CN111321381B

CN111321381B - AlCrNbSiTiBN-based nano composite coating of hard alloy blade and preparation method thereof

Info

Publication number: CN111321381B
Application number: CN202010147221.7A
Authority: CN
Inventors: 杨兵; 刘琰; 李敬雨; 陈燕鸣; 郭嘉琳
Original assignee: Wuhan University WHU
Current assignee: Wuhan University WHU
Priority date: 2020-03-05
Filing date: 2020-03-05
Publication date: 2021-01-01
Anticipated expiration: 2040-03-05
Also published as: CN111321381A

Abstract

The invention discloses an AlCrNbSiTiBN-based nano composite coating of a hard alloy blade and a preparation method thereof. The high-entropy alloy nitride coating adopts a gradient layer structure and consists of a bonding layer, a transition layer and a wear-resistant temperature-resistant layer. The bonding layer is a pure CrN layer prepared by an arc ion plating method, the transition layer is a CrN/AlCrTiSiYN nano composite multilayer film, and the temperature-resistant and wear-resistant layer is an AlCrNbSiTiBN/AlCrTiSiYN high-entropy alloy nitride nano composite multilayer film. The preparation method comprises the following steps: and performing ion etching on the cleaned hard alloy blade, and then sequentially depositing a CrN bonding layer, a CrN/AlCrTiSiYN transition layer and an AlCrNbSiTiBN/AlCrTiSiYN wear-resistant and temperature-resistant layer by adopting an arc ion plating method. The coating is a combination of various coating materials, has a gradient structure, and can reduce the stress of the coating and the substrate. In addition, the adoption of the nano multilayer structure can greatly improve the toughness of the coating, better overcome the defect that the coated hard alloy blade is easy to break, and greatly improve the processing life and the cutting adaptability of the hard alloy blade.

Description

AlCrNbSiTiBN-based nano composite coating of hard alloy blade and preparation method thereof

Technical Field

The invention belongs to the technical field of thin film materials, relates to a blade coating, and particularly relates to an AlCrNbSiTiBN-based nano composite coating of a hard alloy blade and a preparation method thereof.

Background

The numerical control machining is a technological method for machining parts on a numerical control machine tool, and the technological procedures of the numerical control machine tool machining and the traditional machine tool machining are consistent from the whole, but are obviously changed. The method is an effective way for solving the problems of variable part varieties, small batch, complex shape, high precision and the like and realizing efficient and automatic processing. The numerical control blade is a general name of an indexable turning blade, has an important position in the field of modern metal cutting application, and is mainly applied to the fields of metal turning, milling cutting and the like at present. The numerical control blade is made of various materials and can be divided into a coating blade, a metal ceramic blade, a non-metal ceramic blade, a hard alloy blade and the like. Compared with the original high-speed steel blade, the numerical control blade has the characteristics of high efficiency, high wear resistance, long service life and the improvement of the processing efficiency by more than 4 times. The hard alloy blade is the blade material with the largest consumption in the numerical control blade, and the hard alloy has a series of excellent performances of high hardness, wear resistance, good strength and toughness, heat resistance, corrosion resistance and the like. The hard alloy is prepared by adopting high-quality tungsten carbide and metal powder through formula proportioning, mixing and then pressing and sintering, and is used as a tooth in the modern industry, and the numerical control hard alloy blade plays a fundamental promoting role in the development of the manufacturing industry.

When carbide inserts are machined into high hardness materials such as cast iron, the inserts often wear rapidly due to the high hardness carbides in the cast iron. In order to improve the cutting life of the blade, it is a common technical means to prepare a high hardness coating on the surface of the blade by using a Physical Vapor Deposition (PVD) technique. The surface hardness of the blade can be greatly improved through the preparation of the surface PVD coating material, so that the coated blade has the advantages of high hardness, good wear resistance, stable chemical property and no chemical reaction with a workpiece material, thereby reducing the abrasion of a matrix. Therefore, the coated blade has the characteristics of high surface hardness, good wear resistance, small friction coefficient, low heat conductivity and the like, and the service life of the coated blade can be prolonged by more than 3-5 times compared with that of an uncoated blade during cutting. The most mature and widely applied hard coating material is TiN, but the bonding strength of TiN and a matrix is not as strong as that of a TiC coating, the coating is easy to peel off, the hardness is not as high as that of TiC, and the coating is easy to oxidize and ablate when the cutting temperature is higher. The TiC coating has higher hardness and wear resistance and good oxidation resistance, but is brittle and not impact-resistant. TiCN has the advantages of TiC and TiN, the TiCN property can be controlled by continuously changing the C, N component in the coating process, a multilayer structure with different components is formed, the internal stress of the coating can be reduced, the toughness is improved, the thickness of the coating is increased, the expansion of cracks is prevented, the edge breakage is reduced, and the temperature resistance is poor. The development of the novel temperature-resistant wear-resistant low-heat-conductivity coating material has extremely important value.

In 2004, Taiwan scholars were all skilled in the art to break through the traditional concept of alloy design and innovatively propose a high-entropy alloy (HEA) with multiple principal elementsThe idea is known as one of three major breakthroughs of the alloying theory in recent decades. The main elements and the secondary elements are not different in the high-entropy alloy, the number of the optimal composition elements is 5-13, and the content of each element is 5-35%. According to boltzmann' S hypothesis, if there are w kinds of atoms mixed in the alloy (solid solution), its molar mixing entropy Δ S is Rlnw. When w is larger, the mixing entropy is higher. According to the relationship delta G between Gibbs free energy and mixed entropy_mix＝ΔH_mix-TΔS_mixThe increase in entropy will greatly reduce the gibbs free energy, whereas structures with lower gibbs free energy will preferentially form when solidified. The high entropy effect in the high entropy alloy leads to the reduction of the free energy of the system, and high entropy solid solutions such as Body Centered Cubic (BCC) and Face Centered Cubic (FCC) structures are preferentially formed in the solidification process, and brittle intermetallic compounds are not formed. Alloy materials can be classified into low-entropy alloys, medium-entropy alloys and high-entropy alloys according to the mixed entropy. The high-entropy alloy has a high-entropy effect in thermodynamics, a lattice distortion effect in crystallography, a slow diffusion effect in kinetics and a cocktail effect in performance. Therefore, the alloy has excellent performances such as high strength, high wear resistance, high corrosion resistance and the like, and is widely concerned at home and abroad.

Compared with the conventional nitride coating, the high-entropy alloy nitride coating has higher hardness and better temperature resistance, and has good application potential in harsh use environments such as high-temperature alloy cutting, but the research attention degree of the high-entropy alloy nitride blade coating is not enough at present, and the development of related theories and experimental work is not sufficient. More focuses on process optimization and performance control of single-layer high-entropy nitride coatings experimentally. However, no relevant report is found in the research on the high-entropy nitride coating of the nano multilayer. Because the adoption of the nano multilayer structure can increase a large number of interfaces, the hardness, the temperature resistance and the toughness of the coating can be improved, the heat conductivity coefficient of the coating can be reduced, the problem of high-temperature heat diffusion of the coated blade can be reduced, and the temperature resistance and the cutting performance of the blade during high-speed cutting of high-temperature alloy can be obviously improved.

Disclosure of Invention

The invention aims to provide an AlCrNbSiTiBN-based nano composite coating of a hard alloy blade and a preparation method thereof. This patent combines alcrnbsipibn coating and alcrtiisiyn coating to consider mainly from the following aspect: firstly, AlCrNbSiTiBN has good temperature resistance and high-temperature self-lubricating property, and the property has good resistance to high-temperature abrasion in the processing process. Rapid wear of the cemented carbide insert can be avoided. Secondly, the AlCrTiSiYN coating is a rare earth-doped nitride coating, and the rare earth doping can refine grains and improve the temperature resistance of the coating. The combination of the two materials forms a nano multilayer coating, so that the hardness and the toughness can be further improved, the interlayer diffusion at high temperature can be reduced, and the service life of the coated hard alloy blade is further prolonged.

In order to achieve the purpose, the technical scheme provided by the invention is as follows: the AlCrNbSiTiBN-based nano composite coating adopts a gradient layer structure and consists of a bonding layer, a transition layer and a temperature-resistant wear-resistant layer. The bonding layer is a pure CrN film prepared by an arc ion plating method, the transition layer is a CrN/AlCrTiSiYN nano composite multilayer film, and the temperature-resistant and wear-resistant layer is an AlCrNbSiTiBN/AlCrTiSiYN high-entropy alloy nitride nano composite multilayer film.

The invention also provides a preparation method of the AlCrNbSiTiBN-based nano composite coating, which comprises the steps of depositing a 100-doped 500-nano CrN film as a bonding layer under the conditions of 1-3Pa and 100-150V after ion etching is carried out on the hard alloy blade at the temperature of 400-doped 550 ℃ in an argon and hydrogen environment; depositing 1000-4000 nm CrN/AlCrTiSiYN nano-composite multilayer film as a transition layer under the conditions of 2-5Pa and 50-250V, wherein the single-layer thickness of CrN is 5-10 nm, the single-layer thickness of AlCrTiSiYN is 5-20 nm, and the modulation period is 10-30 nm; then depositing 1000-1000 nm super hard and tough AlCrNbSiTiBN/AlCrTiSiYN high entropy alloy nitride nano composite multilayer film as a temperature-resistant and wear-resistant layer under the conditions of 3-8Pa and 50-250V, wherein the single layer thickness of the AlCrNbSiTiBN is 5-20 nm, the single layer thickness of the AlCrTiSiYN is 5-30 nm, and the modulation period is 10-50 nm; the total thickness of the coating is controlled to be 2.1-9.5 microns, and the hard alloy blade with the high-entropy alloy nitride nano composite coating is obtained by natural cooling after the preparation is finished.

According to the technical scheme, the invention is a comprehensive utilization of various technologies, and firstly, the ion etching technology is utilized to remove oxides on the surface of the blade, improve the cleanliness of the surface of the blade before film coating and achieve the purpose of improving the adhesive force. The ion etching cleaning is a low-voltage large-current cleaning technology, generally performed under a negative bias of 50-150V, the cleaning time is adjusted according to different workpieces, generally, in order to avoid sparking, most cleaning processes start from low voltage, and the voltage is gradually increased, so that the discharge of surface pollutants under the condition of high voltage is avoided. Secondly, the high ionization rate of the arc ion plating technology is utilized to improve the reaction degree and the crystallization degree of the metal and the reaction gas in the coating, and the density of the coating is improved. Generally, in the preparation technology with low ionization rate such as magnetron sputtering, the ionization rate is low, the reaction is insufficient, the coating is easy to form columnar crystals, and the use effect is seriously influenced.

The preparation process of the patent has certain similarities with the existing coating process. After the ion etching cleaning is finished, the surface of the hard alloy blade is relatively clean, and the requirement of film coating is met. Then, the invention adopts the arc ion plating technology to evaporate Cr metal from a Cr target at high temperature in a nitrogen atmosphere to form Cr ions which move towards the surface of the blade, and when the Cr ions move to the surface of the blade, the Cr ions move to the surface of the blade under the attraction of negative voltage on the surface of the blade to form a Cr bonding layer. After the preparation of the bonding layer is finished, the AlCrTiSiYN target material is opened, and a CrN layer is formed when the workpiece rotates to the front of the Cr target. When the workpiece rotates to the front of the AlCrTiSiYN target, an AlCrTiSiYN layer is formed, and the workpiece rotates continuously, so that an alternating CrN/AlCrTiSiYN multilayer film is formed on the surface of the workpiece layer by layer. After the CrN/alcrtiisiyn transition layer is finished, the Cr target is turned off, followed by turning on the AlCrNbSiTiB target. An alcrnbbitibn coating will be formed when the workpiece is rotated in front of the alcrnbbitib target. Similar to the transition layer, the workpiece rotates continuously to form the AlCrNbSiTiBN/AlCrTiSiYN nanometer multilayer film. Because the elastic modulus difference between the AlCrNbSiTiBN coating and the AlCrTiSiYN coating is larger, the AlCrNbSiTiBN coating and the AlCrTiSiYN coating can cause larger hardness improvement, and the aim of improving the hardness of the coatings is fulfilled. After the preparation is finished, the organic combination of multiple layers of various coatings is formed on the surface of the blade.

Therefore, the invention has the following advantages:

first, the present invention is a combination of high entropy alloy coatings and traditional nitride coatings, as compared to conventional nitride coatings;

secondly, the invention fully utilizes the nano multilayer composite and gradient composite coating technology to form a structure and gradually changed components, and the coating and the matrix are metallurgically bonded and have good adhesive force;

thirdly, the nano multilayer film with nitride in the invention also has a nano multilayer film with high entropy nitride and traditional nitride, which is the combination of two different film series multilayer films;

fourthly, the growth of columnar crystals is inhibited by using the nano multilayer film, the density of the coating is improved, the corrosion resistance of the coating is improved, and the wear resistance and the temperature resistance are also greatly improved;

fifthly, the AlCrTiSiYN nitride is a rare earth doped nitride and has better temperature resistance than the conventional nitride;

sixthly, the invention takes CrN as the bonding layer, which can greatly improve the bonding force between the coating and the substrate and reduce the expansion coefficient difference between the substrate and the coating.

In conclusion, the AlCrNbSiTiBN/AlCrTiSiYN superhard tough high-entropy alloy nitride nano multilayer film prepared by the method can greatly improve the hardness and the wear resistance of a coating, can ensure that a blade can stably work for a long time when processing hard-to-process materials such as cast iron and the like, greatly reduces the difficulty of tool changing, has stable processing quality and improved processing efficiency, and can reduce the production cost of manufacturers.

Drawings

FIG. 1 is a schematic view of an arc ion plating apparatus used for preparing AlCrNbSiTiBN based nano composite coating according to the present invention.

FIG. 2 is a schematic structural diagram of an AlCrNbSiTiBN-based nanocomposite coating designed by the invention.

FIG. 3 shows the surface morphology of the AlCrNbSiTiBN-based nanocomposite coating prepared by the invention.

FIG. 4 shows the cross-sectional morphology of the AlCrNbSiTiBN-based nanocomposite coating prepared by the invention

Reference numerals: the device comprises a 1-Cr target, a 2-heater, a 3-AlCrNbSiTiB target, a 4-vacuumizing port, a 5-workpiece frame, a 6-AlCrTiSiY target, a 7-vacuum pump, an 8-vacuum chamber, a 9-hard alloy blade, a 10-bonding layer, an 11-transition layer and a 12-temperature-resistant wear-resistant layer.

Detailed Description

The embodiments of the present invention will be described in further detail with reference to the drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.

As shown in FIG. 1, in the arc ion plating apparatus used in the present invention, a vacuum chamber of the arc ion plating apparatus is surrounded by a furnace wall, and the size of the vacuum chamber is 500X500 mm. The vacuum chamber is provided with a vacuum port 4 and connected with a vacuum pump 7. The vacuumizing unit vacuumizes the vacuum chamber through the vacuumizing port 4. The heaters 2 are arranged at four corners of the vacuum chamber, the heating power is 10-30 kilowatts, and the heating efficiency is improved. The three arc targets are arranged on the furnace wall in three rows, namely a Cr target, an AlCrNbSiTiB target and an AlCrTiSiY target. The carbide insert is on the workpiece holder 5. The arrangement enables the plasma density in the vacuum chamber to be greatly increased and the workpiece to be completely immersed in the plasma. The deposition rate, the hardness and the adhesive force of the coating are greatly improved. Because the target structure is optimized, the magnetic field distribution is more uniform, the electric arc is uniformly burnt on the target surface, and the uniformity of the coating is improved.

Fig. 2 is a schematic structural view of the alcrnbbittbn-based nanocomposite coating of the cemented carbide insert of the present invention. The high-entropy alloy nitride nano composite coating adopts a gradient layer structure and comprises a bonding layer, a transition layer and a temperature-resistant wear-resistant layer, wherein the bonding layer is a CrN bonding layer prepared on the surface of a hard alloy blade by an arc ion plating method, the transition layer is a CrN/AlCrTiSiYN nano composite multilayer film, and the temperature-resistant wear-resistant layer is an AlCrNbSiTiBN/AlCrTiSiYN high-entropy alloy nitride nano composite multilayer film.

Specifically, the CrN/AlCrTiSiYN nano-composite multilayer film is formed by alternately growing a CrN layer and an AlCrTiSiYN layer, wherein the single-layer thickness of CrN is 5-10 nanometers, the single-layer thickness of AlCrTiSiYN is 5-20 nanometers, and the modulation period is 10-30 nanometers.

Specifically, the AlCrNbSiTiBN/AlCrTiSiYN high-entropy alloy nitride nano composite multilayer film is formed by alternately growing AlCrTiSiYN layers and AlCrNbSiTiTiTiYN layers, the thickness of the AlCrNbSiTiTiTiYN single layer is 5-20 nanometers, the thickness of the AlCrTiSiYN single layer is 5-30 nanometers, and the modulation period is 10-50 nanometers.

The technical solution of the present invention is further illustrated by the following specific examples:

example 1: depositing a 100-nanometer CrN film as a bonding layer under the conditions of 1Pa and 100V after ion etching is finished on the hard alloy blade in the environment of 400 ℃, argon and hydrogen; depositing a 1000-nanometer CrN/AlCrTiSiYN nanometer composite multilayer film as a transition layer under the conditions of 2Pa and 50V, wherein the single-layer thickness of CrN is 5 nanometers, the single-layer thickness of AlCrTiSiYN is 5 nanometers, and the modulation period is 10 nanometers; then, depositing 1000 nm AlCrNbSiTiBN/AlCrTiSiYN high-entropy alloy nitride nano composite multilayer film as a temperature-resistant and wear-resistant layer under the conditions of 3Pa and 50V, wherein the single-layer thickness of the AlCrNbSiTiBN is 5 nm, the single-layer thickness of the AlCrTiSiYN is 5 nm, and the modulation period is 10 nm; the total thickness of the coating is controlled to be 2.1 microns, and the hard alloy blade with the AlCrNbSiTiBN-based nano composite coating is obtained by natural cooling after the preparation is finished.

Example 2: depositing a 500-nanometer CrN film as a bonding layer under the conditions of 3Pa and 150V after ion etching is finished on the hard alloy blade at the temperature of 550 ℃ in an argon and hydrogen environment; depositing a 4000 nanometer CrN/AlCrTiSiYN nanometer composite multilayer film as a transition layer under the conditions of 5Pa and 250V, wherein the single-layer thickness of CrN is 10 nanometers, the single-layer thickness of AlCrTiSiYN is 10 nanometers, and the modulation period is 20 nanometers; then depositing 5000 nm AlCrNbSiTiBN/AlCrTiSiYN high entropy alloy nitride nano composite multilayer film as temperature-resistant and wear-resistant layer under the condition of 8Pa and 250V, the single layer thickness of AlCrNbSiTiBN is 20 nm, the single layer thickness of AlCrTiSiYN is 30 nm, and the modulation period is 50 nm; the total thickness of the coating is controlled at 9.5 microns, and the hard alloy blade with the AlCrNbSiTiBN-based nano composite coating is obtained by natural cooling after the preparation is finished.

Example 3: depositing a 400-nanometer CrN film as a bonding layer under the conditions of 2Pa and 100V after the hard alloy blade is subjected to ion etching at the temperature of 450 ℃ in an argon and hydrogen environment; depositing a 2000 nm CrN/AlCrTiSiYN nano multi-layer film as a transition layer under the conditions of 5Pa and 50V, wherein the single-layer thickness of CrN is 10 nm, the single-layer thickness of AlCrTiSiYN is 10 nm, and the modulation period is 20 nm; then depositing 3000 nm AlCrNbSiTiBN/AlCrTiSiYN high entropy alloy nitride nano composite multilayer film as temperature-resistant and wear-resistant layer under 5Pa and 150V, the thickness of AlCrNbSiTiBN single layer is 10 nm, the thickness of AlCrTiSiYN single layer is 20 nm, the modulation period is 30 nm; the total thickness of the coating is controlled at 5.4 microns, and the hard alloy blade with the AlCrNbSiTiBN-based nano composite coating is obtained by natural cooling after the preparation is finished.

Example 4: depositing a 500-nanometer CrN film as a bonding layer under the conditions of 3Pa and 100V after ion etching is finished on the hard alloy blade in the environment of 500 ℃, argon and hydrogen; depositing a 4000 nanometer CrN/AlCrTiSiYN nanometer composite multilayer film as a transition layer under the conditions of 3Pa and 100V, wherein the single-layer thickness of CrN is 5 nanometers, the single-layer thickness of AlCrTiSiYN is 5 nanometers, and the modulation period is 10 nanometers; then depositing 4000 nanometer AlCrNbSiTiBN/AlCrTiSiYN high-entropy alloy nitride nanometer composite multilayer film as a temperature-resistant and wear-resistant layer under the conditions of 3Pa and 100V, wherein the single-layer thickness of the AlCrNbSiTiBN is 5 nanometers, the single-layer thickness of the AlCrTiSiYN is 5 nanometers, and the modulation period is 10 nanometers; the total thickness of the coating is controlled at 8.5 microns, and the hard alloy blade with the AlCrNbSiTiBN-based nano composite coating is obtained by natural cooling after the preparation is finished.

Example 5: depositing a 400-nanometer CrN film as a bonding layer under the conditions of 1Pa and 100V after the hard alloy blade is subjected to ion etching at the temperature of 450 ℃ in an argon and hydrogen environment; depositing a 2000 nm CrN/AlCrTiSiYN nano multi-layer film as a transition layer under the conditions of 4Pa and 50V, wherein the single-layer thickness of CrN is 10 nm, the single-layer thickness of AlCrTiSiYN is 10 nm, and the modulation period is 20 nm; then depositing 5000 nm AlCrNbSiTiBN/AlCrTiSiYN high entropy alloy nitride nano composite multilayer film as temperature-resistant and wear-resistant layer under 4Pa and 50V, the thickness of AlCrNbSiTiBN single layer is 10 nm, the thickness of AlCrTiSiYN single layer is 10 nm, and the modulation period is 20 nm; the total thickness of the coating is controlled at 7.5 microns, and the hard alloy blade with the AlCrNbSiTiBN-based nano composite coating is obtained by natural cooling after the preparation is finished.

FIG. 3 is a surface morphology diagram of the AlCrNbSiTiBN-based nanocomposite coating prepared by the invention, and it can be seen from the diagram that the coating has smaller surface particles, compact structure and no large holes or cracks.

FIG. 4 is a cross-sectional view of the AlCrNbSiTiBN-based nanocomposite coating prepared by the invention, from which it can be seen that the coating and the substrate are tightly bonded, no obvious pores are formed, and the bonding force is good.

The above embodiments are merely illustrative of the present invention and are not to be construed as limiting the invention. Although the present invention has been described in detail with reference to the embodiments, it should be understood by those skilled in the art that various combinations, modifications or equivalents may be made to the technical solution of the present invention without departing from the spirit and scope of the technical solution of the present invention, and the technical solution of the present invention is covered by the claims of the present invention.

Claims

1. An AlCrNbSiTiBN-based nano composite coating of a hard alloy blade is characterized in that: the nano composite coating adopts a gradient layer structure and comprises a bonding layer, a transition layer and a temperature-resistant wear-resistant layer, wherein the bonding layer is a CrN film prepared on the surface of the hard alloy blade by an arc ion plating method, the transition layer is a CrN/AlCrTiSiYN nano composite multilayer film, and the temperature-resistant wear-resistant layer is an AlCrNbSiTiBN/AlCrTiSiYN high-entropy alloy nitride nano composite multilayer film.

2. The alcrnbsitiibn-based nanocomposite coating of claim 1, wherein: the CrN/AlCrTiSiYN nano-composite multilayer film is formed by alternately growing a CrN layer and an AlCrTiSiYN layer.

3. The alcrnbsipibn-based nanocomposite coating of claim 2, wherein: in the CrN/AlCrTiSiYN nano-composite multilayer film, the single-layer thickness of CrN is 5-10 nanometers, the single-layer thickness of AlCrTiSiYN is 5-20 nanometers, and the modulation period is 10-30 nanometers.

4. The alcrnbsitiibn-based nanocomposite coating of claim 1, wherein: the AlCrNbSiTiBN/AlCrTiSiYN high-entropy alloy nitride nano composite multilayer film is formed by alternately growing AlCrTiSiYN layers and AlCrNbSiTiBN layers.

5. The AlCrNbSiTiBN-based nanocomposite coating of claim 4, wherein: the single-layer thickness of AlCrNbSiTiBN is 5-20 nanometers, the single-layer thickness of AlCrTiSiYN is 5-30 nanometers, and the modulation period is 10-50 nanometers.

6. A method for preparing the alcrnbsipibn-based nanocomposite coating of claim 1, comprising the steps of:

step 1, preparing an electric arc ion plating device, placing a formed hard alloy blade on a workpiece frame in a vacuum chamber of the electric arc ion plating device, and cleaning the hard alloy blade by adopting ion etching so that the surface of the hard alloy blade meets the requirement of film coating;

step 2, introducing nitrogen, starting a Cr target, and depositing a Cr film on the surface of the hard alloy blade as a bonding layer by adopting an arc ion plating technology;

step 3, starting the AlCrTiSiYN target, forming a CrN layer when the hard alloy blade rotates to the front of the Cr target, forming an AlCrTiSiYN layer when the hard alloy blade rotates to the front of the AlCrTiSiYN target, and forming an alternating CrN/AlCrTiSiYN nano composite multilayer film on the surface of the hard alloy blade layer by ceaselessly rotating the hard alloy blade;

step 4, closing the Cr target, then opening the AlCrNbSiTiB target, and alternately generating an AlCrTiSiYN layer and an AlCrNbSiTiB layer on the surface of the hard alloy blade in the rotating process to form an AlCrNbSiTiBN/AlCrTiSiYN high-entropy alloy nitride nano composite multilayer film; and then closing the arc ion plating device, and naturally cooling to obtain the high-entropy alloy nitride nano composite coating.

7. The method of claim 6, wherein the AlCrNbSiTiBN based nanocomposite coating comprises: in the step 1, the ion etching process comprises the following steps: and carrying out plasma etching on the hard alloy blade in an environment of 400-550 ℃ and argon and hydrogen.

8. The method of claim 6, wherein the AlCrNbSiTiBN based nanocomposite coating comprises: the technological parameters prepared in the step 2 are as follows: 100-500 nm binding layer is deposited under the conditions of 1-3Pa and 100-150V.

9. The method of claim 6, wherein the AlCrNbSiTiBN based nanocomposite coating comprises: the technological parameters prepared in the step 3 are as follows: depositing 1000-4000 nm CrN/AlCrTiSiYN nano-composite multilayer film under the conditions of 2-5Pa and 50-250V, wherein the single-layer thickness of CrN is 5-10 nm, the single-layer thickness of AlCrTiSiYN is 5-20 nm, and the modulation period is 10-30 nm.

10. The method of claim 6, wherein the AlCrNbSiTiBN based nanocomposite coating comprises: in the step 4, the preparation process parameters are as follows: depositing 1000-1000 nm AlCrNbSiTiBN/AlCrTiSiYN high entropy alloy nitride nano composite multilayer film under the conditions of 3-8Pa and 50-250V, wherein the single layer thickness of the AlCrNbSiTiBN is 5-20 nm, the single layer thickness of the AlCrTiSiYN is 5-30 nm, and the modulation period is 10-50 nm.