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CN110441200A - A kind of laser measuring device for measuring - Google Patents

A kind of laser measuring device for measuring Download PDF

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Publication number
CN110441200A
CN110441200A CN201810421766.5A CN201810421766A CN110441200A CN 110441200 A CN110441200 A CN 110441200A CN 201810421766 A CN201810421766 A CN 201810421766A CN 110441200 A CN110441200 A CN 110441200A
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CN
China
Prior art keywords
laser
fluid storage
storage device
collimation lens
measuring
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Granted
Application number
CN201810421766.5A
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Chinese (zh)
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CN110441200B (en
Inventor
汪晓波
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Changsha Qingbo Photoelectric Technology Co Ltd
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Changsha Qingbo Photoelectric Technology Co Ltd
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Priority to CN201810421766.5A priority Critical patent/CN110441200B/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02Investigating particle size or size distribution
    • G01N15/0205Investigating particle size or size distribution by optical means
    • G01N15/0227Investigating particle size or size distribution by optical means using imaging; using holography

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  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The embodiment of the invention discloses a kind of laser measuring device for measuring, comprising: laser, collimation optics, fluid storage device and Image Acquisition mould group;The fluid storage device is for accommodating testing liquid;The laser, positioned at the side of the fluid storage device, for emitting laser beam;The collimation optics, between the laser and the fluid storage device, for collimating the laser beam, the laser beam after collimation is emitted to the fluid storage device;Described image acquires mould group, it is set to the rear of the fluid storage device along the direction of propagation for the laser beam for being incident to the fluid storage device, the light spot image of the transmitted ray formed after the fluid storage device is exposed to for acquiring the laser beam.

Description

A kind of laser measuring device for measuring
Technical field
The present invention relates to technology of instrument and meter field more particularly to a kind of laser measuring device for measuring.
Background technique
In the air, wavefront is limited light by with the comparable lyriform pore of wavelength dimension or particle, with each member at limited wavefront Wave is that the transmitting in source generates diffraction and scattering in space interference, space (angle) distribution of the luminous energy of diffraction and scattering and light wave Wavelength is related with the scale of lyriform pore or particle.Light source is done with laser, light is the certain monochromatic light of wavelength, the luminous energy of diffraction and scattering Space (angle) distribution just only it is related with partial size.To the diffraction of particle swarm, each granular-grade number decide correspondence it is each specific At angle obtain light energy size, ratio of each specific angle light energy in total light energy, Ying Fanying each granular-grade point Cloth degree.
Existing laser particle analyzer generally uses surface-emitting laser in conjunction with beam expanding lens, is swashed by beam expanding lens to surface launching The light beam that light device issues is expanded the grain-size measurement to realize gas, but surface-emitting laser refers to light from perpendicular to half The solid state laser that the direction of conductor substrate surface is projected, optical energy density limit the accuracy of measurement result;Secondly, should When kind laser particle analyzer measurement liquid particles are spent, measuring accuracy will be by the material of selected measuring cup, placement location Deng influence, to affect the application range of the laser particle analyzer.
Summary of the invention
In view of this, that the main purpose of the present invention is to provide a kind of optical energy densities is higher, has more high measurement accurate The laser measuring device for measuring of degree and stronger application performance.
In order to achieve the above objectives, the technical scheme of the present invention is realized as follows:
A kind of laser measuring device for measuring, comprising: laser, collimation optics, fluid storage device and Image Acquisition mould group; The fluid storage device is for accommodating testing liquid;The laser, positioned at the side of the fluid storage device, for sending out Penetrate laser beam;The collimation optics, between the laser and the fluid storage device, for swashing described Light beam collimation, the laser beam after collimation are emitted to the fluid storage device;Described image acquires mould group, edge The direction of propagation for being incident to the laser beam of the fluid storage device is set to the rear of the fluid storage device, uses The light spot image of the transmitted ray formed after acquiring the laser beam and exposing to the fluid storage device.
Wherein, the laser is point light source laser, and the collimation optics include collimation lens.
Wherein, the collimation optics further include fast axis collimation lens;The fast axis collimation lens are set to described sharp Between light device and the collimation lens.
Wherein, the laser measuring device for measuring further includes line laser generator;The line laser generator is set to the standard Between straight lens and the fluid storage device, it is used to form a wordline laser.
Wherein, the laser includes at least two point light source lasers, and the collimation optics include and the point The identical collimation lens of the quantity of light source laser, the collimation lens are correspondingly arranged with the point light source laser respectively;Institute State the laser beam that at least two point light source lasers are launched formed after at least two collimation lens line swash Light.
Wherein, the laser includes at least two point light source lasers, and the collimation optics include and the point The identical collimation lens of the quantity of light source laser and fast axis collimation lens, the laser measuring device for measuring further include and described light The identical line laser generator of the quantity of source laser device;Every bit light source laser with a corresponding fast axis collimation lens, surely Straight lens and a line laser generator are arranged successively, and the laser beam that the every bit light source laser issues is successively by corresponding to The fast axis collimation lens, form a wordline laser after the collimation lens and the line laser generator, described at least two The orientation of a point light source laser is different from the direction of a wordline laser that the line laser generator is formed, it is described at least The laser beam that two point light source lasers issue passes through the corresponding fast axis collimation lens, the collimation lens respectively With forming face laser after the line laser generator.
Wherein, the laser measuring device for measuring includes at least three point light source lasers, and the point light source laser is in array Formula distribution, the collimation optics include collimation lens identical with the quantity of the point light source laser, and the collimation is saturating Mirror and the point light source laser respectively correspond setting;The laser beam that at least three point light sources laser is launched The forming face laser after the corresponding collimation lens.
Wherein, the laser includes at least two point light source lasers, and the collimation optics include fast axis collimation Lens and slow axis collimation lens, the laser measuring device for measuring further include reflecting mirror, the fast axis collimation lens, slow axis collimation lens It is corresponding with the quantity of the point light source laser respectively with the quantity of the reflecting mirror;Every bit light source laser and corresponding one Fast axis collimation lens, a slow axis collimation lens and a reflecting mirror are arranged successively, the laser that the every bit light source laser issues Light beam successively after the corresponding fast axis collimation lens, the slow axis collimation lens formed linear laser be emitted to it is corresponding The reflecting mirror, the reflecting mirror is used to that face laser will to be spliced to form after laser beam reflection, and is emitted to the liquid Accommodation apparatus.
Wherein, described image acquisition mould group includes ccd image sensor or cmos image sensor.
Wherein, described image acquisition mould group further includes imaging lens;The imaging lens are set to the fluid storage dress It sets between the ccd image sensor or cmos image sensor, exposes to the liquid for assembling the laser beam The transmitted ray that accommodation apparatus is formed.
The embodiment of the present invention provide laser measuring device for measuring, comprising: laser, collimation optics, fluid storage device and Image Acquisition mould group;The fluid storage device is for accommodating testing liquid;The laser is located at the fluid storage device Side, for emitting laser beam;The collimation optics, be located at the laser and the fluid storage device it Between, for collimating the laser beam, the laser beam after collimation is emitted to the fluid storage device;It is described Image Acquisition mould group exposes to the hot spot of the transmitted ray formed after the fluid storage device for acquiring the laser beam Image;By setting fluid storage device, the accommodating to testing liquid is realized, it can be to avoid survey selected in measurement process Influence of the unlike material or different location of measuring cup to measurement result;It is incident to by the way that the setting of Image Acquisition mould group is located at edge The direction of propagation of the laser beam of the fluid storage device and the rear for being set to the fluid storage device, realize The acquisition of the transmitted ray formed after the fluid storage device is exposed to the laser beam;Pass through laser, collimated light Learn element, fluid storage device and Image Acquisition mould group, realize the measurement of testing liquid, cheap and optical energy density compared with It is high.
Detailed description of the invention
Fig. 1 is the composed structure schematic diagram of laser measuring device for measuring in an alternate embodiment of the present invention;
Fig. 2 is the composed structure schematic diagram of laser measuring device for measuring in an alternate embodiment of the present invention;
Fig. 3 is the composed structure schematic diagram of laser measuring device for measuring in an alternate embodiment of the present invention;
Fig. 4 is the composed structure schematic diagram of laser measuring device for measuring in an alternate embodiment of the present invention;
Fig. 5 is the composed structure schematic diagram of laser measuring device for measuring in an alternate embodiment of the present invention;
Fig. 6 is the composed structure schematic diagram of laser measuring device for measuring in an alternate embodiment of the present invention;
Fig. 7 is the composed structure schematic diagram of laser measuring device for measuring in an alternate embodiment of the present invention;
Fig. 8 is the composed structure schematic diagram of laser measuring device for measuring in an alternate embodiment of the present invention;
Fig. 9 is the composed structure schematic diagram of laser measuring device for measuring in an alternate embodiment of the present invention;
Figure 10 is the structural schematic diagram of imaging lens in an alternate embodiment of the present invention.
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with attached drawing to the present invention make into It is described in detail to one step, based on the embodiments of the present invention, those of ordinary skill in the art are not before making creative work All other embodiment obtained is put, shall fall within the protection scope of the present invention.
One embodiment of the invention provides a kind of laser measuring device for measuring, referring to Fig. 1, the laser measuring device for measuring includes: Laser 101, collimation optics 102, fluid storage device 103 and Image Acquisition mould group 104;The fluid storage device 103 for accommodating testing liquid, and the collimation optics 102 and described image acquisition mould group 104 are located at the fluid storage The same side of device 103, and the fluid storage device 103 is located at the central axis of the collimation optics 102 and described The intersection of the central axis of Image Acquisition mould group 104;The laser 101 is set to the one of the collimation optics 102 Side, for emitting laser beam;The collimation optics 102, the institute for collimating the laser beam, after collimation It states laser beam and is emitted to the fluid storage device 103;Described image acquires mould group 104, for acquiring the laser beam Expose to the light spot image of the transmitted ray formed after the fluid storage device 103.
In the embodiment of the present invention, laser measuring device for measuring includes: laser 101, collimation optics 102, fluid storage dress Set 103 and Image Acquisition mould group 104;The fluid storage device 103 is for accommodating testing liquid;The laser 101, is located at The side of the fluid storage device 103, for emitting laser beam;The collimation optics 102 are located at the laser The laser beam between 101 and the fluid storage device 103, for collimating the laser beam, after collimation It is emitted to the fluid storage device 103;It is described, the fluid storage device 103 is exposed to for acquiring the laser beam The light spot image of the transmitted ray formed afterwards;By setting fluid storage device 103, the accommodating to testing liquid is realized, it can To avoid the influence to measurement result of unlike material or different location of measuring cup selected in measurement process;By that will scheme As the acquisition setting of mould group 104 is located at along the setting of the direction of propagation for the laser beam for being incident to the fluid storage device 103 In the rear of the fluid storage device 103, realizes and shape after the fluid storage device 103 is exposed to the laser beam At transmitted ray acquisition;Pass through laser 101, collimation optics 102, fluid storage device 103 and Image Acquisition mould Group 104, realizes the measurement of testing liquid, cheap and optical energy density is higher.
Here, referring to Fig. 2, the laser 101 is point light source laser, the collimation optics 102 include standard Straight lens 201.Specifically, the laser 101 is point light source laser, the point light source laser can be semiconductor laser Device, the hot spot of the point light source laser are the rectangular or oval of 200 μm of 1000 μ m;By using collimation lens 201, It realizes and the laser beam that laser 101 emits is converted into directional light.Optionally, which further includes shell (not shown), the laser 101, collimation optics 102, fluid storage device 103 and Image Acquisition mould group 104 accommodate In in the shell, so that the laser measuring device for measuring is formed as an entirety.
Here, referring to Fig. 3, the collimation optics 102 further include fast axis collimation lens 301;The fast axis collimation Lens 301 are set between the laser 101 and the collimation lens 201.Specifically, in laser 101 and collimation lens Fast axis collimation lens 301 are set between 201, fast axle beam divergence angle are compressed by fast axis collimation lens 301, by laser 101 The angle of divergence of the laser beam of transmitting is compressed within 1mrad, reduces the angle of divergence of laser beam.
Here, referring to Fig. 4, the laser measuring device for measuring further includes line laser generator 401;The line laser generator 401 are set between the collimation lens 201 and the fluid storage device 103, are used to form a wordline laser.Specifically, The line laser generator can select wave mirror or Bao Weier prism.By using line laser generator, a wordline is obtained Laser increases measurement area, improves the utilization rate of laser.
Here, referring to Fig. 5, in another optional embodiment, the laser 101 swashs including at least two point light sources Light device, the collimation optics 102 include collimation lens 201 identical with the quantity of the point light source laser, the standard Straight lens 201 are correspondingly arranged with the point light source laser respectively;At least two point light sources laser is launched described Laser beam forms line laser after at least two collimation lens 201.By using at least two point light source lasers And the mode of collimation lens 201 identical with the quantity of the point light source laser, the transmitting of at least two point light source lasers Laser beam hot spot formed an interrupted straight line, increase measurement area, ensure that optical energy density.
Here, referring to Fig. 6, in another optional embodiment, the laser 101 swashs including at least two point light sources Light device, the collimation optics 102 include that collimation lens 201 identical with the quantity of the point light source laser and fast axle are quasi- Straight lens 301, the laser measuring device for measuring further includes line laser generator line identical with the quantity of the point light source laser Laser generator 401;Every bit light source laser swashs with a corresponding fast axis collimation lens 301, collimating lens 201 and a line Photoproduction, which is grown up to be a useful person, 401 to be arranged successively, and the laser beam that the every bit light source laser issues successively passes through the corresponding fast axle Form a wordline laser after collimation lens 301, the collimation lens 201 and the line laser generator 401, described at least two The orientation of point light source laser is different from the direction of a wordline laser that the line laser generator 401 is formed, it is described extremely The laser beam that few two point light source lasers issue passes through the corresponding fast axis collimation lens 301, the standard respectively Forming face laser after straight lens 201 and the line laser generator 401.Specifically, by using at least two point light source laser Device, and collimation lens 201 identical with the quantity of the point light source laser, fast axis collimation lens 301 and line laser generate Device 401, the laser beam that every bit light source laser issues successively pass through the corresponding fast axis collimation lens 301, the standard A wordline laser is formed after straight lens 201 and the line laser generator 401, and then forms at least two a wordline lasers, institute It states at least two a wordline lasers and determines a plane, increase measurement area, improve the utilization rate of laser.
Here, referring to Fig. 7, in another optional embodiment, the laser measuring device for measuring includes at least three point light Source laser device, the point light source laser are distributed in array, and the collimation optics 102 include and the point light source laser The identical collimation lens 201 of the quantity of device, the collimation lens 201 respectively correspond setting with the point light source laser;It is described The laser beam that at least three point light source lasers are launched forming face after the corresponding collimation lens 201 swashs Light.By using at least three point light source lasers in array distribution, and the quantity phase with the point light source laser Same collimation lens 201, the hot spot of the laser beam of at least three electric light source lasers transmitting form the flat of a multiple spot composition Face increases measurement area, ensure that optical energy density.
Here, referring to Fig. 8, the laser 101 includes at least two point light source lasers, the collimation optics Including fast axis collimation lens 301 and slow axis collimation lens 801, the laser measuring device for measuring further includes reflecting mirror 802, the fast axle The quantity of collimation lens 301, slow axis collimation lens 801 and the reflecting mirror 802 quantity with the point light source laser respectively It is corresponding;Every bit light source laser and a corresponding fast axis collimation lens 301, a slow axis collimation lens 801 and a reflecting mirror 802 Be arranged successively, the laser beam that the every bit light source laser issues successively pass through the corresponding fast axis collimation lens 301, Linear laser is formed after the slow axis collimation lens 801 and is emitted to the corresponding reflecting mirror 802, and the reflecting mirror 802 is used for It will be spliced to form face laser after laser beam reflection, and is emitted to the fluid storage device 103.Specifically, by adopting It is quasi- at least two point light source lasers, and fast axis collimation lens 301 identical with the electric light source number of lasers, slow axis Straight lens 801 and reflecting mirror 802, every bit light source laser and a corresponding fast axis collimation lens 301, a slow axis collimation lens 801 and one reflecting mirror 802 be arranged successively, the laser beam that the every bit light source laser issues successively passes through corresponding described Linear laser is formed after fast axis collimation lens 301, the slow axis collimation lens 801 and is emitted to the corresponding reflecting mirror 802, is led to It crosses the reflecting mirror 802 to be adjusted the direction for the laser beam for being incident to fluid storage device 103 and spacing, the reflection Mirror 802 is used to that seamless face laser will to be spliced to form after laser beam reflection, and is emitted to the fluid storage device 103, measurement area is increased, ensure that optical energy density.In an alternative embodiment, in the reflecting mirror 802 and institute It states and diaphragm is set between fluid storage device 103, for limiting the shape of face laser.
Here, referring to Fig. 9, described image acquisition mould group 104 includes ccd image sensor or cmos image sensor. It includes imaging sensor 901 that described image, which acquires mould group 104, and described image sensor 901 is that ccd image sensor or CMOS scheme As sensor.Since ccd image sensor high sensitivity, good reliability, spectral response are wide and compact-sized, by using CCD Imaging sensor improves the image quality and sensitivity of laser measuring device for measuring;Since CMOS image sensor structure is simple, collection At Du Gao and at low cost, by using CMOS sightseeing component, the cost of laser measuring device for measuring is reduced.In an optional implementation In example, it includes photodiode or phototriode that described image, which acquires mould group 104, for receiving transmitted light.It is another can In the embodiment of choosing, the ccd image sensor or cmos image sensor can be linear ccd image sensor or CMOS figure As sensor.
Here, described image acquisition mould group 104 can also include imaging lens 902;The imaging lens 902, are set to Between the fluid storage device 103 and the ccd image sensor or cmos image sensor, for assembling the laser light Beam exposes to the transmitted ray that the fluid storage device 103 is formed.
In an alternative embodiment, the imaging lens 902 can be single convex lens, for assembling the laser Light beam exposes to the transmitted ray that the fluid storage device 103 is formed, and using single convex lens, aggregation transmitted light may be implemented Effect, simplify structure, reduce costs.
In another alternative embodiment, the imaging lens 902 are the lens group for containing at least two lens.Specifically , referring to Fig. 10, the imaging lens 902 successively include the first lens 1001,1002 and of the second lens from object side to image side The third lens 1003;Wherein, the first lens 1001 have positive light coke, and object side is convex surface, and image side surface is plane;Second thoroughly Mirror 1002 has negative power, and object side and image side surface are concave surface;The third lens 1003 have positive light coke, object side It is convex surface with image side surface.Between first lens 1001 and the second lens 1002, the second lens 1002 and the third lens 1003 Distance is no more than 5mm, and the combined focal length of the first lens 1001, the second lens 1002 and the third lens 1003 is 6~35mm.By The imaging lens that one lens 1001, the second lens 1002 and the third lens 1003 form, visual angle is wide and good imaging quality.
The embodiment of the invention provides a kind of laser measuring device for measuring, comprising: laser 101, collimation optics 102, liquid Body accommodation apparatus 103 and Image Acquisition mould group 104;The fluid storage device 103 is for accommodating testing liquid;The laser 101, positioned at the side of the fluid storage device 103, for emitting laser beam;The collimation optics 102 are located at institute State between laser 101 and the fluid storage device 103, for the laser beam to be collimated, by collimation after described in Laser beam is emitted to the fluid storage device 103;It is described, the fluid storage is exposed to for acquiring the laser beam The light spot image of the transmitted ray formed after device 103;By the way that fluid storage device 103 is arranged, the appearance of testing liquid is realized It sets, simultaneously because the presence of fluid storage device 103, avoids 103 Different Effects of the fluid storage device measurement of testing liquid As a result;By being located at the setting of Image Acquisition mould group 104 along the laser beam for being incident to the fluid storage device 103 The direction of propagation is set to the rear of the fluid storage device 103, realizes and exposes to the liquid receipts to the laser beam The acquisition of the transmitted ray formed after capacitance device 103;Pass through laser 101, collimation optics 102, fluid storage device 103 And Image Acquisition mould group 104, realize the measurement of testing liquid, cheap and optical energy density is higher.
The foregoing is only a preferred embodiment of the present invention, is not intended to limit the scope of the present invention.

Claims (10)

1. a kind of laser measuring device for measuring characterized by comprising laser, collimation optics, fluid storage device and image Acquire mould group;The fluid storage device is for accommodating testing liquid;
The laser, positioned at the side of the fluid storage device, for emitting laser beam;
The collimation optics are used between the laser and the fluid storage device by the laser beam Collimation, the laser beam after collimation are emitted to the fluid storage device;
Described image acquires mould group, and the direction of propagation along the laser beam for being incident to the fluid storage device is set to institute The rear for stating fluid storage device exposes to the transmitted light formed after the fluid storage device for acquiring the laser beam The light spot image of line.
2. laser measuring device for measuring according to claim 1, which is characterized in that the laser is point light source laser, institute Stating collimation optics includes collimation lens.
3. laser measuring device for measuring according to claim 2, which is characterized in that the collimation optics further include fast axle standard Straight lens;
The fast axis collimation lens are set between the laser and the collimation lens.
4. laser measuring device for measuring according to claim 3, which is characterized in that the laser measuring device for measuring further includes line laser Generator;
The line laser generator is set between the collimation lens and the fluid storage device, is used to form a wordline and is swashed Light.
5. laser measuring device for measuring according to claim 1, which is characterized in that the laser includes at least two point light sources Laser, the collimation optics include collimation lens identical with the quantity of the point light source laser, and the collimation is saturating Mirror is correspondingly arranged with the point light source laser respectively;
The laser beam that at least two point light sources laser is launched shape after at least two collimation lens At line laser.
6. laser measuring device for measuring according to claim 1, which is characterized in that the laser includes at least two point light sources Laser, the collimation optics include that collimation lens identical with the quantity of the point light source laser and fast axis collimation are saturating Mirror, the laser measuring device for measuring further include line laser generator identical with the quantity of the point light source laser;Every bit light Source laser device is arranged successively with a corresponding fast axis collimation lens, collimating lens and a line laser generator, the every bit The laser beam that light source laser issues successively swashs by the corresponding fast axis collimation lens, the collimation lens and the line Photoproduction forms a wordline laser, the orientation of at least two point light sources laser and the line laser generator after growing up to be a useful person The direction of a wordline laser of formation is different, and the laser beam that at least two point light sources laser issues passes through respectively Forming face laser after the corresponding fast axis collimation lens, the collimation lens and the line laser generator.
7. laser measuring device for measuring according to claim 1, which is characterized in that the laser measuring device for measuring includes at least three Point light source laser, the point light source laser are distributed in array, and the collimation optics include swashing with the point light source The identical collimation lens of the quantity of light device, the collimation lens and the point light source laser respectively correspond setting;
The laser beam that at least three point light sources laser is launched is formed after the corresponding collimation lens Face laser.
8. laser measuring device for measuring according to claim 1, which is characterized in that the laser includes at least two point light sources Laser, the collimation optics include fast axis collimation lens and slow axis collimation lens, and the laser measuring device for measuring further includes Reflecting mirror, the quantity of the fast axis collimation lens, slow axis collimation lens and the reflecting mirror respectively with the point light source laser Quantity it is corresponding;Every bit light source laser and a corresponding fast axis collimation lens, a slow axis collimation lens and a reflecting mirror according to Secondary arrangement, the laser beam that the every bit light source laser issues successively pass through corresponding fast axis collimation lens, described Linear laser is formed after slow axis collimation lens and is emitted to the corresponding reflecting mirror, and the reflecting mirror is used for the laser beam It is spliced to form face laser after reflection, and is emitted to the fluid storage device.
9. laser measuring device for measuring according to any one of claim 1 to 8, which is characterized in that described image acquires mould group Including ccd image sensor or cmos image sensor.
10. laser measuring device for measuring according to claim 9, which is characterized in that described image acquisition mould group further includes imaging Camera lens;
The imaging lens, be set to the fluid storage device and the ccd image sensor or cmos image sensor it Between, the transmitted ray that the fluid storage device is formed is exposed to for assembling the laser beam.
CN201810421766.5A 2018-05-04 2018-05-04 Laser measuring device Active CN110441200B (en)

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CN113567956A (en) * 2021-04-09 2021-10-29 华为技术有限公司 Detection device and control method thereof

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