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CN111468797A - Vacuum induction brazing device and using method thereof - Google Patents

Vacuum induction brazing device and using method thereof Download PDF

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Publication number
CN111468797A
CN111468797A CN202010297249.9A CN202010297249A CN111468797A CN 111468797 A CN111468797 A CN 111468797A CN 202010297249 A CN202010297249 A CN 202010297249A CN 111468797 A CN111468797 A CN 111468797A
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China
Prior art keywords
lifting
workpiece
motor
induction coil
vacuum
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CN202010297249.9A
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Chinese (zh)
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CN111468797B (en
Inventor
魏守冲
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Panshi Innovation Jiangsu Electronic Equipment Co ltd
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Panshi Innovation Jiangsu Electronic Equipment Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/002Soldering by means of induction heating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/008Soldering within a furnace
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K3/00Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
    • B23K3/04Heating appliances
    • B23K3/047Heating appliances electric
    • B23K3/0475Heating appliances electric using induction effects, e.g. Kelvin or skin effects
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K3/00Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
    • B23K3/08Auxiliary devices therefor

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Dermatology (AREA)
  • General Health & Medical Sciences (AREA)
  • General Induction Heating (AREA)

Abstract

The invention relates to a device for vacuum induction brazing and a using method thereof, wherein the device comprises a rotating motor, a rotating motor fixing plate, a support rod A, a magnetic fluid, a workpiece A, a vacuum chamber, a lifting adjusting plate, a guide rod, a lifting motor fixing plate, a lifting motor, a lifting nut, a lead screw, a welding corrugated pipe, an induction coil, a workpiece B, a rotating sample table and a support rod B; the rotating motor is fixedly arranged on the bottom surface of the rotating motor fixing plate; the top surface of the rotating motor fixing plate is connected with the magnetic fluid through a support rod A and a support rod B which are arranged in parallel; the magnetic fluid is fixed at the bottom of the vacuum chamber; the rotary sample table is fixed on the magnetic fluid shaft and is positioned in the vacuum chamber; the screw rod is in transmission connection with an output shaft of the lifting motor; the induction coil is fixedly connected with the lifting adjusting plate and is positioned in the vacuum chamber. The welding device has the advantages of reasonable structural design, convenience in operation and use and low running cost, combines the advantages of vacuum brazing and induction brazing, eliminates the defects of the vacuum brazing and the induction brazing, and realizes the quick and pollution-free welding of workpieces.

Description

Vacuum induction brazing device and using method thereof
Technical Field
The invention relates to the technical field of induction brazing, in particular to a vacuum induction brazing device and a using method thereof, which are mainly used for welding products with high quality requirements and easily-oxidized materials.
Background
Induction brazing is achieved by using resistance heat of induced current in a weldment, the induction heating mode is different from other heating modes, heat is not transferred to a workpiece by environment or medium, high-frequency or power-frequency electric energy is transmitted to a metal workpiece by an induction coil, and a turbine which is induced in the workpiece generates heat, so that the solder is melted and spread by self-heating. Induction brazing has the advantages of concentrated energy transmission, extremely fast temperature rise, capability of local brazing and the like. However, induction brazing has the disadvantage that brazing is generally carried out in an atmospheric environment, the weldment has a tendency to oxidize, and the brazing process is generally carried out by means of flux stripping. The flux is harmful to the operator and pollutes the environment, and often needs to be cleaned after welding to reduce corrosion caused by the flux.
The vacuum brazing equipment is vacuum brazing heating equipment which adopts resistance heat generated by resistance wires as a heat source to heat a hearth. Comprises a vacuum brazing furnace and a vacuum system. The vacuum brazing is uniform in heating, the deformation of a weldment is small, the deformation of the weldment is small after welding without brazing flux, and the vacuum brazing can be used for brazing various metals and alloys. However, the heat transfer mode of vacuum brazing belongs to radiation heat transfer, and the heat transfer efficiency is low, so that the heating time of vacuum brazing is long, and the brazing efficiency is low.
The vacuum induction brazing obviously improves the corrosion resistance of the product, avoids various pollutions and has good safe production conditions because no brazing flux is used; the vacuum induction brazing not only saves a large amount of expensive metal brazing flux, but also does not need a complex flux cleaning procedure, thereby reducing the production cost; the brazing filler metal has good wettability and fluidity, can weld devices with more complicated and narrow channels, improves the yield of products by vacuum brazing, and obtains a firm and clean working surface. The invention provides a vacuum induction brazing device and a using method thereof based on the research background so as to meet the actual design and use requirements.
Disclosure of Invention
The invention aims to: the vacuum induction brazing device and the using method thereof have the advantages of reasonable structural design, convenience in operation and use and low running cost, combine the advantages of vacuum brazing and induction brazing, eliminate the defects of the vacuum brazing and the induction brazing and realize the rapid and pollution-free welding of workpieces.
In order to achieve the purpose, the invention adopts the following technical scheme:
a vacuum induction brazing device comprises a rotary motor, a rotary motor fixing plate, a support rod A, a magnetic fluid, a workpiece A, a vacuum chamber, a lifting adjusting plate, a guide rod, a lifting motor fixing plate, a lifting motor, a lifting nut, a lead screw, a welding corrugated pipe, an induction coil, a workpiece B, a rotary sample table and a support rod B; the rotating motor is fixedly arranged on the bottom surface of the rotating motor fixing plate; the top surface of the rotating motor fixing plate is connected with the magnetic fluid through a support rod A and a support rod B which are arranged in parallel; the magnetic fluid is fixed at the bottom of the vacuum chamber; the rotary sample stage is fixed on the magnetic fluid shaft and is positioned in the vacuum chamber; the workpiece A and the workpiece B are respectively and symmetrically arranged at the left end and the right end of the rotary sample table; the lifting motor is fixed on a lifting motor fixing plate, and the lifting motor fixing plate is fixedly connected with the top of the vacuum chamber; the screw rod is in transmission connection with an output shaft of the lifting motor; the lifting nut is fixedly connected with the lifting adjusting plate; the upper end of the welding corrugated pipe is connected and sealed with the lifting adjusting plate, and the lower end of the welding corrugated pipe is connected and sealed with the top of the vacuum chamber; the guide rod penetrates through the lifting adjusting plate; the induction coil is fixedly connected with the lifting adjusting plate and is positioned in the vacuum chamber.
As a further optimization of the scheme, the magnetic fluid comprises a magnetic conduction rotating shaft, a bearing, a magnet, a magnetic fluid, a left bearing end cover, a right bearing end cover and a shell; the magnetic conduction rotating shaft is fixed through a bearing, the magnet and the bearing are fixed on the inner side of the shell, the left bearing end cover and the right bearing end cover are arranged at the left end and the right end of the shell, and shaft holes for the magnetic conduction rotating shaft to pass through are formed in the left bearing end cover and the right bearing end cover; the working current of the induction coil is 20-40 KHz.
As a further optimization of the scheme, the rotating motor is a stepping motor, the rated power is 100W, the voltage is 220V, and the rotating speed is 0-10 rpm; the lifting motor is a servo motor, the rated power is 120W, the voltage is 220V, and the rotating speed is 0-20 rpm.
As a further optimization of the scheme, the rotating sample stage realizes angle positioning through a stepping motor, in the working process, firstly, the workpiece a is rotated to be under the induction coil, the induction coil descends, the induction coil inputs 20K-40kHz high-frequency alternating current to complete welding of the workpiece a, then the induction coil ascends, the stepping motor drives the workpiece disc to rotate, the workpiece B is rotated to be under the induction coil, and the working steps of the induction coil are repeated.
As a further optimization of the scheme, the vacuum induction brazing device further comprises an automatic control device, the automatic control device comprises a P L C controller, a first Hall sensor and a second Hall sensor, the first Hall sensor is arranged in the rotating motor, the second Hall sensor is arranged in the lifting motor, the first Hall sensor and the second Hall sensor are both connected with a P L C controller through data signals and send motor current signals detected in real time to the P L C controller, the P L C controller is connected with the lifting motor and the rotating motor in a control mode, the P L C controller compares the received real-time lifting motor current signals and the received real-time rotating motor current signals with preset corresponding threshold values after data conversion, and controls working states of the lifting motor and the rotating motor according to comparison results, and the working states comprise opening and closing.
As a further optimization of the above scheme, the automatic control device further comprises an angle sensor connected with the P L C controller, the angle sensor is arranged on the output shaft of the magnetic fluid and used for detecting an angle signal of the rotating sample stage in real time and sending the angle signal detected in real time to the P L C controller, the P L C controller compares the received real-time angle signal with a preset corresponding threshold value after data conversion, and controls the working state of the rotating motor according to the comparison result.
As a further optimization of the above scheme, the automatic control device further comprises a travel limit switch, and the travel limit switch is arranged at a preset position of the guide rod and used for controlling the working state of the lifting motor when the lifting adjusting plate moves to the preset position.
The use method of the vacuum induction brazing device comprises the following steps:
1) the workpiece A and the workpiece B are placed on a rotary sample table, a rotary motor drives the magnetofluid to rotate, and meanwhile, the rotary sample table is driven to rotate the workpiece B to be brazed below the induction coil;
2) the lifting motor drives the screw rod to rotate, the lifting adjusting plate is limited by the lifting nut and the guide rod to move downwards, and the induction coil is moved to a workpiece welding position;
3) switching on a high-frequency power supply to complete welding;
4) and after welding, the induction coil is lifted, the workpiece A is rotated to be below the induction coil 14, and the operation is continued to realize multi-station welding.
The vacuum induction brazing device and the use method thereof have the beneficial effects that: structural design is reasonable, convenient operation to combine the advantage of vacuum brazing and induction brazing, eliminate shortcoming between them, realize the quick pollution-free welding of work piece, and degree of automation is higher relatively.
Drawings
FIG. 1 is a schematic structural diagram of a vacuum induction brazing apparatus according to the present invention in an inoperative state.
FIG. 2 is a schematic structural diagram of a vacuum induction brazing apparatus according to the present invention in an operating state.
FIG. 3 is a schematic structural diagram of the magnetic fluid of the present invention.
Detailed Description
A vacuum induction brazing apparatus and a method for using the same according to the present invention will be described in detail with reference to FIGS. 1 to 3.
A vacuum induction brazing device comprises a rotary motor 1, a rotary motor fixing plate 2, a support rod A3, a magnetic fluid 4, a workpiece A5, a vacuum chamber 6, a lifting adjusting plate 7, a guide rod 8, a lifting motor fixing plate 9, a lifting motor 10, a lifting nut 11, a lead screw 12, a welding corrugated pipe 13, an induction coil 14, a workpiece B15, a rotary sample table 16 and a support rod B17; the rotating motor is fixedly arranged on the bottom surface of the rotating motor fixing plate; the top surface of the rotating motor fixing plate is connected with the magnetic fluid through a support rod A and a support rod B which are arranged in parallel; the magnetic fluid is fixed at the bottom of the vacuum chamber; the rotary sample stage is fixed on the magnetic fluid shaft and is positioned in the vacuum chamber; the workpiece A and the workpiece B are respectively and symmetrically arranged at the left end and the right end of the rotary sample table; the lifting motor is fixed on a lifting motor fixing plate, and the lifting motor fixing plate is fixedly connected with the top of the vacuum chamber; the screw rod is in transmission connection with an output shaft of the lifting motor; the lifting nut is fixedly connected with the lifting adjusting plate; the upper end of the welding corrugated pipe is connected and sealed with the lifting adjusting plate, and the lower end of the welding corrugated pipe is connected and sealed with the top of the vacuum chamber; the guide rod penetrates through the lifting adjusting plate; the induction coil is fixedly connected with the lifting adjusting plate and is positioned in the vacuum chamber.
The magnetic fluid comprises a magnetic conduction rotating shaft 4.1, a bearing 4.2, a magnet 4.3, a magnetic fluid 4.4, a left bearing end cover 4.5, a right bearing end cover 4.6 and a shell 4.7; the magnetic conduction revolving shaft is fixed through the bearing, the magnet and the bearing are fixed on the inner side of the shell, the left bearing end cover and the right bearing end cover are arranged at the left end and the right end of the shell, and shaft holes for the magnetic conduction revolving shaft to pass through are formed in the left bearing end cover and the right bearing end cover. The working current of the induction coil is 20-40 KHz. The magnetic fluid is filled between the magnet and the rotating shaft under the action of the uniform stable magnetic field, and the magnetic fluid is in a liquid state because the magnetic conduction rotating shaft is made of a magnetic conduction material, and the magnetic fluid and the magnetic conduction rotating shaft are mutually adsorbed through magnetic force when the magnetic conduction rotating shaft is static and rotating, so that the sealing effect is achieved.
The rotating motor is a stepping motor, the rated power is 100W, the voltage is 220V, and the rotating speed is 0-10 rpm; the lifting motor is a servo motor, the rated power is 120W, the voltage is 220V, and the rotating speed is 0-20 rpm.
The rotary sample table realizes angle positioning through a stepping motor, in the work process, firstly, a workpiece A is rotated to be under an induction coil, the induction coil descends, the induction coil inputs 20K-40kHz high-frequency alternating current to complete welding of the workpiece A, then the induction coil ascends, the stepping motor drives a workpiece disc to rotate, a workpiece B is rotated to be under the induction coil, and the working steps of the induction coil are repeated.
The vacuum induction brazing device further comprises an automatic control device, the automatic control device comprises a P L C controller, a first Hall sensor and a second Hall sensor, the first Hall sensor is arranged in the rotating motor, the second Hall sensor is arranged in the lifting motor, the first Hall sensor and the second Hall sensor are both connected with a P L C controller through data signals and send motor current signals detected in real time to the P L C controller, the P L C controller is connected with the lifting motor and the rotating motor in a control mode, the P L C controller compares the received real-time lifting motor current signals and the received real-time rotating motor current signals with preset corresponding threshold values after data conversion, and controls working states of the lifting motor and the rotating motor according to comparison results, and the working states comprise opening and closing.
The automatic control device further comprises an angle sensor connected with the P L C controller, the angle sensor is arranged on an output shaft of the magnetic fluid and used for detecting an angle signal of the rotary sample stage in real time and sending the angle signal detected in real time to the P L C controller, the P L C controller compares the received real-time angle signal with a preset corresponding threshold value after data conversion, and controls the working state of the rotary motor according to a comparison result.
The automatic control device further comprises a travel limit switch, the travel limit switch is arranged at the preset position of the guide rod and used for controlling the working state of the lifting motor when the lifting adjusting plate moves to the preset position.
The use method of the vacuum induction brazing device comprises the following steps:
1) the workpiece A and the workpiece B are placed on a rotary sample table, a rotary motor drives the magnetofluid to rotate, and meanwhile, the rotary sample table is driven to rotate the workpiece B to be brazed below the induction coil;
2) the lifting motor drives the screw rod to rotate, the lifting adjusting plate is limited by the lifting nut and the guide rod to move downwards, and the induction coil is moved to a workpiece welding position;
3) switching on a high-frequency power supply to complete welding;
4) and after welding, the induction coil is lifted, the workpiece A is rotated to the position below the induction coil, and the operation is continued to realize multi-station welding.
The embodiments described above are intended to facilitate one of ordinary skill in the art in understanding and using the present invention. It will be readily apparent to those skilled in the art that various modifications to these embodiments may be made, and the generic principles described herein may be applied to other embodiments without the use of the inventive faculty. Therefore, the present invention is not limited to the embodiments described herein, and those skilled in the art should make improvements and modifications within the scope of the present invention based on the disclosure of the present invention.

Claims (8)

1. A vacuum induction brazing device is characterized in that: the vacuum induction brazing device comprises a rotary motor (1), a rotary motor fixing plate (2), a support rod A (3), a magnetic fluid (4), a workpiece A (5), a vacuum chamber (6), a lifting adjusting plate (7), a guide rod (8), a lifting motor fixing plate (9), a lifting motor (10), a lifting nut (11), a screw rod (12), a welding corrugated pipe (13), an induction coil (14), a workpiece B (15), a rotary sample table (16) and a support rod B (17), wherein the rotary motor is fixedly arranged on the bottom surface of the rotary motor fixing plate, the top surface of the rotary motor fixing plate is connected with the magnetic fluid through the support rod A and the support rod B which are arranged in parallel, the magnetic fluid is fixedly arranged at the bottom of the vacuum chamber, the rotary sample table is fixedly arranged on a magnetic fluid shaft and positioned in the vacuum chamber, the workpiece A and the workpiece B are respectively and symmetrically arranged, At the right two ends; the lifting motor is fixed on a lifting motor fixing plate, and the lifting motor fixing plate is fixedly connected with the top of the vacuum chamber; the screw rod is in transmission connection with an output shaft of the lifting motor; the lifting nut is fixedly connected with the lifting adjusting plate; the upper end of the welding corrugated pipe is connected and sealed with the lifting adjusting plate, and the lower end of the welding corrugated pipe is connected and sealed with the top of the vacuum chamber; the guide rod penetrates through the lifting adjusting plate; the induction coil is fixedly connected with the lifting adjusting plate and is positioned in the vacuum chamber.
2. A vacuum induction brazing apparatus according to claim 1, wherein: the magnetic fluid comprises a magnetic conduction rotating shaft (4.1), a bearing (4.2), a magnet (4.3), a magnetic fluid (4.4), a left bearing end cover (4.5), a right bearing end cover (4.6) and a shell (4.7); the magnetic conduction rotating shaft is fixed through a bearing, the magnet and the bearing are fixed on the inner side of the shell, the left bearing end cover and the right bearing end cover are arranged at the left end and the right end of the shell, and shaft holes for the magnetic conduction rotating shaft to pass through are formed in the left bearing end cover and the right bearing end cover; the working current of the induction coil is 20-40 KHz.
3. A vacuum induction brazing apparatus according to claim 2, wherein: the rotating motor is a stepping motor, the rated power is 100W, the voltage is 220V, and the rotating speed is 0-10 rpm; the lifting motor is a servo motor, the rated power is 120W, the voltage is 220V, and the rotating speed is 0-20 rpm.
4. A vacuum induction brazing apparatus according to claim 3, wherein: the rotary sample table realizes angle positioning through a stepping motor, in the work process, firstly, a workpiece A is rotated to be under an induction coil, the induction coil descends, the induction coil inputs 20K-40kHz high-frequency alternating current to complete welding of the workpiece A, then the induction coil ascends, the stepping motor drives a workpiece disc to rotate, a workpiece B is rotated to be under the induction coil, and the working steps of the induction coil are repeated.
5. The vacuum induction brazing device according to claim 4, further comprising an automatic control device, wherein the automatic control device comprises a P L C controller, a first Hall sensor arranged in the rotating motor and a second Hall sensor arranged in the lifting motor, the first Hall sensor and the second Hall sensor are connected with a P L C controller through data signals and send motor current signals detected in real time to the P L C controller, the P L C controller is connected with the lifting motor and the rotating motor in a control mode, the P L C controller compares the received real-time lifting motor current signals and the received real-time rotating motor current signals with preset corresponding threshold values after data conversion, and controls working states of the lifting motor and the rotating motor according to comparison results, and the working states comprise opening and closing.
6. The vacuum induction brazing device according to claim 5, wherein the automatic control device further comprises an angle sensor connected with the P L C controller, the angle sensor is arranged on the output shaft of the magnetic fluid and used for detecting the angle signal of the rotating sample stage in real time and sending the angle signal detected in real time to the P L C controller, the P L C controller compares the received real-time angle signal with a preset corresponding threshold value after data conversion, and controls the working state of the rotating motor according to the comparison result.
7. A vacuum induction brazing apparatus according to claim 6, wherein: the automatic control device further comprises a travel limit switch, the travel limit switch is arranged at the preset position of the guide rod and used for controlling the working state of the lifting motor when the lifting adjusting plate moves to the preset position.
8. Use of a vacuum induction brazing apparatus according to any one of claims 1 to 7, comprising the steps of:
1) the workpiece A and the workpiece B are placed on a rotary sample table, a rotary motor drives the magnetofluid to rotate, and meanwhile, the rotary sample table is driven to rotate the workpiece B to be brazed below the induction coil;
2) the lifting motor drives the screw rod to rotate, the lifting adjusting plate is limited by the lifting nut and the guide rod to move downwards, and the induction coil is moved to a workpiece welding position;
3) switching on a high-frequency power supply to complete welding;
4) and after welding, the induction coil is lifted, the workpiece A is rotated to the position below the induction coil, and the operation is continued to realize multi-station welding.
CN202010297249.9A 2020-04-15 2020-04-15 Vacuum induction brazing device and using method thereof Active CN111468797B (en)

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Application Number Priority Date Filing Date Title
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CN111468797B CN111468797B (en) 2021-11-19

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112620845A (en) * 2020-11-18 2021-04-09 常州大谷液压器材有限公司 SAE flange type joint vacuum brazing process and equipment
CN114044289A (en) * 2021-10-11 2022-02-15 中国科学院沈阳科学仪器股份有限公司 Vacuum vertical-connection sample transmission system
CN114951879A (en) * 2022-06-08 2022-08-30 希诺股份有限公司 Low-temperature efficient vacuumizing sealing equipment and sealing process for vacuum cup
CN114952126A (en) * 2022-07-26 2022-08-30 江苏惠博机电科技股份有限公司 Welding device for electromechanical equipment production
CN115722749A (en) * 2022-11-16 2023-03-03 深圳市森国科科技股份有限公司 Local induction heating diffusion welding method and power module packaging method
CN115988725A (en) * 2023-02-17 2023-04-18 哈尔滨工业大学 Magnet position adjusting mechanism for high-vacuum plasma environment

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2369808Y (en) * 1999-04-09 2000-03-22 王岳平 Soldering machine
CN1669718A (en) * 2005-03-23 2005-09-21 西北工业大学 Pressurizing device and method for vacuum diffusion welding machine
CN103056474A (en) * 2013-01-08 2013-04-24 浙江新劲空调设备有限公司 Vacuum welding device and vacuum welding control device
CN103394783A (en) * 2013-07-30 2013-11-20 哈尔滨工业大学(威海) Ultrasonic-assisted vacuum brazing equipment
CN105355584A (en) * 2015-11-19 2016-02-24 中山德华芯片技术有限公司 Structure capable of preventing wafer warping during MOCVD reaction process

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2369808Y (en) * 1999-04-09 2000-03-22 王岳平 Soldering machine
CN1669718A (en) * 2005-03-23 2005-09-21 西北工业大学 Pressurizing device and method for vacuum diffusion welding machine
CN103056474A (en) * 2013-01-08 2013-04-24 浙江新劲空调设备有限公司 Vacuum welding device and vacuum welding control device
CN103394783A (en) * 2013-07-30 2013-11-20 哈尔滨工业大学(威海) Ultrasonic-assisted vacuum brazing equipment
CN105355584A (en) * 2015-11-19 2016-02-24 中山德华芯片技术有限公司 Structure capable of preventing wafer warping during MOCVD reaction process

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112620845A (en) * 2020-11-18 2021-04-09 常州大谷液压器材有限公司 SAE flange type joint vacuum brazing process and equipment
CN114044289A (en) * 2021-10-11 2022-02-15 中国科学院沈阳科学仪器股份有限公司 Vacuum vertical-connection sample transmission system
CN114951879A (en) * 2022-06-08 2022-08-30 希诺股份有限公司 Low-temperature efficient vacuumizing sealing equipment and sealing process for vacuum cup
CN114952126A (en) * 2022-07-26 2022-08-30 江苏惠博机电科技股份有限公司 Welding device for electromechanical equipment production
CN115722749A (en) * 2022-11-16 2023-03-03 深圳市森国科科技股份有限公司 Local induction heating diffusion welding method and power module packaging method
CN115988725A (en) * 2023-02-17 2023-04-18 哈尔滨工业大学 Magnet position adjusting mechanism for high-vacuum plasma environment

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