CN111595238B - Laser tracker precision field evaluation system based on multi-station method - Google Patents
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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Abstract
The invention discloses a multi-station method-based laser tracker precision field evaluation system, which comprises the following steps: the device comprises a measuring point motion driving device, a plurality of laser trackers and a precision evaluation and calculation device; the laser tracker tracks and measures the measurement coordinates of all target points on the measurement point motion driving equipment under a laser tracker coordinate system B and the absolute measurement distance from the laser tracker to the target points; the precision evaluation calculating device calculates a first space position coordinate of a target point under a measuring point motion driving device coordinate system A according to an absolute measuring distance from a laser tracker to the target point, then performs coordinate conversion to obtain a second space position coordinate under a coordinate system B, then calculates a difference value between the measuring coordinate of the target point and the second space position coordinate, and obtains laser tracker angle measurement and length measurement precision evaluation by a probability statistical method.
Description
Technical Field
The invention relates to the field of precision detection and calibration of laser trackers, in particular to a multi-station method-based precision field evaluation system of a laser tracker.
Background
The laser tracker is an important large-size space measurement reference, and has wide application in the aspects of geometric quantity detection, assembly and intelligent manufacturing equipment of large-size parts. The laser tracker error has a large impact on the measurement results, especially in the device/three-coordinate space precision detection process. Therefore, the accuracy of the laser tracker needs to be evaluated to provide a reference for its high accuracy measurement.
In the detection process of the intelligent manufacturing equipment, the precision of the laser tracker has great influence on the detection of the space precision of the laser tracker, especially the angle precision of the laser tracker. Therefore, the realization of the field evaluation of the measurement accuracy of the laser tracker in the detection process of the intelligent manufacturing equipment has important significance. The common precision evaluation method of the laser tracker mainly comprises the steps of placing high-precision standard rulers at different positions in space, measuring the lengths of two ends of the standard rulers by using the tracker, and carrying out comprehensive evaluation on the performance of the laser tracker. Or the laser interferometer is used as a comparison reference to calibrate the length measurement indicating value error of the laser tracker. Or the calibration method of the tracking measurement system by using the three-coordinate measuring machine needs additional detection equipment, has higher requirement on the precision of the three-coordinate measuring machine, and is not suitable for field measurement. In addition, the method for detecting the intelligent manufacturing equipment by using the laser tracker mostly needs self-calibration, so that the measurement precision of the spatial position coordinates is low, and the accurate field evaluation of the precision of the laser tracker cannot be carried out. The methods all need extra high-precision calibration equipment, need to evaluate the precision of the laser tracker under laboratory conditions, and are high in cost and long in time consumption. In addition, the existing method for detecting the space precision of the intelligent manufacturing equipment by using the tracker has low precision and is not suitable for the precision field evaluation of the laser tracker in the equipment precision detection process.
Therefore, there is an urgent need for a method for on-site evaluation of the accuracy of a laser tracker during the detection of the accuracy of a device, which ensures confirmation of the performance of the laser tracker and confirmation of the reliability of the detection result of the accuracy of the device before the detection of the accuracy of the device.
Disclosure of Invention
In order to solve the technical problems, the invention provides a multi-station method-based laser tracker precision field evaluation system, which improves the high-precision measurement of the space precision of intelligent manufacturing equipment and realizes the field evaluation of the laser tracker precision.
The invention is realized by the following technical scheme:
the invention provides a multi-station method-based laser tracker precision field evaluation system, which comprises the following steps: the device comprises a measuring point motion driving device, a plurality of laser trackers and a precision evaluation and calculation device; the measuring point motion driving device is provided with a coordinate system A, and the laser tracker is provided with a coordinate system B;
the laser tracker tracks and measures the measurement coordinates of each target point on the measurement point motion driving equipment under a coordinate system B and the absolute measurement distance from the laser tracker to the target point; the precision evaluation calculation device calculates a first spatial position coordinate of a target point under a coordinate system A according to the absolute measurement distance from the laser tracker to the target point; and the precision evaluation calculation device performs coordinate conversion on the first space position coordinate to obtain a second space position coordinate under a coordinate system B, calculates the difference value between the measurement coordinate of the target point and the second space position coordinate, and obtains the evaluation of the angle measurement precision and the length measurement precision of the laser tracker by combining a probability statistical method.
Further, the accuracy evaluation calculation device includes: the device comprises a data acquisition device, a first calculation device, a first conversion device, a second calculation device and an evaluation device;
the data acquisition device is used for acquiring the position coordinates of the laser tracker, the absolute measurement distance from the laser tracker to a target point and the measurement coordinates of the target point;
the first calculation device establishes a nonlinear equation set based on the position coordinates of the laser tracker and the absolute measurement distance from the laser tracker to a target point; the first calculation device solves the nonlinear equation set by using a nonlinear least square method according to the constraint condition of the target point to calculate a first space position coordinate of the target point under the coordinate system A;
the first conversion device performs coordinate transformation on the first spatial position coordinate of the target point under the coordinate system A to obtain a second spatial position coordinate under the coordinate system B;
the second calculation device converts the measurement coordinates and the second spatial position coordinates of the target point into measurement spherical coordinates and second spatial position spherical coordinates under a spherical coordinate system, and calculates a difference value between the measurement spherical coordinates and the second spatial position spherical coordinates;
and the evaluation device compares the difference value between the measurement spherical coordinate and the second spatial position spherical coordinate with the reference accuracy value according to the probability and a statistical method to obtain the angle measurement and length measurement accuracy evaluation of the laser tracker.
The reference precision value is generally the precision result of the laser tracker in the factory or the recent detection calibration at the corresponding angle and length.
The further optimization scheme is that a plurality of laser trackers cannot be in one plane at the same time, and the selected target points cannot be in one plane at the same time.
The further optimization scheme is that the number of the target points is at least 3 times of the number of the laser trackers.
The further optimization scheme is that when the number of the laser trackers or the number of the positions is 4, the arrangement mode of target points is as follows: the target points are arranged on 8 vertexes and the center of the cube respectively, and the target points are arranged on the left side and the right side of any two diagonal lines of the cube by taking the center of the cube as a midpoint respectively.
The further optimization scheme is that the constraint conditions of the target points are as follows: the first spatial location coordinates of all target points are at a minimum sum of their theoretical spatial location coordinate distances.
The further optimization scheme is that when the nonlinear equation set is solved by using a nonlinear least square method, the initial coordinate value of each target point uses the theoretical spatial position coordinate in the iteration process.
The further optimization scheme is that the coordinate transformation comprises the following steps: coordinate translation transformation and coordinate rotation transformation.
The further optimization scheme is that the height of the laser tracker is adjustable.
The further optimization scheme is that the measuring point motion driving device is provided with a module moving in the direction of a Cartesian coordinate system: the first moving module moves in the direction of the Z coordinate axis, the second moving module moves in the direction of the X coordinate axis, and the third moving module moves in the direction of the Y coordinate axis; the first moving module, the second moving module and the third moving module realize the transformation of the position of the target point, and the measuring point motion driving equipment acquires the theoretical space position coordinates of each target point.
The field evaluation method for the precision of the laser tracker based on the multi-station method comprises the following measurement and evaluation steps:
(a) the laser tracker is sequentially placed on a measuring point motion driving device (with a theoretical coordinate system A), and the position coordinate L of the laser tracker under the coordinate system A is recordedTi(X1i,Y1i,Z1i) And i is 1,2,3 … n, the measuring point motion driving device is controlled to move to each target point, and the first space position coordinate (X) under the coordinate system A is directly determined by using a nonlinear least square method according to the absolute measuring distance from the laser tracker to the target point measured by the laser tracker and the constraint condition of the target point2j,Y2j,Z2j),j=1,2,3…m;
(b) Performing the first space position coordinates of the measuring point under the coordinate system A (the coordinate system of the measuring point motion driving equipment) and the measuring coordinates (X) of each target point under the coordinate system of the laser tracker (the coordinate system B)3j,Y3j,Z3j) To obtain a second spatial position coordinate (X) in a coordinate system (coordinate system B) of a single-station laser tracker (laser tracker to be measured)4j,Y4j,Z4j);
(c) Using second spatial position coordinates (X)4j,Y4j,Z4j) Spherical coordinates (p)1j,θ1j,φ1j) The measured coordinate (X) of the target point is obtained by measuring with the laser tracker3j,Y3j,Z3j) Spherical coordinates (p)2j,θ2j,φ2j) The difference value of (3) can be combined with probability and statistical method to realize the field evaluation of the angle measurement and length measurement precision of the laser tracker.
Specifically, in the step (a), the laser tracker is placed at n or more than 4 equipment positions, a nonlinear equation set is formed based on a two-point distance formula between the laser tracker and a target point and an absolute measurement distance length obtained by measurement of the laser tracker, and a solving formula is as follows:
wherein lijThe absolute measured distance from the jth target point measured for the ith laser tracker.
Further, to implement direct solution under the coordinate system a (coordinate system of the measurement point motion driving apparatus), when the solution is performed using the nonlinear least square method, the following constraints exist for the target points in the equation set:
wherein,is an iterative initial value of the space position coordinate of the target point under a coordinate system A (a coordinate system of the motion driving equipment of the measuring point).
Furthermore, in the iterative solution process, the measurement point motion driving device must have a theoretical coordinate position, and the theoretical spatial position coordinate (coordinate system a) of the target point is known, and the initial value of the target point coordinate in the iterative process by using the nonlinear least square method must be selected as the theoretical spatial position coordinate in the coordinate system a.
Further, to solve the system of equations, the laser tracker positions are not in the same plane, and the target points cannot be on or near a straight line or in a plane.
Furthermore, when the number of the positions of the laser trackers is 4, the number of the measuring points is more than or equal to 12. An ideal target point arrangement mode is that 8 vertexes of a cube are additionally provided with a plurality of different position points inside the cube, and the target points cover the angle and length measuring range of a laser tracker in the precision detection process of a measuring point motion driving device.
Specifically, in the step (2), the spatial coordinates are realized by coordinate translation and rotation transformation, so that the target point is converted from a coordinate system A (coordinate system of motion driving equipment of a measuring point) to coordinates of a certain base station of the laser tracker under the coordinate system, and the realization mode is a solving formula:
where R is a 3 × 3 coordinate rotation matrix and T is a 3 × 1 translation matrix.
Further, by using the solved rotation and translation matrix, the coordinates of the target point in the coordinate system a (coordinate system B) of the laser tracker coordinate system are:
[X4j Y4j Z4j]T=(R[X2j Y2j Z2j]T-T)
specifically, in the step (3), a conversion formula between the rectangular coordinate and the spherical coordinate is as follows:
θ1j=arctan(Y4j/X4j)
the method comprises the steps of detecting the same target point at different positions based on a laser tracker, establishing an equation set by using the length value of the absolute measurement distance from the laser tracker to the target point obtained by measurement of the tracker, and solving a first space position coordinate under a coordinate system A by using a nonlinear least square method in combination with constraint conditions among the target points; the conversion under a tracker coordinate system (coordinate system B) and the parameter solving under a ball coordinate system are realized by utilizing the rotation and translation transformation of the measured first space position coordinate under the coordinate system A, the length and angle difference is compared with the ball coordinate measured under the self coordinate system B by the laser tracker, the length measuring precision and the angle measuring precision of the laser tracker can be obtained by combining the probability and a statistical method, and the field evaluation of the precision of the laser tracker is realized. Compared with the precision evaluation and calibration method of the conventional laser tracking measurement system, the laser tracker precision field evaluation method in the intelligent manufacturing equipment space precision detection process does not need additional auxiliary equipment, is low in detection cost, and has higher usability and field practicability.
Furthermore, the constraint conditions among the target points are utilized to realize the direct solution of the target points under the coordinate system of the motion driving equipment of the measuring points, thereby avoiding the conventional self-calibration method in the equipment precision detection process by utilizing the laser tracker and improving the overall measurement precision;
furthermore, the method used by the invention can be used as a pre-experiment for detecting the space precision of the intelligent manufacturing equipment to confirm the precision of the laser tracker; the method can also be used as a post-verification processing method after the equipment precision detection, the credibility of the equipment or the precision detection result is verified, and more precision information about the equipment and the laser tracker can be obtained.
Furthermore, the device coordinate measuring points are used for confirming the field accuracy of the laser tracker, and the experiment is performed on the three-axis numerical control machine tool as the spatial accuracy detection experiment only in 5 minutes, so that the device has higher measuring speed.
Compared with the prior art, the invention has the following advantages and beneficial effects:
1. the multi-station method-based laser tracker precision field evaluation system provided by the invention can improve the detection precision of the precision of intelligent manufacturing equipment, has the advantages of high measurement speed, low cost and the like in the laser tracker precision field evaluation, and has higher field practicability and operability in the measurement point motion driving equipment with a theoretical coordinate position or the three-coordinate space precision detection process;
2. the multi-station method-based laser tracker precision field evaluation system provided by the invention can be used as a pre-experiment for detecting the space precision of intelligent manufacturing equipment to confirm the precision of the laser tracker; the method can also be used as a post-verification processing method after the equipment precision detection, the credibility of the equipment or the precision detection result is verified, and more precision information about the equipment and the laser tracker can be obtained;
3. according to the multi-station method-based laser tracker precision field evaluation system, the constraint conditions among the measurement points are utilized to realize the direct solving of the measurement points under the measurement point motion driving equipment coordinate system, the self-calibration method commonly used in the equipment precision detection process by utilizing the laser tracker at present is avoided, and the overall measurement precision can be improved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention.
In the drawings:
FIG. 1 is a block diagram of the present invention;
FIG. 2 is a layout diagram of laser tracker precision field measurement;
FIG. 3 is a schematic view of a layout of measurement points;
FIG. 4 is a schematic diagram of a spherical coordinate system of the laser tracker in an embodiment.
Reference numbers and corresponding part names in FIG. 1:
1-device with theoretical coordinate position (three coordinate measuring machine), 2-laser tracker, 3-target ball R, 4-LT1Laser tracker, 5-measuring point location on cube, 6-workbench.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to examples and accompanying drawings, and the exemplary embodiments and descriptions thereof are only used for explaining the present invention and are not meant to limit the present invention.
As shown in figure 1, the laser tracker precision field evaluation system based on the multi-station method mainly comprises two parts, namely a laser tracker precision field measurement scheme and a laser tracker precision field data processing and evaluation scheme.
First, laser tracker precision field measurement scheme
In the measurement, as shown in fig. 1, the laser tracker is placed at 4 positions LTi (i is 1,2,3,4) where the stages are not coplanar, and the measurement trajectory is the same for each position (the laser tracker may be placed at least 4 different positions for measurement, respectively). As shown in fig. 2, the target ball R3 is mounted on the Z-axis end face of the three-coordinate measuring machine 1, the spatial trajectory of the target ball R3 is set as 8 vertices of the cube and 5 internal spatial position points (i.e., 12 target point positions 5), and the theoretical point coordinates of the 8 vertices of the cube and the 5 internal spatial position points are recorded as the initial values of the coordinates of the measurement points in the iterative solution process of the nonlinear least square method; the target point covers the angular range and the length range used by the laser tracker in the measurement of the spatial accuracy of the three-coordinate measuring machine. And in the measuring process, controlling the three-coordinate measuring machine to sequentially move to a plurality of planned target point positions, and recording an angle value and a length value measured by the laser tracker. If the laser tracker has a light-off phenomenon, the initial zero point of the target ball of the laser tracker needs to be returned, and after the target ball is connected with light, the target ball R3 is placed at the target position and measurement is continued.
Second, laser tracker precision field data processing and evaluation scheme
(1) Determination of spatial location coordinate points of a device
Under a coordinate system of a three-coordinate measuring machine, the laser tracker 2 is sequentially placed at 4 positions L which are not coplanar on the equipmentTi(X1i,Y1i,Z1i) I is 1,2,3,4, (laser tracker L in the figure)T1Laser tracker LT3And a laser tracker LT3In the same plane, but with a laser tracker LT4In another plane) is performedDetecting the motion point of the three-coordinate measuring machine, directly determining the space position coordinate (X) of the measuring point under the coordinate system of the three-coordinate measuring machine by combining the constraint condition between the measuring points according to the absolute distance measuring length of the laser tracker 3 and by utilizing the nonlinear least square method2j,Y2j,Z2j),j=1,2,3…m;
In the measuring process, a nonlinear equation set can be established according to a two-point distance formula based on the laser tracker and the measuring points, and the solving formula is as follows:
wherein lijThe absolute distance to the jth target point measured for the ith laser tracker.
In order to realize direct solution under a coordinate system of a three-coordinate measuring machine, when a nonlinear least square method is used for solving, the following constraints exist in the measurement points in an equation set:
in addition, in the iterative solution process, the initial value of the coordinates of the measuring points must be selected as theoretical points of the coordinates of the equipment.
(2) Conversion of coordinate of measuring point under coordinate system of three-coordinate measuring machine and coordinate of measuring point under coordinate system of tracker
Coordinates of measuring point in coordinate system of three-coordinate measuring machine and measuring point (X) in coordinate system of laser tracker3j,X3j,X3j) The coordinate (X) of the measuring point in the coordinate system of the single-station tracker is obtained through conversion between the two4j,Y4j,Z4j)。
The spatial coordinates are converted from the measuring points under the coordinate system of the three-coordinate measuring machine to the coordinate system of a certain base station of the laser tracker by utilizing coordinate translation and rotation transformation, and the realization mode is a solving formula:
where R is a 3 × 3 coordinate rotation matrix and T is a 3 × 1 translation matrix.
According to the coordinate conversion result, the coordinates of the measuring points of the three-coordinate measuring machine in the coordinate system of the laser tracker can be obtained as follows:
[X4j Y4j Z4j]T=(R[X2j Y2j Z2j]T-T)
(3) evaluation of measurement accuracy of laser tracker
Spherical coordinates (p) using spatial position coordinates of measurement points after coordinate conversion1j,θ1j,φ1j) Spherical coordinates (p) measured with the laser tracker itself2j,θ2j,φ2j) The difference value is the angle measurement and length measurement error of the tracker, and the length measurement and angle measurement precision of the laser tracker can be obtained by utilizing probability and statistical methods, namely the field evaluation of the precision of the laser tracker is realized. As shown in fig. 3, the conversion formula between the rectangular coordinate and the spherical coordinate of the laser tracker is:
θ1j=arctan(Y4j/X4j)
the method can complete the on-site evaluation of the precision of the laser tracker within 5min before the space precision detection of the three-coordinate measuring machine, does not need additional equipment, and has the characteristics of low cost and high speed.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are merely exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (7)
1. A laser tracker precision field evaluation system based on a multi-station method is characterized by comprising the following steps: the device comprises a measuring point motion driving device, a plurality of laser trackers and a precision evaluation and calculation device; the measuring point motion driving device is provided with a coordinate system A, and the laser tracker is provided with a coordinate system B;
the laser tracker tracks and measures the measurement coordinates of each target point on the measurement point motion driving equipment under a coordinate system B and the absolute measurement distance from the laser tracker to the target point; the precision evaluation calculation device calculates a first spatial position coordinate of a target point under a coordinate system A according to the absolute measurement distance from the laser tracker to the target point; the precision evaluation calculation device performs coordinate conversion on the first space position coordinate to obtain a second space position coordinate under a coordinate system B, and then calculates the difference value between the measurement coordinate of the target point and the second space position coordinate, and combines a probability statistical method to obtain the evaluation of the angle measurement precision and the length measurement precision of the laser tracker;
the accuracy evaluation calculation device includes: the device comprises a data acquisition device, a first calculation device, a first conversion device, a second calculation device and an evaluation device;
the data acquisition device is used for acquiring the position coordinates of the laser tracker, the absolute measurement distance from the laser tracker to a target point and the measurement coordinates of the target point;
the first calculation device establishes a nonlinear equation set based on the position coordinates of the laser tracker and the absolute measurement distance from the laser tracker to a target point; the first calculation device solves the nonlinear equation set by using a nonlinear least square method according to the constraint condition of the target point to calculate a first space position coordinate of the target point under the coordinate system A;
the first conversion device performs coordinate transformation on the first spatial position coordinate of the target point under the coordinate system A to obtain a second spatial position coordinate under the coordinate system B;
the second calculation device converts the measurement coordinates and the second spatial position coordinates of the target point into measurement spherical coordinates and second spatial position spherical coordinates under a spherical coordinate system, and calculates a difference value between the measurement spherical coordinates and the second spatial position spherical coordinates;
the evaluation device compares the difference value between the measurement spherical coordinate and the second spatial position spherical coordinate with the reference accuracy value according to the probability and statistical method to obtain the angle measurement and length measurement accuracy evaluation of the laser tracker;
the measuring point motion driving device is provided with a module moving in the direction of a Cartesian coordinate system: the first moving module moves in the direction of the Z coordinate axis, the second moving module moves in the direction of the X coordinate axis, and the third moving module moves in the direction of the Y coordinate axis; the first moving module, the second moving module and the third moving module realize the transformation of the position of a target point, and the measuring point motion driving equipment acquires the theoretical spatial position coordinates of each target point;
the constraint conditions of the target points are as follows: the first spatial location coordinates of all target points are at a minimum sum of their theoretical spatial location coordinate distances.
2. The multi-station method-based laser tracker accuracy on-site evaluation system of claim 1, wherein the plurality of laser trackers cannot be in a plane at the same time, and the selected target points cannot be in a plane at the same time.
3. The multi-station method-based laser tracker accuracy field evaluation system of claim 2, wherein the number of target points is at least 3 times the number of laser trackers.
4. The multi-station method-based laser tracker precision field evaluation system according to claim 3, wherein when the number of the laser trackers or the number of the positions is 4, the target points are arranged in a manner that: the target points are arranged on 8 vertexes and the center of the cube respectively, and the target points are arranged on the left side and the right side of any two diagonal lines of the cube by taking the center of the cube as a midpoint respectively.
5. The multi-station method-based laser tracker precision field evaluation system of claim 1, wherein initial coordinate values of target points in an iterative process are obtained by solving a nonlinear equation set by using a nonlinear least square method; theoretical spatial position coordinates are used.
6. The multi-station method-based laser tracker precision field evaluation system according to claim 1, wherein the coordinate transformation comprises: coordinate translation transformation and coordinate rotation transformation.
7. The multi-station method-based laser tracker precision field evaluation system according to claim 1, wherein the laser tracker is height-adjustable.
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