CN111635231A - A kind of preparation method of polycrystalline diamond transparent ceramics - Google Patents
A kind of preparation method of polycrystalline diamond transparent ceramics Download PDFInfo
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- NIPNSKYNPDTRPC-UHFFFAOYSA-N N-[2-oxo-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 NIPNSKYNPDTRPC-UHFFFAOYSA-N 0.000 description 1
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Abstract
本发明提供了一种多晶金刚石透明陶瓷的制备方法,该方法以金刚石微粉为原料,工艺步骤:(1)原料金刚石微粉的含碳纯度要求大于99%,对于含碳纯度达不到要求的金刚石微粉首先进行除杂处理,然后进行真空热处理,对于含碳纯度符合要求的金刚石微粉,直接进行真空热处理,以去除金刚石微粉表面吸附的氧、氮或水蒸气;(2)将真空热处理后的金刚石微粉装入清洁后的金属箔材预压成型;(3)将金属箔材包裹的型坯在压强10~30GPa、温度1500~3000℃下烧结10~2000s,烧结时间到达后,降压降温至常压室温,然后用无机酸去除金属箔材,即得到多晶金刚石透明陶瓷。本发明为多晶金刚石透明陶瓷的制备提供了一种新的技术方案。
The invention provides a method for preparing polycrystalline diamond transparent ceramics. The method uses diamond micropowder as a raw material. The process steps are as follows: (1) the carbon-containing purity of the raw material diamond micro-powder is required to be greater than 99%. The diamond micropowder is first subjected to impurity removal treatment, and then vacuum heat treatment. For the diamond micropowder with carbon purity that meets the requirements, vacuum heat treatment is directly performed to remove the oxygen, nitrogen or water vapor adsorbed on the surface of the diamond micropowder; (2) After the vacuum heat treatment The diamond fine powder is loaded into the cleaned metal foil for pre-compression molding; (3) The parison wrapped with the metal foil is sintered at a pressure of 10-30 GPa and a temperature of 1500-3000 ℃ for 10-2000s. After the sintering time is reached, the pressure is reduced and the temperature is lowered. to normal pressure and room temperature, and then use inorganic acid to remove the metal foil to obtain polycrystalline diamond transparent ceramics. The invention provides a new technical scheme for the preparation of polycrystalline diamond transparent ceramics.
Description
技术领域technical field
本发明属于多晶金刚石透明陶瓷领域,涉及多晶金刚石透明陶瓷的制备方法。The invention belongs to the field of polycrystalline diamond transparent ceramics, and relates to a preparation method of polycrystalline diamond transparent ceramics.
背景技术Background technique
透明陶瓷根据应用特征可大致分为两类:透光/透波性透明陶瓷和特种光功能特性透明陶瓷,前者以可见光透光或红外透波为主,后者在高功率全固态激光器方面得到体现。相较于普通的光学材料,透明陶瓷既具有陶瓷材料所共有的高熔点、高强度、高绝缘、耐腐蚀、耐高温等性能,又具备良好的透光性,因此可制成多种用途的电-光、电-机军民两用器件。透明陶瓷在国防、空间科学、医学、激光、红外探测、新型光源、检测、勘探等方面具有广阔的应用前景。例如,透明陶瓷常被用于红外检测窗、高压钠光灯管、铂金坩埚的代用品、集成电路的基片、高频绝缘材料、高温透镜、红外元件、平板显示乃至激光材料等民用领域,还被用于新一代武装直升机、装甲车辆等有观瞄窗口的一线作战武器装备,以及导弹整流罩、光电雷达整流罩、红外告警、光电对抗等军事领域。Transparent ceramics can be roughly divided into two categories according to the application characteristics: transparent ceramics with light transmission/wave transmission and transparent ceramics with special optical functional characteristics. reflect. Compared with ordinary optical materials, transparent ceramics not only have the properties of high melting point, high strength, high insulation, corrosion resistance, high temperature resistance, etc. shared by ceramic materials, but also have good light transmittance, so they can be made into a variety of optical materials. Electro-optical, electro-mechanical dual-use devices. Transparent ceramics have broad application prospects in national defense, space science, medicine, laser, infrared detection, new light sources, detection, and exploration. For example, transparent ceramics are often used in infrared detection windows, high-pressure sodium lamps, substitutes for platinum crucibles, substrates for integrated circuits, high-frequency insulating materials, high-temperature lenses, infrared components, flat panel displays, and even laser materials. It is also used in front-line combat weapons and equipment with viewing windows such as a new generation of armed helicopters and armored vehicles, as well as in military fields such as missile fairings, photoelectric radar fairings, infrared warnings, and photoelectric countermeasures.
金刚石为目前已知最硬的材料,同时又兼具高熔点、高导热、高绝缘、高透光率、高折射率、和耐腐蚀等性能,是理想的特种透明陶瓷材料,对国家安全和国民经济可持续发展具有重大意义。金刚石主要分为单晶金刚石和多晶金刚石透明陶瓷,鉴于单晶金刚石各向异性及制备困难等原因,目前研究者们主要致力于多晶金刚石透明陶瓷的制备和应用。多晶金刚石透明陶瓷具有各向同性、硬度高、韧性好、高绝缘、高导热、高可见光透过率、高导波(红外、X射线、中子等)率等优点。现有块体多晶金刚石透明陶瓷制备方法主要为高温高压相变法。Diamond is the hardest material known so far, and at the same time has high melting point, high thermal conductivity, high insulation, high light transmittance, high refractive index, and corrosion resistance. It is an ideal special transparent ceramic material. The sustainable development of the national economy is of great significance. Diamond is mainly divided into single crystal diamond and polycrystalline diamond transparent ceramics. In view of the anisotropy of single crystal diamond and the difficulty of preparation, researchers are mainly devoted to the preparation and application of polycrystalline diamond transparent ceramics. Polycrystalline diamond transparent ceramics have the advantages of isotropy, high hardness, good toughness, high insulation, high thermal conductivity, high visible light transmittance, and high guided wave (infrared, X-ray, neutron, etc.) rates. The existing bulk polycrystalline diamond transparent ceramic preparation method is mainly a high temperature and high pressure phase change method.
高温高压相变法是通过在高温高压极端条件下将石墨或其它非金刚石碳(如碳纳米管、玻璃碳、洋葱碳、石墨烯等)直接转化为金刚石的方法,存在以下问题:(1)高温高压相变法制备多晶金刚石透明陶瓷技术难度极大,成本极高,这是由于烧结过程中,会伴随20%以上的被烧结样品体积塌缩,容易导致高温高压腔体不稳定和压砧(高压设备关键零部件)应力集中,致使技术实施难度极大;同时,压砧应力集中和高温高压腔体不稳定导致的高压腔体密封失效(高压研究领域俗称“放炮”)会严重缩减压砧使用寿命,进而极大的增加生产成本。(2)由于金刚石的高熔点、高再结晶温度的特性,使得高温高压相变法制备的透明多晶金刚石晶粒尺寸难以调控,多为纳米级,这是因为高压相变法制备多晶金刚石透明陶瓷的机理是石墨或其它非金刚石碳的相变,金刚石晶粒形成后烧结温度需要提高至再结晶温度以上才可促使晶粒长大,但现有高温高压实验技术无法达到足够调控晶粒尺寸的温度。(3)由于高温高压相变法烧结过程中被烧结样品存在严重体积塌缩,容易导致高温高压腔体内压力场和温度场不均匀,因而致使所制备的多晶金刚石透明陶瓷块体存在残余应力大、均匀性差等缺陷。The high temperature and high pressure phase change method is a method of directly converting graphite or other non-diamond carbon (such as carbon nanotubes, glassy carbon, onion carbon, graphene, etc.) into diamond under extreme conditions of high temperature and high pressure. There are the following problems: (1) The high temperature and high pressure phase change method to prepare polycrystalline diamond transparent ceramics is extremely difficult and expensive. This is because during the sintering process, more than 20% of the sintered sample volume will collapse, which will easily lead to instability and pressure in the high temperature and high pressure cavity. The stress concentration of the anvil (the key component of high-voltage equipment) makes it extremely difficult to implement the technology; at the same time, the seal failure of the high-pressure cavity caused by the stress concentration of the anvil and the instability of the high-temperature and high-pressure cavity (commonly known as "shooting" in the field of high-pressure research) will be severely reduced The service life of the anvil will greatly increase the production cost. (2) Due to the characteristics of high melting point and high recrystallization temperature of diamond, the grain size of transparent polycrystalline diamond prepared by high temperature and high pressure phase change method is difficult to control, and most of them are nano-scale. This is because polycrystalline diamond is prepared by high pressure phase change method. The mechanism of transparent ceramics is the phase transformation of graphite or other non-diamond carbons. After the formation of diamond grains, the sintering temperature needs to be increased to above the recrystallization temperature to promote grain growth, but the existing high temperature and high pressure experimental technology cannot achieve sufficient control of grains. size temperature. (3) Due to the severe volume collapse of the sintered sample during the sintering process of the high temperature and high pressure phase change method, it is easy to cause uneven pressure field and temperature field in the high temperature and high pressure chamber, resulting in residual stress in the prepared polycrystalline diamond transparent ceramic block. Large, poor uniformity and other defects.
发明内容SUMMARY OF THE INVENTION
本发明的目的在于克服现有技术的不足,提供一种多晶金刚石透明陶瓷的制备方法,以便于调控透明多晶金刚石的晶粒尺寸,并避免烧结时高温高压腔体不稳定和压砧应力集中导致的高压腔体密封失效,或高温高压腔体内压力场和温度场不均匀。The purpose of the present invention is to overcome the deficiencies of the prior art, and to provide a method for preparing polycrystalline diamond transparent ceramics, so as to facilitate the regulation of the crystal grain size of transparent polycrystalline diamond, and to avoid high temperature and high pressure cavity instability and anvil stress during sintering The high-pressure chamber seal fails due to concentration, or the pressure field and temperature field in the high-temperature and high-pressure chamber are uneven.
本发明提供的多晶金刚石透明陶瓷的制备方法,以粒度5nm~100μm金刚石微粉为原料,工艺步骤如下:The preparation method of the polycrystalline diamond transparent ceramic provided by the present invention uses diamond micropowder with a particle size of 5nm to 100μm as a raw material, and the process steps are as follows:
(1)金刚石微粉的预处理(1) Pretreatment of diamond powder
原料金刚石微粉的含碳纯度要求大于99%,对于含碳纯度达不到要求的金刚石微粉首先进行除杂处理,然后进行真空热处理,对于含碳纯度符合要求的金刚石微粉,直接进行真空热处理,以去除金刚石微粉表面吸附的氧、氮或水蒸气;The carbon-containing purity of the raw diamond micropowder is required to be greater than 99%. For the diamond micropowder whose carbon-containing purity does not meet the requirements, the impurity removal treatment is performed first, and then vacuum heat treatment is performed. Remove oxygen, nitrogen or water vapor adsorbed on the surface of diamond powder;
(2)预压成型(2) Pre-press molding
将真空热处理后的金刚石微粉装入清洁后的金属箔材预压成型,所得型坯的密实度应不小于30%;Put the diamond powder after vacuum heat treatment into the cleaned metal foil for pre-compression molding, and the density of the obtained parison should not be less than 30%;
(3)烧结与金属箔材的去除(3) Sintering and removal of metal foil
将金属箔材包裹的型坯放入大腔体静高压装置中,在压强10GPa~30GPa、温度1500℃~3000℃条件下烧结10s~2000s,烧结时间到达后,降压降温至常压室温,然后用无机酸去除金属箔材,即得到多晶金刚石透明陶瓷。Put the metal foil-wrapped parison into a large-cavity static high pressure device, and sinter it for 10s to 2000s under the conditions of a pressure of 10GPa-30GPa and a temperature of 1500℃-3000℃. Then, the metal foil is removed with an inorganic acid to obtain a polycrystalline diamond transparent ceramic.
需要说明的是:烧结时压强与温度的匹配关系是压强高则温度低,即在上述烧结温度和烧结压强的范围内,若选择高的烧结压强,则配以低的烧结温度,若选择低的烧结压强,则配以高的烧结温度(见实施例)。It should be noted that the matching relationship between pressure and temperature during sintering is that the higher the pressure, the lower the temperature, that is, within the range of the above sintering temperature and sintering pressure, if a high sintering pressure is selected, a low sintering temperature is selected. If the sintering pressure is high, it is matched with a high sintering temperature (see example).
上述多晶金刚石透明陶瓷的制备方法,根据所制备的多晶金刚石透明陶瓷的要求,原料金刚石微粉可选用单一粒度或混合粒度的微粉。For the preparation method of the above-mentioned polycrystalline diamond transparent ceramics, according to the requirements of the prepared polycrystalline diamond transparent ceramics, the raw material diamond micropowder can be selected from single particle size or mixed particle size micropowder.
上述多晶金刚石透明陶瓷的制备方法,原料金刚石微粉的制备方法包括爆轰法或冲击法、静高压法、大颗粒金刚石粉碎法和化学气相沉积法,这些方法制备的金刚石微粉均有市售商品,可通过市场购买。其中,化学气相沉积法能得到含碳纯度大于99%的金刚石微粉,其它方法制备的金刚石微粉都达不到含碳纯度大于99%的要求,需要进行除杂处理。The preparation method of above-mentioned polycrystalline diamond transparent ceramics, the preparation method of raw material diamond micropowder includes detonation method or impact method, static high pressure method, large particle diamond pulverization method and chemical vapor deposition method, the diamond micropowder prepared by these methods has commercially available commodities , can be purchased through the market. Among them, the chemical vapor deposition method can obtain diamond micropowder with a carbon purity greater than 99%, and diamond micropowder prepared by other methods cannot meet the requirement of carbon purity greater than 99%, and needs to be treated with impurity removal.
关于金刚石微粉的除杂,可采用酸洗法、电解法或碱洗法中的至少一种方法,本发明中采用的酸洗法操作如下:将金刚石微粉与无机酸按照重量比1∶(2~4)加入净化釜中,在水浴中搅拌加热至60℃~70℃,之后于该温度下继续搅拌至少24h,继后待粉体沉降除去液体并用去离子水洗涤至中性后烘干;所述无机酸为氢氟酸和盐酸中的至少一种,无机酸的质量浓度为20%~40%。About the impurity removal of diamond micropowder, at least one method in pickling method, electrolysis method or alkaline cleaning method can be adopted, and the pickling method adopted in the present invention operates as follows: diamond micropowder and inorganic acid are in a weight ratio of 1:(2 ~4) add it to the purification kettle, stir and heat it in a water bath to 60 ℃ ~ 70 ℃, then continue to stir at this temperature for at least 24 hours, and then wait for the powder to settle to remove the liquid and wash it with deionized water until it becomes neutral and then dry; The inorganic acid is at least one of hydrofluoric acid and hydrochloric acid, and the mass concentration of the inorganic acid is 20%-40%.
上述多晶金刚石透明陶瓷的制备方法,步骤(1)中真空热处理的作用是去除金刚石微粉表面吸附的氧、氮或水蒸气,具体操作为:将含碳纯度符合要求的金刚石微粉于真空度为1×10-1Pa~1×10-5Pa、温度为500℃~1200℃条件下保温0.1h~6h。In the preparation method of the above-mentioned polycrystalline diamond transparent ceramics, the effect of vacuum heat treatment in step (1) is to remove the oxygen, nitrogen or water vapor adsorbed on the surface of the diamond micropowder, and the specific operation is as follows: the diamond micropowder whose carbon-containing purity meets the requirements is subjected to a vacuum degree of 1×10 -1 Pa~1×10 -5 Pa, and the temperature is 500℃~1200℃ for 0.1h~6h.
上述多晶金刚石透明陶瓷的制备方法,步骤(2)中,所采用的金属箔材为钽箔、铼箔或铂箔,使用前需进行清洁处理,清洁处理的操作是:将金属箔材依次进行抛光、去油、超声波清洗、红外烘干。In the preparation method of the above-mentioned polycrystalline diamond transparent ceramics, in step (2), the metal foil material used is tantalum foil, rhenium foil or platinum foil, and needs to be cleaned before use, and the operation of cleaning treatment is: the metal foil material is sequentially Polishing, degreasing, ultrasonic cleaning, infrared drying.
上述多晶金刚石透明陶瓷的制备方法,步骤(2)中,预压成型的压强为400MPa~700MPa,施压时间以所得型坯的密实度确定。In the above-mentioned preparation method of polycrystalline diamond transparent ceramics, in step (2), the pressure of pre-pressing is 400MPa-700MPa, and the pressing time is determined by the compactness of the obtained parison.
经研究发现,升温速率、降温速率、升压速率和降压速率对最终样品的微观结构和宏观性能均有影响,通过调控升温速率、降温速率、升压速率和降压速率可以有效释放应力,减少样品内部微裂纹,提升样品均匀性。本发明中,将压强从常压升至烧结压强的升压速率和将压强从烧结压强降至常压的降压速率为0.5GPa/h~60GPa/h,将温度从室温升至烧结温度的升温速率和将温度从烧结温度降至室温的降温速率为1℃/min~1000℃/min。It has been found that the heating rate, cooling rate, pressure increasing rate and decompression rate have an impact on the microstructure and macroscopic properties of the final sample. By adjusting the heating rate, cooling rate, pressure increasing rate and pressure reducing rate, the stress can be effectively released. Reduce the internal micro-cracks of the sample and improve the uniformity of the sample. In the present invention, the rate of increasing the pressure from normal pressure to sintering pressure and the rate of decreasing the pressure from sintering pressure to normal pressure are 0.5GPa/h~60GPa/h, and the temperature is increased from room temperature to sintering temperature The heating rate and the cooling rate of reducing the temperature from the sintering temperature to room temperature are 1 °C/min ~ 1000 °C/min.
经研究发现,温度和压力两个条件开始加载和开始卸载时间点的选取以及温度和压力共同作用时间也会对最终样品的微观结构和宏观性能产生影响,因此,本发明中升温升压和降温降压的方式如下:It has been found through research that the selection of the time points for starting loading and unloading under the two conditions of temperature and pressure, as well as the combined action time of temperature and pressure, will also have an impact on the microstructure and macroscopic properties of the final sample. The way to lower the pressure is as follows:
先将压强从常压升至烧结压强并保持该烧结压强,再将温度从室温升至烧结温度,烧结时间到达后,先将温度从烧结温度降至室温,再将压强从烧结压强降至常压;First increase the pressure from normal pressure to sintering pressure and keep the sintering pressure, then increase the temperature from room temperature to sintering temperature, after the sintering time is reached, first reduce the temperature from sintering temperature to room temperature, and then reduce the pressure from sintering pressure to sintering temperature normal pressure;
或者先将压强从常压升至烧结压强并保持该烧结压强,再将温度从室温升至烧结温度,烧结时间到达后,同时启动降温、降压,使温度从烧结温度降至室温,使压强从烧结压强降至常压;Or first increase the pressure from normal pressure to sintering pressure and maintain the sintering pressure, and then increase the temperature from room temperature to sintering temperature. The pressure is reduced from sintering pressure to normal pressure;
或者先将压强从常压升至金刚石可稳定存在的压强并保持该压强,然后将温度从室温升至烧结温度,再将压强升至烧结压强,烧结时间到达后,先将温度从烧结温度降至室温,再将压强从烧结压强降至常压;Or first increase the pressure from normal pressure to the pressure where diamond can exist stably and maintain the pressure, then increase the temperature from room temperature to sintering temperature, and then increase the pressure to sintering pressure, after the sintering time arrives, first increase the temperature from the sintering temperature. Drop to room temperature, and then reduce the pressure from sintering pressure to normal pressure;
或者先将压强从常压升至金刚石可稳定存在的压强并保持该压强,然后将温度从室温升至烧结温度,再将压强升至烧结压强,烧结时间到达后,同时启动降温、降压,使温度从烧结温度降至室温,使压强从烧结压强降至常压。Or first increase the pressure from normal pressure to the pressure where diamond can exist stably and maintain the pressure, then increase the temperature from room temperature to the sintering temperature, and then increase the pressure to the sintering pressure. After the sintering time is reached, start cooling and depressurization , reduce the temperature from the sintering temperature to room temperature, and reduce the pressure from the sintering pressure to normal pressure.
上述金刚石可稳定存在的压强与烧结温度有关,关于金刚石可稳定存在的温度、压力区间可参考以下文献资料:The pressure at which the above diamond can exist stably is related to the sintering temperature. For the temperature and pressure range where the diamond can exist stably, please refer to the following literature:
Ghiringhelli L M,Los J H,Meijer E J,et al.Modeling the phase diagramof carbon[J].Physical review letters,2005,94(14):145701.Ghiringhelli L M, Los J H, Meijer E J, et al. Modeling the phase diagram of carbon[J]. Physical review letters, 2005, 94(14): 145701.
Khaliullin R Z,Eshet H,Kühne T D,et al.Graphite-diamond phasecoexistence study employing a neural-network mapping of the ab initiopotential energy surface[J].Physical Review B,2010,81(10):100103.Khaliullin R Z,Eshet H,Kühne T D,et al.Graphite-diamond phasecoexistence study employing a neural-network mapping of the ab initiopotential energy surface[J].Physical Review B,2010,81(10):100103.
上述多晶金刚石透明陶瓷的制备方法,步骤(3)中用于去除包裹材料的无机酸为氢氟酸和硝酸中的至少一种,无机酸的质量浓度为30%~50%。In the preparation method of the above polycrystalline diamond transparent ceramics, the inorganic acid used for removing the wrapping material in step (3) is at least one of hydrofluoric acid and nitric acid, and the mass concentration of the inorganic acid is 30%-50%.
本发明与现有技术相比,具有以下有益效果:Compared with the prior art, the present invention has the following beneficial effects:
(1)本发明所述方法以金刚石微粉为原料,不添加任何非碳成分的烧结助剂,为多晶金刚石透明陶瓷的制备提供了一种新的技术方案。(1) The method of the present invention uses diamond micropowder as a raw material, and does not add any non-carbon sintering aid, which provides a new technical solution for the preparation of polycrystalline diamond transparent ceramics.
(2)由于本发明所述方法以金刚石微粉为原料,在烧结过程中原料不发生相变,且烧结温度和压力的选择不会导致晶粒明显长大,因而便于通过调控原料金刚石微粉的晶粒尺寸来调控所制备的多晶金刚石透明陶瓷的晶粒尺寸。(2) Since the method of the present invention uses the diamond micropowder as the raw material, the raw material does not undergo phase change during the sintering process, and the selection of the sintering temperature and pressure will not cause the crystal grains to grow significantly, so it is convenient to control the crystal grain of the raw diamond micropowder. The grain size of the prepared polycrystalline diamond transparent ceramics can be adjusted by controlling the grain size.
(3)由于本发明所述方法以金刚石微粉为原料,在烧结过程中原料不发生相变,因而烧结时被烧结样品不会发生体积塌缩,有效消除了高温高压腔体不稳定和压砧应力集中的根源,不仅保证了烧结的顺利进行,而且避免了设备损坏导致的制备成本增高。(3) Since the method of the present invention uses diamond micropowder as the raw material, the raw material does not undergo phase change during the sintering process, so the sintered sample will not undergo volume collapse during sintering, which effectively eliminates the instability of the high temperature and high pressure cavity and the anvil. The source of stress concentration not only ensures the smooth progress of sintering, but also avoids the increase of preparation cost caused by equipment damage.
(4)本发明所述方法以金刚石微粉为原料,可使高温高压腔体内压力场和温度场均匀,同时优选了升温升压、降温降压速率和方式,因而所制备的多晶金刚石透明陶瓷块体均匀性好,残余应力小,可获得大尺寸、无裂纹的多晶金刚石透明陶瓷(见实施例)(4) The method of the present invention uses diamond micropowder as a raw material, which can make the pressure field and temperature field in the high temperature and high pressure chamber uniform, and at the same time, the rate and method of temperature increase and pressure increase, temperature drop and pressure drop are optimized, so the prepared polycrystalline diamond transparent ceramics The block uniformity is good, the residual stress is small, and the large-size, crack-free polycrystalline diamond transparent ceramics can be obtained (see examples)
(5)由于本发明所述方法便于调控所制备的多晶金刚石透明陶瓷的晶粒尺寸,因而有利于多晶金刚石透明陶瓷可见光透过率、硬度和韧性的调控,制备多种透光性能(可见光透过率5%-95%)、不同硬度和韧性的多晶金刚石透明陶瓷。(5) Because the method of the present invention is convenient to regulate and control the crystal grain size of the prepared polycrystalline diamond transparent ceramics, it is beneficial to the regulation of the visible light transmittance, hardness and toughness of the polycrystalline diamond transparent ceramics, and prepares a variety of light transmission properties ( Visible light transmittance 5%-95%), polycrystalline diamond transparent ceramics with different hardness and toughness.
(6)本发明所述方法制备的多晶金刚石透明陶瓷,在国防、民用领域均有广泛的应用前景,例如①因其透光、透波性能优异,且兼具高硬度和一定韧性、高导热性、高电绝缘性,可用于制作各种窗口材料;②因其透可见光、高折射率、高耐磨性,具有极高的装饰性和表面抗划、刮的性能,可用于制作高档手表表壳、眼镜等奢侈品;③因其具有超高耐磨性,可用于制作各种刀具,且方便用光学手段检测内部存在的微裂纹等缺陷;④因其优异的透光、透波性能以及高强度、高硬度可用于制备金刚石压砧,替代现有的单晶金刚石压砧,具有使用成本低、尺寸大等优点。(6) The polycrystalline diamond transparent ceramics prepared by the method of the present invention have wide application prospects in the fields of national defense and civil use. Thermal conductivity, high electrical insulation, can be used to make various window materials; ②Because of its transparent visible light, high refractive index, high wear resistance, high decorative and surface scratch and scratch resistance, it can be used to make high-grade Watch cases, glasses and other luxury goods; ③Because of its high wear resistance, it can be used to make various knives, and it is convenient to use optical means to detect internal defects such as micro-cracks; ④Because of its excellent light transmission and wave transmission The performance, high strength and high hardness can be used to prepare a diamond anvil, which can replace the existing single crystal diamond anvil, and has the advantages of low use cost and large size.
附图说明Description of drawings
图1为实施例1制备的多晶金刚石透明陶瓷的光学显微镜照片;Fig. 1 is the optical microscope photograph of the polycrystalline diamond transparent ceramic prepared by embodiment 1;
图2为实施例2制备的多晶金刚石透明陶瓷的光学显微镜照片;Fig. 2 is the optical microscope photo of the polycrystalline diamond transparent ceramics prepared by embodiment 2;
图3为实施例3制备的多晶金刚石透明陶瓷的光学显微镜照片;Fig. 3 is the optical microscope photo of the polycrystalline diamond transparent ceramic prepared by embodiment 3;
图4为实施例4制备的多晶金刚石透明陶瓷的光学显微镜照片;Fig. 4 is the optical microscope photograph of the polycrystalline diamond transparent ceramics prepared in Example 4;
图5为实施例5制备的多晶金刚石透明陶瓷的光学显微镜照片;Fig. 5 is the optical microscope photo of the polycrystalline diamond transparent ceramics prepared in Example 5;
图6为实施例6制备的多晶金刚石透明陶瓷的光学显微镜照片;Fig. 6 is the optical microscope photograph of the polycrystalline diamond transparent ceramics prepared by embodiment 6;
图7为实施例7制备的多晶金刚石透明陶瓷的光学照片;7 is an optical photograph of the polycrystalline diamond transparent ceramic prepared in Example 7;
图8为实施例2制备的多晶金刚石透明陶瓷的X射线衍射图;Fig. 8 is the X-ray diffractogram of the polycrystalline diamond transparent ceramic prepared by embodiment 2;
图9为实施例2制备的多晶金刚石透明陶瓷的拉曼光谱图;Fig. 9 is the Raman spectrogram of the polycrystalline diamond transparent ceramic prepared in Example 2;
图10为实施例2制备的多晶金刚石透明陶瓷的扫描电镜图(放大10000倍);Fig. 10 is the scanning electron microscope picture (magnification 10000 times) of polycrystalline diamond transparent ceramics prepared in Example 2;
图11为实施例4制备的多晶金刚石透明陶瓷的扫描电镜图(放大20000倍)。11 is a scanning electron microscope image of the polycrystalline diamond transparent ceramic prepared in Example 4 (magnified 20,000 times).
具体实施方式Detailed ways
下面通过实施例并结合附图对本发明所述多晶金刚石透明陶瓷的制备方法作进一步说明。显然,所描述实施例仅仅是本发明的一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动的前提下所得到的所有其它实施例,都属于本发明所保护的范围。The preparation method of the polycrystalline diamond transparent ceramics of the present invention will be further described below through examples and in conjunction with the accompanying drawings. Obviously, the described embodiments are only some, but not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present invention.
下述实施例中,大腔体静高压装置为国产铰链式六面顶压机,型号为DS 6×8MN,生产企业:张家口探矿机械厂;所用原料均通过市场购买。In the following examples, the large-cavity static high-pressure device is a domestic hinged six-sided top press, model DS 6×8MN, manufacturer: Zhangjiakou Prospecting Machinery Factory; all raw materials used are purchased from the market.
实施例1Example 1
本实施例制备多晶金刚石透明陶瓷的步骤如下:The steps of preparing polycrystalline diamond transparent ceramics in the present embodiment are as follows:
(1)金刚石微粉的预处理(1) Pretreatment of diamond powder
以市购爆轰法制备的粒度范围为10nm~50nm的单晶金刚石微粉为原料,首先将其进行除杂处理:原料金刚石微粉与氢氟酸(质量浓度为20%)按照重量比1∶3加入净化釜中,在水浴中搅拌加热至60℃,之后于该温度下继续搅拌48h,继后待粉体沉降倒去液体,并用去离子水洗涤至中性,再将水洗后的金刚石微粉与盐酸(质量浓度为25%)按照重量比1∶3加入净化釜中,在水浴中搅拌加热至60℃,之后于该温度下继续搅拌48h,继后待粉体沉降倒去液体,并用去离子水洗涤至中性,重复以上酸溶除杂步骤2次后,将处理后的金刚石微粉烘干;The single crystal diamond micropowder with a particle size range of 10nm to 50nm prepared by a commercially available detonation method is used as a raw material, and firstly, it is subjected to impurity removal treatment: the raw material diamond micropowder and hydrofluoric acid (mass concentration of 20%) are in a weight ratio of 1:3 Add it to the purification kettle, stir and heat it to 60 ℃ in a water bath, and then continue to stir at this temperature for 48 hours, then wait for the powder to settle and pour out the liquid, and wash it with deionized water until it becomes neutral, and then mix the washed diamond micropowder with Hydrochloric acid (mass concentration of 25%) was added to the purification kettle at a weight ratio of 1:3, stirred and heated to 60°C in a water bath, and then continued to stir at this temperature for 48h, and then the powder was settled and the liquid was poured out, and deionized Wash with water until neutral, repeat the above acid-dissolving and impurity-removing steps for 2 times, and dry the treated diamond micropowder;
将烘干后的金刚石微粉于真空度为5×10-4Pa、温度为700℃的条件下处理3h,以去除金刚石微粉表面吸附的氧、氮、水蒸气等杂质;The dried diamond powder was treated for 3 hours under the conditions of vacuum degree of 5×10 -4 Pa and temperature of 700°C to remove impurities such as oxygen, nitrogen and water vapor adsorbed on the surface of the diamond powder;
(2)预压成型(2) Pre-press molding
以钽箔作为包裹材料,先对包裹材料钽箔表面进行常规抛光、去油、超声波清洗、红外烘干;然后,将步骤(1)预处理后的金刚石微粉装入包裹材料钽箔中于500MPa保压1min,进行预压成型,得到密实度为45%的型坯;Using tantalum foil as the wrapping material, conventional polishing, degreasing, ultrasonic cleaning, and infrared drying were performed on the surface of the wrapping material tantalum foil; The pressure is maintained for 1 min, and pre-compression molding is performed to obtain a parison with a compactness of 45%;
(3)烧结与金属箔材的去除(3) Sintering and removal of metal foil
将金属箔材包裹的型坯放入大腔体静高压装置中,在压强15GPa、温度2200℃条件下烧结600s。温度压强加载方式、卸载方式及工艺条件为:以3GPa/h的升压速率升压10GPa后保持压力不变,然后以100℃/min的升温速率升温至2200℃并保持温度不变,之后以20GPa/h的升压速率升压至15GPa后保持压力不变,在15GPa、2200℃的条件下烧结600s,烧结时间到达后同时启动降温、降压,以3℃/min的降温速率将温度降至室温,以1GPa/h的降压速率将压力降至常压。The metal foil-wrapped parison was placed in a large-cavity static high-pressure device, and sintered for 600s at a pressure of 15GPa and a temperature of 2200°C. The temperature and pressure loading method, unloading method and process conditions are as follows: increase the pressure by 10GPa at a pressure increase rate of 3GPa/h and keep the pressure unchanged, then increase the temperature to 2200℃ at a heating rate of 100℃/min and keep the temperature unchanged, and then use After the pressure increase rate of 20GPa/h was increased to 15GPa, the pressure remained unchanged, and sintered at 15GPa and 2200 °C for 600s. After the sintering time was reached, cooling and depressurization were started at the same time, and the temperature was lowered at a cooling rate of 3 °C/min. To room temperature, the pressure was reduced to normal pressure at a depressurization rate of 1 GPa/h.
将所得样品放入质量浓度30%的氢氟酸和质量浓度40%的硝酸组成的混合酸(氢氟酸与硝酸的体积比1:1)中去除包裹材料钽,再用磨片将样品打磨至光亮,即得到多晶金刚石透明陶瓷。Put the obtained sample into a mixed acid composed of hydrofluoric acid with a mass concentration of 30% and nitric acid with a mass concentration of 40% (the volume ratio of hydrofluoric acid and nitric acid is 1:1) to remove the wrapping material tantalum, and then grind the sample with a grinding disc. When it is bright, polycrystalline diamond transparent ceramics are obtained.
实施例2Example 2
本实施例制备多晶金刚石透明陶瓷的步骤如下:The steps of preparing polycrystalline diamond transparent ceramics in the present embodiment are as follows:
(1)金刚石微粉的预处理(1) Pretreatment of diamond powder
以市购爆轰法制备的平均粒度约为500nm的单晶金刚石微粉为原料,首先将其进行除杂处理:原料金刚石微粉与氢氟酸(质量浓度为40%)按照重量比1∶2加入净化釜中,在水浴中搅拌加热至70℃,之后于该温度下继续搅拌72h,继后待粉体沉降倒去液体,并用去离子水洗涤至中性,再将水洗后的金刚石微粉与盐酸(质量浓度为35%)按照重量比1∶2加入净化釜中,在水浴中搅拌加热至70℃,之后于该温度下继续搅拌72h,继后待粉体沉降倒去液体,并用去离子水洗涤至中性,重复以上酸溶除杂步骤3次后,将处理后的金刚石微粉烘干;The single crystal diamond micropowder with an average particle size of about 500nm prepared by a commercially available detonation method is used as a raw material, firstly, it is subjected to impurity removal treatment: the raw material diamond micropowder and hydrofluoric acid (mass concentration of 40%) are added in a weight ratio of 1:2 In the purification kettle, stir and heat in a water bath to 70 ° C, and then continue to stir at this temperature for 72 hours, then wait for the powder to settle and pour out the liquid, and wash with deionized water until neutral, and then wash the diamond powder and hydrochloric acid. (mass concentration is 35%) is added to the purification kettle according to the weight ratio of 1:2, stirred and heated to 70 ° C in a water bath, and then continued to stir at this temperature for 72 h, and then the liquid is poured out after the powder settles, and deionized water is used. Wash to neutrality, repeat the above acid dissolving and impurity removal steps for 3 times, and then dry the treated diamond micropowder;
将烘干后的金刚石微粉于真空度为4×10-3Pa、温度为800℃的条件下处理5h,以去除金刚石表面微粉吸附的氧、氮、水蒸气等杂质;The dried diamond powder was treated for 5 hours under the conditions of vacuum degree of 4×10 -3 Pa and temperature of 800°C to remove impurities such as oxygen, nitrogen and water vapor adsorbed by the diamond surface powder;
(2)预压成型(2) Pre-press molding
以铼箔作为包裹材料,先对包裹材料铼箔表面进行常规抛光、去油、超声波清洗、红外烘干;然后,将步骤(1)预处理后的金刚石微粉装入包裹材料铼箔中于700MPa保压5min,进行预压成型,得到密实度为55%的型坯;Using rhenium foil as the wrapping material, conventional polishing, degreasing, ultrasonic cleaning, and infrared drying were performed on the surface of the wrapping material rhenium foil; then, the pretreated diamond powder in step (1) was loaded into the wrapping material rhenium foil at 700MPa. The pressure is maintained for 5 minutes, and pre-compression molding is performed to obtain a parison with a compactness of 55%;
(3)烧结与金属箔材的去除(3) Sintering and removal of metal foil
将金属箔材包裹的型坯放入大腔体静高压装置中,在压强16GPa、温度2200℃条件下烧结1800s。温度压强加载方式、卸载方式及工艺条件为:以10GPa/h的升压速率升压16GPa后保持压力不变,然后以200℃/min的升温速率升温至2200℃并保温烧结1800s,烧结时间到达后同时启动降温、降压,以1.5℃/min的降温速率将温度降至室温,以0.5GPa/h的降压速率将压力降至常压。The metal foil-wrapped parison was placed in a large-cavity static high-pressure device, and sintered for 1800s at a pressure of 16GPa and a temperature of 2200°C. The temperature and pressure loading method, unloading method and process conditions are as follows: increase the pressure by 16GPa at a pressure increase rate of 10GPa/h and keep the pressure unchanged, then increase the temperature to 2200℃ at a heating rate of 200℃/min and keep sintering for 1800s, and the sintering time reaches After that, the temperature reduction and depressurization were started simultaneously, the temperature was lowered to room temperature at a cooling rate of 1.5°C/min, and the pressure was lowered to normal pressure at a depressurization rate of 0.5GPa/h.
将所得样品放入质量浓度50%硝酸中去除包裹材料铼,再用磨片将样品打磨至光亮,即得到多晶金刚石透明陶瓷。The obtained sample is put into nitric acid with a mass concentration of 50% to remove the wrapping material rhenium, and then the sample is polished to a bright spot with a grinding disc to obtain a polycrystalline diamond transparent ceramic.
实施例3Example 3
本实施例制备多晶金刚石透明陶瓷的步骤如下:The steps of preparing polycrystalline diamond transparent ceramics in the present embodiment are as follows:
(1)金刚石微粉的预处理(1) Pretreatment of diamond powder
以市购爆轰法制备的平均粒度约为500nm的单晶金刚石微粉和市购粉碎大颗粒金刚石法制备的平均粒度约为5μm的单晶金刚石微粉为原料,两者的重量比为1:1,将它们混合均匀后进行除杂处理:原料金刚石微粉与氢氟酸(质量浓度为30%)按照重量比1∶2加入净化釜中,在水浴中搅拌加热至60℃,之后于该温度下继续搅拌48h,继后待粉体沉降倒去液体,并用去离子水洗涤至中性,再将水洗后的金刚石微粉与盐酸(质量浓度为25%)按照重量比1∶2加入净化釜中,在水浴中搅拌加热至60℃,之后于该温度下继续搅拌48h,继后待粉体沉降倒去液体,并用去离子水洗涤至中性,重复以上酸溶除杂步骤4次后,将处理后的金刚石微粉烘干。The single crystal diamond micropowder with an average particle size of about 500nm prepared by the commercially available detonation method and the single crystal diamond micropowder with an average particle size of about 5μm prepared by the commercially available pulverized large-particle diamond method were used as raw materials, and the weight ratio of the two was 1:1. , carry out impurity removal treatment after mixing them uniformly: raw material diamond micropowder and hydrofluoric acid (mass concentration is 30%) are added in purification kettle according to weight ratio 1: 2, stir and heat in water bath to 60 ℃, then at this temperature Continue to stir for 48h, then wait for the powder to settle and pour out the liquid, and wash with deionized water until neutral, and then add the washed diamond micropowder and hydrochloric acid (mass concentration of 25%) into the purification kettle according to a weight ratio of 1:2, Stir and heat in a water bath to 60°C, and then continue to stir at this temperature for 48 hours. Then, after the powder settles, the liquid is poured out, and the liquid is washed with deionized water until neutral. After the diamond powder is dried.
将烘干后的金刚石微粉于真空度为1×10-5Pa、温度为500℃的条件下处理6h,以去除金刚石微粉表面吸附的氧、氮、水蒸气等杂质;The dried diamond powder was treated for 6 hours under the conditions of vacuum degree of 1×10 -5 Pa and temperature of 500°C to remove oxygen, nitrogen, water vapor and other impurities adsorbed on the surface of the diamond powder;
(2)预压成型(2) Pre-press molding
以钽箔作为包裹材料,先对包裹材料钽箔表面进行常规抛光、去油、超声波清洗、红外烘干;然后,将步骤(1)预处理后的金刚石微粉装入包裹材料钽箔中于400MPa保压1min,进行预压成型处理,得到密实度为35%的型坯;Using tantalum foil as the wrapping material, conventional polishing, degreasing, ultrasonic cleaning, and infrared drying were performed on the surface of the wrapping material tantalum foil; The pressure is maintained for 1 min, and the pre-compression molding process is performed to obtain a parison with a compactness of 35%;
(3)烧结与金属箔材的去除(3) Sintering and removal of metal foil
将金属箔材包裹的型坯放入大腔体静高压装置中,在压强16GPa、温度2300℃条件下烧结900s。温度压强加载方式、卸载方式及工艺条件为:以20GPa/h的升压速率升压16GPa后保持压力不变,然后以10℃/min的升温速率升温至2300℃并保温烧结900s,烧结时间结束后先以1000℃/min的降温速率降温至室温,降温结束后以0.5GPa/h的降压速率降压至常压。The metal foil-wrapped parison was placed in a large-cavity static high-pressure device, and sintered for 900s at a pressure of 16GPa and a temperature of 2300°C. The temperature and pressure loading method, unloading method and process conditions are as follows: increase the pressure by 16GPa at a pressure increase rate of 20GPa/h and keep the pressure unchanged, then increase the temperature to 2300℃ at a heating rate of 10℃/min and keep sintering for 900s, and the sintering time ends. Then, the temperature was lowered to room temperature at a cooling rate of 1000°C/min, and then the pressure was lowered to normal pressure at a rate of 0.5GPa/h after the cooling.
将所得样品放入质量浓度40%氢氟酸与质量浓度40%硝酸组成的混合酸(氢氟酸与硝酸的体积比1:1)中去除包裹材料钽,再用磨片将样品打磨至光亮,即得到多晶金刚石透明陶瓷。Put the obtained sample into a mixed acid composed of 40% hydrofluoric acid by mass and 40% nitric acid by mass (the volume ratio of hydrofluoric acid and nitric acid is 1:1) to remove the wrapping material tantalum, and then use a grinding disc to polish the sample to bright , that is, to obtain polycrystalline diamond transparent ceramics.
实施例4Example 4
本实施例制备多晶金刚石透明陶瓷的步骤如下:The steps of preparing polycrystalline diamond transparent ceramics in the present embodiment are as follows:
(1)金刚石微粉的预处理(1) Pretreatment of diamond powder
以市购粉碎大颗粒金刚石法制备的平均粒度约为1μm的单晶金刚石微粉为原料,首先将其进行除杂处理:原料金刚石微粉与氢氟酸(质量浓度为20%)按照重量比1∶3加入净化釜中,在水浴中搅拌加热至60℃,之后于该温度下继续搅拌24h,继后待粉体沉降倒去液体,并用去离子水洗涤至中性,再将水洗后的金刚石微粉与盐酸(质量浓度为25%)按照重量比1∶3加入净化釜中,在水浴中搅拌加热至60℃,之后于该温度下继续搅拌24h,继后待粉体沉降倒去液体,并用去离子水洗涤至中性,重复以上酸溶除杂步骤3次后,将处理后的金刚石微粉烘干;The single crystal diamond micropowder with an average particle size of about 1 μm prepared by the commercially available pulverized large-particle diamond method is used as the raw material, firstly, it is subjected to impurity removal treatment: the raw material diamond micropowder and hydrofluoric acid (mass concentration of 20%) are in a weight ratio of 1: 3 Add it to the purification kettle, stir and heat it to 60°C in a water bath, and then continue to stir at this temperature for 24 hours, then wait for the powder to settle and pour out the liquid, and wash it with deionized water until it becomes neutral, and then wash the diamond micropowder with water. Add hydrochloric acid (mass concentration of 25%) into the purification kettle in a weight ratio of 1:3, stir and heat in a water bath to 60 ° C, then continue to stir at this temperature for 24 hours, and then wait for the powder to settle and pour out the liquid, and use Washing with ionized water until neutral, repeating the above acid-dissolving and impurity-removing steps for 3 times, drying the treated diamond micropowder;
将烘干后的金刚石微粉于真空度为5×10-4Pa、温度为1000℃的条件下处理0.5h,以去除金刚石微粉表面吸附的氧、氮、水蒸气等杂质;The dried diamond powder is treated for 0.5h under the conditions of vacuum degree of 5×10 -4 Pa and temperature of 1000℃ to remove impurities such as oxygen, nitrogen and water vapor adsorbed on the surface of the diamond powder;
(2)预压成型(2) Pre-press molding
以铼箔作为包裹材料,先对包裹材料铼箔表面进行常规抛光、去油、超声波清洗、红外烘干;然后,将步骤(1)预处理后的金刚石微粉装入包裹材料铼箔中于600MPa保压2min,进行预压成型,得到密实度为50%的型坯;Using rhenium foil as the wrapping material, conventional polishing, degreasing, ultrasonic cleaning, and infrared drying were performed on the surface of the wrapping material rhenium foil; then, the pretreated diamond powder in step (1) was loaded into the wrapping material rhenium foil at 600MPa The pressure is maintained for 2 minutes, and pre-compression molding is performed to obtain a parison with a compactness of 50%;
(3)烧结与金属箔材的去除(3) Sintering and removal of metal foil
将金属箔材包裹的型坯放入大腔体静高压装置中,在压强12GPa、温度2800℃条件下烧结10s。温度压强加载方式、卸载方式及工艺条件为:以60GPa/h的升压速率升压12GPa后保持压力不变,然后以500℃/min的升温速率升温至2800℃并保温烧结10s,烧结时间结束后先以1000℃/min的降温速率降温至室温,降温结束10min后以30GPa/h的降压速率降压至常压。The metal foil-wrapped parison was placed in a large-cavity static high-pressure device, and sintered for 10s at a pressure of 12GPa and a temperature of 2800°C. The temperature and pressure loading method, unloading method and process conditions are as follows: increase the pressure by 12GPa at a pressure increase rate of 60GPa/h and keep the pressure unchanged, then increase the temperature to 2800℃ at a heating rate of 500℃/min and keep sintering for 10s, and the sintering time ends. After that, the temperature was lowered to room temperature at a cooling rate of 1000 °C/min, and the pressure was reduced to normal pressure at a pressure reduction rate of 30 GPa/h after 10 min of cooling.
将所得样品放入质量浓度50%氢氟酸中去除包裹材料铼,再用磨片将样品打磨至光亮,即得到多晶金刚石透明陶瓷。The obtained sample is put into hydrofluoric acid with a mass concentration of 50% to remove the wrapping material rhenium, and then the sample is polished with a grinding disc to become bright, thus obtaining a polycrystalline diamond transparent ceramic.
实施例5Example 5
本实施例制备多晶金刚石透明陶瓷的步骤如下:The steps of preparing polycrystalline diamond transparent ceramics in the present embodiment are as follows:
(1)金刚石微粉的预处理(1) Pretreatment of diamond powder
以市购化学气相沉积法制备的平均粒度约为500nm的单晶金刚石微粉为原料,其含碳纯度大于99%,直接将其于真空度为5×10-3Pa、温度为1200℃的条件下处理0.5h,以去除金刚石微粉表面吸附的氧、氮、水蒸气等杂质;The single crystal diamond micropowder with an average particle size of about 500nm prepared by a commercially available chemical vapor deposition method was used as the raw material, and its carbon purity was greater than 99%. Under treatment for 0.5h to remove oxygen, nitrogen, water vapor and other impurities adsorbed on the surface of diamond micro-powder;
(2)预压成型(2) Pre-press molding
以钽箔作为包裹材料,先对包裹材料钽箔表面进行常规抛光、去油、超声波清洗、红外烘干;然后,将步骤(1)预处理后的金刚石微粉装入包裹材料钽箔中于500MPa保压1min,进行预压成型,得到密实度为45%的型坯;Using tantalum foil as the wrapping material, conventional polishing, degreasing, ultrasonic cleaning, and infrared drying were performed on the surface of the wrapping material tantalum foil; The pressure is maintained for 1 min, and pre-compression molding is performed to obtain a parison with a compactness of 45%;
(3)烧结与金属箔材的去除(3) Sintering and removal of metal foil
将金属箔材包裹的型坯放入大腔体静高压装置中,在压强15GPa、温度2300℃条件下烧结300s。温度压强加载方式、卸载方式及工艺条件为:以25GPa/h的升压速率升压15GPa后保持压力不变,然后以500℃/min的升温速率升温至2300℃并保温烧结300s,烧结时间结束后先以20℃/min的降温速率降温至室温,降温结束10min后以3GPa/h的降压速率降压至常压。The metal foil-wrapped parison was placed in a large-cavity static high-pressure device, and sintered for 300s at a pressure of 15GPa and a temperature of 2300°C. The temperature and pressure loading method, unloading method and process conditions are as follows: increase the pressure by 15GPa at a pressure increase rate of 25GPa/h and keep the pressure unchanged, then increase the temperature to 2300℃ at a heating rate of 500℃/min and keep sintering for 300s, and the sintering time ends. Then, the temperature was lowered to room temperature at a cooling rate of 20°C/min, and then reduced to normal pressure at a rate of 3GPa/h after cooling for 10 minutes.
将所得样品放入质量浓度30%氢氟酸和质量浓度30%硝酸组成的混合酸(氢氟酸与硝酸的体积比1:1)中去除包裹材料钽,再用磨片将样品打磨至光亮,即得到多晶金刚石透明陶瓷。Put the obtained sample into a mixed acid composed of 30% hydrofluoric acid and 30% nitric acid by mass (the volume ratio of hydrofluoric acid and nitric acid is 1:1) to remove the wrapping material tantalum, and then use a grinding disc to polish the sample to bright , that is, to obtain polycrystalline diamond transparent ceramics.
实施例6Example 6
本实施例制备多晶金刚石透明陶瓷的步骤如下:The steps of preparing polycrystalline diamond transparent ceramics in the present embodiment are as follows:
(1)金刚石微粉的预处理(1) Pretreatment of diamond powder
以市购静高压法制备的平均粒度约为10μm的单晶金刚石微粉为原料,首先将其进行除杂处理:原料金刚石微粉与氢氟酸(质量浓度为30%)按照重量比1∶4加入净化釜中,在水浴中搅拌加热至60℃,之后于该温度下继续搅拌48h,继后待粉体沉降倒去液体,并用去离子水洗涤至中性,再将水洗后的金刚石微粉与盐酸(质量浓度为35%)按照重量比1∶3加入净化釜中,在水浴中搅拌加热至60℃,之后于该温度下继续搅拌48h,继后待粉体沉降倒去液体,并用去离子水洗涤至中性,重复以上酸溶除杂步骤2次后,将处理后的金刚石微粉烘干。The single crystal diamond micropowder with an average particle size of about 10 μm prepared by a commercially available static high pressure method is used as the raw material, and firstly, it is subjected to impurity removal treatment: the raw material diamond micropowder and hydrofluoric acid (mass concentration of 30%) are added in a weight ratio of 1:4 In the purification kettle, stir and heat in a water bath to 60°C, and then continue to stir at this temperature for 48 hours. Then, after the powder settles, the liquid is poured out, and washed with deionized water until neutral, and then washed with diamond powder and hydrochloric acid. (mass concentration of 35%) was added to the purification kettle according to the weight ratio of 1:3, stirred and heated to 60°C in a water bath, and then continued to stir at this temperature for 48h, then the powder was settled and the liquid was poured out, and deionized water was used. Wash to neutrality, repeat the above acid dissolving and impurity removal steps for 2 times, and then dry the treated diamond micropowder.
将烘干后的金刚石微粉于真空度为5×10-2Pa、温度为900℃的条件下处理1h,以去除金刚石微粉表面吸附的氧、氮、水蒸气等杂质;Treat the dried diamond micropowder for 1 hour under the conditions of vacuum degree of 5×10 -2 Pa and temperature of 900°C to remove impurities such as oxygen, nitrogen and water vapor adsorbed on the surface of the diamond micropowder;
(2)预压成型(2) Pre-press molding
以钽箔作为包裹材料,先对包裹材料钽箔表面进行常规抛光、去油、超声波清洗、红外烘干;然后,将步骤(1)预处理后的金刚石微粉装入包裹材料钽箔中于600MPa保压3min,进行预压成型,得到密实度为52%的型坯;Using tantalum foil as the wrapping material, routine polishing, degreasing, ultrasonic cleaning, and infrared drying were performed on the surface of the wrapping material tantalum foil; Hold the pressure for 3 minutes, carry out pre-compression molding, and obtain a parison with a compactness of 52%;
(3)烧结与金属箔材的去除(3) Sintering and removal of metal foil
将金属箔材包裹的型坯放入大腔体静高压装置中,在压强28GPa、温度1800℃条件下烧结1800s。温度压强加载方式、卸载方式及工艺条件为:以6GPa/h的升压速率升压22GPa后保持压力不变,然后以50℃/min的升温速率升温至1800℃并保持温度不变,之后以20GPa/h的升压速率升压至28GPa后保持压力不变,保持28GPa、1800℃的压强温度条件烧结1800s,烧结时间到达后,先以250℃/min的降温速率降温至室温,降温结束后以1GPa/h的降压速率降压至常压。The metal foil-wrapped parison was placed in a large-cavity static high-pressure device, and sintered for 1800s at a pressure of 28GPa and a temperature of 1800°C. The temperature and pressure loading method, unloading method and process conditions are as follows: increase the pressure to 22GPa at a pressure increase rate of 6GPa/h and keep the pressure unchanged, then increase the temperature to 1800℃ at a heating rate of 50℃/min and keep the temperature unchanged, and then use After the pressure increase rate of 20GPa/h is increased to 28GPa, the pressure remains unchanged, and the pressure and temperature conditions of 28GPa and 1800℃ are maintained for sintering for 1800s. Depressurize to normal pressure at a depressurization rate of 1GPa/h.
将所得样品放入质量浓度30%氢氟酸与质量浓度40%硝酸组成的混合酸(氢氟酸与硝酸的体积比1:1)中去除包裹材料钽,再用磨片将样品打磨至光亮,即得到多晶金刚石透明陶瓷。Put the obtained sample into a mixed acid composed of 30% hydrofluoric acid by mass and 40% nitric acid by mass (the volume ratio of hydrofluoric acid and nitric acid is 1:1) to remove the wrapping material tantalum, and then use a grinding disc to polish the sample to bright , that is, to obtain polycrystalline diamond transparent ceramics.
实施例7Example 7
本实施例制备多晶金刚石透明陶瓷的步骤如下:The steps of preparing polycrystalline diamond transparent ceramics in the present embodiment are as follows:
(1)金刚石微粉的预处理(1) Pretreatment of diamond powder
以市购静高压法制备的平均粒度约为50μm的单晶金刚石微粉为原料,首先将其进行除杂处理:原料金刚石微粉与氢氟酸(质量浓度为20%)按照重量比1∶3加入净化釜中,在水浴中搅拌加热至60℃,之后于该温度下继续搅拌48h,继后待粉体沉降倒去液体,并用去离子水洗涤至中性,再将水洗后的金刚石微粉与盐酸(质量浓度为25%)按照重量比1∶3加入净化釜中,在水浴中搅拌加热至60℃,之后于该温度下继续搅拌48h,继后待粉体沉降倒去液体,并用去离子水洗涤至中性,重复以上酸溶除杂步骤3次后,将处理后的金刚石微粉烘干。The single crystal diamond micropowder with an average particle size of about 50 μm prepared by a commercially available static high pressure method was used as the raw material, and firstly, it was subjected to impurity removal treatment: the raw material diamond micropowder and hydrofluoric acid (mass concentration of 20%) were added in a weight ratio of 1:3 In the purification kettle, stir and heat in a water bath to 60°C, and then continue to stir at this temperature for 48 hours. Then, after the powder settles, the liquid is poured out, and washed with deionized water until neutral, and then washed with diamond powder and hydrochloric acid. (mass concentration of 25%) was added to the purification kettle according to the weight ratio of 1:3, heated to 60°C with stirring in a water bath, and then continued to stir for 48h at this temperature, and then the powder was settled and the liquid was poured out, and deionized water was used. Wash to neutrality, repeat the above acid dissolving and impurity removal steps 3 times, and then dry the treated diamond micropowder.
将烘干后的金刚石微粉于真空度为5×10-2Pa、温度为800℃的条件下处理3h,以去除金刚石微粉表面吸附的氧、氮、水蒸气等杂质;The dried diamond powder was treated for 3 hours under the conditions of vacuum degree of 5×10 -2 Pa and temperature of 800°C to remove oxygen, nitrogen, water vapor and other impurities adsorbed on the surface of the diamond powder;
(2)预压成型(2) Pre-press molding
以钽箔作为包裹材料,先对包裹材料钽箔表面进行常规抛光、去油、超声波清洗、红外烘干;然后,将步骤(1)预处理后的金刚石微粉装入包裹材料钽箔中于500MPa保压1min,进行预压成型,得到密实度为45%的型坯;Using tantalum foil as the wrapping material, conventional polishing, degreasing, ultrasonic cleaning, and infrared drying were performed on the surface of the wrapping material tantalum foil; The pressure is maintained for 1 min, and pre-compression molding is performed to obtain a parison with a compactness of 45%;
(3)烧结与金属箔材的去除(3) Sintering and removal of metal foil
将金属箔材包裹的型坯放入大腔体静高压装置中,在压强15GPa、温度2000℃条件下烧结1800s。温度压强加载方式、卸载方式及工艺条件为:以3GPa/h的升压速率升压15GPa后保持压力不变,然后以100℃/min的升温速率升温至2000℃并保温烧结1800s,烧结时间结束后先以4℃/min的降温速率降温至室温,降温结束后以1GPa/h的降压速率降压至常压。The metal foil-wrapped parison was placed in a large-cavity static high-pressure device, and sintered for 1800s at a pressure of 15GPa and a temperature of 2000°C. The temperature and pressure loading method, unloading method and process conditions are as follows: increase the pressure by 15GPa at a pressure increase rate of 3GPa/h and keep the pressure unchanged, then increase the temperature to 2000℃ at a heating rate of 100℃/min and keep sintering for 1800s, and the sintering time ends. Then, the temperature was lowered to room temperature at a cooling rate of 4 °C/min, and then the pressure was lowered to normal pressure at a depressurization rate of 1 GPa/h after the cooling.
将所得样品放入质量浓度30%氢氟酸和质量浓度30%硝酸组成的混合酸(氢氟酸与硝酸的体积比1:1)中去除包裹材料钽,再用磨片将样品打磨至光亮,即得到多晶金刚石透明陶瓷。Put the obtained sample into a mixed acid composed of 30% hydrofluoric acid and 30% nitric acid by mass (the volume ratio of hydrofluoric acid and nitric acid is 1:1) to remove the wrapping material tantalum, and then use a grinding disc to polish the sample to bright , that is, to obtain polycrystalline diamond transparent ceramics.
以下对实施例所制备的多晶金刚石透明陶瓷结构进行分析。The structure of the polycrystalline diamond transparent ceramics prepared in the examples is analyzed below.
▲通过光学显微镜采集实施例1-6制备的多晶金刚石透明陶瓷样品的光学显微照片(见图1-6)并进行透光性能评估,采集实施例7制备的多晶金刚石透明陶瓷样品的光学照片(见图7)并进行透光性能评估,透光性能评估见表1。对实施例1-7制备的多晶金刚石透明陶瓷样品直径、高度进行统计,结果如表1所示。▲The optical micrographs of the polycrystalline diamond transparent ceramic samples prepared in Example 1-6 were collected by an optical microscope (see Figure 1-6) and the light transmission performance was evaluated, and the polycrystalline diamond transparent ceramic samples prepared in Example 7 were collected. Optical photos (see Figure 7) and evaluation of light transmission performance, see Table 1 for evaluation of light transmission performance. The diameter and height of the polycrystalline diamond transparent ceramic samples prepared in Examples 1-7 were counted, and the results are shown in Table 1.
表1多晶金刚石透明陶瓷样品尺寸及可见光透光性测试结果Table 1 Size and visible light transmittance test results of polycrystalline diamond transparent ceramic samples
从表1中可以看出,本发明所述方法可制备出不同透光性的大尺寸块状多晶金刚石透明陶瓷。As can be seen from Table 1, the method of the present invention can prepare large-sized bulk polycrystalline diamond transparent ceramics with different light transmittances.
▲对实施例1-7制备的多晶金刚石透明陶瓷样品进行X射线衍射测试和拉曼光谱测试,其中实施例2所对应的X射线衍射谱图如图8所示,拉曼光谱图如图9所示,测试结果表明,通过本发明提供的制备方法得到的多晶金刚石透明陶瓷样品只具有金刚石相。▲X-ray diffraction test and Raman spectrum test were performed on the polycrystalline diamond transparent ceramic samples prepared in Examples 1-7, wherein the X-ray diffraction spectrum corresponding to Example 2 is shown in Figure 8, and the Raman spectrum is shown in Figure 8 9, the test results show that the polycrystalline diamond transparent ceramic sample obtained by the preparation method provided by the present invention only has a diamond phase.
▲对实施例1-7制备的多晶金刚石透明陶瓷样品进行扫描电镜测试,其中实施例2和实施例4所对应的扫描电镜图如图10和图11所示,测试结果表明,通过本发明制备方法得到的多晶金刚石透明陶瓷样品致密性高,晶粒尺寸与原料粉末粒度基本一致,金刚石晶粒与晶粒之间形成大面积紧密结合的高强度金刚石-金刚石键合界面。▲Scanning electron microscope test was carried out on the polycrystalline diamond transparent ceramic samples prepared in Examples 1-7, wherein the scanning electron microscope images corresponding to Example 2 and Example 4 are shown in Figure 10 and Figure 11. The test results show that through the present invention The polycrystalline diamond transparent ceramic sample obtained by the preparation method has high compactness, the grain size is basically the same as that of the raw material powder, and a large-area and tightly bonded high-strength diamond-diamond bonding interface is formed between the diamond grains.
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