CN110676690A - Light beam shaping vertical cavity surface emitting laser integrated with high-contrast grating and simulation method thereof - Google Patents
Light beam shaping vertical cavity surface emitting laser integrated with high-contrast grating and simulation method thereof Download PDFInfo
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- CN110676690A CN110676690A CN201910981884.6A CN201910981884A CN110676690A CN 110676690 A CN110676690 A CN 110676690A CN 201910981884 A CN201910981884 A CN 201910981884A CN 110676690 A CN110676690 A CN 110676690A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18302—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] comprising an integrated optical modulator
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/0014—Measuring characteristics or properties thereof
- H01S5/0035—Simulations of laser characteristics
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18386—Details of the emission surface for influencing the near- or far-field, e.g. a grating on the surface
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Abstract
A light beam shaping vertical cavity surface emitting laser integrated with a high-contrast grating and a simulation method thereof are provided, wherein the light beam shaping vertical cavity surface emitting laser is composed of a vertical cavity surface emitting laser and the high-contrast grating, and output light beams in different shapes are obtained by adjusting the area of the grating and the size of an oxidation hole of the vertical cavity surface emitting laser. The invention can realize the single-lobe and double-lobe light beam output without an external light beam shaping system.
Description
Technical Field
The invention relates to the field of semiconductor photoelectron, in particular to a beam shaping vertical cavity surface emitting laser integrated with a high-contrast grating and an analog method thereof.
Background
With the continuous development of semiconductor laser technology, the application scenarios of semiconductor lasers are becoming diversified, and in order to meet the requirements of different applications, a special beam shaping system is usually required to shape the output beam of the laser. For example, in the field of material processing and laser medical applications, it is desirable to focus the output beam into circular spots that are distributed as symmetrically as possible; in a transmission network, a splitter is required to split/combine optical signals.
Vertical-cavity surface-emitting lasers (VCSELs) have the advantages of low cost, low power consumption, easiness in packaging and the like, and are widely applied to the fields of data communication, sensing and the like. Compared with Edge-emitting lasers (eels), VCSELs have better beam quality and are easily coupled with optical fibers. After the VCSEL is manufactured, the french national science and research center successfully focuses the output beam of the VCSEL through an integrated micro optical electromechanical system (MOEMS), but the structure and the manufacturing process of the VCSEL are very complex, and a high coupling efficiency is difficult to obtain; high-contrast superstructure (HCM) with reflectivity changing with angle is designed at the university of beckeley, california to replace a reflector on a VCSEL and simultaneously serve as a beam shaper to modulate output beams, so that beam outputs with different far-field distributions are obtained, but the suspended HCM is complex in manufacturing process and poor in mechanical stability.
Disclosure of Invention
It is therefore an object of the present invention to provide a beam shaping vcsel integrated with a high-contrast grating and an analog method thereof, which at least partially solve at least one of the above-mentioned problems.
To achieve the above object, as an aspect of the present invention, there is provided a beam shaping vertical cavity surface emitting laser integrated with a high contrast grating, comprising:
the vertical cavity surface emitting laser comprises a lower reflector, an active region, an oxidation hole and an upper reflector, wherein the lower reflector, the active region, the oxidation hole and the upper reflector are sequentially and adjacently arranged;
the high-contrast grating is positioned on the other surface of the upper reflecting mirror, which is opposite to the surface of the oxidation hole;
the area of the high-contrast grating and the size of the oxidation hole of the vertical cavity surface emitting laser can be adjusted to obtain output beams with different shapes.
Wherein, the logarithm of the upper reflector is 2-4 pairs.
Wherein the material of the high contrast grating is composed of two materials with high refractive index difference, the ratio of the high refractive index to the low refractive index needs to be more than 2, such as Si/SiO2、GaAs/AlOx。
Wherein the size of the oxidation hole is smaller than the diameter of the grating area.
And the size of the oxidation hole is close to or larger than the diameter of the grating area, and a single-lobe Gaussian beam is output at the moment.
As another aspect of the present invention, there is provided a method for simulating a beam-shaping VCSEL incorporating a high-contrast grating, comprising the steps of:
combining numerical values and simulation and analysis, designing a high-contrast grating with a high reflection band, wherein the reflectivity is more than 99.5%;
the period size, the duty ratio and the grating thickness of the high-contrast grating are adjusted to realize a high-reflection band with the target wavelength as the center wavelength, and the reflectivity is more than 99.5%;
and integrating the obtained high-contrast grating on a vertical cavity surface emitting laser comprising 2-4 pairs of upper distributed Bragg reflectors, constructing a three-dimensional model, and performing three-dimensional simulation to obtain a far-field distribution simulation result of the designed beam shaping vertical cavity surface emitting laser.
Wherein, the simulation analysis in the simulation step adopts a finite difference time domain numerical method.
Based on the above technical solution, the vertical cavity surface emitting laser of the present invention has at least one or some of the following advantages over the prior art:
(1) the invention has simple manufacturing process and can realize the output of light beams with different shapes on the premise of not using an external light beam shaping system;
(2) the theory adopted by the invention is mature, and the established model is easy to simulate and calculate.
Drawings
FIG. 1 is a schematic diagram of a beam shaping VCSEL incorporating a high contrast grating;
FIG. 2 is a calculation result of the reflection spectrum of the high contrast grating designed by the present invention;
FIG. 3 shows the far field distribution and the horizontal far field divergence angle for different grating area diameters for a given oxidation hole size d;
FIG. 4 shows the far field distribution and the horizontal far field divergence angle for different oxidation hole sizes at a given grating area diameter D.
Detailed Description
The invention discloses a light beam shaping vertical cavity surface emitting laser integrated with a high-contrast grating and a simulation method thereof. The invention can realize the single-lobe and double-lobe light beam output without an external light beam shaping system.
Specifically, the present invention provides a beam shaping vertical cavity surface emitting laser integrated with a high contrast grating, comprising:
the vertical cavity surface emitting laser comprises a lower reflector, an active region, an oxidation hole and an upper reflector, wherein the lower reflector, the active region, the oxidation hole and the upper reflector are sequentially and adjacently arranged;
the high-contrast grating is positioned on the other surface of the upper reflecting mirror, which is opposite to the surface of the oxidation hole;
the area of the high-contrast grating and the size of the oxidation hole of the vertical cavity surface emitting laser can be adjusted to obtain output beams with different shapes.
Wherein, the logarithm of the upper reflector is 2-4 pairs.
Wherein, the material of the high-contrast grating consists of two materials with high refractive index difference, the ratio of the high refractive index to the low refractive index needs to be more than 2, and Si/SiO is preferred2、GaAs/AlOx。
Wherein the size of the oxidation hole is smaller than the diameter of the grating area.
And the size of the oxidation hole is close to or larger than the diameter of the grating area, and a single-lobe Gaussian beam is output at the moment.
The invention also provides a simulation method of the beam shaping vertical cavity surface emitting laser integrated with the high-contrast grating, which comprises the following steps:
combining numerical values and simulation and analysis, designing a high-contrast grating with a high reflection band, wherein the reflectivity is more than 99.5%;
the period size, the duty ratio and the grating thickness of the high-contrast grating are adjusted to realize a high-reflection band with the target wavelength as the center wavelength, and the reflectivity is more than 99.5%;
and integrating the obtained high-contrast grating on a vertical cavity surface emitting laser comprising 2-4 pairs of upper distributed Bragg reflectors, constructing a three-dimensional model, and performing three-dimensional simulation to obtain a far-field distribution simulation result of the designed beam shaping vertical cavity surface emitting laser.
Wherein, the simulation analysis in the simulation step adopts a finite difference time domain numerical method.
In order that the objects, technical solutions and advantages of the present invention will become more apparent, the present invention will be further described in detail with reference to the accompanying drawings in conjunction with the following specific embodiments.
As shown in FIG. 1, the beam shaping VCSEL integrated with high contrast grating according to the present invention comprises 2-4 pairs of upper distributed Bragg reflectors (Al)0.12GaAs/Al0.9GaAs) vertical cavity surface emitting laser and high contrast grating (GaAs/AlO)x) The output light beams with different shapes are obtained by adjusting the area of the grating and the size of the oxidation hole of the vertical cavity surface emitting laser.
Wherein the high contrast grating is made of two materials with high refractive index difference
Composition, high refractive index to low refractive index ratio of greater than 2, e.g. Si/SiO2、GaAs/AlOx。
Wherein the size of the oxidation hole is smaller than the diameter of the grating area.
And when the size of the oxidized hole is close to or larger than the diameter of the grating region, outputting a single-lobe Gaussian beam.
The invention also discloses a simulation method of the beam shaping vertical cavity surface emitting laser integrated with the high-contrast grating, which comprises the following steps:
first step, combining numerical value and simulation and analysis, designing high contrast grating (GaAs/AlO) with high reflection bandx) The reflectivity is more than 99.5%;
secondly, adjusting the period size, duty ratio and grating thickness of the high-contrast grating to realize a high-reflection band with the target wavelength as the central wavelength, wherein the reflectivity is more than 99.5%, and the designed structure has larger tolerance; the calculation result is shown in FIG. 2, when the period is 363nm, the duty ratio is 0.74, and the grating thickness is 190nm, the grating has a wider high reflection band at 900nm, and each parameter has a tolerance of 10-20 nm;
and thirdly, integrating the designed high-contrast grating into the vertical cavity surface emitting laser with 2-4 pairs of upper distributed Bragg reflectors, wherein the designed light beam shaping vertical cavity surface emitting laser integrated with the high-contrast grating is subjected to simulation analysis by adopting a finite difference time domain numerical method as shown in figure 1, and a far field distribution simulation result of the designed light beam shaping vertical cavity surface emitting laser is obtained. Fig. 3 shows far field distributions and horizontal far field divergence angles thereof when the diameter D of the grating region is 6.17, 8.35, 10.53 μm respectively when the size D of the oxidized hole is 6 μm, and the light beam is gradually converted from a single-lobe gaussian light beam to a double-lobe light beam as the area of the grating increases; fig. 4 shows far field distributions and horizontal far field divergence angles thereof when the grating region diameter D is 8.35 μm and the oxidation hole sizes D are 4, 6, and 8 μm, respectively, and the output beam is gradually changed from a double-lobe to a single-lobe gaussian beam as the oxidation hole diameter increases.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. A beam shaping vertical cavity surface emitting laser integrated with a high contrast grating, comprising:
the vertical cavity surface emitting laser comprises a lower reflector, an active region, an oxidation hole and an upper reflector, wherein the lower reflector, the active region, the oxidation hole and the upper reflector are sequentially and adjacently arranged;
the high-contrast grating is positioned on the other surface of the upper reflecting mirror, which is opposite to the surface of the oxidation hole;
the area of the high-contrast grating and the size of the oxidation hole of the vertical cavity surface emitting laser are designed according to the situation so as to obtain output beams with different shapes.
2. A beam-shaping vertical cavity surface emitting laser according to claim 1, wherein the number of pairs of said upper mirror is 2-4 pairs.
3. A beam-shaping vertical cavity surface emitting laser according to claim 1, wherein said high contrast grating is made of two materials having a high refractive index difference, the ratio of high refractive index to low refractive index being greater than 2, preferably Si/SiO2、GaAs/AlOx。
4. A beam-shaping vertical cavity surface emitting laser according to claim 1, wherein said oxidized aperture size is smaller than the grating region diameter.
5. A beam-shaping vertical cavity surface emitting laser according to claim 1, wherein said oxidized aperture is sized to be close to or larger than the grating region diameter while outputting a single-lobed Gaussian beam.
6. A simulation method for a beam shaping vertical cavity surface emitting laser integrated with a high contrast grating is characterized by comprising the following steps:
combining numerical values and simulation and analysis, designing a high-contrast grating with a high reflection band, wherein the reflectivity is more than 99.5%;
the period size, the duty ratio and the grating thickness of the high-contrast grating are adjusted to realize a high-reflection band with the target wavelength as the center wavelength, and the reflectivity is more than 99.5%;
and integrating the obtained high-contrast grating on a vertical cavity surface emitting laser comprising 2-4 pairs of upper distributed Bragg reflectors, constructing a three-dimensional model, and performing three-dimensional simulation to obtain a far-field distribution simulation result of the designed beam shaping vertical cavity surface emitting laser.
7. The simulation method of claim 6, wherein the simulation analysis in the simulation step is a finite difference time domain numerical method.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111244760A (en) * | 2020-01-20 | 2020-06-05 | 江西德瑞光电技术有限责任公司 | Method for adjusting divergence angle of light beam of vertical-cavity surface-emitting semiconductor laser |
| CN112217094A (en) * | 2020-09-27 | 2021-01-12 | 深圳博升光电科技有限公司 | Vertical cavity surface emitting laser and preparation method thereof |
| CN113258441A (en) * | 2021-06-07 | 2021-08-13 | 深圳博升光电科技有限公司 | HCG-based coherent light vertical cavity surface emitting laser and laser array |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011106553A2 (en) * | 2010-02-24 | 2011-09-01 | The Regents Of The University Of California | Planar, low loss transmitting or reflecting lenses using sub-wavelength high contrast grating |
| CN107579430A (en) * | 2017-09-26 | 2018-01-12 | 中国科学院长春光学精密机械与物理研究所 | Quickly the integrated aperiodicity height of scanning contrasts grating vertical cavity surface-emitting laser radar light source to angle |
| CN107768979A (en) * | 2017-10-17 | 2018-03-06 | 北京工业大学 | Extension integrates high-contrast grating external cavity emitting laser |
| CN109346922A (en) * | 2018-11-29 | 2019-02-15 | 西安工业大学 | A kind of microlaser and preparation method thereof exporting even polarization light |
-
2019
- 2019-10-16 CN CN201910981884.6A patent/CN110676690A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011106553A2 (en) * | 2010-02-24 | 2011-09-01 | The Regents Of The University Of California | Planar, low loss transmitting or reflecting lenses using sub-wavelength high contrast grating |
| CN107579430A (en) * | 2017-09-26 | 2018-01-12 | 中国科学院长春光学精密机械与物理研究所 | Quickly the integrated aperiodicity height of scanning contrasts grating vertical cavity surface-emitting laser radar light source to angle |
| CN107768979A (en) * | 2017-10-17 | 2018-03-06 | 北京工业大学 | Extension integrates high-contrast grating external cavity emitting laser |
| CN109346922A (en) * | 2018-11-29 | 2019-02-15 | 西安工业大学 | A kind of microlaser and preparation method thereof exporting even polarization light |
Non-Patent Citations (3)
| Title |
|---|
| KUN LI ET AL.: "Monolithic high-contrast metastructure for beam-shaping VCSELs", 《OPTICA》 * |
| MICHALE C. Y. HUANG ET AL.: "A surface-emitting laser incorporating a high-index-contrast subwavelength grating", 《NATURE PHOTONICS》 * |
| 李秀山等: "Si/SiO2高对比光栅参数对反射率的影响", 《发光学报》 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111244760A (en) * | 2020-01-20 | 2020-06-05 | 江西德瑞光电技术有限责任公司 | Method for adjusting divergence angle of light beam of vertical-cavity surface-emitting semiconductor laser |
| CN111244760B (en) * | 2020-01-20 | 2021-09-10 | 江西德瑞光电技术有限责任公司 | Method for adjusting divergence angle of light beam of vertical-cavity surface-emitting semiconductor laser |
| CN112217094A (en) * | 2020-09-27 | 2021-01-12 | 深圳博升光电科技有限公司 | Vertical cavity surface emitting laser and preparation method thereof |
| CN113258441A (en) * | 2021-06-07 | 2021-08-13 | 深圳博升光电科技有限公司 | HCG-based coherent light vertical cavity surface emitting laser and laser array |
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