CN110376753A - A kind of high-performance polarization beam apparatus and its design method - Google Patents
A kind of high-performance polarization beam apparatus and its design method Download PDFInfo
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- CN110376753A CN110376753A CN201910596954.6A CN201910596954A CN110376753A CN 110376753 A CN110376753 A CN 110376753A CN 201910596954 A CN201910596954 A CN 201910596954A CN 110376753 A CN110376753 A CN 110376753A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/126—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind using polarisation effects
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/27—Optical coupling means with polarisation selective and adjusting means
- G02B6/2726—Optical coupling means with polarisation selective and adjusting means in or on light guides, e.g. polarisation means assembled in a light guide
- G02B6/2733—Light guides evanescently coupled to polarisation sensitive elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/1215—Splitter
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Abstract
The invention discloses a kind of high-performance polarization beam apparatus and its design methods.High-performance polarization beam apparatus includes n+1 cascade directional coupler, n bundling device and n phase shifter (n >=2).Wherein each directional coupler or bundling device include two S bending input waveguides, coupled zone and two S bending output waveguides, and coupled zone includes two parallel single mode straight wave guides, and two single mode straight wave guide intermediate parallels placed m root sub-wavelength structure (m >=2).Described two S bending input waveguide one end is connect with the single mode straight wave guide one end of coupled zone two respectively；The single mode straight wave guide other end of coupled zone two is connect with two S bending output waveguide one end respectively.The present invention can couple section length and phase shifter length by setting directional coupler, realize ultrahigh extinction ratio or the design of super large bandwidth polarization beam splitting in communication band.
Description
Technical field
The present invention relates to integrated opto-electronic device fields, and in particular to a kind of polarization beam apparatus and its design method.
Background technique
Polarization beam apparatus is applied to optical communication field, it is the key that different polarization signal in multiplexing reconciliation multiplex optical waveguide
Device, and the significant components of regulation high index-contrast material polarization related device.In the research of more than ten years in past, researcher
Propose a variety of polarization beam splitter structures, including multi-mode interference coupler, Mach-Zahnder interference device, grating coupler and asymmetric
Directional coupler etc., extinction ratio is lost in 20dB level, the roomy about 100nm of operating wavelength band in the report of better performances at present
1dB。
But for more High Extinction Ratio, for example it is greater than 35dB, only rests near central wavelength.In addition, light is logical in recent years
Believe the further utilization to frequency spectrum, on-chip optical interconnection message capacity is especially improved, using the coarse wavelength division multiplexing of more multichannel, to work
Make wavelength bandwidth and propose requirements at the higher level, polarization beam apparatus also must satisfy same service band, such as multiple in polarization and wavelength-division
Multiplexing technology is closed using upper.
Summary of the invention
For overcome the deficiencies in the prior art, for meet in specific band polarization beam splitting more High Extinction Ratio demand, such as
It is greater than 35dB in C-band extinction ratio；Or meet integrated optoelectronic system application in polarization beam apparatus insertion loss and extinction ratio
Under, realize bigger bandwidth of operation, for example be greater than 300nm.According to different application demands, corresponding polarization point can be designed
Beam device parameter.The object of the present invention is to provide a kind of polarization beam apparatus and its design methods.
The present invention proposes a kind of high-performance polarization beam apparatus, including n+1 cascade directional coupler, n bundling device and n
Phase shifter (n >=2)；Output end is connect with input terminal on next stage directional coupler D2 on directional coupler D1, and so on extremely
Output end is connect with input terminal on next stage directional coupler Dn+1 on directional coupler Dn；Output end and conjunction under coupler Dn+1
Input terminal connects on beam device Hn；Output end is connect with input terminal on bundling device Hn-1 on bundling device Hn, and so on to bundling device
The upper output end of H2 is connect with input terminal on bundling device H1；Output end is connect with the one end phase shifter Si under directional coupler Di, phase shift
The device Si other end connect (i=1,2 ..., n) with input terminal under bundling device Hi.
In further specific embodiment, each directional coupler or bundling device include two S bending inputs
Waveguide, coupled zone and two S are bent output waveguide, and coupled zone includes two parallel single mode straight wave guides, two single mode straight wave guides
Intermediate parallel placed m root sub-wavelength structure (m >=2).Described two S bending input waveguide one end respectively with coupled zone two
The connection of single mode straight wave guide one end；The single mode straight wave guide other end of coupled zone two is connect with two S bending output waveguide one end respectively.
In further specific embodiment, the coupled zone of each directional coupler or bundling device, including it is two wide
The same parallel single mode straight wave guide of the degree sub-wavelength structure parallel with the m root being placed among two single mode straight wave guides (m >=
2)；The width and spacing of sub-wavelength structure are equal, and the 3.5 of length long duct width more each than two single mode straight wave guides or so
Times.
In further specific embodiment, the directional coupler D1, directional coupler D2 are incremented to directional coupler
The n+1 grade cascade directional coupler of Dn+1 composition, their coupling section length are respectively equal to the TM polarised light under different wave length
Clap length.
In further specific embodiment, the polarization beam apparatus, bundling device H1, bundling device H2 are incremented to bundling device
For Hn as TM polarized light beam combining device, the structure of bundling device Hi and directional coupler Di are just the same (i=1,2 ..., n).
In further specific embodiment, by the way that the length of phase shifter Si is arranged, so that TM polarised light is from bundling device Hi
When upper input terminal and lower input terminal input, (i=1,2 ..., n) can be exported from upper output end.
In further specific embodiment, the S curved waveguide, coupled zone straight wave guide and sub-wavelength structure include high folding
Penetrate the rectangle sandwich layer, the top covering of low-refraction and the under-clad layer of low-refraction of rate.
In addition, the present invention provides a kind of design method of above-mentioned high-performance polarization beam apparatus: being exported on directional coupler D1
End connect with input terminal next stage directional coupler D2 on, and so on to output end on directional coupler Dn and next stage orientation
Input terminal connects on coupler Dn+1；Output end is connect with input terminal on bundling device Hn under coupler Dn+1；It is defeated on bundling device Hn
Outlet is connect with input terminal on bundling device Hn-1, and so on to the upper input terminal company of output end on bundling device H2 and bundling device H1
It connects；Output end is connect with the one end phase shifter Si under directional coupler Di, and the phase shifter Si other end connects with input terminal under bundling device Hi
Connect (i=1,2 ..., n).
It, will not in coupled zone when TE polarised light is inputted from input terminal on directional coupler D1 in further specific embodiment
Couple, directly exported from output end on the directional coupler, into the directional coupler D2 of next stage on input terminal, with this
Analogize until being exported from output end on directional coupler Dn+1.
In further specific embodiment, when TM polarised light is inputted from input terminal on directional coupler D1, specific wavelength
Under the long length for being equal to coupled zone of bat, the light of the wavelength will be coupled from lower output port to be exported, the light of other wavelength is from upper defeated
Exit port output, into the directional coupler D2 of next stage on input terminal, and so on, the TM polarised light of different wave length will never
With directional coupler Di under output end output (i=1,2 ..., n+1).
In further specific embodiment, the coupled zone of each directional coupler or bundling device is by two width one
The parallel single mode straight wave guide of the sample sub-wavelength structure composition parallel with the m root being placed among two single mode straight wave guides (m >=
2)；The width and spacing of sub-wavelength structure are equal, and the 3.5 of length long duct width more each than two single mode straight wave guides or so
Times.M root sub-wavelength structure is equivalent at anisotropic material, can prevent coupling of the TE polarised light between two single mode straight wave guides
It closes, while reinforcing coupling of the TM polarised light between two single mode straight wave guides.
In further specific embodiment, the directional coupler D1, directional coupler D2 are incremented to directional coupler
The n+1 grade cascade directional coupler of Dn+1 composition, their coupling section length are respectively equal to the TM polarised light under different wave length
Length is clapped, selected wavelength is determined by the service band range designed.
In further specific embodiment, the bundling device (H1), bundling device (H2) are incremented to bundling device (Hn) conduct
The structure of TM polarized light beam combining device, bundling device (Hi) and directional coupler (Di) is just the same (i=1,2 ..., n).
In further specific embodiment, by the way that the length of phase shifter Si is arranged, so that TM polarised light is from bundling device Hi
When upper input terminal and lower input terminal input, (i=1,2 ..., n) can be exported from upper output end.
In further specific embodiment, the S curved waveguide, coupled zone straight wave guide and sub-wavelength structure are reflected by height
The top covering an of low-refraction and the under-clad layer of a low-refraction are wrapped up outside the rectangle sandwich layer of rate.
Beneficial effects of the present invention:
(1) equivalent anisotropic material, single directional coupling is added in the present invention among directional coupler or bundling device coupled zone
Clutch or bundling device can more effectively separate TE and TM polarised light, and central wavelength extinction ratio is high；
(2) present invention utilizes cascade directional coupler, under the premise of keeping compared with low insertion loss, within the scope of specific band,
For example the extinction ratio (> 35dB) of superelevation may be implemented in C-band, polarization beam apparatus；
(3) present invention utilizes cascade directional coupler, meets integrated opto-electronic in polarization beam apparatus insertion loss and extinction ratio
Under system application, the bandwidth of operation (> 300nm) of super large is may be implemented in polarization beam apparatus；
Any technical solution of the invention is different surely all to realize the above beneficial effect.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the high-performance polarization beam apparatus in the present invention；
Fig. 2 is the structural schematic diagram of directional coupler or bundling device targeted in high-performance polarization beam apparatus in the present invention；
Fig. 3 is the cross-sectional view of directional coupler or bundling device coupled zone；
Fig. 4 is phase shifter structure schematic diagram targeted in high-performance polarization beam apparatus in the present invention；
Fig. 5 is that the specific embodiment of the invention takes three-stage cascade, i.e. the structural schematic diagram of polarization beam apparatus when n=2；
Fig. 6 is the light field that 1.55 μm of wavelength of TE polarised light transmits in 2 ultrahigh extinction ratio polarization beam apparatus of the embodiment of the present invention
Figure；
Fig. 7 is the light field that 1.55 μm of wavelength of TM polarised light transmits in 2 ultrahigh extinction ratio polarization beam apparatus of the embodiment of the present invention
Figure；
Fig. 8 is the light field figure that 1.6 μm of wavelength of TE polarised light transmits in 3 super large bandwidth polarization beam apparatus of the embodiment of the present invention；
Fig. 9 is the light field figure that 1.45 μm of wavelength of TM polarised light transmits in 3 super large bandwidth polarization beam apparatus of the embodiment of the present invention；
Figure 10 is the light field figure that 1.6 μm of wavelength of TM polarised light transmits in 3 super large bandwidth polarization beam apparatus of the embodiment of the present invention；
Figure 11 is the light field that 1.75 μm of wavelength of TM polarised light transmits in 3 super large bandwidth polarization beam apparatus of the embodiment of the present invention
Figure.
Specific embodiment
Below in conjunction with drawings and examples, the present invention is further elaborated.
Embodiment 1
As shown in Figure 1, the polarization beam apparatus include n+1 cascade directional coupler, n bundling device and n phase shifter (n >=
2)；Output end is connect with input terminal on next stage directional coupler D2 on directional coupler D1, and so on to directional coupler
The upper output end of Dn is connect with input terminal on next stage directional coupler Dn+1；Under coupler Dn+1 output end with it is defeated on bundling device Hn
Enter end connection；Output end is connect with input terminal on bundling device Hn-1 on bundling device Hn, and so on to output end on bundling device H2
It is connect with input terminal on bundling device H1；Output end is connect with the one end phase shifter Si under directional coupler Di, the phase shifter Si other end
Connect with input terminal under bundling device Hi (i=1,2 ..., n).
As shown in Fig. 2, directional coupler or bundling device targeted in the present invention are by a upper input S curved waveguide 1, one
S is exported under a lower input S curved waveguide 2, a pair of parallel single mode straight wave guide 3 and 4, upper output S curved waveguide 5, one
Curved waveguide 6 and the m sub-wavelength structures for being parallel to straight wave guide form (m >=2).Two input S curved waveguides respectively with two
Parallel single mode straight wave guide one end connection, two parallel single mode straight wave guide other ends are connect with two output S curved waveguides, sub-wavelength
Structure is located between two single mode straight wave guides, and entire directional coupler or bundling device structure are about horizontal and vertical center line pair
Claim.
As shown in Figure 2,3, the width of sub-wavelength structure is Wm, length, that is, coupled zone length of sub-wavelength structure is Lc, sub-
The spacing between spacing and sub-wavelength structure between wavelength structure and straight wave guide is G, the width of S curved waveguide and straight wave guide
It is Wwg, a length of L of S curved waveguide horizontal spans, longitudinal a length of W of spans, the length of straight wave guide 3 and 4 is than sub-wavelength structure
7 times of the small straight wave guide width of length, as Lc-7*Wwg.Its coupling of heretofore described different directional coupler or bundling device
Section length LcIt is different.
As shown in figure 4, phase shifter targeted in the present invention is by two sections of gradual change taper devices 10, straight wave guide 11 and gradual change taper
Device 12 forms, and gradual change taper device 10 is connect with straight wave guide 11, and 11 other end of straight wave guide is connect with gradual change taper device 12.Input and output
Duct width is Wwg, the length of gradual change taper device is Lt, 11 width of straight wave guide is Wp, length Lp。
As shown in figure 3, all waveguides of the present invention and sub-wavelength structure be using high-index material as sandwich layer, thickness
For H, also there is a low-refraction top covering 8 and a low-refraction under-clad layer 9.
The operation principle of the present invention is that the light of TE or TM polarization is inputted from input terminal on directional coupler D1, pass through adjusting
The width W of sub-wavelength structure 7mGreatly subtract with spacing G so that the evanescent wave of TE polarization is preferably confined near waveguide
Coupling between small two waveguides, TE polarised light will be exported from output end on directional coupler D1, into next stage directional couple
Input terminal on device D2, and so on, the light of TE polarization is finally exported from output end on directional coupler Dn+1.Sub-wavelength structure etc.
Anisotropy clad material is imitated into, for the light of TM polarization, more evanescent waves is had and is diffused into sub-wavelength structure region, is enhanced
It is coupled between two waveguides.When the bat that coupling section length meets specific wavelength is long, the light of the wavelength will be from directional coupler
Output end exports under D1, and the light or part light of other wavelength are exported from output end on directional coupler D1, into next stage
Input terminal on directional coupler D2, and so on to directional coupler Dn+1.In the wavelength band to be designed, when selection
When the bat for the TM polarised light that the length of the coupled zone directional coupler (D1, D2 ..., Dn+1) is respectively equal to different wave length is long, label
It is respectively L that directional coupler, which couples section length,c1, Lc2..., Lcn+1.Allow the TM polarised light of different wave length from directional coupler in this way
The lower output end output of (D1, D2 ..., Dn+1).The structure of bundling device (H1, H2 ..., Hn) with directional coupler (D1, D2 ...,
Dn structure) is identical, and the course of work is the inverse process of directional coupler.Such as on directional coupler Dn output end TM
Polarised light enters input terminal on bundling device Hn after directional coupler Dn+1, the TM polarised light of output end under directional coupler Dn
Enter input terminal under bundling device Hn by phase shifter, by adjusting phase shifter Sn length, so that input terminal is under on bundling device Hn
The supreme output end output of input terminal coherently combined, and so on adjust phase shifter Si at different levels, label phase shifter length is respectively
Lp1, Lp2..., Lpn+1, so that directional coupler Di output two-way TM polarised light bundling device Hi close beam output (i=1,2 ...,
N), the light of TM polarization is finally exported from output end on bundling device H1.
Embodiment 2
As Fig. 5 choose three cascade directional couplers D1 ~ D3, two bundling device H1 ~ H2 and two phase shifter S1 ~ S2 form it is inclined
Shake beam splitter, i.e. n=2.Wherein output end is connected with input terminal on directional coupler D2 by straight wave guide 13 on directional coupler D1
It connects, 13 length L of straight wave guidez1=12μm；The upper input terminal of output end and directional coupler D3 are bent by S on directional coupler D2
Waveguide 14 connects, a length of L of 14 horizontal span of S curved waveguides1=15 μm, longitudinal a length of W of spans1=2.09μm；Directional coupler D3
Lower output end is directly connect with input terminal on bundling device H2；Input terminal passes through straight on the upper output end and bundling device H1 of bundling device H2
Waveguide 15 connects, 15 length L of straight wave guidez4=12μm；Output end passes through phase shift with input terminal under bundling device H2 under directional coupler D2
Device S2 and straight wave guide 18 are sequentially connected and connect, and the length of phase shifter S2 is Lp2=45 μm, the length L of straight wave guide 18z2=3.3μm；Orientation
Output end passes through S curved waveguide 16, phase shifter S1, straight wave guide 17 and S bending wave with input terminal under bundling device H1 under coupler D1
It leads 19 and is sequentially connected and connect, the length of phase shifter S1 is Lp1=46 μm, the length L of straight wave guide 17z3=31.7 μm, 16 He of S curved waveguide
19 horizontal spans length is Ls2=30 μm, longitudinal a length of W of spans2=3.5μm.It is high to be realized within the scope of 1.52 μm ~ 1.58 mu m wavebands
For extinction ratio design, the length of directional coupler D1 ~ D3 coupler is respectively Lc1=19.5 μm, Lc2=20.7 μm, Lc3=21.3μ
M, bundling device H1 ~ H2 is identical as directional coupler D1 ~ D2 structure respectively, directional coupler and bundling device such as Fig. 2 mark other
Parameter is Wwg=0.55 μm, Wm=60nm, G=60nm, Ws=0.5 μm, Ls=8μm.It is silicon that entire polarization beam apparatus, which chooses core material,
Thickness H=220nm, upper and lower clad material are all silica.
By time-domain finite difference (Finite Difference Time Domain, FDTD) numerical simulation, 1.52
μm ~ 1.58 mu m wavebands within the scope of, when TE polarised light and TM polarised light input, the extinction ratio between two output ends is respectively greater than
35dB and 41.5dB, insertion loss are respectively smaller than 0.1dB and 0.36dB, and the same of smaller insertion loss is kept in 60nm wave band
When, possess higher extinction ratio.Fig. 6 show the design TE polarization and wavelength be 1.55 μm light input when, the electricity of optical transport
Field amplitude distribution situation.Fig. 7 show the design TM polarization and wavelength be 1.55 μm light input when, the electric field amplitude of optical transport
Distribution situation.
Embodiment 3
As Fig. 5 choose three cascade directional couplers D1 ~ D3, two bundling device H1 ~ H2 and two phase shifter S1 ~ S2 form it is inclined
Shake beam splitter, i.e. n=2.Wherein output end passes through directly with input terminal on directional coupler D2 on directional coupler D1
Waveguide 13 connects, 13 length L of straight wave guidez1=12μm；Output end and directional coupler D3's is upper defeated on directional coupler D2
Enter end to connect by S curved waveguide 14, a length of L of 14 horizontal span of S curved waveguides1=15 μm, longitudinal a length of W of spans1=2.09μ
m；Output end is directly connect with input terminal on bundling device H2 under directional coupler D3；The upper output end and bundling device H1 of bundling device H2
Upper input terminal is connected by straight wave guide 15,15 length L of straight wave guidez4=12μm；Under directional coupler D2 under output end and bundling device H2
Input terminal is sequentially connected and is connect by phase shifter S2 and straight wave guide 18, and the length of phase shifter S2 is Lp2=75 μm, the length of straight wave guide 18
Lz2=4.8μm；Output end passes through S curved waveguide 16, phase shifter S1, straight wave with input terminal under bundling device H1 under directional coupler D1
It leads 17 and S curved waveguide 19 and is sequentially connected and connect, the length of phase shifter S1 is Lp1=80 μm, the length L of straight wave guide 17z3=35.8 μm,
The horizontal span of S curved waveguide 16 and 19 length is Ls2=30 μm, longitudinal a length of W of spans2=3.5μm.With 1.4 μm ~ 1.8 mu m wavebands
For realizing super large bandwidth Design in range, the length of directional coupler D1 ~ D3 coupler is respectively Lc1=11.5 μm, Lc2=24μ
M, Lc3=52.8 μm, bundling device H1 ~ H2 is identical as directional coupler D1 ~ D2 structure respectively, directional coupler and bundling device such as Fig. 2
The other parameters of mark are Wwg=0.55 μm, Wm=60nm, G=60nm, Ws=0.5 μm, Ls=8μm.Entire polarization beam apparatus chooses core
Layer material is silicon, and thickness H=220nm, upper and lower clad material is all silica.
By time-domain finite difference (Finite Difference Time Domain, FDTD) numerical simulation, 1.42
μm ~ 1.765 mu m wavebands within the scope of, when TE polarised light and TM polarised light input, the extinction ratio between two output ends is respectively greater than
13dB and 14dB, insertion loss are respectively smaller than 1.5dB and 0.26dB, enter loss in 345nm super large band width interpolation and extinction ratio is full
While sufficient integrated optoelectronic system is applied, possess the bandwidth of operation of super large.Fig. 8 shows that the design is in TE polarization and wavelength
When 1.6 μm of light input, the electric field amplitude distribution situation of optical transport, the distribution map of the electric field under other wavelength is similar.Fig. 9 ~ Figure 11
Show the design TM polarization and wavelength be respectively 1.45 μm, 1.6 μm, 1.75 μm of light input when, the electric field amplitude of optical transport
Distribution situation.
Claims (10)
1. a kind of high-performance polarization beam apparatus, which is characterized in that the polarization beam apparatus includes n+1 cascade directional coupler, n
A bundling device and n phase shifter (n >=2)；Output end connects with input terminal on next stage directional coupler D2 on directional coupler D1
Connect, and so on connect to output end on directional coupler Dn with input terminal on next stage directional coupler Dn+1；Coupler Dn+
1 lower output end is connect with input terminal on bundling device Hn；Output end is connect with input terminal on bundling device Hn-1 on bundling device Hn, with this
Class is pushed into output end on bundling device H2 and connect with input terminal on bundling device H1；Output end and phase shifter Si mono- under directional coupler Di
End connection, the phase shifter Si other end connect (i=1,2 ..., n) with input terminal under bundling device Hi；
Each directional coupler or bundling device include that two S bending input waveguides, coupled zone and two S are bent output wave
It leads, coupled zone includes two parallel single mode straight wave guides, two single mode straight wave guide intermediate parallels placement m root sub-wavelength structure (m >=
2)；Described two S bending input waveguide one end is connect with the single mode straight wave guide one end of coupled zone two respectively；The list of coupled zone two
The mould straight wave guide other end is connect with two S bending output waveguide one end respectively；The phase shifter is connected by a gradual change taper device
A piece straight wave guide reconnects a gradual change taper device composition.
2. high-performance polarization beam apparatus according to claim 1, which is characterized in that each directional coupler closes beam
The coupled zone of device, including the m root two width the same parallel single mode straight wave guide and be placed among two single mode straight wave guides
Parallel sub-wavelength structure (m >=2)；The width and spacing of sub-wavelength structure are equal, and the length of sub-wavelength structure is coupled zone
Length be respectively equal to the TM polarised light under different wave length bat it is long, long duct width more each than two single mode straight wave guides or so
3.5 times.
3. high-performance polarization beam apparatus according to claim 1, which is characterized in that bundling device H1, the bundling device H2
To bundling device Hn as TM polarized light beam combining device, the structure of bundling device Hi and directional coupler Di it is just the same (i=1,2 ...,
N).
4. high-performance polarization beam apparatus according to claim 1, which is characterized in that the phase shifter Si is moved by setting
The length of phase device Si can be defeated from upper output end when so that TM polarised light being inputted from input terminal on bundling device Hi and lower input terminal
Out (i=1,2 ..., n).
5. high-performance polarization beam apparatus described in any one of -4 according to claim 1, which is characterized in that the S curved waveguide,
Coupled zone straight wave guide and sub-wavelength structure include under the top covering and low-refraction of the rectangle sandwich layer of high refractive index, low-refraction
Covering.
6. a kind of design method of high-performance polarization beam apparatus according to claim 1, which is characterized in that n+1 cascade
Directional coupler, n bundling device and n phase shifter (n >=2) form polarization beam apparatus, and output end is under on directional coupler D1
Input terminal connects on level-one directional coupler D2, and so on to output end on directional coupler Dn and next stage directional coupler
The upper input terminal connection of Dn+1；Output end is connect with input terminal on bundling device Hn under coupler Dn+1；On bundling device Hn output end with
On bundling device Hn-1 input terminal connect, and so on connect to output end on bundling device H2 with input terminal on bundling device H1；Orientation
Output end is connect with the one end phase shifter Si under coupler Di, the phase shifter Si other end connect with input terminal under bundling device Hi (i=1,
2 ..., n)；
When TE polarised light is inputted from input terminal on directional coupler D1, it will not be coupled in coupled zone, directly from the orientation coupling
Output end exports in clutch, the upper input terminal into the directional coupler D2 of next stage, and so on up to from directional coupler Dn+
Output end exports on 1；
When TM polarised light is inputted from input terminal on directional coupler D1, the bat length under specific wavelength is equal to the length of coupled zone, should
The light of wavelength will be coupled from lower output port and be exported, and the light of other wavelength is exported from upper output port, into the orientation of next stage
Input terminal on coupler D2, and so on, the TM polarised light of different wave length will be defeated from output end under different directional coupler Di
Out (i=1,2 ..., n+1).
7. design method according to claim 6, which is characterized in that the coupling of each directional coupler or bundling device
Area's sub-wavelength parallel with the m root being placed among two single mode straight wave guides by the same parallel single mode straight wave guide of two width
Structure composition (m >=2)；The width and spacing of sub-wavelength structure are equal, and the length of sub-wavelength structure is the length point of coupled zone
Not Deng Yu TM polarised light under different wave length bat it is long, 3.5 times of long duct width more each than two single mode straight wave guides or so；
M root sub-wavelength structure is equivalent at anisotropic material, can prevent coupling of the TE polarised light between two single mode straight wave guides, together
Coupling of the Shi Jiaqiang TM polarised light between two single mode straight wave guides.
8. design method according to claim 6, which is characterized in that bundling device H1, the bundling device H2 is incremented to conjunction
For beam device Hn as TM polarized light beam combining device, the structure of bundling device Hi and directional coupler Di are just the same (i=1,2 ..., n).
9. design method according to claim 6, which is characterized in that by the way that the length of phase shifter Si is arranged, so that TM is inclined
When the light that shakes is inputted from input terminal on bundling device Hi and lower input terminal, (i=1,2 ..., n) can be exported from upper output end.
10. design method according to claim 6, which is characterized in that the S curved waveguide, coupled zone straight wave guide and Asia
Wavelength structure is by wrapping up the top covering an of low-refraction and the lower packet of a low-refraction outside the rectangle sandwich layer of high refractive index
Layer.
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| CN111999957A (en) * | 2020-07-17 | 2020-11-27 | 宁波大学 | Polarization insensitive photosensitive switch based on assistance of germanium antimony tellurium compound phase change material |
| CN112731595A (en) * | 2020-10-15 | 2021-04-30 | 南京恒高光电研究院有限公司 | 2X2 optical fiber coupler capable of adjusting splitting ratio |
| CN112904489A (en) * | 2021-03-11 | 2021-06-04 | 中国农业大学 | Optical fiber polarization beam splitter |
| CN113009621A (en) * | 2019-12-19 | 2021-06-22 | 中兴光电子技术有限公司 | Directional coupler and beam splitter thereof |
| CN113985524A (en) * | 2021-12-27 | 2022-01-28 | 之江实验室 | Array waveguide grating based on metamaterial waveguide |
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| CN113009621A (en) * | 2019-12-19 | 2021-06-22 | 中兴光电子技术有限公司 | Directional coupler and beam splitter thereof |
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