CN110500442B

CN110500442B - Valve and valve device

Info

Publication number: CN110500442B
Application number: CN201910414188.7A
Authority: CN
Inventors: 埃里奇·多夫勒; 罗尼·盖尔曼; 赫尔穆特·奥尔因哈默; 马蒂亚斯·米茨勒
Original assignee: Alfmeier Praezision SE
Current assignee: Alfmeier Praezision SE
Priority date: 2018-05-18
Filing date: 2019-05-17
Publication date: 2021-02-26
Anticipated expiration: 2039-05-17
Also published as: US10948095B2; US20190353266A1; CN110500442A; DE102018112090A1

Abstract

The invention relates to a valve and a valve arrangement, the valve (2) having a valve housing (4) comprising a housing cover (6), a housing base (10) and an intermediate housing (8) arranged between the housing cover (6) and the housing base (10), wherein the valve housing (4) encloses a valve chamber (12) comprising a flow chamber (24) and an actuation chamber (26), wherein the valve housing (4) has at least one valve opening (14) leading from the flow chamber (24) to the actuation chamber (26) and at least one actuator element (16), a wire-like or ribbon-like SMA element (18) made of a shape memory alloy, which is movable between a closed position latching the valve opening (14) and an open position opening the valve opening (14), and a circuit board (22) arranged in the actuation chamber (26), the actuator element having a valve element at a first end and being connected at a second end to the valve housing and/or to a base plate, the SMA element being used to actuate the actuator element (16) in an opening direction, wherein the SMA element (18) is fixed to the actuator element (16) by an intermediate portion (18c) and is electrically connected to the circuit board (22) by its ends (18a, 18b) for being supplied with electric current, wherein the SMA element (18) is U-shaped bent at the intermediate portion (18c), wherein the valve comprises a controller (58).

Description

Valve and valve device

Technical Field

The invention relates to a valve having a valve housing which surrounds a valve chamber and has at least one valve opening. An actuator is disposed within the valve chamber for actuating the valve, the actuator being movable between a closed position for latching the valve opening and an open position for unlatching the valve opening. The invention further relates to a valve device (Ventilanordnung) having a plurality of valves.

Background

The movement of the actuator between the open position and the closed position can be realized by means of Shape Memory Alloys (SMA), for example in the form of wires (Draht). This is an alloy which can exist in two different crystal structures depending on its temperature. At room temperature, a martensitic structure with a body-centered tetragonal lattice exists, which transforms into an austenitic structure with a face-centered cubic lattice above a transformation temperature of about 100 ℃. Therefore, wires made of such shape memory alloys have the property that they shorten when heated above the transformation temperature due to the transformation of the crystal lattice from the martensitic structure to the austenitic structure. In order to heat the SMA element, an electric current is generally applied thereto, whereby the SMA element is shortened and thus the actuator element can be moved.

For example, DE 102005060217 discloses a valve having a valve housing which surrounds a pressure chamber, wherein a plunger for opening and closing a valve opening is arranged in the pressure chamber. Here, the plunger is actuated to open the valve opening by an SMA element which is electrically connected to a circuit board arranged within the valve housing so as to be able to be applied with an electric current. The SMA element is arranged within the pressure chamber and is therefore directly exposed to the volumetric flow of the valve, i.e. to the air flowing into or out of the pressure chamber through the valve opening. In this case, the SMA element extends on both sides of the plunger such that the SMA element has a V-shape.

Such a valve or valve arrangement can be used for filling a medium reservoir (for example a fluid bag, in particular an airbag or an air cushion, in the region of a motor vehicle seat). Known valves with only one controller (Stellglied) can be used to fill or empty the balloon. These valves are not individually adapted to maintain pressure in the bladder. For this reason, known valves require a combination of two valves. Furthermore, the known valves have a large overall size.

Disclosure of Invention

The object of the present invention is therefore to provide a valve and a valve device, which are improved with respect to the above-mentioned disadvantages.

The object of the invention is achieved by a valve having a valve housing comprising a housing cover, a housing bottom and an intermediate housing arranged between the housing cover and the housing bottom, wherein the valve housing encloses a valve chamber comprising a flow chamber and an actuation chamber, wherein the valve housing has at least one valve opening leading from the flow chamber to the actuation chamber, and wherein at least one actuator element, an SMA element in the form of a wire or a strip made of a shape memory alloy, which is movable between a closed position for closing the valve opening and an open position for opening the valve opening, which actuator element has a valve element at a first end and is connected at a second end with the valve housing and/or with a base plate, and a circuit board are arranged in the actuation chamber, the SMA element being used for actuating the actuator element in the opening direction, wherein the SMA element is fixed on the actuator element by an intermediate section and is electrically connected with the circuit board by its ends for being supplied with an electric current, wherein the SMA element is bent in a U-shape in a middle portion or is formed by two sub-members, which are arranged substantially parallel to each other,

wherein the flow chamber and the actuating chamber are separated from one another by a separating wall having a valve opening in such a way that, when the actuating element is actuated, a fluid flowing through the valve is guided through the flow chamber, wherein a first region of the flow chamber and a second region of the flow chamber are connected to one another via the valve opening and/or a connecting channel, wherein the valve opening and/or the connecting channel is blocked in the closed position of the actuating element and is opened in the open position of the actuating element,

wherein a first region of the flow chamber is connected or connectable to an air supply unit for introducing air into the flow chamber, and wherein a second region of the flow chamber is connected or connectable to a medium reservoir, and wherein the second region of the flow chamber is connected or connectable to the atmosphere via an opening for discharging air from the flow chamber,

wherein a control unit having a first end portion and a second end portion is arranged in the second region of the flow chamber, which control unit is rotatably mounted on the valve housing via the second end portion and is coupled to the actuating element in the region of the first end of the actuating element in such a way that an opening to the atmosphere is opened when the actuating element is in the closed position and the opening is blocked when the actuating element is in the open position.

Thus, the SMA element may be U-shaped with a U-shaped bend or consist of two sub-parts which substantially correspond to a U-shape without a U-shaped bend. In the latter case, the intermediate portion is to be understood as meaning the third end portion and the fourth end portion, it being possible for the intermediate portion to be connected to a U-shaped bend in the case of a U.

In particular, for fixing the SMA element, a projection may be provided in the first part of the actuator element, around which projection the SMA element extends, or the third and fourth end portions are fixed to these projections.

In one embodiment, a first check valve is provided in or on the valve opening, which first check valve prevents a backflow of fluid from the second region of the flow chamber into the first region of the flow chamber via the valve opening in the open position of the actuator.

In a further embodiment, the control device comprises a fork finger (Schaltfinger) on the end section facing the actuator, and the first check valve is formed by a sealing element arranged on the fork finger and a valve seat arranged in the partition wall.

Advantageously, the sealing element is a plate element or a lip seal. Preferably, the sealing element is made of metal, plastic or elastomer.

In an embodiment, the second region of the flow chamber has an opening to the atmosphere.

In a further embodiment, the partition wall separating the flow chamber and the actuating chamber from one another is formed by an intermediate housing.

Advantageously, the actuator and the controller are linear, i.e. arranged at a non-angle to each other.

The actuator element can be embodied as a bending spring, which is connected to the base plate in a rotationally fixed manner, or as a rod element made of a flexurally rigid material, which is connected to the base plate in a pivotable manner, wherein the deflection (Auslenkung) is limited by a spring, in particular a helical spring.

Advantageously, the actuator is returned by means of a spring force, in particular by a leaf spring or a helical spring, wherein the leaf spring or helical spring is preferably arranged between the actuator and the valve base.

The second object is achieved by a valve device according to the invention having a plurality of valves, in particular each according to one of the preceding claims, wherein the valve housing, in particular the intermediate housing and/or the housing cover and/or the housing base, and/or the circuit board, which surrounds the valve chamber of the respective valve, are formed in one piece.

Advantageously, the plurality of valves have a common pressure port which opens into the valve chamber, in particular into the flow chamber, particularly preferably into a first region of the flow chamber of the valve or a region comprising the first region of the flow chamber, or is connected via at least one air channel to the valve chamber, in particular to the flow chamber, particularly preferably to the first region of the flow chamber or to this region, and wherein each valve has a separate opening for connection to the atmosphere, which opening opens into a second region of the flow chamber in particular.

In one embodiment, the valve chamber of the plurality of valves is separated from the receiving chamber for the electronic contact board by a partition wall, wherein the partition wall is in particular formed in one piece with the intermediate housing, wherein the partition wall has a through-opening for the circuit board which is pneumatically sealed in the mounted state.

In a further embodiment, the guide element is arranged in an air channel leading from the air supply unit to the flow chamber or chambers in such a way that the fluid flowing into or through the flow chamber has a laminar flow.

Drawings

Further features and advantages of the invention will be explained in more detail below with the aid of a description of an embodiment and with reference to the drawings. The following are respectively shown in schematic diagrams:

figure 1 shows a cut-away view of the valve,

figure 2A shows a cut-away view of an actuator (Aktor) according to a first embodiment in a closed position,

figure 2B shows a cut-away view of an actuator according to a second embodiment,

figure 2C shows a cut-away view of an actuator according to a third embodiment,

figure 2D shows a cut-away view of an actuator according to a fourth embodiment,

fig. 3 shows a valve arrangement.

Detailed Description

Fig. 1 shows a valve 2 according to the invention in a cut-away view. The valve 2 is accommodated in a valve housing 4. The valve housing 4 comprises a housing cover 6 and a housing base 10 and an intermediate housing 8 accommodated therein.

The valve housing 4 encloses a valve chamber 12, to which a valve opening 14 opens. An actuator 16 is arranged in the valve chamber 12, which is movable in a movement direction B between a closed position for latching the valve opening 14 and an open position for opening the valve opening 14. A wire-like SMA element 18 made of a shape memory alloy is used to actuate the actuator element 16 in the opening or stroke direction H, which SMA element is held on the actuator element 16, more precisely on the first end portion 16a thereof, by means of an intermediate portion 18 c. To be supplied with electric current, the SMA element 18 is electrically connected by its ends 18a, 18b to a circuit board 22 also disposed within the valve chamber 12.

The valve chamber 12 is divided into a flow chamber 24 and an actuating chamber 26, which are separated from one another by a partition wall 28, so that the fluid flowing through the valve 2 or the valve chamber 12 when the actuating element 16 is actuated flows only through the flow chamber 24. The flow chamber 24 is formed by the intermediate housing 8 and is closed off on the underside by the housing base 10. The actuating chamber 26 is also formed by the intermediate housing 8 and is closed off on the upper side by the housing cover 6, whereby the number of components required can be reduced. The actuator element 16 and the components required for actuating the actuator element 16 (i.e. the SMA element 18, the restoring element 20 and the circuit board 22) are arranged in an actuating chamber 26, which restoring element is formed integrally with the actuator element 16 or, as in the second, third and fourth embodiments, is formed by a separate spring. Uneven cooling of the SMA element 18 is avoided by purposely directing the fluid flow and providing the actuator side walls 16 e. The partition wall 28 is formed integrally with or moulded onto the intermediate housing 8. The flow chamber 24 has a first region 24a and a second region 24b, which are connected to one another via a connecting channel 24c, which is blocked in the closed position of the actuating element 16 and is unblocked in the open position of the actuating element 16.

In order to introduce air into the valve chamber 12, more precisely into the flow chamber 24, a first region 24a of the flow chamber is connected to an air supply unit or a pneumatic pump, or is connected to the pneumatic pump via a supply line or is connected to a pressure port (not shown in fig. 1) of the pneumatic pump, either indirectly or directly open into the first region 24a of the flow chamber 24. By opening the valve opening 14, the introduced air can flow from the first region 24a into the second region 24b via the connecting channel 24c or the valve chamber 12 and through the valve opening 14. The connecting channel 24c is in particular also delimited by the bottom face of the actuating element 16 and the sealing element 42 relative to the actuating region. In particular, the valve 2 serves as a medium reservoir for filling (not shown), for example an air cushion of a vehicle seat with contour adjustment. For this purpose, the valve chamber 12, more precisely the flow chamber 24 or its second region 24b, is in fluid connection with a user port (verbrauchschluss) 30 or the user port 30 opens into the second region 24b, so that the medium reservoir can be connected to the valve 2 by means of a hose. In the embodiment shown, the pressure and user ports 30 are formed in one piece with the intermediate housing 8 and do not project from the housing beyond the outer envelope of the housing.

In order to reliably latch the valve opening 14 in the closed position (as shown in fig. 1), a first sealing element 42, which closes off the valve opening 14 and interacts with a sealing seat surrounding the valve opening 14, is arranged at the end portion 16a facing the valve opening 14. Advantageously, the sealing element 42 extends through the through hole 19.

For controlling the valve 2 and for applying an electric current to the SMA element 18 in order to shorten it and thus actuate the actuator element 16, the ends 18a, 18b are electrically connected to the circuit board 22, more precisely by means of crimp connections 44, respectively. The ends 18a, 18b of the SMA element 18 are each secured in a recess 46 of the crimp connection 44 and thereby indirectly contact the circuit board 22 through the crimp connection 44. The crimp connections 44 project laterally from the circuit board 22, respectively, perpendicularly to the direction of movement B. Furthermore, the crimp connection 44 extends from the top face 22a of the circuit board 22 in the stroke direction H and extends parallel thereto in a direction towards the housing bottom 10. In particular, the crimp connection 44 has a rounded surface on which the ends 18a, 18b of the SMA element are deflected by an angle, preferably 90 °, so that the ends received in the recesses 46 place portions of the SMA element perpendicular relative to the intermediate portion 18c of the SMA element 18.

The valve 2 shown in fig. 1 has a further valve opening, more precisely an opening 32, which connects the valve chamber 12 to the atmosphere in order to allow air in the valve chamber 12 to flow out. Disposed within the valve chamber 12 or flow chamber 24 is a controller 58 that is rotatably mounted on the valve housing 4 and operatively connected to the actuator 16. The controller 58 has a second sealing member 60 for closing the opening 32 at a portion facing the opening 32. The control unit 58 comprises a fork finger 62 at the end facing the actuating element 16, which finger is in contact with the actuating element 16 or abuts against its first sealing element 42. If the actuator 16 is actuated and the valve opening 14 is opened, the fork finger 62 is also moved in the stroke direction as a function of the restoring element 64 (here a leaf spring) and thereby rotates the control 58 about its pivot point, so that the opening 32 is blocked by the second sealing element 60. If no more current is applied to the SMA element 18 and the actuator element 16 is thereby moved in the reset direction R as a function of the reset element 20, the shift fork finger 62 is also moved in the reset direction R by the actuator element 16 or its first sealing element 42. In this way, the second sealing element 60 opens the opening 32. Thus, the opening 32 to the atmosphere is opened when the actuator 16 is in the closed position and is blocked when the actuator 16 is in the open position. Furthermore, a first check valve 70 is arranged in the second region 24b of the flow chamber. The first check valve 70 is designed such that it allows fluid to flow from the first region 24a of the flow chamber through the valve opening 14 into the second region 24b of the flow chamber. In the opposite direction, backflow from the second region 24b of the flow chamber through the valve opening 14 is prevented by the first check valve 70.

The third sealing element 72 is configured as a circular gasket, preferably made of metal or elastomer. The sealing element 72 is seated on the valve seat 74 in the closed position of the check valve 70, so that a fluid flowing from one side of the valve seat 74 in the direction of the valve opening 14 presses the sealing element 72 against the valve seat 74. In contrast, fluid from the side of the valve opening 14 pushes the third sealing element 72 away from the valve seat 74, causing the check valve 70 to open for this flow direction. In this case, the sealing element 72 can be configured to move or be fixed on the fork finger 62.

If the actuator 16 is actuated and the valve opening 14 is opened, the fork finger 62 is also moved in the stroke direction as a function of the restoring element 64 (here a leaf spring) and thereby rotates the control 58 about its pivot point, so that the opening 32 is blocked by the second sealing element 60. If no more current is applied to the SMA element 18 and the actuator element 16 is thereby moved in the reset direction R as a function of the reset element 20, the shift fork finger 62 is also moved in the reset direction R by the actuator element 16 or its sealing element 42. Thereby and as a result of the V-shaped pivot point 66 of the controller 58, the second sealing element 60 opens the opening 32. Thus, the opening 32 to atmosphere is opened when the actuator 16 is in the closed position and is blocked when the actuator 16 is in the open position, so that it is ensured that the second region 24b of the flow chamber 24 of the valve chamber 12 or the medium reservoir is always vented when the valve 2 is not activated. The actuation chamber 26 is also connected to the first region 24a of the flow chamber 24 and via this first region to the pump. Such valves are used, for example, in vehicle seats with massage functions, in which one or more cushions are cyclically inflated and deflated, respectively.

Fig. 2A shows a cut-away view of an actuator according to a first embodiment. The actuator comprises an actuator 16 which is arranged on and connected to a substrate 17. The actuator is connected in a planar manner to the base plate 17 in the second end portion 16 b.

The actuator 16 has a first end portion 16a and a second end portion 16 b. An actuator intermediate portion 16c extends between the two

end portions

16a and 16b, in which the actuator 16 is bent in a stepped shape and which includes an elastic portion 16 d. The elastic portion 16d is arranged above the substrate 17. However, the elastic portion 16d and the base plate 17 are arranged to each other so that the elastic portion 16d can be bent. The bending of the spring part 16d is limited by the stop of the actuator 16 in the stop region 16f of the actuator. Specifically, the preload can be achieved by bending the elastic portion 16d and mounting on the base plate 17.

A sealing element 42 for closing and opening the valve opening 14 is arranged in the first end portion 16a of the actuator. For this purpose, the first end section 16a of the actuator has a through-opening 19, which is, for example, a bore in which the sealing element 42 is arranged in a form-fitting manner.

Furthermore, the first end portion 16a of the actuator also has side walls 16e, which extend vertically and circumferentially from the first end portion 16a of the actuator.

The substrate 17 has a connector 17a for connecting the circuit board 22. The circuit board 22 is arranged on the opposite side of the actuator by means of the connection 17 a. The connecting piece 17a is designed here as an indentation pin (einpresspine). Thus, the top surface 22a of the circuit board 22 is directed towards the SMA element and the bottom surface 22b is directed towards the substrate 17.

On the side facing away from the first end section 16a of the actuator, a clamp is arranged, which comprises a crimp connection 44. The crimp connection has a recess 46. The SMA element is held at the first end 18a and the second end 18b by two parallel side-by-side crimp connections 44. The SMA element 18 extends from the crimp connection 44U-shaped to the first end portion 16a of the actuator. The SMA element is connected with the first end portion 16a by the intermediate portion 18c of the SMA element in such a way that shortening of the SMA element causes the actuator element to travel from the closed position (refer to fig. 2A) to the open position.

Fig. 2B shows a cut-away view of the actuator in a second embodiment. In this embodiment, the actuating element 16 is rigid. The base plate 17 and the actuator 16 are connected to one another at the second end portion 16b of the actuator by a hinge 23a, which hinge 23a is embodied, for example, as a film hinge (Folienscharnier). The position of the hinge 23a on the base plate 17 may be arranged below or adjacent to the circuit board 22. When the hinge 23a is positioned adjacent to the circuit board 22, the actuator 16 advantageously has only a certain angle. In order to reset the actuator into the closed position, the reset element 20 is in the embodiment shown configured as a leaf spring, wherein the leaf spring presses against the bottom 22b of the circuit board. The restoring element 20 can be embodied as one piece with the actuating element 16. Advantageously, in the present embodiment, the SMA element 18 is electrically conductively connected via the first end 18a to a first contact in the region of the crimp connection 44 and via the second end 18b to a second contact in the region of the crimp connection 44.

Fig. 2C shows a third embodiment of the actuator. In this third embodiment, the resetting element 20 is replaced by a resetting element 21. The restoring element 21 is designed as a coil spring which advantageously acts on the valve housing wall. Alternative positions or spring arrangements for resetting the actuator are possible.

Fig. 2D shows a cut-away view of the actuator in a fourth embodiment. The fourth embodiment differs from the second and third embodiments in that the actuating element 16 is connected to the base plate in the second end section 16b via a support 23 b. In particular, the support 23b can be designed in particular as a corner or recess in which the second end portion 16b of the actuator is accommodated, wherein the length of the second end portion of the actuator and thus the position of the support 23b along the base plate 17 can be designed differently, as in the second embodiment. In the fourth embodiment, a resetting element 20 or a resetting element 21 is provided.

Fig. 3 shows a valve device 100. A plurality of actuators 116 are arranged alongside the intermediate housing. Openings 132 are disposed in exhaust passage 176 such that exhaust gas may be collected into a common exhaust passage. A muffler may be integrated in such an exhaust channel. The entry of dust and/or moisture can be significantly reduced by providing only one opening to the atmosphere at the end of the exhaust channel.

List of reference numerals

2 valve

4 valve housing

6 casing cover

8 middle shell

10 bottom of the housing

12 valve chamber

14 valve opening

16 actuator

16a first end portion of an actuator

16b second end portion of actuator

18 SMA element

18a first end of SMA element

18b second end of SMA element

Middle part of 18c SMA element

20 reset element (helical spring)

21 reset element

22 circuit board

22a top surface of the circuit board

22b bottom surface of circuit board

24 flow cell

24a first region of the flow cell

24b second region of the flow cell

24c connecting channel

26 actuating chamber

28 partition wall

30 user port

32 opening

42 first sealing element

44 crimping connector

46 recess of crimp connection

58 controller

60 second sealing element

62 shifting fork contact finger

63 projection

64 reset element

70 first check valve

72 third sealing element

19 through hole

74 valve seat

100 valve arrangement

106 housing cover

108 middle shell

110 bottom of the shell

116 actuator

132 opening

176 air passage

B direction of movement of the actuator

Direction of travel of H

R direction of reset

Claims

1. A valve (2), the valve (2) having a valve housing (4), the valve housing (4) comprising a housing cover (6), a housing bottom (10) and an intermediate housing (8) arranged between the housing cover (6) and the housing bottom (10), wherein the valve housing (4) encloses a valve chamber (12) comprising a flow chamber (24) and an actuation chamber (26), wherein the valve housing (4) has at least one valve opening (14) leading from the flow chamber (24) to the actuation chamber (26), and wherein at least one actuator element (16), a wire-like or ribbon-like SMA element (18) made of a shape memory alloy, and a circuit board (22) are arranged within the actuation chamber (26), the actuator element being movable between a closed position for blocking the valve opening (14) and an open position for opening the valve opening (14), the actuator element having a valve element at a first end and being connected at a second end to the valve housing and/or to a base plate, the SMA element being used for actuating the actuator element (16) in an opening direction, wherein the SMA element (18) is fixed to the actuator element (16) by an intermediate part (18c) and is electrically connected by its ends (18a, 18b) to the circuit board (22) for the application of an electric current, wherein the SMA element (18) is bent in a U-shape in the intermediate part (18c) or is formed by two sub-parts which are arranged substantially parallel to one another,

wherein the flow chamber (24) and the actuating chamber (26) are separated from one another by a separating wall (28) having the valve opening (14) such that a fluid flowing through the valve (2) is guided through the flow chamber (24) when the actuating element (16) is actuated, wherein a first region (24a) of the flow chamber (24) and a second region (24b) of the flow chamber (24) are connected to one another via the valve opening (14) and a connecting channel (24c), wherein the valve opening (14) and the connecting channel (24c) are blocked in the closed position of the actuating element (16) and are opened in the open position of the actuating element (16),

wherein a first region (24a) of the flow chamber (24) is connected or connectable with an air supply unit for introducing air into the flow chamber (24), and wherein a second region (24b) of the flow chamber (24) is connected or connectable with a medium reservoir, and wherein the second region (24b) of the flow chamber (24) is connected or connectable with the atmosphere via an opening for discharging air in the flow chamber (24),

wherein a control unit (58) having a first end portion and a second end portion is arranged in a second region (24b) of the flow chamber (24), said control unit being mounted rotatably on the valve housing (4) via the second end portion and being coupled in the region of the first end portion to an actuating element (16) in the region of the first end of the actuating element (16) in such a way that an opening (32) to the atmosphere is opened when the actuating element (16) is in the closed position and the opening (32) is blocked when the actuating element (16) is in the open position.

2. The valve (2) according to claim 1, wherein a first check valve (70) is provided in or on the valve opening (14), which in the open position of the actuator (16) prevents a backflow of fluid from the second region (24b) of the flow chamber (24) via the valve opening (14) into the first region (24a) of the flow chamber (24).

3. Valve (2) according to claim 2, wherein the controller (58) comprises a fork finger (62) on an end portion facing the actuator element (16), and the first check valve (70) is constituted by a sealing element (72) arranged on the fork finger (62) and a valve seat (74) arranged in the partition wall (28).

4. A valve (2) according to claim 3, wherein the sealing element (72) is a plate-like element.

5. A valve (2) according to claim 3, wherein the sealing element (72) is a lip seal.

6. A valve (2) according to claim 3, wherein the sealing element (72) is made of metal or plastic.

7. A valve (2) according to claim 3, wherein the sealing element (72) is made of an elastomer.

8. A valve (2) according to claim 4, wherein the sealing element (72) is made of metal or plastic.

9. A valve (2) according to claim 5, wherein the sealing element (72) is made of an elastomer.

10. A valve (2) according to any of claims 1-9, wherein the second region of the flow chamber has an opening (32) to atmosphere.

11. Valve (2) according to any one of claims 1 to 9, wherein a partition wall (28) separating the flow chamber (24) and the actuation chamber (26) from each other is constituted by the intermediate housing (8).

12. Valve (2) according to claim 10, wherein a partition wall (28) separating the flow chamber (24) and the actuation chamber (26) from each other is constituted by the intermediate housing (8).

13. A valve (2) according to any of claims 1-9 and 12, wherein the actuator (16) and the controller (58) are linearly arranged.

14. A valve (2) according to claim 10, wherein the actuator (16) and the controller (58) are arranged linearly.

15. A valve (2) according to claim 11, wherein the actuator (16) and the controller (58) are linearly arranged.

16. Valve (2) according to any one of claims 1-9, 12 and 14-15, wherein the actuator element is configured as a bending spring, which is connected to the base plate in a torsion-proof manner, or is a rod element made of a bending-resistant material, which is pivotably connected to the base plate.

17. Valve (2) according to claim 10, wherein the actuator element is configured as a bending spring, which is connected to the base plate in a torsionally fixed manner, or is a rod element made of a bending-resistant material, which is connected to the base plate in a pivotable manner.

18. Valve (2) according to claim 11, wherein the actuator element is configured as a bending spring, which is connected to the base plate in a torsionally fixed manner, or is a rod element made of a bending-resistant material, which is connected to the base plate in a pivotable manner.

19. Valve (2) according to claim 13, wherein the actuator element is configured as a bending spring, which is connected to the base plate in a torsionally stiff manner, or is a rod element made of a flexurally stiff material, which is connected to the base plate in a pivotable manner.

20. A valve (2) according to any of claims 1-9, 12, 14-15 and 17-19, wherein the controller (58) is reset by means of a spring force.

21. Valve (2) according to claim 10, wherein the controller (58) is reset by means of a spring force.

22. Valve (2) according to claim 11, wherein the controller (58) is reset by means of a spring force.

23. Valve (2) according to claim 13, wherein the controller (58) is reset by means of a spring force.

24. Valve (2) according to claim 16, wherein the controller (58) is reset by means of a spring force.

25. Valve (2) according to claim 20, wherein the controller (58) is reset by a leaf or coil spring, wherein the leaf or coil spring is arranged between the controller and the valve bottom.

26. A valve (2) according to any of claims 21-24, wherein the controller (58) is reset by a leaf or coil spring, wherein the leaf or coil spring is arranged between the controller and the valve bottom.

27. Valve device (100) having a plurality of valves (2) each constructed according to one of the preceding claims 1 to 26, wherein the valve housing (4) surrounding the valve chamber (12) of the respective valve (2) and/or the circuit board (22) are formed in one piece.

28. The valve device (100) according to claim 27, wherein the intermediate housing and/or the housing cover and/or the housing bottom, and/or the circuit board (22) are formed in one piece.

29. Valve device (100) according to claim 27 or 28, wherein a plurality of valves (2) have a common pressure port, which opens into the valve chamber (12), respectively, and wherein each valve (2) has a separate opening (32) for connection to the atmosphere, which opening opens into the second region (24b) of the flow chamber (24).

30. The valve device (100) according to claim 29, wherein the pressure ports open into the flow chambers (24), respectively.

31. The valve device (100) according to claim 29, wherein the pressure port opens into a first region of a flow chamber (24) of the valve (2) or into a region comprising a first region (24a) of the flow chamber (24), respectively.

32. The valve arrangement (100) according to claim 27 or 28, wherein a plurality of valves (2) have a common pressure port, which is connected with the valve chamber (12) via at least one air passage (176), respectively, and wherein each valve (2) has a separate opening (32) for connection with the atmosphere, which opening opens into the second region (24b) of the flow chamber (24).

33. The valve device (100) according to claim 32, wherein the pressure ports are connected with the flow chambers (24) via at least one air channel (176), respectively.

34. The valve device (100) according to claim 32, wherein the pressure port is connected with the first region (24a) of the flow chamber (24) or with a region comprising the first region (24a) of the flow chamber (24), respectively, via at least one air passage (176).

35. The valve device (100) according to any one of claims 27 to 28 and 30 to 31, wherein the valve chambers (12) of the plurality of valves (2) are separated from a receiving chamber for an electronic contact circuit board (22) by a partition wall, wherein the partition wall has a through hole for the circuit board (22) which is pneumatically sealed in the mounted state.

36. The valve device (100) according to claim 29, wherein the valve chambers (12) of the plurality of valves (2) are separated from a receiving chamber for an electronic contact circuit board (22) by a partition wall, wherein the partition wall has a through hole for the circuit board (22) which is pneumatically sealed in the mounted state.

37. The valve device (100) according to claim 32, wherein the valve chambers (12) of the plurality of valves (2) are separated from a receiving chamber for an electronic contact circuit board (22) by a partition wall, wherein the partition wall has a through hole for the circuit board (22) which is pneumatically sealed in the mounted state.

38. The valve device (100) according to claim 33 or 34, wherein the valve chambers (12) of the plurality of valves (2) are separated from a receiving chamber for an electronic contact circuit board (22) by a partition wall, wherein the partition wall has a through hole for the circuit board (22) which is pneumatically sealed in the mounted state.

39. The valve device (100) according to claim 35, wherein the partition wall is formed in one piece with the intermediate housing (108).

40. The valve device (100) according to claim 36 or 37, wherein the partition wall is formed in one piece with the intermediate housing (108).

41. The valve device (100) according to claim 38, wherein the partition wall is formed in one piece with the intermediate housing (108).

42. The valve device (100) according to any one of claims 27-28, 30-31 and 36, wherein a guiding element is arranged in an air channel (176) leading from an air supply unit to the flow chamber or chambers (24) such that the fluid flowing into and/or through the flow chamber (24) has a laminar flow.

43. The valve device (100) according to claim 29, wherein a guiding element is arranged in an air channel (176) leading from an air supply unit to the flow chamber or chambers (24) such that the fluid flowing into and/or through the flow chamber (24) has a laminar flow.

44. The valve device (100) according to claim 32, wherein a guiding element is arranged in the air channel (176) leading from an air supply unit to the flow chamber or chambers (24) such that the fluid flowing into and/or through the flow chamber (24) has a laminar flow.

45. The valve device (100) according to any one of claims 33-34 and 37, wherein a guiding element is arranged in the air channel (176) leading from an air supply unit to the flow chamber or chambers (24) such that the fluid flowing into and/or through the flow chamber (24) has a laminar flow.

46. The valve device (100) according to claim 35, wherein a guiding element is arranged in an air channel (176) leading from an air supply unit to the flow chamber or chambers (24) such that the fluid flowing into and/or through the flow chamber (24) has a laminar flow.

47. The valve device (100) according to claim 38, wherein a guiding element is arranged in the air channel (176) leading from an air supply unit to the flow chamber or chambers (24) such that the fluid flowing into and/or through the flow chamber (24) has a laminar flow.