CN110468394A - A kind of silver-based wiring board of chemical nickel plating porpezite and preparation method thereof - Google Patents
A kind of silver-based wiring board of chemical nickel plating porpezite and preparation method thereof Download PDFInfo
- Publication number
- CN110468394A CN110468394A CN201910709955.7A CN201910709955A CN110468394A CN 110468394 A CN110468394 A CN 110468394A CN 201910709955 A CN201910709955 A CN 201910709955A CN 110468394 A CN110468394 A CN 110468394A
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- China
- Prior art keywords
- silver
- palladium
- plating
- solution
- acid
- Prior art date
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- Granted
Links
- 238000007747 plating Methods 0.000 title claims abstract description 188
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 title claims abstract description 158
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 title claims abstract description 111
- 229910052709 silver Inorganic materials 0.000 title claims abstract description 111
- 239000004332 silver Substances 0.000 title claims abstract description 111
- 229910052759 nickel Inorganic materials 0.000 title claims abstract description 79
- 238000002360 preparation method Methods 0.000 title claims abstract description 13
- 239000000126 substance Substances 0.000 title claims description 38
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims abstract description 156
- 229910052737 gold Inorganic materials 0.000 claims abstract description 83
- 239000010931 gold Substances 0.000 claims abstract description 83
- 229910052763 palladium Inorganic materials 0.000 claims abstract description 78
- 239000000758 substrate Substances 0.000 claims abstract description 73
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 50
- 238000005554 pickling Methods 0.000 claims abstract description 36
- 238000005530 etching Methods 0.000 claims abstract description 24
- 230000004913 activation Effects 0.000 claims abstract description 17
- 238000007598 dipping method Methods 0.000 claims abstract description 16
- 238000000576 coating method Methods 0.000 claims abstract description 14
- 239000011248 coating agent Substances 0.000 claims abstract description 13
- 239000000243 solution Substances 0.000 claims description 123
- 238000000034 method Methods 0.000 claims description 48
- 230000008569 process Effects 0.000 claims description 41
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 claims description 34
- 239000002253 acid Substances 0.000 claims description 33
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical compound OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 claims description 33
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 claims description 20
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 19
- 229910017604 nitric acid Inorganic materials 0.000 claims description 19
- 238000001994 activation Methods 0.000 claims description 18
- 229940005991 chloric acid Drugs 0.000 claims description 17
- XTEGARKTQYYJKE-UHFFFAOYSA-N chloric acid Chemical compound OCl(=O)=O XTEGARKTQYYJKE-UHFFFAOYSA-N 0.000 claims description 16
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 claims description 16
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 15
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 15
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims description 15
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 14
- 229940098779 methanesulfonic acid Drugs 0.000 claims description 12
- KWSLGOVYXMQPPX-UHFFFAOYSA-N 5-[3-(trifluoromethyl)phenyl]-2h-tetrazole Chemical compound FC(F)(F)C1=CC=CC(C2=NNN=N2)=C1 KWSLGOVYXMQPPX-UHFFFAOYSA-N 0.000 claims description 11
- 229910001379 sodium hypophosphite Inorganic materials 0.000 claims description 11
- 238000004140 cleaning Methods 0.000 claims description 10
- 239000011259 mixed solution Substances 0.000 claims description 10
- 235000019260 propionic acid Nutrition 0.000 claims description 10
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 9
- 239000004310 lactic acid Substances 0.000 claims description 8
- 235000014655 lactic acid Nutrition 0.000 claims description 8
- 238000005238 degreasing Methods 0.000 claims description 7
- 238000002791 soaking Methods 0.000 claims description 7
- 239000001509 sodium citrate Substances 0.000 claims description 7
- NLJMYIDDQXHKNR-UHFFFAOYSA-K sodium citrate Chemical compound O.O.[Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O NLJMYIDDQXHKNR-UHFFFAOYSA-K 0.000 claims description 7
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 claims description 7
- GPNDARIEYHPYAY-UHFFFAOYSA-N palladium(ii) nitrate Chemical compound [Pd+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O GPNDARIEYHPYAY-UHFFFAOYSA-N 0.000 claims description 6
- JLKDVMWYMMLWTI-UHFFFAOYSA-M potassium iodate Chemical compound [K+].[O-]I(=O)=O JLKDVMWYMMLWTI-UHFFFAOYSA-M 0.000 claims description 6
- 239000001230 potassium iodate Substances 0.000 claims description 6
- 229940093930 potassium iodate Drugs 0.000 claims description 6
- 235000006666 potassium iodate Nutrition 0.000 claims description 6
- 229910021642 ultra pure water Inorganic materials 0.000 claims description 6
- 239000012498 ultrapure water Substances 0.000 claims description 6
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 claims description 5
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 claims description 5
- TWFQJFPTTMIETC-UHFFFAOYSA-N dodecan-1-amine;hydron;chloride Chemical compound [Cl-].CCCCCCCCCCCC[NH3+] TWFQJFPTTMIETC-UHFFFAOYSA-N 0.000 claims description 5
- 230000003647 oxidation Effects 0.000 claims description 5
- 238000007254 oxidation reaction Methods 0.000 claims description 5
- 150000002940 palladium Chemical class 0.000 claims description 5
- 239000012286 potassium permanganate Substances 0.000 claims description 5
- XTFKWYDMKGAZKK-UHFFFAOYSA-N potassium;gold(1+);dicyanide Chemical compound [K+].[Au+].N#[C-].N#[C-] XTFKWYDMKGAZKK-UHFFFAOYSA-N 0.000 claims description 5
- AKHNMLFCWUSKQB-UHFFFAOYSA-L sodium thiosulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=S AKHNMLFCWUSKQB-UHFFFAOYSA-L 0.000 claims description 5
- 235000019345 sodium thiosulphate Nutrition 0.000 claims description 5
- DAJSVUQLFFJUSX-UHFFFAOYSA-M sodium;dodecane-1-sulfonate Chemical compound [Na+].CCCCCCCCCCCCS([O-])(=O)=O DAJSVUQLFFJUSX-UHFFFAOYSA-M 0.000 claims description 5
- YWYZEGXAUVWDED-UHFFFAOYSA-N triammonium citrate Chemical compound [NH4+].[NH4+].[NH4+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O YWYZEGXAUVWDED-UHFFFAOYSA-N 0.000 claims description 5
- 150000003254 radicals Chemical class 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 claims description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 2
- 150000005837 radical ions Chemical class 0.000 claims description 2
- GCFSKCZBSOKYLJ-UHFFFAOYSA-N [Na].O[PH2]=O Chemical compound [Na].O[PH2]=O GCFSKCZBSOKYLJ-UHFFFAOYSA-N 0.000 claims 1
- 229940074355 nitric acid Drugs 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 11
- 229910052802 copper Inorganic materials 0.000 abstract description 11
- 239000010949 copper Substances 0.000 abstract description 11
- 230000035945 sensitivity Effects 0.000 abstract description 5
- 238000007772 electroless plating Methods 0.000 abstract description 4
- 229910052751 metal Inorganic materials 0.000 abstract description 4
- 239000002184 metal Substances 0.000 abstract description 4
- 238000002203 pretreatment Methods 0.000 abstract 2
- 150000002739 metals Chemical class 0.000 abstract 1
- 239000000047 product Substances 0.000 description 34
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 33
- 230000007797 corrosion Effects 0.000 description 14
- 238000005260 corrosion Methods 0.000 description 14
- 238000005406 washing Methods 0.000 description 12
- 239000007788 liquid Substances 0.000 description 8
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 7
- 230000003746 surface roughness Effects 0.000 description 7
- 239000003795 chemical substances by application Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 239000011148 porous material Substances 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 230000002378 acidificating effect Effects 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 239000000428 dust Substances 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 239000007800 oxidant agent Substances 0.000 description 4
- 239000003153 chemical reaction reagent Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- 238000004806 packaging method and process Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 238000003912 environmental pollution Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- BSIDXUHWUKTRQL-UHFFFAOYSA-N nickel palladium Chemical compound [Ni].[Pd] BSIDXUHWUKTRQL-UHFFFAOYSA-N 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 238000009101 premedication Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- LCPVQAHEFVXVKT-UHFFFAOYSA-N 2-(2,4-difluorophenoxy)pyridin-3-amine Chemical compound NC1=CC=CN=C1OC1=CC=C(F)C=C1F LCPVQAHEFVXVKT-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 239000013043 chemical agent Substances 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- VOVNIMMKYYUQIN-UHFFFAOYSA-N chloric acid Chemical compound OCl(=O)=O.OCl(=O)=O VOVNIMMKYYUQIN-UHFFFAOYSA-N 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 239000008139 complexing agent Substances 0.000 description 1
- 229910001431 copper ion Inorganic materials 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 238000004100 electronic packaging Methods 0.000 description 1
- 229960002163 hydrogen peroxide Drugs 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- ALRLJVYQOIVNRH-UHFFFAOYSA-N iodic acid;potassium Chemical compound [K].OI(=O)=O ALRLJVYQOIVNRH-UHFFFAOYSA-N 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- RJSCZBRDRBIRHP-UHFFFAOYSA-N n,n-diethylprop-1-yn-1-amine Chemical compound CCN(CC)C#CC RJSCZBRDRBIRHP-UHFFFAOYSA-N 0.000 description 1
- 150000002815 nickel Chemical class 0.000 description 1
- 230000001151 other effect Effects 0.000 description 1
- 238000012858 packaging process Methods 0.000 description 1
- VLTRZXGMWDSKGL-UHFFFAOYSA-M perchlorate Inorganic materials [O-]Cl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-M 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 231100000572 poisoning Toxicity 0.000 description 1
- 230000000607 poisoning effect Effects 0.000 description 1
- 229960001841 potassium permanganate Drugs 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- XSUMSESCSPMNPN-UHFFFAOYSA-N propane-1-sulfonate;pyridin-1-ium Chemical compound C1=CC=NC=C1.CCCS(O)(=O)=O XSUMSESCSPMNPN-UHFFFAOYSA-N 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 235000011083 sodium citrates Nutrition 0.000 description 1
- CHQMHPLRPQMAMX-UHFFFAOYSA-L sodium persulfate Substances [Na+].[Na+].[O-]S(=O)(=O)OOS([O-])(=O)=O CHQMHPLRPQMAMX-UHFFFAOYSA-L 0.000 description 1
- SDKPSXWGRWWLKR-UHFFFAOYSA-M sodium;9,10-dioxoanthracene-1-sulfonate Chemical compound [Na+].O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2S(=O)(=O)[O-] SDKPSXWGRWWLKR-UHFFFAOYSA-M 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1646—Characteristics of the product obtained
- C23C18/165—Multilayered product
- C23C18/1651—Two or more layers only obtained by electroless plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/1803—Pretreatment of the material to be coated of metallic material surfaces or of a non-specific material surfaces
- C23C18/1824—Pretreatment of the material to be coated of metallic material surfaces or of a non-specific material surfaces by chemical pretreatment
- C23C18/1837—Multistep pretreatment
- C23C18/1844—Multistep pretreatment with use of organic or inorganic compounds other than metals, first
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
- C23C18/34—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents
- C23C18/36—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents using hypophosphites
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/42—Coating with noble metals
- C23C18/44—Coating with noble metals using reducing agents
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
- Chemically Coating (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
本发明公开了一种化学镀镍钯金的银基线路板及其制备方法,所述银基线路板包含银基基板,所述银基基板的表面从里至外依次镀覆有镍层、钯层、金层。所述制备方法,包括以下步骤:将经清洁处理后的银基基板依次进行微蚀、酸洗、预浸酸、钯活化、后浸酸前处理,再将经前处理的银基基板依次进行化学镀镍、化学镀钯、化学镀金即得含镍钯金镀层的银基线路板,比传统的铜基化学镀镍钯金而言,可大幅度降低镍钯金化学镀层的厚度,从而节约金属的使用含量,同时避免对环境造成污染的问题。再者,以银基为基底,整个产品导电、导热性更强、灵敏度更高,寿命更长,整体性能更为优异。The invention discloses a silver-based circuit board with electroless nickel-palladium-gold plating and a preparation method thereof. The silver-based circuit board includes a silver-based substrate, and the surface of the silver-based substrate is sequentially plated with a nickel layer, Palladium layer, gold layer. The preparation method includes the following steps: performing micro-etching, pickling, pre-dipping, palladium activation, and post-dipping pre-treatment on the cleaned silver-based substrate in sequence, and then performing pre-treatment on the pre-treated silver-based substrate in sequence. Electroless nickel plating, electroless palladium plating, and electroless gold plating are silver-based circuit boards containing nickel-palladium-gold coating. Compared with traditional copper-based electroless nickel-palladium-gold plating, the thickness of nickel-palladium-gold electroless plating can be greatly reduced, thereby saving The use content of metals, while avoiding the problem of pollution to the environment. Furthermore, with the silver base as the base, the entire product has stronger electrical and thermal conductivity, higher sensitivity, longer life, and better overall performance.
Description
技术领域technical field
本发明涉及一种化学镀镍钯金的银基线路板及其制备方法,属于表面处理工艺技术领域。The invention relates to a silver-based circuit board with electroless nickel-palladium-gold plating and a preparation method thereof, belonging to the technical field of surface treatment technology.
背景技术Background technique
随着电子工业的高速发展,线路板的需求量与日俱增。但是如今的电子产品已逐渐向多功能、高性能、便携可靠低成本等方向发展,为了满足市场以及技术的需求,不仅要求电子封装工艺必须走向系统封装或者IC封装的高密度的封装,这就需要一种能满足多种封装工艺的镀层,故化学镀镍钯金表面处理工艺的“万能”美誉即由此产生。With the rapid development of the electronics industry, the demand for circuit boards is increasing day by day. However, today's electronic products have gradually developed towards the direction of multi-function, high performance, portability, reliability and low cost. In order to meet the needs of the market and technology, it is not only required that the electronic packaging process must move towards high-density packaging such as system packaging or IC packaging. There is a need for a coating that can meet a variety of packaging processes, so the "universal" reputation of the electroless nickel-palladium-gold surface treatment process is born from this.
化学镀镍钯金主要工艺为化学镀镍、化学镀钯以及化学浸金,其中每一步工艺的处理都对产品的性能产生着极大的影响,其镀层的优劣决定着整个产品的性能的好坏。The main processes of electroless nickel palladium plating are electroless nickel plating, electroless palladium plating and chemical immersion gold. The treatment of each step of the process has a great impact on the performance of the product. The quality of the coating determines the performance of the entire product. good or bad.
目前常用的化学镀基底为铜基,但是微蚀处理过后的铜基易受环境的污染和氧化。同时使用铜基基底,一般需要较厚的镍层和钯层,以防止铜基基底氧化和阻挡铜离子向金层的扩散,向电路板表面的迁移,引起产品焊锡性差的问题。再者,结合其使用性能与生产成本等因素来考虑,许多人选择化学镀镍工艺代替化学镀金工艺,但是化学镀镍工艺的打金线结合能力较差,难以形成竞争优势而被推广。但单纯的化学镀金工艺,则造成贵金属的大量使用,既浪费成本,且极易对环境造成污染。At present, the commonly used electroless plating substrate is copper base, but the copper base after microetching treatment is easily polluted and oxidized by the environment. At the same time, the use of copper-based substrates generally requires thicker nickel and palladium layers to prevent the oxidation of the copper-based substrate and prevent the diffusion of copper ions to the gold layer and migration to the surface of the circuit board, resulting in poor solderability of the product. Furthermore, considering factors such as its performance and production cost, many people choose the electroless nickel plating process instead of the electroless gold plating process. However, the electroless nickel plating process has poor bonding ability with gold wires, and it is difficult to form a competitive advantage and be promoted. However, the pure chemical gold plating process causes a large amount of use of precious metals, which not only wastes costs, but also easily pollutes the environment.
而银基相对于铜基,其导电、导热性、灵敏度都要优异很多,有望生产出生产出导电、导热性能好、灵敏度高、耐磨蚀且抗氧化性强的优质线路板,然而目前现有技术中还没有采用以银基为基板的化学镀镍钯金的工艺方法。Compared with copper-based, silver-based has much better electrical conductivity, thermal conductivity, and sensitivity. It is expected to produce high-quality circuit boards with good electrical conductivity, thermal conductivity, high sensitivity, corrosion resistance, and strong oxidation resistance. However, currently Also do not adopt the process method of the electroless nickel-palladium-gold plating with silver base as the substrate in the prior art.
发明内容Contents of the invention
针对现有技术的不足,本发明提供一种导热性能好、灵敏度高、耐磨蚀且抗氧化性强的化学镀镍钯金的银基线路板及其制备方法Aiming at the deficiencies of the prior art, the present invention provides a silver-based circuit board with electroless nickel-palladium-gold plating with good thermal conductivity, high sensitivity, corrosion resistance and strong oxidation resistance and a preparation method thereof
为了实现上述目的,本发明提供如下技术方案:In order to achieve the above object, the present invention provides the following technical solutions:
本发明一种化学镀镍钯金的银基线路板,所述银基线路板包含银基基板,所述银基基板的表面从里至外依次镀覆有镍层、钯层、金层。The invention relates to a silver-based circuit board with electroless nickel-palladium-gold plating. The silver-based circuit board includes a silver-based substrate, and the surface of the silver-based substrate is sequentially plated with a nickel layer, a palladium layer, and a gold layer from the inside to the outside.
本发明一种化学镀镍钯金的银基线路板的制备方法,包括如下步骤:将经清洁处理后的银基基板依次进行微蚀、酸洗、预浸酸、钯活化、后浸酸前处理,再将经前处理的银基基板依次进行化学镀镍、化学镀钯、化学镀金即得含镍钯金镀层的银基线路板。A method for preparing a silver-based circuit board with electroless nickel-palladium-gold plating of the present invention comprises the following steps: performing microetching, pickling, pre-dipping acid, palladium activation, post-dipping and pre-pickling on the silver-based circuit board after cleaning. treatment, and then the pretreated silver-based substrate is sequentially subjected to electroless nickel plating, electroless palladium plating, and electroless gold plating to obtain a silver-based circuit board containing nickel-palladium-gold plating.
优选的方案,所述清洁处理过程为:将银基基板先用超纯水清洗10~15min,然后再进行除油处理、除氧化物处理;所述除油处理使用质量分数3%~5%的十二烷基磺酸钠与20~30g/L氢氧化钠的混合溶液,所述除氧化物处理使用30mL/L的甲基磺酸、氯酸、高氯酸、硝酸中的至少一种与50~80g/L十二烷基氯化铵的混合物。In a preferred scheme, the cleaning treatment process is as follows: the silver-based substrate is first cleaned with ultrapure water for 10-15 minutes, and then degreasing treatment and deoxidation treatment are performed; the degreasing treatment uses a mass fraction of 3% to 5% A mixed solution of sodium dodecylsulfonate and 20-30g/L sodium hydroxide, the deoxidation treatment uses at least one of 30mL/L methanesulfonic acid, chloric acid, perchloric acid, and nitric acid Mixture with 50~80g/L dodecyl ammonium chloride.
清洁处理过程中采用超纯水清洗银基基板的灰尘等杂质,清洗后,将产品依次放入除油、除氧化物的清洁剂中,加入超声振荡,彻底去除板面的指纹、油污等污染物质源以及银基表面存在的氧化物,然后再依次进行热水洗以及双水洗操作。热水洗时,处理温度为55~65℃,处理时间为1~3min,双水洗为将产品置于水流持续且均匀的二级水槽中,进行处理2~3min,洗去板面残留的酸性物质,即酸性清洁剂。During the cleaning process, ultra-pure water is used to clean the dust and other impurities on the silver-based substrate. After cleaning, the products are put into the cleaning agent for degreasing and deoxidizing in turn, and ultrasonic vibration is added to completely remove the fingerprints, oil and other pollution on the board surface. Material sources and oxides existing on the silver-based surface, and then perform hot water washing and double water washing operations in sequence. When washing with hot water, the treatment temperature is 55-65°C, and the treatment time is 1-3 minutes. Double water washing means placing the product in a secondary water tank with continuous and uniform water flow for 2-3 minutes to wash off the residual acidic substances on the board surface. , the acid cleaner.
优选的方案,所述微蚀过程为,将经清洁处理后的银基基板,置于由氧化物与微蚀酸的混合溶液中,于20~30℃下处理2~3min;所述氧化物的浓度为60~120g/L,微蚀酸的浓度为15~40mL/L;所述氧化物选自高锰酸钾、过氧化氢中的任意一种,所述微蚀酸选自硝酸、氯酸、甲基磺酸中的任意一种。In a preferred scheme, the micro-etching process is as follows: placing the cleaned silver-based substrate in a mixed solution of oxide and micro-etching acid, and treating it at 20-30° C. for 2-3 minutes; the oxide The concentration of the microetching acid is 60 to 120g/L, and the concentration of the microetching acid is 15 to 40mL/L; the oxide is selected from any one of potassium permanganate and hydrogen peroxide, and the microetching acid is selected from nitric acid, Any one of chloric acid and methanesulfonic acid.
本发明首创的以银基为基板进行化学镀镍钯金,发明人发现,要想顺利的在化学镀过程中获得具有优异导电导热性能的均匀镀层,前期的预处理致关重要,如果采用现有技术中的盐酸体系或硫酸体系,由于盐酸中含有的氯离子,硫酸中含有的硫酸根离子均会在银基表面发生沉淀或形成不溶物,这样不仅会增加后续化学镀镍钯金工艺的难度,不均匀,甚至出现镀不上去的问题,而且会严重影响其导电导热等性能,本发明通过大量的实验对前处理的各项工艺进行改性,为形成均匀结合性强的镍钯金镀层提供了基础,如在本发明的微蚀前处理过程中,采用过氧化氢作氧化剂,以硝酸、氯酸、高氯酸,甲基磺酸中的至少一种提供作用的酸性环境,对板面进行微蚀处理,使表面形成轻微的咬蚀层,获得新鲜的银面,为后续镀层提供更好的结合力。The present invention initiates electroless nickel-palladium-gold plating with a silver base as a substrate. The inventors have found that, in order to successfully obtain a uniform coating with excellent electrical and thermal conductivity in the electroless plating process, the pretreatment in the early stage is very important. In the hydrochloric acid system or sulfuric acid system in the technology, due to the chloride ion contained in the hydrochloric acid, the sulfate ion contained in the sulfuric acid all can precipitate or form insoluble matter on the silver-based surface, which will not only increase the subsequent electroless nickel-palladium-gold process. Difficulty, unevenness, and even the problem that it cannot be plated, and it will seriously affect its electrical and thermal properties. The present invention modifies the various pretreatment processes through a large number of experiments, in order to form a uniform and strong nickel-palladium-gold Coating provides foundation, as in the microetching pretreatment process of the present invention, adopts hydrogen peroxide to make oxygenant, with nitric acid, chloric acid, perchloric acid, the acidic environment that at least one in methanesulfonic acid provides effect, to The surface of the board is micro-etched to form a slight bite layer on the surface to obtain a fresh silver surface and provide better adhesion for subsequent plating.
发明人发现,微蚀处理对后续的镀镍钯金有较大影响,首先需要采用上述特定的氧化剂与酸的组合,其次氧化剂与酸的浓度也需要有效控制。氧化剂的浓度不够或者酸浓度过低,将会造成微蚀孔的深度不足和微蚀孔径的尺寸均一度不佳的问题,这将为后续化学镀镍层增加难度,使得镀镍层镀层不均,结合力差。氧化剂的浓度过高或者酸浓度过高,将会造成微蚀孔的深度过深和微蚀孔径过大的问题,这将破坏线路板银层基底,使得产品降低银层基底的优良性能,且浪费试剂,增加成本的投入,造成损失。The inventors found that the micro-etching treatment has a great influence on the subsequent nickel-palladium-gold plating. First, the combination of the above-mentioned specific oxidant and acid needs to be used, and secondly, the concentration of the oxidant and acid needs to be effectively controlled. Insufficient concentration of oxidant or too low concentration of acid will cause insufficient depth of micro-etched holes and poor size uniformity of micro-etched holes, which will increase the difficulty of subsequent electroless nickel plating layer, resulting in uneven nickel plating layer , Poor binding force. If the concentration of the oxidizing agent is too high or the concentration of the acid is too high, it will cause the problem that the depth of the micro-etched hole is too deep and the diameter of the micro-etched hole is too large, which will destroy the silver layer substrate of the circuit board, making the product reduce the excellent performance of the silver layer substrate, and Waste reagents, increase cost input, and cause losses.
作为进一步的优选,所述氧化物与微蚀酸选自如下组合中的任意一种:过氧化氢与氯酸;过氧化氢与甲基磺酸、高锰酸钾与甲基磺酸。As a further preference, the oxide and microetching acid are selected from any one of the following combinations: hydrogen peroxide and chloric acid; hydrogen peroxide and methanesulfonic acid, potassium permanganate and methanesulfonic acid.
在上述进一步的优选组合中,微蚀处理后,银层表面平整,光滑;微蚀孔径均匀性较好,表面粗糙度小;微蚀液体系稳定,速率可控;微蚀后镀镍,镍层结合力强。In the above further preferred combination, after the microetching treatment, the surface of the silver layer is flat and smooth; the uniformity of the microetching aperture is good, and the surface roughness is small; the microetching liquid system is stable and the rate is controllable; after the microetching, nickel plating, nickel Layer bonding is strong.
优选的方案,所述酸洗过程为:将经微蚀处理的银基基板,置于浓度为80~120mL/L的酸洗溶液中,处理1~3min;所述酸洗溶液选自硝酸溶液、氯酸溶液、高氯酸溶液、甲基磺酸溶液中的至少一种。In a preferred scheme, the pickling process is as follows: the silver-based substrate treated by microetching is placed in a pickling solution with a concentration of 80-120mL/L, and treated for 1-3 minutes; the pickling solution is selected from nitric acid solution , at least one of chloric acid solution, perchloric acid solution, and methanesulfonic acid solution.
酸洗过程预浸酸过程,将产品放入酸洗溶液中进行酸洗,除去前置残留的微蚀剂,然后再进行双水洗操作,处理时间为2~3min,除去板面残留的前置药液。Pickling process Pre-dipping pickling process, put the product into the pickling solution for pickling, remove the residual micro-etching agent, and then perform double washing operation, the treatment time is 2 to 3 minutes, remove the residual pre-etching agent on the board surface liquid medicine.
优选的方案,所述预浸酸过程为:将经酸洗处理的银基基板,置于浓度为6~12mL/L的预浸酸溶液中,处理1~3min;所述预浸酸溶液选自硝酸溶液、氯酸溶液、高氯酸溶液、甲基磺酸溶液中的至少一种。The preferred solution, the pre-soaking process is as follows: the pickled silver-based substrate is placed in a pre-soaking solution with a concentration of 6-12mL/L, and treated for 1-3 minutes; the pre-soaking solution is selected At least one of nitric acid solution, chloric acid solution, perchloric acid solution and methanesulfonic acid solution.
预浸酸过程中,将经酸洗处理的银基基板放入预浸酸溶液中,提供银层活化的酸性环境,使线路板的板面呈无氧状态,且确保后续的活化液不被带入过多的水而被稀释。During the pre-dipping process, put the pickled silver-based substrate into the pre-dipping acid solution to provide an acidic environment for the activation of the silver layer, so that the surface of the circuit board is in an oxygen-free state, and ensure that the subsequent activation solution will not be damaged. Diluted by bringing in too much water.
优选的方案,所述钯活化过程为:将经预浸酸处理的银基基板,置于钯活化液中,于20~30℃,处理2~3min,所述钯活化液由酸与对应酸根离子的钯盐组成,所述酸选自硝酸、氯酸、高氯酸或甲基酸中的任意一种;所述酸的浓度为60~100mL/L;对应酸根离子的钯盐的浓度为60~120mL/L。In a preferred scheme, the palladium activation process is as follows: the silver-based substrate that has been pre-soaked with acid is placed in a palladium activation solution, and treated at 20-30°C for 2-3 minutes, and the palladium activation solution is composed of acid and corresponding acid radicals. The palladium salt of ion is composed of, and the acid is selected from any one of nitric acid, chloric acid, perchloric acid or methyl acid; the concentration of the acid is 60~100mL/L; the concentration of the palladium salt corresponding to the acid radical is 60~120mL/L.
钯活化后,在银层表面沉积一层活化钯,为后续镀镍提供催化作用。钯活化后,需将线路板进行双水洗操作,处理时间为2~3min,除去板面残留的前置药液。After the palladium is activated, a layer of activated palladium is deposited on the surface of the silver layer to provide catalysis for the subsequent nickel plating. After palladium activation, the circuit board needs to be washed with double water for 2 to 3 minutes to remove the residual pre-medication solution on the board surface.
优选的方案,所述后浸酸过程为:将经钯活化处理的银基基板,置于浓度为15~40mL/L的后浸酸溶液中,处理1~3min,所述后浸酸溶液选自硝酸溶液、氯酸溶液、高氯酸溶液、甲基磺酸溶液中的至少一种。The preferred solution, the post pickling process is: place the silver-based substrate activated by palladium in a post pickling solution with a concentration of 15-40mL/L, and treat it for 1-3min. At least one of nitric acid solution, chloric acid solution, perchloric acid solution and methanesulfonic acid solution.
后浸酸过程中,将清洗过后的产品放入后浸酸溶液中,除去线路板板面上残留的钯活化化合物。后浸酸之后,需将线路板进行双水洗操作,处理时间为2~3min,除去板面残留的前置药液。During the post pickling process, the cleaned product is put into the post pickling solution to remove the residual palladium activation compound on the circuit board surface. After pickling, the circuit board needs to be washed with double water for 2 to 3 minutes to remove the residual pre-chemical solution on the board surface.
优选的方案,所述化学镀镍过程为:将经后浸酸处理的银基基板,置于化学镀镍液中进行化学镀镍处理,控制化学镀镍液的pH为3.0~4.5,温度为85~90℃,化学镀镍处理的时间为25~40min。The preferred scheme, the process of electroless nickel plating is as follows: the silver-based substrate treated with post pickling is placed in an electroless nickel plating solution for electroless nickel plating treatment, the pH of the electroless nickel plating solution is controlled to be 3.0 to 4.5, and the temperature is 85 ~ 90 ℃, the time of electroless nickel plating treatment is 25 ~ 40min.
作为进一步的优选,所述化学镀镍液的包含如下成份:磺酸镍25~35g/L、次磷酸钠20~40g/L、柠檬酸钠10~15g/L、乳酸15~25g/L、丙酸5-15g/L;碘酸钾35~50mg/L、PPS(丙烷磺酸吡啶嗡盐)5~10mg/L、DEP(N,N-二乙基丙炔胺)5~10mg/L。As a further preference, the electroless nickel plating solution comprises the following components: nickel sulfonate 25-35g/L, sodium hypophosphite 20-40g/L, sodium citrate 10-15g/L, lactic acid 15-25g/L, Propionic acid 5-15g/L; Potassium iodate 35-50mg/L, PPS (propane sulfonate pyridinium salt) 5-10mg/L, DEP (N,N-diethylpropynylamine) 5-10mg/L .
化学镀镍层是与银基线板的直接接触层,发明人通过大量的实验,优选出以磺酸镍为镍主盐,次磷酸钠为还原剂,柠檬酸钠、乳酸、丙酸三者充当络合剂、加速剂兼溶液缓冲剂,碘酸钾为稳定剂,PPS、DEP为表面活性剂,利用本发明所提供的配方在银基基板上进行镀镍,所得化学镀镍层平整;孔隙率低,镀层耐蚀性极强;镀液稳定性极好;镀速适中;结合力好;光亮度好。The electroless nickel plating layer is the direct contact layer with the silver baseline plate. Through a large number of experiments, the inventor has optimized nickel sulfonate as the main nickel salt, sodium hypophosphite as the reducing agent, and sodium citrate, lactic acid, and propionic acid as the main salt. Complexing agent, accelerator and solution buffer, potassium iodate as stabilizer, PPS and DEP as surfactant, utilize the formula provided by the present invention to carry out nickel plating on the silver-based substrate, the gained electroless nickel layer is smooth; the pores Low rate, strong corrosion resistance of the coating; excellent stability of the plating solution; moderate plating speed; good bonding force; good brightness.
在本发明化学镀镍配方中,所有的药剂缺一不可,相互协同才能获得最佳的效果,比如说丙酸在化学镀镍中充当加速剂的作用,同时通过协同作用,可弥补因乳酸加入造成的板面较为粗糙的结果,适当的加入丙酸可提高板面的整平效果,得到更为平整光洁的镀层。In the electroless nickel plating formula of the present invention, all medicaments are indispensable, mutual synergy just can obtain the best effect, for example propionic acid acts as accelerator in electroless nickel plating, simultaneously through synergy, can make up for the addition of lactic acid As a result of rough board surface, proper addition of propionic acid can improve the leveling effect of the board surface and obtain a smoother and smoother coating.
同时任何一种药剂的加入,成份含量也很重要,如加入过多,极大可能造成镀液不稳定或出现镀液毒化等现象。比如说若调整丙酸含量为30g/L以上,明显可见镀液镀速加快,镀液稳定性变差等问题,且可使沉积镍层中磷含量增加,降低产品的耐高温、耐磨蚀等性能。At the same time, the content of any chemical agent is also very important. If too much is added, it may cause the instability of the plating solution or the phenomenon of poisoning of the plating solution. For example, if the content of propionic acid is adjusted to 30g/L or more, it is obvious that the plating speed of the plating solution is accelerated, the stability of the plating solution is deteriorated, and the phosphorus content in the deposited nickel layer can be increased, reducing the high temperature resistance and corrosion resistance of the product. and other performance.
作为进一步的优选,所述化学镀镍液的包含如下成份:磺酸镍30g/L、次磷酸钠30g/L、乳酸20g/L、丙酸10g/L、柠檬酸钠12g/L、碘酸钾45mg/L、PPS 8mg/L、DEP 8mg/L。As a further preference, the electroless nickel plating solution comprises the following components: nickel sulfonate 30g/L, sodium hypophosphite 30g/L, lactic acid 20g/L, propionic acid 10g/L, sodium citrate 12g/L, iodic acid Potassium 45mg/L, PPS 8mg/L, DEP 8mg/L.
通过化学镀镍,在银基表面形成一层结合力好,致密的金属镍层;随后双水洗除去残留的镀镍试剂。Through electroless nickel plating, a dense metal nickel layer with good adhesion is formed on the silver-based surface; then the residual nickel plating reagent is removed by double water washing.
优选的方案,所述化学镀钯过程为:将经化学镀镍处理的银基基板,置于化学镀钯液中进行化学镀钯处理,控制化学镀钯液的pH为4.5~6.5,温度为48~52℃,化学镀钯处理的时间为25~40min。The preferred scheme, the process of electroless palladium plating is: the silver-based substrate processed by electroless nickel plating is placed in the electroless palladium plating solution to carry out the electroless palladium plating treatment, the pH of the control electroless palladium plating solution is 4.5~6.5, and the temperature is 48 ~ 52 ° C, the time of electroless palladium plating treatment is 25 ~ 40 minutes.
在本发明中,进行镀镍后,再进行其他镀层的镀覆时,其环境基本己与现有技术铜基等线路板镀镍后的环境相同,其他作用的酸根离子已对基板银层无明显影响,故现有技术中常规的化学镀钯液均可适用于本发明的技术方案。In the present invention, after nickel plating is carried out, when carrying out the plating of other coatings again, its environment is basically identical with the environment after nickel plating of circuit boards such as prior art copper base, and the acid radical ion of other effects has no effect on the substrate silver layer. Obvious impact, so the conventional electroless palladium plating solution in the prior art can be applicable to the technical scheme of the present invention.
作为进一步的优选,所述化学镀钯液包含如下成份:硝酸钯1.2~1.5g/L、次磷酸钠8~12g/L、乙二胺25~40g/L、三乙醇胺20g~30g/L、柠檬酸15~25g/L、柠檬酸铵6~12g/L、烷基硫脲20~30mg/L、硫代硫酸钠15~25mg/L。As a further preference, the electroless palladium plating solution comprises the following components: palladium nitrate 1.2-1.5g/L, sodium hypophosphite 8-12g/L, ethylenediamine 25-40g/L, triethanolamine 20g-30g/L, Citric acid 15-25g/L, ammonium citrate 6-12g/L, alkylthiourea 20-30mg/L, sodium thiosulfate 15-25mg/L.
通过上述优选的化学镀钯液进行化学镀钯,所得钯镀层光亮均匀;结合力强;耐蚀性好;镀液稳定性好,MTO大于6。The electroless palladium plating is carried out by the above-mentioned preferred electroless palladium plating solution, and the obtained palladium coating is bright and uniform; the binding force is strong; the corrosion resistance is good; the stability of the plating solution is good, and the MTO is greater than 6.
通过化学镀钯,在镍层表面形成一层金属钯层;随后双水洗除去残留的镀钯试剂。处理时间为2~3min。By electroless palladium plating, a metal palladium layer is formed on the surface of the nickel layer; then the residual palladium plating reagent is removed by double water washing. The processing time is 2-3 minutes.
优选的方案,所述化学镀金过程为:将经化学镀钯处理的银基基板,置于化学镀金液中进行化学镀金处理,控制化学镀金液的pH为5.8~6.2,温度为82~85℃,化学镀金处理的时间为8~12min。In a preferred scheme, the chemical gold plating process is as follows: placing the silver-based substrate treated with chemical palladium plating in the chemical gold plating solution for chemical gold plating treatment, controlling the pH of the chemical gold plating solution to be 5.8 to 6.2, and the temperature to be 82 to 85°C , The time for electroless gold plating treatment is 8-12 minutes.
作为进一步的优选,所述化学镀金液的包含如下成份:2.0~4.0g/L氰化金钾、100~120mL/L氢氧化钾。As a further preference, the electroless gold plating solution comprises the following components: 2.0-4.0 g/L potassium gold cyanide, and 100-120 mL/L potassium hydroxide.
通过化学镀金,在钯层表面形成一层薄金,完成线路板银基表面的化学镀镍钯金镀层工艺。Through electroless gold plating, a thin layer of gold is formed on the surface of the palladium layer, and the electroless nickel-palladium-gold plating process on the silver-based surface of the circuit board is completed.
优选的方案,将经化学镀金处理的银基基板,先置于常温水中,然后再置于55~65℃的水中,处理1~3min,即得含镍钯金镀层的银基线路板。In a preferred solution, the silver-based substrate treated with electroless gold plating is first placed in normal temperature water, and then placed in water at 55-65°C for 1-3 minutes to obtain a silver-based circuit board containing nickel-palladium-gold coating.
将产品浸入盛有清水的水槽中,充分回收板面残留的含金溶液,避免对金盐的浪费,且减少对环境的污染,随后热水清洗,彻底除去板面残留的前置药液,获得含镍钯金镀层的银基线路板。Immerse the product in a sink filled with clear water to fully recover the remaining gold-containing solution on the board surface, avoid wasting gold salt and reduce environmental pollution, and then wash it with hot water to completely remove the residual pre-medication solution on the board surface. A silver-based circuit board containing nickel-palladium-gold plating is obtained.
有益效果Beneficial effect
本发明首创在银基基板上进行化学镀镍钯,并且从前处理工艺到化学镀镍工艺均形成了最适配银基的工艺,本发明在银基基础上的化学镀镍钯金,相比传统的铜基化学镀镍钯金而言,可大幅度降低镍钯金化学镀层的厚度,从而节约金属的使用含量,同时避免对环境造成污染的问题。再者,以银基为基底,整个产品导电、导热性更强、灵敏度更高,寿命更长,整体性能更为优异。The present invention is the first to carry out electroless nickel-palladium plating on the silver-based substrate, and has formed the most suitable silver-based process from the pretreatment process to the chemical nickel-plating process. For the traditional copper-based electroless nickel-palladium-gold plating, the thickness of the nickel-palladium-gold electroless plating layer can be greatly reduced, thereby saving the content of metal used and avoiding the problem of environmental pollution. Furthermore, with the silver base as the base, the entire product has stronger electrical and thermal conductivity, higher sensitivity, longer life, and better overall performance.
具体实施方式Detailed ways
为了使本发明的目的、优点以及技术方案的更加清晰明了,接下来将为本发明作更为详细的研究。结合具体实例予以说明。In order to make the object, advantage and technical solution of the present invention clearer, the present invention will be studied in more detail next. Combined with specific examples to illustrate.
以下具体实例仅为本发明提供的较佳实施例。The following specific examples are only preferred embodiments provided by the present invention.
实施例1Example 1
清洁:将银基基板放入盛有超纯水的超级水槽中,使银基基板浸没,常温下施加轻微振动,处理10min,除去银基板面的灰尘等杂质。再将产品放入质量分数3%的十二烷基磺酸钠与20g/L氢氧化钠的混合溶液中进行超声振荡除油处理;使用50g/L十二烷基氯化铵与30mL/L氯酸混合物超声振荡进行除氧化物处理。Cleaning: Put the silver-based substrate into a super water tank filled with ultra-pure water, immerse the silver-based substrate, apply slight vibration at room temperature, and treat for 10 minutes to remove dust and other impurities on the surface of the silver-based substrate. Then put the product into a mixed solution of 3% sodium dodecylsulfonate and 20g/L sodium hydroxide for ultrasonic vibration degreasing treatment; use 50g/L dodecyl ammonium chloride and 30mL/L The chloric acid mixture is ultrasonically oscillated for deoxidation treatment.
微蚀处理:将上述经清洁处理的银基基板,置于含氯酸30mL/L与过氧化氢100g/L的混合溶液中进行微蚀处理,处理温度为25℃,时间为2min,微蚀处理后,银层表面较平整,较光滑;微蚀孔径较为均匀,表面粗糙度较小;微蚀速率较大,微蚀体系较稳定,速率可控。Micro-etching treatment: place the above-mentioned cleaned silver-based substrate in a mixed solution containing 30mL/L of chloric acid and 100g/L of hydrogen peroxide for micro-etching treatment. The treatment temperature is 25°C, and the time is 2min. After treatment, the surface of the silver layer is relatively flat and smooth; the micro-etching pore size is relatively uniform, and the surface roughness is small; the micro-etching rate is relatively large, the micro-etching system is relatively stable, and the rate is controllable.
酸洗:将经微蚀处理的银基基板置于浓度为100mL/L的硝酸溶液中,处理2min。Pickling: Place the microetched silver-based substrate in a nitric acid solution with a concentration of 100mL/L for 2 minutes.
预浸酸:将经酸洗处理的置于浓度为10mL/L的硝酸溶液中,处理2min。Pre-dipping pickling: place the pickling treated product in a nitric acid solution with a concentration of 10mL/L for 2 minutes.
钯活化,将经预浸酸处理的银基基板,置于含90mL/L硝酸以及80mL/L的硝酸钯的钯活化液中,于25℃,处理2min。For palladium activation, place the pre-dipped silver-based substrate in a palladium activation solution containing 90mL/L nitric acid and 80mL/L palladium nitrate, and treat it at 25°C for 2min.
后浸酸:将经钯活化处理的银基基板,置于浓度为20mL/L的硝酸溶液中,处理2min。Post-acid dipping: place the silver-based substrate activated by palladium in a nitric acid solution with a concentration of 20mL/L, and treat it for 2min.
化学镀镍:将经后浸酸处理的银基基板,置于化学镀镍液中进行化学镀镍处理,控制化学镀镍液的pH为3.0,温度为85℃,化学镀镍处理的时间为25min,化学镀镍液的组成为磺酸镍30g/L、次磷酸钠30g/L、乳酸20g/L、丙酸10g/L、柠檬酸钠12g/L、碘酸钾45mg/L、PPS8mg/L、DEP 8mg/L。化学镀镍层平整;孔隙率低,检测所得值为0.11个/cm2,镀层耐蚀性极强;镀液稳定性极好;镀速为34.5μm/h;结合力好;光亮度好。Electroless nickel plating: place the silver-based substrate treated with post pickling in the electroless nickel plating bath for electroless nickel plating, control the pH of the electroless nickel plating bath to be 3.0, the temperature is 85°C, and the time for electroless nickel plating treatment is 25min, the composition of electroless nickel plating solution is nickel sulfonate 30g/L, sodium hypophosphite 30g/L, lactic acid 20g/L, propionic acid 10g/L, sodium citrate 12g/L, potassium iodate 45mg/L, PPS8mg/ L. DEP 8mg/L. The electroless nickel plating layer is smooth; the porosity is low, the detected value is 0.11 pieces/cm 2 , the coating has strong corrosion resistance; the stability of the plating solution is excellent; the plating speed is 34.5μm/h; the bonding force is good; the brightness is good.
化学镀钯:将含镍镀层的基板,置于化学镀钯液中进行化学镀钯处理,控制化学镀钯液的pH为4.5温度为48℃,化学镀钯处理的时间为25min,化学镀钯液的配方为:硝酸钯1.2g/L、次磷酸钠8g/L、乙二胺25g/L、三乙醇胺20g/L、柠檬酸15g/L、柠檬酸铵6g/L、烷基硫脲20mg/L、硫代硫酸钠15mg/L。Electroless palladium plating: place the substrate containing nickel plating in the electroless palladium plating solution for electroless palladium plating treatment, control the pH of the electroless palladium plating solution to 4.5 and the temperature at 48°C, the time of electroless palladium plating treatment is 25min, and the electroless palladium plating The formula of the solution is: palladium nitrate 1.2g/L, sodium hypophosphite 8g/L, ethylenediamine 25g/L, triethanolamine 20g/L, citric acid 15g/L, ammonium citrate 6g/L, alkylthiourea 20mg /L, sodium thiosulfate 15mg/L.
化学镀金:将含镍、钯镀层的基板,置于化学镀金液中进行化学镀金处理,控制化学镀金液的pH为5.8温度为82℃,化学镀金处理的时间为10min,化学镀金液的配方为:氰化金钾3.0g/L、氢氧化钾100mL/L。Electroless gold plating: place the substrate containing nickel and palladium plating in the chemical gold plating solution for chemical gold plating treatment, control the pH of the chemical gold plating solution to 5.8 and the temperature at 82°C, the time of chemical gold plating treatment is 10min, the formula of the chemical gold plating solution is : Potassium gold cyanide 3.0g/L, potassium hydroxide 100mL/L.
将产品放入盛有清水的水槽中,充分回收板面残留的含金溶液,再将产品置于温度为55℃的热水中,进行处理1min,彻底清除板面残留的药液,获得银基—镍钯金线路。Put the product into a sink filled with clear water to fully recover the gold-containing solution remaining on the surface of the board, and then place the product in hot water at a temperature of 55°C for 1 minute to completely remove the residual liquid on the board and obtain silver Base - nickel palladium gold circuit.
性能评定:实施例1所得产品可焊性较强,焊接性好;结合力较好,使用加热拉伸法测定结合强度为2892gf;耐蚀性强;与传统铜基PCB板比(导热系数为16.5W/mK),产品的导热系数提高至20.8W/mK,提高了26%,导热率高,且散热均匀。可很好地适用于对产品耐热、耐蚀等性能要求更高的领域。Performance evaluation: the product obtained in Example 1 has strong weldability and good weldability; the bonding force is better, and the bonding strength is 2892gf measured by the heating stretching method; the corrosion resistance is strong; compared with the traditional copper-based PCB board (the thermal conductivity is 16.5W/mK), the thermal conductivity of the product is increased to 20.8W/mK, an increase of 26%, the thermal conductivity is high, and the heat dissipation is uniform. It can be well used in fields that require higher performances such as heat resistance and corrosion resistance of products.
实施例2Example 2
清洁:将银基基板放入盛有超纯水的超级水槽中,使银基基板浸没,常温下施加轻微振动,处理10min,除去银基板面的灰尘等杂质。再将产品放入质量分数4%的十二烷基磺酸钠与25g/L氢氧化钠的混合溶液中进行超声振荡除油处理;使用60g/L十二烷基氯化铵与30mL/L甲基磺酸混合物超声振荡进行除氧化物处理。Cleaning: Put the silver-based substrate into a super water tank filled with ultra-pure water, immerse the silver-based substrate, apply slight vibration at room temperature, and treat for 10 minutes to remove dust and other impurities on the surface of the silver-based substrate. Then put the product into a mixed solution of sodium dodecylsulfonate with a mass fraction of 4% and 25g/L sodium hydroxide for ultrasonic vibration degreasing treatment; use 60g/L lauryl ammonium chloride and 30mL/L The methanesulfonic acid mixture is ultrasonically oscillated for deoxidation treatment.
微蚀处理:将上述经清洁处理的银基基板,置于含甲基磺酸30mL/L与过氧化氢100g/L的混合溶液中进行微蚀处理,处理温度为25℃,时间为2min,微蚀处理后,银层表面较平整,较光滑;微蚀孔径较为均匀,表面粗糙度较小;微蚀速率较大,微蚀体系较稳定,速率可控。Microetching treatment: place the above-mentioned cleaned silver-based substrate in a mixed solution containing 30mL/L of methanesulfonic acid and 100g/L of hydrogen peroxide for microetching treatment at a temperature of 25°C for 2 minutes. After micro-etching treatment, the surface of the silver layer is relatively flat and smooth; the micro-etching pore size is relatively uniform, and the surface roughness is small; the micro-etching rate is relatively large, the micro-etching system is relatively stable, and the rate is controllable.
酸洗:将经微蚀处理的银基基板置于浓度为100mL/L的甲基磺酸溶液中,处理2min。Pickling: Place the microetched silver-based substrate in a methanesulfonic acid solution with a concentration of 100mL/L for 2 minutes.
预浸酸:将经酸洗处理的置于浓度为10mL/L的甲基磺酸溶液中,处理2min。Pre-dipping pickling: place the pickling treated product in a methanesulfonic acid solution with a concentration of 10mL/L, and treat it for 2 minutes.
钯活化,将经预浸酸处理的银基基板,置于含90mL/L甲基磺酸以及80mL/L的甲基磺酸钯的钯活化液中,于25℃,处理2min。For palladium activation, place the pre-dipped silver-based substrate in a palladium activation solution containing 90mL/L methanesulfonic acid and 80mL/L palladium methanesulfonate, and treat it at 25°C for 2min.
后浸酸:将经钯活化处理的银基基板,置于浓度为20mL/L的甲基磺酸溶液中,处理2min。Post-acid dipping: place the silver-based substrate activated by palladium in a methanesulfonic acid solution with a concentration of 20mL/L, and treat it for 2min.
化学镀镍:将经后浸酸处理的银基基板,置于化学镀镍液中进行化学镀镍处理,控制化学镀镍液的pH为4.0温度为85℃,化学镀镍处理的时间为30min,化学镀镍液的组成为磺酸镍30g/L、次磷酸钠30g/L、乳酸10g/L、丙酸5g/L、柠檬酸钠5g/L、碘酸钾45mg/L、PPS8mg/L、DEP 8mg/L。经检测,化学镀镍层较平整;孔隙率较低,检测所得值为2.2个/cm2,镀层耐蚀性强;镀液稳定性较好;镀速为18.7μm/h;结合力较好;光亮度好。Electroless nickel plating: place the silver-based substrate treated with post pickling in an electroless nickel plating solution for electroless nickel plating, control the pH of the electroless nickel plating solution to be 4.0 and the temperature to be 85°C, and the time for the electroless nickel plating treatment to be 30min , The composition of electroless nickel plating solution is nickel sulfonate 30g/L, sodium hypophosphite 30g/L, lactic acid 10g/L, propionic acid 5g/L, sodium citrate 5g/L, potassium iodate 45mg/L, PPS8mg/L , DEP 8mg/L. After testing, the electroless nickel plating layer is relatively smooth; the porosity is low, and the detected value is 2.2 pieces/cm 2 , the coating has strong corrosion resistance; the stability of the plating solution is good; the plating speed is 18.7μm/h; the binding force is good ; Good brightness.
化学镀钯:将含镍镀层的基板,置于化学镀钯液中进行化学镀钯处理,控制化学镀钯液的pH为5.5温度为50℃,化学镀钯处理的时间为30min,化学镀钯液的配方为:硝酸钯1.5g/L、次磷酸钠10g/L、乙二胺30g/L、三乙醇胺25g/L、柠檬酸20g/L、柠檬酸铵8g/L、烷基硫脲25mg/L、硫代硫酸钠20mg/L。Electroless palladium plating: place the substrate containing nickel plating in the electroless palladium plating solution for electroless palladium plating treatment, control the pH of the electroless palladium plating solution to 5.5 and the temperature at 50°C, the time of electroless palladium plating treatment is 30min, and the electroless palladium plating The formula of the solution is: palladium nitrate 1.5g/L, sodium hypophosphite 10g/L, ethylenediamine 30g/L, triethanolamine 25g/L, citric acid 20g/L, ammonium citrate 8g/L, alkylthiourea 25mg /L, sodium thiosulfate 20mg/L.
化学镀金:将含镍、钯镀层的基板,置于化学镀金液中进行化学镀金处理,控制化学镀金液的pH为6.0温度为85℃,化学镀金处理的时间为10min,化学镀金液的配方为:氰化金钾3.0g/L、氢氧化钾100mL/L。Electroless gold plating: place the substrate containing nickel and palladium plating in the chemical gold plating solution for chemical gold plating treatment, control the pH of the chemical gold plating solution to 6.0 and the temperature at 85°C, and the time for chemical gold plating treatment is 10 minutes. The formula of the chemical gold plating solution is : Potassium gold cyanide 3.0g/L, potassium hydroxide 100mL/L.
将产品放入盛有清水的水槽中,充分回收板面残留的含金溶液,再将产品置于温度为60℃的热水中,进行处理2min,彻底清除板面残留的药液,获得银基—镍钯金线路。Put the product into a sink filled with clean water to fully recover the gold-containing solution remaining on the surface of the board, and then place the product in hot water at a temperature of 60°C for 2 minutes to completely remove the remaining liquid on the board and obtain silver Base - nickel palladium gold circuit.
性能评定:实施例2所得产品可焊性强,焊接性好;结合力好,使用加热拉伸法测定结合强度为2978gf;耐蚀性强;与传统铜基PCB板比(导热系数为16.5W/mK),产品的导热系数提高至21.5W/mK,提高了30%,导热率高,且散热均匀。可很好地适用于对产品耐热、耐蚀等性能要求更高的领域。Performance evaluation: The product obtained in Example 2 has strong weldability and good weldability; good bonding force, and the bonding strength measured by heating and stretching method is 2978gf; strong corrosion resistance; compared with traditional copper-based PCB board (thermal conductivity is 16.5W /mK), the thermal conductivity of the product is increased to 21.5W/mK, an increase of 30%, with high thermal conductivity and uniform heat dissipation. It can be well used in fields that require higher performances such as heat resistance and corrosion resistance of products.
实施例3Example 3
清洁:将银基基板放入盛有超纯水的超级水槽中,使银基基板浸没,常温下施加轻微振动,处理10min,除去银基板面的灰尘等杂质。再将产品放入质量分数5%的十二烷基磺酸钠与30g/L氢氧化钠的混合溶液中进行超声振荡除油处理;使80g/L十二烷基氯化铵与30mL/L硝酸混合物超声振荡进行除氧化物处理。Cleaning: Put the silver-based substrate into a super water tank filled with ultra-pure water, immerse the silver-based substrate, apply slight vibration at room temperature, and treat for 10 minutes to remove dust and other impurities on the surface of the silver-based substrate. Then put the product into a mixed solution of sodium dodecylsulfonate and 30g/L sodium hydroxide with a mass fraction of 5% to carry out ultrasonic vibration degreasing treatment; make 80g/L lauryl ammonium chloride and 30mL/L The nitric acid mixture is ultrasonically oscillated for deoxidation treatment.
微蚀处理:将上述经清洁处理的银基基板,置于含甲基磺酸30mL/L与高锰酸钾100g/L的混合溶液中进行微蚀处理,处理温度为25℃,时间为2min,微蚀处理后,银层表面平整,光滑;微蚀孔径均匀性较好,表面粗糙度小;微蚀速率为1.25μm/min,符合要求;微蚀液体系稳定,速率可控。Microetching treatment: place the above-mentioned cleaned silver-based substrate in a mixed solution containing 30mL/L of methanesulfonic acid and 100g/L of potassium permanganate for microetching treatment at a temperature of 25°C for 2 minutes , after micro-etching treatment, the surface of the silver layer is flat and smooth; micro-etching pore size uniformity is good, surface roughness is small; micro-etching rate is 1.25 μm/min, which meets the requirements; micro-etching solution system is stable and the rate is controllable.
酸洗:将经微蚀处理的银基基板置于浓度为100mL/L的高氯酸溶液中,处理2min。Pickling: Place the micro-etched silver-based substrate in a perchloric acid solution with a concentration of 100mL/L for 2 minutes.
预浸酸:将经酸洗处理的置于浓度为10mL/L的高氯酸溶液中,处理2min。Pre-dipping pickling: place the pickling treated product in a perchloric acid solution with a concentration of 10mL/L for 2 minutes.
钯活化,将经预浸酸处理的银基基板,置于含90mL/L高氯酸以及80mL/L的高氯酸钯的钯活化液中,于25℃,处理2min。For palladium activation, place the pre-dipping acid-treated silver-based substrate in a palladium activation solution containing 90mL/L perchloric acid and 80mL/L palladium perchlorate, and treat it at 25°C for 2min.
后浸酸:将经钯活化处理的银基基板,置于浓度为20mL/L的高氯酸溶液中,处理2min。Post-acid dipping: Put the silver-based substrate activated by palladium in a perchloric acid solution with a concentration of 20mL/L, and treat it for 2min.
化学镀镍:将经后浸酸处理的银基基板,置于化学镀镍液中进行化学镀镍处理,控制化学镀镍液的pH为3.0,温度为85℃,化学镀镍处理的时间为25min,化学镀镍液的组成为磺酸镍30g/L、次磷酸钠30g/L、乳酸20g/L、丙酸10g/L、柠檬酸钠12g/L、碘酸钾45mg/L、PPS8mg/L、DEP 8mg/L。化学镀镍层平整;孔隙率低,检测所得值为0.11个/cm2,镀层耐蚀性极强;镀液稳定性极好;镀速为34.5μm/h;结合力好;光亮度好。Electroless nickel plating: place the silver-based substrate treated with post pickling in the electroless nickel plating bath for electroless nickel plating, control the pH of the electroless nickel plating bath to be 3.0, the temperature is 85°C, and the time for electroless nickel plating treatment is 25min, the composition of electroless nickel plating solution is nickel sulfonate 30g/L, sodium hypophosphite 30g/L, lactic acid 20g/L, propionic acid 10g/L, sodium citrate 12g/L, potassium iodate 45mg/L, PPS8mg/ L. DEP 8mg/L. The electroless nickel plating layer is smooth; the porosity is low, the detected value is 0.11 pieces/cm 2 , the coating has strong corrosion resistance; the stability of the plating solution is excellent; the plating speed is 34.5μm/h; the bonding force is good; the brightness is good.
化学镀钯:将含镍镀层的基板,置于化学镀钯液中进行化学镀钯处理,控制化学镀钯液的pH为6.5温度为52℃,化学镀钯处理的时间为40min,化学镀钯液的配方为:硝酸钯1.5g/L、次磷酸钠12g/L、乙二胺40g/L、三乙醇胺30g/L、柠檬酸25g/L、柠檬酸铵12g/L、烷基硫脲30mg/L、硫代硫酸钠25mg/L。Electroless palladium plating: place the substrate containing nickel plating in the electroless palladium plating solution for electroless palladium plating treatment, control the pH of the electroless palladium plating solution to 6.5 and the temperature at 52°C, the time of electroless palladium plating treatment is 40min, and the electroless palladium plating The formula of the liquid is: palladium nitrate 1.5g/L, sodium hypophosphite 12g/L, ethylenediamine 40g/L, triethanolamine 30g/L, citric acid 25g/L, ammonium citrate 12g/L, alkylthiourea 30mg /L, sodium thiosulfate 25mg/L.
化学镀金:将含镍、钯镀层的基板,置于化学镀金液中进行化学镀金处理,控制化学镀金液的pH为6.2温度为85℃,化学镀金处理的时间为10min,化学镀金液的配方为:氰化金钾3.0g/L、氢氧化钾100mL/L。Electroless gold plating: place the substrate containing nickel and palladium plating in the chemical gold plating solution for chemical gold plating treatment, control the pH of the chemical gold plating solution to 6.2 and the temperature at 85°C, and the time for chemical gold plating treatment is 10 minutes. The formula of the chemical gold plating solution is : Potassium gold cyanide 3.0g/L, potassium hydroxide 100mL/L.
将产品放入盛有清水的水槽中,充分回收板面残留的含金溶液,再将产品置于温度为65℃的热水中,进行处理3min,彻底清除板面残留的药液,获得银基—镍钯金线路。Put the product into a sink filled with clear water to fully recover the gold-containing solution remaining on the surface of the board, and then place the product in hot water at a temperature of 65°C for 3 minutes to completely remove the residual liquid on the board and obtain silver Base - nickel palladium gold circuit.
性能评定:实施例3所得产品可焊性强,焊接性好;结合力好,使用加热拉伸法测定结合强度为2954gf;耐蚀性强;与传统铜基PCB板比(导热系数为16.5W/mK),产品的导热系数提高至22.1W/mK,提高了34%,导热率高,且散热均匀。可很好地适用于对产品耐热、耐蚀等性能要求更高的领域。Performance evaluation: The product obtained in Example 3 has strong weldability and good weldability; good bonding force, and the bonding strength measured by heating and stretching method is 2954gf; strong corrosion resistance; compared with traditional copper-based PCB board (thermal conductivity is 16.5W /mK), the thermal conductivity of the product is increased to 22.1W/mK, an increase of 34%, with high thermal conductivity and uniform heat dissipation. It can be well used in fields that require higher performances such as heat resistance and corrosion resistance of products.
实施例4Example 4
其他条件与实施例3相同,仅微蚀剂为含甲基磺酸10mL/L与高锰酸钾60g/L的溶液,微蚀处理后,银层表面平整,光滑;微蚀孔径均匀性较好,但孔深度较浅,表面粗糙度较小;微蚀速率为0.50μm/min,速率较低。Other conditions are identical with embodiment 3, only microetching agent is the solution that contains methanesulfonic acid 10mL/L and potassium permanganate 60g/L, after microetching process, silver layer surface is flat, smooth; Good, but the hole depth is shallow and the surface roughness is small; the microetch rate is 0.50μm/min, and the rate is low.
以上各实施例中:线路板进行微蚀处理之前,需要依次进行热水洗以及双水洗操作。热水洗时,处理温度为55~65℃,处理时间为1~3min,双水洗为将产品置于水流持续且均匀的二级水槽中,进行处理2~3min,洗去板面残留的酸性物质,即酸性清洁剂。线路板进行预浸酸处理之前,需将线路板进行双水洗操作,处理时间为2~3min,除去板面残留的前置药液。In the above embodiments: before the circuit board is subjected to micro-etching treatment, hot water washing and double water washing operations need to be performed sequentially. When washing with hot water, the treatment temperature is 55-65°C, and the treatment time is 1-3 minutes. Double water washing means placing the product in a secondary water tank with continuous and uniform water flow for 2-3 minutes to wash off the residual acidic substances on the board surface. , the acid cleaner. Before the pre-dipping treatment of the circuit board, the circuit board needs to be washed with double water for 2 to 3 minutes to remove the residual pre-dipping solution on the board surface.
线路板进行后浸酸处理之前,需将线路板进行双水洗操作,处理时间为2~3min,除去板面残留的前置药液。Before the post pickling treatment of the circuit board, the circuit board needs to be washed with double water for 2 to 3 minutes to remove the residual pre-chemical solution on the board surface.
线路板进行化学镀镍钯金处理之前,需将线路板进行双水洗操作,处理时间为2~3min,除去板面残留的前置药液。Before the circuit board is treated with electroless nickel-palladium-gold plating, the circuit board needs to be washed with double water for 2 to 3 minutes to remove the residual pre-chemical solution on the board surface.
线路板进行化学镀镍钯金工艺处理时,需进行两次双水洗,其分别为化学镀镍后,除去板面残留的化学镀镍药液,以及化学镀钯后,除去板面残留的化学镀钯药液。处理时间为均为2~3min。When the circuit board is treated with electroless nickel-palladium-gold process, two double washings are required, which are respectively after electroless nickel plating, to remove the remaining chemical nickel plating solution on the board surface, and after electroless palladium plating, to remove the residual chemical plating solution on the board surface. Palladium plating solution. The processing time is 2 to 3 minutes.
对比例1Comparative example 1
其他条件与实施例1相同,仅微蚀剂为含硝酸30mL/L与过硫酸钠100g/L的溶液;结果微蚀处理后,表面立即出现白色沉淀;银层表面凹凸;微蚀孔径大小不一,粗糙度大,有些微蚀孔还被沉淀覆盖;微蚀速率大,但微蚀体系不稳定,速率不可控。Other conditions are identical with embodiment 1, and only microetching agent is the solution that contains nitric acid 30mL/L and sodium persulfate 100g/L; After the result microetching process, white precipitation appears on the surface immediately; First, the roughness is large, and some micro-etch holes are still covered by precipitation; the micro-etch rate is high, but the micro-etch system is unstable and the rate is uncontrollable.
对比例2Comparative example 2
其他条件与实施例2相同,仅微蚀剂为含氯酸30mL/L与氯化铁100g/L的溶液,结果微蚀处理后,银层表面较平整,较光滑;微蚀孔径较为均匀,表面粗糙度小;微蚀速率较小,微蚀体系不稳定,速率不可控。Other conditions are identical with embodiment 2, and only microetching agent is the solution of chloric acid 30mL/L and ferric chloride 100g/L, after the result microetching process, silver layer surface is smoother, smoother; Microetching aperture is comparatively uniform, The surface roughness is small; the micro-etch rate is small, the micro-etch system is unstable, and the rate is uncontrollable.
对比例3Comparative example 3
其他条件与实施例3相同,仅微蚀剂为含高氯酸30mL/L与高铁酸钠100g/L的溶液,微蚀处理后,银层表面较平整,较光滑;微蚀孔径较为均匀,表面粗糙度较小;微蚀速率较大,微蚀体系不稳定,速率不可控;处理后未吹干置于空气中,微蚀表面在30s内即出现变色氧化现象。Other conditions are identical with embodiment 3, only microetching agent is the solution that contains perchloric acid 30mL/L and sodium ferrate 100g/L, after microetching treatment, silver layer surface is smoother, smoother; Microetching pore size is comparatively uniform, The surface roughness is small; the micro-etching rate is high, the micro-etching system is unstable, and the rate is uncontrollable; after treatment, it is not dried and placed in the air, and the micro-etched surface will appear discoloration and oxidation within 30s.
对比例5Comparative example 5
其他条件与实施例1相同,仅镀镍液与不同,无法获得实施例中在银基基板上的镀镍效果,具体镀镍液成份与性能结果如表1所示:Other conditions are identical with embodiment 1, only nickel-plating liquid is different with, can't obtain the nickel-plating effect on silver-based substrate in the embodiment, concrete nickel-plating liquid composition and performance result are as shown in table 1:
表1镀镍液与性能结果Table 1 Nickel plating solution and performance results
以上所述仅为本发明较为理想的实例,并不用来限制本发明。本发明的技术范围不局限于此说明书上的内容,凡在本发明技术思想和原则之内所作的任何修改、修饰或改进,均应受到本发明的保护。The above descriptions are only ideal examples of the present invention, and are not intended to limit the present invention. The technical scope of the present invention is not limited to the contents of this specification, and any modification, modification or improvement made within the technical thought and principle of the present invention shall be protected by the present invention.
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