved outside the insulating sleeve 6. Copper washer stainless steel's first locating plate compresses tightly the transition piece of first insulating ceramic 3, prevents that the strength of direct pressure is too big, and first insulating ceramic 3 damages.
Preferably, the electrical connector comprises a crimping connector 11 sleeved outside the horizontal conductor shaft 2 and a first bracelet contact finger 10 electrically connected with the cable, wherein the crimping connector 11 is electrically connected with the first bracelet contact finger 10. The cable passes through the Glan head 8 and the insulating sleeve 6 in sequence, and the cable and the conductor component crimping head 11 are subjected to cold-pressing. The horizontal conductor shaft 2, the first watchband contact finger 10 and the compression joint 11 are obtained by oxygen-free copper and silver plating, and the three are tightly combined, so that the contact resistance is reduced, and the heating is reduced.
Preferably, the end of the cable 26 is inserted into the insulating sleeve 6 after being inserted into the PEEK rod 28, and the end of the insulating sleeve 6 is provided with a PEEK end cap 29 connected with the end by a screw thread, and the PEEK end cap 29 presses the PEEK rod 28 and the outer flange of the crimp head 1 against the inner positioning table of the insulating sleeve 6.
Preferably, the small conductor shaft 18 is electrically connected to the small conductor sleeve 20 via a second strap finger 19. The small conductor shaft 18, the second watchband contact finger 19 and the small conductor sleeve 20 are obtained by oxygen-free copper and silver plating, and are tightly combined, so that the contact resistance is reduced, and the heating is reduced.
Preferably, the first plug end and the second plug end are connected by a guide mechanism, the guide mechanism includes a small guide pin 17 fixed on the first insulating ceramic ring 14 and a small guide sleeve 15 fixed on the second insulating ceramic ring 16, and the small guide pin 17 can be inserted into the small guide sleeve 15 in a matching manner. The arrangement of the guide mechanism enables the first inserting end and the second inserting end to be quickly positioned. The upper end and the lower end of the first insulating ceramic ring 14 and the second insulating ceramic ring 16 are both provided with two concentrically arranged ring walls, so that the first insulating ceramic ring 14 and the second insulating ceramic ring 16 are assembled and then the cavities are superposed to prolong the creepage distance. The small guide sleeve 15 and the small guide pin 1 are arranged to ensure the normal insertion of the small conductor shaft 18 and the small conductor sleeve 20.
Preferably, a large guide pin 22 which can be inserted into the vacuum environment high-pressure equipment in a matching manner is fixedly arranged on the shell. The whole device is ensured to be quickly connected with external process equipment. Such a large guide pin 22 forms a first stage of guidance and the small guide sleeve 15 and the small guide pin 1 form a second stage of guidance.
Preferably, the second insulating ceramic ring 16 is fixed to the vacuum environment high-voltage apparatus by a stainless steel fixing ring 21. The stainless steel fixing ring 21 is made of 316L stainless steel and can resist the influence of radiation environment.
Spatially relative terms, such as "upper," "lower," "left," "right," and the like, may be used in the embodiments for ease of description to describe one element or feature's relationship to another element or feature as illustrated in the figures. It will be understood that the spatial terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary term "lower" can encompass both an upper and a lower orientation. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
Moreover, relational terms such as "first" and "second," and the like, may be used solely to distinguish one element from another element having the same name, without necessarily requiring or implying any actual such relationship or order between such elements.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (13)
1. The vacuum-penetrating high-voltage quick-inserting device is characterized by comprising a shell, a conductive and insulating component, a connecting end, a first inserting end and a second inserting end, wherein the shell is internally provided with a vacuum cavity and a gas protection cavity which are formed by partition plates at intervals, the conductive and insulating component is fixed on a socket of the partition plates through a sealing fixing component, two ends of the conductive and insulating component are respectively positioned in the vacuum cavity and the gas protection cavity, the connecting end is connected to an end opening of the gas protection cavity in a sealing mode and is sleeved with a cable used for connecting a power supply, the first inserting end is fixed on the vacuum cavity, the second inserting end is fixed on a panel of vacuum environment high-voltage equipment, a sealing surface corresponding to the panel of the vacuum environment high-voltage equipment is formed on the shell, the first inserting end comprises a first insulating ceramic ring and a small conductor shaft fixed on the first insulating ceramic ring, and the second inserting end comprises a second insulating ceramic ring which can be inserted into the first insulating And the small conductor shaft, the horizontal conductor shaft in the conductive and insulating component and the cable are electrically connected in sequence.
2. The vacuum-through high-voltage quick-disconnect device of claim 1, wherein there are three of said connection terminals and said conductive and insulating elements.
3. The vacuum-through, high-pressure quick-disconnect device of claim 1, wherein said connection end comprises a bellows having an end portion sealingly secured to said end opening and a gland head threaded within said bellows and threadably secured to said end opening, said gland head defining a cavity centrally therein for gripping said cable.
4. The vacuum-through, high-pressure quick-disconnect device of claim 1, wherein the housing comprises a first housing, a second housing, and a cover plate, the cover plate being removably and sealingly attached to a mounting opening formed in a bottom portion of the first housing, the second housing being removably and sealingly attached to a side of the first housing.
5. The vacuum-through high-voltage quick-plug device according to claim 1, wherein the conductive and insulating assembly comprises a first insulating ceramic located in the vacuum chamber, a horizontal conductor shaft inserted in the first insulating ceramic, an insulating sleeve inserted into the first insulating ceramic at one end and located in the gas protection chamber at the other end, and an electrical connector for electrically connecting the horizontal conductor shaft and the cable.
6. The vacuum-through high-voltage quick-plug device as claimed in claim 1, wherein the sealing and fixing assembly comprises a spigot formed on the socket, a flange formed on an end portion of the first insulating ceramic, a sealing gasket pressed between the flange and the spigot, a first positioning plate fixed on the partition plate through bolts for pressing the first insulating ceramic, and a second positioning plate fixed on the partition plate through bolts for pressing the insulating sleeve and the first positioning plate, wherein the center of the first positioning plate forms a tapered hole for inserting the tapered surface of the outer wall of the insulating sleeve, the center of the second positioning plate forms a through hole for passing the insulating sleeve, and the inner side of the second positioning plate forms a clamping groove for clamping the outer positioning edge of the insulating sleeve.
7. The vacuum-through high-voltage quick-plug device according to claim 6, wherein a copper gasket is arranged between the first positioning plate and the flange, and the copper gasket is sleeved outside the insulating sleeve.
8. The through-vacuum high-voltage quick-plug device according to claim 5, wherein the electrical connector comprises a crimping connector sleeved outside the horizontal conductor shaft and a first strap contact finger electrically connected with the cable, wherein the crimping connector is electrically connected with the first strap contact finger.
9. The vacuum-through high-voltage quick-insertion device according to claim 8, wherein the end of the cable is inserted into the insulating sleeve after being inserted into the PEEK rod, and the end of the insulating sleeve is provided with a PEEK end cap in threaded connection therewith, the PEEK end cap pressing the PEEK rod and the outer flange of the crimp head against the inner positioning table of the insulating sleeve.
10. The through-vacuum high-voltage quick-plug device as claimed in claim 1, wherein the small conductor shaft is electrically connected to the small conductor sleeve through a second strap contact finger.
11. The vacuum-through high-voltage quick-connect assembly according to claim 1, wherein the first plug end and the second plug end are connected by a guide mechanism, the guide mechanism comprising a small guide pin fixed to the first insulating ceramic ring and a small guide sleeve fixed to the second insulating ceramic ring, the small guide pin being fittingly insertable into the small guide sleeve.
12. The vacuum-through high-pressure quick-insertion device according to claim 1, wherein a large guide pin is fixedly arranged on the housing and can be inserted into the vacuum environment high-pressure equipment in a matching manner.
13. The vacuum-through high-voltage quick-connect assembly according to claim 1, wherein the second insulating ceramic ring is secured to the vacuum environment high-voltage equipment by a stainless steel retaining ring.
Priority Applications (1)
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| CN201910237478.9A CN111769398B (en) | 2019-03-27 | 2019-03-27 | Vacuum high-voltage quick-inserting device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114351107A (en) * | 2022-01-06 | 2022-04-15 | 北京北方华创微电子装备有限公司 | Bearing device and semiconductor process equipment |
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| CN111769398B (en) | 2024-08-02 |
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