CN110873585A - Grating encoder and device thereof - Google Patents
Grating encoder and device thereof Download PDFInfo
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- CN110873585A CN110873585A CN201811019331.4A CN201811019331A CN110873585A CN 110873585 A CN110873585 A CN 110873585A CN 201811019331 A CN201811019331 A CN 201811019331A CN 110873585 A CN110873585 A CN 110873585A
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- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/249—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using pulse code
- G01D5/2497—Absolute encoders
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Abstract
A trellis encoder adapted to be mounted on a linear shaft includes a base body formed of a magnetically conductive material and a trellis encoding unit. The grid coding unit comprises a grid coding group arranged on the base body and a position grid coding group which is arranged adjacent to the grid coding group and is positioned on the same surface, the grid coding group is provided with a plurality of concave parts which extend along the axis of the base body and are arranged at intervals along the radial direction of the axis, and the position grid coding group is provided with a plurality of concave parts which extend along the radial direction of the axis and are arranged at intervals along the axis. The invention also provides a grating encoder device suitable for being installed on the rotating shaft, which comprises a grating encoder with an annular base body and a sensing unit, wherein the sensing unit and the grating encoder are arranged at intervals. Therefore, the energy can measure the straightness error, flatness, transverse and vertical vibration quantity of the linear shaft, can also measure the axial and radial deflection quantity of the rotating shaft, and can measure the displacement and speed of the linear shaft and the angular position and angular speed of the rotating shaft through the position grid coding set.
Description
Technical Field
The present invention relates to an encoder, and more particularly, to a grating encoder and a device thereof for measuring the vibration amount, the deflection amount, the speed, and the angular position of a linear shaft and a rotary shaft by using energy.
Background
U.S. Pat. No. 8,836,324 (hereinafter referred to as "the preamble") discloses a ferromagnetic material (ferromagnetic material) device for measuring a linear or rotational axis, wherein the ferromagnetic material device has a tooth structure, and is configured to measure an analytic displacement physical quantity by juxtaposing a Giant Magnetoresistive (GMR) sensor with a permanent magnet and disposing the GMR sensor at a maximum magnetic field of the induced tooth structure.
Specifically, in the prior art, linear or annular magnetic conductive materials are used, a tooth-shaped structure is processed on the upper surface of the linear or annular magnetic conductive materials, and a giant magnetoresistance sensor is arranged in parallel with a permanent magnet.
However, the tooth-shaped structure of the prior art is arranged on the linear magnetic conductive material in a manner of extending along the width direction and being arranged along the length direction; the tooth-shaped structure on the annular magnetic conducting material is arranged on the inner surface of the annular magnetic conducting material, extends along the width direction of the annular magnetic conducting material, and is arranged along the length direction of the annular magnetic conducting material, in other words, the arrangement mode of the tooth-shaped structure in the prior art can only measure the displacement in a single direction. For example, when the tooth-shaped structures are axially arranged, only the energy measures the amount of axial displacement; in the case of radial image arrangement, only the radial displacement amount is measured.
Disclosure of Invention
The invention aims to provide a grating encoder for measuring linearity error, flatness, transverse and vertical vibration quantity, displacement and speed of a linear shaft by energy.
The grating encoder comprises a substrate and a grating encoding unit; the substrate is made of a magnetic conductive material; the grid coding unit is made of magnetic conductive materials and comprises a grid coding group arranged on the base body and a position grid coding group which is arranged adjacent to the grid coding group and is positioned on the same surface, the grid coding group is provided with a plurality of concave parts which extend along the axis of the base body and are arranged at intervals along the radial direction of the axis, and the position grid coding group is provided with a plurality of concave parts which extend along the radial direction of the axis and are arranged at intervals along the axis.
Another embodiment of the present invention relates to a grating encoder, comprising an annular base and a grating encoding unit; the annular substrate is made of magnetic conductive materials and comprises a first surface and a second surface opposite to the first surface; the grid coding unit is made of magnetic conductive materials and comprises a grid coding group arranged on one of the first surface and the second surface of the annular base body, and the grid coding group is provided with a plurality of concave parts which are arranged at intervals by taking the central axis of the annular base body as a concentric circle.
In the grating encoder of the present invention, normals to the first surface and the second surface are parallel to the central axis, the grating code group is disposed on the first surface, and the concave portions are arranged concentrically in a radial direction of the annular base body.
In the grating encoder of the present invention, normals of the first surface and the second surface are perpendicular to the central axis, and the second surface is adjacent to the central axis, the grating code group is disposed on the first surface, and the recesses are arranged concentrically along an axial direction of the annular base body.
Another embodiment of the present invention relates to a grating encoder, comprising an annular base and a grating encoding unit; the annular substrate is made of magnetic conductive materials and comprises a first surface and a second surface opposite to the first surface; the grid coding unit is made of magnetic conductive material and comprises a grid coding group arranged on one of the first surface and the second surface of the annular base body and a position grid coding group arranged on the same surface and adjacent to the grid coding group, the grid coding group is provided with a plurality of concave parts which are arranged at intervals by taking the central axis of the annular base body as concentric circles, and the position grid coding group is provided with a plurality of concave parts which are arranged at intervals around the central axis.
In the grating encoder of the present invention, normals to the first surface and the second surface are parallel to the central axis, the grating code group and the position grating code group are disposed on the first surface, the recesses of the grating code group are concentrically arranged in the radial direction of the annular base body, the recesses of the position grating code group extend in the radial direction of the annular base body, and the position grating code group is located between the inner circumferential edge of the annular base body and the grating code group, or between the outer circumferential edge of the annular base body and the grating code group.
In the grating encoder of the present invention, normals of the first surface and the second surface are perpendicular to the central axis, the second surface is adjacent to the central axis, the grating code group and the position grating code group are disposed on the first surface, the recesses of the grating code group are concentrically arranged in an axial direction of the annular base body, and the recesses of the position grating code group extend in the axial direction of the annular base body.
In the trellis encoder of the present invention, the position trellis encoding group is one of an incremental trellis encoding and an absolute trellis encoding.
The invention also provides a grid coding device.
The grid coding device is suitable for being installed on a linear shaft to measure the vibration quantity and displacement of the linear shaft. The grid coding device comprises the grid coder and a sensing unit; the grid encoder is arranged along the axial direction of the linear shaft; the sensing unit is arranged corresponding to the grid coding unit and spaced from the grid coder, and comprises a sensor for sensing the amplitude signal of the grid coding unit and an analog sensing element for sensing the magnetic field intensity of the grid coder.
Another embodiment of the trellis encoding device of the present invention comprises the trellis encoder as described above, and a sensing unit; the grating encoder is disposed around the rotation shaft; the sensing unit is arranged corresponding to the grid coding unit and spaced from the grid coder, and comprises a sensor for sensing the signal of the grid coding unit and an analog sensing element for sensing the magnetic field intensity of the grid coder.
In the grating encoder of the present invention, when the normals to the first surface and the second surface of the grating encoder are parallel to the central axis, the inner periphery of the annular base body faces the rotary shaft.
In the grating encoder of the present invention, when the first surface and the second surface of the grating encoder have normal lines perpendicular to the central axis, the second surface of the annular base faces the rotary shaft.
In the trellis encoding device of the present invention, the second surface of the trellis encoder is attached to the surface of the rotary shaft.
The invention has the beneficial effects that: the grating code set and the position grating code set with a plurality of concave parts which are arranged at intervals are arranged on the base body at the same time, the grating code set with a plurality of concave parts which are arranged at intervals by taking the central axis of the annular base body as a concentric circle is arranged on the annular base body, and the position grating code set with a plurality of concave parts which are arranged at intervals around the central axis can be further added, so that the linearity error, the flatness, the transverse vibration quantity and the vertical vibration quantity of a linear shaft can be measured, the axial deflection and the radial deflection of a rotating shaft can be measured, and the displacement and the speed of the linear shaft and the angular position and the angular speed of the rotating shaft can be measured through the position grating code set.
Drawings
FIG. 1 is a schematic perspective view illustrating a first embodiment of a trellis encoder of the present invention;
FIG. 2 is a partially enlarged view illustrating a trellis encoding set and a position trellis encoding set according to the first embodiment of the present invention;
FIG. 3 is a schematic perspective view illustrating a second embodiment of the trellis encoder of the present invention;
FIG. 4 is a partially enlarged view illustrating the trellis encoding set according to the second embodiment of the present invention;
FIG. 5 is a schematic perspective view illustrating a third embodiment of the trellis encoder of the present invention;
FIG. 6 is a cross-sectional side view illustrating the grating code set of the third embodiment taken along the line VI-VI in FIG. 5;
FIG. 7 is a schematic perspective view illustrating a fourth embodiment of the trellis encoder of the present invention;
FIG. 8 is a partially enlarged view illustrating the position trellis encoding set and the trellis encoding set according to the fourth embodiment of the present invention;
FIG. 9 is a schematic perspective view illustrating a fifth embodiment of the trellis encoder of the present invention;
FIG. 10 is a partially enlarged view illustrating the position trellis encoding set and the trellis encoding set according to the fifth embodiment of the present invention;
FIG. 11 is a schematic perspective view illustrating a sixth embodiment of the trellis encoder of the present invention;
FIG. 12 is a partially enlarged view illustrating the position trellis encoding set and the trellis encoding set according to the sixth embodiment of the present invention;
FIG. 13 is a schematic perspective view illustrating a seventh embodiment of the trellis encoder of the present invention;
FIG. 14 is a partially enlarged view illustrating the position trellis encoding set and the trellis encoding set according to the seventh embodiment of the present invention;
FIG. 15 is a perspective view illustrating the first embodiment of the present invention and a sensing unit mounted on a linear axis;
FIG. 16 is a perspective view illustrating the fourth embodiment of the present invention and the aspect of the sensing unit mounted on the rotating shaft;
FIG. 17 is a perspective view illustrating the sixth embodiment of the present invention and the aspect of the sensing unit mounted on the rotating shaft;
FIG. 18 is a perspective view illustrating another aspect of the seventh embodiment of the present invention and the sensing unit mounted on the rotating shaft;
FIG. 19 is a flowchart illustrating a process of measuring a physical quantity of a linear axis by the trellis encoding device having the trellis encoder of the first embodiment of the present invention;
FIG. 20 is a flowchart illustrating a process of measuring a physical quantity of a rotary shaft by the grating encoder device having the grating encoders according to the second and third embodiments of the present invention; and
fig. 21 is a flowchart illustrating a process of measuring a physical quantity of a rotary shaft by a grating encoder device having the grating encoder of the fourth to seventh embodiments according to the present invention.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and examples.
Referring to fig. 1 and 2, a first embodiment of a grating encoder 2 according to the present invention includes a base 20 and a grating encoding unit 201 disposed on the base 20, wherein fig. 2 is a partially enlarged view of the grating encoding unit 201 of fig. 1.
Specifically, in the first embodiment, the substrate 20 is linear, and both the substrate 20 and the grid coding unit 201 are made of magnetic conductive material. The grating code unit 201 includes a grating code group 22 disposed on the substrate 20, and a position grating code group 23 disposed adjacent to the grating code group 22 and on the same surface.
In detail, the grating code group 22 has a plurality of recesses 221 extending along an axis 202 of the base 20 and spaced along a radial direction 203 of the axis 202. The position grid encoding group 23 has a plurality of recesses 231 extending in the radial direction 203 of the axis 202 and arranged at intervals in the direction of the axis 202. It should be noted that, in the first embodiment, the position grating code group 23 is exemplified by incremental grating code, and the number of the concave portions 221 of the grating code group 22 and the concave portions 231 of the position grating code group 23 is not particularly limited, and the number of the concave portions 221, 231 may be increased or decreased according to the application requirements.
More specifically, in the first embodiment, the grating code sets 22 and the position grating code sets 23 are disposed on the substrate 20 in a linear manner, and the grating codes (i.e., the recesses 221 and 231) thereof are respectively arranged along the axis 202 and the radial direction 203 at intervals, so as to measure the flatness error of a linear axis, the lateral vibration amount, the vertical vibration amount, or the displacement, and related measurement procedures thereof will be described later.
Referring to fig. 3 and 4, a second embodiment of the grid encoder 2 of the present invention is substantially the same as the first embodiment, except that the position grid code set 23 is not provided in the second embodiment and the aspect of the base body 20. Specifically, the second embodiment includes a ring-shaped base 21, a grating code unit 201 formed on the ring-shaped base 21, and a fixing member 24 disposed on the ring-shaped base 21, wherein fig. 4 is a partially enlarged view of the grating code unit 22 in fig. 3.
Specifically, the annular substrate 21 is made of a magnetic conductive material and includes a central axis 200, a first surface 211, a second surface 212 opposite to the first surface 211, and an inner periphery 213 adjacent to the central axis 200. The grating code unit 201 is made of magnetic conductive material and includes a grating code group 22 disposed on the first surface 211 of the annular substrate 21, and the grating code group 22 has a plurality of concave portions 221 arranged at intervals around the central axis 200 of the annular substrate 21.
In detail, in the second embodiment, the annular base 21 is flat, that is, a normal n of the first surface 211 and the second surface 212 is parallel to the central axis 200, so that the concave portions 221 are concentrically arranged along a radial direction of the annular base 21. The number of the concave portions 221 is not particularly limited, and the concave portions 221 may be reduced or increased according to application requirements.
The fixing member 24 is disposed on the inner periphery 213 for facilitating the subsequent installation of the annular base 21 on other devices. It is to be noted that the aspect of the fixing member 24 is not particularly limited, and the fixing member 24 may be optionally provided as long as the ring base 21 can be mounted on the device to be applied.
Referring to fig. 5 and 6, a third embodiment of the grating encoder 2 of the present invention is substantially the same as the second embodiment, except for the aspect of the annular base 21 of the third embodiment. Specifically, fig. 6 is a cross-sectional side view of the grating code array 22 shown in fig. 5. in the third embodiment, the annular base 21 is in a three-dimensional annular shape, that is, the normal n between the first surface 211 and the second surface 212 is perpendicular to the central axis 200, and the second surface 212 is adjacent to the central axis 200, such that the grating code array 22 is disposed on the first surface 211 at the periphery, and the concave portions 221 are concentrically arranged along an axial direction of the annular base 21 (i.e., along the central axis 200). When the third embodiment of the grid encoder 2 is to be mounted on the mount 24, it is mounted on the second surface 212.
Referring to fig. 7 and 8, a fourth embodiment of the trellis encoder 2 of the present invention is substantially the same as the second embodiment, except that the trellis encoding unit 201. Specifically, in the fourth embodiment, the trellis encoding unit 201 includes a trellis encoding group 22 and a position trellis encoding group 23, wherein fig. 8 is a partially enlarged view of the trellis encoding group 22 and the position trellis encoding group 23 of fig. 7. The position grating code group 23 and the grating code group 22 are disposed adjacent to each other on the same first surface 211, and have a plurality of recesses 231 spaced around the central axis 200.
In detail, the recess 231 of the position grating code set 23 extends along the radial direction of the annular base 21 and surrounds the inner periphery 213, and the position grating code set 23 is exemplified by an incremental grating code, which can be used to measure an incremental position, i.e. a specific reference point is used as an origin, and a rotation angle with respect to the origin is measured, and the value can be expressed as a positive value or a negative value as a reference coordinate. In addition, the position grating code set 23 can be located between the inner periphery 213 of the annular base 21 and the grating code set 22, or located between an outer periphery 214 of the annular base 21 and the grating code set 22, in the embodiment, the position grating code set 23 is exemplified to be located between the inner periphery 213 of the annular base 21 and the grating code set 22.
Referring to fig. 9 and 10, a fifth embodiment of the grating encoder 2 of the present invention is substantially the same as the fourth embodiment, except for the aspect of the position grating code group 23, wherein fig. 10 is a partially enlarged view of the grating code group 22 and the position grating code group 23 of fig. 9. Specifically, in the fifth embodiment, the position grid code set 23 is illustrated as an absolute grid code, which is used to measure the absolute position of the device to be measured (e.g. the rotating shaft), i.e. no reference point is needed, and the complete absolute position can be obtained (similar to an absolute coordinate system, all position information is unique value). Therefore, in the fifth embodiment, the arrangement of the concave parts 231 of the position grid code group 23 is different from the arrangement of the concave parts 231 of the position grid code group 23 in the fourth embodiment.
In detail, the concave parts 231 (absolute type grating codes) of the position grating code group 23 also surround the inner periphery 213, but the arrangement is not limited, and the concave parts 231 are arranged according to the application, because the main feature of the present invention is to change the arrangement of the grating code group 22 and the position grating codes 23 (i.e. the arrangement in the concentric circle manner) and combine the grating code group 22 and the position grating code group 23 with each other on the same annular substrate 21, the arrangement of the absolute type grating codes is well known in the art and will not be described herein.
Referring to fig. 11 and 12, a sixth embodiment of the grating encoder 2 of the present invention is substantially the same as the fourth embodiment, except for the aspect of the ring-shaped base 21 of the sixth embodiment, wherein fig. 12 is a partially enlarged view of the grating code group 22 and the position grating code group 23 of fig. 11. Specifically, in the sixth embodiment, the annular substrate 21 is a three-dimensional ring, that is, the normal n of the first surface 211 and the second surface 212 is perpendicular to the central axis 200, and the second surface 212 is adjacent to the central axis 200, such that the grating code group 22 and the position grating code group 23 are disposed on the first surface 211 at the periphery, the concave portions 221 of the grating code group 22 are concentrically arranged along the axial direction of the annular substrate 21 (i.e., along the central axis 200), and the concave portions 231 of the position grating code group 23 extend along the axial direction of the annular substrate 21 and are arranged at intervals around the central axis 200. When the grid encoder 2 of the sixth embodiment is to be mounted on the mount 24, it is mounted on the second surface 212.
Referring to fig. 13 and 14, a seventh embodiment of the grating encoder 2 of the present invention is substantially the same as the sixth embodiment, except that the position grating code group 23 is modified, and fig. 14 is a partially enlarged view of the grating code group 22 and the position grating code group 23 of fig. 13. Specifically, in the seventh embodiment, the position grid code set 23 is illustrated as an absolute code for measuring an absolute position. The description of absolute type encoding is the same as that of the fifth embodiment, and is not repeated herein.
It should be noted that the grating encoder 2 of the above-mentioned embodiment mainly has the concave portions 221 of the grating code array 22 arranged in a concentric circle, and the concave portions 231 of the position grating code array 23 disposed adjacent to the grating code array 22, so that the linearity error, the lateral vibration amount and the vertical vibration amount can be measured in the application of the linear axis, and the axial and radial runout amount and the incremental position and the absolute position can be measured in the application of the rotating axis.
In order to more clearly illustrate how the grating encoder 2 of the above embodiment performs the measurement of the linear axis and the rotation axis, a grating encoder apparatus including the above grating encoder 2 is provided below for description.
Referring to fig. 15, the trellis encoding device is adapted to be mounted on a linear shaft 40 to measure the vibration amount and angular position of the linear shaft 40. In fig. 15, the trellis encoding device is illustrated by including the trellis encoder 2 and a sensing unit 3 of the first embodiment as an example. Specifically, the grating encoder 2 is disposed along an axial direction of the linear shaft 40, and the sensing unit 3 is disposed at an interval from the grating encoder 2 corresponding to the grating encoder 201, and includes a sensor (not shown) for sensing an amplitude signal of the grating encoder 201, and an analog sensing element (not shown) for sensing a magnetic field strength of the grating encoder 2, it is noted that fig. 15 illustrates the sensing unit 3 by integrating the sensor and the analog sensing element, and the sensing unit 3 is schematically illustrated.
In detail, since the grating encoder 2 of the first embodiment is in a linear form, the grating encoder 2 is directly mounted on the linear shaft 40 by the bottom surface thereof, the sensing unit 3 is mounted on the fixed side of the grating encoder 2 in a non-contact manner for sensing the grating code group 22 and the position grating code group 23, and as will be described later, the sensor suitable for the sensing unit 3 of the present invention can be selected from a giant magnetoresistance sensor, and the analog sensing element can be selected from a hall sensor, but not limited thereto.
Referring to fig. 16, the second, fourth, and fifth embodiments of the grating encoder 2 are adapted to be mounted on a rotating shaft 4, and in fig. 16, the grating encoder 2 of the fourth embodiment is illustrated as being mounted on the rotating shaft 4. Specifically, the grating encoder 2 is disposed around the rotation shaft 4, and the sensing unit 3 is disposed corresponding to the grating code group 22 and the position grating code group 23 at intervals, and the structure of the sensing unit 3 is the same as that described above. It should be particularly noted that the manner and sensing manner of mounting the grating encoder 2 on the rotating shaft 4 in the second and fifth embodiments are also the same as those in fig. 16, and therefore, the description thereof is omitted.
In detail, since the normals n of the first surface 211 and the second surface 212 of the grating encoder 2 of the second embodiment, the fourth embodiment, and the fifth embodiment are parallel to the central axis 200, when the grating encoder 2 is mounted on the rotating shaft 4, the inner periphery 213 of the annular base 21 faces the rotating shaft 4 and is mounted and fixed on the rotating shaft 4 through the fixing member 24. The sensing unit 3 is mounted on the fixed side in a non-contact manner.
Referring to fig. 17 and 18, the grating encoders 2 of the third, sixth, and seventh embodiments are adapted to be mounted on the rotating shaft 4, and fig. 17 and 18 illustrate the grating encoders 2 of the sixth and seventh embodiments mounted on the rotating shaft 4, respectively. Specifically, when the grating code device is installed on the rotating shaft 4 by the grating encoder 2 of the third, sixth, and seventh embodiments, the second surface 212 of the annular base 21 faces the rotating shaft 4, and is also installed and fixed on the rotating shaft 4 by the fixing member 24, so that the grating code group 22 and the position grating code group 23 are a surface 41 facing away from the rotating shaft 4. It should be particularly noted that, since the normal n of the first surface 211 and the second surface 212 of the grid encoder 2 of the third, sixth and seventh embodiments is perpendicular to the central axis 200, the fixing member 24 may not be required to be provided, and the second surface 212 of the grid encoder 2 is directly attached to the surface 41 of the rotating shaft 4 as shown in fig. 18.
Referring to fig. 19 in conjunction with fig. 15, a calculation procedure for measuring the flatness error, the straightness error, the vertical vibration amount, the lateral vibration amount, the displacement, and the velocity of the linear axis 40 by the grating encoding apparatus of fig. 15 having the grating encoder 2 of the first embodiment will be described.
When the linear shaft 40 moves, when the grid encoder 2 of the first embodiment is used for measurement (see fig. 15), the analog sensing element can first sense the magnetic field strength of the grid encoding set 22 (see fig. 1), wherein the magnetic field strength can be known by the magnitude of the magnetic flux (flux), after the magnetic field strength is known by the change of the magnetic flux, the magnetic field strength is further compared with a built-in look-up table (LUT), and then the position information is obtained by performing operation and analysis by a micro-controller unit (MCU), so as to know the flatness error or the vertical vibration of the linear shaft 40. Therefore, after the magnetic field intensity of the grating encoder measured by the analog sensing element is compared with a built-in look-up table (LUT), the flatness error of the linear axis or the vertical vibration can be directly obtained.
In addition, when the grid encoder 2 of the first embodiment is used to measure the linearity error or the lateral vibration, the sensor in the sensing unit 3 can directly sense the magnetic field variation of the grid encoding set 22, and the sensor outputs a voltage signal to a Micro Controller Unit (MCU) for calculation and analysis to obtain the position information, so as to obtain the linearity error or the lateral vibration of the linear shaft 40.
Furthermore, since the grating encoder 2 of the first embodiment of the present invention integrates the grating code array 22 and the position grating code array 23 simultaneously, in addition to the above-mentioned flatness error, linear error and vibration measurement of the linear axis 40, the sensor can also sense the magnetic field variation of the incremental code of the position grating code array 23 to measure the displacement, velocity and acceleration of the linear axis 40, so as to obtain the incremental position of the linear axis 40.
Referring to fig. 20, a calculation process of measuring the axial runout and the radial runout of the rotating shaft 4 by the grid encoder 2 of the second embodiment and the third embodiment is further described. First, since the eccentricity greatly affects the rotational movement, the concentricity between the grid encoder 2 and the rotary shaft 4 is corrected.
Then, when the rotation shaft 4 rotates, when the grid encoder device with the grid encoder 2 of the second embodiment is used for measurement, the sensing unit 3 can sense the magnetic field variation of the grid encoding set 22 generated by the radial deflection of the rotation shaft 4 and further convert the magnetic field variation into a voltage signal, and the voltage signal is transmitted to a Microcontroller (MCU) connected with the sensing unit 3 for operation and analysis, so that the radial deflection of the rotation shaft 4 in the rotation process can be obtained; when the grating encoder device with the grating encoder of the third embodiment is used for measurement, the sensing unit 3 can sense the signal generated by the grating code set 22 due to the axial deflection of the rotating shaft 4, and transmit the signal to the Microcontroller (MCU) for calculation and analysis, so as to obtain the axial deflection of the rotating shaft 4 in the rotating process.
Referring to fig. 21, a calculation process for measuring the axial runout, the radial runout, the rotation angle, the angular velocity, and the angular acceleration of the rotating shaft 4 by using the trellis encoding device of fig. 16, 17, or 18 will be described.
First, since the eccentricity greatly affects the rotational movement, the concentricity between the grid encoder 2 and the rotary shaft 4 is corrected.
First, the leftmost implementation flow of fig. 21 is described, and the measurement is performed by taking the grating encoder 2 (see fig. 7 and 9) of the fourth and fifth embodiments as an example. When the rotating shaft 4 rotates, the magnetic field strength of the grating code group 22 can be sensed by the analog sensing element, wherein the magnetic field strength can be known by the magnitude of the magnetic flux (flux), after the magnetic field strength is known by the change of the magnetic flux, the magnetic field strength is further compared with a built-in look-up table (LUT), and then the calculation and analysis are performed by a Microcontroller (MCU), so as to know the axial runout or axial vibration of the rotating shaft 4. Therefore, after the grating encoder 2 of the fourth embodiment and the fifth embodiment is used together with the analog sensing element to measure the magnetic field strength of the grating encoder and compare the magnetic field strength with a built-in look-up table (LUT), the axial runout and the axial vibration can be directly obtained. On the contrary, when the radial runout and the radial vibration are to be measured by the leftmost implementation flow of fig. 21, the grid encoder 2 of the sixth embodiment and the seventh embodiment (see fig. 11 and 13) is used to measure the magnetic field strength of the grid encoding units 22 of the grid encoder 2 of the sixth embodiment and the seventh embodiment directly to obtain the radial runout and the radial vibration, and the related measurement method is the same as the above-mentioned measurement of the axial runout and the axial vibration, which will not be described again.
Next, taking the middle implementation flow of fig. 21 as an example, the measurement is performed by taking the trellis encoder 2 (see fig. 7 and 9) of the fourth and fifth embodiments as an example. When the rotating shaft 4 rotates, the sensor in the sensing unit 3 senses the change of the sinusoidal wave generated by the magnetic field of the grid code set 22, and the sensor converts the sinusoidal wave generated by the magnetic field into a voltage signal and outputs the voltage signal to a Microcontroller (MCU) for calculation and analysis, so as to obtain the radial runout (i.e. the x direction in fig. 16) or the radial vibration amount of the rotating shaft 4. On the contrary, when the axial runout and the axial vibration amount are to be measured by the middle implementation flow of fig. 21, the grid encoder 2 of the sixth embodiment and the seventh embodiment (see fig. 11 and 13) is used to measure the variation of the chord wave generated by the magnetic field of the grid encoding unit 22 of the grid encoder 2 of the sixth embodiment and the seventh embodiment by the sensor, so as to obtain the axial runout (see the y direction marked by fig. 17 and 18) and the axial vibration amount, and the related measurement method is the same as the radial runout and the radial vibration amount measurement, which is not described herein again.
It can be seen that the difference between the leftmost implementation flow of fig. 21 and the middle implementation flow of fig. 21 is that the analog sensing device is used to measure the magnetic field strength of the grid code set 22 (fig. 21 and the leftmost implementation flow), or the sensor is used to measure the magnetic field change of the grid code set 22 and convert the magnetic field change into a voltage signal (the middle implementation flow of fig. 21). That is, the leftmost implementation flow of fig. 21 measures the axial runout when the grid encoder 2 of the fourth embodiment and the fifth embodiment measures the runout of the rotating shaft 4; when the runout of the rotary shaft 4 is measured by the grating encoder 2 of the fourth and fifth embodiments in the middle of the flow of fig. 21, the radial runout is measured.
Since the grating encoder 2 of the fourth to seventh embodiments of the present invention integrates the grating code set 22 and the position grating code set 23 simultaneously, in addition to the above-mentioned measurement of the deflection of the rotating shaft 4, the sensor can also sense the incremental code or the absolute code of the position grating code set 23, so as to measure the rotation angle, the angular velocity, and the angular acceleration of the rotating shaft 4, and further know the incremental position or the absolute position of the rotating shaft 4.
In detail, with reference to fig. 21, the rightmost implementation flow of fig. 21 illustrates that when the rotating shaft 4 performs a rotating motion, the measurement method performed by the grating encoder 2 of the fourth to seventh embodiments is similar to the middle implementation flow of fig. 21, except that the sensor senses the position grating code 23 to obtain the rotating position information of the rotating shaft 4.
In summary, the grating encoder and the device thereof of the present invention can obtain the linearity error, the flatness, the lateral and vertical vibration amount, and the displacement and the speed of the linear shaft 40 by disposing the grating code set 22 and the position grating code set 23 on the linear substrate 20, and disposing the concave portions 221, 231 thereof to extend along the axis 202 and the radial direction 203 respectively and to be spaced apart from each other, and disposing the analog sensing element and the sensor of the sensing unit 3 on the linear shaft 40; in addition, the annular base 21 can be provided with a grating code set 22 having a plurality of recesses 221 arranged at intervals around the central axis 200 and mounted on the rotating shaft 4, and the sensor and the Microcontroller (MCU) can calculate to obtain the radial and axial runout of the rotating shaft 4, and a position grating code set 23 having a plurality of recesses 231 arranged at intervals around the central axis 202 can be further added, so as to measure the angular position and angular velocity of the rotating shaft 4 by the position grating code set 23, thereby achieving the purpose of the present invention.
Claims (13)
1. A grating encoder; the method is characterized in that:
the grid encoder comprises a base body and a grid encoding unit; the substrate is made of a magnetic conductive material; the grid coding unit is made of magnetic conductive materials and comprises a grid coding group arranged on the base body and a position grid coding group which is arranged adjacent to the grid coding group and is positioned on the same surface, the grid coding group is provided with a plurality of concave parts which extend along the axis of the base body and are arranged at intervals along the radial direction of the axis, and the position grid coding group is provided with a plurality of concave parts which extend along the radial direction of the axis and are arranged at intervals along the axis.
2. A grating encoder; the method is characterized in that:
the grating encoder comprises an annular base body and a grating encoding unit; the annular substrate is made of magnetic conductive materials and comprises a first surface and a second surface opposite to the first surface; the grid coding unit is made of magnetic conductive materials and comprises a grid coding group arranged on one of the first surface and the second surface of the annular base body, and the grid coding group is provided with a plurality of concave parts which are arranged at intervals by taking the central axis of the annular base body as a concentric circle.
3. A trellis encoder according to claim 2, characterized in that: the normal lines of the first surface and the second surface are parallel to the central axis, the grid coding group is arranged on the first surface, and the concave parts are concentrically arranged along the radial direction of the annular base body.
4. A trellis encoder according to claim 2, characterized in that: the normal lines of the first surface and the second surface are perpendicular to the central axis, the second surface is adjacent to the central axis, the grid code group is arranged on the first surface, and the concave parts are concentrically arranged along the axial direction of the annular base body.
5. A grating encoder; the method is characterized in that:
the grating encoder comprises an annular base body and a grating encoding unit; the annular substrate is made of magnetic conductive materials and comprises a first surface and a second surface opposite to the first surface; the grid coding unit is made of magnetic conductive material and comprises a grid coding group arranged on one of the first surface and the second surface of the annular base body and a position grid coding group arranged on the same surface and adjacent to the grid coding group, the grid coding group is provided with a plurality of concave parts which are arranged at intervals by taking the central axis of the annular base body as concentric circles, and the position grid coding group is provided with a plurality of concave parts which are arranged at intervals around the central axis.
6. The trellis encoder of claim 5, wherein: the normal lines of the first surface and the second surface are parallel to the central axis, the grid coding group and the position grid coding group are arranged on the first surface, the concave parts of the grid coding group are concentrically arranged along the radial direction of the annular base body, the concave parts of the position grid coding group extend along the radial direction of the annular base body, and the position grid coding group is positioned between the inner periphery of the annular base body and the grid coding group or between the outer periphery of the annular base body and the grid coding group.
7. The trellis encoder of claim 5, wherein: the normal lines of the first surface and the second surface are perpendicular to the central axis, the second surface is adjacent to the central axis, the grating code group and the position grating code group are arranged on the first surface, the concave parts of the grating code group are arranged along the axial direction of the annular base body in a concentric circle mode, and the concave parts of the position grating code group extend along the axial direction of the annular base body.
8. The trellis encoder of claim 5, wherein: the position trellis encoding group is one of an incremental trellis encoding and an absolute trellis encoding.
9. A grid coding device is suitable for being installed on a linear shaft to measure the vibration quantity and displacement of the linear shaft; the method is characterized in that:
the trellis encoding device includes the trellis encoder of claim 1, and a sensing unit; the grid encoder is arranged along the axial direction of the linear shaft; the sensing unit is arranged corresponding to the grid coding unit and spaced from the grid coder, and comprises a sensor for sensing the amplitude signal of the grid coding unit and an analog sensing element for sensing the magnetic field intensity of the grid coder.
10. A kind of grid coding device, is suitable for installing on the rotating shaft, in order to carry on the deflection and angular position measurement of the said rotating shaft; the method is characterized in that:
the trellis encoding device includes the trellis encoder according to claims 2 to 8, and a sensing unit; the grating encoder is disposed around the rotation shaft; the sensing unit is arranged corresponding to the grid coding unit and spaced from the grid coder, and comprises a sensor for sensing the signal of the grid coding unit and an analog sensing element for sensing the magnetic field intensity of the grid coder.
11. The trellis encoding device of claim 10, wherein: when the normals of the first surface and the second surface of the grating encoder are parallel to the central axis, the inner periphery of the annular base faces the rotating shaft.
12. The trellis encoding device of claim 10, wherein: the second surface of the annular base faces the rotary shaft when a normal line of the first surface and the second surface of the grating encoder is perpendicular to the central axis.
13. The trellis encoding device of claim 12, wherein: the grating encoder is attached to the surface of the rotating shaft with the second surface.
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| CN201811019331.4A CN110873585A (en) | 2018-09-03 | 2018-09-03 | Grating encoder and device thereof |
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| CN201811019331.4A CN110873585A (en) | 2018-09-03 | 2018-09-03 | Grating encoder and device thereof |
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| CN101836086A (en) * | 2007-10-25 | 2010-09-15 | Rls梅里那技术公司 | Magnetic encoder and reference mark applicator |
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