CN111307284A - Miniature near-infrared optical fiber spectrometer based on double detectors - Google Patents
Miniature near-infrared optical fiber spectrometer based on double detectors Download PDFInfo
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- CN111307284A CN111307284A CN202010152870.6A CN202010152870A CN111307284A CN 111307284 A CN111307284 A CN 111307284A CN 202010152870 A CN202010152870 A CN 202010152870A CN 111307284 A CN111307284 A CN 111307284A
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
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- G01J3/0294—Multi-channel spectroscopy
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/06—Scanning arrangements arrangements for order-selection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/359—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using near infrared light
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- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/06—Scanning arrangements arrangements for order-selection
- G01J2003/064—Use of other elements for scan, e.g. mirror, fixed grating
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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Abstract
The invention provides a micro near-infrared fiber spectrometer based on double detectors, which comprises: the collimation unit is used for collimating the composite light emitted by the near-infrared light source; the light splitting unit is used for dispersing the collimated composite light into monochromatic light beams with different wavelengths in space; the monochromatic light beams with different wavelengths which are sequentially arranged are divided into two monochromatic light beam sets with wave bands by the two concave focusing mirrors; the focusing units with the same number as the wave bands are used for respectively focusing the monochromatic light beams of the two wave bands; the detection units with the same number as the focusing units are used for continuously detecting the focused monochromatic light beams with two different wave bands respectively to obtain two sections of independent spectral information, and splicing the spectral information with the two wave bands is realized through later-stage software. According to the technology, two concave focusing mirrors are combined with a dual-channel independent design of two detectors, so that independent aberration elimination of a short wave band and a long wave band can be realized, the aberration is smaller, and the resolution ratio is higher.
Description
Technical Field
The invention relates to the technical field of spectral measurement, in particular to a miniature near-infrared optical fiber spectrometer based on double detectors.
Background
The analysis technology of the near-infrared optical fiber spectrometer is a modern analysis technology which utilizes different molecules or atoms to qualitatively and quantitatively detect the components and the content of unknown substances by utilizing different spectral compositions (including the aspects of wavelength, intensity, profile and the like) of light absorbed by the near-infrared region. The near-infrared optical fiber spectrometer based on the near-infrared optical fiber spectrometer analysis technology has the remarkable characteristics of rapidness, no damage, multivariate data analysis and the like, and becomes necessary detection equipment for environmental monitoring, food safety detection, biomedicine, aerospace, national safety and other fields relating to national economy and safety.
The near-infrared fiber spectrometer based on the MEMS technology takes an MEMS scanning grating micro-mirror as a core light splitting device, has the characteristics of small volume, low power consumption, low cost, portability and the like, and has become the mainstream development direction of the miniaturization of the current near-infrared fiber spectrometer. However, the wide spectrum and high resolution are always the technical problems which are difficult to break through by the near infrared fiber spectrometer.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, it is an object of the present invention to provide a dual detector-based micro near-infrared fiber optic spectrometer that solves at least one of the drawbacks of the prior art.
To achieve the above and other related objects, the present invention provides a dual-detector-based micro near-infrared fiber spectrometer, comprising:
the collimation unit is used for collimating the composite light;
the light splitting unit is used for dispersing the collimated composite light into monochromatic light beams with different wavelengths in space;
the monochromatic light beams with different wavelengths are divided into two sections of monochromatic light beam sets by the two focusing units and are focused;
the detection units with the same number as the focusing units are used for continuously detecting the focused light beams respectively to obtain independent spectral information.
Optionally, the method further comprises: and the filtering units are arranged in front of the detection units, and the monochromatic light beams of each waveband are collected to be incident into the corresponding detection units through the filtering units.
Optionally, the range of the filtered spectrum of each filtering unit is different.
Optionally, the method further comprises: and the emergent slits are arranged in the detection unit and the filtering unit.
Optionally, the method further comprises: and the incident slit is arranged in front of the collimation unit.
Optionally, the response range of each of the detection units is different.
Optionally, the collimating unit comprises at least a concave collimating mirror.
Optionally, the light splitting unit comprises at least a MEMS scanning grating micro-mirror.
Optionally, the focusing unit is a concave focusing mirror.
Optionally, each of the focusing units is independent of the other.
As mentioned above, the micro near-infrared fiber spectrometer based on the double detectors has the following beneficial effects:
according to the technology, two concave focusing mirrors are combined with a dual-channel independent design of two detectors, so that the independent aberration elimination design of a short wave band and a long wave band can be realized, the aberration is smaller, and the resolution ratio is higher. In addition, the design of adding the long-wave pass color filter before two emergent slits can effectively filter the spectrum order overlapping of the short wave band and the long wave band, and the signal-to-noise ratio of the instrument is improved.
Drawings
FIG. 1 is a schematic diagram of a dual-detector-based micro near-infrared fiber spectrometer according to the present invention.
Detailed Description
The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will become apparent to those skilled in the art from the present disclosure.
It should be understood that the structures, ratios, sizes, and the like shown in the drawings and described in the specification are only used for matching with the disclosure of the specification, so as to be understood and read by those skilled in the art, and are not used to limit the conditions under which the present invention can be implemented, so that the present invention has no technical significance, and any structural modification, ratio relationship change, or size adjustment should still fall within the scope of the present invention without affecting the efficacy and the achievable purpose of the present invention. In addition, the terms "upper", "lower", "left", "right", "middle" and "one" used in the present specification are for clarity of description, and are not intended to limit the scope of the present invention, and the relative relationship between the terms and the terms is not to be construed as a scope of the present invention.
The invention provides a micro near-infrared fiber spectrometer based on double detectors, which comprises:
the collimation unit is used for collimating the composite light;
the light splitting unit is used for dispersing the collimated composite light into monochromatic light beams with different wavelengths in space;
the monochromatic light beams with different wavelengths are divided into two sections of monochromatic light beam sets by the two focusing units and are focused;
the detection units with the same number as the focusing units are used for continuously detecting the focused light beams respectively to obtain independent spectral information.
In one embodiment, each of the focusing units is independent of the other.
The invention takes the MEMS scanning grating micro-mirror as a core light-splitting scanning device, and completes the design of two independent optical channels of a short wave band and a long wave band through two focusing mirrors, thereby realizing the independent optimization of the aberration of the two single-tube detectors and improving the integral resolution.
In one embodiment, the method further comprises: and the filtering units are arranged in front of the detection units, and the monochromatic light beams of each waveband are collected to be incident into the corresponding detection units through the filtering units.
In one embodiment, each of the filtering units filters a different range of the spectrum.
In one embodiment, the method further comprises: and the emergent slits are arranged in the detection unit and the filtering unit.
In one embodiment, the method further comprises: and the incident slit is arranged in front of the collimation unit.
In one embodiment, the response range of each of the detection units is different.
In an embodiment, the collimating unit comprises at least a concave collimating mirror.
In one embodiment, the light splitting unit comprises at least a MEMS scanning grating micro-mirror.
In one embodiment, the focusing unit is a concave focusing mirror.
The invention will be further explained below by taking an example that the light splitting unit spatially disperses the collimated composite light into a plurality of monochromatic light beams with different wavelengths, and the light includes a set of monochromatic light beams with two wavelength bands, namely a long wavelength band and a short wavelength band. Correspondingly, the invention comprises two focusing units, two detecting units and two filtering units.
The filtering unit comprises a first long-wave pass filter 7 and a second long-wave pass filter 8; the focusing unit comprises a first concave focusing mirror 5 and a second concave focusing mirror 6; the detection unit comprises a first detector 11 and a second detector 12.
The MEMS scanning grating micro-mirror 4 is processed by adopting an MEMS process, the front side is integrated with a grating, and the back side is integrated with a driving structure, so that the MEMS scanning grating micro-mirror is driven to integrally do periodic reciprocating motion. The grating constant is 4 μm, the blaze angle is 8.9 degrees, the diffraction order is +1 order, and the diffraction light splitting of the near infrared band in the range of 800-2500nm can be realized. The designed incident angle was 45.02 °, the short-band diffraction angle was 11.25 °, and the long-band diffraction angle was 24.32 °. When the MEMS scanning grating micro-mirror rotates, monochromatic light with different wavelengths respectively sequentially passes through the first concave focusing mirror 5 and the second concave focusing mirror 6, and the reflection angle of the first concave focusing mirror 5 is 9.12 degrees and the reflection angle of the second concave focusing mirror 6 is 16.85 degrees through the design that the MEMS scanning grating micro-mirror is +/-6 degrees, so that the spectrum scanning range of a short wave band is 800 nm-1600 nm, and the spectrum scanning range of a long wave band is 1600 nm-2500 nm.
The first detector 11 is an InGaAs single-tube detector with a diameter of 0.5mm, the detectable wavelength range is 1700nm, the second detector 12 is an InGaAs single-tube detector with a diameter of 0.5mm, the detectable wavelength range is 2600nm, and the scanning light splitting ranges of the short wave band and the long wave band of the MEMS scanning grating micro-mirror are respectively covered. In addition, a first long-wavelength pass filter 7 and a second long-wavelength pass filter 8 are respectively designed in front of the first detector 11 and the second detector 12, wherein the transmission wavelength of the first long-wavelength pass filter 7 is more than 800nm, the transmission wavelength of the second long-wavelength pass filter 8 is more than 1600nm, and the respective spectral order overlapping of the two channels of the short wavelength band and the long wavelength band can be effectively filtered by adding the first long-wavelength pass filter 7 and the second long-wavelength pass filter 8. The widths of the first emergent slit 11 and the second emergent slit 12 are both 50 micrometers, so that the size of emergent light spots is effectively limited, and the integral resolution of the instrument is favorably improved.
Wherein, the first concave focusing mirror 5, the first long-wave pass color filter 7, the first emergent slit 9 and the first detector 11 are short-wave band light channels; the second concave focusing mirror 6, the second long-wave pass color filter 8, the second emergent slit 10 and the second detector 12 are long-wave band light channels. The first concave focusing mirror 5, the second concave focusing mirror 6, the first emergent slit 9, the second emergent slit 10, the first detector 11 and the second detector 12 can be respectively and independently designed and adjusted, so that aberration can be optimized conveniently, and the overall resolution is improved. The first long-wave pass color filter 8 and the second long-wave pass color filter 10 have different wave band passing ranges, so that stray light of different wave bands can be filtered conveniently, and the signal to noise ratio is improved.
As shown in fig. 1, a schematic structural diagram of a dual-detector-based micro near-infrared fiber spectrometer is shown, in which a composite light emitted from a light source 1 enters a concave collimating mirror 3 after entering an incident slit 2, enters a grating surface on the front surface of an MEMS scanning grating micro-mirror 4 in a parallel light manner after being collimated, and becomes monochromatic lights with different wavelengths including short wave bands and long wave bands after being split by the grating surface, the short wave bands enter a first concave focusing mirror 5, and the short wave bands enter a first detector 11 after being focused through a first long wave, a color filter 7 and a first exit slit 9. Similarly, the long wave band enters the second concave focusing mirror 6, passes through the second long wave pass filter 8 after being focused, and then enters the second detector 12 through the second exit slit 10.
It will be understood by those skilled in the art that the related modules and the functions implemented by the related modules in the present invention are implemented by carrying a conventional computer software program or related protocol on the modified hardware and the apparatuses, devices or systems formed by the hardware, devices or systems, and are not modifications of the computer software program or related protocol in the prior art. For example, the improved computer hardware system can still realize the specific functions of the hardware system by loading the existing software operating system. Therefore, it can be understood that the innovation of the present invention lies in the improvement of the hardware module and the connection combination relationship thereof in the prior art, rather than the improvement of the software or the protocol loaded in the hardware module for realizing the related functions.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (10)
1. A miniature near-infrared fiber optic spectrometer based on two detectors, comprising:
the collimation unit is used for collimating the composite light;
the light splitting unit is used for dispersing the collimated composite light into monochromatic light beams with different wavelengths in space;
the monochromatic light beams with different wavelengths are divided into two sections of monochromatic light beam sets by the two focusing units and are focused;
the detection units with the same number as the focusing units are used for continuously detecting the focused light beams respectively to obtain independent spectral information.
2. The near-infrared fiber optic spectrometer of claim 1, further comprising:
and the filtering units are arranged in front of the detection units, and the monochromatic light beams of each waveband are collected to be incident into the corresponding detection units through the filtering units.
3. The nir optical fiber spectrometer of claim 1, wherein each of the filter units filters a different spectrum.
4. The near-infrared fiber optic spectrometer of claim 2, further comprising:
and the emergent slits are arranged in the detection unit and the filtering unit.
5. The near-infrared fiber optic spectrometer of claim 1 or 4, further comprising:
and the incident slit is arranged in front of the collimation unit.
6. The near-infrared fiber optic spectrometer of claim 1, wherein the response range of each of the detection units is different.
7. The near-infrared fiber optic spectrometer of claim 1, wherein the collimating unit comprises at least a concave collimating mirror.
8. The near-infrared fiber spectrometer of claim 1, wherein the light splitting unit comprises at least a MEMS scanning grating micro-mirror.
9. The near-infrared fiber optic spectrometer of claim 1, wherein the focusing unit is a concave focusing mirror.
10. The near-infrared fiber optic spectrometer of claim 1, wherein each of the focusing cells is independent of each other.
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| CN202010152870.6A CN111307284A (en) | 2020-03-06 | 2020-03-06 | Miniature near-infrared optical fiber spectrometer based on double detectors |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102359949A (en) * | 2011-09-20 | 2012-02-22 | 重庆大学 | High resolution micro infrared spectrometer based on MEMS scanning micromirror |
| CN103698313A (en) * | 2013-12-31 | 2014-04-02 | 中国科学院合肥物质科学研究院 | Water vapor Raman laser radar ultraviolet high-resolution grating spectrometer |
| CN106404713A (en) * | 2016-11-23 | 2017-02-15 | 重庆大学 | Double-detector micro near-infrared spectrometer with whole spectral band of 800-2,500nm |
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2020
- 2020-03-06 CN CN202010152870.6A patent/CN111307284A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102359949A (en) * | 2011-09-20 | 2012-02-22 | 重庆大学 | High resolution micro infrared spectrometer based on MEMS scanning micromirror |
| CN103698313A (en) * | 2013-12-31 | 2014-04-02 | 中国科学院合肥物质科学研究院 | Water vapor Raman laser radar ultraviolet high-resolution grating spectrometer |
| CN106404713A (en) * | 2016-11-23 | 2017-02-15 | 重庆大学 | Double-detector micro near-infrared spectrometer with whole spectral band of 800-2,500nm |
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