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CN110389329A - 具有集成高功率激光二极管的芯片级相干激光雷达 - Google Patents

具有集成高功率激光二极管的芯片级相干激光雷达 Download PDF

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Publication number
CN110389329A
CN110389329A CN201910261645.3A CN201910261645A CN110389329A CN 110389329 A CN110389329 A CN 110389329A CN 201910261645 A CN201910261645 A CN 201910261645A CN 110389329 A CN110389329 A CN 110389329A
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CN
China
Prior art keywords
signal
chip
mirror
transmission
master oscillator
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CN201910261645.3A
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English (en)
Inventor
K·萨亚赫
R·萨基西安
O·叶菲莫夫
P·R·帕特森
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GM Global Technology Operations LLC
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GM Global Technology Operations LLC
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Publication of CN110389329A publication Critical patent/CN110389329A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone
    • G01S7/4815—Constructional features, e.g. arrangements of optical elements of transmitters alone using multiple transmitters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/003—Bistatic lidar systems; Multistatic lidar systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
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    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
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    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
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    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
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    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S17/34—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
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    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
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    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
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    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
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    • H01L31/16—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof structurally associated with, e.g. formed in or on a common substrate with, one or more electric light sources, e.g. electroluminescent light sources, and electrically or optically coupled thereto the semiconductor device sensitive to radiation being controlled by the light source or sources
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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Integrated Circuits (AREA)
  • Traffic Control Systems (AREA)

Abstract

一种芯片级相干激光雷达系统包括主振荡器，其集成在芯片上以同时提供用于传输的信号和本机振荡器(LO)信号。系统还包括光束转向装置，其用于将从用于传输的信号中获得的输出信号引导出系统，以及芯片上的组合器，其用于组合LO信号和由目标反射输出信号而产生的返回信号。一个或多个光电探测器获得LO信号和返回信号之间的干扰结果，以确定关于目标的信息。

Description

具有集成高功率激光二极管的芯片级相干激光雷达
引言
本公开涉及具有集成高功率激光二极管的芯片级相干激光雷达。
车辆(例如，汽车、卡车、建筑设备、农场设备、自动化工厂设备)越来越多地配备有能提供信息来增强车辆操作或使车辆操作自动化的传感器。示例性传感器包括无线电检测和测距(雷达)系统、照相机、麦克风以及光检测和测距(激光雷达)系统。示例性激光雷达系统是相干激光雷达系统，其传输调频连续波(FMCW)信号，并且依赖于传输信号和返回信号之间的光学相干性，其中返回信号由目标对传输信号的反射散射产生，以执行目标的检测。在诸如车辆应用的应用中，减小激光雷达系统的尺寸和成本可能是有益的。因此，期望提供一种具有集成高功率激光二极管的芯片级相干激光雷达。
发明内容
在一个示例性实施例中，芯片级相干激光雷达系统包括主振荡器，其集成在芯片上以同时提供用于传输的信号和本机振荡器(LO)信号。系统还包括光束转向装置，其用于将从用于传输的信号中获得的输出信号引导出系统，以及芯片上的组合器，其用于组合LO信号和由目标反射输出信号而产生的返回信号。一个或多个光电探测器获得LO信号和返回信号之间的干扰结果，以确定关于目标的信息。
除了本文描述的一个或多个特征之外，主振荡器包括增益介质，该增益介质由电流源调制以提供调频连续波(FMCW)信号。
除了本文描述的一个或多个特征之外，电流源是在芯片之外的。
除了本文描述的一个或多个特征之外，主振荡器还包括输出用于传输的信号的第一镜以及输出LO信号的第二镜，并且系统还包括放大用于传输的信号以产生输出信号的放大器。
除了本文描述的一个或多个特征之外，第一镜是低反射率镜并且第二镜是高反射率镜。
除了本文描述的一个或多个特征之外，第一镜的反射率是5-10％，并且第二镜的反射率是80-90％。
除了本文描述的一个或多个特征之外，放大器是具有芯片外电流源的位于芯片上的半导体光放大器。
除了本文描述的一个或多个特征之外，输出信号具有大约500毫瓦(mW)的输出功率并且LO信号具有大约5mW的输出功率。
除了本文描述的一个或多个特征之外，主振荡器是分布式布拉格反射器激光二极管(DBR-LD)。
除了本文描述的一个或多个特征之外，一个或多个光电探测器是硅上锗(Si上Ge)光电探测器。
除了本文描述的一个或多个特征之外，系统是单基地系统并且进一步包括循环器。
除了本文描述的一个或多个特征之外，系统是双基地的。
除了本文描述的一个或多个特征之外，系统位于车辆内或车辆上并且检测对象相对于车辆的位置和速度。
在另一个示例性实施例中，一种组装相干激光雷达系统的方法包括在芯片上集成主振荡器和光放大器以同时提供输出信号和本机振荡器(LO)信号。主振荡器包括增益介质、第一镜和第二镜。该方法还包括布置第一电流源以供给增益介质和第二电流源以供给光放大器。
除了本文描述的一个或多个特征之外，该方法还包括将第一镜布置成穿过从增益介质到光放大器的传输信号并且将第二镜布置成穿过来自增益介质的LO信号。
除了本文描述的一个或多个特征之外，该方法还包括将第一电流源配置成调制增益介质的频率。
在又一个示例性实施例中，车辆包括芯片级相干激光雷达系统。该系统包括主振荡器，其集成在芯片上以同时提供用于传输的信号和本机振荡器(LO)信号。系统还包括光束转向装置，其用于将从用于传输的信号中获得的输出信号引导出系统，以及芯片上的组合器，其用于组合LO信号和由目标反射输出信号而产生的返回信号。一个或多个光电探测器获得LO信号和返回信号之间的干扰结果，以确定关于目标的信息。车辆还包括控制器，其用于基于从激光雷达系统中的返回信号获得的信息来增强车辆操作或使车辆操作自动化。
除了本文描述的一个或多个特征之外，主振荡器包括增益介质，该增益介质由电流源调制以提供调频连续波(FMCW)信号。
除了本文描述的一个或多个特征之外，主振荡器还包括输出用于传输的信号的第一镜以及输出LO信号的第二镜，并且系统还包括放大用于传输的信号以产生输出信号的放大器。
除了本文描述的一个或多个特征之外，第一镜是低反射率镜并且第二镜是高反射率镜。
通过以下结合附图的详细描述，本公开的上述特征和优点以及其它特征和优点将变得显而易见。
附图说明
其他特征，优点和细节仅作为示例出现在以下详细描述中，详细描述参考附图，其中：
图1是根据一个或多个实施例的涉及具有集成高功率激光二极管的芯片级相干激光雷达系统的场景的框图；
图2是根据一个或多个实施例的芯片上相干激光雷达系统的框图；
图3是根据替代的一个或多个实施例的芯片上相干激光雷达系统的框图；以及
图4详述了根据一个或多个实施例的激光雷达系统的光源。
具体实施方式
以下描述本质上仅是示例性的，并不旨在限制本公开及其应用或使用。应当理解，在所有附图中，相应的附图标记表示相同或相应的部件和特征。
如前所述，相干激光雷达系统可以是用于增强车辆操作或使车辆操作自动化的传感器之一。在诸如车辆中对象检测的应用中，部件的布置和包装的紧凑性是有益的。为了实现目的，芯片级激光雷达可能是优选的。虽然不是对芯片级相干激光雷达的所有部件都进行集成，但是非常期望将高功率激光二极管光源与激光雷达光子芯片集成。本文详述的系统和方法的实施例涉及具有集成高功率激光二极管的芯片级相干激光雷达。高功率激光器促进远程激光雷达应用(例如，超过100米)。
根据示例性实施例，图1是涉及具有集成高功率激光二极管的芯片级相干激光雷达系统110的场景的框图。图1所示的车辆100是汽车101。参考图2进一步详细描述的相干激光雷达系统110显示在汽车101的车顶上。根据替代或另外的实施例，一个或多个激光雷达系统110可以位于车辆100上的其他位置。还示出了另一个传感器115(例如，照相机、声纳、雷达系统)。由激光雷达系统110和一个或多个其他传感器115获得的信息可以提供给控制器120(例如，电子控制单元(ECU))，用于图像或数据处理、目标识别和随后的车辆控制。
控制器120可以使用信息来控制一个或多个车辆系统130。在示例性实施例中，车辆100可以是自主车辆，并且控制器120可以使用来自激光雷达系统110和其他源的信息来执行已知的车辆操作控制。在替代实施例中，控制器120可以使用来自激光雷达系统110和作为已知系统(例如，碰撞避免系统、自适应巡航控制系统)的一部分的其他源的信息来增强车辆操作。激光雷达系统110和一个或多个其它传感器115可用于检测对象140，例如图1所示的行人145。控制器120可包括处理电路，该处理电路可以包含专用集成电路(ASIC)、电子电路、执行一个或多个软件或固件程序的处理器(共享的、专用的、或成组的)和存储器、组合逻辑电路和/或提供功能的其它合适的部件。
图2是根据一个或多个实施例的芯片上相干激光雷达系统110的框图。图2所示的示例性激光雷达系统110是单基地系统，其使用循环器225以便将相同孔径透镜200用于将从激光雷达系统110输出的光作为输出信号240和将由激光雷达系统110获得的光作为接收光束250。光束转向装置220可实施为由微机电系统(MEMS)(即，MEMS扫描镜)致动的扫描镜，其用于将输出信号240引导出激光雷达系统110并将接收光束250引导到循环器225。激光雷达系统110包括光源210，其是参考图4详细描述的集成激光二极管。光源210输出输出信号240并且还经由模斑转换器(SSC)215输出本机振荡器(LO)信号217。SSC 215将LO信号217耦合到平面芯片上波导。
如在图2所示的示例中，如果目标140处于激光雷达系统110的视场中，来自激光雷达系统110的输出信号240受目标140散射。这些散射光中的一些作为接收光束250再次进入激光雷达系统110。接收光束250进入孔径透镜200，并被光束转向装置220引导至循环器225。第二SSC 230将进入的接收光束250耦合到平面波导。LO信号217和接收光束250都输入到组合器260。然后将组合信号265分离到两个光电探测器270a、270b(通常称为270)。光电探测器270可以是例如双平衡硅上锗(Si上Ge)光电探测器。
组合信号265中的LO信号217和接收光束250彼此干涉，并且每个光电探测器270可检测得到的射频(RF)差拍信号。接收光束250和LO信号217之间的干扰导致两个光束的相干组合。因此，与例如获得接收光束直接检测的时间飞行原理系统不同，激光雷达系统110称为相干激光雷达系统。每个光电探测器270中的干扰导致RF差拍信号，这有助于识别由输出信号240产生的时间延迟的接收光束250。这防止了来自激光雷达系统110外部，在激光雷达系统110视场内的另一光源的偏离光被误认为是目标140反射的接收光束250。
光电探测器270是将接收光束250与LO信号217之间的干扰的结果转换成电流275a、275b(通常称为275)的半导体装置。这些电流275也称为差拍信号。根据已知的平衡检测器技术使用两个光电探测器270来消除两个光电探测器270共用的LO信号217(由光源210引起，与输出信号240中的相同)中的强度噪声。组合和处理来自每个光电探测器270的电流275以获得三维信息，例如到目标140的距离和作为二维空间坐标函数的目标140到激光雷达系统110的相对速度。例如，可以由处理器280在激光雷达系统110内执行处理，或者由控制器120在激光雷达系统110外执行处理。处理器280可以包括类似于针对控制器120所讨论的处理电路。
图3是根据替代的一个或多个实施例的芯片上相干激光雷达系统110的框图。图3的示例性实施例中示出了双基地激光雷达系统110。图3所示的大多数双基地激光雷达系统110类似于图2所示的单基地激光雷达系统110。因此，不再讨论参考图2详述的部件。如前所述，单基地系统和双基地系统之间的主要区别在于在双基地系统中包括用于输出信号240和接收光束250的分离的光束控制装置220a、220b(通常称为220)和孔径透镜200a、200b(通常称为200)。因此，在图3的双基地系统中不需要循环器250。
图4详述了根据一个或多个实施例的激光雷达系统110的光源210。如前所述，光源210是芯片级集成高功率激光二极管。具体地，光源210是高功率窄线宽光源。如图4所示，光源210包括集成在芯片400上的组件和不在芯片400上的电流源450a、450b(通常称为450)。在替代实施例中，电流源450中的一个或两个也可集成在芯片上。根据示例性实施例，光源210处于主振荡器功率放大器(MOPA)激光器配置中。在图4所示的示例性实施例中，主振荡器405可以是分布式布拉格反射器(DBR)激光二极管(LD)。主振荡器405包括由电流源450a供电的增益介质410(即激光介质)和两个DBR镜(输出侧镜420和LO侧镜440)。功率放大器430可以是由电流源450b供电的半导体光放大器(SOA)。在示例性实施例中，电流源450a的调制导致输出信号240和LO信号217的频率调制。因此，控制电流源450a有助于从主振荡器405输出FMCW信号。
根据示例性实施例，主振荡器405是激光腔，其包括增益介质410、作为低反射率镜的输出侧镜420(例如，5-10％的反射率)以及作为高反射率镜的LO侧镜440(例如，80-90％的反射率)。放大器430(例如SOA)放大经过输出侧镜420的主振荡器405的输出，而不损害其线宽。所得到的输出信号240构成离开激光雷达系统110之前的传输光。经过LO侧镜440的主振荡器405的输出是用于相干检测的LO信号217。因此，光源210同时提供输出信号240和LO信号217。输出信号240可以具有大约500毫瓦(mW)的输出功率，而LO信号217具有大约5mW的输出功率。在替代实施例中，光源210可以包括锥形DBR激光二极管，而不是主振荡器405和放大器430的组合。
尽管已参考示例性实施例描述了上述公开，但是本领域技术人员应当理解，在不脱离其范围的情况下，可以进行各种改变并且可以用等同物代替其元件。此外，在不脱离本公开的基本范围的情况下，可以进行许多修改以使特定情况或材料适应本公开的教导。因此，本公开旨在不限于所公开的特定实施例，而是将包含落入其范围内的所有实施例。

Claims (10)

1.一种芯片级相干激光雷达系统，包括：
主振荡器，其集成在芯片上并配置成同时提供用于传输的信号和本机振荡器(LO)信号；
光束转向装置，其配置成将从用于传输的信号中获得的输出信号引导出系统；
芯片上的组合器，其配置成组合所述LO信号和由目标反射输出信号而产生的返回信号；以及
一个或多个光电探测器，其配置成获得所述LO信号和所述返回信号之间的干扰结果，以确定关于所述目标的信息。
2.根据权利要求1所述的系统，其中，所述主振荡器包括增益介质，其由电流源调制以提供调频连续波(FMCW)信号，所述电流源在所述芯片外，并且所述主振荡器还包括输出所述用于传输的信号的第一镜和输出所述LO信号的第二镜，并且所述系统还包括放大所述用于传输的信号以产生所述输出信号的放大器。
3.根据权利要求2所述的系统，其中，所述放大器是具有芯片外电流源的位于所述芯片上的半导体光放大器。
4.根据权利要求2所述的系统，其中，所述主振荡器是分布式布拉格反射器激光二极管(DBR-LD)。
5.根据权利要求1所述的系统，其中，所述一个或多个光电探测器是硅上锗(Si上Ge)光电探测器。
6.根据权利要求1所述的系统，其中，所述系统是单基地系统并且进一步包括循环器，或者所述系统是双基地的。
7.根据权利要求1所述的系统，其中，所述系统在车辆内或车辆上，并且配置成检测对象相对于所述车辆的位置和速度。
8.一种组装相干激光雷达系统的方法，所述方法包括：
在芯片上集成主振荡器和光放大器，以同时提供输出信号和本机振荡器(LO)信号，其中所述主振荡器包括增益介质、第一镜和第二镜；以及
布置第一电流源以供给所述增益介质和第二电流源以供给所述光放大器。
9.根据权利要求8所述的方法，还包括将所述第一镜布置成穿过从所述增益介质到所述光放大器的传输信号，并且将所述第二镜布置成穿过来自所述增益介质的所述LO信号。
10.根据权利要求8所述的方法，还包括配置所述第一电流源以调制所述增益介质的频率。
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US11002832B2 (en) 2021-05-11
CN109254296A (zh) 2019-01-22
US10976414B2 (en) 2021-04-13
US20190018114A1 (en) 2019-01-17
CN109254296B (zh) 2023-07-04
DE102019109649A1 (de) 2019-10-24

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