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CN110927884B - Integrated high roll-off optical filter - Google Patents

Integrated high roll-off optical filter Download PDF

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Publication number
CN110927884B
CN110927884B CN201911211536.7A CN201911211536A CN110927884B CN 110927884 B CN110927884 B CN 110927884B CN 201911211536 A CN201911211536 A CN 201911211536A CN 110927884 B CN110927884 B CN 110927884B
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ring
optical filter
order micro
micro
waveguide
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CN110927884A (en
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张磊
王皓岩
杨林
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Institute of Semiconductors of CAS
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/28Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29331Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
    • G02B6/29335Evanescent coupling to a resonator cavity, i.e. between a waveguide mode and a resonant mode of the cavity
    • G02B6/29338Loop resonators
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/28Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29331Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
    • G02B6/29335Evanescent coupling to a resonator cavity, i.e. between a waveguide mode and a resonant mode of the cavity
    • G02B6/29338Loop resonators
    • G02B6/29343Cascade of loop resonators

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

一种集成化光滤波器,所述光滤波器包括:输入光波导,用于输入待处理的宽带光信号;高阶微环光滤波器,包括第一级高阶微环光滤波器和第二级高阶微环光滤波器,每级高阶微环光滤波器均包括高阶微环谐振腔和与其相邻的输入端直波导和下载端直波导;中间光波导,包括第一中间光波导和第二中间光波导,用于传输不同高阶微环光滤波器间的宽带光信号;输出光波导,用于输出经所述第二级高阶微环光滤波器下载的宽带光信号,完成所述集成化光滤波器的滤波功能。该滤波器的输入光信号在经过所述第一级高阶微环光滤波器后,直通端和下载端分别进行了两次完全相同的滤波过程,使得滤波曲线的消光比成两倍数增加,同时提高了谱线的滚降速率。

Figure 201911211536

An integrated optical filter, the optical filter includes: an input optical waveguide for inputting a broadband optical signal to be processed; a high-order micro-ring optical filter, including a first-stage high-order micro-ring optical filter and a first-stage high-order micro-ring optical filter Two-stage high-order micro-ring optical filter, each high-order micro-ring optical filter includes a high-order micro-ring resonator and its adjacent straight waveguide at the input end and straight waveguide at the download end; the intermediate optical waveguide includes the first intermediate The optical waveguide and the second intermediate optical waveguide are used to transmit broadband optical signals between different high-order micro-ring optical filters; the output optical waveguide is used to output the broadband light transmitted by the second-stage high-order micro-ring optical filter signal to complete the filtering function of the integrated optical filter. After the input optical signal of the filter passes through the first-stage high-order micro-ring optical filter, the straight-through end and the download end respectively carry out two identical filtering processes, so that the extinction ratio of the filtering curve is doubled, At the same time, the roll-off rate of the spectral line is improved.

Figure 201911211536

Description

Integrated high roll-off optical filter
Technical Field
The invention relates to the technical field of optical fiber communication, in particular to an integrated high-roll-off optical filter.
Background
Photons have great advantages as information carriers, such as mutual interference resistance, large transmission bandwidth, high speed, electromagnetic interference resistance and the like, and are widely applied to the technical field of long-distance optical fiber communication. The optical filter is crucial to routing in Wavelength Division Multiplexing (WDM) network applications, and can select signals of different frequencies by using the optical filter to realize functions such as demultiplexing. Compared with the traditional electronic technology, the microwave signal with high frequency bandwidth can be directly filtered, and the method has great significance in the high-level application aspects of broadband access, quantum communication, laser radar and astronomical systems. The selectivity of the target frequency band is an important index of an optical filter applied to microwave photon signal processing, which requires that the optical filter has a high roll-off rate and a narrower passband bandwidth, and the smaller the proportion of the passband bandwidth in a free spectral region, the stronger the selectivity. The optical filter based on integrated photonics is convenient for large-scale integration, and meanwhile, a mature semiconductor process processing platform is utilized, so that large-scale low-cost mass production can be realized. Common high roll-off rate narrowband optical filters often adopt structures such as Fiber Bragg Gratings (FBGs) and Mach-Zehnder (MZ, Mach-Zehnder), but the above schemes have the problems of large loss, large volume, high cost, poor stability, difficult adjustment and control and the like.
Disclosure of Invention
It is therefore an object of the present invention to provide an integrated high roll-off optical filter, which is aimed at least partially solving at least one of the above-mentioned problems.
In order to achieve the above object, the present invention provides an integrated optical filter comprising:
an input optical waveguide 100 for inputting a broadband optical signal to be processed;
the high-order micro-ring optical filter 200 comprises a first-order micro-ring optical filter 201 and a second-order micro-ring optical filter 202, each of the high-order micro-ring optical filters 201 and 202 comprises a high-order micro-ring resonant cavity and an input end straight waveguide and a download end straight waveguide adjacent to the high-order micro-ring resonant cavity, after a broadband optical signal enters the input end of the high-order micro-ring optical filter 201 and 202, namely the input end straight waveguide, when a broadband optical signal waveband meets the resonance condition of the high-order micro-ring optical filter 201 and 202 micro-ring resonant cavity, the broadband optical signal waveband is coupled into the download end straight waveguide of the high-order micro-ring optical filter 201 and 202 through the high-order micro-ring optical filter 201 and 202 and is output from the download end of the high-order micro-ring optical filter 201 and 202, namely the output end of the download end straight waveguide, while the broadband optical signal waveband not meeting the resonance condition of the high-order micro-ring resonant cavity is retained, 202, i.e. the straight-through end of the input-end straight waveguide, so as to realize filtering of the input broadband optical signal;
an intermediate optical waveguide 300 including a first intermediate optical waveguide 301 and a second intermediate optical waveguide 302 for transmitting a broadband optical signal between different high-order micro-ring optical filters; the high-order micro-ring optical filter 200 and the intermediate optical waveguide 300 are arranged in a staggered manner, and specifically include: the input end straight waveguide of the first-stage high-order micro-ring optical filter 201 comprises a left end and a right end which are respectively an access end and a through end, wherein the access end is connected with the input optical waveguide 100, and the through end is connected with one end of the first intermediate optical waveguide 301; the output end straight waveguide of the first-stage high-order micro-ring optical filter 201 comprises an upper end and a lower end, the upper end is connected with the other end of the first middle optical waveguide 301, the lower end is connected with one end of the second middle optical waveguide 302, and the other end of the second middle optical waveguide 302 is connected with the input end of the input end straight waveguide of the second-stage high-order micro-ring optical filter 202;
and an output optical waveguide 400 connected to the download end of the second-stage high-order micro-ring optical filter 202, and configured to output the broadband optical signal downloaded by the second-stage high-order micro-ring optical filter 202, so as to complete the filtering function of the integrated optical filter.
The high-order microring resonators in the high-order microring optical filter 200 are all in a series structure, and the high-order microring optical filter 200 includes at least two high-order microring resonators in the same number.
The first-stage high-order micro-ring optical filter 201 has a symmetrical structure, the distances between micro-rings in the internal high-order micro-ring resonator are equal, and the distances between the internal high-order micro-ring resonator and two surrounding straight waveguides are also equal, so that two paths of light waves at the straight-through end and the download end have the same flat-top filtering curve shape and the same high-order central wavelength under the two filtering actions in the high-order micro-ring filter.
Wherein, the micro-ring radius, the waveguide width and the waveguide thickness of the micro-ring resonators inside the second-stage micro-ring filter 202 and the first-stage high-order micro-ring filter 201 are kept consistent.
The distance between the micro-ring resonator in the second-stage high-order micro-ring optical filter 202 and the two straight waveguides is greater than the distance between the micro-ring resonator in the first-stage high-order micro-ring optical filter 201 and the two straight waveguides.
After the input broadband optical signal passes through the first-stage high-order micro-ring optical filter 201, the through end and the download end respectively perform two identical filtering processes, and the result of the two filtering superpositions generates a spectrum similar to electromagnetic induction transparency.
The central wavelength of the filter curve of the high-order micro-ring optical filter 200 can be tuned independently, so that the central wavelength of the integrated optical filter can be tuned.
The high-order micro-ring optical filter 200 can independently tune the central wavelength of the filter curve thereof through a thermo-optic effect or an electro-optic effect.
The high-order micro-ring optical filter 200 can be manufactured on a lithium niobate, silicon dioxide, indium phosphide, or gallium arsenide platform by a semiconductor process.
An optical communication device for optical filtering using an integrated optical filter as described above.
Based on the technical scheme, compared with the prior art, the integrated high roll-off optical filter has at least one of the following beneficial effects:
after an input optical signal of the filter passes through the first-stage high-order micro-ring optical filter, the through end and the download end respectively carry out twice identical filtering processes, and a result of twice filtering superposition generates an electromagnetic induction transparent spectrum, so that the extinction ratio of a filtering curve is increased by two times, and the roll-off rate of a spectral line is improved.
Drawings
FIG. 1 is a schematic structural diagram of an integrated high roll-off optical filter according to the present invention, using an odd number of micro-ring cascaded high-order micro-ring resonators;
FIG. 2 is a schematic structural diagram of an integrated high roll-off optical filter according to the present invention with an even number of micro-ring cascaded high-order micro-ring resonators;
fig. 3 is a schematic diagram of the structure of a high-order micro-ring optical filter and spectral lines at the download end and the through end thereof in odd and even numbers of micro-ring cascades, wherein (a) is the structure of a first-order micro-ring optical filter 201 in odd numbers of micro-ring cascades, (b) is the structure of a second-order micro-ring optical filter 202 in even numbers of micro-ring cascades, and (c) is a schematic diagram of the filtering curves at the through end and the download end;
fig. 4 is a combined filtering curve of a download end and a through end of a first-stage and a second-stage high-order micro-ring optical filters in a device working state under a high-order micro-ring resonator adopting odd number of micro-ring cascades, wherein (a) is the combined filtering curve of the through end, and (b) is the combined filtering curve of the download end;
fig. 5 is a combined filter curve of a download end and a through end of a first-stage and a second-stage high-order micro-ring optical filters in a device working state under a high-order micro-ring resonator adopting an even number of micro-ring cascades, wherein (a) is the combined filter curve of the through end, and (b) is the combined filter curve of the download end;
FIG. 6 is a diagram showing the filtering curves of each stage of the device in the operating state, wherein (a) is the combined filtering curve of the first and second stage high-order micro-ring optical filters, and the filtering spectrum of the combined filtering curve includes a narrow peak in the groove; (b) a filter curve of a third-level high-order micro-ring optical filter is obtained; (c) the filter curve of the output end of the integrated optical filter formed by cascading the three-level high-order micro-ring optical filters is shown.
In the above drawings, the reference numerals have the following meanings:
100-input optical waveguide
200-high order micro-ring optical filter
201-first order micro-ring optical filter 202-second order micro-ring optical filter
300-intermediate optical waveguide
301-first intermediate optical waveguide 302-second intermediate optical waveguide
400-output optical waveguide
Detailed Description
In order that the objects, technical solutions and advantages of the present invention will become more apparent, the present invention will be further described in detail with reference to the accompanying drawings in conjunction with the following specific embodiments.
Referring to fig. 1 and 2, the present invention discloses an integrated high roll-off optical filter, including:
the optical waveguide 100 is used for inputting a broadband optical signal to be processed.
The high-order micro-ring optical filter 200 comprises a first-order micro-ring optical filter 201 and a second-order micro-ring optical filter 202, wherein each high-order micro-ring optical filter consists of a high-order micro-ring resonator and two straight waveguides close to the high-order micro-ring resonator and is used for filtering a broadband optical signal input into the straight waveguides, after the optical signal enters a certain straight waveguide, a wave band meeting the high-order micro-ring resonance condition is coupled to a downloading end of another straight waveguide through a high-order micro-ring, and a wave band not meeting the high-order micro-ring resonance condition is reserved at a straight end of the original straight waveguide.
Fig. 3 is a schematic diagram of the structure of a high-order micro-ring optical filter and spectral lines at a download end and a through end thereof under odd and even numbers of micro-ring cascades, wherein fig. 3(a) is a structure of a first-order micro-ring optical filter 201 under odd numbers of micro-ring cascades, fig. 3(b) is a structure of a second-order micro-ring optical filter 202 under even numbers of micro-ring cascades, and fig. 3(c) is a schematic diagram of a filtering curve at the through end and the download end;
it can be seen that the only difference between the high-order micro-ring optical filters in the odd-numbered micro-ring cascade and the even-numbered micro-ring cascade is that the directions of the downloading terminals are different, but the filtering curves of the downloading terminals are identical, so that two different integrated high-roll-off optical filter structures shown in fig. 1 and 2 can be caused, but the working principles of the two structures and the filtering results are completely equivalent.
The intermediate optical waveguide 300 includes a first intermediate optical waveguide 301 and a second intermediate optical waveguide 302 for transmitting signal light between different high-order micro-ring optical filters.
In the embodiment of the present invention, the high-order microring resonators in the high-order microring optical filter 200 all adopt a series structure, and the number of microrings included in the high-order microring resonators is the same, and is at least two; the distances between the micro-rings in the high-order micro-ring resonator in the first-stage high-order micro-ring optical filter are equal, and the distances between the high-order micro-ring resonator and two sections of surrounding straight waveguides are also equal; the second-stage high-order micro-ring optical filter 202 and the first-stage high-order micro-ring optical filter 201 have design parameters which are not completely the same, the micro-ring radius, the waveguide width and the waveguide thickness of the micro-ring resonators in the second-stage high-order micro-ring optical filter 202 are kept consistent, but the distance between the micro-ring resonators in the second-stage high-order micro-ring optical filter 202 and the two sections of straight waveguides is larger than the distance between the micro-ring resonators in the first-stage micro-ring optical filter 201 and the two sections of straight waveguides.
The high-order micro-ring optical filter 200 is arranged in a staggered manner with the intermediate optical waveguide 300, the input optical waveguide 100 is connected with an input end of a waveguide above the first-stage high-order micro-ring optical filter 201, a through end corresponding to the input end is connected with another waveguide of the first-stage high-order micro-ring optical filter 201 through the intermediate optical waveguide 301, and the waveguide is then connected with the second-stage high-order micro-ring optical filter 202 through the intermediate optical waveguide 303.
And the output optical waveguide 400 is configured to output the signal light at the download end of the second-stage high-order micro-ring optical filter 202, so as to complete the filtering function of the integrated optical filter.
Specifically, as shown in fig. 4 and 5, after a broadband optical signal to be processed enters an input end of a first-stage high-order micro-ring optical filter 201 by using an input optical waveguide 100, a first-pass end of the broadband optical signal successively performs two filtering processes, as shown in fig. 4(a) or fig. 5(a), after entering from a left end of an L1 waveguide, signal light enters an intermediate optical waveguide 301 from a right end of an L1 waveguide through a corresponding first-pass end of the signal light, so as to complete first filtering, and then enters an upper end of an L2 waveguide, and then enters an intermediate optical waveguide 302 from a lower end of an L2 waveguide through a corresponding first-pass end of the signal light, so as to complete second; the process of filtering twice at the downloading end is shown as the processes of first and second in fig. 4(b) or fig. 5(b), after signal light enters from the left end of the L1 waveguide, the signal light enters the intermediate optical waveguide 301 from the upper end of the L2 waveguide through the corresponding straight-through end to complete first filtering, and then enters the right end of the L1 waveguide, the signal light enters the intermediate optical waveguide 302 from the lower end of the L2 waveguide through the corresponding straight-through end to complete second filtering;
the signal light is combined in the middle optical waveguide 302 through the two straight-through end filtering curves and the two downloading end filtering curves after passing through the first-stage high-order micro-ring optical filter 201, because the distances between micro-rings in the high-order micro-ring resonator inside the first-stage high-order micro-ring optical filter 201 are equal, and the distances between the high-order micro-ring resonator inside the first-stage high-order micro-ring optical filter 201 and two surrounding straight waveguides are also equal, the two filtering functions of the straight-through end and the downloading end in the high-order micro-ring optical filter are ensured, the two filtering curves have the same shape and the central wavelength of a resonance peak, and the result of the two filtering superposition can generate a spectrum which is similar to an Electromagnetic Induced Transparency (EIT) as shown in fig. 6(a) at the middle optical waveguide 302, and;
finally, the signal light in the intermediate optical waveguide 302 enters the second-stage high-order micro-ring optical filter 202, and since the filter curve at the downstream end of the second-stage high-order micro-ring optical filter 202 is as shown in fig. 6(b), the filtering result shown in fig. 6(c) will be generated at the downstream end and output through the output optical waveguide 400.
In summary, the embodiment of the invention obtains a high-performance filtering spectrum with low loss, high quality factor and integrated high roll-off, and completes the filtering function of the integrated optical filter.
In the embodiment of the present disclosure, the central wavelength of the filter curves of the first and second-stage high-order micro-ring optical filters 201 and 202 can be tuned independently, so that the central wavelength of the high roll-off rate optical filter can be tunable.
In the embodiment of the present disclosure, the high-order micro-ring optical filter 200 can tune the center wavelength of its filter curve through thermo-optic effect or electro-optic effect.
In the embodiment of the present disclosure, the high-order micro-ring filter 200 may be implemented on a platform of lithium niobate, silicon dioxide, indium phosphide, or gallium arsenide through a semiconductor process.
And the shapes and sizes of the respective components in the drawings do not reflect actual sizes and proportions, but merely illustrate the contents of the embodiments of the present disclosure. Furthermore, in the claims, any reference signs placed between parentheses shall not be construed as limiting the claim.
The use of ordinal numbers such as "first," "second," "third," etc., in the specification and claims to modify a corresponding element does not by itself connote any ordinal number of the element or any ordering of one element from another or the order of manufacture, and the use of the ordinal numbers is only used to distinguish one element having a certain name from another element having a same name.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (9)

1.一种集成化光滤波器,其特征在于,包括:1. an integrated optical filter, is characterized in that, comprises: 输入光波导(100),用于输入待处理的宽带光信号;an input optical waveguide (100) for inputting a broadband optical signal to be processed; 高阶微环光滤波器(200),包括第一级高阶微环光滤波器(201)和第二级高阶微环光滤波器(202),每级高阶微环光滤波器(201、202)均包括高阶微环谐振腔和与其相邻的输入端直波导和下载端直波导,在宽带光信号进入所述高阶微环光滤波器(201、202)的输入端,即输入端直波导的输入端后,当宽带光信号波段满足所述高阶微环光滤波器(201、202)微环谐振腔的谐振条件时,通过所述高阶微环谐振腔耦合至所述高阶微环光滤波器(201、202)的下载端直波导中并从所述高阶微环光滤波器(201、202)的下载端,即下载端直波导的输出端输出,而不满足高阶微环谐振腔的谐振条件的宽带光信号波段则保留在所述输入端直波导中并通过所述高阶微环光滤波器(201、202)的直通端,即所述输入端直波导的直通端输出,从而实现对输入的宽带光信号的滤波;A high-order micro-ring optical filter (200), comprising a first-order high-order micro-ring optical filter (201) and a second-order high-order micro-ring optical filter (202), each stage high-order micro-ring optical filter ( 201, 202) both include a high-order micro-ring resonant cavity, an input-end straight waveguide and a downloading-end straight waveguide adjacent to it, and when the broadband optical signal enters the input end of the high-order micro-ring optical filter (201, 202), That is, after the input end is straight to the input end of the waveguide, when the broadband optical signal band meets the resonance conditions of the micro-ring resonator of the high-order micro-ring optical filter (201, 202), the high-order micro-ring resonator is coupled to the high-order micro-ring resonator. The high-order micro-ring optical filters (201, 202) are in the straight waveguide at the downloading end and output from the downloading end of the high-order micro-ring optical filter (201, 202), that is, the output end of the straight waveguide at the downloading end, The broadband optical signal band that does not meet the resonance conditions of the high-order micro-ring resonator is retained in the straight waveguide at the input end and passes through the straight-through ends of the high-order micro-ring optical filters (201, 202), that is, the The straight-through end of the straight waveguide at the input end is output, so as to realize the filtering of the input broadband optical signal; 中间光波导(300),包括第一中间光波导(301)和第二中间光波导(302),用于传输不同高阶微环光滤波器间的宽带光信号;其中,所述高阶微环光滤波器(200)与所述中间光波导(300)交错排列,具体包括:所述第一级高阶微环光滤波器(201)的输入端直波导包括两端,分别为接入端和直通端,所述接入端连接所述输入光波导(100),所述直通端连接所述第一中间光波导(301)的一端;所述第一级高阶微环光滤波器(201)的输出端直波导包括两端,分别为上端和下端,所述上端连接第一中间光波导(301)的另一端,所述下端连接所述第二中间光波导(302)的一端,所述第二中间光波导(302)的另一端连接第二级高阶微环光滤波器(202)的输入端直波导的输入端;An intermediate optical waveguide (300), comprising a first intermediate optical waveguide (301) and a second intermediate optical waveguide (302), is used for transmitting broadband optical signals between different high-order micro-ring optical filters; The ring optical filter (200) is staggered with the intermediate optical waveguide (300), and specifically includes: the input end straight waveguide of the first-stage high-order micro-ring optical filter (201) includes two ends, which are respectively connected to and a straight-through end, the access end is connected to the input optical waveguide (100), and the straight-through end is connected to one end of the first intermediate optical waveguide (301); the first-stage high-order micro-ring optical filter The output straight waveguide of (201) includes two ends, an upper end and a lower end, the upper end is connected to the other end of the first intermediate optical waveguide (301), and the lower end is connected to one end of the second intermediate optical waveguide (302). , the other end of the second intermediate optical waveguide (302) is connected to the input end of the second-stage high-order micro-ring optical filter (202) straight to the input end of the waveguide; 输出光波导(400),与所述第二级高阶微环光滤波器(202)的下载端连接,用于输出经所述第二级高阶微环光滤波器(202)下载的宽带光信号,完成所述集成化光滤波器的滤波功能;The output optical waveguide (400) is connected to the download end of the second-stage high-order micro-ring optical filter (202), and is used for outputting the broadband downloaded by the second-stage high-order micro-ring optical filter (202) optical signal to complete the filtering function of the integrated optical filter; 所述输入宽带光信号在经过所述第一级高阶微环光滤波器(201)后,直通端和下载端分别进行了两次完全相同的滤波过程,两次滤波叠加的结果产生了类似于电磁诱导透明的光谱。After the input broadband optical signal passes through the first-stage high-order micro-ring optical filter (201), the straight-through end and the download end respectively perform two identical filtering processes, and the results of the two filtering and superposition produce similar results. spectrum for electromagnetically induced transparency. 2.根据权利要求1所述的集成化光滤波器,其特征在于,所述高阶微环光滤波器(200)内的高阶微环谐振器均采用串联结构,且所述高阶微环光滤波器(200)包含的高阶微环谐振器的数目相同,数量至少为两个。2. The integrated optical filter according to claim 1, wherein the high-order micro-ring resonators in the high-order micro-ring optical filter (200) all adopt a series structure, and the high-order micro-ring resonators The ring light filter (200) contains the same number of high-order micro-ring resonators, and the number is at least two. 3.根据权利要求1所述的集成化光滤波器,其特征在于,所述第一级高阶微环光滤波器(201)为对称结构,内部的高阶微环谐振器中微环之间的距离相等,内部的高阶微环谐振器与周围两段直波导之间的距离也相等,从而使得直通端和下载端两路光波在该第一级高阶微环光 滤波器内的两次滤波作用下,具有相同的平顶滤波曲线形状和相同高阶的中心波长。3. The integrated optical filter according to claim 1, wherein the first-order high-order micro-ring optical filter (201) has a symmetrical structure, and the inner high-order micro-ring resonator is between the micro-rings The distance between them is equal, and the distance between the inner high-order micro-ring resonator and the two surrounding straight waveguides is also equal, so that the two-way light waves of the straight-through end and the downloading end are in the first-order high-order micro-ring optical filter. Under the action of the two filters, it has the same flat-top filter curve shape and the same high-order center wavelength. 4.根据权利要求1所述的集成化光滤波器,其特征在于,所述第二级高阶 微环光 滤波器(202)与第一级高阶微环光 滤波器(201)两者内部的微环谐振器的微环半径、波导宽度和波导厚度保持一致。4. The integrated optical filter according to claim 1, characterized in that, both the second-order high-order micro-ring optical filter (202) and the first-order high-order micro-ring optical filter (201) The microring radius, waveguide width and waveguide thickness of the inner microring resonator are kept the same. 5.根据权利要求1所述的集成化光滤波器,其特征在于,所述第二级高阶微环光滤波器(202)内微环谐振器与两段直波导之间的距离要大于第一级高阶微环光滤波器(201)内微环谐振器与两段直波导之间的距离。5. The integrated optical filter according to claim 1, wherein the distance between the micro-ring resonator and the two straight waveguides in the second-stage high-order micro-ring optical filter (202) is greater than The distance between the micro-ring resonator in the first-stage high-order micro-ring optical filter (201) and the two straight waveguides. 6.根据权利要求1所述的集成化光滤波器,其特征在于,通过对所述高阶微环光滤波器(200)的滤波曲线的中心波长进行独立调谐,能够实现所述集成化光滤波器中心波长的可调谐。6. The integrated optical filter according to claim 1, wherein the integrated optical filter can be realized by independently tuning the central wavelength of the filter curve of the high-order micro-ring optical filter (200). Tunable filter center wavelength. 7.根据权利要求6所述的集成化光滤波器,其特征在于,所述高阶微环光滤波器(200)能够通过热光效应或电光效应对其滤波曲线中心波长进行独立调谐。7 . The integrated optical filter according to claim 6 , wherein the high-order micro-ring optical filter ( 200 ) can independently tune the central wavelength of its filter curve through thermo-optic effect or electro-optic effect. 8 . 8.根据权利要求1所述的集成化光滤波器,其特征在于,所述高阶微环光滤波器(200)能够在铌酸锂、硅、二氧化硅、磷化铟、砷化镓平台上通过半导体工艺制作实现。8. The integrated optical filter according to claim 1, characterized in that, the high-order micro-ring optical filter (200) can be used in lithium niobate, silicon, silicon dioxide, indium phosphide, and gallium arsenide. The platform is realized by semiconductor process fabrication. 9.一种采用如权利要求1~8任一项所述的集成化光滤波器进行光滤波的光通信设备。9. An optical communication device using the integrated optical filter according to any one of claims 1 to 8 for optical filtering.
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