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CN110790240B - Sulfuric acid recovery system and method for recovering sulfuric acid by removing hydrogen peroxide - Google Patents

Sulfuric acid recovery system and method for recovering sulfuric acid by removing hydrogen peroxide Download PDF

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Publication number
CN110790240B
CN110790240B CN201911249942.2A CN201911249942A CN110790240B CN 110790240 B CN110790240 B CN 110790240B CN 201911249942 A CN201911249942 A CN 201911249942A CN 110790240 B CN110790240 B CN 110790240B
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hydrogen peroxide
sulfuric acid
diffusion dialysis
acid
fine filter
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CN110790240A (en
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刘鸣
黄清云
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Suzhou Jimcel Electronic New Material Co ltd
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Suzhou Jimcel Electronic New Material Co ltd
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    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B17/00Sulfur; Compounds thereof
    • C01B17/69Sulfur trioxide; Sulfuric acid
    • C01B17/90Separation; Purification

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
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Abstract

The invention provides a sulfuric acid recovery system for removing hydrogen peroxide and recovering sulfuric acid, which comprises an acid storage tank, a hydrogen peroxide degradation tank, a fine filter and diffusion dialysis equipment, wherein the top of the hydrogen peroxide degradation tank is communicated with the acid storage tank through a liquid inlet pipe, an acid delivery pump is arranged on the liquid inlet pipe, an inlet of the fine filter is communicated with the hydrogen peroxide degradation tank through a liquid outlet pipe, a liquid outlet pump is arranged on the liquid outlet pipe, an outlet of the fine filter is positioned above the diffusion dialysis equipment and is communicated with the diffusion dialysis equipment, and filtered liquid directly enters the diffusion dialysis equipment; the diffusion dialysis equipment takes concentration difference as driving force to separate sulfuric acid, and the bottom of the diffusion dialysis equipment is communicated with the receiving tank. The system has the advantages of simple structure, reasonable arrangement, reduced economic cost, simple operation and easy realization. The sulfuric acid recovery system is utilized to remove hydrogen peroxide and recover sulfuric acid, so that the removal rate of hydrogen peroxide in a strong acid environment can be improved, the sulfuric acid recovery utilization rate can be improved, the hydrogen peroxide can be effectively removed, and the application field of the recovered sulfuric acid can be widened.

Description

Sulfuric acid recovery system and method for recovering sulfuric acid by removing hydrogen peroxide
Technical Field
The invention relates to a sulfuric acid recovery system and a method for recovering sulfuric acid by removing hydrogen peroxide.
Background
The sulfuric acid waste liquid is waste liquid produced in the industrial production process of electronic semiconductors, and mainly comprises unused sulfuric acid, hydrogen peroxide and pollutants after reaction with concentrated sulfuric acid. Sulfuric acid is used as an important chemical raw material, and relates to the fields of petroleum, chemical industry, steel, electronic semiconductors and the like in the industrial field, so that the yield of sulfuric acid waste liquid is huge. In recent years, with the rapid development of the electronic semiconductor industry, the electronic grade concentrated sulfuric acid is widely applied in the industrial fields of integrated circuit industry, TFT industry, photovoltaic industry, semiconductor industry and the like, the discharge amount of sulfuric acid waste liquid is increased year by year, and the processing difficulty and the environmental protection requirement are high, so that the processing cost is higher and higher, and the environmental protection burden and the production and operation burden of enterprises are increased. Therefore, a process technology is needed to recycle the part of the sulfuric acid waste liquid, so that the sulfuric acid with high price can be recycled and utilized, and the cost for treating the sulfuric acid waste liquid can be greatly reduced.
The application document with the application number 201310339157.2 and the name of bipolar membrane electrodialysis treatment of 3-aminopyrazole-4-formamide hemisulfate production wastewater and a sulfuric acid recovery method discloses a sulfuric acid recovery method which does not pollute the environment, and the method comprises the following steps: filtering the 3-aminopyrazole-4-formamide hemisulfate production wastewater by a microporous filter with the precision of 0.1-0.45; pumping the filtered wastewater into one of a salt chamber or a salt/alkali chamber or a salt/acid chamber of bipolar membrane electrodialysis equipment, injecting electrolyte solution with a certain concentration into the other compartments, and respectively connecting a cathode and an anode of the bipolar membrane electrodialysis equipment with a cathode and an anode of a direct current power supply; and starting bipolar membrane electrodialysis equipment to remove sulfuric acid in the wastewater and recycle the sulfuric acid, wherein the removal rate of the sulfuric acid is more than 90%, and the concentration of the recycled sulfuric acid is more than 4%. However, this method has the following drawbacks: 1) It can only recover sulfuric acid with low concentration, but cannot recover sulfuric acid with high concentration containing hydroxide substances; 2) The technology is applied to electrodialysis equipment, and has high electric energy consumption, short service life of bipolar membranes and high replacement frequency.
Disclosure of Invention
The invention aims to provide a sulfuric acid recovery system for removing hydrogen peroxide and recovering sulfuric acid, which has the advantages of simple structure, reasonable arrangement, low economic cost, simple operation and easy realization.
The invention is realized in the following way:
The sulfuric acid recovery system for removing hydrogen peroxide and recovering sulfuric acid comprises an acid storage tank, a hydrogen peroxide degradation tank, a fine filter and diffusion dialysis equipment, wherein the top of the hydrogen peroxide degradation tank is communicated with the acid storage tank through a liquid inlet pipe, an acid delivery pump is arranged on the liquid inlet pipe, an inlet of the fine filter is communicated with the hydrogen peroxide degradation tank through a liquid outlet pipe, a liquid outlet pump is arranged on the liquid outlet pipe, an outlet of the fine filter is positioned above the diffusion dialysis equipment and is communicated with the diffusion dialysis equipment, and filtered liquid directly enters the diffusion dialysis equipment; the diffusion dialysis equipment takes concentration difference as driving force to separate sulfuric acid, and the bottom of the diffusion dialysis equipment is communicated with the receiving tank.
As a preferable scheme, the hydrogen peroxide degradation tank is an FRP high-temperature-resistant anti-corrosion tank and is provided with a heat exchanger.
As a preferable scheme, the filtering precision of the fine filter is 0.1-0.5um.
As a preferable scheme, the fine filter is a PVDF filter.
As a preferable scheme, the fine filter is matched with a filter element made of PTFE material.
As a preferable scheme, the diffusion dialysis equipment is internal circulation treatment equipment, and the number of internal circulation treatments is not less than two.
The invention also aims to provide a method for recycling sulfuric acid by removing hydrogen peroxide by using the sulfuric acid recycling system. The method can improve the removal rate of the hydrogen peroxide and the recycling rate of the sulfuric acid in a strong acid environment, effectively remove the hydrogen peroxide, widen the application field of recycling the sulfuric acid, effectively reduce the addition amount of chemical agents and the generation amount of hazardous waste sludge, and realize the recycling of the sulfuric acid waste liquid.
The invention is realized in the following way:
According to the method for removing hydrogen peroxide and recycling sulfuric acid by utilizing the sulfuric acid recycling system, sulfuric acid waste liquid containing hydrogen peroxide is sent into a hydrogen peroxide degradation tank through an acid delivery pump, an acid-resistant hydrogen peroxide degradation agent is added, and the waste liquid from which hydrogen peroxide is removed is pumped into a fine filter through a liquid outlet pump for filtration; the filtered waste liquid enters a diffusion dialysis device from the outlet of the fine filter, the diffusion dialysis device adopts an internal circulation treatment mode, the concentration difference is used as a driving force, the principle of selective permeability is applied, sulfuric acid is further separated from the waste liquid, and the waste liquid enters a receiving tank.
As a preferable scheme, the acid-resistant hydrogen peroxide degradation agent is a compound sulfate substance containing transition metal vanadium and chromium.
As a preferable mode, the concentration difference of the diffusion dialysis equipment is not less than 10000mg/L.
As a preferable mode, the number of times of the internal circulation treatment of the diffusion dialysis apparatus is three.
The beneficial effects of the invention are as follows:
(1) Compared with the traditional technologies of ferrous sulfate, biological enzyme and the like, the special acid-resistant hydrogen peroxide degradation agent has the unique advantage that the oxidation-reduction reaction can be carried out under the high-concentration sulfuric acid environment, the hydrogen peroxide is decomposed into water and oxygen, the degradation rate is more than 99%, and the liquid inlet requirement of subsequent diffusion dialysis equipment is met.
(2) The filter with acid corrosion resistance and 0.1-0.5um precision can effectively remove fine particles, meet the liquid inlet requirement of diffusion dialysis equipment and avoid damage to the dialysis equipment;
(3) The diffusion dialysis equipment is separated by the concentration difference principle, is different from electrodialysis, does not need external electric energy consumption, and reduces the electric energy consumption cost;
(4) The process technology adopts an integral internal circulation treatment mode, so that salt impurities in the waste liquid can be effectively removed, and the sulfuric acid is recovered while the salt impurities are removed, thereby greatly improving the purity of the recovered sulfuric acid;
(5) Compared with the traditional treatment technology, the technology can effectively recycle sulfuric acid, the subsequent waste liquid treatment can effectively reduce the addition amount of chemical neutralization agents and the generation amount of hazardous waste sludge, the purposes of reducing resource investment and realizing sulfur recycling are achieved, the economic cost is reduced, the operation is simple, the high-temperature and high-pressure environment is not needed, the realization is easy, and the technology has a very wide application prospect in the field of environmental-friendly hazardous waste liquid treatment.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some examples of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a structure provided by an embodiment of the present invention;
icon:
1-acid storage tank, 2-hydrogen peroxide degradation tank, 3-fine filter, 4-diffusion dialysis equipment, 5-liquid inlet pipe, 6-acid delivery pump, 7-liquid outlet pipe, 8-liquid outlet pump and 9-receiving tank.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, based on the embodiments of the invention, which are apparent to those of ordinary skill in the art without inventive faculty, are intended to be within the scope of the invention.
Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, based on the embodiments of the invention, which are apparent to those of ordinary skill in the art without inventive faculty, are intended to be within the scope of the invention.
In the description of the present invention, it should be understood that the terms "orientation" or "positional relationship" are based on the orientation or positional relationship shown in the drawings, and are merely for convenience of description and to simplify the description, rather than to indicate or imply that the apparatus or elements referred to must have a particular orientation, be constructed and operate in a particular orientation, and therefore should not be construed as limiting the invention.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the description of the present invention, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships conventionally put in use of the inventive product, are merely for convenience of describing the present invention and simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be constructed and operated in a specific direction, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal," "vertical," "overhang," and the like do not denote a requirement that the component be absolutely horizontal or overhang, but rather may be slightly inclined. As "horizontal" merely means that its direction is more horizontal than "vertical", and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the present invention, unless expressly stated or limited otherwise, a first feature may include first and second features directly contacting each other, either above or below a second feature, or through additional features contacting each other, rather than directly contacting each other. Moreover, the first feature being above, over, and on the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being below, beneath, and beneath the second feature includes the first feature being directly below and obliquely below the second feature, or simply indicates that the first feature is less level than the second feature.
Examples:
The embodiment aims at providing a sulfuric acid recovery system and a sulfuric acid recovery method for recovering sulfuric acid from hydrogen peroxide.
Specifically, referring to fig. 1, the sulfuric acid recovery system comprises an acid storage tank 1, a hydrogen peroxide degradation tank 2, a fine filter 3 and diffusion dialysis equipment 4, wherein the top of the hydrogen peroxide degradation tank is communicated with the acid storage tank through a liquid inlet pipe 5, and an acid conveying pump 6 is arranged on the liquid inlet pipe. The inlet of the fine filter is communicated with the hydrogen peroxide degradation tank through a liquid outlet pipe 7, a liquid outlet pump 8 is arranged on the liquid outlet pipe, the outlet of the fine filter is positioned above the diffusion dialysis equipment and is communicated with the diffusion dialysis equipment, and filtered liquid directly enters the diffusion dialysis equipment. The diffusion dialysis device 4 separates sulfuric acid by using concentration difference as driving force, and the bottom of the diffusion dialysis device is communicated with the receiving tank 9.
Wherein, the hydrogen peroxide degradation tank 2 is made of FRP high temperature resistant and corrosion resistant materials and is provided with a heat exchanger. The fine filter 3 is an acid-resistant filter, such as a PVDF filter, and is provided with a PTFE filter core and a similar filter core, and the filtering precision is 0.1-0.5um. The diffusion dialysis equipment 4 is internal circulation treatment equipment, the number of times of internal circulation treatment of the diffusion dialysis equipment is preferably more than or equal to 2, the impurity removal rate of recovered sulfuric acid reaches 99%, and the recovery rate of sulfuric acid reaches 80%; the diffusion dialysis equipment 4 is suitable for the concentration difference of more than or equal to 10000mg/L (1%) as thrust, and the concentration of sulfuric acid in waste liquid which can be treated by the technology is 1% -50%, so that the application field is wide.
When in use, the sulfuric acid waste liquid containing hydrogen peroxide is sent into the hydrogen peroxide degradation tank 2 through the acid delivery pump 6, acid-resistant hydrogen peroxide degradation agent is added, and the waste liquid from which the hydrogen peroxide is removed is pumped into the fine filter 3 through the liquid outlet pump 8 for filtration; the filtered waste liquid enters the diffusion dialysis equipment 4 from the outlet of the fine filter, the diffusion dialysis equipment adopts an internal circulation treatment mode, uses concentration difference as driving force, and further separates sulfuric acid from the waste liquid by applying the principle of selective permeability, and enters the receiving tank 9. The acid-resistant hydrogen peroxide degradation agent is a compound sulfate substance containing transition metal vanadium and chromium, can degrade hydrogen peroxide in high-concentration sulfuric acid waste liquid, has concentration of 3000-100000mg/L (0.3% -10%), and has degradation rate of more than 99%.
The method for recycling sulfuric acid by removing hydrogen peroxide according to the application is described in the following specific example:
37000 mg/L (37%) of sulfuric acid, 70000ppm (7%) of hydrogen peroxide, 22900mg/L (2.29%) of iron and 1920mg/L (0.192%) of aluminum of acid waste liquid generated by a certain semiconductor industry, and the flow rate is 1m3/D, and the acid waste liquid sequentially passes through a hydrogen peroxide degradation tank (adding a special acid-resistant hydrogen peroxide degradation agent), a 0.1um PVDF filter (matched with a PTFE filter element) and diffusion dialysis equipment capable of internal circulation;
Degrading hydrogen peroxide through a hydrogen peroxide degradation tank to meet the requirement of subsequent liquid feeding; removing particles with the particle size of more than or equal to 0.1um in the waste liquid through a filter, so that the waste liquid meets the liquid inlet requirement of diffusion dialysis equipment;
And (3) the filtered waste liquid enters diffusion dialysis equipment, and after 3 times of treatment, the recovered sulfuric acid is collected and enters a receiving tank for workshop reuse.
Sampling detection in the receiving groove shows that: the concentration of the recovered sulfuric acid is 31.6%, and the recovery rate is 85.41%; the hydrogen peroxide content is less than 10mg/L, and the degradation rate is more than 99.9%; the content of aluminum and iron is less than 0.2mg/L, and the removal rate is more than 99 percent.
Therefore, the method solves the defect that the prior art and equipment cannot treat the sulfuric acid waste liquid containing hydrogen peroxide; solves the problems that the prior art can only treat low-concentration sulfuric acid waste liquid and has narrow application field; and the problem of high comprehensive cost of treating the waste liquid containing hydrogen peroxide is solved. The method realizes the purpose of recycling sulfur with less resource investment, reduces the economic cost, and has wide application prospect in the field of environmental protection dangerous waste liquid treatment.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, and various modifications and variations may be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (5)

1. The method for recycling sulfuric acid by removing hydrogen peroxide is characterized in that sulfuric acid waste liquid containing hydrogen peroxide is sent into a hydrogen peroxide degradation tank (2) through an acid delivery pump (6), acid-resistant hydrogen peroxide degradation agent is added, and the waste liquid from which hydrogen peroxide is removed is pumped into a fine filter (3) through a liquid outlet pump (8) for filtration; the filtered waste liquid enters a diffusion dialysis device (4) from an outlet of the fine filter, the diffusion dialysis device adopts an internal circulation treatment mode, uses concentration difference as driving force, and further separates sulfuric acid from the waste liquid by applying a principle of selective permeability and enters a receiving groove (9);
The acid-resistant hydrogen peroxide degradation agent is a compound sulfate substance containing transition metal vanadium and chromium;
the concentration difference of the diffusion dialysis equipment (4) is not less than 10000mg/L;
the number of times of internal circulation treatment of the diffusion dialysis equipment (4) is three.
2. The method according to claim 1, characterized in that: the hydrogen peroxide degradation tank (2) is an FRP high-temperature-resistant anti-corrosion tank and is provided with a heat exchanger.
3. The method according to claim 1, characterized in that: the filtering precision of the fine filter (3) is 0.1-0.5um.
4. The method according to claim 1, characterized in that: the fine filter (3) is a PVDF filter.
5. The method according to claim 1, characterized in that: the fine filter (3) is matched with a PTFE filter element.
CN201911249942.2A 2019-12-09 2019-12-09 Sulfuric acid recovery system and method for recovering sulfuric acid by removing hydrogen peroxide Active CN110790240B (en)

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CN110790240B true CN110790240B (en) 2024-07-05

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108483411A (en) * 2018-04-09 2018-09-04 四川高绿平环境科技有限公司 The processing unit and its processing method of hydrogen peroxide in a kind of removing sulfuric acid waste
CN108751133A (en) * 2018-07-02 2018-11-06 北京宝迪华禹科技发展有限公司 A kind of technology for efficiently removing silicon recycling hydrofluoric acid
CN211078475U (en) * 2019-12-09 2020-07-24 苏州市晶协高新电子材料有限公司 Sulfuric acid recovery system

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002001358A (en) * 2000-06-20 2002-01-08 Mitsubishi Gas Chem Co Inc Hydrogen peroxide decomposing method for chemical polishing waste liquid
CN104525183B (en) * 2014-12-08 2016-08-17 太原理工大学 A kind of mesoporous catalyst loading chromio and its preparation method and application

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108483411A (en) * 2018-04-09 2018-09-04 四川高绿平环境科技有限公司 The processing unit and its processing method of hydrogen peroxide in a kind of removing sulfuric acid waste
CN108751133A (en) * 2018-07-02 2018-11-06 北京宝迪华禹科技发展有限公司 A kind of technology for efficiently removing silicon recycling hydrofluoric acid
CN211078475U (en) * 2019-12-09 2020-07-24 苏州市晶协高新电子材料有限公司 Sulfuric acid recovery system

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