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CN110829167A - Method and system for suppressing single-frequency phase noise of laser - Google Patents

Method and system for suppressing single-frequency phase noise of laser Download PDF

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CN110829167A
CN110829167A CN201911001353.2A CN201911001353A CN110829167A CN 110829167 A CN110829167 A CN 110829167A CN 201911001353 A CN201911001353 A CN 201911001353A CN 110829167 A CN110829167 A CN 110829167A
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CN110829167B (en
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陈婷
谢艺
欧保全
秦青青
吴伟
陈平形
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National University of Defense Technology
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/10053Phase control
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/107Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using electro-optic devices, e.g. exhibiting Pockels or Kerr effect
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
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    • H01S2301/02ASE (amplified spontaneous emission), noise; Reduction thereof

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Abstract

本发明公开了一种抑制激光器单频相位噪声的系统,其包括:激光器,用于产生激光光束;光隔离器,输出第一激光光束,以隔离第一激光光束返回激光器;相位噪声抑制模块,用于消除第一激光光束的单频相位噪声,并输出第二激光光束;PDH稳频模块,通过将第二激光光束进行边带调制处理和共振锁定处理,以输出频率误差信号;第一伺服回路模块,用于对频率误差信号进行运算,以输出频率调节信号;激光控制器,用于输出控制信号以控制激光器,并根据频率调节信号对控制信号进行调节,以纠正激光器频率误差,并使激光器输出稳频激光。本发明还公开了一种抑制激光器相位噪声的方法。通过本发明公开抑制激光器相位噪声的方法及系统可有效抑制激光器的相位噪声。

Figure 201911001353

The invention discloses a system for suppressing single-frequency phase noise of a laser, comprising: a laser for generating a laser beam; an optical isolator for outputting a first laser beam to isolate the first laser beam and returning to the laser; a phase noise suppression module, Used to eliminate the single-frequency phase noise of the first laser beam, and output the second laser beam; PDH frequency stabilization module, by performing sideband modulation processing and resonance locking processing on the second laser beam to output a frequency error signal; The first servo The loop module is used to operate the frequency error signal to output the frequency adjustment signal; the laser controller is used to output the control signal to control the laser, and adjust the control signal according to the frequency adjustment signal to correct the frequency error of the laser and make the The laser outputs frequency-stabilized laser light. The invention also discloses a method for suppressing the phase noise of the laser. The method and system for suppressing the phase noise of the laser disclosed in the present invention can effectively suppress the phase noise of the laser.

Figure 201911001353

Description

一种抑制激光器单频相位噪声的方法及系统Method and system for suppressing single-frequency phase noise of laser

技术领域technical field

本发明涉及激光噪声领域,尤其是一种抑制激光器单频相位噪声的方法及系统。The invention relates to the field of laser noise, in particular to a method and system for suppressing single-frequency phase noise of a laser.

背景技术Background technique

自上世纪60年代激光器诞生以来,激光器相关技术迅速发展。由于激光具有良好的单色性、长的相干时间以及好的方向性,在科研和工业领域都得到了广泛的应用。在一些光谱实验中,如光谱探测、光频标、量子计算等领域对激光器的性能也提出了更高的要求,包括窄线宽,单纵模等。但是在使用过程中发现,激光器出射的激光并不是理想的单频振荡,而是存在着噪声,即在频率、相位和幅度上发生随机涨落。噪声的存在对于很多研究领域如原子钟、量子计算、光学传感、相干通信以及引力波探测等来说,会产生负面影响。所以激光噪声的抑制有着重要意义。Since the birth of lasers in the 1960s, laser-related technologies have developed rapidly. Due to the good monochromaticity, long coherence time and good directionality of lasers, lasers have been widely used in scientific research and industrial fields. In some spectral experiments, such as spectral detection, optical frequency scaling, quantum computing and other fields, higher requirements are also placed on the performance of lasers, including narrow linewidth, single longitudinal mode, etc. However, during use, it was found that the laser light emitted by the laser is not an ideal single-frequency oscillation, but has noise, that is, random fluctuations in frequency, phase and amplitude. The existence of noise has a negative impact on many research fields such as atomic clocks, quantum computing, optical sensing, coherent communication, and gravitational wave detection. Therefore, the suppression of laser noise is of great significance.

激光器的噪声包括光功率噪声和相位噪声,其中抑制相位噪声的方法比较常用的有:1.将激光器的频率锁定到原子吸收谱;2.将激光器锁定到一个稳定的光学谐振腔。在这两种方法的基础上,激光的线宽已经能被压窄到mHz量级水平,当线宽压窄到一定程度时,某些噪声成分会被体现出来。在钛宝石激光器等激光类型中,会用到标准具来稳定输出激光的频率,其中需要调制标准具的长度,这类调制信号引起的噪声具有单一频率,幅度超过一般噪声,对精密光谱实验具有较大的影响。实验发现,上述噪声抑制技术对于噪声的抑制效果都不理想。The noise of the laser includes optical power noise and phase noise. Among them, the commonly used methods to suppress the phase noise are: 1. Lock the frequency of the laser to the atomic absorption spectrum; 2. Lock the laser to a stable optical resonant cavity. On the basis of these two methods, the line width of the laser can be narrowed to the level of mHz. When the line width is narrowed to a certain extent, some noise components will be reflected. In laser types such as Ti:sapphire lasers, the etalon is used to stabilize the frequency of the output laser, in which the length of the etalon needs to be modulated. The noise caused by this modulation signal has a single frequency, and the amplitude exceeds the general noise, which is useful for precision spectroscopy experiments. greater impact. Experiments show that the above noise suppression techniques are not ideal for noise suppression.

对于激光的相位噪声的测量,目前主要有如下方法:对于线宽在兆赫兹量级以上的激光,可采用扫描F-P干涉仪的方法进行测量。而对于线宽更窄的激光测量的方法一般有三种:一种方法是通过将两台频率和性能接近的激光器进行光外差混频,将光频信号变换到电学频段。两台激光器只能估计激光的线宽;要测量噪声频谱需要三台激光器进行两两拍频,通过相关分析可以获知各个激光器的频谱成分。多台激光器的方案代价较高,不适合一般实验室的情况。第二种方法是通过延时自拍频技术来实现的。该方法主要有利用长光纤、光纤环以及基于迈克尔逊干涉仪的延时自拍频等技术来进行激光噪声的测量。这种方法对于环境的影响比较敏感。对于噪声的抑制,目前可行的方案较少,一种是在光学谐振腔稳频技术的基础上利用光学谐振腔的透射光进行注入锁定,并进一步进行光放大的方法来实现激光的输出。由于超稳腔透射功率通常不大,这种方法需要采用多级放大的结构,较为复杂。For the measurement of the phase noise of the laser, there are mainly the following methods: For the laser with the line width above the megahertz level, the method of scanning the F-P interferometer can be used for measurement. There are generally three methods for laser measurement with narrower linewidth: one method is to convert the optical frequency signal to the electrical frequency band by performing optical heterodyne mixing of two lasers with similar frequency and performance. Two lasers can only estimate the linewidth of the laser; to measure the noise spectrum, three lasers are required to perform two beat frequencies, and the spectral components of each laser can be obtained through correlation analysis. The solution of multiple lasers is expensive and not suitable for general laboratory conditions. The second method is achieved through the time-lapse selfie frequency technology. This method mainly uses long optical fiber, optical fiber loop and time-lapse Selfie frequency based on Michelson interferometer to measure laser noise. This method is sensitive to environmental influences. For noise suppression, there are few feasible solutions at present. One is to use the transmitted light of the optical resonator to perform injection locking on the basis of the frequency stabilization technology of the optical resonator, and further perform optical amplification to realize the output of the laser. Since the transmission power of the ultra-stable cavity is usually not large, this method requires a multi-stage amplification structure, which is relatively complicated.

发明内容SUMMARY OF THE INVENTION

本发明旨在至少在一定程度上解决相关技术中的技术问题之一。为此,本发明的一个目的是提供一种抑制激光器相位噪声的方法。The present invention aims to solve one of the technical problems in the related art at least to a certain extent. To this end, an object of the present invention is to provide a method for suppressing phase noise of a laser.

本发明所采用的技术方案是:The technical scheme adopted in the present invention is:

第一方面,本发明提供一种抑制激光器单频相位噪声的系统,包括:In a first aspect, the present invention provides a system for suppressing single-frequency phase noise of a laser, including:

激光器,用于产生激光光束;a laser for generating a laser beam;

光隔离器,允许所述激光光束单向输入,并输出第一激光光束,以隔离所述第一激光光束返回所述激光器;an optical isolator, allowing one-way input of the laser beam and outputting a first laser beam to isolate the first laser beam and return to the laser;

相位噪声抑制模块,用于消除所述第一激光光束的单频相位噪声,并输出第二激光光束;a phase noise suppression module for eliminating the single-frequency phase noise of the first laser beam and outputting a second laser beam;

PDH(Pound-Drever-Hall)稳频模块,通过将所述第二激光光束进行边带调制处理和共振锁定处理,以输出频率误差信号;PDH (Pound-Drever-Hall) frequency stabilization module, by performing sideband modulation processing and resonance locking processing on the second laser beam to output a frequency error signal;

第一伺服回路模块,用于对所述频率误差信号进行运算,以输出频率调节信号;a first servo loop module, configured to operate on the frequency error signal to output a frequency adjustment signal;

激光控制器,用于输出控制信号以控制所述激光器,并根据所述频率调节信号对所述控制信号进行调节,以纠正所述激光器频率误差,并使所述激光器输出稳频激光。The laser controller is used to output a control signal to control the laser, and adjust the control signal according to the frequency adjustment signal to correct the frequency error of the laser and make the laser output stable frequency laser.

进一步地,所述相位噪声抑制模块与所述激光控制器电连接,以采集所述激光控制器的控制信号作为源信号输出。Further, the phase noise suppression module is electrically connected with the laser controller to collect the control signal of the laser controller as a source signal and output.

进一步地,所述相位噪声抑制模块包括:Further, the phase noise suppression module includes:

噪声采样电路模块,用于对所述第一激光光束的单频相位噪声进行采集,并输出源信号;a noise sampling circuit module for collecting the single-frequency phase noise of the first laser beam and outputting a source signal;

调幅移相放大模块,用于将所述源信号进行调幅和移相,以输出相位误差信号;an amplitude modulation and phase shift amplifying module for performing amplitude modulation and phase shifting on the source signal to output a phase error signal;

锁相放大电路模块,与所述PDH稳频模块电连接,用于将所述PDH稳频模块输出的所述频率误差信号和所述噪声采样电路模块输出的所述源信号进行锁相放大并运算,以输出幅度误差信号;The lock-in amplifier circuit module is electrically connected with the PDH frequency stabilization module, and is used for lock-in amplification of the frequency error signal output by the PDH frequency stabilization module and the source signal output by the noise sampling circuit module, and operation to output the amplitude error signal;

第一混频器,用于将所述相位误差信号和所述幅度误差信号进行混频,以输出纠偏信号;a first mixer, configured to mix the phase error signal and the amplitude error signal to output a deviation correction signal;

第一电光调制器,根据所述纠偏信号对所述光隔离器输出的第一激光光束进行反相位调制,以消除所述第一激光光束的单频相位噪声,并输出第二激光光束输出。The first electro-optic modulator performs anti-phase modulation on the first laser beam output by the optical isolator according to the deviation correction signal to eliminate the single-frequency phase noise of the first laser beam, and outputs a second laser beam output .

进一步地,所述相位噪声抑制模块还包括:Further, the phase noise suppression module also includes:

第一光电探测器,用于探测所述第二激光光束,以获取强度信号;a first photodetector for detecting the second laser beam to obtain an intensity signal;

频谱分析仪,与所述PDH稳频模块电连接,用于将所述PDH稳频模块输出的所述频率误差信号与所述第一光电探测器探测的强度信号进行分析,并获取所述第二激光光束的相位噪声谱。A spectrum analyzer, electrically connected to the PDH frequency stabilization module, for analyzing the frequency error signal output by the PDH frequency stabilization module and the intensity signal detected by the first photodetector, and obtaining the first Phase noise spectrum of two laser beams.

进一步地,所述PDH稳频模块包括:Further, the PDH frequency stabilization module includes:

调制信号发生器,用于产生频率调制信号;Modulation signal generator for generating frequency modulation signal;

第二电光调制器,由所述频率调制信号驱动,对所述第二激光光束进行调制,使所述第二激光光束携带边带信号成为第三激光光束输出;The second electro-optic modulator, driven by the frequency modulation signal, modulates the second laser beam, so that the second laser beam carries the sideband signal to become the third laser beam output;

超稳腔,由所述第三激光光束入射,经腔内多光束共振,反射输出第四激光光束;an ultra-stable cavity, which is incident by the third laser beam, resonates with multiple beams in the cavity, and reflects and outputs a fourth laser beam;

第二光电探测器,用于探测所述第四激光光束,以获取干涉信号;a second photodetector for detecting the fourth laser beam to obtain an interference signal;

第二混频器,用于将所述调制信号发生器产生的所述频率调制信号和所述第二光电探测器探测的所述干涉信号进行混频处理,以获取所述频率误差信号输出。The second frequency mixer is configured to perform frequency mixing processing on the frequency modulation signal generated by the modulation signal generator and the interference signal detected by the second photodetector, so as to obtain the frequency error signal output.

进一步地,所述PDH稳频模块还包括:Further, the PDH frequency stabilization module also includes:

1/2波片,用于调节所述第三激光光束的线偏振方向;1/2 wave plate, used to adjust the linear polarization direction of the third laser beam;

偏振分束镜,用于对入射其上的第三激光光束和第四激光光束进行偏振分束,使第三激光光束发生透射,并使第四激光光束发生反射;a polarizing beam splitter, which is used for polarizing and splitting the third laser beam and the fourth laser beam incident thereon, so that the third laser beam is transmitted and the fourth laser beam is reflected;

1/4波片,置于所述超稳腔和所述偏振分束镜之间,用于调节第三激光光束和第四激光光束的偏振状态,以使调节前的所述第三激光光束与调节后的所述第四激光光束偏振垂直。A 1/4 wave plate, placed between the superstable cavity and the polarization beam splitter, is used to adjust the polarization states of the third laser beam and the fourth laser beam, so that the third laser beam before adjustment It is perpendicular to the polarization of the adjusted fourth laser beam.

为此,本发明的第二个目的是提供一种抑制激光器相位噪声的方法。To this end, the second object of the present invention is to provide a method for suppressing the phase noise of a laser.

第二方面,本发明实施例提供一种抑制激光器单频相位噪声的方法,其包括:In a second aspect, an embodiment of the present invention provides a method for suppressing single-frequency phase noise of a laser, including:

通过激光控制器输出调控信号,以对激光器进行控制,并输出激光光束;The control signal is output through the laser controller to control the laser and output the laser beam;

通过光隔离器对所述激光器产生的激光光束进行隔离处理,并输出第一激光光束;The laser beam generated by the laser is isolated by the optical isolator, and the first laser beam is output;

通过相位噪声抑制模块用于对所述第一激光光束的单频相位噪声进行消除,并输出第二激光光束;The phase noise suppression module is used to eliminate the single-frequency phase noise of the first laser beam, and output the second laser beam;

通过PDH稳频模块用于对第二激光光束进行边带调制处理和共振锁定处理,以获取频率误差信号;The PDH frequency stabilization module is used to perform sideband modulation processing and resonance locking processing on the second laser beam to obtain a frequency error signal;

通过第一伺服回路模块对所述频率误差信号进行运算,以输出频率调节信号;The frequency error signal is operated by the first servo loop module to output a frequency adjustment signal;

通过激光控制器根据所述频率调节信号对控制信号进行调节,以纠正所述激光器频率误差,并使所述激光器输出稳频激光。The laser controller adjusts the control signal according to the frequency adjustment signal, so as to correct the frequency error of the laser, and make the laser output frequency-stabilized laser light.

进一步地,对所述第一激光光束的单频相位噪声进行消除包括:Further, eliminating the single-frequency phase noise of the first laser beam includes:

通过噪声采样电路模块采集所述激光控制器的调制信号,并输出源信号;Collect the modulation signal of the laser controller through the noise sampling circuit module, and output the source signal;

通过调幅移相放大模块对所述源信号进行调幅和移相,以输出相位误差信号;The source signal is amplitude-modulated and phase-shifted by the amplitude-modulation and phase-shift amplifying module to output a phase error signal;

通过锁相放大电路模块对所述源信号与所述频率误差信号进行锁相放大并运算,以输出幅度误差信号;The source signal and the frequency error signal are phase-locked, amplified and operated by a phase-locked amplifier circuit module to output an amplitude error signal;

通过第一混频器对所述相位误差信号与所述幅度误差信号进行混频,以输出纠偏信号;Mixing the phase error signal and the amplitude error signal by a first mixer to output a deviation correction signal;

根据所述纠偏信号,通过第一电光调制器对第一激光光束进行调制,以输出第二激光光束;According to the deviation correction signal, the first laser beam is modulated by the first electro-optic modulator to output the second laser beam;

通过第一光电探测器探测所述第二激光光束,以输出强度信号;Detecting the second laser beam by a first photodetector to output an intensity signal;

通过频谱分析仪对所述强度信号与所述频率误差信号进行分析,以获取所述第二激光光束的相位噪声谱;Analyze the intensity signal and the frequency error signal by a spectrum analyzer to obtain a phase noise spectrum of the second laser beam;

通过调幅移相放大模块调节对所述源信号的调幅值和移相值,至所述频谱分析仪中显示的相位噪声为零,以使第一电光调制器对第一激光光束进行噪声的等幅反相调制,消除单频相位噪声。The amplitude modulation value and phase shift value of the source signal are adjusted by the amplitude modulation phase shift amplification module until the phase noise displayed in the spectrum analyzer is zero, so that the first electro-optic modulator can perform noise reduction on the first laser beam. Equal-amplitude inverse modulation to eliminate single-frequency phase noise.

进一步地,对第二激光光束进行边带调制和共振锁定,以输出频率误差信号的步骤还包括:Further, the step of performing sideband modulation and resonance locking on the second laser beam to output a frequency error signal further includes:

通过调制信号发生器产生的频率调制信号驱动第二电光调制器,以对所述第二激光光束进行边带调制,并输出第三激光光束;The second electro-optic modulator is driven by the frequency modulation signal generated by the modulation signal generator to perform sideband modulation on the second laser beam and output a third laser beam;

通过1/2波片、偏振分束器透射、1/4波片以对第三激光光束入射进行偏振处理,入射至超稳腔以进行共振锁定处理,并反射输出第四激光光束;Through 1/2 wave plate, polarization beam splitter transmission, 1/4 wave plate to carry out polarization processing on the incident of the third laser beam, incident to the ultra-stable cavity for resonance locking processing, and reflected and output the fourth laser beam;

通过经第二光电探测器对第四激光光束进行探测,以输出相干信号;outputting a coherent signal by detecting the fourth laser beam via the second photodetector;

通过第二混频器对所述相干信号和所述频率调制信号进行混频,以输出频率误差信号。The coherent signal and the frequency modulated signal are mixed by a second mixer to output a frequency error signal.

本发明的有益效果是:The beneficial effects of the present invention are:

本发明通过采用利用PDH稳频的误差信号输入频谱分析仪用以观察相位噪声谱,通过将调制源信号移相注入第一电光调制器进行反相位调制以抑制相位噪声。The present invention adopts the PDH frequency-stabilized error signal to input the spectrum analyzer to observe the phase noise spectrum, and the modulation source signal is phase-shifted and injected into the first electro-optic modulator for anti-phase modulation to suppress the phase noise.

另外,本发明还通过采用锁相放大模块提取出相位噪声幅度信号作为幅度误差信号以抑制相位噪声幅度的变化。利用光电探测器来探测出射光信号输入频谱分析仪来观察幅度噪声谱。此外可还通过利用温控,加偏置电压等方法抑制第一电光调制器的剩余幅度调制噪声。In addition, the present invention also uses the lock-in amplifier module to extract the phase noise amplitude signal as the amplitude error signal to suppress the change of the phase noise amplitude. A photodetector is used to detect the outgoing light signal and input the spectrum analyzer to observe the amplitude noise spectrum. In addition, the residual amplitude modulation noise of the first electro-optic modulator can be suppressed by using methods such as temperature control and bias voltage application.

附图说明Description of drawings

图1是本发明第一实施例一种抑制激光器相位噪声系统的结构示意图。FIG. 1 is a schematic structural diagram of a laser phase noise suppression system according to the first embodiment of the present invention.

图2是本发明第二实施例的一种抑制激光器相位噪声的流程图示意图。FIG. 2 is a schematic flowchart of a laser phase noise suppression according to the second embodiment of the present invention.

附图标记说明Description of reference numerals

名称name 标号label 名称name 标号label 激光器laser 11 激光控制器Laser Controller 22 光隔离器Optical isolator 33 第一伺服回路模块The first servo loop module 44 PDH稳频模块PDH frequency stabilization module 55 相位噪声抑制模块Phase Noise Suppression Module 66 调制信号发生器Modulation Signal Generator 5151 第二电光调制器second electro-optic modulator 5252 超稳腔Super stable cavity 5353 第二光电探测器second photodetector 5454 第二混频器second mixer 5555 1/2波片1/2 wave plate 5656 偏振分束镜Polarizing Beamsplitters 5757 1/4波片1/4 wave plate 5858 噪声采样电路模块Noise sampling circuit module 6161 调幅移相放大模块AM/Phase Amplifier Module 6262 锁相放大电路模块Lock-in amplifier circuit module 6363 第一混频器first mixer 6464 第一电光调制器first electro-optic modulator 6565 第一电光探测器first electro-optical detector 6666 频谱分析仪Spectrum Analyzer 6767 第一激光光束first laser beam 1111 第二激光光束second laser beam 1212 第三激光光束third laser beam 1313 第四激光光束Fourth laser beam 1414

具体实施方式Detailed ways

需要说明的是,在不冲突的情况下,本申请中的实施例及实施例中的特征可以相互组合。It should be noted that the embodiments in the present application and the features of the embodiments may be combined with each other in the case of no conflict.

请参阅图1,图1为本发明实施例一种抑制激光器单频相位噪声系统的结构示意图。本发明实施例提供一种抑制激光器相位噪声的系统,其包括:激光器1,用于产生激光光束;光隔离器3,允许所述激光光束单向输入,并输出第一激光光束11,以隔离所述第一激光光束11返回所述激光器1;相位噪声抑制模块6,用于消除所述第一激光光束11的单频相位噪声,并输出第二激光光束12;PDH(Pound-Drever-Hall)稳频模块5,通过将输入的所述第二激光光束12进行边带调制处理和共振锁定处理,输出频率误差信号;第一伺服回路模块4,用于对所述频率误差信号进行运算,以输出频率调节信号;激光控制器2,与所述PDH稳频模块电连接,用于输出控制信号以控制激光器1,并根据频率调节信号对控制信号进行调节,以纠正激光器1频率误差,并使激光器1输出稳频激光。Please refer to FIG. 1. FIG. 1 is a schematic structural diagram of a system for suppressing single-frequency phase noise of a laser according to an embodiment of the present invention. An embodiment of the present invention provides a system for suppressing phase noise of a laser, which includes: a laser 1 for generating a laser beam; an optical isolator 3 for allowing the laser beam to be input in one direction and outputting a first laser beam 11 for isolation The first laser beam 11 returns to the laser 1; the phase noise suppression module 6 is used to eliminate the single-frequency phase noise of the first laser beam 11 and output the second laser beam 12; PDH (Pound-Drever-Hall ) frequency stabilization module 5, by carrying out sideband modulation processing and resonance locking processing to the input of the second laser beam 12, and outputting a frequency error signal; the first servo loop module 4 is used to calculate the frequency error signal, Adjust the signal with the output frequency; the laser controller 2, electrically connected with the PDH frequency stabilization module, is used to output a control signal to control the laser 1, and adjust the control signal according to the frequency adjustment signal to correct the frequency error of the laser 1, and Make laser 1 output frequency-stabilized laser light.

其中相位噪声抑制模块6与激光控制器2电连接,以采集激光控制器2的控制信号作为源信号输出。The phase noise suppression module 6 is electrically connected with the laser controller 2 to collect the control signal of the laser controller 2 as a source signal and output.

相位噪声抑制模块6包括:噪声采样电路模块61,用于对第一激光光束11的单频相位噪声进行采集,并输出源信号;调幅移相放大模块62,用于将源信号进行调幅和移相,以输出相位误差信号;锁相放大电路模块63,用于将PDH稳频模块5输出的频率误差信号和噪声采样电路模块61输出的源信号进行锁相放大并运算,以输出幅度误差信号;第一混频器64,用于将相位误差信号和幅度误差信号进行混频,以输出纠偏信号;第一电光调制器65,根据纠偏信号对光隔离器3输出的第一激光光束11进行反相位调制,以消除第一激光光束11的单频相位噪声,并输出第二激光光束12输出。The phase noise suppression module 6 includes: a noise sampling circuit module 61 for collecting the single-frequency phase noise of the first laser beam 11 and outputting a source signal; an amplitude modulation and phase shift amplifying module 62 for amplitude modulation and shift of the source signal phase, to output the phase error signal; the lock-in amplifier circuit module 63 is used to lock-in amplify and operate the frequency error signal output by the PDH frequency stabilization module 5 and the source signal output by the noise sampling circuit module 61 to output the amplitude error signal The first frequency mixer 64 is used to mix the phase error signal and the amplitude error signal to output the deviation correction signal; The first electro-optical modulator 65 carries out the first laser beam 11 output by the optical isolator 3 according to the deviation correction signal. Inverse phase modulation to eliminate the single-frequency phase noise of the first laser beam 11 and output the second laser beam 12 .

相位噪声抑制模块6还包括:第一光电探测器66,用于探测第二激光光束12,以获取强度信号;频谱分析仪67,与PDH稳频模块5电连接,用于将PDH稳频模块5输出的频率误差信号与第一光电探测器66探测的强度信号进行分析,并获取第二激光光束12的相位噪声谱。The phase noise suppression module 6 also includes: a first photodetector 66 for detecting the second laser beam 12 to obtain an intensity signal; a spectrum analyzer 67, electrically connected to the PDH frequency stabilization module 5, for connecting the PDH frequency stabilization module The output frequency error signal and the intensity signal detected by the first photodetector 66 are analyzed, and the phase noise spectrum of the second laser beam 12 is obtained.

上述PDH稳频模块5包括:调制信号发生器51,用于产生频率调制信号;第二电光调制器52,由频率调制信号驱动,对所述第二激光光束12进行调制,使第二激光光束12携带边带信号成为第三激光光束13输出;超稳腔53,由第三激光光束13入射,经腔内多光束共振,反射输出第四激光光束14;第二光电探测器54,用于探测第四激光光束14,以获取干涉信号;第二混频器55,用于将调制信号发生器51产生的频率调制信号和第二光电探测器54探测的干涉信号进行混频处理,以获取频率误差信号输出。The above-mentioned PDH frequency stabilization module 5 includes: a modulation signal generator 51 for generating a frequency modulation signal; a second electro-optical modulator 52, driven by the frequency modulation signal, modulates the second laser beam 12 to make the second laser beam 12 carries the sideband signal to become the output of the third laser beam 13; the ultra-stable cavity 53 is incident by the third laser beam 13, and is reflected by the multi-beam resonance in the cavity to output the fourth laser beam 14; the second photodetector 54 is used for The fourth laser beam 14 is detected to obtain the interference signal; the second mixer 55 is used for mixing the frequency modulation signal generated by the modulation signal generator 51 and the interference signal detected by the second photodetector 54 to obtain Frequency error signal output.

上述PDH稳频模块还包括:1/2波片56,用于调节第三激光光束13的线偏振方向;偏振分束镜57,用于对入射其上的第三激光光束13和第四激光光束14进行偏振分束,使第三激光光束13发生透射,并使第四激光光束14发生反射;1/4波片58,置于超稳腔53和偏振分束镜57之间,用于调节第三激光光束13和第四激光光束14的偏振状态,以使调节前的第三激光光束13与调节后的第四激光光束14偏振垂直。The above-mentioned PDH frequency stabilization module also includes: a 1/2 wave plate 56 for adjusting the linear polarization direction of the third laser beam 13; a polarizing beam splitter 57 for the incident on the third laser beam 13 and the fourth laser beam The beam 14 is polarized and split, so that the third laser beam 13 is transmitted and the fourth laser beam 14 is reflected; the 1/4 wave plate 58 is placed between the ultra-stable cavity 53 and the polarizing beam splitter 57 for The polarization states of the third laser beam 13 and the fourth laser beam 14 are adjusted so that the polarization of the third laser beam 13 before adjustment and the polarization of the fourth laser beam 14 after adjustment are perpendicular.

通过第二电光调制器52以对第二激光光束12进行调制,使第三激光光束13除了携带有相位噪音外,还增边带信号。The second electro-optical modulator 52 is used to modulate the second laser beam 12, so that the third laser beam 13 not only carries phase noise, but also adds a sideband signal.

通过由激光器控制器2获得噪声源,可避免使用锁相环。By obtaining the noise source from the laser controller 2, the use of a phase locked loop can be avoided.

通过频谱分析仪67分析第一光电探测器66所接收到的强度信号,当使用调幅移相放大模块62进行反调制时,边带信号随着调节变化,幅度直至为0,如果幅度变化,锁相位放大模块则产生误差反馈信号,并通过第二伺服回路模块将误差反馈信号输送至第一混频器64以对反相位调制的幅度进行反馈控制。The intensity signal received by the first photodetector 66 is analyzed by the spectrum analyzer 67. When the amplitude modulation and phase shift amplifying module 62 is used for inverse modulation, the sideband signal changes with the adjustment until the amplitude reaches 0. If the amplitude changes, the lock The phase amplifier module generates an error feedback signal, and sends the error feedback signal to the first mixer 64 through the second servo loop module to feedback control the amplitude of the anti-phase modulation.

第一混频器64将相位误差信号及幅度误差信号进行混频处理以形成纠偏信号并传送至第一电光调制器65,以调节第一激光光束11。通过控制调幅移相放大模块62的调节参数,以使调制信号与噪声信号等幅反相,以消除激光光束中的相位噪声。The first mixer 64 performs frequency mixing processing on the phase error signal and the amplitude error signal to form an offset correction signal and transmits it to the first electro-optic modulator 65 to adjust the first laser beam 11 . By controlling the adjustment parameters of the amplitude modulation and phase shift amplifying module 62, the modulation signal and the noise signal are equal in phase inversion, so as to eliminate the phase noise in the laser beam.

在其他实施例中可利用温控,加偏置电压等方法抑制第一电光调制器65的剩余幅度调制噪声。In other embodiments, methods such as temperature control and bias voltage application may be used to suppress the residual amplitude modulation noise of the first electro-optic modulator 65 .

在利用第一电光调制器65对相位噪音进行反相位调制的过程中,要进行相位匹配和幅度匹配。相位匹配通过前馈手段实现,幅度匹配通过负反馈来实现。请再参阅图1,含有相位噪声的激光光束在经过隔离器后,它的入射光可由下式表示In the process of inverse-phase modulation of the phase noise by the first electro-optic modulator 65, phase matching and amplitude matching are performed. Phase matching is achieved by means of feedforward, and amplitude matching is achieved by negative feedback. Please refer to Figure 1 again. After the laser beam with phase noise passes through the isolator, its incident light can be expressed by the following equation

Einc=Eoei(ωt+βsinΩt) (1)E inc =E o e i(ωt+βsinΩt) (1)

其中E0是激光的电场强度,ω为激光载波的频率,Ω边带噪声的频率(它来源于激光器内部的频率调制,为本实施例中主要抑制的噪声),β为噪声调制深度。where E 0 is the electric field strength of the laser, ω is the frequency of the laser carrier, the frequency of the Ω sideband noise (which originates from the frequency modulation inside the laser and is the main noise suppressed in this embodiment), and β is the noise modulation depth.

在消除相位噪声的开始阶段,由于没有获得良好的相位误差信号、幅度误差信号,故不对相位噪声进行抑制,第一电光调制器65不对第一激光光束11进行调制。In the initial stage of eliminating phase noise, since a good phase error signal and amplitude error signal are not obtained, the phase noise is not suppressed, and the first electro-optic modulator 65 does not modulate the first laser beam 11 .

当带有相位噪声的第二激光光束22经过第二电光调制器52后,第二激光光束22除了本身带有的相位噪声外,还会增加第二电光调制器52所调制出的边带信号,以用于PDH稳频,该边带一般的频率是5MHz到几十兆赫兹,此时激光光束波动的表达式为When the second laser beam 22 with phase noise passes through the second electro-optical modulator 52 , the second laser beam 22 will increase the sideband signal modulated by the second electro-optical modulator 52 in addition to its own phase noise. , to be used for PDH frequency stabilization, the frequency of this sideband is generally 5MHz to tens of megahertz, and the expression of the laser beam fluctuation is:

Figure BDA0002241425540000081
Figure BDA0002241425540000081

其中β2是频率调制深度,Ω2为第二电光调制器52的调制频率,所调制的两个边带的相位相反。第三激光光束13经过偏振分束镜57之后,第三激光光束13入射至超稳腔53,并在超稳腔53中发生振荡且部分反射沿着原光路返回。经由超稳腔53振荡后反射的光束与未进入超稳腔53直接反射的光束发生干涉以形成相干光并被第二光电探测器54接收。where β 2 is the frequency modulation depth, Ω 2 is the modulation frequency of the second electro-optic modulator 52 , and the phases of the two modulated sidebands are opposite. After the third laser beam 13 passes through the polarization beam splitter 57 , the third laser beam 13 is incident on the ultra-stable cavity 53 , oscillates in the ultra-stable cavity 53 , and partially reflects back along the original optical path. The light beam reflected after oscillating through the ultra-stable cavity 53 interferes with the light beam that is not directly reflected by the ultra-stable cavity 53 to form coherent light and is received by the second photodetector 54 .

以下对于超稳腔53中第三激光光束13反射前后变化的公式说明,若第三激光光束14入射前的电场为Eoeiωt,第四激光光束14出射的电场为E1eiωt,则有反射系数The following describes the formula of the change before and after the reflection of the third laser beam 13 in the ultra-stable cavity 53. If the electric field before the third laser beam 14 is incident is E o e iωt , and the electric field when the fourth laser beam 14 is emitted is E 1 e iωt , then with reflection coefficient

Figure BDA0002241425540000082
Figure BDA0002241425540000082

r是超稳腔53中的腔镜的反射系数,Δvfsr为超稳腔53的自由光谱程。而经过第二电光调制器调制52的第三激光光束13进入超稳腔的激光电场由式(2)的1阶展开得到r is the reflection coefficient of the cavity mirror in the ultra-stable cavity 53 , and Δv fsr is the free spectral path of the ultra-stable cavity 53 . The laser electric field of the third laser beam 13 modulated by the second electro-optic modulator 52 entering the ultra-stable cavity is obtained by the first-order expansion of equation (2)

Figure BDA0002241425540000083
Figure BDA0002241425540000083

其中未进入超稳腔53直接反射的光束与进入超稳腔53后反射出来的发生干涉所形成的干涉光的电场为The electric field of the interference light formed by the interference between the light beam that does not enter the ultra-stable cavity 53 directly reflected and the reflected light after entering the ultra-stable cavity 53 is:

Figure BDA0002241425540000084
Figure BDA0002241425540000084

通过第二光电探测器55可探测总反射光束形成的干涉光的光场,探测到的是其光强,

Figure BDA0002241425540000085
除去第二光电探测器54无法响应的光频段,其中探测电流的频率成分会包括Ω、Ω2、Ω2+Ω、Ω2-Ω、2Ω以及2Ω2等。The light field of the interference light formed by the total reflected light beam can be detected by the second photodetector 55, and its light intensity is detected,
Figure BDA0002241425540000085
Excluding the optical frequency band to which the second photodetector 54 cannot respond, the frequency components of the detection current may include Ω, Ω 2 , Ω 2 +Ω, Ω 2 −Ω, 2Ω, and 2Ω 2 .

此外,由于激光器1的相位噪声主要位于是低频段的,即满足Ω2>>Ω。在PDH稳频阶段,通过第二混频器54将第二光电探测器55的信号与电光调制器的调制信号混频以形成混频信号,并通过低通滤波器(图未示)对混频信号进行滤波,上述混频信号通过低通滤波器之后,高频成分被滤除,只留下远小于Ω2的频率成分。因此光电流中频率成分在Ω2邻近如Ω2、Ω2+Ω、Ω2-Ω频率成分为目标频率,它们通过与频率为Ω2的调制信号源进行混频并滤除高频信号,得到用于PDH稳频的误差信号。其中第二光电探测器54探测到的与噪声调制β有关的电流信号成分为:In addition, since the phase noise of the laser 1 is mainly located in the low frequency band, Ω 2 >>Ω is satisfied. In the PDH frequency stabilization stage, the signal of the second photodetector 55 is mixed with the modulation signal of the electro-optical modulator by the second mixer 54 to form a mixed signal, and the mixed signal is mixed by a low-pass filter (not shown in the figure). After the mixed signal passes through the low-pass filter, the high-frequency components are filtered out, leaving only the frequency components much smaller than Ω 2 . Therefore, the frequency components in the photocurrent are adjacent to Ω 2 such as Ω 2 , Ω 2 +Ω, Ω 2 -Ω frequency components are the target frequencies, they are mixed with the modulation signal source with frequency Ω 2 and filter out high-frequency signals, Obtain the error signal for PDH frequency stabilization. The current signal components related to the noise modulation β detected by the second photodetector 54 are:

Figure BDA0002241425540000091
Figure BDA0002241425540000091

激光光束位于谐振腔时,上式中(Ω2-Ω)和(Ω2+Ω)成分的幅度是相等的,选择最优相位φ,将信号与sin[Ω2t+φ]混频并进行低通滤波,将解调出Ω成分的信号。在其它条件稳定的情况下通过频谱分析仪分析Ω成分的幅度,它正比于相位噪声的大小J1[β]。When the laser beam is located in the resonator, the amplitudes of the (Ω 2 -Ω) and (Ω 2 +Ω) components in the above formula are equal, select the optimal phase φ, mix the signal with sin[Ω 2 t+φ] and combine Perform low-pass filtering to demodulate the Ω component signal. The magnitude of the Ω component, which is proportional to the magnitude of the phase noise J 1 [β], is analyzed by a spectrum analyzer under otherwise stable conditions.

如图1所示,通过噪声采样电路模块61从激光器1提取出含有调制的噪声信号Ω的源信号F*sin(Ωt+φ),并分别传输至调幅移相放大电路模块62以及锁相放大器(图未示)。通过调幅移相放大电路模块62调节源信号,并藉由第一混频器64作用于第一电光调制器65,以直接反向调制激光光束,将相位噪声边带消除。通过频谱分析仪67查看含有Ω的信号,调节第一电光调制器67的相位和幅度,使得频谱分析仪51上的Ω信号减小,可抑制相位噪声。其中相位匹配通过前馈手段实现,幅度匹配通过负反馈来实现。As shown in FIG. 1 , the source signal F*sin(Ωt+φ) containing the modulated noise signal Ω is extracted from the laser 1 through the noise sampling circuit module 61 and transmitted to the amplitude modulation phase shift amplifier circuit module 62 and the lock-in amplifier respectively. (not shown). The source signal is adjusted by the amplitude modulation and phase shift amplifier circuit module 62, and the first electro-optic modulator 65 is acted on by the first mixer 64 to directly reverse modulate the laser beam and eliminate the phase noise sideband. Check the signal containing Ω through the spectrum analyzer 67, and adjust the phase and amplitude of the first electro-optical modulator 67, so that the Ω signal on the spectrum analyzer 51 is reduced, and phase noise can be suppressed. The phase matching is achieved by means of feedforward, and the amplitude matching is achieved by negative feedback.

源信号F*sin(Ωt+φ)被传输至锁相放大电路模块63的A通道,第二混频器55所产生的混频信号中的D*sinΩt注入锁相放大电路模块63的B通道,当相位噪声减小后,D数值会较小;当相位噪声变大,D产生变化,该变化可通过锁相放大模块提取出来,并注入第一混频器64的另一端,通过调节第一电光调制器65的调制大小以补偿噪声的幅度改变。The source signal F*sin(Ωt+φ) is transmitted to the A channel of the lock-in amplifier circuit module 63, and D*sinΩt in the mixing signal generated by the second mixer 55 is injected into the B channel of the lock-in amplifier circuit module 63 , when the phase noise is reduced, the value of D will be smaller; when the phase noise becomes larger, D will change, and the change can be extracted by the lock-in amplifier module and injected into the other end of the first mixer 64. An electro-optic modulator 65 is modulated in magnitude to compensate for changes in the amplitude of the noise.

如图2所示,本发明实施提供的一种抑制激光器单频相位噪声方法的流程图。请一并参阅图1,本发明还提供一种抑制激光器相位噪声的方法,其包括:通过激光控制器2输出调控信号,以对激光器1进行控制,并输出激光光束;通过光隔离器3对激光器1产生的激光光束进行隔离处理,并输出第一激光光束11;通过相位噪声抑制模块6对所述第一激光光束11的单频相位噪声进行消除,并输出第二激光光束12;通过PDH稳频模块5对第二激光光束12进行边带调制处理和共振锁定处理,以获取频率误差信号;通过第一伺服回路模块4对频率误差信号进行运算,以输出频率调节信号;通过激光控制器2根据频率调节信号对控制信号进行调节,以纠正激光器频率误差,并使激光器1输出稳频激光。As shown in FIG. 2 , a flowchart of a method for suppressing single-frequency phase noise of a laser provided by the implementation of the present invention. Please refer to FIG. 1 together. The present invention also provides a method for suppressing phase noise of a laser, which includes: outputting a regulation signal through a laser controller 2 to control the laser 1 and output a laser beam; The laser beam generated by the laser 1 is isolated, and the first laser beam 11 is output; the single-frequency phase noise of the first laser beam 11 is eliminated by the phase noise suppression module 6, and the second laser beam 12 is output; through the PDH The frequency stabilization module 5 performs sideband modulation processing and resonance locking processing on the second laser beam 12 to obtain a frequency error signal; the first servo loop module 4 operates on the frequency error signal to output a frequency adjustment signal; through the laser controller 2. Adjust the control signal according to the frequency adjustment signal to correct the frequency error of the laser, and make the laser 1 output a frequency-stabilized laser.

对第一激光光束11进行单频相位噪声消除的步骤包括:通过噪声采样电路模块6采集激光控制器2的调制信号,并输出源信号;通过调幅移相放大模块62对源信号进行调幅和移相,以输出相位误差信号;通过锁相放大电路模块63对源信号与频率误差信号进行锁相放大并运算,以输出幅度误差信号;通过第一混频器64对相位误差信号与幅度误差信号进行混频,以输出纠偏信号;根据所述纠偏信号,通过第一电光调制器65对第一激光光束11进行调制,以输出第二激光光束12;通过第一光电探测器66探测第二激光光束12,以输出强度信号;通过频谱分析仪65对强度信号与频率误差信号进行分析,以获取第二激光光束12的相位噪声谱;通过调幅移相放大模块62调节对源信号的调幅值和移相值,至频谱分析仪中显示的相位噪声为零,以使第一电光调制器65对第一激光光束11进行噪声的等幅反相调制,消除单频相位噪声。The steps of eliminating single-frequency phase noise for the first laser beam 11 include: collecting the modulation signal of the laser controller 2 through the noise sampling circuit module 6 and outputting the source signal; phase, to output the phase error signal; the source signal and the frequency error signal are phase-locked and amplified by the lock-in amplifier circuit module 63 and operated to output the amplitude error signal; the phase error signal and the amplitude error signal are analyzed by the first mixer 64 Perform frequency mixing to output a deviation correction signal; according to the deviation correction signal, modulate the first laser beam 11 through the first electro-optic modulator 65 to output the second laser beam 12; detect the second laser beam through the first photodetector 66 The beam 12 is used to output the intensity signal; the intensity signal and the frequency error signal are analyzed by the spectrum analyzer 65 to obtain the phase noise spectrum of the second laser beam 12; the amplitude modulation value of the source signal is adjusted by the amplitude modulation phase shift amplifying module 62 and the phase shift value until the phase noise displayed in the spectrum analyzer is zero, so that the first electro-optic modulator 65 performs equal-amplitude inverse modulation of noise on the first laser beam 11 to eliminate single-frequency phase noise.

对第二激光光束12进行边带调制和共振锁定,以输出频率误差信号的步骤包括:The step of performing sideband modulation and resonance locking on the second laser beam 12 to output a frequency error signal includes:

通过调制信号发生器51产生的频率调制信号驱动第二电光调制器54,以对所述第二激光光束进行边带调制,并输出第三激光光束;通过1/2波片56、偏振分束镜57、1/4波片58以对第三激光光束13入射进行偏振处理,入射至超稳腔53以进行共振锁定处理,并反射输出第四激光光束14;通过经第二光电探测器54对第四激光光束14进行探测,以输出干涉信号;通过第二混频器55对干涉信号和频率调制信号进行混频,以输出频率误差信号。The second electro-optic modulator 54 is driven by the frequency modulation signal generated by the modulation signal generator 51 to perform sideband modulation on the second laser beam and output the third laser beam; The mirror 57 and the 1/4 wave plate 58 are used to polarize the incident third laser beam 13, incident to the ultra-stable cavity 53 for resonance locking processing, and reflect and output the fourth laser beam 14; through the second photodetector 54 The fourth laser beam 14 is detected to output an interference signal; the interference signal and the frequency modulation signal are mixed by the second mixer 55 to output a frequency error signal.

通过第二电光调制器52用于对第二激光光束12进行调制,以使第三激光光束13除了携带有相位噪声外,还增加边带信号。The second electro-optic modulator 52 is used to modulate the second laser beam 12, so that the third laser beam 13 not only carries phase noise, but also adds a sideband signal.

请再参阅图2,含有相位噪声的激光光束在经过光隔离器3之后,它的入射光可由下式表示Please refer to Figure 2 again, after the laser beam with phase noise passes through the optical isolator 3, its incident light can be expressed by the following formula

Einc=Eoei(ωt+βsinΩt) (1)E inc =E o e i(ωt+βsinΩt) (1)

其中E0是激光光束的电场强度,ω为激光载波的频率,Ω边带噪声的频率(它来源于激光器1内部的频率调制,为本实施例中主要抑制的噪声),β为噪声调制深度。where E 0 is the electric field strength of the laser beam, ω is the frequency of the laser carrier, Ω is the frequency of the sideband noise (which originates from the frequency modulation inside the laser 1, and is the main noise suppressed in this embodiment), and β is the noise modulation depth .

在消除相位噪声的开始阶段,由于没有获得良好的误差信号,故不对相位噪声进行抑制,第一电光调制器65不对第一激光光束11进行调制。In the initial stage of eliminating phase noise, since a good error signal is not obtained, the phase noise is not suppressed, and the first electro-optic modulator 65 does not modulate the first laser beam 11 .

当带有相位噪声的第二激光光束12经过第二电光调制器52后,第三激光光束13除了本身带有的相位噪声外,还会增加第二电光调制器52所调制出的边带,以用于PDH稳频,When the second laser beam 12 with phase noise passes through the second electro-optic modulator 52, the third laser beam 13 will increase the sideband modulated by the second electro-optic modulator 52 in addition to its own phase noise. for PDH frequency stabilization,

该边带一般的频率是5MHz到几十兆赫兹,此时激光光束波动的表达式为:The frequency of the sideband is generally 5MHz to tens of megahertz, and the expression for the fluctuation of the laser beam at this time is:

Figure BDA0002241425540000111
Figure BDA0002241425540000111

其中β2是频率调制深度,Ω2为第二电光调制器的调制频率,所调制的两个边带的相位相反。where β 2 is the frequency modulation depth, Ω 2 is the modulation frequency of the second electro-optic modulator, and the two modulated sidebands have opposite phases.

第三激光光束13经过偏振分束器之后,第三激光光束13入射至超稳腔53,并在超稳腔53中发生谐振振荡且部分反射并被第二光电探测器55接收,反射的干涉光束被第二光电探测器55接收以检测干涉信号。After the third laser beam 13 passes through the polarization beam splitter, the third laser beam 13 is incident on the ultra-stable cavity 53, and resonates and oscillates in the ultra-stable cavity 53 and is partially reflected and received by the second photodetector 55. The reflected interference The light beam is received by the second photodetector 55 to detect the interference signal.

以下对于超稳腔53中第四激光光束14反射前后变化的公式说明,若第三激光光束13的电场为Eoeiωt,第四激光光束的电场为E1eiωt,则有反射系数The following describes the formula of the change before and after the reflection of the fourth laser beam 14 in the ultra-stable cavity 53. If the electric field of the third laser beam 13 is E o e iωt and the electric field of the fourth laser beam is E 1 e iωt , there is a reflection coefficient

Figure BDA0002241425540000112
Figure BDA0002241425540000112

r是超稳腔53中的腔镜的反射系数,Δvfsr为超稳腔53的自由光谱程。而经过第二电光调制器54调制的第三激光光束13进入超稳腔53的激光电场由式(2)的1阶展开得到r is the reflection coefficient of the cavity mirror in the ultra-stable cavity 53 , and Δv fsr is the free spectral path of the ultra-stable cavity 53 . And the laser electric field of the third laser beam 13 modulated by the second electro-optic modulator 54 entering the ultra-stable cavity 53 is obtained by the first-order expansion of equation (2)

Figure BDA0002241425540000113
Figure BDA0002241425540000113

那么总反射光干涉所形成的干涉光的电场为Then the electric field of the interference light formed by the interference of the total reflected light is

Figure BDA0002241425540000114
Figure BDA0002241425540000114

通过第二光电探测器54可探测干涉光的光场,探测到的是其光强,

Figure BDA0002241425540000115
除去第二光电探测器54无法响应的光频段,其中探测电流的频率成分会包括Ω、Ω2、Ω2+Ω、Ω2-Ω、2Ω以及2Ω2等。The light field of the interference light can be detected by the second photodetector 54, and its light intensity is detected,
Figure BDA0002241425540000115
Excluding the optical frequency band to which the second photodetector 54 cannot respond, the frequency components of the detection current may include Ω, Ω 2 , Ω 2 +Ω, Ω 2 −Ω, 2Ω, and 2Ω 2 .

此外,由于激光器1的相位噪声主要位于是低频段的,即满足Ω2>>Ω。在PDH稳频阶段,通过第二混频器55将第二光电探测器54的信号与电光调制器的调制信号混频以形成混频信号,并通过低通滤波器(图未示)对混频信号进行滤波,上述混频信号通过低通滤波器之后,高频成分被滤除,只留下远小于Ω2的频率成分。因此光电流中频率成分在Ω2邻近如Ω2、Ω2+Ω、Ω2-Ω频率成分为目标频率,它们通过与频率为Ω2的调制信号源进行混频并滤除高频信号,得到PDH稳频的误差信号。其中第二光电探测器54探测到的与噪声调制β有关的电流信号成分为:In addition, since the phase noise of the laser 1 is mainly located in the low frequency band, Ω 2 >>Ω is satisfied. In the PDH frequency stabilization stage, the signal of the second photodetector 54 is mixed with the modulation signal of the electro-optical modulator by the second mixer 55 to form a mixed signal, and the mixed signal is mixed by a low-pass filter (not shown in the figure). After the mixed signal passes through the low-pass filter, the high-frequency components are filtered out, leaving only the frequency components much smaller than Ω 2 . Therefore, the frequency components in the photocurrent are adjacent to Ω 2 such as Ω 2 , Ω 2 +Ω, Ω 2 -Ω frequency components are the target frequencies, they are mixed with the modulation signal source with frequency Ω 2 and filter out high-frequency signals, The error signal of PDH frequency stabilization is obtained. The current signal components related to the noise modulation β detected by the second photodetector 54 are:

激光光束位于腔谐振时,上式中(Ω2-Ω)和(Ω2+Ω)成分的幅度是相等的,选择最优相位φ,将信号与sin[Ω2t+φ]混频并进行低通滤波,将解调出Ω成分的信号。在其它条件稳定的情况下通过频谱分析仪分析Ω成分的幅度,它正比于相位噪声的大小J1[β]。When the laser beam is located in the cavity resonance, the amplitudes of the (Ω 2 -Ω) and (Ω 2 +Ω) components in the above formula are equal, select the optimal phase φ, mix the signal with sin[Ω 2 t+φ] and combine Perform low-pass filtering to demodulate the Ω component signal. The magnitude of the Ω component, which is proportional to the magnitude of the phase noise J 1 [β], is analyzed by a spectrum analyzer under otherwise stable conditions.

通过噪声采样电路模块61从激光器1提取出含有调制的噪声信号Ω的源信号F*sin(Ωt+φ),并分别传输至调幅移相放大电路模块62以及锁相放大电路模块63。通过调幅移相放大电路模块62调节源信号,并藉由第一混频器64作用于第一电光调制器65,以直接反向调制激光,将相位噪声边带消除。通过频谱分析仪67查看含有Ω的信号,调节第一电光调制器65的相位和幅度,使得频谱仪上的Ω信号减小,可抑制相位噪声。The source signal F*sin(Ωt+φ) containing the modulated noise signal Ω is extracted from the laser 1 through the noise sampling circuit module 61 , and transmitted to the amplitude modulation phase shift amplifier circuit module 62 and the lock-in amplifier circuit module 63 respectively. The source signal is adjusted by the amplitude modulation and phase shift amplifier circuit module 62, and the first electro-optic modulator 65 is acted on by the first mixer 64 to directly reverse modulate the laser light and eliminate the phase noise sideband. Check the signal containing Ω through the spectrum analyzer 67, and adjust the phase and amplitude of the first electro-optic modulator 65, so that the Ω signal on the spectrum analyzer is reduced, and phase noise can be suppressed.

源信号F*sin(Ωt+φ)被传输至锁相放大电路模块的A通道,第二混频器55所产生的混频信号中的D*sinΩt注入锁相放大器的B通道,当相位噪声减小后,D数值会较小;但相位噪声变大,D产生变化,该变化可通过锁相放大模块63提取出来,并经过伺服回路注入第一混频器64的另一端,通过调节第一电光调制器65的调制大小以补偿噪声的幅度改变。The source signal F*sin(Ωt+φ) is transmitted to the A channel of the lock-in amplifier circuit module, and D*sinΩt in the mixing signal generated by the second mixer 55 is injected into the B channel of the lock-in amplifier. When the phase noise After decreasing, the value of D will be smaller; but the phase noise becomes larger, and D changes, which can be extracted by the lock-in amplifier module 63 and injected into the other end of the first mixer 64 through the servo loop. An electro-optic modulator 65 is modulated in magnitude to compensate for changes in the amplitude of the noise.

以上是对本发明的较佳实施进行了具体说明,但本发明创造并不限于所述实施例,熟悉本领域的技术人员在不违背本发明精神的前提下还可做出种种的等同变形或替换,这些等同的变形或替换均包含在本申请权利要求所限定的范围内。The above is a specific description of the preferred implementation of the present invention, but the present invention is not limited to the described embodiments, and those skilled in the art can also make various equivalent deformations or replacements on the premise that does not violate the spirit of the present invention , these equivalent modifications or substitutions are all included within the scope defined by the claims of the present application.

Claims (9)

1. A system for suppressing single frequency phase noise of a laser, comprising:
a laser for generating a laser beam;
an optical isolator allowing unidirectional input of the laser beam and outputting a first laser beam to isolate the first laser beam from returning to the laser;
the phase noise suppression module is used for eliminating single-frequency phase noise of the first laser beam and outputting a second laser beam;
a PDH (Pound-Drever-Hall) frequency stabilization module for performing sideband modulation processing and resonance locking processing on the second laser beam to output a frequency error signal;
the first servo loop module is used for calculating the frequency error signal so as to output a frequency adjusting signal;
and the laser controller is used for outputting a control signal to control the laser, and adjusting the control signal according to the frequency adjusting signal to correct the frequency error of the laser and enable the laser to output frequency-stabilized laser.
2. The system for suppressing laser single frequency phase noise according to claim 1, wherein the phase noise suppression module is electrically connected to the laser controller to collect the control signal of the laser controller as a source signal output.
3. A system for suppressing laser single frequency phase noise according to claim 1, wherein said phase noise suppression module comprises:
the noise sampling circuit module is used for collecting single-frequency phase noise of the first laser beam and outputting a source signal;
the amplitude modulation phase shift amplification module is used for carrying out amplitude modulation and phase shift on the source signal so as to output a phase error signal;
the phase-locked amplifying circuit module is electrically connected with the PDH frequency stabilizing module and is used for performing phase-locked amplification and operation on the frequency error signal output by the PDH frequency stabilizing module and the source signal output by the noise sampling circuit module so as to output an amplitude error signal;
a first mixer for mixing the phase error signal and the amplitude error signal to output a deviation correction signal;
and the first electro-optical modulator is used for performing anti-phase modulation on the first laser beam output by the optical isolator according to the deviation rectifying signal so as to eliminate single-frequency phase noise of the first laser beam and output a second laser beam.
4. A system for suppressing laser single frequency phase noise according to claim 3, wherein said phase noise suppression module further comprises:
a first photodetector for detecting the second laser beam to obtain an intensity signal;
and the spectrum analyzer is electrically connected with the PDH frequency stabilization module and is used for analyzing the frequency error signal output by the PDH frequency stabilization module and the intensity signal detected by the first photoelectric detector and acquiring the phase noise spectrum of the second laser beam.
5. The system for suppressing laser single frequency phase noise according to claim 1, wherein the PDH frequency stabilization module comprises:
a modulation signal generator for generating a frequency modulation signal;
the second electro-optical modulator is driven by the frequency modulation signal and modulates the second laser beam so that the second laser beam carries a sideband signal to become a third laser beam and output the third laser beam;
the ultrastable cavity is incident by the third laser beam, resonates by multiple beams in the cavity and reflects and outputs a fourth laser beam;
a second photodetector for detecting the fourth laser beam to obtain an interference signal;
and the second mixer is used for mixing the frequency modulation signal generated by the modulation signal generator and the interference signal detected by the second photodetector so as to obtain a frequency error signal output.
6. The system for suppressing laser single frequency phase noise according to claim 5, wherein the PDH frequency stabilization module further comprises:
1/2 wave plate for adjusting the linear polarization direction of the third laser beam;
the polarization beam splitter is used for carrying out polarization beam splitting on the third laser beam and the fourth laser beam which are incident on the polarization beam splitter so as to enable the third laser beam to be transmitted and the fourth laser beam to be reflected;
1/4 wave plate, which is placed between the super stable cavity and the polarization beam splitter, and is used to adjust the polarization state of the third laser beam and the fourth laser beam, so that the polarization of the third laser beam before adjustment is perpendicular to the polarization of the fourth laser beam after adjustment.
7. A method for suppressing single frequency phase noise of a laser, comprising:
outputting a regulation signal through a laser controller to control a laser and output a laser beam;
isolating the laser beam generated by the laser through an optical isolator, and outputting a first laser beam;
eliminating single-frequency phase noise of the first laser beam through a phase noise suppression module, and outputting a second laser beam;
performing sideband modulation processing and resonance locking processing on the second laser beam through a PDH frequency stabilization module to obtain a frequency error signal;
calculating the frequency error signal through a first servo loop module to output a frequency adjusting signal;
and adjusting the control signal through the laser controller according to the frequency adjusting signal to correct the frequency error of the laser and enable the laser to output frequency stabilized laser.
8. The method of suppressing laser single frequency phase noise according to claim 7, wherein the step of performing single frequency phase noise cancellation on the first laser beam comprises:
acquiring a modulation signal of the laser controller through a noise sampling circuit module, and outputting a source signal;
amplitude modulation and phase shift are carried out on the source signal through an amplitude modulation and phase shift amplification module to output a phase error signal;
performing phase-locked amplification and operation on the source signal and the frequency error signal through a phase-locked amplification circuit module to output an amplitude error signal;
mixing the phase error signal and the amplitude error signal through a first mixer to output a deviation correcting signal;
modulating the first laser beam through a first electro-optical modulator according to the deviation correcting signal to output a second laser beam;
detecting the second laser beam by a first photodetector to output an intensity signal;
analyzing the intensity signal and the frequency error signal by a spectrum analyzer to obtain a phase noise spectrum of the second laser beam;
the amplitude modulation value and the phase shift value of the source signal are adjusted through an amplitude modulation and phase shift amplification module until the phase noise displayed in the spectrum analyzer is zero, so that the first electro-optical modulator performs equal-amplitude reverse modulation on the noise of the first laser beam, and single-frequency phase noise is eliminated.
9. The method of suppressing laser single frequency phase noise according to claim 7, wherein the step of performing a sideband modulation process and a resonance lock process on the second laser beam to output a frequency error signal comprises:
driving a second electro-optical modulator through a frequency modulation signal generated by a modulation signal generator to perform sideband modulation on the second laser beam and output a third laser beam;
the third laser beam is incident through an 1/2 wave plate, a polarization beam splitter and a 1/4 wave plate to be subjected to polarization processing, is incident to the super-stable cavity to be subjected to resonance locking processing, and is reflected to output a fourth laser beam;
detecting the fourth laser beam through a second photoelectric detector to output an interference signal;
the interference signal and the frequency modulation signal are mixed by a second mixer to output a frequency error signal.
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