CN111538356B - Time division multiplexing triaxial accelerometer and control method thereof - Google Patents
Time division multiplexing triaxial accelerometer and control method thereof Download PDFInfo
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- CN111538356B CN111538356B CN202010259468.8A CN202010259468A CN111538356B CN 111538356 B CN111538356 B CN 111538356B CN 202010259468 A CN202010259468 A CN 202010259468A CN 111538356 B CN111538356 B CN 111538356B
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D13/00—Control of linear speed; Control of angular speed; Control of acceleration or deceleration, e.g. of a prime mover
- G05D13/62—Control of linear speed; Control of angular speed; Control of acceleration or deceleration, e.g. of a prime mover characterised by the use of electric means, e.g. use of a tachometric dynamo, use of a transducer converting an electric value into a displacement
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
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Abstract
The invention discloses a time-division multiplexing three-axis accelerometer and a control method thereof, wherein the time-division multiplexing three-axis accelerometer comprises an X, Y and Z axial sensitive structure, a capacitance/digital conversion front-end circuit, a delta-sigma modulator rear-stage circuit, a high-voltage driving feedback circuit and a proportional-integral control circuit; wherein, the upper and lower polar plates of the X, Y and Z axial sensitive structures are all connected with 2-phase clock signals. The time-sharing multiplexing triaxial digital accelerometer has a simple structure, and three axial sensors can complete the functions of the triaxial accelerometer only by using one circuit chip and corresponding time sequence control. The invention adopts the direct capacitance-to-digital conversion structure without the conversion process from capacitance to voltage and from voltage to digital, thereby saving the power consumption of the circuit, and reducing the complexity of the circuit and the influence of factors which are easily influenced by the environment, such as temperature, process deviation and the like.
Description
Technical Field
The invention relates to the technical field of digital sensing, in particular to a time-division multiplexing triaxial accelerometer and a control method thereof.
Background
With the development of MEMS technology, inertial sensors have become one of the most widely used MEMS devices in the past few years, in which micro-accelerometers have been widely used in inertial devices for measuring acceleration of objects, automobiles, industrial automation, aerospace and other fields. At present, in order to measure the acceleration in the three axial directions, a widely adopted method is to use three sensors and three accelerometer circuits for three-axis integration, and the current three-axis accelerometer has large power consumption, complex circuit and low integration level, and is one of the most important reasons influencing the applicability of the MEMS three-axis accelerometer.
A conventional triaxial accelerometer (see fig. 3 (a) and 3 (b)) employs three accelerometer sensitive structures, three CVs (capacitance-to-voltage conversion circuits), three ADCs (analog-to-digital conversion circuits) and three high voltage feedback circuits, which employ CV circuits susceptible to noise and temperature, resulting in reduced performance, and reduced system integration due to the need to employ three identical circuits for integration with the accelerometer sensitive structures.
Disclosure of Invention
In order to solve the technical problems of the traditional triaxial accelerometer, the invention provides the time-division multiplexing triaxial accelerometer, the accelerometer can realize the measurement function of three axial accelerations by adopting a set of circuit structure, the system integration level is high, and the measurement performance is improved.
The invention is realized by the following technical scheme:
a time division multiplexing three-axis accelerometer comprises three axial sensitive structures of X, Y and Z, a capacitance/digital conversion front-end circuit, a delta-sigma modulator rear-stage circuit, a high-voltage driving feedback circuit and a proportional-integral control circuit; the upper and lower polar plates of the X, Y and Z axial sensitive structures are all connected with 2-phase clock signals; the middle polar plates of the X-axis sensitive structure, the Y-axis sensitive structure and the Z-axis sensitive structure are respectively connected with the input end of a capacitor/digital conversion front-end circuit through a switch, the output end of the capacitor/digital conversion front-end circuit is connected with the input end of a delta-sigma modulator rear-stage circuit, the output end of the delta-sigma modulator rear-stage circuit is connected with the input end of a proportional-integral control circuit, and the output of the proportional-integral control circuit is connected to the input end of the capacitor/digital conversion front-end circuit through a high-voltage driving feedback circuit.
The invention can complete the function of triaxial acceleration output by designing a set of accelerometer circuit structure and matching with corresponding time sequence control waveform and a switch. The circuit structure of the invention is well simplified, the measurement performance is improved, and the system integration is greatly improved.
The capacitance/digital conversion front-end circuit of the invention is used for directly converting the changed capacitance of a sensitive structure into a digital signal. The capacitance/digital conversion front-end circuit directly converts the capacitance into the digital quantity, further simplifies the circuit structure, avoids the influence of the environment such as noise, temperature and the like, and improves the measurement performance. And the capacitance/digital conversion front-end circuit of the present invention employs, but is not limited to, a dedicated capacitance/digital conversion circuit.
The invention adopts time sequence control waveform to control the switches in X, Y and Z axial directions to selectively switch on the sensitive structures in different axial directions to realize the measurement of the acceleration in three axial directions.
The time sequence control waveform of the invention consists of three groups of signals, and the opening time of the switch in each axial direction does not overlap.
On the other hand, the invention also provides a control method of the time-division multiplexing triaxial accelerometer, which comprises the following steps:
the time sequence control waveform is adopted to control and switch on a switch in the X axial direction, a capacitance/digital conversion circuit directly converts a variable capacitance of a sensitive structure in the X axial direction into a digital signal, the digital signal is input into a post-stage circuit of a delta-sigma modulator to be modulated, the modulated digital signal is input into a proportional-integral control circuit to be subjected to loop control, and then a feedback voltage is added to a middle pole plate of the sensitive structure in the X axial direction after a feedback circuit is driven by high voltage to realize closed-loop feedback;
the Y-axial switch is controlled and switched on by adopting a time sequence control waveform, a capacitance/digital conversion circuit directly converts the changed capacitance of the Y-axial sensitive structure into a digital signal, the digital signal is input into a delta-sigma modulator post-stage circuit for modulation, the modulated digital signal is input into a proportional-integral control circuit for loop control and then a feedback voltage is added on a middle polar plate of the Y-axial sensitive structure after a high-voltage drive feedback circuit to realize closed-loop feedback;
the method comprises the steps that a Z-axial switch is controlled to be switched on by adopting a time sequence control waveform, a capacitance/digital conversion circuit directly converts a variable capacitance of a Z-axial sensitive structure into a digital signal, the digital signal is input into a delta-sigma modulator post-stage circuit to be modulated, the modulated digital signal is input into a proportional-integral control circuit to be subjected to loop control, and then a feedback voltage is added to a middle pole plate of the Z-axial sensitive structure to realize closed-loop feedback after a high-voltage driving feedback circuit is used; i.e. the measurement of three axial accelerations is completed.
The invention adopts time sequence control waveform, and switches in X, Y and Z axial directions are sequentially switched on through three time sequences, so that the measurement of three axial accelerations can be completed.
The invention has the following advantages and beneficial effects:
1. the invention controls the connection of three axial accelerometer sensitive structures and the same circuit in a time sequence manner so as to achieve the purpose of adopting a special front-end circuit structure for converting capacitance into digital. The method is applied to a triaxial accelerometer circuit, and solves the problems of difficulty in integration, high power consumption and difficulty in use of a triaxial accelerometer.
2. The time-sharing multiplexing triaxial digital accelerometer has a simple structure, and three axial sensors can complete the functions of the triaxial accelerometer by only using one circuit chip and corresponding time sequence control. The invention adopts the direct capacitance-to-digital conversion structure without the conversion process from capacitance to voltage and from voltage to digital, thereby saving the power consumption of the circuit, and reducing the complexity of the circuit and the influence of factors which are easily influenced by the environment, such as temperature, process deviation and the like.
3. The invention greatly improves the integration level of the system and is beneficial to the integration and the use of the system.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention. In the drawings:
fig. 1 is a circuit structure diagram of the time-division multiplexing triaxial accelerometer of the present invention.
FIG. 2 is a timing control waveform employed by the present invention.
Fig. 3 is a circuit diagram of a conventional triaxial accelerometer. Wherein, (a) is a structural block diagram of a traditional triaxial accelerometer; and (b) is a structural block diagram of another traditional triaxial accelerometer.
Detailed Description
Hereinafter, the term "including" or "may include" used in various embodiments of the present invention indicates the presence of the inventive function, operation, or element, and does not limit the addition of one or more functions, operations, or elements. Furthermore, the terms "comprises," "comprising," "has," "having," "includes," "including," "has," "having," "including," "contains," "containing," "involving," or any combination thereof, as used in various embodiments of the present invention, are intended to cover only particular features, integers, steps, operations, elements, components, or combinations of the foregoing, and should not be construed as first excluding the presence of or adding to one or more other features, integers, steps, operations, elements, components, or combinations of the foregoing.
In various embodiments of the invention, the expression "or" at least one of a or/and B "includes any or all combinations of the words listed simultaneously. For example, the expression "a or B" or "at least one of a or/and B" may include a, may include B, or may include both a and B.
Expressions (such as "first", "second", and the like) used in various embodiments of the present invention may modify various constituent elements in various embodiments, but may not limit the respective constituent elements. For example, the above description does not limit the order and/or importance of the elements described. The foregoing description is for the purpose of distinguishing one element from another. For example, the first user device and the second user device indicate different user devices, although both are user devices. For example, a first element could be termed a second element, and, similarly, a second element could be termed a first element, without departing from the scope of various embodiments of the present invention.
It should be noted that: if it is described that one constituent element is "connected" to another constituent element, the first constituent element may be directly connected to the second constituent element, and a third constituent element may be "connected" between the first constituent element and the second constituent element. In contrast, when one constituent element is "directly connected" to another constituent element, it is understood that there is no third constituent element between the first constituent element and the second constituent element.
The terminology used in the various embodiments of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the various embodiments of the invention. As used herein, the singular forms are intended to include the plural forms as well, unless the context clearly indicates otherwise. Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which various embodiments of the present invention belong. The terms (such as those defined in commonly used dictionaries) should be interpreted as having a meaning that is consistent with their contextual meaning in the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein in various embodiments of the present invention.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to examples and the accompanying drawings, and the exemplary embodiments and descriptions thereof are only used for explaining the present invention and are not used as limiting the present invention.
Examples
The embodiment provides a time-division multiplexing three-axis accelerometer. The triaxial accelerometer of the embodiment can complete the function of triaxial acceleration output by designing a set of accelerometer circuit structure and matching with corresponding time sequence control waveforms and switches.
The three-axis accelerometer comprises an accelerometer sensitive structure in X, Y and Z axial directions, a capacitance/digital conversion front-end circuit, a delta-sigma modulator rear-stage circuit, a high-voltage driving feedback circuit (HVD) and a proportional-integral control circuit (PIC); the upper and lower polar plates of the sensitive structures in the X, Y and Z axial directions are all connected with 2-phase clock signals; the middle polar plates of the X-axis sensitive structure, the Y-axis sensitive structure and the Z-axis sensitive structure are respectively connected with the input end of a capacitor/digital conversion front-end circuit through a switch, the output end of the capacitor/digital conversion front-end circuit is connected with the input end of a delta-sigma modulator rear-stage circuit, the output end of the delta-sigma modulator rear-stage circuit is connected with the input end of a proportional-integral control circuit, and the output of the proportional-integral control circuit is connected to the input end of the capacitor/digital conversion front-end circuit through a high-voltage driving feedback circuit.
As shown in detail in figure 1. The three-axis accelerometer circuit connection relationship of the embodiment is as follows:
the middle pole plate and XCLK of the X-axis sensitive structure are connected to a node 1, the middle pole plate and YCLK of the Y-axis sensitive structure are connected to a node 2, the middle pole plate and ZCLK of the Z-axis sensitive structure are connected to a node 3, and the right ends of XCLK, YCLK and ZCLK are connected to a node 4, the node 4 is connected to a node 5 through a front-end circuit (C/D) of special direct capacitance-to-digital quantity conversion, the node 5 is connected to a node 6 through a delta-sigma modulator rear-stage circuit, the node 6 is connected to a node 7 through a PIC proportional-integral control circuit, the node 7 is connected to a node 8 through HVD high-voltage driving feedback, and the node 8 is in short circuit with the node 4.
The capacitance/digital conversion front-end circuit of the embodiment adopts a proprietary front-end circuit structure for direct capacitance-to-digital conversion.
The three axial switches of the present embodiment are switches XCLK, YCLK, and ZCLK, respectively, and the three axial switches are used to selectively switch on the accelerometer sensitive structures in different axial directions through the time sequence control switches XCLK, YCLK, and ZCLK, respectively, so as to complete the measurement of the triaxial acceleration.
One such embodiment uses time-multiplexed three-axis acceleration circuit structures with time-controlled waveforms. Specifically, as shown in fig. 2, the timing control waveform is composed of three groups of signals, the switches in the X-axis, Y-axis and Z-axis directions are sequentially switched on, and the opening time of each axial switch is non-overlapped, when the corresponding axial switch is opened, a corresponding proprietary front-end circuit structure for direct capacitance-to-digital conversion starts to work and is converted into a code stream digital signal, then the code stream digital signal is subjected to loop control by a digital proportional-integral controller (PIC) and then feedback voltage is applied to the middle polar plate of the three axial accelerometer sensitive structures through a high-voltage drive feedback circuit (HVD) to realize closed-loop feedback.
The time sequence control process of the triaxial accelerometer of this embodiment is specifically as follows:
the method comprises the steps that a switch in the X axial direction is controlled to be switched on by adopting a time sequence control waveform, a capacitance/digital conversion circuit directly converts a variable capacitance of a sensitive structure in the X axial direction into a digital signal, the digital signal is input into a delta-sigma modulator post-stage circuit to be modulated, the modulated digital signal is input into a proportional-integral control circuit to be subjected to loop control, and then a feedback voltage is added to a middle pole plate of the sensitive structure in the X axial direction after a high-voltage driving feedback circuit is used for realizing closed-loop feedback;
the method comprises the steps that a Y-axial switch is controlled to be connected through a time sequence control waveform, a capacitance/digital conversion circuit directly converts a variable capacitance of a Y-axial sensitive structure into a digital signal, the digital signal is input into a delta-sigma modulator post-stage circuit to be modulated, the modulated digital signal is input into a proportional-integral control circuit to be subjected to loop control, and then feedback voltage is added to a middle pole plate of the Y-axial sensitive structure to realize closed-loop feedback after a high-voltage driving feedback circuit is used;
the Z-axial switch is controlled and switched on by adopting a time sequence control waveform, a capacitance/digital conversion circuit directly converts the variable capacitance of the Z-axial sensitive structure into a digital signal, the digital signal is input into a delta-sigma modulator post-stage circuit for modulation, the modulated digital signal is input into a proportional-integral control circuit for loop control and then a feedback voltage is added to a middle polar plate of the Z-axial sensitive structure after a high-voltage drive feedback circuit to realize closed-loop feedback; i.e. the measurement of three axial accelerations is completed.
In the embodiment, only one chip can complete the function of triaxial output by matching with a corresponding time sequence and a switch.
In the embodiment, the time-division multiplexing three-axis accelerometer is adopted, 512 clock periods are cut off through 128 clocks in each period through three time sequences, and then three axial paths of an X axis, a Y axis and a Z axis are sequentially gated, so that the function of measuring three axial accelerations by one chip is completed.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are merely exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (5)
1. A time division multiplexing three-axis accelerometer is characterized by comprising sensitive structures in X, Y and Z axial directions, a capacitance/digital conversion front-end circuit, a delta-sigma modulator rear-stage circuit, a high-voltage driving feedback circuit and a proportional-integral control circuit; the upper and lower polar plates of the sensitive structures in the X, Y and Z axial directions are all connected with 2-phase clock signals; the middle pole plates of the X-axis sensitive structure, the Y-axis sensitive structure and the Z-axis sensitive structure are respectively connected with the input end of a capacitance/digital conversion front-end circuit through a switch, the output end of the capacitance/digital conversion front-end circuit is connected with the input end of a delta-sigma modulator rear-stage circuit, the output end of the delta-sigma modulator rear-stage circuit is connected with the input end of a proportional-integral control circuit, and the output of the proportional-integral control circuit is connected to the input end of the capacitance/digital conversion front-end circuit through a high-voltage driving feedback circuit.
2. The time-division multiplexed triaxial accelerometer of claim 1, wherein the capacitance/digital conversion front end circuit is configured to directly convert a varying capacitance of the sensitive structure into a digital signal.
3. The time division multiplexing triaxial accelerometer according to claim 1 or 2, wherein a time sequence control waveform is used to control switches in three axial directions of X, Y and Z to selectively switch on sensitive structures in different axial directions respectively, so as to realize measurement of three axial accelerations.
4. A time division multiplexed tri-axial accelerometer according to claim 3, wherein the timing control waveforms are composed of three sets of signals and there is no overlap in the switch on times for each axis.
5. A method of controlling a time multiplexed triaxial accelerometer according to any of claims 1 to 4, the method comprising:
the method comprises the steps that a switch in the X axial direction is controlled to be switched on by adopting a time sequence control waveform, a capacitance/digital conversion circuit directly converts a variable capacitance of a sensitive structure in the X axial direction into a digital signal, the digital signal is input into a delta-sigma modulator post-stage circuit to be modulated, the modulated digital signal is input into a proportional-integral control circuit to be subjected to loop control, and then a feedback voltage is added to a middle pole plate of the sensitive structure in the X axial direction after a high-voltage driving feedback circuit is used for realizing closed-loop feedback;
the method comprises the steps that a Y-axial switch is controlled to be connected through a time sequence control waveform, a capacitance/digital conversion circuit directly converts a variable capacitance of a Y-axial sensitive structure into a digital signal, the digital signal is input into a delta-sigma modulator post-stage circuit to be modulated, the modulated digital signal is input into a proportional-integral control circuit to be subjected to loop control, and then feedback voltage is added to a middle pole plate of the Y-axial sensitive structure to realize closed-loop feedback after a high-voltage driving feedback circuit is used;
the method comprises the steps that a Z-axial switch is controlled to be switched on by adopting a time sequence control waveform, a capacitance/digital conversion circuit directly converts a variable capacitance of a Z-axial sensitive structure into a digital signal, the digital signal is input into a delta-sigma modulator post-stage circuit to be modulated, the modulated digital signal is input into a proportional-integral control circuit to be subjected to loop control, and then a feedback voltage is added to a middle pole plate of the Z-axial sensitive structure to realize closed-loop feedback after a high-voltage driving feedback circuit is used; i.e. the measurement of three axial accelerations is completed.
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