CN110846623A - Device and method for improving uniformity of metal evaporation coating - Google Patents

Abstract

The invention belongs to the field of metal coating, and in particular relates to a device and method for improving the uniformity of metal evaporation coating. The composition of the device includes an electromagnetic stirring coil, a fixed column, an inner cylinder, a substrate holder, a substrate, an evaporation source, an evaporation material, and a bell jar; Just above the evaporation source, the inner cylinder is placed concentrically on the outside of the evaporation source, and the electromagnetic stirring coils are distributed around the outside of the inner wall. In the invention, the metal particles are stirred by the electromagnetic stirring device, so that the metal particles are evenly distributed in the horizontal plane, so as to achieve the effect of uniform metal evaporation coating.

Description

A device and method for improving the uniformity of metal evaporation coating

technical field

The invention belongs to the field of metal coating, and in particular relates to a device and method for improving the uniformity of metal evaporation coating.

Background technique

In the existing semiconductor processing and manufacturing process, vacuum coating technology occupies a very important position, especially metal evaporation coating technology is widely used in processing electrodes and so on. Metal evaporation coating has the advantages of simple equipment operation, high film formation purity and fast speed. The main factors affecting the quality of metal evaporation coating are the shape of the evaporation source, the temperature of the evaporation source, the position and shape of the substrate, etc.

Existing metal evaporation coatings mostly use point evaporation sources for evaporation. Due to the different distances from the point evaporation sources to each position of the substrate, the flying distances of the metal particles between the evaporation source and the substrate are also different. The probability of collision with the residual gas molecules in the vacuum chamber is also different, resulting in problems such as uneven coating thickness and different film quality when evaporation coating is performed on a large-area substrate.

SUMMARY OF THE INVENTION

In view of the above problems, the present invention proposes an electromagnetic stirring device and method for improving the uniformity of metal evaporation coating. Based on the evaporation coating instrument, an electromagnetic stirring device is added to solve the uniformity of metal evaporation coating. In the evaporation coating instrument, the evaporation source generates metal particles moving upward, and the electromagnetic stirring coil generates an alternating magnetic field, so that when the metal particles pass through the alternating magnetic field, an induced current is generated, and the induced current generates an electromagnetic force with the alternating magnetic field, thereby pushing the metal particles. Movement produces a stirring effect; after stirring, the metal particles are distributed more evenly on the same level, so as to improve the uniformity of the evaporation coating.

The technical scheme of the present invention is:

A device for improving the uniformity of metal evaporation coating, comprising an electromagnetic stirring coil 7, an inner cylinder 6, a substrate holder 5 and a bell jar 3;

The inner cylinder 6 is a tubular structure with upper and lower openings, and is fixed in the bell jar 3, and the centerlines of the two are coincident, the evaporation source 1 is placed in the center of the bottom of the inner cylinder 6, and the metal evaporation material 2 is placed in the evaporation source 1; Described electromagnetic stirring coil 7 has a plurality of, is fixed in the bell jar 3 by the fixed column 8, and the electromagnetic stirring coil 7 is distributed around the inner cylinder 6 at equal intervals, and the electromagnetic stirring coil 7 is positioned on the upper part of the inner cylinder 6, and the electromagnetic The upper surface of the stirring coil 7 is flush with the upper surface of the inner cylinder 6, and the electromagnetic stirring coil 7 applies alternating current through an external power supply; The substrate 4 is located directly above the evaporation source 1 .

The electromagnetic stirring coil 7 is a block structure, the inside is a coil, the inner side of the block structure is an arc, and is attached to the outer wall of the inner cylinder 6 , and the height of the electromagnetic stirring coil 7 is half of the height of the inner cylinder 6 .

The principle of the device is as follows:

When a low-frequency current is passed into the electromagnetic stirring coil 7, an alternating magnetic field is generated, and the alternating magnetic field passes through the inner cylinder 6 and acts on the metal particles moving upward from the evaporation source 1, and induces induction in the metal particles. The electric potential and current, the induced current and the alternating magnetic field generated by the electromagnetic stirring coil 7 generate electromagnetic force, thereby promoting the directional flow of the metal particles and playing a stirring role. The metal particles after stirring are more uniformly distributed on the same level.

A method for improving the uniformity of metal evaporation coating, using the above device, the specific steps are as follows:

Step 1. Put the metal evaporation material 2 into the evaporation source 1, and place the substrate 4 on the substrate holder 5 horizontally.

Step 2, start the evaporation coating apparatus, and after the metal evaporation material 2 starts to evaporate, apply an alternating current of 0.01M to 1 MHz to the electromagnetic stirring coil 7, and the alternating voltage range is 50V-220V.

Step 3: After the evaporation rate of the evaporation source 1 is stabilized, film coating is started, and a uniform metal film is obtained on the substrate 4 .

Beneficial effects of the present invention:

1. Since the device of the present invention includes an electromagnetic stirring coil, the passing metal particles can be stirred, so that more evenly distributed metal particles can be obtained on the same horizontal plane, so that even when metal is evaporated on substrates of different sizes, uniformity can be obtained. metal film.

2. The present invention contains an inner cylinder inside the electromagnetic stirring coil, which can prevent the metal particles from hitting the electromagnetic coil during movement and thus have an impact on the electromagnetic coil, so it has higher stability.

Description of drawings

FIG. 1 is a schematic diagram of a device for improving the uniformity of metal evaporation coating according to the present invention.

Figure 2 is a schematic diagram of the electromagnetic stirring device of the present invention.

In the figure: 1 evaporation source, 2 evaporation material, 3 bell jar, 4 substrate, 5 substrate holder, 6 inner cylinder, 7 electromagnetic stirring coil, 8 fixed column.

Detailed ways

The specific embodiments of the present invention will be further described below with reference to the accompanying drawings and technical solutions.

A device for improving the uniformity of metal evaporation coating, its composition includes electromagnetic stirring device (electromagnetic stirring coil 7, fixing column 8, inner cylinder 6), substrate holder 5, substrate 4, evaporation source 1, evaporation material 2, Bell Jar 3. The evaporation source 1 and the evaporation material 2 are placed at the bottom of the bell jar 3, at the center line of the bell jar 3, the substrate 4 is placed horizontally on the substrate holder 5 and is directly above the evaporation source 1, and the inner cylinder 6 is placed concentrically outside the evaporation source 1 , the electromagnetic stirring coil 7 is distributed around the outer side of the inner cylinder 6 .

The electromagnetic stirring coil 7 is fixed on the bell jar 3 by the fixing column 8 .

There are a plurality of the electromagnetic stirring coils 7 , which are distributed on the outside of the inner cylinder 6 at equal intervals.

The inner side of the electromagnetic stirring coil 7 is in an arc shape and is closely attached to the outer side of the inner cylinder 6 .

Example 1

Use the device of the present invention to carry out evaporation coating, and the process is as follows:

First, the metal evaporation material 2 to be coated is put into the evaporation source 1 , and then the evaporation source 1 heats the evaporation material 2 . An alternating current with a magnitude of 220V and a frequency of 0.01M Hz is applied to the electromagnetic stirring coil 7 to generate an alternating magnetic field. When the metal particles generated by the evaporation material 2 move upward, the metal particles generate an induced current through the alternating magnetic field, and at the same time, the induced current generates an electromagnetic force when passing through the alternating magnetic field, so that the metal particles start to rotate and rise inside the inner cylinder 6, Thereby, the metal particles on the same horizontal plane are uniformly distributed. The rotating and rising metal particles will be fixed on the substrate 4 when they contact the substrate 4, because the metal particles are evenly distributed on the same horizontal plane after being stirred by the electromagnetic stirring coil 7, so the metal film formed on the substrate 4 is also uniform.

Example 2

The process is the same as that of Embodiment 1, wherein an alternating current with a magnitude of 50V and a frequency of 1M Hz is applied to the electromagnetic stirring coil 7 . A uniform metal film can be obtained.

Example 3

The process is the same as that of Embodiment 1, wherein an alternating current with a magnitude of 150V and a frequency of 0.5M Hz is applied to the electromagnetic stirring coil 7 . A uniform metal film can be obtained.

Claims (3)

1. The device for improving the uniformity of the metal evaporation coating is characterized by comprising an electromagnetic stirring coil (7), an inner cylinder (6), a substrate fixing frame (5) and a bell jar (3);

the inner cylinder (6) is a cylindrical structure with an upper opening and a lower opening and is fixed in the bell jar (3), the middle bobbins of the inner cylinder and the bell jar are overlapped, the evaporation source (1) is arranged at the center of the bottom of the inner cylinder (6), and the metal evaporation material (2) is arranged in the evaporation source (1); the electromagnetic stirring device is characterized in that a plurality of electromagnetic stirring coils (7) are fixed in the bell jar (3) through fixing columns (8), the electromagnetic stirring coils (7) are distributed around the inner cylinder (6) at equal intervals, the electromagnetic stirring coils (7) are positioned at the upper part of the inner cylinder (6), the upper surface of the electromagnetic stirring coils (7) is flush with the upper surface of the inner cylinder (6), and alternating current is applied to the electromagnetic stirring coils (7) through an external power supply; the top in the bell jar (3) is provided with a substrate fixing frame (5), the substrate (4) is horizontally placed on the substrate fixing frame (5), and the substrate (4) is positioned right above the evaporation source (1).

2. The device for improving the uniformity of metal evaporation coating according to claim 1, wherein the electromagnetic stirring coil (7) is a block structure, the inner part of the block structure is a coil, the inner side of the block structure is an arc shape and is attached to the outer wall of the inner cylinder (6), and the height of the electromagnetic stirring coil (7) is half of the height of the inner cylinder (6).

3. The device for improving the uniformity of metal evaporation coating according to claim 1 or 2 is adopted for evaporation coating, and is characterized by comprising the following specific steps:

step 1, putting a metal evaporation material (2) into an evaporation source (1), and horizontally placing a substrate (4) on a substrate fixing frame (5);

step 2, starting an evaporation coating instrument, and applying 0.01M-1 MHz alternating current to the electromagnetic stirring coil (7) after the metal evaporation material (2) starts to evaporate, wherein the alternating voltage range is 50V-220V;

and 3, starting coating after the evaporation rate of the evaporation source (1) is stable, and obtaining a uniform metal film on the substrate (4).

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