CN111390319B - 一种芯片共晶焊接设备 - Google Patents
一种芯片共晶焊接设备 Download PDFInfo
- Publication number
- CN111390319B CN111390319B CN202010328491.8A CN202010328491A CN111390319B CN 111390319 B CN111390319 B CN 111390319B CN 202010328491 A CN202010328491 A CN 202010328491A CN 111390319 B CN111390319 B CN 111390319B
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- Prior art keywords
- heating
- welding
- eutectic
- block
- platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000003466 welding Methods 0.000 title claims abstract description 77
- 230000005496 eutectics Effects 0.000 title claims abstract description 68
- 238000010438 heat treatment Methods 0.000 claims abstract description 145
- 230000003287 optical effect Effects 0.000 claims abstract description 19
- 239000000758 substrate Substances 0.000 claims abstract description 19
- 238000006073 displacement reaction Methods 0.000 claims abstract description 12
- 238000009413 insulation Methods 0.000 claims abstract description 9
- 239000007789 gas Substances 0.000 claims description 42
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 25
- 229910052757 nitrogen Inorganic materials 0.000 claims description 12
- 230000001681 protective effect Effects 0.000 claims description 5
- 238000002844 melting Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- 238000001179 sorption measurement Methods 0.000 claims description 3
- 239000012299 nitrogen atmosphere Substances 0.000 claims description 2
- 238000005476 soldering Methods 0.000 abstract description 9
- 238000004891 communication Methods 0.000 abstract description 2
- 230000001276 controlling effect Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000001174 ascending effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004100 electronic packaging Methods 0.000 description 1
- 229920006335 epoxy glue Polymers 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/012—Soldering with the use of hot gas
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/08—Auxiliary devices therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Die Bonding (AREA)
Abstract
Description
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202010328491.8A CN111390319B (zh) | 2020-04-23 | 2020-04-23 | 一种芯片共晶焊接设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202010328491.8A CN111390319B (zh) | 2020-04-23 | 2020-04-23 | 一种芯片共晶焊接设备 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN111390319A CN111390319A (zh) | 2020-07-10 |
CN111390319B true CN111390319B (zh) | 2021-04-16 |
Family
ID=71417043
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202010328491.8A Active CN111390319B (zh) | 2020-04-23 | 2020-04-23 | 一种芯片共晶焊接设备 |
Country Status (1)
Country | Link |
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CN (1) | CN111390319B (zh) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111816591B (zh) * | 2020-07-24 | 2023-05-16 | 长电科技(滁州)有限公司 | 一种装片系统及装片方法 |
KR102635492B1 (ko) * | 2020-08-10 | 2024-02-07 | 세메스 주식회사 | 본딩 장치 및 본딩 방법 |
CN112687555B (zh) * | 2020-11-26 | 2024-08-13 | 贵州振华风光半导体股份有限公司 | 一种用于镀镍管基的芯片低真空合金焊接方法 |
CN113161250B (zh) * | 2020-12-08 | 2022-02-25 | 恩纳基智能科技无锡有限公司 | 共晶焊接设备及其加热系统 |
CN112599432B (zh) * | 2020-12-16 | 2022-04-01 | 无锡英诺赛思科技有限公司 | 一种芯片共晶焊接设备及共晶焊接方法 |
CN113517208B (zh) * | 2021-07-13 | 2022-06-03 | 中国电子科技集团公司第二十四研究所 | 一种手动共晶贴片装置、系统及方法 |
CN113977028B (zh) * | 2021-10-28 | 2023-04-25 | 恩纳基智能科技无锡有限公司 | 一种共晶焊接设备 |
CN114192926B (zh) * | 2022-01-06 | 2022-07-26 | 深圳市创精锐电子有限公司 | 一种电子元件生产用引脚焊接装置 |
CN115890593B (zh) * | 2022-11-16 | 2024-09-17 | 武汉光谷信息光电子创新中心有限公司 | 一种可三向调节绝缘子的共晶焊夹具 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN203649642U (zh) * | 2013-11-18 | 2014-06-18 | 深圳盛世天予科技发展有限公司 | Led封装的共晶焊接系统 |
CN205437537U (zh) * | 2015-12-25 | 2016-08-10 | 深圳市东飞凌科技有限公司 | 激光器共晶装置 |
CN106128979A (zh) * | 2016-08-05 | 2016-11-16 | 深圳清华大学研究院 | 一种贴片机及贴片方法 |
US9966357B2 (en) * | 2011-11-07 | 2018-05-08 | Taiwan Semiconductor Manufacturing Company, Ltd. | Pick-and-place tool for packaging process |
CN108538726A (zh) * | 2017-03-03 | 2018-09-14 | Tdk株式会社 | 半导体芯片的制造方法 |
CN110181140A (zh) * | 2019-05-31 | 2019-08-30 | 广东瑞谷光网通信股份有限公司 | 一种ld芯片共晶焊接系统 |
-
2020
- 2020-04-23 CN CN202010328491.8A patent/CN111390319B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9966357B2 (en) * | 2011-11-07 | 2018-05-08 | Taiwan Semiconductor Manufacturing Company, Ltd. | Pick-and-place tool for packaging process |
CN203649642U (zh) * | 2013-11-18 | 2014-06-18 | 深圳盛世天予科技发展有限公司 | Led封装的共晶焊接系统 |
CN205437537U (zh) * | 2015-12-25 | 2016-08-10 | 深圳市东飞凌科技有限公司 | 激光器共晶装置 |
CN106128979A (zh) * | 2016-08-05 | 2016-11-16 | 深圳清华大学研究院 | 一种贴片机及贴片方法 |
CN108538726A (zh) * | 2017-03-03 | 2018-09-14 | Tdk株式会社 | 半导体芯片的制造方法 |
CN110181140A (zh) * | 2019-05-31 | 2019-08-30 | 广东瑞谷光网通信股份有限公司 | 一种ld芯片共晶焊接系统 |
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Publication number | Publication date |
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CN111390319A (zh) | 2020-07-10 |
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Address after: Elevator 5 / F, No.125, high energy street, high tech park, Dalian, Liaoning Province Applicant after: Dalian Youxun Technology Co.,Ltd. Address before: Elevator 5 / F, No.125, high energy street, high tech park, Dalian, Liaoning Province Applicant before: DALIAN YOUXUN TECHNOLOGY Co.,Ltd. |
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CP01 | Change in the name or title of a patent holder |
Address after: Elevator 5 / F, No.125, high energy street, high tech park, Dalian, Liaoning Province Patentee after: Dalian Youxinguang Technology Co.,Ltd. Address before: Elevator 5 / F, No.125, high energy street, high tech park, Dalian, Liaoning Province Patentee before: Dalian Youxun Technology Co.,Ltd. |
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CP01 | Change in the name or title of a patent holder | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A Kind of Chip Eutectic Welding Equipment Effective date of registration: 20231016 Granted publication date: 20210416 Pledgee: Dalian Branch of Shanghai Pudong Development Bank Co.,Ltd. Pledgor: Dalian Youxinguang Technology Co.,Ltd. Registration number: Y2023980061225 |
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